US20080149946A1 - Semiconductor Light Emitting Device Configured To Emit Multiple Wavelengths Of Light - Google Patents

Semiconductor Light Emitting Device Configured To Emit Multiple Wavelengths Of Light Download PDF

Info

Publication number
US20080149946A1
US20080149946A1 US11/615,601 US61560106A US2008149946A1 US 20080149946 A1 US20080149946 A1 US 20080149946A1 US 61560106 A US61560106 A US 61560106A US 2008149946 A1 US2008149946 A1 US 2008149946A1
Authority
US
United States
Prior art keywords
light emitting
posts
emitting layer
layer
type region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/615,601
Other languages
English (en)
Inventor
James C. Kim
Sungsoo Yi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lumileds LLC
Original Assignee
Philips Lumileds Lighing Co LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Lumileds Lighing Co LLC filed Critical Philips Lumileds Lighing Co LLC
Priority to US11/615,601 priority Critical patent/US20080149946A1/en
Assigned to PHILIPS LUMILEDS LIGHTING COMPANY, LLC reassignment PHILIPS LUMILEDS LIGHTING COMPANY, LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KIM, JAMES C., YI, SUNGSOO
Priority to EP07859486A priority patent/EP2095435B1/fr
Priority to JP2009542379A priority patent/JP5189106B2/ja
Priority to PCT/IB2007/055262 priority patent/WO2008078297A2/fr
Priority to CN2007800477979A priority patent/CN101675534B/zh
Priority to DE602007010827T priority patent/DE602007010827D1/de
Priority to KR1020097015482A priority patent/KR101358701B1/ko
Priority to AT07859486T priority patent/ATE489733T1/de
Priority to TW096149061A priority patent/TWI536599B/zh
Priority to RU2009128240/28A priority patent/RU2009128240A/ru
Priority to BRPI0721111-2A priority patent/BRPI0721111A2/pt
Publication of US20080149946A1 publication Critical patent/US20080149946A1/en
Priority to US12/830,885 priority patent/US9911896B2/en
Priority to US15/897,564 priority patent/US10312404B2/en
Assigned to LUMILEDS LLC reassignment LUMILEDS LLC CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: PHILIPS LUMILEDS LIGHTING COMPANY LLC
Abandoned legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H01L33/0062—Processes for devices with an active region comprising only III-V compounds
    • H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
    • H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/12—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers

Definitions

  • the present invention relates to growth techniques and device structures for semiconductor light emitting devices.
  • LEDs light emitting diodes
  • RCLEDs resonant cavity light emitting diodes
  • VCSELs vertical cavity laser diodes
  • edge emitting lasers are among the most efficient light sources currently available.
  • Materials systems currently of interest in the manufacture of high-brightness light emitting devices capable of operation across the visible spectrum include Group III-V semiconductors, particularly binary, ternary, and quaternary alloys of gallium, aluminum, indium, and nitrogen, also referred to as III-nitride materials.
  • III-nitride light emitting devices are fabricated by epitaxially growing a stack of semiconductor layers of different compositions and dopant concentrations on a suitable substrate by metal-organic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), or other epitaxial techniques.
  • the stack often includes one or more n-type layers doped with, for example, Si, formed over the substrate, a light emitting or active region formed over the n-type layer or layers, and one or more p-type layers doped with, for example, Mg, formed over the active region.
  • III-nitride devices formed on conductive substrates may have the p- and n-contacts formed on opposite sides of the device. Often, III-nitride devices are fabricated on insulating substrates with both contacts on the same side of the device.
  • a III-nitride structure includes a plurality of posts of semiconductor material corresponding to openings in a mask layer.
  • Each post includes a light emitting layer.
  • Each light emitting layer is disposed between an n-type region and a p-type region.
  • a first light emitting layer disposed in a first post is configured to emit light at a different wavelength than a second light emitting layer disposed in a second post.
  • the wavelength emitted by each light emitting layer is controlled by controlling the diameter of the posts, such that a device that emits white light without phosphor conversion may be formed.
  • FIG. 1 illustrates a portion of a light emitting device with a strain-relieved light emitting layer grown on a textured layer.
  • FIG. 2 illustrates a portion of a light emitting device with a light emitting layer grown over a strain-relieved layer grown on a textured layer.
  • FIG. 3 illustrates a portion of a light emitting device with a light emitting layer grown over a mask.
  • FIG. 4 illustrates a portion of a light emitting device with a light emitting layer grown within a group of posts of semiconductor material.
  • FIG. 5 illustrates a portion of a light emitting device with a light emitting layer grown over a coalesced layer grown over a group of posts of semiconductor material.
  • FIGS. 6 and 7 illustrate portions of light emitting devices with light emitting layers grown over groups of posts of semiconductor material and with resistive material electrically isolating regions of n- and p-type material.
  • FIG. 8 illustrates a portion of a flip chip light emitting device from which the growth substrate has been removed.
  • FIG. 9 is an exploded view of a packaged light emitting device.
  • FIGS. 10 and 11 illustrate portions of light emitting devices with conformal light emitting layers grown over polyhedrons grown over openings in a mask.
  • the performance of a semiconductor light emitting device may be gauged by measuring the internal quantum efficiency, which measures the number of photons generated in the device per electron supplied to the device.
  • the internal quantum efficiency of the device As the current density applied to a conventional III-nitride light emitting device increases, the internal quantum efficiency of the device initially increases, then decreases. As the current density increases past zero, the internal quantum efficiency increases, reaching a peak at a given current density (for example, at about 10 A/cm 2 for some devices). As current density increases beyond the peak, the internal quantum efficiency initially drops quickly, then the decrease slows at higher current density (for example, beyond 200 A/cm 2 for some devices).
  • a light emitting layer configured to emit light at 450 nm is preferably thicker than 50 ⁇ .
  • the charge carrier density in a thicker light emitting layer may be less than the charge carrier density in a quantum well, which may reduce the number of carriers lost to nonradiative recombination and thereby increase the external quantum efficiency.
  • growth of thick III-nitride light emitting layers is difficult because of the strain in III-nitride device layers.
  • III-nitride devices are often grown on sapphire or SiC substrates. Such non-native substrates have different lattice constants than the bulk lattice constants of the III-nitride device layers grown on the substrate, resulting in strain in the III-nitride layers grown on the substrate.
  • an “in-plane” lattice constant refers to the actual lattice constant of a layer within the device
  • a “bulk” lattice constant refers to the lattice constant of relaxed, free-standing material of a given composition.
  • the amount of strain in a layer is the difference between the in-plane lattice constant of the material forming a particular layer and the bulk lattice constant of the layer in the device, divided by the bulk lattice constant of the layer.
  • the first layer grown on the substrate is generally a GaN buffer layer with an in-plane a-lattice constant of about 3.1885 ⁇ .
  • the GaN buffer layer serves as a lattice constant template for the light emitting region in that it sets the lattice constant for all of the device layers grown over the buffer layer, including the InGaN light emitting layer. Since the bulk lattice constant of InGaN is larger than the in-plane lattice constant of the GaN buffer layer template, the light emitting layer is strained when grown over a GaN buffer layer.
  • a light emitting layer configured to emit light of about 450 nm may have a composition In 0.16 Ga 0.84 N, a composition with a bulk lattice constant of 3.242 ⁇ .
  • the InN composition in the light emitting layer increases, as in devices emitting light at longer wavelengths, the strain in the light emitting layer also increases.
  • the thickness of the strained layer increases beyond a critical value, dislocations or other defects form within the layer to reduce the energy associated with the strain.
  • the defects become nonradiative recombination centers which can considerably reduce the quantum efficiency of the device.
  • the thickness of the light emitting layer must be kept below this critical thickness.
  • the InN composition and peak wavelength increase, the strain in the light emitting layer increases, thus the critical thickness of a light emitting layer decreases.
  • InGaN alloys are thermodynamically unstable at certain compositions and temperatures.
  • the alloy may exhibit spinodal decomposition, where a compositionally uniform InGaN layer transforms into a layer with regions of higher-than-average InN composition and regions of lower-than-average InN composition.
  • Spinodal decomposition in an InGaN light emitting layer creates nonradiative recombination centers which may reduce the quantum efficiency of the device.
  • the problem of spinodal decomposition worsens as the thickness of the light emitting layer increases, as the average InN composition in the light emitting layer increases, and/or as the strain in the light emitting layer increases.
  • the combination of an InN composition of 16% and the preferred thickness of greater than 50 ⁇ exceeds the spinodal decomposition limit.
  • Embodiments of the invention are designed to reduce strain in the device layers of a III-nitride device, in particular in the light emitting layer.
  • At least partial strain relief in a light emitting layer of a III-nitride light emitting device is provided by configuring the surface on which at least one layer of the device grows such that the layer expands laterally and thus at least partially relaxes.
  • This layer is referred to as the strain-relieved layer.
  • all the layers in the device are grown thin enough that they are strained, thus the first single crystal layer grown over the growth substrate sets the lattice constant for each strained layer in the device.
  • the strain-relieved layer at least partially relaxes, such that the lattice constant in the strain-relieved layer is larger than the lattice constant of the layer grown before the strain-relieved layer.
  • the strain-relieved layer thus expands the lattice constant for the layers grown subsequent to the strain-relieved layer.
  • the light emitting layer itself is the strain-relieved layer, meaning that the light emitting layer is grown on a surface that allows the light emitting layer to expand laterally to relieve strain.
  • a layer grown before the light emitting layer is the strain-relieved layer.
  • the strain-relieved layer is grown on a textured surface.
  • the strain-relieved layer is grown within or over posts of III-nitride material, often referred to as nanowires or nanocolumns.
  • the III-nitride light emitting device includes an n-type region typically grown first over a suitable growth substrate.
  • the n-type region may include multiple layers of different compositions and dopant concentration including, for example, preparation layers such as buffer layers or nucleation layers which may be n-type or not intentionally doped, release layers designed to facilitate later release of the growth substrate or thinning of the semiconductor structure after substrate removal, and n-type device layers designed for particular optical or electrical properties desirable for the light emitting region to efficiently emit light.
  • a light emitting region is grown over the n-type region.
  • the embodiments below may refer to a single light emitting layer, it is to be understood that any of the embodiments below may include a light emitting region with one or more thick or thin light emitting layers. Examples of suitable light emitting regions include a single thick or thin light emitting layer and a multiple quantum well light emitting region including multiple thin or thick quantum well light emitting layers separated by barrier layers.
  • the thickness of each of the light emitting layers in the device is preferably thicker than 50 ⁇ .
  • the light emitting region of the device is a single, thick light emitting layer with a thickness between 50 and 600 ⁇ , more preferably between 100 and 250 ⁇ .
  • the optimal thickness may depend on the number of defects within the light emitting layer.
  • the concentration of defects in the light emitting region is preferably limited to less than 10 9 cm ⁇ 2 , more preferably limited to less than 10 8 cm ⁇ 2 , more preferably limited to less than 10 7 cm ⁇ 2 , and more preferably limited to less than 10 6 cm ⁇ 2 .
  • At least one light emitting layer in the device is doped with a dopant such as Si to a dopant concentration between 1 ⁇ 10 18 cm ⁇ 3 and 1 ⁇ 10 20 cm ⁇ 3 .
  • Si doping may influence the in-plane a lattice constant in the light emitting layer, potentially further reducing the strain in the light emitting layer.
