CN116783127A - 空中搬送车 - Google Patents
空中搬送车 Download PDFInfo
- Publication number
- CN116783127A CN116783127A CN202180085091.1A CN202180085091A CN116783127A CN 116783127 A CN116783127 A CN 116783127A CN 202180085091 A CN202180085091 A CN 202180085091A CN 116783127 A CN116783127 A CN 116783127A
- Authority
- CN
- China
- Prior art keywords
- holding unit
- unit
- sensor
- distance measuring
- dimensional distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 37
- 238000005259 measurement Methods 0.000 claims abstract description 4
- 230000001133 acceleration Effects 0.000 claims description 4
- 238000004020 luminiscence type Methods 0.000 claims 1
- 239000003550 marker Substances 0.000 claims 1
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 238000012546 transfer Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 241000791900 Selene vomer Species 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000003190 augmentative effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
- B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
- B65G1/1375—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses the orders being assembled on a commissioning stacker-crane or truck
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
- B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/18—Control systems or devices
- B66C13/46—Position indicators for suspended loads or for crane elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/18—Control systems or devices
- B66C13/48—Automatic control of crane drives for producing a single or repeated working cycle; Programme control
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/90—Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/041—Camera
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/042—Sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C19/00—Cranes comprising trolleys or crabs running on fixed or movable bridges or gantries
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Control And Safety Of Cranes (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Forklifts And Lifting Vehicles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
