US20030102209A1 - Metal foil electrolytic manufacturing apparatus - Google Patents

Metal foil electrolytic manufacturing apparatus Download PDF

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Publication number
US20030102209A1
US20030102209A1 US10/275,289 US27528902A US2003102209A1 US 20030102209 A1 US20030102209 A1 US 20030102209A1 US 27528902 A US27528902 A US 27528902A US 2003102209 A1 US2003102209 A1 US 2003102209A1
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US
United States
Prior art keywords
metal foil
rotating cathode
electrolyte
supplying
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/275,289
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English (en)
Inventor
Fumiaki Hosokoshi
Naomitsu Inoue
Satoru Fujita
Tatsuyoshi Sakada
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Mitsui Mining and Smelting Co Ltd
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Individual
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Assigned to MITSUI MINING & SMELTING CO., LTD. (JAPANESE CORPORATION) reassignment MITSUI MINING & SMELTING CO., LTD. (JAPANESE CORPORATION) ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FUJITA, SATORU, HOSOKOSHI, FUMIAKI, INOUE, NAOMITSU, SAKADA, TATSUYOSHI
Publication of US20030102209A1 publication Critical patent/US20030102209A1/en
Abandoned legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/04—Wires; Strips; Foils
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25C—PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
    • C25C1/00—Electrolytic production, recovery or refining of metals by electrolysis of solutions
    • C25C1/12—Electrolytic production, recovery or refining of metals by electrolysis of solutions of copper