  • a p-type region is grown over the light emitting region.
  • the p-type region may include multiple layers of different composition, thickness, and dopant concentration, including layers that are not intentionally doped, or n-type layers.
  • FIG. 1 illustrates an embodiment of the invention where a strain-relieved light emitting layer is grown over the textured surface of a semiconductor layer.
  • an n-type region 11 having an in-plane lattice constant a 1 is grown over a growth substrate 20 .
  • the top surface of n-type region 11 which may be, for example, GaN, InGaN, AlGaN, or AlInGaN, is textured.
  • a strain-relieved light emitting layer 12 having an in-plane lattice constant a 2 is then grown over the textured surface.
  • a p-type region 13 which also has an in-plane lattice constant a 2 , is grown over light emitting layer 12 .
  • n-type region 11 is textured with a controlled, rough surface, such as, for example, with features having a cross sectional profile of peaks alternating with valleys.
  • the distance between adjacent peaks may be 50 to 200 nm, more preferably 50 to 100 nm.
  • the depth from the top of a peak to the bottom of a valley may be less than 200 nm, more preferably less than 100 nm.
  • Features of appropriate size, depth, and spacing may be formed by, for example, conventional photolithographic etching, sputter etching, photoelectrochemical etching, or by an in situ process wherein the crystalline material is grown textured, such as by growth at elevated pressure.
  • the InGaN material of light emitting layer 12 preferentially grows on the peaks as a group of islands. Since initially the islands do not cover the entire surface of textured n-type region 11 , the islands may expand laterally such that light emitting layer 12 at least partially relaxes.
  • the in-plane lattice constant a 2 of strain-relieved light emitting layer 12 is larger than the in-plane lattice constant a 1 of n-type region 11 .
  • FIG. 2 illustrates a variation of the device of FIG. 1 , where the layer grown on the textured surface in order to provide strain relief is not light emitting layer 12 , rather it is an n-type layer 21 grown over n-type region 11 before light emitting layer 12 .
  • an n-type region 11 having an in-plane lattice constant a 1 is grown over a growth substrate 20 .
  • the top surface of n-type region 11 is textured as described in reference to FIG. 1 .
  • a second n-type region 21 which may be GaN, InGaN, AlGaN, or AlInGaN, is grown over the textured surface of n-type region 11 .
  • the III-nitride material of n-type region 21 preferentially grows on the peaks of the textured surface of n-type region 11 as a group of islands.
  • the islands of material may expand laterally and at least partially relax, such that the in-plane lattice constant a 2 of n-type region 21 is larger than the in-plane lattice constant a 1 of n-type region 11 .
  • the layers grown over strain-relieved region 21 including light emitting layer 12 and p-type region 13 , replicate the larger in-plane lattice constant a 2 of strain-relieved region 21 .
  • FIG. 3 illustrates an embodiment of the invention where a strain-relieved layer is grown over a mask.
  • an n-type region 14 having a lattice constant a 1 is grown over a growth substrate 20 .
  • the surface of n-type region 14 is treated with a silicon precursor such as silane such that the surface is partially covered with silicon nitride material SiN x and partially exposed in small openings in the silicon nitride, creating a mask.
  • the exposed regions may have a lateral extent of 10 to 200 nm, more preferably 50 to 150 nm, and more preferably smaller than 100 nm.
  • a light emitting region 17 is grown over the mask.
  • the material of light emitting region 17 preferentially grows on the openings 16 in mask material 15 , on the exposed the surface of n-type region 14 .
  • the islands of light emitting layer material can expand laterally and at least partially relax, such that the in-plane lattice constant a 2 of light emitting region 17 is larger than the in-plane lattice constant a 1 of n-type region 14 .
  • a p-type region 18 also having an in-plane lattice constant a 2 , is grown over light emitting region 17 . As in the devices shown in FIGS.
  • light emitting region 17 need not be grown directly over the mask, rather a second n-type region of, for example GaN, InGaN, AlGaN, or AlInGaN, may be grown first on the mask, followed by light emitting region 17 .
  • the textured interface is generally located close to the light emitting layer. In some embodiments, the textured interface is within 1000 ⁇ of at least a portion of the light emitting layer.
  • FIGS. 4 , 5 , 6 , and 7 illustrate devices including posts of semiconductor material.
  • an n-type region 22 is grown over a substrate 20 .
  • a mask layer 24 such as the SiN x mask described above is formed.
  • posts of semiconductor material are grown.
  • the growth temperature of the posts of semiconductor material is kept below a temperature at which the GaN material between the islands of masked material begins to decompose, 1000° C. in some applications.
  • the posts of semiconductor material may be grown within a more narrow temperature range than a planar layer grown over a mask, as in FIG.
  • posts may be grown at a growth temperature between 900 and 1000° C., at a growth rate less than 0.5 ⁇ /s, and at a ratio of group V precursors to group III precursors greater than 4000.
  • Planar material may be grown at temperatures greater than 1000° C. and less than 900° C., at faster growth rates, and at different precursor ratios.
  • Posts 26 of n-type material are grown first, followed by posts 28 of light emitting region material, followed by posts 30 of p-type material.
  • the growth conditions are changed, for example by introducing or increasing the flow of a dopant precursor such as a Mg-dopant precursor, by decreasing the flow of nitrogen precursor (generally NH 3 ), and by increasing the growth rate, such that inverted pyramids are formed over the posts, which pyramids eventually coalesce to form a planar layer 32 over the posts and spaces 25 between the posts.
  • a dopant precursor such as a Mg-dopant precursor
  • nitrogen precursor generally NH 3
  • the dimensions of the posts of III-nitride material are selected such that the posts may expand laterally to accommodate the difference in lattice constant between layers of different composition within the posts.
  • the diameter of the posts may be limited to less than 500 nm, more preferably less than 200 nm. Diameters as small as 10 nm may be possible. Diameters between 50 and 150 nm, for example in area of 100 nm, are likely.
  • the diameter is selected to be small enough such that the material in the posts can at least partially relax, and large enough that there is an acceptably high fill factor of light emitting layer material.
  • the posts need not have a constant diameter, as illustrated in FIG. 4 .
  • the posts may be truncated pyramids.
  • the fill factor is at least 90%, meaning that as grown, the posts occupy at least 90% of the lateral extent of the semiconductor structure of the device.
  • the fill factor is determined by both the diameter of the posts and the spacing between the posts. If the diameter of the posts is reduced, the number density of posts must increase to maintain a given fill factor. In some embodiments, the number density of posts is at least 10 10 cm ⁇ 2 .
  • the height of the posts may range from 50 nm to 3 ⁇ m. In a device with a single light emitting layer, heights between 50 and 150 nm, for example of 100 nm, are likely. In a device with a multiple quantum well light emitting region, heights between 200 nm and 1 ⁇ m, for example of 500 nm, are likely. Light emitting region 28 within the posts may be at least partially relaxed.
  • the light emitting regions in different posts in a single device may be formed to emit different wavelengths of light.
  • some of the posts in the device may be configured to emit reddish light
  • some of the posts in the device may be configured to emit greenish light
  • some of the posts in the device may be configured to emit bluish light, such that the combined red, green, and blue light appears white.
  • the emission wavelength of a light emitting regions depends on the InN composition: the more InN in an InGaN light emitting layer, the longer the emission wavelength.
  • the strain in the light emitting layer limits the amount of InN that may be incorporated into the light emitting layer.
  • planar InGaN light emitting layers that emit blue light may be grown at higher quality than planar InGaN light emitting layers that emit green light. It is extremely difficult to grow a planar InGaN light emitting layer of high enough quality that emits light at a longer wavelength than green. Since a light emitting region grown within a post as illustrated in FIG. 4 may at least partially relax, more InN may be incorporated during growth than in a conventional strained planar layer. The more relaxed the material in the post, the more InN may be incorporated in the light emitting layer.
  • the inventors have grown structures with posts including at least one InGaN layer.
  • the structures were characterized by photoluminescence, which showed the emission wavelength from the InGaN material was significantly red-shifted from conventional planar growth. Emission wavelengths between 430 nm and 750 nm, representing colors from blue to red including green and yellow, have been achieved.
  • the InN composition in individual posts is controlled by controlling the diameter of the posts.
  • the posts with diameters in the range of 10 nm are expected to be the most relaxed, have light emitting regions with the highest InN compositions, and emit the longest wavelength, most red light.
  • the posts with diameters in the range of 150 nm are expected to be less relaxed, have light emitting regions with lower InN compositions, and emit shorter wavelength, more blue light.
  • each post may be controlled by controlling the diameter of the post.
  • mask layer 24 may be patterned, for example by a nano-imprinting lithography technique, to form a plurality of openings with the desired diameters.
  • a device emitting white light is used as an example, it is to be understood that the emission spectrum from the device can be tailored to other colors of light by patterning mask 24 with openings of the appropriate size.
  • a device where different posts emit different colors of light such that the combined light appears white may offer benefits over a conventional white-light device, where a blue-emitting semiconductor light emitting device is combined with one or more wavelength converting materials such as phosphors such that the phosphor-converted light combines with unconverted blue light leaking through the phosphor to form white light.
  • a blue-emitting semiconductor light emitting device is combined with one or more wavelength converting materials such as phosphors such that the phosphor-converted light combines with unconverted blue light leaking through the phosphor to form white light.
