US20090068011A1 - Vacuum pump arrangement - Google Patents

Vacuum pump arrangement Download PDF

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Publication number
US20090068011A1
US20090068011A1 US11/919,963 US91996306A US2009068011A1 US 20090068011 A1 US20090068011 A1 US 20090068011A1 US 91996306 A US91996306 A US 91996306A US 2009068011 A1 US2009068011 A1 US 2009068011A1
Authority
US
United States
Prior art keywords
pump
vacuum
housing
vacuum pump
retaining element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/919,963
Other languages
English (en)
Inventor
Dirk Kalisch
Robert Stolle
Heinz-Dieter Odendahl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Assigned to OERLIKON LEYBOLD VACUUM GMBH reassignment OERLIKON LEYBOLD VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KALISCH, DIRK, ODENDAHL, HEINZ-DIETER, STOLLE, ROBERT
Publication of US20090068011A1 publication Critical patent/US20090068011A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention is directed to a vacuum pump arrangement, in particular a turbomolecular pump arrangement.
  • Vacuum pumps such as turbomolecular pumps, for example, are connected to a vacuum chamber housing to generate a vacuum in a vacuum chamber.
  • the connection is achieved with a pump flange connected to the pump housing and with corresponding retaining elements such as so-called claws, for example.
  • These claws are connected with the pump flange, a lug of the claw engaging a groove or flute of the pump flange, for example.
  • the claws are fastened to the vacuum chamber housing by means of a screw. Since such vacuum pumps weigh up to 65 kg and the rotor situated in the pump housing can reach numbers of rotations in the range from 30,000 to 100,000 rpm, safety must meet with high demands.
  • the present vacuum pump arrangement which is a turbomolecular pump arrangement, in particular, especially comprises a pump of great weight and/or high speeds of rotation of the rotor.
  • the vacuum pump arrangement has a pump housing in which a rotor and a stator are arranged. Connected to the pump housing is a pump flange that may also be configured directly as a part of the housing. Retaining elements are provided for fastening the pump housing to a vacuum chamber housing. According to the invention, at least one retaining element has an anti-twist means cooperating with the vacuum chamber housing.
  • Providing such an anti-twist means ensures that in case of a damage, especially upon an instantaneous blocking of the rotor, no twisting of the retaining elements such as the claws will occur due to the occurring high moments. This especially avoids a loosening of the connection between the pump flange and the vacuum chamber housing so that the safety is enhanced. Further, the risk of a damage to the vacuum chamber housing in the region of the fastening of the retaining element is reduced.
  • At least one retaining element with a present anti-twist means is provided.
  • two, especially oppositely arranged retaining elements with an anti-twist means are provided.
  • the present retaining element with an anti-twist means can be combined with conventional single retaining elements.
  • a plurality of retaining elements with an anti-twist means are provided, especially (together) with at least three retaining elements distributed along the circumference of the pump flange.
  • the pump flange is preferably of annular shape.
  • the retaining element may have a pin preferably engaging a recess or bore provided at the pump chamber housing. Additionally, the retaining element preferably has a fastening element, such as a screw.
  • a preferred embodiment of the present retaining element thus comprises an anti-twist means, e.g. in the form of a pin engaging a recess, and a fastening element screwed into a thread provided in the vacuum chamber housing.
  • the anti-twist means is also designed as a fasting element, especially a screw, so that the present retaining element has at least two, especially identically designed fastening elements. Since both fastening elements engage recesses, such as threaded bores, in the vacuum chamber housing, both fastening elements serve both fastening and anti-twist purposes.
  • the pump flange connected to the pump housing or formed as a part of the pump housing preferably comprises an annular groove.
  • This groove may be discontinuous, but preferably extends along the entire circumference.
  • the retaining elements preferably have a projection, especially in the shape of a segment of an annulus, engaging the groove. This substantially facilitates the mounting of the pump since the position of the pump housing relative to the vacuum chamber housing can be varied without having to change the position of the retaining elements.
  • the radius of the groove substantially corresponds to the radius of the projections.
  • this has the advantage that upon the occurrence of a very high moment in a case of damage the pump housing can rotate with respect to the retaining elements as soon as the forces acting due to the existing moment between the pump flange and the projections are greater than the frictional forces in this region.
  • FIG. 1 is a schematic sectional view of a vacuum pump arrangement
  • FIG. 2 is a schematic perspective view of a pump housing
  • FIG. 3 is a schematic perspective view of a retaining element of the present invention.
  • FIG. 4 is a schematic top plan view on a part of a vacuum pump arrangement with a retaining element according to prior art in a case of damage.
  • a vacuum pump arrangement comprises a pump housing 10 in which a rotor 14 rotating about a longitudinal axis 12 is arranged. Stator blades 16 connected to the housing 10 are disposed between the individual rotor blades 14 .
  • the rotor 14 is rigidly connected to a drive shaft 20 through a connecting element 18 .
  • the stator 16 is correspondingly rigidly connected to the housing 10 through a connecting element 22 .
  • the housing is fastened to a vacuum chamber housing 26 in the region of an opening 28 .
  • the housing has a pump flange 30 which in the embodiment illustrated is annular.
  • the pump flange 30 has a L-shaped cross section so that an annular groove 32 is formed.
  • the pump housing 10 is fastened to the vacuum chamber housing 26 by the flange 30 .
  • the retaining element 34 in the embodiment illustrated has a projection 36 , in particular in the shape of a ring segment, engaging the groove 32 of the pump flange 30 .
  • a screw 38 is provided for fastening the retaining element 34 to the vacuum chamber housing.
  • the present retaining element 34 ( FIG. 2 ) comprises an anti-twist means 40 , both the fastening element 38 and the anti-twist means 40 being designed as a screw in the embodiment shown.
  • the anti-twist means 40 engages a recess 42 , which, in the embodiment illustrated, is a threaded bore in the vacuum chamber housing 26 .
  • the present retaining elements 34 have an anti-twist means 40 besides the fastening element 38 , it is ensured in the event of a damage that no twisting of the fastening elements will occur. Despite the high moments prevailing in case of a damage, such as in a blocking of the rotor 14 , which are transferred from the rotor 14 to the pump housing 10 via the stator 16 , the retaining elements 34 are not twisted as could happen with corresponding single retaining elements 44 ( FIG. 2 ).
  • the perspective view of the pump housing 10 in FIG. 2 is a view to the flange side of the pump housing with four retaining elements 34 of the present invention and four single retaining elements 44 being provided on the annular flange 30 .
  • the present retaining elements 34 each have an annular projection 36 engaging the groove 32 of the pump flange ( FIG. 1 ). Further, two screws 38 , 40 are provided per retaining element 34 that serve as a fastening element and an anti-twist means.
  • the screws 38 , 40 are passed through throughbores 46 provided in the retaining element 34 .
  • FIG. 4 shows a single retaining element 44 .
  • the single retaining element 44 is fastened in the vacuum chamber housing 10 by a screw 48 . Due to the high moments occurring in the event of a damage, the pump housing 10 is rotated in the direction of the arrow 50 . Thereby, a single retaining element 4 is twisted counterclockwise. This can cause damage to the flange 30 as well as to the vacuum chamber housing 26 .

