TWI876129B - 高架搬送車 - Google Patents

高架搬送車 Download PDF

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Publication number
TWI876129B
TWI876129B TW111104835A TW111104835A TWI876129B TW I876129 B TWI876129 B TW I876129B TW 111104835 A TW111104835 A TW 111104835A TW 111104835 A TW111104835 A TW 111104835A TW I876129 B TWI876129 B TW I876129B
Authority
TW
Taiwan
Prior art keywords
holding unit
transport vehicle
overhead transport
stereo camera
distance measuring
Prior art date
Application number
TW111104835A
Other languages
English (en)
Chinese (zh)
Other versions
TW202237510A (zh
Inventor
清水裕司
山上盛司
Original Assignee
日商村田機械股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商村田機械股份有限公司 filed Critical 日商村田機械股份有限公司
Publication of TW202237510A publication Critical patent/TW202237510A/zh
Application granted granted Critical
Publication of TWI876129B publication Critical patent/TWI876129B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
    • B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
    • B65G1/1375—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses the orders being assembled on a commissioning stacker-crane or truck
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/18—Control systems or devices
    • B66C13/46—Position indicators for suspended loads or for crane elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/18—Control systems or devices
    • B66C13/48—Automatic control of crane drives for producing a single or repeated working cycle; Program control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/90—Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0618—Apparatus for monitoring, sorting, marking, testing or measuring using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3206—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04—Detection means
    • B65G2203/041—Camera
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04—Detection means
    • B65G2203/042—Sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C19/00—Cranes comprising trolleys or crabs running on fixed or movable bridges or gantries

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Control And Safety Of Cranes (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Forklifts And Lifting Vehicles (AREA)
  • Cosmetics (AREA)
TW111104835A 2021-02-17 2022-02-10 高架搬送車 TWI876129B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021023227 2021-02-17
JP2021-023227 2021-02-17

Publications (2)

Publication Number Publication Date
TW202237510A TW202237510A (zh) 2022-10-01
TWI876129B true TWI876129B (zh) 2025-03-11

Family

ID=82931337

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111104835A TWI876129B (zh) 2021-02-17 2022-02-10 高架搬送車

Country Status (8)

Country Link
US (1) US12588468B2 (https=)
EP (1) EP4249402A4 (https=)
JP (1) JP7306596B2 (https=)
KR (1) KR102790557B1 (https=)
CN (1) CN116783127A (https=)
IL (1) IL303727B1 (https=)
TW (1) TWI876129B (https=)
WO (1) WO2022176288A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102667158B1 (ko) * 2022-04-07 2024-05-17 세메스 주식회사 컨테이너 운반 장치 및 이를 포함하는 물류 반송 시스템
KR20240031731A (ko) * 2022-09-01 2024-03-08 삼성전자주식회사 천장 저장 시스템 및 그 제어 방법
JP7786322B2 (ja) * 2022-09-08 2025-12-16 株式会社ダイフク 搬送装置および搬送方法
KR20250072614A (ko) * 2022-09-16 2025-05-23 모벤시스 코포레이션 반도체 제작 공구의 로드 포트에 대한 오버헤드 이송 차량의 자동 정렬
TWI836925B (zh) * 2023-03-03 2024-03-21 家碩科技股份有限公司 光罩盒次元件的檢測裝置
CN120660183A (zh) * 2023-06-06 2025-09-16 村田机械株式会社 空中搬送车

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001261284A (ja) * 2000-03-15 2001-09-26 Shinko Electric Co Ltd 天井走行搬送装置
JP2009155056A (ja) * 2007-12-27 2009-07-16 Seiko Precision Inc 画像処理装置、荷物搬送設備、及びプログラム
CN103373592A (zh) * 2012-04-11 2013-10-30 株式会社大福 物品运送设备
JP2014106176A (ja) * 2012-11-29 2014-06-09 Tadano Ltd 高さ測定装置
CN105723239A (zh) * 2013-11-20 2016-06-29 松下知识产权经营株式会社 测距摄像系统
CN109835706A (zh) * 2017-11-24 2019-06-04 发那科株式会社 工件配置系统
TW202026215A (zh) * 2018-12-14 2020-07-16 日商村田機械股份有限公司 搬送車
TW202030132A (zh) * 2019-01-10 2020-08-16 日商大福股份有限公司 屋頂搬送車

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US20020090282A1 (en) * 2001-01-05 2002-07-11 Applied Materials, Inc. Actuatable loadport system
JP5700255B2 (ja) * 2012-03-27 2015-04-15 株式会社ダイフク 物品保管設備及び物品搬送設備
US9300954B2 (en) * 2012-09-21 2016-03-29 Tadano Ltd. Surrounding information-obtaining device for working vehicle
US10937187B2 (en) * 2013-10-07 2021-03-02 Apple Inc. Method and system for providing position or movement information for controlling at least one function of an environment
EP3460834B1 (en) 2016-05-20 2020-08-05 Murata Machinery, Ltd. Transport vehicle and transport method
JP6652107B2 (ja) * 2017-05-16 2020-02-19 株式会社ダイフク 高所作業用台車
JP6845106B2 (ja) * 2017-07-21 2021-03-17 株式会社タダノ 点群データのクラスタリング方法、ガイド情報表示装置およびクレーン
DE202017104706U1 (de) * 2017-08-07 2017-09-27 Liebherr-Werk Ehingen Gmbh Raupenkran
US10519008B1 (en) * 2018-06-19 2019-12-31 Jim Riley Crane load centering assembly
SI3594167T1 (sl) * 2018-07-13 2021-11-30 Epsilon Kran Gmbh. Žerjav s sistemom za zajemanje slike
WO2021010013A1 (ja) * 2019-07-17 2021-01-21 村田機械株式会社 走行車、走行車システム及び走行車検出方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001261284A (ja) * 2000-03-15 2001-09-26 Shinko Electric Co Ltd 天井走行搬送装置
JP2009155056A (ja) * 2007-12-27 2009-07-16 Seiko Precision Inc 画像処理装置、荷物搬送設備、及びプログラム
CN103373592A (zh) * 2012-04-11 2013-10-30 株式会社大福 物品运送设备
JP2014106176A (ja) * 2012-11-29 2014-06-09 Tadano Ltd 高さ測定装置
CN105723239A (zh) * 2013-11-20 2016-06-29 松下知识产权经营株式会社 测距摄像系统
CN109835706A (zh) * 2017-11-24 2019-06-04 发那科株式会社 工件配置系统
TW202026215A (zh) * 2018-12-14 2020-07-16 日商村田機械股份有限公司 搬送車
TW202030132A (zh) * 2019-01-10 2020-08-16 日商大福股份有限公司 屋頂搬送車

Also Published As

Publication number Publication date
US20240128113A1 (en) 2024-04-18
IL303727A (en) 2023-08-01
JPWO2022176288A1 (https=) 2022-08-25
IL303727B1 (en) 2026-02-01
EP4249402A1 (en) 2023-09-27
EP4249402A4 (en) 2024-10-23
TW202237510A (zh) 2022-10-01
KR102790557B1 (ko) 2025-04-07
US12588468B2 (en) 2026-03-24
KR20230123508A (ko) 2023-08-23
WO2022176288A1 (ja) 2022-08-25
JP7306596B2 (ja) 2023-07-11
CN116783127A (zh) 2023-09-19

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