  • a device with posts emitting different colors of light may reduce manufacturing complexity, since it does not require forming wavelength converting layers after forming the device; may offer improved control of chromaticity, color temperature, and color rendering, since the emission spectrum is potentially more easily controlled; may be more efficient, for example by eliminating inefficiencies associated with wavelength converting materials; may be less expensive to manufacture, since expensive wavelength converting materials are no longer required; and may offer greater flexibility in tailoring the emission spectrum.
  • a strain-reduced light emitting layer is grown over a layer coalesced over a group of semiconductor posts.
  • An n-type region 22 having an in-plane lattice constant a 1 is grown over a substrate 20 .
  • a mask layer 24 such as the SiN x mask described above is formed.
  • posts of n-type material 26 are grown. The posts are grown such that the diameter is small enough that the posts may expand laterally and thus at least partially relax, as described above.
  • n-type region 34 When growth conditions are altered such that an n-type region 34 coalesces over posts 26 , n-type region 34 retains the in-plane lattice constant of the at least partially relaxed posts and thus has an in-plane lattice constant a 2 which is larger than the in-plane lattice constant a 1 of n-type region 22 .
  • a light emitting region 36 and p-type region 38 both of which replicate the in-plane lattice constant a 2 , are grown over n-type region 34 .
  • FIGS. 6 and 7 illustrate embodiments of the invention designed to eliminate suture defects or reduce the number of suture defects.
  • an n-type region 22 is grown over substrate 20 , then a mask 24 is formed and n-type posts 26 are grown as described above, such that posts 26 at least partially relax.
  • a conformal layer of resistive material 40 is formed over posts 26 .
  • Resistive layer 40 may be, for example, epitaxially grown resistive GaN such as GaN doped with Zn or Fe, or a resistive oxide such as an oxide of silicon. The resistive layers formed over the tops of posts 26 are then removed by conventional lithography, such that resistive material 40 remains only in the spaces between posts 26 .
  • Light emitting regions 42 are then grown as posts over the exposed tops of posts 26 , followed by a p-type region 44 which coalesces over light emitting regions 42 .
  • Resistive regions 40 electrically isolate n-type regions 22 and 26 from p-type region 44 .
  • an n-type region 22 is grown over substrate 20 , then a mask 24 is formed and n-type posts 26 are grown as described above, such that posts 26 at least partially relax.
  • a conformal layer of undoped InGaN 46 is grown over posts 26 , then growth conditions are switched to conditions favoring post growth in order to grow posts of doped light emitting region 48 over the tops of the regions of conformal layer 46 over posts 26 .
  • a p-type region 52 is then grown which coalesces over light emitting regions 48 . Doping of the light emitting region islands 48 results in a lower breakdown voltage than the undoped InGaN regions 46 between posts 26 , thus n-type regions 22 and 26 are electrically isolated from p-type region 52 .
  • an ion implantation step renders regions 50 between posts 26 nonconductive.
  • the ion damaged InGaN regions 46 over the tops of posts 26 may be removed by etching.
  • light emitting region islands 48 are grown directly over posts 26 .
  • an n-type region 22 is grown over a substrate 20 .
  • a mask layer 24 such as the SiN x mask described above is formed.
  • polyhedrons 82 of semiconductor material are grown in the openings 80 between islands of mask material.
  • Polyhedrons 82 are able to expand laterally and are therefore at least partially relaxed. Polyhedrons 82 thus have a lattice constant a 2 larger than the lattice constant a 1 of planar layer 22 .
  • the diameter of openings 80 may be limited to less than 500 nm, more preferably less than 200 nm. Diameters as small as 10 nm may be possible. Diameters between 50 and 150 nm, for example in area of 100 nm, are likely.
  • the diameter of openings 80 is selected to be small enough such that the material in polyhedrons 82 can at least partially relax. As in FIG. 4 , mask 24 may be formed such that the fill factor is at least 90%, meaning that as grown, the bases of polyhedrons 82 occupy at least 90% of the lateral extent of the semiconductor structure of the device.
  • At least one light emitting layer 84 is grown over polyhedrons 82 such that the material in light emitting layer 84 replicates the expanded lattice constant a 2 of polyhedrons 82 .
  • a p-type region is then grown over light emitting layer 84 .
  • p-type region 86 preferentially grows over polyhedrons 82 . Growth is stopped before the region between adjacent polyhedrons, covered by mask 24 , is filled in.
  • a thick metal layer (not shown) may be deposited over the polyhedrons to form a planar surface. Insulating mask layer 24 provides electrical isolation between the metal contacting the p-type material and the n-type region of the semiconductor in the regions between openings 80 .
  • growth of p-type region 88 continues until the regions between adjacent polyhedrons are filled in, resulting in a substantially planar p-type layer.
  • the light emitting layers in the embodiments described above may have larger in-plane a-lattice constants than light emitting layers grown on conventional GaN templates, which typically have in-plane a-lattice constants no larger than 3.1885 ⁇ .
  • Growth of the light emitting layer as or over a strain-relieved layer may increase the in-plane lattice constant to greater than 3.189 ⁇ , and may thus sufficiently reduce the strain in the light emitting layer to permit thicker light emitting layers to be grown with acceptable defect densities and with reduced spinodal decomposition.
  • the in-plane a-lattice constant in the light emitting layer may be increased to at least 3.195 ⁇ , more preferably to at least 3.2 ⁇ .
  • an InGaN layer that emits blue light may have the composition In 0.12 Ga 0.88 N, a composition with a bulk lattice constant of 3.23 ⁇ .
  • the strain in the light emitting layer is the difference between the in-plane lattice constant in the light emitting layer (about 3.189 ⁇ for light emitting layer grown on a conventional GaN buffer layer) and the bulk lattice constant the light emitting layer, thus strain may be expressed as (a in-plane ⁇ a bulk )/a bulk .
  • the strain is (3.23 ⁇ 3.189 ⁇ )/3.23 ⁇ , about 1.23%.
  • the strain may be reduced or eliminated.
  • the strain in the light emitting layer of a device emitting light between 430 and 480 nm may be reduced to less than 1%, and more preferably to less than 0.5%.
  • An InGaN layer that emits cyan light may have the composition In 0.16 Ga 0.84 N, a composition with strain of about 1.7% when grown on a conventional GaN buffer layer.
  • the strain in the light emitting layer of a device emitting light between 480 and 520 nm may be reduced to less than 1.5%, and more preferably to less than 1%.
  • An InGaN layer that emits green light may have the composition In 0.2 Ga 0.8 N, a composition with a free standing lattice constant of 3.26 ⁇ , resulting in strain of about 2.1% when grown on a conventional GaN buffer layer.
  • the strain in the light emitting layer of a device emitting light between 520 and 560 nm may be reduced to less than 2%, and more preferably to less than 1.5%.
  • the semiconductor structures illustrated and described above may be included in any suitable configuration of a light emitting device, such as a device with contacts formed on opposite sides of the device or a device with both contacts formed on the same side of the device.
  • a light emitting device such as a device with contacts formed on opposite sides of the device or a device with both contacts formed on the same side of the device.
  • the device may be formed either with transparent contacts and mounted such that light is extracted either through the same side on which the contacts are formed, or with reflective contacts and mounted as a flip chip, where light is extracted from the side opposite the side on which the contacts are formed.
  • FIG. 8 illustrates a portion of one example of a suitable configuration, a flip chip device from which the growth substrate has been removed.
  • a portion of p-type region 66 and light emitting region 64 is removed to form a mesa that exposes a portion of n-type region 62 .
  • N- and p-contacts 70 and 68 are formed on the exposed parts of n-type region 62 and p-type region 66 , for example by evaporating or plating. Contacts 68 and 70 may be electrically isolated from each other by air or a dielectric layer.
  • a wafer of devices may be diced into individual devices, then each device is flipped relative to the growth direction and mounted on a mount 73 , in which case mount 73 may have a lateral extent larger than that of the device.
  • a wafer of devices may be connected to a wafer of mounts, then diced into individual devices.
  • Mount 73 may be, for example, semiconductor such as Si, metal, or ceramic such as AlN, and may have at least one metal pad 71 which electrically connects to p-contacts 68 and at least one metal pad 72 which electrically connects to the n-contacts 70 .
  • Interconnects (not shown) such as solder or gold stud bumps, connect the semiconductor device to mount 73 .
  • the growth substrate (not shown) is removed by a process suitable to the substrate material, such as etching or laser melting.
  • a rigid underfill may be provided between the device and mount 73 before or after mounting to support the semiconductor layers and prevent cracking during substrate removal.
  • a portion of the semiconductor structure may be removed by thinning after removing the substrate.
  • the exposed surface of n-type region 62 may be roughened, for example by an etching process such as photoelectrochemical etching or by a mechanical process such as grinding. Roughening the surface from which light is extracted may improve light extraction from the device.
  • a photonic crystal structure may be formed in the top surface of n-type region 62 exposed by removing the grown substrate.
  • a structure 74 such as a phosphor layer or secondary optics known in the art such as dichroics or polarizers may be applied to the emitting surface.
  • FIG. 9 is an exploded view of a packaged light emitting device, as described in more detail in U.S. Pat. No. 6,274,924.
  • a heat-sinking slug 100 is placed into an insert-molded leadframe.
  • the insert-molded leadframe is, for example, a filled plastic material 105 molded around a metal frame 106 that provides an electrical path.
  • Slug 100 may include an optional reflector cup 102 .
  • the light emitting device die 104 which may be any of the devices described in the embodiments above, is mounted directly or indirectly via a thermally conducting submount 103 to slug 100 .
  • a cover 108 which may be an optical lens, may be added.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Devices (AREA)
  • Led Device Packages (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Luminescent Compositions (AREA)
US11/615,601 2006-12-22 2006-12-22 Semiconductor Light Emitting Device Configured To Emit Multiple Wavelengths Of Light Abandoned US20080149946A1 (en)