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
US11/919,963 2005-05-07 2006-05-02 Vacuum pump arrangement Abandoned US20090068011A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005020904A DE102005020904A1 (de) 2005-05-07 2005-05-07 Vakuum-Pumpenanordnung
DE102005020904.1 2005-05-07
PCT/EP2006/061977 WO2006120132A1 (de) 2005-05-07 2006-05-02 Vakuum-pumpenanordnung

Publications (1)

Publication Number Publication Date
US20090068011A1 true US20090068011A1 (en) 2009-03-12

Family

ID=36593111

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/919,963 Abandoned US20090068011A1 (en) 2005-05-07 2006-05-02 Vacuum pump arrangement

Country Status (9)

Country Link
US (1) US20090068011A1 (zh)
EP (1) EP1880111B1 (zh)
JP (1) JP2009500549A (zh)
CN (1) CN100575711C (zh)
AT (1) ATE453802T1 (zh)
DE (2) DE102005020904A1 (zh)
HK (1) HK1109440A1 (zh)
TW (1) TWI390112B (zh)
WO (1) WO2006120132A1 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070104598A1 (en) * 2005-11-10 2007-05-10 Alcatel Fixing device for a vacuum pump
WO2020120949A1 (en) * 2018-12-13 2020-06-18 Edwards Limited Vacuum pump
US11143351B2 (en) 2015-12-23 2021-10-12 Leybold Gmbh Connection device

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006058672B4 (de) * 2006-12-13 2016-09-15 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe
EP2017480A1 (en) * 2007-06-15 2009-01-21 VARIAN S.p.A. Split joint for vacuum pumps and method for obtaining said joint
DE102008028199A1 (de) * 2008-06-12 2009-12-17 Pfeiffer Vacuum Gmbh Verbindungselement
DE102009013244A1 (de) * 2009-03-14 2010-09-16 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe
GB201314841D0 (en) 2013-08-20 2013-10-02 Thermo Fisher Scient Bremen Multiple port vacuum pump system
DE102013222167B4 (de) * 2013-10-31 2024-07-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014102680A1 (de) 2014-02-28 2015-09-03 Pfeiffer Vacuum Gmbh Vakuumpumpenanordnung
EP3059450B1 (de) * 2015-02-17 2018-07-18 Pfeiffer Vacuum Gmbh Befestigungsvorrichtung für Vakuumpumpe
EP3067565B1 (de) * 2015-03-13 2020-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6507885B2 (ja) * 2015-06-29 2019-05-08 株式会社島津製作所 真空ポンプ
EP3171030B1 (de) * 2015-11-19 2020-01-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN107461556B (zh) 2016-06-03 2024-05-03 开利公司 法兰连接组件及其装卸方法、管路连接装置及冷却器机组