空中搬送车具备:保持单元,该保持单元以能够升降的方式设置,并保持物品;三维测距传感器,该三维测距传感器将在由保持单元保持的物品的正下方形成的下方空间的周围包含在检测范围内;以及控制装置,该控制装置基于三维测距传感器的检测结果来判定有无障碍物。
Description
技术领域
本发明的一个方面涉及空中搬送车。
背景技术
作为关于空中搬送车的技术,例如已知专利文献1中记载的搬送车。专利文献1中记载的搬送车具备:主体部;具有保持物品的保持部的升降台(保持单元);通过具有挠性的吊持部件的放出(绕出)及卷绕而使升降台升降的升降驱动部;以及设于升降驱动部并照射激光等具有指向性的检测波的俯视传感器(look-down sensor)。在专利文献1所记载的搬送车中,谋求从俯视传感器朝向升降台的下降目的地附近照射检测波来判定有无异物(障碍物)。
现有技术文献
专利文献
专利文献1:国际公开第2017/199593号
发明内容
在上述那样的空中搬送车中,有可能将例如与升降的保持单元接近的周边装置的突出部分等作为障碍物而进行误判定。另外,在上述的空中搬送车中,由于俯视传感器的检测范围窄,所以有可能无法可靠地检测障碍物。
因此,本发明的一个方面的目的为,提供一种能够准确且可靠地判定有无障碍物的空中搬送车。
本发明的一个方面的空中搬送车具备:保持单元,该保持单元以能够升降的方式设置,并保持物品;三维测距传感器,该三维测距传感器将在由保持单元保持的物品的正下方形成的下方空间的周围包含在检测范围内;以及控制装置,该控制装置基于三维测距传感器的检测结果来判定有无障碍物。
在该空中搬送车中,能够通过三维测距传感器在比俯视传感器等大的检测范围内检测物体。另外,能够通过三维测距传感器在三维上检测存在于检测范围内的物体,因此,能够抑制例如将处于高位置的周边装置等的突出部分作为障碍物那样的误判定。因此,能够准确且可靠的判定有无障碍物。
在本发明的一个方面的空中搬送车中,也可以是,三维测距传感器将保持单元及由保持单元保持的物品中的至少一方包含在检测范围内,控制装置基于三维测距传感器的检测结果,判定由保持单元保持的物品的晃动、倾斜及旋转中的至少某一个。该情况下,在移载物品时,能够利用例如物品的晃动、倾斜及旋转中的至少某一个的判定结果来控制保持单元的升降等,由此,能够防止物品的移载错误等。
在本发明的一个方面的空中搬送车中,也可以是,保持单元及由保持单元保持的物品中的至少一方具有发光器,三维测距传感器检测发光器的发光。由此,能够利用发光器的发光来判定物品的晃动、倾斜及旋转中的至少某一个。
在本发明的一个方面的空中搬送车中,也可以是,保持单元及由保持单元保持的物品中的至少一方具有AR标记,三维测距传感器检测AR标记。由此,能够利用AR标记来判定物品的晃动、倾斜及旋转中的至少某一个。
在本发明的一个方面的空中搬送车中,也可以是,三维测距传感器包括立体相机。该情况下,即使在空中搬送车的周围存在其他利用红外线传感器等的装置,立体相机也不会与该其他红外线传感器等相互干涉,因此能够抑制三维测距传感器对该其他红外线传感器等带来不良影响。
在本发明的一个方面的空中搬送车中,也可以是,立体相机以能够俯瞰保持单元的方式设于比保持单元靠上方的位置,将下降到最低位置时的保持单元包含在视角内。该情况下,能够有效地使用立体相机作为三维测距传感器。
本发明的一个方面的空中搬送车也可以具备使保持单元升降的升降驱动单元,三维测距传感器在升降驱动单元中配置于由保持单元保持的物品的正上方的位置。该情况下,能够实现三维测距传感器的有效的配置结构。
本发明的一个方面的空中搬送车也可以具备检测三维测距传感器的晃动及倾斜的陀螺仪传感器及加速度传感器。该情况下,能够更加准确且可靠地判定有无障碍物。
发明效果
根据本发明的一个方面,能够提供能够准确且可靠地判定有无障碍物的空中搬送车。
附图说明
图1是表示一个实施方式的空中搬送车的侧视图。
图2是表示图1的空中搬送车中的立体相机的检测范围的主视图。
图3是表示图1的空中搬送车中的立体相机的检测范围的主视图。
图4是表示变形例的包含发光器的图像的图。
图5是表示变形例的包含AR标记的图像的图。
具体实施方式
以下,参照附图来详细说明一个实施方式。对相同或相当的要素标注相同的附图标记并省略重复的说明。
如图1所示,一个实施方式的空中搬送车1沿着铺设在制造半导体器件的洁净室的顶棚附近的轨道20行驶。空中搬送车1进行收容有多个半导体晶片的FOUP(Front OpeningUnified Pod)(物品)200的搬送、以及FOUP200相对于设在对半导体晶片实施各种处理的处理装置上的装载部(移载部)300等的移载。
空中搬送车1具备框架单元2、行驶单元3、横向单元4、θ单元5、升降驱动单元6、保持单元7、搬送车控制器(控制部)8和通信部9。框架单元2具有中央框架15、前框架16和后框架17。前框架16从中央框架15中的前侧(空中搬送车1的行驶方向上的前侧)的端部向下侧延伸。后框架17从中央框架15中的后侧(空中搬送车1的行驶方向上的后侧)的端部向下侧延伸。