Definitions

  • the present invention relates to an apparatus for electrolytically manufacturing a metal foil, and more specifically, to a manufacturing technique of a metal foil intended for uniform thickness in a transverse direction of the metal foil.
  • a metal foil such as an electrodeposited copper foil which is a representative material for a printed wiring board, for example, has been extensively manufactured for various purposes.
  • the method which utilizes an electrolytic reaction has been known.
  • an apparatus for electrolytically manufacturing a metal foil which utilizes this electrolytic reaction an apparatus which employs a drum-like rotating cathode as shown in FIG. 4 is used for continuously manufacturing a metal foil.
  • solution-supplying means 5 having an electrolyte-supplying inlet 4 for supplying an electrolyte in between the rotating cathode 2 and the anode 3 from an underside of the rotating cathode 2 , in which the metal is electrodeposited onto the peripheral surface of the rotating cathode 2 through the electrolytic reaction while supplying the electrolyte from this solution-supplying means 5 , then the metal foil 6 electrodeposited is continuously released from the rotating cathode 2 .
  • the metal foil which can be obtained by this apparatus for electrolytically manufacturing a metal foil is manufactured by continuously peeling the metal electroprecipitated on the surface of the rotating cathode and then making the long lengths of metal foil into a roll-shape.
  • a thickness in a longitudinal direction of the metal foil can be uniformly controlled with relative ease by controlling the rotating speed of the rotating cathode, but a thickness in a transverse direction of the metal foil cannot be easily controlled.
  • the present invention has been achieved in view of the above described circumstances, and an object of the present invention is to provide an apparatus for electrolytically manufacturing a metal foil which can uniformly control a foil thickness in a transverse direction of the metal foil precisely when the metal foil is continuously manufactured through electroprecipitation by the use of a drum-like rotating cathode.
  • the present inventors have conducted a close study on the apparatus for electrolytically manufacturing a metal foil which uses the drum-like rotating cathode. As a consequence of this study, the present inventors have noticed that a liquid flowing state of a electrolyte which is supplied in between the rotating cathode and the anode has a large influence on the thickness uniformity in the transverse direction of the metal foil and have conceived the present invention.
  • the present invention is an apparatus for electrolytically manufacturing a metal foil comprising a drum-like rotating cathode which electrodeposits the metal foil thereon, an anode whose surface is oppositely disposed along a contour of a peripheral surface of the rotating cathode, and solution-supplying means having an electrolyte-supplying inlet for supplying an electrolyte in between the rotating cathode and the anode from an underside of the rotating cathode, the metal being electrodeposited onto the peripheral surface of the rotating cathode through an electrolytic reaction while the electrolyte being supplied from this solution-supplying means, and then the metal foil electrodeposited being continuously peeled from the rotating cathode, in which the solution-supplying means is provided with a plate-like damper body extending in the transverse direction of the rotating cathode above the electrolyte-supplying inlet.
  • the electrolyte When the electrolyte is supplied in between the drum-like rotating cathode which electrodeposits the metal foil thereon and the anode whose surface is oppositely disposed along the contour of the peripheral surface of the rotating cathode from the underside of the rotating cathode, as indicated by dashed lines with arrow heads in FIG. 4, the supplied electrolyte forms a certain liquid flow in which the electrolyte runs into the surface of the rotating cathode at a position facing to the electrolyte -supplying inlet and diverges into two streams going upward along the contour of the peripheral surface of the rotating cathode.
  • a supplying amount of the electrolyte in the transverse direction of the surface of the rotating cathode at a position which faces to the electrolyte-supplying inlet may tend to become non-uniform compared with other regions on the surface of this rotating cathode because the liquid flow at the above described position is more complicated.
  • metal ions available for the electroprecipitation are sufficiently supplied to the surface of the rotating cathode into which the electrolyte runs, so that the present inventors have assumed that electroprecipitation which causes non-uniformity of the thickness in the transverse direction of the metal foil is conducted.
  • the present inventors have provided a plate-like damper body extending in the transverse direction of the rotating cathode above the electrolyte-supplying inlet, in order to dissolve the complicated liquid flow state which is produced on the surface of the rotating cathode at the position facing to this electrolyte-supplying inlet.
  • the present inventors have found that the uniformity of the thickness in the transverse direction can be greatly improved as previously assumed.
  • the present inventors have also found that providing this plate-like damper body has the effect of reducing the abnormal deposition which occurs on the surface of the metal foil.