Priority Applications (13)

Application Number Priority Date Filing Date Title
US11/615,601 US20080149946A1 (en) 2006-12-22 2006-12-22 Semiconductor Light Emitting Device Configured To Emit Multiple Wavelengths Of Light
BRPI0721111-2A BRPI0721111A2 (pt) 2006-12-22 2007-12-20 Dispositivo emissor de luz semicondutor
KR1020097015482A KR101358701B1 (ko) 2006-12-22 2007-12-20 여러 파장의 광을 방출하도록 구성된 반도체 발광 장치
TW096149061A TWI536599B (zh) 2006-12-22 2007-12-20 半導體發光裝置配置以發射多波長的光
PCT/IB2007/055262 WO2008078297A2 (fr) 2006-12-22 2007-12-20 Dispositif électroluminescent semi-conducteur configuré pour émettre de multiples longueurs d'onde de lumière
CN2007800477979A CN101675534B (zh) 2006-12-22 2007-12-20 配置为发射多个波长的光的半导体发光器件
DE602007010827T DE602007010827D1 (de) 2006-12-22 2007-12-20 Zum emittieren mehrerer lichtwellenlängen ausgelegtes halbleiter-leuchtbauelement
EP07859486A EP2095435B1 (fr) 2006-12-22 2007-12-20 Dispositif électroluminescent semi-conducteur configuré pour émettre de multiples longueurs d'onde de lumière
AT07859486T ATE489733T1 (de) 2006-12-22 2007-12-20 Zum emittieren mehrerer lichtwellenlängen ausgelegtes halbleiter-leuchtbauelement
JP2009542379A JP5189106B2 (ja) 2006-12-22 2007-12-20 複数の波長の光を放出するように構成された半導体発光装置
RU2009128240/28A RU2009128240A (ru) 2006-12-22 2007-12-20 Полупроводниковый светоизлучающий прибор, выполненный с возможностью излучения множества длин волн света
US12/830,885 US9911896B2 (en) 2006-12-22 2010-07-06 Semiconductor light emitting device growing active layer on textured surface
US15/897,564 US10312404B2 (en) 2006-12-22 2018-02-15 Semiconductor light emitting device growing active layer on textured surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/615,601 US20080149946A1 (en) 2006-12-22 2006-12-22 Semiconductor Light Emitting Device Configured To Emit Multiple Wavelengths Of Light

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/830,885 Continuation US9911896B2 (en) 2006-12-22 2010-07-06 Semiconductor light emitting device growing active layer on textured surface

Publications (1)

Publication Number Publication Date
US20080149946A1 true US20080149946A1 (en) 2008-06-26

Family

ID=39387249

Family Applications (3)

Application Number Title Priority Date Filing Date
US11/615,601 Abandoned US20080149946A1 (en) 2006-12-22 2006-12-22 Semiconductor Light Emitting Device Configured To Emit Multiple Wavelengths Of Light
US12/830,885 Active 2028-07-18 US9911896B2 (en) 2006-12-22 2010-07-06 Semiconductor light emitting device growing active layer on textured surface
US15/897,564 Active US10312404B2 (en) 2006-12-22 2018-02-15 Semiconductor light emitting device growing active layer on textured surface

Family Applications After (2)

Application Number Title Priority Date Filing Date
US12/830,885 Active 2028-07-18 US9911896B2 (en) 2006-12-22 2010-07-06 Semiconductor light emitting device growing active layer on textured surface
US15/897,564 Active US10312404B2 (en) 2006-12-22 2018-02-15 Semiconductor light emitting device growing active layer on textured surface

Country Status (11)

Country Link
US (3) US20080149946A1 (fr)
EP (1) EP2095435B1 (fr)
JP (1) JP5189106B2 (fr)
KR (1) KR101358701B1 (fr)
CN (1) CN101675534B (fr)
AT (1) ATE489733T1 (fr)
BR (1) BRPI0721111A2 (fr)
DE (1) DE602007010827D1 (fr)
RU (1) RU2009128240A (fr)
TW (1) TWI536599B (fr)
WO (1) WO2008078297A2 (fr)

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080149914A1 (en) * 2006-12-22 2008-06-26 Qunano Ab Nanoelectronic structure and method of producing such
US20080149942A1 (en) * 2006-12-22 2008-06-26 Philips Lumileds Lighting Company, Llc III-Nitride Light Emitting Device with Reduced Strain Light Emitting Layer
US20080149944A1 (en) * 2006-12-22 2008-06-26 Qunano Ab Led with upstanding nanowire structure and method of producing such
US20090301389A1 (en) * 2006-03-08 2009-12-10 Qunano Ab Method for Metal-Free Synthesis of Epitaxial Semiconductor Nanowires on Si
WO2010012266A1 (fr) * 2008-07-31 2010-02-04 Osram Opto Semiconductors Gmbh Procédé de fabrication d'une puce iii-v semi-conductrice optoélectronique contenant de l'indium, et puce correspondante
US20100038655A1 (en) * 2008-08-18 2010-02-18 Ding-Yuan Chen Reflective Layer for Light-Emitting Diodes
US20100148149A1 (en) * 2006-12-22 2010-06-17 Qunano Ab Elevated led and method of producing such
US20100163840A1 (en) * 2007-01-12 2010-07-01 Werner Seifert Nitride nanowires and method of producing such
US20100283064A1 (en) * 2006-12-22 2010-11-11 Qunano Ab Nanostructured led array with collimating reflectors
US20110079766A1 (en) * 2009-10-01 2011-04-07 Isaac Harshman Wildeson Process for fabricating iii-nitride based nanopyramid leds directly on a metalized silicon substrate
EP2357676A1 (fr) * 2008-10-17 2011-08-17 National University Corporation Hokkaido University Réseau d'éléments électroluminescents à semi-conducteurs et son procédé de fabrication
US20110284890A1 (en) * 2010-05-19 2011-11-24 Philips Lumileds Lighting Company, Llc Light emitting device grown on a relaxed layer
WO2012059837A1 (fr) * 2010-11-04 2012-05-10 Koninklijke Philips Electronics N.V. Dispositifs électroluminescents à semi-conducteur formés à partir de structures de configuration cristallographique lâche
EP2390930A3 (fr) * 2010-05-31 2013-09-18 Samsung Electronics Co., Ltd. Moules à semi-conducteur, dispositifs électroluminescents, procédés de fabrication et procédés de génération de lumière à plusieurs longueurs d'onde
WO2014197799A1 (fr) * 2013-06-07 2014-12-11 Glo-Usa, Inc. Del multicolore et son procédé de fabrication
US20150318459A1 (en) * 2010-10-12 2015-11-05 Koninklijke Philips N.V. Light emitting device with reduced epi stress
US9406839B2 (en) 2014-08-25 2016-08-02 Samsung Electronics Co., Ltd. Nanostructure semiconductor light emitting device
US9620559B2 (en) 2014-09-26 2017-04-11 Glo Ab Monolithic image chip for near-to-eye display
US9653286B2 (en) 2012-02-14 2017-05-16 Hexagem Ab Gallium nitride nanowire based electronics
US20170288174A1 (en) * 2014-10-09 2017-10-05 Sony Corporation Display unit, method of manufacturing display unit, and electronic apparatus
US20170323925A1 (en) * 2016-05-04 2017-11-09 Glo Ab Monolithic multicolor direct view display containing different color leds and method of making thereof
US20190334069A1 (en) * 2012-11-02 2019-10-31 Epistar Corporation Light emitting device
US10483319B2 (en) 2014-08-08 2019-11-19 Glo Ab Pixilated display device based upon nanowire LEDs and method for making the same