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1062438A (en) * 1912-12-30 1913-05-20 S R Dresser Mfg Co Wrought-metal ring for collar-clamps, &c.
US1637944A (en) * 1925-07-22 1927-08-02 Morgan Construction Co Coupling device
US2443187A (en) * 1944-08-15 1948-06-15 James C Hobbs Pipe coupling
US3165341A (en) * 1962-07-10 1965-01-12 Star Tank And Filter Corp Clamping devices for mated flanges
US3761114A (en) * 1971-08-30 1973-09-25 Victaulic Co Ltd Pipe to flange couplings
US3850455A (en) * 1972-11-17 1974-11-26 Caterpillar Tractor Co Strain-limiting connector
US3942141A (en) * 1972-05-26 1976-03-02 Licentia Patent-Verwaltungs-G.M.B.H. Flange
US4699353A (en) * 1986-12-31 1987-10-13 Weyer Paul P Rotary valve actuator
US4779900A (en) * 1987-02-11 1988-10-25 Ebaa Iron Inc. Segmented pipe joint retainer glands
US20020172589A1 (en) * 2001-04-27 2002-11-21 Yoshihiro Yamashita Vacuum pump
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
US20030175115A1 (en) * 2002-03-12 2003-09-18 Satoshi Okudera Vacuum pump
US20030175113A1 (en) * 2002-03-12 2003-09-18 Tooru Miwata Turbo-molecular pump
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
US20050058544A1 (en) * 2003-07-25 2005-03-17 Kenji Omi Axial flow fan motor
US7015609B2 (en) * 2002-02-28 2006-03-21 Pfeiffer Vacuum Gmbh Machine with a high-speed rotor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1149201B (de) * 1959-07-16 1963-05-22 Demag Ag Loesbare Verbindung von zwei ungleichen Temperaturen ausgesetzten, an ihrer Verbindungsstelle ringfoermigen Bauteilen
JPH0291288U (zh) * 1988-12-28 1990-07-19
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
JP2003148423A (ja) * 2001-11-08 2003-05-21 Ishikawajima Harima Heavy Ind Co Ltd フランジ結合構造
DE10342907A1 (de) * 2003-09-17 2005-04-21 Pfeiffer Vacuum Gmbh Vakuumpumpe mit schnelldrehendem Rotor

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1062438A (en) * 1912-12-30 1913-05-20 S R Dresser Mfg Co Wrought-metal ring for collar-clamps, &c.
US1637944A (en) * 1925-07-22 1927-08-02 Morgan Construction Co Coupling device
US2443187A (en) * 1944-08-15 1948-06-15 James C Hobbs Pipe coupling
US3165341A (en) * 1962-07-10 1965-01-12 Star Tank And Filter Corp Clamping devices for mated flanges
US3761114A (en) * 1971-08-30 1973-09-25 Victaulic Co Ltd Pipe to flange couplings
US3942141A (en) * 1972-05-26 1976-03-02 Licentia Patent-Verwaltungs-G.M.B.H. Flange
US3850455A (en) * 1972-11-17 1974-11-26 Caterpillar Tractor Co Strain-limiting connector
US4699353A (en) * 1986-12-31 1987-10-13 Weyer Paul P Rotary valve actuator
US4779900A (en) * 1987-02-11 1988-10-25 Ebaa Iron Inc. Segmented pipe joint retainer glands
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
US20020172589A1 (en) * 2001-04-27 2002-11-21 Yoshihiro Yamashita Vacuum pump
US7015609B2 (en) * 2002-02-28 2006-03-21 Pfeiffer Vacuum Gmbh Machine with a high-speed rotor
US20030175115A1 (en) * 2002-03-12 2003-09-18 Satoshi Okudera Vacuum pump
US20030175113A1 (en) * 2002-03-12 2003-09-18 Tooru Miwata Turbo-molecular pump
US20050058544A1 (en) * 2003-07-25 2005-03-17 Kenji Omi Axial flow fan motor
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070104598A1 (en) * 2005-11-10 2007-05-10 Alcatel Fixing device for a vacuum pump
US7798788B2 (en) * 2005-11-10 2010-09-21 Alcatel Fixing device for a vacuum pump
US11143351B2 (en) 2015-12-23 2021-10-12 Leybold Gmbh Connection device
WO2020120949A1 (en) * 2018-12-13 2020-06-18 Edwards Limited Vacuum pump
CN113167283A (zh) * 2018-12-13 2021-07-23 爱德华兹有限公司 真空泵

Also Published As

Publication number Publication date
TW200643308A (en) 2006-12-16
CN101171428A (zh) 2008-04-30
EP1880111A1 (de) 2008-01-23
CN100575711C (zh) 2009-12-30
HK1109440A1 (en) 2008-06-06
DE102005020904A1 (de) 2006-11-09
TWI390112B (zh) 2013-03-21
ATE453802T1 (de) 2010-01-15
DE502006005788D1 (de) 2010-02-11
EP1880111B1 (de) 2009-12-30
WO2006120132A1 (de) 2006-11-16
JP2009500549A (ja) 2009-01-08

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Legal Events

Date Code Title Description
AS Assignment

Owner name: OERLIKON LEYBOLD VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KALISCH, DIRK;STOLLE, ROBERT;ODENDAHL, HEINZ-DIETER;REEL/FRAME:020141/0920

Effective date: 20071024

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION