US20170080542A1 - Polishing tool, polishing method and polishing apparatus - Google Patents

Polishing tool, polishing method and polishing apparatus Download PDF

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Publication number
US20170080542A1
US20170080542A1 US15/367,315 US201615367315A US2017080542A1 US 20170080542 A1 US20170080542 A1 US 20170080542A1 US 201615367315 A US201615367315 A US 201615367315A US 2017080542 A1 US2017080542 A1 US 2017080542A1
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United States
Prior art keywords
polishing
workpiece
polishing tool
polishing surface
grooves
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Abandoned
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US15/367,315
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English (en)
Inventor
Takashi Horikoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
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Assigned to OLYMPUS CORPORATION reassignment OLYMPUS CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HORIKOSHI, TAKASHI
Publication of US20170080542A1 publication Critical patent/US20170080542A1/en
Abandoned legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/04—Zonally-graded surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/14—Zonally-graded wheels; Composite wheels comprising different abrasives

Definitions

  • the disclosure relates to a polishing tool, a polishing method, and a polishing apparatus for surface finishing of optical elements such as lenses.
  • a polishing tool and a workpiece are made to slide along each other so that the object is polished by abrasive grains for polishing present at the interface.
  • a polishing tool is fabricated by making pellets of fixed abrasive grains adhere to a base plate to make a desired curved surface with the fixed abrasive grains or adhering polishing sheets made of polyurethane formed in a desired curved surface onto a base plate.
  • JP 2006-136959 A discloses a polishing tool in which the distances from the rotary axis of the polishing tool to the outer circumferential shape of the work surface on which a workpiece is polished are not equal along the rotational direction, which is a polishing tool that achieves high shape accuracy by using an existing polishing apparatus without any change.
  • a polishing tool includes a polishing surface having a spherical zone shape and having a plurality of non-contact portions provided from an inner edge to an outer edge of the polishing surface so as not to contact with a workpiece.
  • the plurality of non-contact portions is a plurality of grooves whose widths in a circumferential direction increase from the inner edge toward the outer edge.
  • a polishing method using the polishing tool includes: rotating the polishing tool about the central axis of rotation; and simultaneously with rotating the polishing tool, swinging relatively at least one of the workpiece and the polishing tool with a predetermined swing width, around a position where a line passing through a center of the workpiece and intersecting with the central axis of rotation passes through a center in a width direction of a spherical zone of the polishing surface, thereby polishing the workpiece.
  • a polishing apparatus includes: the polishing tool; a pressure applying unit configured to bring the workpiece into contact with the polishing surface of the polishing tool, thereby to apply pressure to the workpiece; a rotating unit configured to rotate the polishing tool about the central axis of rotation; and a swinging unit configured to swing relatively at least one of the workpiece and the polishing tool with a predetermined swing width, around a position where a line passing through a center of the workpiece and intersecting with the central axis of rotation passes through a center in a width direction of a spherical zone of the polishing surface, thereby to polish the workpiece.
  • a polishing tool includes a polishing surface having a spherical zone shape and having a plurality of non-contact portions provided from an inner edge to an outer edge of the polishing surface so as not to contact with a workpiece.
  • the plurality of non-contact portions is formed by a plurality of holes, and a density per unit area of the plurality of holes increases from the inner edge toward the outer edge.
  • a polishing method using the polishing tool includes: rotating the polishing tool about the central axis of rotation; and simultaneously with rotating the polishing tool, swinging relatively at least one of the workpiece and the polishing tool with a predetermined swing width, around a position where a line passing through a center of the workpiece and intersecting with the central axis of rotation passes through a center in a width direction of a spherical zone of the polishing surface, thereby polishing the workpiece.
  • a polishing apparatus includes: the polishing tool; a pressure applying unit configured to bring the workpiece into contact with the polishing surface of the polishing tool, thereby to apply pressure to the workpiece; a rotating unit configured to rotate the polishing tool about the central axis of rotation; and a swinging unit configured to swing relatively at least one of the workpiece and the polishing tool with a predetermined swing width, around a position where a line passing through a center of the workpiece and intersecting with the central axis of rotation passes through a center in a width direction of a spherical zone of the polishing surface, thereby to polish the workpiece.
  • FIG. 1 is a schematic view illustrating a configuration of a polishing apparatus according to a first embodiment of the present invention
  • FIG. 2 is a cross-sectional view of a polishing tool used in FIG. 1 ;
  • FIG. 3 is a top view of the polishing tool of FIG. 2 ;
  • FIG. 4 is a schematic view for explaining a method for polishing a lens using the polishing apparatus illustrated in FIG. 1 ;
  • FIG. 5 is a schematic view for explaining the method for polishing a lens using the polishing apparatus illustrated in FIG. 1 ;
  • FIG. 6 is a top view of a polishing tool according to a first modification of the present invention.
  • FIG. 7 is a top view of a polishing tool according to a second modification of the present invention.
  • FIG. 8 is a top view of a polishing tool according to a third modification of the present invention.
  • FIG. 9 is a top view of a polishing tool according to a fourth modification of the present invention.
  • FIG. 10 is a top view of a polishing tool according to a fifth modification of the present invention.
  • FIG. 11 is a top view of a polishing tool according to a sixth modification of the present invention.
  • FIG. 12 is a diagram explaining a structure of a polishing surface formed on a polishing tool according to a second embodiment.
  • FIG. 1 is a schematic view illustrating a configuration of a polishing apparatus according to a first embodiment of the present invention.
  • FIG. 2 is a cross-sectional view of a polishing tool used in FIG. 1
  • FIG. 3 is a top view of the polishing tool of FIG. 2 .
  • a polishing apparatus 100 according to the first embodiment includes a polishing tool 3 , a holder 2 for bringing a lens 1 as a workpiece, into contact with a polishing surface 30 b of the polishing tool 3 , a rotary motor 7 for rotating the polishing tool 3 , and a swing motor 6 for swinging the polishing tool 3 .
  • the polishing tool 3 has a base plate 30 a , and the polishing surface 30 b of a spherical zone shape.
  • the spherical zone shape refers to a shape of a surface of a spherical segment remaining between two parallel planes when a sphere is cut by the two parallel planes.
  • An opening 30 c is formed on a projection plane on which the polishing surface 30 b is projected and which is perpendicular to a central axis of rotation O of the polishing surface, on the inner edge side of the polishing surface 30 b , where the opening 30 c and the outer edge of the polishing surface 30 b are concentric about the central axis of rotation O.
  • the base plate 30 a is formed to have a predetermined radius of curvature, which is substantially an inverse of the shape of the lens 1 as a workpiece.
  • the polishing surface 30 b includes effective polishing portions 30 d that come into contact with the lens 1 and practically polish the lens 1 , and non-contact portions 30 e that do not come into contact with the lens 1 and do not directly contribute to polishing the lens 1 .
  • 12 polishing sheets having a substantially rectangular shape are attached to part of the surface of the base plate 30 a to form the effective polishing portions 30 d and the non-contact portions 30 e .
  • the effective polishing portions 30 d are regions of the polishing surface 30 b to which the polishing sheets are attached.
  • the effective polishing portions 30 d are shaded in FIG. 3 .
  • the non-contact portions 30 e are regions of the polishing surface 30 b where the polishing sheets are not attached so as to expose the surface of the base plate 30 a , and form grooves recessed from the effective polishing portions 30 d .
  • the non-contact portions 30 e will also be referred to as grooves 30 e .
  • the grooves 30 e are substantially fan-shaped on the projection plane on which the polishing surface 30 b is projected and which is perpendicular to the central axis of rotation O.
  • FIG. 2 is a cross-section of the polishing tool 3 along the groove 30 e.
  • the polishing tool 3 is connected to an upper end of a tool shaft 4 , and the tool shaft 4 is integrally attached to a spindle 5 .
  • the spindle 5 is connected to the rotary motor 7 , and the rotary motor 7 is fixed to a lower shaft base plate 14 that rotatably supports the spindle 5 .