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5390472B2 (ja) * 2010-06-03 2014-01-15 株式会社東芝 半導体発光装置及びその製造方法
CN102054916B (zh) * 2010-10-29 2012-11-28 厦门市三安光电科技有限公司 反射器及其制作方法，以及包含该反射器的发光器件
KR101591991B1 (ko) * 2010-12-02 2016-02-05 삼성전자주식회사 발광소자 패키지 및 그 제조 방법
EP2509120A1 (fr) 2011-04-05 2012-10-10 Imec Dispositif et procédé à semi-conducteur
CN103367585B (zh) * 2012-03-30 2016-04-13 清华大学 发光二极管
CN103367383B (zh) 2012-03-30 2016-04-13 清华大学 发光二极管
CN103367584B (zh) 2012-03-30 2017-04-05 清华大学 发光二极管及光学元件
CN103367560B (zh) * 2012-03-30 2016-08-10 清华大学 发光二极管的制备方法
FR3105878B1 (fr) 2019-12-26 2023-10-27 Aledia Dispositif à composants optoélectroniques tridimensionnels pour découpe au laser et procédé de découpe au laser d'un tel dispositif
EP3869383B1 (fr) 2020-02-20 2023-07-19 Continental Automotive Technologies GmbH Procédé d'identification d'une carte rfid passive

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5055894A (en) * 1988-09-29 1991-10-08 The Boeing Company Monolithic interleaved LED/PIN photodetector array
US5795798A (en) * 1996-11-27 1998-08-18 The Regents Of The University Of California Method of making full color monolithic gan based leds
US5945689A (en) * 1995-03-17 1999-08-31 Toyoda Gosei Co., Ltd. Light-emitting semiconductor device using group III nitride compound
US20050011431A1 (en) * 2003-04-04 2005-01-20 Btg International Limited Precisely positioned nanowhiskers and nanowhisker arrays and method for preparing them
US20050082543A1 (en) * 2003-10-15 2005-04-21 Azar Alizadeh Monolithic light emitting devices based on wide bandgap semiconductor nanostructures and methods for making same
US20050194598A1 (en) * 2004-02-13 2005-09-08 Hwa-Mok Kim Super bright light emitting diode of nanorod array structure having InGaN quantum well and method for manufacturing the same
US20050225222A1 (en) * 2004-04-09 2005-10-13 Joseph Mazzochette Light emitting diode arrays with improved light extraction
US20060223211A1 (en) * 2004-12-02 2006-10-05 The Regents Of The University Of California Semiconductor devices based on coalesced nano-rod arrays

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2734097B1 (fr) * 1995-05-12 1997-06-06 Thomson Csf Laser a semiconducteurs
JP4032264B2 (ja) * 1997-03-21 2008-01-16 ソニー株式会社 量子細線を有する素子の製造方法
WO1998019375A1 (fr) * 1996-10-30 1998-05-07 Hitachi, Ltd. Machine de traitement optique de l'information et dispositif a semi-conducteur emetteur de lumiere afferent
US6274924B1 (en) 1998-11-05 2001-08-14 Lumileds Lighting, U.S. Llc Surface mountable LED package
US6204523B1 (en) * 1998-11-06 2001-03-20 Lumileds Lighting, U.S., Llc High stability optical encapsulation and packaging for light-emitting diodes in the green, blue, and near UV range
US6534791B1 (en) * 1998-11-27 2003-03-18 Lumileds Lighting U.S., Llc Epitaxial aluminium-gallium nitride semiconductor substrate
JP2001267242A (ja) * 2000-03-14 2001-09-28 Toyoda Gosei Co Ltd Ｉｉｉ族窒化物系化合物半導体及びその製造方法
NO20014399L (no) * 2000-11-29 2002-05-30 Hewlett Packard Co En datastruktur og lagrings- og hentemetode som stötter ordinal-tallbasert datasöking og henting
US6818465B2 (en) 2001-08-22 2004-11-16 Sony Corporation Nitride semiconductor element and production method for nitride semiconductor element
US7071494B2 (en) * 2002-12-11 2006-07-04 Lumileds Lighting U.S. Llc Light emitting device with enhanced optical scattering
US7098589B2 (en) * 2003-04-15 2006-08-29 Luminus Devices, Inc. Light emitting devices with high light collimation
US6995389B2 (en) * 2003-06-18 2006-02-07 Lumileds Lighting, U.S., Llc Heterostructures for III-nitride light emitting devices
DE10327733C5 (de) * 2003-06-18 2012-04-19 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Formung eines Lichtstrahls
KR100525545B1 (ko) * 2003-06-25 2005-10-31 엘지이노텍 주식회사 질화물 반도체 발광소자 및 그 제조방법
WO2005018008A1 (fr) 2003-08-19 2005-02-24 Nichia Corporation Dispositif a semi-conducteurs
JP4457609B2 (ja) * 2003-08-26 2010-04-28 豊田合成株式会社 窒化ガリウム（ＧａＮ）の製造方法
KR100641989B1 (ko) * 2003-10-15 2006-11-02 엘지이노텍 주식회사 질화물 반도체 발광소자
US7012279B2 (en) * 2003-10-21 2006-03-14 Lumileds Lighting U.S., Llc Photonic crystal light emitting device
US7880377B2 (en) 2004-01-23 2011-02-01 Hoya Corporation Quantum dot-dispersed light emitting device, and manufacturing method thereof
US20050205883A1 (en) * 2004-03-19 2005-09-22 Wierer Jonathan J Jr Photonic crystal light emitting device
ATE527571T1 (de) * 2004-04-15 2011-10-15 Univ Boston Optische bauelemente mit texturierten halbleiterschichten
US8035113B2 (en) * 2004-04-15 2011-10-11 The Trustees Of Boston University Optical devices featuring textured semiconductor layers
TWI433343B (zh) 2004-06-22 2014-04-01 Verticle Inc 具有改良光輸出的垂直構造半導體裝置
KR100649494B1 (ko) * 2004-08-17 2006-11-24 삼성전기주식회사 레이저를 이용하여 발광 다이오드 기판을 표면 처리하는발광 다이오드 제조 방법 및 이 방법에 의해 제조된 발광다이오드
US7633097B2 (en) * 2004-09-23 2009-12-15 Philips Lumileds Lighting Company, Llc Growth of III-nitride light emitting devices on textured substrates
DE102004062799A1 (de) * 2004-12-20 2006-06-29 Ensinger Kunststofftechnologie GbR (vertretungsberechtigter Gesellschafter Wilfried Ensinger, 71154 Nufringen) Kunststoffmaterial zur Herstellung von Halteringen
KR100580751B1 (ko) * 2004-12-23 2006-05-15 엘지이노텍 주식회사 질화물 반도체 발광소자 및 그 제조방법
US7804100B2 (en) 2005-03-14 2010-09-28 Philips Lumileds Lighting Company, Llc Polarization-reversed III-nitride light emitting device
KR100631980B1 (ko) 2005-04-06 2006-10-11 삼성전기주식회사 질화물 반도체 소자
US20070243703A1 (en) * 2006-04-14 2007-10-18 Aonex Technololgies, Inc. Processes and structures for epitaxial growth on laminate substrates
JPWO2010002004A1 (ja) * 2008-07-04 2011-12-22 保土谷化学工業株式会社 炭素繊維及び複合材料