  • the plate-like damper body of the apparatus for electrolytically manufacturing a metal foil according to the present invention has no restrictions on its shape or its arrangement, except that a certain liquid flow state in which the electrolyte supplied from the electrolyte-supplying inlet toward the surface of the rotating cathode directly runs into the surface of the rotating cathode can be dissolved.
  • the plate-like damper body having any shape or any arrangement can be used as long as the plate-like damper body provided in the transverse direction of the rotating cathode interferes with the flowing direction of the electrolyte which is supplied from the electrolyte-supplying inlet toward the surface of the rotating cathode.
  • the plate-like damper body of the apparatus for electrolytically manufacturing a metal foil according to the present invention is desirably provided with a projection for divergence extending in the longitudinal direction of the plate at a center of the plate-width.
  • the electrolyte directly running into the plate-like damper is diverged into two directions by the projection for divergence, so that the electrolyte smoothly goes upward along the contour of the peripheral surface of the rotating cathode.
  • Providing this projection for divergence for the plate-like damper body ensures that the thickness uniformity in the transverse direction of the metal foil can be improved.
  • the apparatus for electrolytically manufacturing a metal foil according to the present invention preferably has an electrolyte-supplying inlet being divided into a plurality of sections in the transverse direction of the rotating cathode and being able to regulate the flow rate of the electrolyte supplied from the each section of the divided electrolyte-supplying inlet.
  • Such construction facilitates precisely controlling of the uniformity of the thickness in the transverse direction of the metal foil.
  • the apparatus for electrolytically manufacturing a metal foil according to the present invention frequently uses a relatively large rotating cathode or anode etc. in order to achieve high production efficiency, but in such an large apparatus for electrolytically manufacturing a metal foil, members constituting the rotating cathode or anode of the apparatus cannot be uniformly formed.
  • the result of the electroprecipitation tends to vary depending on the apparatus as the apparatus becomes larger.
  • the variations of the thickness in the transverse direction of the manufactured metal foil also tends to differ from apparatus to apparatus.
  • regulating the flow rate of the electrolyte supplied from each section of the divided electrolyte-supplying inlet to correspond to the variations of the thickness in the transverse direction of the metal foil from each apparatus can easily provide the precise control of the thickness uniformity in the transverse direction of the metal foil in cooperation with the effect of the plate-like damper body according to the present invention.
  • FIG. 1 is a partly enlarged perspective view of an apparatus for electrolytically manufacturing a metal foil
  • FIG. 2 is a partly enlarged cross sectional view of an apparatus for electrolytically manufacturing a metal foil provided with a plate-like damper body;
  • FIG. 3 is a partly enlarged perspective view of the plate-like damper body
  • FIG. 4 is a cross sectional view schematically showing the apparatus for electrolytically manufacturing a metal foil
  • FIG. 5 is a graph showing a thickness distribution in a transverse direction when the plate-like damper body is disposed.
  • FIG. 6 is a graph showing a thickness distribution in a transverse direction when the plate-like damper body is not disposed.
  • An apparatus for electrolytically manufacturing a metal foil of the present embodiment has basically the same structure as that of an apparatus conventionally used, and its cross section is schematically shown in FIG. 4.
  • An apparatus 1 for electrolytically manufacturing a metal foil comprises a drum-like rotating cathode 2 which electrodeposits the metal foil thereon and an anode 3 whose surface is oppositely disposed along a contour of a peripheral surface of the rotating cathode 2 .
  • the rotating cathode 2 and the anode 3 are connected to a feeder system which is not shown. And the rotating cathode 2 is disposed such that almost one-half its volume is immersed in an electrolyte.
  • the anode 3 is divided into two sections, and electrolyte supplying means 5 having an electrolyte -supplying inlet 4 for supplying the electrolyte in between the two sections of the anode 3 from an underside of the rotating cathode 2 is provided between the two sections of the anode 3 .
  • electrolyte supplying means 5 having an electrolyte -supplying inlet 4 for supplying the electrolyte in between the two sections of the anode 3 from an underside of the rotating cathode 2 is provided between the two sections of the anode 3 .
  • Supplying the electrolyte from this electrolyte-supplying inlet 4 toward the rotating cathode 2 the electrolyte flows upward along the contour of the peripheral surface of the rotating cathode 2 and overflows into an electrolytic bath 7 as indicated by dashed lines with arrow heads in FIG. 4.
  • a metal foil 6 electroprecipitated onto the peripheral surface of the rotating cathode 2 is released from the rotating cathode 2 and is
  • FIG. 1 is an enlarged perspective view of a portion which is enclosed with a circle A shown in FIG. 4.