行驶单元3配置于中央框架15的上侧。行驶单元3例如通过从沿着轨道20铺设的高频电流线以非接触的方式接受电力的供给,从而沿着轨道20行驶。横向单元4配置于中央框架15的下侧。横向单元4使θ单元5、升降驱动单元6及保持单元7向横向(空中搬送车1的行驶方向上的侧方)移动。θ单元5配置于横向单元4的下侧。θ单元5使升降驱动单元6及保持单元7在水平面内转动。
升降驱动单元6配置于θ单元5的下侧。升降驱动单元6使保持单元7升降。升降驱动单元6通过与保持单元7连接的带B的卷绕或放出而使保持单元7升降。保持单元7以能够升降的方式设置。保持单元7配置于升降驱动单元6的下侧。保持单元7通过多个带B而悬吊。保持单元7通过升降驱动单元6对带B的卷绕或放出而升降。保持单元7保持(把持)FOUP200的凸缘201。保持单元7具有一对夹具12、12。一对夹具12、12例如通过驱动马达及连杆机构而开闭。
搬送车控制器8例如配置于中央框架15。搬送车控制器8是由CPU(CentralProcessing Unit)、ROM(Read only memory)及RAM(Random access memory)等构成的电子控制单元。搬送车控制器8控制空中搬送车1的各部。
如以上那样构成的空中搬送车1作为一例而如下地动作。在从装载部300向空中搬送车1移载FOUP200的情况下,首先,使未保持FOUP200的空中搬送车1停止到与装载部300对应的位置。此时,在要下降的保持单元7的位置从相对于装载部300的规定位置偏离的情况下,通过驱动横向单元4及θ单元5而调整保持单元7的水平位置及水平角度。接着,通过升降驱动单元6使保持单元7下降,利用保持单元7保持载置于装载部300的FOUP200的凸缘201。接着,通过升降驱动单元6使保持单元7上升到最上升位置。
另一方面,在从空中搬送车1向装载部300移载FOUP200的情况下,首先,使保持有FOUP200的空中搬送车1停止到与装载部300对应的位置。此时,在要下降的保持单元7的位置从相对于装载部300的规定位置偏离的情况下,通过驱动横向单元4及θ单元5而调整保持单元的水平位置及水平角度。接着,通过升降驱动单元6使保持单元7下降,在装载部300载置FOUP200,释放保持单元7对凸缘201的保持。接着,通过升降驱动单元6使保持单元7上升到最上升位置。
在此,本实施方式的空中搬送车1如图2及图3所示具备发光器7K和立体相机SC。发光器7K设于保持单元7。发光器7K配置在进入立体相机SC的视角中的位置。发光器7K设于保持单元7的上侧。发光器7K向上方射出直进性良好的激光。发光器7K发出红外线。例如作为发光器7K使用红外线LED。设置发光器7K的位置没有特别限定,只要是立体相机SC的检测范围内即可。
立体相机SC是通过使用多个相机(摄像头)从多个不同的方向同时进行拍摄,而能够识别其检测范围内的物体并获取直到该物体的距离信息的装置。作为此处的立体相机SC,使用对周边光进行拍摄的被动方式的立体相机。立体相机SC构成三维测距传感器。此外,作为物体的识别,能够使用公知的各种图像识别手法及图像处理手法。本实施方式中的物体的距离信息对应于物体的高度信息。
立体相机SC以能够俯瞰保持单元7的方式设于比保持单元7靠上方的位置。立体相机SC在升降驱动单元6中配置于由保持单元7保持的FOUP200的正上方的位置。在图示的一例中,立体相机SC以朝向下方的方式设于升降驱动单元6的中央部分。
这样的立体相机SC在检测范围DA内至少包含保持单元7、由保持单元7保持的FOUP200、以及形成在由保持单元7保持的FOUP200正下方的下方空间R的周围。下方空间R在三维上构成使FOUP200下降到装载部300的路径。下方空间R构成使保持单元7升降并移载FOUP200时的该FOUP200的升降路径。立体相机SC能够以俯瞰装载部300周边的方式进行拍摄。立体相机SC将下降到最低位置时的保持单元7(处于对载置于装载部300的FOUP200进行保持的高度位置的保持单元7)包含在视角内。立体相机SC能够检测发光器7K的发光(红外线)。
搬送车控制器8基于立体相机SC的检测结果来判定有无障碍物。作为障碍物,可列举例如装载部300周边的人、吊棒、梯凳顶板、移动式脚手架等。作为一例,搬送车控制器8在基于由立体相机SC识别出的物体及其距离信息判断为该物体与下方空间R发生了干涉或其可能性高的情况下,将该物体判定为障碍物。物体是否与下方空间R发生了干涉(其可能性是否高)的判断能够使用公知的各种判断手法。
搬送车控制器8基于立体相机SC的检测结果判定由保持单元7保持的FOUP200的晃动、倾斜及旋转。作为一例,搬送车控制器8根据由立体相机SC检测到的发光器7K的发光的举动,判定FOUP200是否以规定量以上晃动并判定其晃动速度。FOUP200的晃动能够基于从发光器7K射出的激光相对于目标轴以何种程度偏移来判定。另外,作为一例,搬送车控制器8根据由立体相机SC检测到的发光器7K的发光的位置,判定FOUP200是否以规定量以上倾斜。另外,作为一例,搬送车控制器8根据由立体相机SC检测到的发光器7K的发光的位置,判定FOUP200是否处于绕铅垂方向的轴线旋转了规定量以上的位置。