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5055894A (en) * 1988-09-29 1991-10-08 The Boeing Company Monolithic interleaved LED/PIN photodetector array
US5945689A (en) * 1995-03-17 1999-08-31 Toyoda Gosei Co., Ltd. Light-emitting semiconductor device using group III nitride compound
US5795798A (en) * 1996-11-27 1998-08-18 The Regents Of The University Of California Method of making full color monolithic gan based leds
US20050011431A1 (en) * 2003-04-04 2005-01-20 Btg International Limited Precisely positioned nanowhiskers and nanowhisker arrays and method for preparing them
US20050082543A1 (en) * 2003-10-15 2005-04-21 Azar Alizadeh Monolithic light emitting devices based on wide bandgap semiconductor nanostructures and methods for making same
US20050194598A1 (en) * 2004-02-13 2005-09-08 Hwa-Mok Kim Super bright light emitting diode of nanorod array structure having InGaN quantum well and method for manufacturing the same
US20050225222A1 (en) * 2004-04-09 2005-10-13 Joseph Mazzochette Light emitting diode arrays with improved light extraction
US20060223211A1 (en) * 2004-12-02 2006-10-05 The Regents Of The University Of California Semiconductor devices based on coalesced nano-rod arrays

Cited By (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090301389A1 (en) * 2006-03-08 2009-12-10 Qunano Ab Method for Metal-Free Synthesis of Epitaxial Semiconductor Nanowires on Si
US8691011B2 (en) 2006-03-08 2014-04-08 Qunano Ab Method for metal-free synthesis of epitaxial semiconductor nanowires on si
US20080149914A1 (en) * 2006-12-22 2008-06-26 Qunano Ab Nanoelectronic structure and method of producing such
US8227817B2 (en) 2006-12-22 2012-07-24 Qunano Ab Elevated LED
US20080149942A1 (en) * 2006-12-22 2008-06-26 Philips Lumileds Lighting Company, Llc III-Nitride Light Emitting Device with Reduced Strain Light Emitting Layer
US8049203B2 (en) * 2006-12-22 2011-11-01 Qunano Ab Nanoelectronic structure and method of producing such
US10263149B2 (en) 2006-12-22 2019-04-16 Qunano Ab Nanostructured LED array with collimating reflectors
US20100148149A1 (en) * 2006-12-22 2010-06-17 Qunano Ab Elevated led and method of producing such
US8796119B2 (en) 2006-12-22 2014-08-05 Qunano Ab Nanoelectronic structure and method of producing such
US20100221882A1 (en) * 2006-12-22 2010-09-02 Qunano Ab Nanoelectronic structure and method of producing such
US8455857B2 (en) 2006-12-22 2013-06-04 Qunano Ab Nanoelectronic structure and method of producing such
US20100283064A1 (en) * 2006-12-22 2010-11-11 Qunano Ab Nanostructured led array with collimating reflectors
US9096429B2 (en) 2006-12-22 2015-08-04 Qunano Ab Nanoelectronic structure and method of producing such
US20080149944A1 (en) * 2006-12-22 2008-06-26 Qunano Ab Led with upstanding nanowire structure and method of producing such
US8183587B2 (en) 2006-12-22 2012-05-22 Qunano Ab LED with upstanding nanowire structure and method of producing such
US9318655B2 (en) 2006-12-22 2016-04-19 Qunano Ab Elevated LED
US7663148B2 (en) * 2006-12-22 2010-02-16 Philips Lumileds Lighting Company, Llc III-nitride light emitting device with reduced strain light emitting layer
US8067299B2 (en) 2006-12-22 2011-11-29 Qunano Ab Nanoelectronic structure and method of producing such
US8664094B2 (en) 2007-01-12 2014-03-04 Qunano Ab Method of producing nitride nanowires with different core and shell V/III flow ratios
US20110143472A1 (en) * 2007-01-12 2011-06-16 Qunano Ab Nitride nanowires and method of producing such
US8309439B2 (en) 2007-01-12 2012-11-13 Qunano Ab Nitride nanowires and method of producing such
US9947831B2 (en) 2007-01-12 2018-04-17 Qunano Ab Light emitting diode device having III-nitride nanowires, a shell layer and a continuous layer
US7829443B2 (en) 2007-01-12 2010-11-09 Qunano Ab Nitride nanowires and method of producing such
US9024338B2 (en) * 2007-01-12 2015-05-05 Qunano Ab Device with nitride nanowires having a shell layer and a continuous layer
US20100163840A1 (en) * 2007-01-12 2010-07-01 Werner Seifert Nitride nanowires and method of producing such
US9660136B2 (en) 2007-01-12 2017-05-23 Qunano Ab Nitride nanowires and method of producing such
US9397262B2 (en) 2008-07-31 2016-07-19 Osram Opto Semiconductors Gmbh Optoelectronic semiconductor chip and method for the production thereof
WO2010012266A1 (fr) * 2008-07-31 2010-02-04 Osram Opto Semiconductors Gmbh Procédé de fabrication d'une puce iii-v semi-conductrice optoélectronique contenant de l'indium, et puce correspondante
US9893257B2 (en) 2008-08-18 2018-02-13 Epistar Corporation Electrode structure of light emitting device
US20100038655A1 (en) * 2008-08-18 2010-02-18 Ding-Yuan Chen Reflective Layer for Light-Emitting Diodes
US8716723B2 (en) * 2008-08-18 2014-05-06 Tsmc Solid State Lighting Ltd. Reflective layer between light-emitting diodes
US10062821B2 (en) 2008-08-18 2018-08-28 Epistar Corporation Light-emitting device
US20140235001A1 (en) * 2008-08-18 2014-08-21 Tsmc Solid State Lighting Ltd. Reflective Layer for Light-Emitting Diodes
US10038129B2 (en) * 2008-08-18 2018-07-31 Epistar Corporation Light emitting device
US20160064632A1 (en) * 2008-08-18 2016-03-03 Epistar Corporation Light-emitting device
US9530948B2 (en) * 2008-08-18 2016-12-27 Epistar Corporation Light emitting device having multi-layered electrode structure
US9214613B2 (en) * 2008-08-18 2015-12-15 Tsmc Solid State Lighting Ltd. Method of forming light-generating device including reflective layer
US10411177B2 (en) * 2008-08-18 2019-09-10 Epistar Corporation Light emitting device
US9698325B2 (en) * 2008-08-18 2017-07-04 Epistar Corporation Light-emitting device including reflective layer
EP2357676A4 (fr) * 2008-10-17 2013-05-29 Univ Hokkaido Nat Univ Corp Réseau d'éléments électroluminescents à semi-conducteurs et son procédé de fabrication
US8519378B2 (en) 2008-10-17 2013-08-27 National University Corporation Hokkaido University Semiconductor light-emitting element array including a semiconductor rod
EP2357676A1 (fr) * 2008-10-17 2011-08-17 National University Corporation Hokkaido University Réseau d'éléments électroluminescents à semi-conducteurs et son procédé de fabrication
US20110204327A1 (en) * 2008-10-17 2011-08-25 National University Corporation Hokkaido University Semiconductor light-emitting element array and manufacturing method thereof
US20110079766A1 (en) * 2009-10-01 2011-04-07 Isaac Harshman Wildeson Process for fabricating iii-nitride based nanopyramid leds directly on a metalized silicon substrate
US20110284890A1 (en) * 2010-05-19 2011-11-24 Philips Lumileds Lighting Company, Llc Light emitting device grown on a relaxed layer
US8692261B2 (en) * 2010-05-19 2014-04-08 Koninklijke Philips N.V. Light emitting device grown on a relaxed layer
US8945975B2 (en) 2010-05-19 2015-02-03 Koninklijke Philips N.V. Light emitting device grown on a relaxed layer
EP2390930A3 (fr) * 2010-05-31 2013-09-18 Samsung Electronics Co., Ltd. Moules à semi-conducteur, dispositifs électroluminescents, procédés de fabrication et procédés de génération de lumière à plusieurs longueurs d'onde
US20150318459A1 (en) * 2010-10-12 2015-11-05 Koninklijke Philips N.V. Light emitting device with reduced epi stress
US9660164B2 (en) * 2010-10-12 2017-05-23 Koninklijke Philips N.V. Light emitting device with reduced epi stress
WO2012059837A1 (fr) * 2010-11-04 2012-05-10 Koninklijke Philips Electronics N.V. Dispositifs électroluminescents à semi-conducteur formés à partir de structures de configuration cristallographique lâche
US9478705B2 (en) 2010-11-04 2016-10-25 Koninklijke Philips N.V. Solid state light emitting devices based on crystallographically relaxed structures
US8969890B2 (en) 2010-11-04 2015-03-03 Koninklijke Philips N.V. Solid state light emitting devices based on crystallographically relaxed structures
US9653286B2 (en) 2012-02-14 2017-05-16 Hexagem Ab Gallium nitride nanowire based electronics
US10236178B2 (en) 2012-02-14 2019-03-19 Hexagem Ab Gallium nitride nanowire based electronics
US20190334069A1 (en) * 2012-11-02 2019-10-31 Epistar Corporation Light emitting device
US20220376143A1 (en) * 2012-11-02 2022-11-24 Epistar Corporation Electrode structure of light emitting device
US10847682B2 (en) * 2012-11-02 2020-11-24 Epistar Corporation Electrode structure of light emitting device
US11677046B2 (en) * 2012-11-02 2023-06-13 Epistar Corporation Electrode structure of light emitting device
US11437547B2 (en) * 2012-11-02 2022-09-06 Epistar Corporation Electrode structure of light emitting device
US10304992B2 (en) 2013-06-07 2019-05-28 Glo Ab Multicolor LED and method of fabricating thereof
US9748437B2 (en) 2013-06-07 2017-08-29 Glo Ab Multicolor LED and method of fabricating thereof
WO2014197799A1 (fr) * 2013-06-07 2014-12-11 Glo-Usa, Inc. Del multicolore et son procédé de fabrication
US9054233B2 (en) 2013-06-07 2015-06-09 Glo Ab Multicolor LED and method of fabricating thereof
US10483319B2 (en) 2014-08-08 2019-11-19 Glo Ab Pixilated display device based upon nanowire LEDs and method for making the same
US9406839B2 (en) 2014-08-25 2016-08-02 Samsung Electronics Co., Ltd. Nanostructure semiconductor light emitting device
US9748438B2 (en) 2014-08-25 2017-08-29 Samsung Electronics Co., Ltd. Nanostructure semiconductor light emitting device
US9620559B2 (en) 2014-09-26 2017-04-11 Glo Ab Monolithic image chip for near-to-eye display
US9917232B2 (en) 2014-09-26 2018-03-13 Glo Ab Monolithic image chip for near-to-eye display
US10217911B2 (en) 2014-09-26 2019-02-26 Glo Ab Monolithic image chip for near-to-eye display
US20190229293A1 (en) * 2014-10-09 2019-07-25 Sony Corporation Display unit, method of manufacturing display unit, and electronic apparatus
US20170288174A1 (en) * 2014-10-09 2017-10-05 Sony Corporation Display unit, method of manufacturing display unit, and electronic apparatus
US10290832B2 (en) * 2014-10-09 2019-05-14 Sony Corporation Display unit, method of manufacturing display unit, and electronic apparatus for enhancement of luminance
US10497903B2 (en) * 2014-10-09 2019-12-03 Sony Corporation Display unit, method of manufacturing display unit, and electronic apparatus for enhancement of luminance
US10826023B2 (en) 2014-10-09 2020-11-03 Sony Corporation Display unit with disconnected organic layer at projected portion
US11563198B2 (en) 2014-10-09 2023-01-24 Sony Corporation Display unit with organic layer disposed on metal layer and insulation layer
US11871611B2 (en) 2014-10-09 2024-01-09 Sony Corporation Display unit with reflector layer and electronic apparatus
US9978808B2 (en) * 2016-05-04 2018-05-22 Glo Ab Monolithic multicolor direct view display containing different color LEDs and method of making thereof
US20170323925A1 (en) * 2016-05-04 2017-11-09 Glo Ab Monolithic multicolor direct view display containing different color leds and method of making thereof