  • the electrolytic supplying inlet 4 of the electrolytic supplying means 5 is divided into a plurality of sections in a transverse direction of the rotating cathode 2 , each of the divided electrolyte-supplying inlets 4 ′, 4 ′, . . . being provided with flow rate regulating means, which is not shown in this figure, for regulating the flow rate of the electrolyte to be supplied although.
  • FIG. 2 is an enlarged cross sectional view of a plate-like damper body which is disposed above the electrolyte-supplying inlet 4 of the apparatus 1 for electrolytically manufacturing the metal foil according to the present invention.
  • FIG. 3 is a perspective view of the plate-like damper body which is partly enlarged.
  • the plate-like damper body 10 has almost the same length as a width of the rotating cathode 2 and has a width which is slightly longer than a width of the electrolytic supplying inlet 4 , and a projection 11 for divergence is formed in a longitudinal direction of the plate at a center of the plate-width.
  • partition walls 12 are respectively provided corresponding to the sections 4 ′ of the divided electrolyte-supplying inlet 4 .
  • This partition walls 12 are provided on fixing plates 13 so that the walls are in their vertical positions. Therefore, at the lower part of the plate-like damper body 10 , liquid discharging outlets 14 are respectively formed corresponding to the sections 4 ′, 4 ′, . . . of the divided electrolyte-supplying inlet 4 .
  • a copper foil is manufactured as the metal foil by the use of the apparatus for electrolytically manufacturing a metal foil according to the present invention, the results of studying thickness distribution in the transverse direction and surface properties of the manufactured copper foil will be described.
  • a copper foil was manufactured as the metal foil
  • an apparatus for electrolytically manufacturing the copper foil comprising a drum-like rotating cathode (3 m in diameter and 1.35 m in width) whose peripheral surface is made of Ti and an insoluble anode which is referred to as DSA in which a gap between the rotating cathode and the insoluble anode becomes about 20 mm was used.
  • a plate-like damper body provided with a projection for divergence was made of a Ti material (partition plates and fixing plates are also formed by the Ti material) and disposed above an electrolyte-supplying inlet at a central position between the rotating cathode and the anode.
  • This placement of the plate-like damper body was performed with insulating materials interposed between the anode and the fixing plate in order to prevent the electrolytic current from passing through the plate-like damper body.
  • a copper sulfate solution was used as the electrolyte.
  • Each of the cut out web-like specimens was further divided into smaller strips each of which had a 10 mm of width and a 100 mm of length. This division of the web-like specimens gave 84 strips which were formed by dividing the specimens in the transverse direction. A weight thickness (g/m 2 ) was calculated through measuring a weight of each strip and this calculated value was regarded as a thickness of the copper foil.
  • FIG. 5 shows an apparatus provided with the plate-like damper body
  • FIG. 6 shows an apparatus in which the plate-like damper body was not disposed.
  • a region between the strip specimens B and C corresponds to a position in which the surface of the rotating cathode faces to the electrolyte-supplying inlet.
  • the maximum value of weight thickness was specified among 84 strips obtained by dividing the web-like specimens, a difference between the weight thickness value of each strip and the maximum weight thickness value was calculated, and each value of the weight thickness difference was divided by the maximum value of the weight thickness in order to obtain a value of thickness ratio (%), and then each of the obtained value was plotted.
  • the web-like specimens A to D taken altogether exhibited a weight thickness difference of 14.2% at the maximum and exhibited a weight thickness difference of 6.5% on an average.
  • the apparatus without the plate-like damper body produces variations of the weight thickness in the transverse direction of each of the web-like specimens A to D, a standard deviation at that time was 3.05 (a value calculated from all data on A to D).
  • the apparatus provided with the plate-like damper body had an extremely uniform weight thickness in the transverse direction of each of the web-like specimens A to D, and it was ensured that the standard deviation was 1.89 (a value calculated from all data on A to D).
  • the study on the thickness distribution in the transverse direction was performed on the divided strips having a size of 10 mm in width and a 100 mm in length.
  • the apparatus according to the present invention which could precisely control the variation in weight thickness with a standard deviation of 1.89 is completely different from the conventional apparatus for manufacturing the copper foil which could hardly achieve such a standard deviation.
  • a metal foil when a metal foil is continuously manufactured through electroprecipitation by the use of a drum-like rotating cathode, thickness uniformity in a transverse direction of the metal foil can be precisely controlled and the production of unusual deposits which may occur on a surface of the metal foil can be also regulated.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Electroplating Methods And Accessories (AREA)
US10/275,289 2001-03-29 2002-03-20 Metal foil electrolytic manufacturing apparatus Abandoned US20030102209A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001095612A JP4426127B2 (ja) 2001-03-29 2001-03-29 金属箔電解製造装置
JP2001-95612 2001-03-29