  • the rotary motor 7 is a rotating unit for rotating the polishing tool 3 about the axis of the rotary shaft under the control of a controller for controlling the polishing apparatus 100 .
  • the lower shaft base plate 14 has an upper portion extending through a swing member 9 , and is mounted in such a manner that the outer surface of the upper portion is integrated with the swing member 9 .
  • the swing motor 6 is fixed to the lower shaft base plate 14 in such a manner that the rotary axis of the swing motor 6 is perpendicular to that of the rotary motor 7 .
  • the swing motor 6 swings the swing member 9 under the control of the controller.
  • the rotating speed and the number or rotations of the swing motor 6 can be freely controlled.
  • the swing motor 6 and the swing member 9 constitute a swinging unit.
  • the swing member 9 has a boat shape with a lower surface supported by a swing member receiving portion 10 fixed to a main body of the polishing apparatus 100 .
  • the swing member receiving portion 10 has a surface facing the swing member 9 having a concave shape corresponding to the bottom surface of the boat shape to swingably support the swing member 9 , and forms an opening portion for eliminating interference with the lower shaft base plate 14 while the swing member 9 swings.
  • a gear 6 a is attached to a drive shaft of the swing motor 6 , and meshes with an arc-shaped guide 8 .
  • the guide 8 is fixed to a polishing apparatus main body 20 , so that the gear 6 a is rotated by the swing motor 6 while moving along the guide 8 , which makes the lower shaft base plate 14 swing and makes the swing member 9 , the polishing tool 3 , and so on swing in a reciprocating manner.
  • the lens 1 held by attachment to an attachment plate 12 is placed above the polishing tool 3 .
  • the lens 1 has a lens surface 1 a to be processed having a convex spherical shape and facing the polishing tool 3 , and the attachment plate 12 is held in the inside of the holder 2 , which is a holding tool, so that the lens 1 is rotatably supported relative to the holder 2 .
  • the attachment plate 12 and the holder 2 are illustrated in a separated state in FIG. 1 , the attachment plate 12 and the holder 2 are assembled with the polishing apparatus main body 20 therebetween.
  • the holder 2 is coupled to a lower end side of a work shaft 11 , and the work shaft 11 is moved vertically by a rod of a pressure applying air cylinder 16 coupled to an upper end of the work shaft 11 .
  • a polishing solution supplying part 13 for supplying polishing solution to the polishing surface 30 b is provided near the polishing tool 3 .
  • the pressure applying air cylinder 16 is attached to a first attachment plate 19 a fixed to a top surface of a back plate 19 , and makes the lens surface 1 a to be processed in contact with the polishing surface 30 b of the polishing tool 3 to apply pressure thereto during processing of the lens 1 after the lens 1 is moved downward toward the polishing tool 3 under the control of the controller for controlling the polishing apparatus 100 .
  • the first attachment plate 19 a and the back plate 19 do not move vertically during processing of the lens 1 .
  • the central axis of the work shaft 11 is positioned on an axis passing through the center of curvature of the polishing surface 30 b of the polishing tool 3 .
  • a coarse adjustment air cylinder 18 is fixed to the polishing apparatus main body 20 , and has a rod coupled to a second attachment plate 19 b fixed to a front surface of the back plate 19 .
  • the coarse adjustment air cylinder 18 vertically moves the back plate 19 , the pressure applying air cylinder 16 , and the like.
  • the back plate 19 , the pressure applying air cylinder 16 , and the like are moved downward, the work shaft 11 and the holder 2 pass through a hole 20 a formed in the polishing apparatus main body 20 to make the lens 1 face the polishing tool 3 .
  • the pressure applying air cylinder 16 applies pressure in a direction in which the holder 2 and the like supporting the lens 1 are moved downward, that is, vertically downward.
  • Linear scales 17 which are measuring devices or position detectors used as a pair on a movable side and a fixed side, are disposed on the work shaft 11 and the back plate 19 below the pressure applying air cylinder 16 .
  • the linear scale 17 detects the amount by which the work shaft 11 is moved by the pressure applying air cylinder 16 , and displays the movement amount on a display or the like.
  • a stopper 15 capable of adjusting vertical position is fixed to the back plate 19 .
  • the stopper 15 is disposed so that, when the back plate 19 , that is, the entire upper part of the holder 2 and the like supporting the lens 1 via the back plate 19 is moved downward by the coarse adjustment air cylinder 18 , the stopper 15 on the back plate 19 side abuts a stopper 21 on the main body side fixed to the polishing apparatus main body 20 .
  • FIGS. 4 and 5 are schematic views for explaining the method for polishing the lens 1 using the polishing apparatus 100 according to the first embodiment.
  • polishing of the lens 1 with the polishing apparatus 100 is performed by swinging the polishing tool 3 around a swing center position illustrated in FIG. 4 with a certain amplitude while rotating the polishing tool 3 about a central axis of rotation O by the rotary motor 7 .
  • the swing center position is a position where a line L passing through the center C of the lens 1 and intersecting with the central axis of rotation O passes through the center B in the width direction of the spherical zone of the polishing surface 30 b as illustrated in FIG. 4 .
  • the lens 1 is rotated with the polishing tool 3 in the same direction as the rotating direction by a frictional force caused by the rotation.
  • the lens 1 is polished by the polishing surface 30 b having the spherical zone shape where the circumferential speed at the inner diameter D in , which is an inner edge side of the polishing surface 30 b , is different from the circumferential speed at an outer diameter D out , which is an outer edge side thereof.
  • the applicant has found that, when the difference in the circumferential speed between the inner edge side and the outer edge side of the polishing surface 30 b is large, a surface irregularity such as a central rise where the central portion of the processed lens surface 1 a of the lens 1 is higher than that of a reference lens as a reference, or a central drop where the central portion is lower than that of the reference lens occurs, which lowers the surface accuracy.
  • the polishing surface 30 b has a spherical zone shape so that a circumferential speed ratio Vo/Vi of the circumferential speed Vo on the outer edge side to the circumferential speed Vi on the inner edge side is smaller than that of a conventional polishing tool, that is, a polishing tool having a spherical surface without the opening 30 c .
  • the polishing surface 30 b has the grooves 30 e such that an effective circumferential speed ratio is approximately constant regardless of the diameter, at an arbitrary diameter on the projection plane on which the polishing surface 30 b is projected and which is perpendicular to the central axis of rotation O.
  • the effective circumferential speed ratio refers to a ratio between a length per unit time where the lens 1 is in contact with the effective polishing portions 30 d at an arbitrary diameter of the polishing surface 30 b (hereinafter referred to as an effective circumferential speed) and the effective circumferential speed at the inner edge of the polishing surface 30 b .
  • the effective circumferential speed ratio corresponds to a ratio of an effective circumferential length at an arbitrary diameter of the polishing surface 30 b to an effective circumferential length at the inner edge of the polishing surface 30 b .
  • the effective circumferential length refers to a total of the circumferential lengths of the effective polishing portions 30 d of the polishing surface 30 b.
  • the effective circumferential speed ratio ⁇ at the outer edge of the polishing surface 30 b is 6.0 or smaller, preferably 4.0 or smaller, and more preferably 3.0 or smaller.
  • the effective circumferential speed ratio ⁇ is most preferably 1.0, and may be smaller than 1.0.
  • the effective circumferential speed ratio ⁇ may be 0.7 or higher.
  • a tolerance range of the effective circumferential speed ratio ⁇ is preferably within ⁇ 30%, and more preferably ⁇ 10%, in view of the accuracy of the finishing shape of the polishing surface 30 b , the posture stability of the lens 1 during processing of the lens 1 , the surface accuracy after processing, and the like.
  • the effective circumferential speed ratio ⁇ between the inner edge and the outer edge of the polishing surface 30 b is ⁇ 1.0
  • the effective circumferential speed ratio ⁇ at an arbitrary diameter preferably changes as linearly as possible from the inner edge toward the outer edge.
  • the effective circumferential speed ratio ⁇ at the outer edge of the polishing surface 30 b is given by the following expression (1) using the effective circumferential length L in at the inner edge and the effective circumferential length L out at the outer edge of the polishing surface 30 b.
  • the effective circumferential length L in at the inner edge is given by the following expression (2) using the groove width g of the grooves 30 e and the number m of the grooves 30 e .
  • Li n ⁇ ⁇ D i ⁇ ⁇ n - D i ⁇ ⁇ n ⁇ m 2 ⁇ arcsin ⁇ ( g D i ⁇ ⁇ n ) ( 2 )
  • the effective circumferential speed ratio ⁇ is ⁇ 1.0
  • the effective circumferential speed ratio ⁇ is changed linearly from the inner edge toward the outer edge in the radial direction of the polishing surface 30 b as described above.
  • the effective circumferential speed ratio ⁇ (D) at an arbitrary diameter D (D in ⁇ D ⁇ D out ) is given by the following expression (3) using the inner diameter D in and the outer diameter D out of polishing surface 30 b .
  • ⁇ ⁇ ( D ) ( ⁇ - 1 ) ⁇ ( D - D i ⁇ ⁇ n ) D out - D i ⁇ ⁇ n + 1 ( 3 )
  • a line passing through the center in the circumferential direction of an arbitrary groove 30 e at the inner edge is referred to as a reference line L 1
  • a line or a curve passing through the center in the circumferential direction of another groove 30 e other than the arbitrary groove 30 e is referred to as a center line L 2
  • an angle between the reference line L 1 and a line for connecting a point P 1 where the center line L 2 passes through a circumference at the arbitrary diameter D and the central axis of rotation O of the polishing surface 30 b is denoted by ⁇ .
  • the line connecting the point P 1 and the central axis of rotation O corresponds to the center line L 2 itself in FIG. 3 .
  • the angle ⁇ is given by the following expression (4).
  • a function f(D) is a function expressing the angle between the center line L 2 and a radius passing through the P 1 .
  • f(D) 0
  • the center line L 2 is a line passing through the central axis of rotation O.
  • the function f(D) is varied with the diameter D, the center line L 2 is an arbitrary curve.
  • an angle ⁇ between a radius passing through each of end points P 2 and P 3 on the circumference with the diameter D and the reference line L 1 is given by the following expression (5).
  • the angle ⁇ in the expression (5) is a half-angle of the central angle of a sector with an arc of the groove 30 e on the circumference with the diameter D, that is, the central angle of an arc connecting the points P 1 and P 2 or an arc connecting the points P 1 and P 3 , and is given by the following expression (6).
  • the shape of the grooves 30 e on the polishing surface 30 b can be designed in such a manner that the parameters including the inner diameter D in and the outer diameter D out of the polishing surface 30 b , the number m of the grooves 30 e , the groove width g at the inner edge, the effective circumferential speed ratio ⁇ at the outer edge, and the function f(D) are set, and coordinates of the end points P 2 and P 3 are sequentially calculated.
  • the shape of the polishing surface is a spherical zone shape so that the difference in the circumferential length between the inner edge and the outer is made small, and grooves that are not brought into contact with a workpiece are formed on the polishing surface.
  • the effective circumferential length ratio at the outer edge of the polishing surface can be made smaller, and variation in the effective circumferential length ratio can be reduced regardless of the diameter. Consequently, occurrence of a surface irregularity on the polishing surface can be reduced, and the surface accuracy of a workpiece can be increased.
  • the effective polishing portions 30 d and the grooves 30 e are formed by attaching polishing sheets shaped into a predetermined shape onto the surface of the base plate 30 a in the first embodiment
  • the grooves 30 e may alternatively be formed by fixing abrasive grains for polishing on the base plate with resin or the like, forming the polishing surface 30 b of a spherical zone shape having a desired radius of curvature by cutting, and then cutting out regions of the polishing surface 30 b other than the effective polishing portions 30 d.