Also Published As

Publication number Publication date
US20180175236A1 (en) 2018-06-21
US10312404B2 (en) 2019-06-04
ATE489733T1 (de) 2010-12-15
KR101358701B1 (ko) 2014-02-07
TWI536599B (zh) 2016-06-01
JP2010514190A (ja) 2010-04-30
JP5189106B2 (ja) 2013-04-24
TW200843148A (en) 2008-11-01
US20100264454A1 (en) 2010-10-21
WO2008078297A2 (fr) 2008-07-03
KR20090094162A (ko) 2009-09-03
BRPI0721111A2 (pt) 2014-03-04
DE602007010827D1 (de) 2011-01-05
CN101675534A (zh) 2010-03-17
CN101675534B (zh) 2012-09-05
RU2009128240A (ru) 2011-01-27
WO2008078297A3 (fr) 2008-10-23
EP2095435A2 (fr) 2009-09-02
US9911896B2 (en) 2018-03-06
EP2095435B1 (fr) 2010-11-24

Similar Documents

Publication Publication Date Title
US10312404B2 (en) Semiconductor light emitting device growing active layer on textured surface
US7663148B2 (en) III-nitride light emitting device with reduced strain light emitting layer
US9640724B2 (en) III-nitride light emitting device with double heterostructure light emitting region
US9117944B2 (en) Semiconductor light emitting devices grown on composite substrates
US8106403B2 (en) III-nitride light emitting device incorporation boron
KR102147587B1 (ko) 완화 층 상에 성장된 ⅲ-질화물 발광 디바이스
KR101198760B1 (ko) 수직형 발광 소자 및 그 제조방법

Legal Events

Date Code Title Description
AS Assignment

Owner name: PHILIPS LUMILEDS LIGHTING COMPANY, LLC, CALIFORNIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KIM, JAMES C.;YI, SUNGSOO;REEL/FRAME:018673/0453

Effective date: 20061211

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION

AS Assignment

Owner name: LUMILEDS LLC, CALIFORNIA

Free format text: CHANGE OF NAME;ASSIGNOR:PHILIPS LUMILEDS LIGHTING COMPANY LLC;REEL/FRAME:046623/0030

Effective date: 20150326