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US20030102209A1 true US20030102209A1 (en) 2003-06-05

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US10/275,289 Abandoned US20030102209A1 (en) 2001-03-29 2002-03-20 Metal foil electrolytic manufacturing apparatus

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US (1) US20030102209A1 (zh)
JP (1) JP4426127B2 (zh)
KR (1) KR100864753B1 (zh)
CN (1) CN1272473C (zh)
TW (1) TW567249B (zh)
WO (1) WO2002079547A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060191798A1 (en) * 2003-04-03 2006-08-31 Fukuda Metal Foil & Powder Co., Ltd. Electrolytic copper foil with low roughness surface and process for producing the same
US20150195909A1 (en) * 2012-07-06 2015-07-09 Jx Nippon Mining & Metals Corporation Ultrathin Copper Foil And Method Of Manufacturing The Same, And Ultrathin Copper Layer

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100813353B1 (ko) * 2006-03-14 2008-03-12 엘에스전선 주식회사 광폭 방향의 중량편차 저감을 위한 금속박막 제박기
KR100700799B1 (ko) * 2006-03-20 2007-03-28 엘에스전선 주식회사 동박의 연속적인 권취방법
JP4866706B2 (ja) * 2006-11-08 2012-02-01 赤星工業株式会社 金属箔電解製造装置
JP4642120B2 (ja) * 2009-04-01 2011-03-02 三井金属鉱業株式会社 電解金属箔製造装置並びに電解金属箔製造装置に用いる薄板状不溶性金属電極の製造方法及びその電解金属箔製造装置を用いて得られた電解金属箔
KR101037245B1 (ko) * 2010-11-16 2011-05-26 경북대학교 산학협력단 신발 살균 처리 장치
KR20130117865A (ko) * 2011-03-04 2013-10-28 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 강도가 높고, 이상 전착에 의한 돌기 형상이 적은 전해 구리박 및 그 제조 방법
KR101343951B1 (ko) * 2011-06-23 2013-12-24 코닉이앤씨 주식회사 금속박의 제조 방법 및 제조 장치
CN103233249A (zh) * 2013-05-09 2013-08-07 南京顺捷机械设备有限公司 一种上进液式铜箔一体机设备
CN104087977B (zh) * 2014-07-06 2016-05-11 湖北中一科技有限公司 一种带有混匀供料一体结构的电解铜箔进料装置及方法
KR102045630B1 (ko) * 2017-11-28 2019-11-15 주식회사 포스코 전주 도금 장치
KR102209616B1 (ko) * 2018-12-05 2021-01-28 주식회사 포스코 전주 도금장치
CN109652826A (zh) * 2019-02-22 2019-04-19 圣达电气有限公司 阴极辊的电解铜箔厚度均匀性控制方法
JP7005558B2 (ja) * 2019-06-10 2022-01-21 日鉄工材株式会社 金属箔製造装置
CN114657607B (zh) * 2022-03-01 2022-12-20 广东嘉元科技股份有限公司 一种电子铜箔制造装置

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Publication number Priority date Publication date Assignee Title
US4318794A (en) * 1980-11-17 1982-03-09 Edward Adler Anode for production of electrodeposited foil
US4529486A (en) * 1984-01-06 1985-07-16 Olin Corporation Anode for continuous electroforming of metal foil
US4647345A (en) * 1986-06-05 1987-03-03 Olin Corporation Metallurgical structure control of electrodeposits using ultrasonic agitation

Family Cites Families (1)

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Publication number Priority date Publication date Assignee Title
US5228965A (en) 1990-10-30 1993-07-20 Gould Inc. Method and apparatus for applying surface treatment to metal foil

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4318794A (en) * 1980-11-17 1982-03-09 Edward Adler Anode for production of electrodeposited foil
US4529486A (en) * 1984-01-06 1985-07-16 Olin Corporation Anode for continuous electroforming of metal foil
US4647345A (en) * 1986-06-05 1987-03-03 Olin Corporation Metallurgical structure control of electrodeposits using ultrasonic agitation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060191798A1 (en) * 2003-04-03 2006-08-31 Fukuda Metal Foil & Powder Co., Ltd. Electrolytic copper foil with low roughness surface and process for producing the same
US20150195909A1 (en) * 2012-07-06 2015-07-09 Jx Nippon Mining & Metals Corporation Ultrathin Copper Foil And Method Of Manufacturing The Same, And Ultrathin Copper Layer
US9930776B2 (en) * 2012-07-06 2018-03-27 Jx Nippon Mining & Metals Corporation Ultrathin copper foil and method of manufacturing the same, and ultrathin copper layer

Also Published As

Publication number Publication date
CN1272473C (zh) 2006-08-30
JP2002294481A (ja) 2002-10-09
CN1460133A (zh) 2003-12-03
WO2002079547A1 (fr) 2002-10-10
JP4426127B2 (ja) 2010-03-03
KR100864753B1 (ko) 2008-10-22
KR20030007594A (ko) 2003-01-23
TW567249B (en) 2003-12-21

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Owner name: MITSUI MINING & SMELTING CO., LTD. (JAPANESE CORPO

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HOSOKOSHI, FUMIAKI;INOUE, NAOMITSU;FUJITA, SATORU;AND OTHERS;REEL/FRAME:013732/0997

Effective date: 20021007

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