  • the holder 2 is not particularly moved but only the lens 1 is pressed against the polishing tool 3 and the polishing tool 3 side is rotated and swung during polishing of the lens 1 in the first embodiment, either side may be moved as long as the lens 1 and the polishing tool 3 can be relatively moved.
  • the polishing tool 3 may be rotated and the lens 1 and the holder 2 side may be swung.
  • the polishing tool 3 may be rotated and both the lens 1 , the holder 2 and the polishing tool 3 may be swung relatively.
  • FIG. 6 is a top view of a polishing tool according to the first modification.
  • the grooves 31 b are substantially fan-shaped on the projection plane obtained by projecting the polishing surface 31 having the spherical zone shape onto the plane perpendicular to the central axis of rotation O of the polishing surface 31 .
  • the effective polishing portions 31 a are shaded in FIG. 6 .
  • the number of grooves 31 b formed on the polishing surface 31 is not limited, the lens 1 needs to be prevented from falling into the groove 31 b during processing of the lens 1 in the polishing apparatus 100 illustrated in FIG. 1 .
  • a required condition is that part of a sphere (the hatched part, for example) of the lens 1 defined by an arbitrary line passing through the center axis C of the lens 1 remains on an effective polishing portion 31 a .
  • the number of grooves may be at least six.
  • FIG. 7 is a top view of a polishing tool according to the second modification.
  • the grooves 32 b are substantially fan-shaped on the projection plane on which the polishing surface 32 having the spherical zone shape is projected and which is perpendicular to the central axis of rotation O of the polishing surface 32 .
  • the effective polishing portions 32 a are shaded in FIG. 7 .
  • FIG. 8 is a top view of a polishing tool according to the third modification.
  • a polishing surface 33 illustrated in FIG. 8 includes effective polishing portions 33 a , grooves 33 b extending in the circumferential direction, and grooves 33 c formed in the radial direction.
  • the polishing surface 33 is obtained by forming the grooves 33 c using the same parameters as those of the second modification, and forming the grooves 33 b in the circumferential direction so that the effective polishing portions 33 a forming an alternate strip pattern in adjacent regions other than the grooves 33 c are left.
  • the effective polishing portions 33 a are shaded in FIG. 8 .
  • grooves 33 b facilitates flow out of slurry during processing of the lens 1 . Furthermore, since the grooves 33 b are formed to have an alternative strip pattern in adjacent regions on the same circumference, the effective polishing portions 33 a remaining on the circumference at an arbitrary diameter, that is, the effective circumferential length, can be made uniform regardless of the diameter. Furthermore, as a result of formation of the grooves 33 b , the lens 1 is prevented from falling into the groove 33 b or 33 c during processing of the lens 1 while increasing the total area of the grooves 33 b and 33 c on the polishing surface 33 .
  • FIG. 9 is a top view of a polishing tool according to the fourth modification.
  • spiral grooves 34 b each having a straight center line L 2 in the circumferential direction are formed.
  • the effective polishing portions 34 a are shaded in FIG. 9 .
  • grooves extending in the circumferential direction may be provided in the effective polishing portions 34 a of the fourth modification.
  • FIG. 10 is a top view of a polishing tool according to the fifth modification.
  • spiral grooves 35 b each having an arc-like center line L 2 in the circumferential direction are formed.
  • the effective polishing portions 35 a are shaded in FIG. 10 .
  • grooves extending in the circumferential direction may also be provided in the effective polishing portions 35 a of the fifth modification.
  • FIG. 11 is a top view of a polishing tool according to the sixth modification.
  • the coefficient j is designed to be constant such that f(D) 14.3 at the inflection point.
  • the center line L 2 in the circumferential direction of the groove 36 b is not limited to a straight line or an arc-like line, but may be any curve having an inflection point.
  • the effective polishing portions 36 a are shaded in FIG. 11 .
  • grooves extending in the circumferential direction may also be provided in the effective polishing portions 36 a of the sixth modification.
  • FIG. 12 is a diagram explaining a structure of a polishing surface formed on a polishing tool according to the second embodiment.