搬送车控制器8将与有无障碍物相关的判定结果信息发送到上位控制装置(未图示)等。上位控制装置将与有无障碍物有关的判定结果信息报知给作业人员。另外,搬送车控制器8在判定为有障碍物的情况下,停止或禁止保持单元7的升降。另外,搬送车控制器8基于与由保持单元7保持的FOUP200的晃动、倾斜及旋转相关的判定结果信息,控制FOUP200的移载动作。例如,搬送车控制器8以使FOUP200的晃动变小的方式、以使FOUP200的倾斜变小的方式、以及以使FOUP200的旋转变小的方式,控制保持单元7的升降、横向单元4的驱动及θ单元5的驱动中的至少某一个。此外,在由保持单元7保持的FOUP200的晃动、倾斜及旋转中的任一个超过规定量的情况下,搬送车控制器8停止或禁止保持单元7的升降,上位控制装置将与晃动、倾斜及旋转有关的错误信息报知给作业人员。
以上,在空中搬送车1中,能够通过立体相机SC在比俯视传感器等大的检测范围DA内检测物体。能够通过立体相机SC以面方式进行范围检测。另外,能够通过立体相机SC在三维上检测存在于检测范围的物体,因此能够抑制例如将处于高位置的周边装置400等的突出部分400T(参照图2及图3)作为障碍物那样的误判定。因此,根据空中搬送车1,能够准确且可靠的判定有无障碍物。
在空中搬送车1中,立体相机SC将保持单元7及由保持单元7保持的FOUP200包含在检测范围内。搬送车控制器8基于立体相机SC的检测结果,判定由保持单元7保持的FOUP200的晃动、倾斜及旋转。在该情况下,能够实现FOUP200的晃动、倾斜及旋转的检测的大范围化及高精度化。另外,在移载FOUP200时,能够利用FOUP200的晃动、倾斜及旋转的判定结果控制保持单元7的升降等,能够将FOUP200的移载错误等防止于未然。
在空中搬送车1中,保持单元7具有发光器7K,立体相机SC检测该发光器7K的发光。由此,能够利用发光器7K的发光来判定FOUP200的晃动、倾斜及旋转。
在空中搬送车1中,作为三维测距传感器而使用立体相机SC。在该情况下,即使在空中搬送车1的周围存在其他利用红外线传感器等的装置,立体相机SC也不会与该其他红外线传感器等相互干涉,因此,能够抑制立体相机SC对该其他红外线传感器等带来不良影响。另外,通过使用立体相机SC作为三维测距传感器,能够不受周围的其他红外线传感器的影响地判定有无障碍物。另外,通过使用立体相机SC作为三维测距传感器,能够简单地识别障碍物。
在空中搬送车1中,立体相机SC以能够俯瞰保持单元7的方式设于比保持单元7靠上方的位置,将下降到最低位置时的保持单元7包含在视角内。该情况下,能够有效地使用立体相机SC作为三维测距传感器。
空中搬送车1具备使保持单元7升降的升降驱动单元6。立体相机SC在升降驱动单元6中配置于由保持单元7保持的FOUP200的正上方的位置。该情况下,能够实现立体相机SC的有效的配置结构。
以上,说明了实施方式,但本发明的一个形态不限于上述实施方式,能够在不脱离发明主旨的范围内进行各种变更。
在上述实施方式中,作为物品而将FOUP200作为对象,但物品没有特别限定,只要是由空中搬送车1搬送的物体,则可以是各种各样的物体。在上述实施方式中,使用立体相机SC作为三维测距传感器,但三维测距传感器没有特别限定。作为三维测距传感器,也可以使用例如TOF(Time of Flight)相机,也可以使用具有红外投光部和受光部的红外线测距传感器,还可以使用多个激光测距仪或3DLIDAR(Light Detection and Ranging)。
在上述实施方式中,设置立体相机SC的位置没有特别限定,只要以将下方空间R的周围包含在检测范围内的方式配置即可。在上述实施方式中,通过搬送车控制器8判定FOUP200的晃动、倾斜及旋转,但也可以仅判定FOUP200的晃动、倾斜及旋转中的至少某一个。
在上述实施方式中,保持单元7具有发光器7K,但也可以取而代之或在此基础上,例如如图4所示,FOUP200具有发光器200K。该情况下,立体相机SC检测发光器200K的发光。发光器200K在FOUP200的上部以映入到由立体相机SC拍摄到的图像G中的方式配置。该情况下,能够利用由立体相机SC检测到的发光器200K的发光,判定发光器200K的晃动、倾斜及旋转中的至少某一个。设置发光器200K的位置没有特别限定,只要是立体相机SC的检测范围内即可。此外,发光器7K、200K也可以配置多个,发光形状可以设为独特的形状。
在上述实施方式中,也可以是,保持单元7及由保持单元7保持的FOUP200中的至少一方具有AR(Augmented Reality)标记,立体相机SC检测AR标记。例如如图5所示,可以在FOUP200的上部粘贴AR标记200M。AR标记200M是二维码的一种,以映入到由立体相机SC拍摄到的图像G中的方式配置。该情况下,能够利用AR标记200M判定FOUP200的晃动、倾斜及旋转中的至少某一个。粘贴AR标记200M的位置没有特别限定,只要是立体相机SC的检测范围内即可。
在上述实施方式中,也可以根据立体相机SC的检测结果识别保持单元7及FOUP200的形状。该情况下,能够利用识别出的保持单元7及FOUP200的形状来判定FOUP200的晃动、倾斜及旋转中的至少某一个。也就是说,通过基于将保持单元7及FOUP200中的至少一方包含在检测范围内的立体相机SC的检测结果,能够判定FOUP200的晃动、倾斜及旋转中的至少某一个。
在上述实施方式中,也可以在空中搬送车1搭载陀螺仪传感器及加速度传感器来检测空中搬送车1的晃动及倾斜(即立体相机SC的晃动及倾斜)。该情况下,也可以根据由陀螺仪传感器及加速度传感器检测到的晃动及倾斜,适当修正立体相机SC的检测结果。在上述实施方式中,具备搬送车控制器8作为控制装置,但也可以取而代之,具备搬送车控制器8之外的一个或多个控制器作为控制装置。
上述实施方式及变形例中的各结构不限定于上述的材料及形状,能够适用各种各样的材料及形状。上述实施方式或变形例中的各结构能够任意地适用于其他实施方式或变形例中的各结构。上述实施方式或变形例中的各结构的一部分能够在不脱离本发明的一个形态的主旨的范围内适当省略。
附图标记说明
1:空中搬送车,6:升降驱动单元,7:保持单元,7K、200K:发光器,8:搬送车控制器(控制装置),200:FOUP(物品),200M:AR标记,DA:检测范围,R:下方空间,SC:立体相机(三维测距传感器)。
Claims (8)
1.一种空中搬送车,其具备:
保持单元,该保持单元以能够升降的方式设置,并保持物品;
三维测距传感器,该三维测距传感器将在由所述保持单元保持的所述物品的正下方形成的下方空间的周围包含在检测范围内;以及
控制装置,该控制装置基于所述三维测距传感器的检测结果来判定有无障碍物。
2.根据权利要求1所述的空中搬送车,其中,
所述三维测距传感器将所述保持单元及由所述保持单元保持的所述物品中的至少一方包含在检测范围内,
所述控制装置基于所述三维测距传感器的检测结果,判定由所述保持单元保持的所述物品的晃动、倾斜及旋转中的至少某一个。
3.根据权利要求2所述的空中搬送车,其中,
所述保持单元及由所述保持单元保持的所述物品中的至少一方具有发光器,
所述三维测距传感器检测所述发光器的发光。
4.根据权利要求2所述的空中搬送车,其中,
所述保持单元及由所述保持单元保持的所述物品中的至少一方具有AR标记,
所述三维测距传感器检测所述AR标记。
5.根据权利要求1至4中任一项所述的空中搬送车,其中,
所述三维测距传感器包括立体相机。
6.根据权利要求5所述的空中搬送车,其中,
所述立体相机以能够俯瞰所述保持单元的方式设于比所述保持单元靠上方的位置,将下降到最低位置时的所述保持单元包含在视角内。
7.根据权利要求1至6中任一项所述的空中搬送车,其中,
具备使所述保持单元升降的升降驱动单元,
所述三维测距传感器在所述升降驱动单元中配置于由所述保持单元保持的所述物品的正上方的位置。
8.根据权利要求1至7中任一项所述的空中搬送车,其中,
具备检测所述三维测距传感器的晃动及倾斜的陀螺仪传感器及加速度传感器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021023227 | 2021-02-17 | ||
JP2021-023227 | 2021-02-17 | ||
PCT/JP2021/042080 WO2022176288A1 (ja) | 2021-02-17 | 2021-11-16 | 天井搬送車 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN116783127A true CN116783127A (zh) | 2023-09-19 |
Family
ID=82931337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202180085091.1A Pending CN116783127A (zh) | 2021-02-17 | 2021-11-16 | 空中搬送车 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20240128113A1 (zh) |
EP (1) | EP4249402A1 (zh) |
JP (1) | JP7306596B2 (zh) |
KR (1) | KR20230123508A (zh) |
CN (1) | CN116783127A (zh) |
IL (1) | IL303727A (zh) |
TW (1) | TW202237510A (zh) |
WO (1) | WO2022176288A1 (zh) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4465415B2 (ja) * | 2000-03-15 | 2010-05-19 | ムラテックオートメーション株式会社 | 天井走行搬送装置 |
JP2009155056A (ja) | 2007-12-27 | 2009-07-16 | Seiko Precision Inc | 画像処理装置、荷物搬送設備、及びプログラム |
JP6097063B2 (ja) | 2012-11-29 | 2017-03-15 | 株式会社タダノ | 高さ測定装置及び高さ測定方法 |
EP3460834B1 (en) | 2016-05-20 | 2020-08-05 | Murata Machinery, Ltd. | Transport vehicle and transport method |
US20220059380A1 (en) | 2018-12-14 | 2022-02-24 | Murata Machinery, Ltd. | Conveyance vehicle |
JP7063277B2 (ja) | 2019-01-10 | 2022-05-09 | 株式会社ダイフク | 天井搬送車 |
-
2021
- 2021-11-16 JP JP2023500536A patent/JP7306596B2/ja active Active
- 2021-11-16 US US18/273,062 patent/US20240128113A1/en active Pending
- 2021-11-16 EP EP21926716.8A patent/EP4249402A1/en active Pending
- 2021-11-16 IL IL303727A patent/IL303727A/en unknown
- 2021-11-16 WO PCT/JP2021/042080 patent/WO2022176288A1/ja active Application Filing
- 2021-11-16 KR KR1020237024678A patent/KR20230123508A/ko unknown
- 2021-11-16 CN CN202180085091.1A patent/CN116783127A/zh active Pending
-
2022
- 2022-02-10 TW TW111104835A patent/TW202237510A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
IL303727A (en) | 2023-08-01 |
TW202237510A (zh) | 2022-10-01 |
EP4249402A1 (en) | 2023-09-27 |
JPWO2022176288A1 (zh) | 2022-08-25 |
KR20230123508A (ko) | 2023-08-23 |
US20240128113A1 (en) | 2024-04-18 |
WO2022176288A1 (ja) | 2022-08-25 |
JP7306596B2 (ja) | 2023-07-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6092678A (en) | Overhead hoist transfer | |
JP6710622B2 (ja) | 搬送装置および搬送方法 | |
JP6007880B2 (ja) | 天井搬送車 | |
JP6747511B2 (ja) | 搬送装置、及び搬送方法 | |
JP2006528122A (ja) | フォークリフトの荷物支持手段上の可動センサ装置 | |
JP6119699B2 (ja) | 移載位置決定方法 | |
KR20180133900A (ko) | 반송차 및 반송 방법 | |
US10714368B2 (en) | Ceiling transport vehicle system and teaching unit | |
US10926960B2 (en) | Overhead conveyance vehicle | |
CN116783127A (zh) | 空中搬送车 | |
JP2021046287A (ja) | 走行車システム | |
TW202123360A (zh) | 用於生產和製程控制工具之基板搬運之自動教導 | |
CN116438133A (zh) | 高架输送车以及输送车系统 | |
JP7192682B2 (ja) | 検査システム | |
JPS61101389A (ja) | コンテナクレ−ン | |
JPH07500423A (ja) | センサ装置及び位置決め方法並びにそれらのマウントロボット制御への利用 | |
CN113439248B (zh) | 行驶车及行驶车系统 | |
US20240227881A9 (en) | Travelling vehicle and travelling vehicle system | |
WO2023281781A1 (ja) | 天井搬送車 | |
US20240132123A1 (en) | Travelling vehicle and travelling vehicle system | |
KR20000054962A (ko) | 무인운반차용 랜드마크 판별장치 및 무인운반차의 랜드마크 판별방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |