KR102790557B1 - 천장 반송차 - Google Patents

천장 반송차 Download PDF

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Publication number
KR102790557B1
KR102790557B1 KR1020237024678A KR20237024678A KR102790557B1 KR 102790557 B1 KR102790557 B1 KR 102790557B1 KR 1020237024678 A KR1020237024678 A KR 1020237024678A KR 20237024678 A KR20237024678 A KR 20237024678A KR 102790557 B1 KR102790557 B1 KR 102790557B1
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KR
South Korea
Prior art keywords
unit
ceiling
holding unit
maintenance unit
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020237024678A
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English (en)
Korean (ko)
Other versions
KR20230123508A (ko
Inventor
유지 시미즈
세이지 야마가미
Original Assignee
무라다기카이가부시끼가이샤
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Publication of KR102790557B1 publication Critical patent/KR102790557B1/ko
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67733—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
    • B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
    • B65G1/1375—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses the orders being assembled on a commissioning stacker-crane or truck
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/18—Control systems or devices
    • B66C13/46—Position indicators for suspended loads or for crane elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/18—Control systems or devices
    • B66C13/48—Automatic control of crane drives for producing a single or repeated working cycle; Program control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • H01L21/67259—
    • H01L21/67294—
    • H01L21/6773—
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/90—Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0618—Apparatus for monitoring, sorting, marking, testing or measuring using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3206—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04—Detection means
    • B65G2203/041—Camera
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04—Detection means
    • B65G2203/042—Sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C19/00—Cranes comprising trolleys or crabs running on fixed or movable bridges or gantries

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Control And Safety Of Cranes (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Forklifts And Lifting Vehicles (AREA)
  • Cosmetics (AREA)
KR1020237024678A 2021-02-17 2021-11-16 천장 반송차 Active KR102790557B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021023227 2021-02-17
JPJP-P-2021-023227 2021-02-17
PCT/JP2021/042080 WO2022176288A1 (ja) 2021-02-17 2021-11-16 天井搬送車

Publications (2)

Publication Number Publication Date
KR20230123508A KR20230123508A (ko) 2023-08-23
KR102790557B1 true KR102790557B1 (ko) 2025-04-07

Family

ID=82931337

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237024678A Active KR102790557B1 (ko) 2021-02-17 2021-11-16 천장 반송차

Country Status (8)

Country Link
US (1) US12588468B2 (https=)
EP (1) EP4249402A4 (https=)
JP (1) JP7306596B2 (https=)
KR (1) KR102790557B1 (https=)
CN (1) CN116783127A (https=)
IL (1) IL303727B1 (https=)
TW (1) TWI876129B (https=)
WO (1) WO2022176288A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102667158B1 (ko) * 2022-04-07 2024-05-17 세메스 주식회사 컨테이너 운반 장치 및 이를 포함하는 물류 반송 시스템
KR20240031731A (ko) * 2022-09-01 2024-03-08 삼성전자주식회사 천장 저장 시스템 및 그 제어 방법
JP7786322B2 (ja) * 2022-09-08 2025-12-16 株式会社ダイフク 搬送装置および搬送方法
KR20250072614A (ko) * 2022-09-16 2025-05-23 모벤시스 코포레이션 반도체 제작 공구의 로드 포트에 대한 오버헤드 이송 차량의 자동 정렬
TWI836925B (zh) * 2023-03-03 2024-03-21 家碩科技股份有限公司 光罩盒次元件的檢測裝置
CN120660183A (zh) * 2023-06-06 2025-09-16 村田机械株式会社 空中搬送车

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009155056A (ja) * 2007-12-27 2009-07-16 Seiko Precision Inc 画像処理装置、荷物搬送設備、及びプログラム
JP2014106176A (ja) * 2012-11-29 2014-06-09 Tadano Ltd 高さ測定装置
US20200270102A1 (en) 2016-05-20 2020-08-27 Murata Machinery, Ltd. Transport vehicle and transport method
US20220269280A1 (en) 2019-07-17 2022-08-25 Murata Machinery, Ltd. Traveling vehicle, traveling vehicle system, and traveling vehicle detection method

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JP4465415B2 (ja) 2000-03-15 2010-05-19 ムラテックオートメーション株式会社 天井走行搬送装置
US20020090282A1 (en) * 2001-01-05 2002-07-11 Applied Materials, Inc. Actuatable loadport system
JP5700255B2 (ja) * 2012-03-27 2015-04-15 株式会社ダイフク 物品保管設備及び物品搬送設備
JP6020265B2 (ja) * 2012-04-11 2016-11-02 株式会社ダイフク 物品搬送設備
US9300954B2 (en) * 2012-09-21 2016-03-29 Tadano Ltd. Surrounding information-obtaining device for working vehicle
US10937187B2 (en) * 2013-10-07 2021-03-02 Apple Inc. Method and system for providing position or movement information for controlling at least one function of an environment
WO2015075926A1 (ja) * 2013-11-20 2015-05-28 パナソニックＩｐマネジメント株式会社 測距撮像システム
JP6652107B2 (ja) * 2017-05-16 2020-02-19 株式会社ダイフク 高所作業用台車
JP6845106B2 (ja) * 2017-07-21 2021-03-17 株式会社タダノ 点群データのクラスタリング方法、ガイド情報表示装置およびクレーン
DE202017104706U1 (de) * 2017-08-07 2017-09-27 Liebherr-Werk Ehingen Gmbh Raupenkran
JP6662836B2 (ja) * 2017-11-24 2020-03-11 ファナック株式会社 収容領域又は治具にワークを配置するワーク配置システム
US10519008B1 (en) * 2018-06-19 2019-12-31 Jim Riley Crane load centering assembly
SI3594167T1 (sl) * 2018-07-13 2021-11-30 Epsilon Kran Gmbh. Žerjav s sistemom za zajemanje slike
WO2020121765A1 (ja) 2018-12-14 2020-06-18 村田機械株式会社 搬送車
JP7063277B2 (ja) 2019-01-10 2022-05-09 株式会社ダイフク 天井搬送車

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009155056A (ja) * 2007-12-27 2009-07-16 Seiko Precision Inc 画像処理装置、荷物搬送設備、及びプログラム
JP2014106176A (ja) * 2012-11-29 2014-06-09 Tadano Ltd 高さ測定装置
US20200270102A1 (en) 2016-05-20 2020-08-27 Murata Machinery, Ltd. Transport vehicle and transport method
US20220269280A1 (en) 2019-07-17 2022-08-25 Murata Machinery, Ltd. Traveling vehicle, traveling vehicle system, and traveling vehicle detection method

Also Published As

Publication number Publication date
US20240128113A1 (en) 2024-04-18
IL303727A (en) 2023-08-01
JPWO2022176288A1 (https=) 2022-08-25
IL303727B1 (en) 2026-02-01
TWI876129B (zh) 2025-03-11
EP4249402A1 (en) 2023-09-27
EP4249402A4 (en) 2024-10-23
TW202237510A (zh) 2022-10-01
US12588468B2 (en) 2026-03-24
KR20230123508A (ko) 2023-08-23
WO2022176288A1 (ja) 2022-08-25
JP7306596B2 (ja) 2023-07-11
CN116783127A (zh) 2023-09-19

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