  • the polishing tool according to the second embodiment has a polishing surface 37 illustrated in (a) of FIG. 12 .
  • the polishing surface 37 has a spherical zone shape, and an opening 38 is formed on a projection plane on which the polishing surface 37 is projected and which is perpendicular to a central axis of rotation O of the polishing surface 37 on the inner side of the polishing surface 37 , where the opening 38 and the outer edge of the polishing surface 37 are concentric about the central axis of rotation O.
  • the structure of the polishing tool and the structure of the whole polishing apparatus according to the second embodiment other than the polishing surface 37 are the same as those of the first embodiment illustrated in FIGS. 1 and 2 .
  • the polishing surface 37 includes effective polishing portions 37 a that come into contact with the lens 1 and practically polish the lens 1 , and non-contact portions 37 b that do not come into contact with the lens 1 and do not directly contribute to polishing the lens 1 .
  • the effective polishing portions 37 a are formed by attaching polishing sheets, which are obtained by fixing abrasive grains onto the surfaces of viscoelastic sheets made of polyurethane or the like, onto the base plate 30 a illustrated in FIG. 2 .
  • the effective polishing portions 37 a are shaded in FIG. 12 .
  • the respective non-contact portions 37 b are hole portions formed in the polishing sheets where the surface of the base plate 30 a is exposed.
  • the non-contact portions 37 b have a predetermined shape such as a circular shape, a rectangular shape, a polygonal shape, or a star-like shape.
  • One non-contact portion 37 b may be continuous with another adjacent non-contact portion 37 b or may be separate from an adjacent non-contact portion 37 b.
  • the non-contact portions 37 b are formed so that the hole density is increased from the inner edge side toward the outer edge side of the polishing surface 37 .
  • (b) in FIG. 12 is a graph showing a distribution of the hole density in the non-contact portions 37 b in the radial direction (x direction) of the polishing surface 37 .
  • the non-contact portions 37 b are arranged so that the hole density increases approximately linearly from the inner edge side toward the outer edge side.
  • the effective circumferential speed ratio at the outer edge of the polishing surface 37 is reduced, and variation in the effective circumferential speed ratio at an arbitrary diameter is reduced. Consequently, occurrence of a surface irregularity on the polishing surface is reduced and the surface accuracy of a workpiece increased.
  • the non-contact portions 37 b may alternatively be formed by fixing abrasive grains for polishing on the base plate with resin or the like, forming the polishing surface 37 of a spherical zone shape having a desired radius of curvature by cutting, and then performing cutting out on the polishing surface 37 .

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
US15/367,315 2014-06-10 2016-12-02 Polishing tool, polishing method and polishing apparatus Abandoned US20170080542A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014-119901 2014-06-10
JP2014119901 2014-06-10
PCT/JP2015/063206 WO2015190189A1 (fr) 2014-06-10 2015-05-07 Outil de meulage, procédé de meulage et dispositif de meulage

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Application Number Title Priority Date Filing Date
PCT/JP2015/063206 Continuation WO2015190189A1 (fr) 2014-06-10 2015-05-07 Outil de meulage, procédé de meulage et dispositif de meulage

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US20170080542A1 true US20170080542A1 (en) 2017-03-23

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US (1) US20170080542A1 (fr)
JP (1) JP6211188B2 (fr)
CN (1) CN106457525A (fr)
DE (1) DE112015002769T5 (fr)
WO (1) WO2015190189A1 (fr)

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US10967475B2 (en) * 2013-03-19 2021-04-06 XI'AN JIAOTONG UNIVERSITY et al. Polishing method for optical elements
US20190126425A1 (en) * 2016-06-06 2019-05-02 Schneider Gmbh & Co. Kg Tool, device, and method for polishing lenses
US11890712B2 (en) * 2016-06-06 2024-02-06 Schneider Gmbh & Co. Kg Tool, device, and method for polishing lenses

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CN106457525A (zh) 2017-02-22
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JP6211188B2 (ja) 2017-10-11

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