US20020175591A1 - Process for the manufacture of piezoceramic multilayer actuators - Google Patents

Process for the manufacture of piezoceramic multilayer actuators Download PDF

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Publication number
US20020175591A1
US20020175591A1 US10/079,946 US7994602A US2002175591A1 US 20020175591 A1 US20020175591 A1 US 20020175591A1 US 7994602 A US7994602 A US 7994602A US 2002175591 A1 US2002175591 A1 US 2002175591A1
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US
United States
Prior art keywords
process according
filler
actuators
lamination
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/079,946
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English (en)
Inventor
Hans-Jurgen Schreiner
Reiner Bindig
Matthias Simmerl
Jurgen Schmidt
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CEREMTEC AG
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CEREMTEC AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CEREMTEC AG filed Critical CEREMTEC AG
Assigned to CEREMTEC AG. reassignment CEREMTEC AG. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BINDIG, REINER, SCHMIDT, JURGEN, SCHREINER, HANS-JURGEN, SIMMERL, MATTHIAS
Publication of US20020175591A1 publication Critical patent/US20020175591A1/en
Priority to US10/755,129 priority Critical patent/US7309397B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y10T156/1056—Perforating lamina
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y10T156/1056—Perforating lamina
    • Y10T156/1057—Subsequent to assembly of laminae
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Definitions

  • the invention concerns a process for the manufacture of piezoceramic multilayer actuators according to the preamble of the first claim.
  • a piezoceramic multilayer actuator 1 is shown schematically in FIG. 1.
  • the actuator consists of stacked thin layers 2 of piezoelectrically active material, for example lead zirconate titanate (PZT), with conductive internal electrodes 3 , which are led out alternately to the surface of the actuator, disposed between said layers.
  • External electrodes 4 , 5 interconnect the internal electrodes 3 .
  • the internal electrodes 3 are electrically connected in parallel and combined into two groups.
  • the two external electrodes 4 , 5 are the connecting poles of the actuator 1 . They are connected via the connections 6 to a voltage source, not shown here.
  • Piezoceramic multilayer actuators are fabricated according to the prior art as monoliths, that is to say the active material onto which internal electrodes are deposited by a silk screen process prior to sintering, is disposed as a so-called green film in successive layers as a stack that is compressed into a green body.
  • the compression of the green body is usually carried out by lamination under the action of pressure and temperature in laminating moulds. Depending on the lamination tool used, this process determines to a large extent the external shape of the actuators.
  • the laminate is separated into several actuators, which are pyrolized and then sintered.
  • the final required geometry of the actuators can only be accurately obtained by the hardening of the sintered actuators.
  • the internal electrode layers deposited in the actuators are thereby also processed. If the processed surfaces are not subsequently electrically insulated, then when these piezoceramic multilayer actuators are actively operated, there is a risk of an electrical flashover at the actuator surface because the dielectric field strength in air, which amounts to approximately 1000 V/mm, is exceeded by the operating field strengths of over 2000 V/mm.
  • the smearing of the electrodes caused by the hardening additionally leads to reduced dielectric strength and/or leakage currents.
  • the object of the present invention is to present a process that simplifies the manufacture of multilayer actuators and by which the demonstrated disadvantages are avoided.
  • the insulating sinter skin needs only to be removed at the connecting faces where the internal electrodes have to be connected to the respective external electrode, for example by grinding. Due to the high mechanical strength of the laminate blocks, all machining operations, such as turning, milling, sawing, drilling or grinding are possible. In this case the bodies are neither damaged nor deformed. Due to the lower hardness of the material compared to the sintered state, tool wear is considerably reduced, thus making low-cost production possible.
  • sinter skin forms all over the surface of the piezoceramic multilayer actuator, which sinter skin has such a high electrical insulating capability, even in the region where the internal electrodes emerge at the surface of the actuator, that subsequent insulation of the surfaces of the piezoceramic multilayer actuator can usually be omitted.
  • the good machinability of the laminate enables piezoceramic multilayer actuators to be manufactured with different shapes.
  • the cross-sectional areas can be circular, elliptical, square or polygonal. All edges of the green bodies can be broken, chamfered or rounded off prior to sintering.
  • the ease of machining of the ceramic material in the green phase also enables rotationally symmetric mouldings to be produced.
  • the laminated block with the at least one multilayer actuator has a high strength and a high dimensional stability. It is thus possible, prior to sintering, to place several boreholes or pocket holes in the block and/or the unsintered piezoceramic multilayer actuator, which can additionally be provided with a thread. Such an arrangement can be advantageous for subsequent applications, such as fixings or connections. Since the layers of the internal electrodes are penetrated by the boreholes or pocket holes as well as by the mahine-cut thread, in this case the sinter skin produced by sintering can also be advantageously used as an insulating layer.
  • a further option for shaping the multilayer actuators consists in punching holes of the required size, shape and number in the green films in the same operating cycle, prior to lamination, in which the green films are suitably punched out for the laminating mould.
  • the green films with the printed internal electrodes thereon are then stacked one on top of the other in the required number and arrangement, so that the boreholes or pocket holes are produced in the desired arrangement and depth.
  • threads can be machine-cut in the holes following lamination.
  • the boreholes, through-holes or pocket holes can be filled prior to lamination with a filler which prevents any plastic deformation of the recesses which otherwise may occur during lamination.
  • This filler is chosen so that under lamination conditions it is not more plastic or cannot be deformed to a greater degree than the piezoceramic material of the green films.
  • a filler may consist of a hard, dimensionally stable and, during lamination, thermally stable material, for example metal or ceramic. According to the shaping, pins or threaded pins can be inserted into the boreholes or pocket holes.
  • plastic or thermoplastic fillers in particular a highly-flexible rubber or rubber-like plastic, are suitable.
  • the filler can have the form of a pin or threaded pin.
  • Fillers which remain dimensionally stable up to the lamination temperature are also suitable. During lamination or sintering these fillers smelt or pyrolize. For example, wax or low-melting-point polymers can be removed from the laminate by heating.
  • a suitable organic material can also be used as a filler, such as is known from the prior art for forming porous ceramics, for example carbon black or a polymer that pyrolizes without residues during lamination or sintering at temperatures up to 700° C.
  • the thermal removal may also be achieved by melting out and/or thermal decomposition in a thermal process preceding sintering, for example an appropriate debonding process.
  • FIG. 2 shows a green film with several internal electrodes
  • FIG. 3 shows a multilayer actuator manufactured according to the process according to the invention.
  • FIG. 2 shows a green film 10 made of piezoceramic material already punched out for the laminating mould.
  • Six internal electrodes 11 are each placed on this green film, this application usually being achieved by the silk screen process.
  • the assignment of several internal electrodes to one green film allows the efficient manufacture of several multilayer actuators at the same time.
  • On one side of the circular cross-sectional area 12 a circular section is cut out so that the area is limited by a secant 13 .
  • a hole 15 is punched out concentrically to the mid-point 14 .
  • the required numbers of green films are stacked one above the other to form a block, so that the internal electrodes lie one above the other.
  • the number of films depends on the size of the multilayer actuator.
  • the block has six multilayer actuators. Due to the ease of separation, following lamination, the multilayer actuators, still in the green state, are separated from each other around the internal electrodes. Likewise still in the green state, the final machining of the multilayer actuators can then take place until the specified basic diameter of the multilayer actuator is obtained. Only after this are the multilayer actuators sintered.
  • the arrangement of the internal electrodes 11 on the green film 10 always has the same orientation. These are internal electrodes of the same polarity.
  • the internal electrodes of the opposite polarity can be fabricated in the same way. In this case, however, their orientation is opposite to the orientation of the internal electrodes of opposite polarity assigned to them, that is to say rotated by 180 degrees on the subsequent green film.
  • the electrode layers with the opposite polarity therefore alternate.
  • the holes 15 lying one above the other form a continuous recess.
  • a multilayer actuator 16 that has been manufactured according to the process according to the invention is shown in a schematic, much enlarged representation in FIG. 3. It has a circular cross-section 12 and is fully coated by a sinter skin 17 .
  • the internal electrodes 11 of the same polarity are fully exposed on the peripheral face, whereas in the case of the internal electrodes of opposite polarity the circumference is broken because of the missing circular section.
  • This design is advantageously utilised to connect the internal electrodes of the same polarity to the respective external electrode 18 , at the opposite sides of the multilayer actuator where the internal electrodes of the same polarity can now be seen at the periphery.
  • the sinter skin 17 is removed in this region by grinding, and the internal electrodes 11 are exposed at their peripheral face.
  • a continuous recess 20 formed from the holes 15 lying one above the other in the green films 10 , which can be used for fixing purposes, runs concentrically to the axis 19 of the multilayer actuator 16 .

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)
US10/079,946 2001-02-21 2002-02-20 Process for the manufacture of piezoceramic multilayer actuators Abandoned US20020175591A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/755,129 US7309397B2 (en) 2001-02-21 2004-01-09 Process for the manufacture of piezoceramic multilayer actuators

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE10108314 2001-02-21
DE10108314.9 2001-02-21
DE10205928A DE10205928A1 (de) 2001-02-21 2002-02-12 Verfahren zur Herstellung piezokeramischer Vielschichtaktoren
DE10205928.4 2002-02-12

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/755,129 Division US7309397B2 (en) 2001-02-21 2004-01-09 Process for the manufacture of piezoceramic multilayer actuators

Publications (1)

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US20020175591A1 true US20020175591A1 (en) 2002-11-28

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US10/079,946 Abandoned US20020175591A1 (en) 2001-02-21 2002-02-20 Process for the manufacture of piezoceramic multilayer actuators
US10/755,129 Expired - Fee Related US7309397B2 (en) 2001-02-21 2004-01-09 Process for the manufacture of piezoceramic multilayer actuators

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US (2) US20020175591A1 (da)
EP (1) EP1235285B1 (da)
JP (1) JP4143311B2 (da)
AT (1) ATE381786T1 (da)
DE (2) DE10205928A1 (da)
DK (1) DK1235285T3 (da)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020152857A1 (en) * 2001-04-18 2002-10-24 Kazuhide Sato Method of producing a ceramic laminate
US20030222240A1 (en) * 2002-05-30 2003-12-04 Tdk Corporation Piezoelectric ceramic production method and piezoelectric element production method
US20040254569A1 (en) * 2003-06-13 2004-12-16 Jared Brosch Multi-element array for acoustic ablation
US20040255443A1 (en) * 2003-06-02 2004-12-23 Denso Corporation Production method of stacked piezoelectric element
US20050121997A1 (en) * 2003-12-03 2005-06-09 Honda Motor Co., Ltd. Chassis frame buckling control device and chassis frame deformation control device
US20050251127A1 (en) * 2003-10-15 2005-11-10 Jared Brosch Miniature ultrasonic transducer with focusing lens for intracardiac and intracavity applications
US20060132001A1 (en) * 2002-12-23 2006-06-22 Bertram Sugg Piezoelectric Actuator and a method for its manufacture
US20080218034A1 (en) * 2005-07-05 2008-09-11 Frank Mai Piezo Actuator and Method For The Production Thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050236727A1 (en) * 2004-04-23 2005-10-27 Niewels Joachim J Method and apparatus for mold component locking using active material elements
DE102005046599A1 (de) * 2005-09-29 2007-04-05 Robert Bosch Gmbh Piezoelektrischer Aktor
DE102007004813B4 (de) * 2007-01-31 2016-01-14 Continental Automotive Gmbh Verfahren zur Herstellung eines piezokeramischen Vielschichtaktors
KR101908113B1 (ko) * 2009-11-16 2018-10-15 삼성전자 주식회사 전기활성 폴리머 엑츄에이터 및 그 제조방법
KR101703281B1 (ko) 2010-12-07 2017-02-06 삼성전자주식회사 다층 전기활성 폴리머 디바이스 및 그 제조방법
DE102016110216B4 (de) * 2016-06-02 2018-10-11 Epcos Ag Verfahren zur Herstellung einer Vielzahl von piezoelektrischen Vielschichtbauelementen

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020152857A1 (en) * 2001-04-18 2002-10-24 Kazuhide Sato Method of producing a ceramic laminate
US7468112B2 (en) * 2001-04-18 2008-12-23 Denso Corporation Method of producing a ceramic laminate
US7056443B2 (en) * 2002-05-30 2006-06-06 Tdk Corporation Piezoelectric ceramic production method and piezoelectric element production method
US20030222240A1 (en) * 2002-05-30 2003-12-04 Tdk Corporation Piezoelectric ceramic production method and piezoelectric element production method
US20090000092A1 (en) * 2002-12-23 2009-01-01 Bertram Sugg Method for the manufacture of a piezoelectric actuator
US20060132001A1 (en) * 2002-12-23 2006-06-22 Bertram Sugg Piezoelectric Actuator and a method for its manufacture
US20040255443A1 (en) * 2003-06-02 2004-12-23 Denso Corporation Production method of stacked piezoelectric element
US7225514B2 (en) * 2003-06-02 2007-06-05 Denso Corporation Production method of stacked piezoelectric element
US7112196B2 (en) 2003-06-13 2006-09-26 Piezo Technologies, Inc. Multi-element array for acoustic ablation
US20040254569A1 (en) * 2003-06-13 2004-12-16 Jared Brosch Multi-element array for acoustic ablation
US20050251127A1 (en) * 2003-10-15 2005-11-10 Jared Brosch Miniature ultrasonic transducer with focusing lens for intracardiac and intracavity applications
US7202588B2 (en) * 2003-12-03 2007-04-10 Honda Motor Co., Ltd. Chassis frame buckling control device and chassis frame deformation control device
US20050121997A1 (en) * 2003-12-03 2005-06-09 Honda Motor Co., Ltd. Chassis frame buckling control device and chassis frame deformation control device
US20080218034A1 (en) * 2005-07-05 2008-09-11 Frank Mai Piezo Actuator and Method For The Production Thereof

Also Published As

Publication number Publication date
JP2002261350A (ja) 2002-09-13
EP1235285A3 (de) 2005-05-25
EP1235285A2 (de) 2002-08-28
US20040139588A1 (en) 2004-07-22
DK1235285T3 (da) 2008-04-14
US7309397B2 (en) 2007-12-18
JP4143311B2 (ja) 2008-09-03
EP1235285B1 (de) 2007-12-19
ATE381786T1 (de) 2008-01-15
DE50211380D1 (de) 2008-01-31
DE10205928A1 (de) 2002-08-22

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Owner name: CEREMTEC AG., GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SCHREINER, HANS-JURGEN;BINDIG, REINER;SIMMERL, MATTHIAS;AND OTHERS;REEL/FRAME:012818/0781

Effective date: 20020311

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