TWI845692B - 氮化矽粉末及其製造方法、以及氮化矽燒結體之製造方法 - Google Patents

氮化矽粉末及其製造方法、以及氮化矽燒結體之製造方法 Download PDF

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Publication number
TWI845692B
TWI845692B TW109117801A TW109117801A TWI845692B TW I845692 B TWI845692 B TW I845692B TW 109117801 A TW109117801 A TW 109117801A TW 109117801 A TW109117801 A TW 109117801A TW I845692 B TWI845692 B TW I845692B
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Taiwan
Prior art keywords
silicon nitride
powder
nitride powder
sintered body
mass
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TW109117801A
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English (en)
Chinese (zh)
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TW202106615A (zh
Inventor
塩月宏幸
竹田豪
田中孝明
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日商電化股份有限公司
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/587—Fine ceramics

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Ceramic Products (AREA)
TW109117801A 2019-05-30 2020-05-28 氮化矽粉末及其製造方法、以及氮化矽燒結體之製造方法 TWI845692B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-101281 2019-05-30
JP2019101281 2019-05-30

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TW202106615A TW202106615A (zh) 2021-02-16
TWI845692B true TWI845692B (zh) 2024-06-21

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TW109117801A TWI845692B (zh) 2019-05-30 2020-05-28 氮化矽粉末及其製造方法、以及氮化矽燒結體之製造方法

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JP (1) JP7620545B2 (https=)
TW (1) TWI845692B (https=)
WO (1) WO2020241700A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117120397A (zh) * 2021-03-25 2023-11-24 电化株式会社 氮化硅粉末及其制造方法、以及氮化硅烧结体及其制造方法
WO2025254768A2 (en) * 2024-06-05 2025-12-11 Heraeus Covantics North America Llc Process for producing a sintered layered body by controlling the chlorine content of a powder employed

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109608205A (zh) * 2019-02-02 2019-04-12 清华大学 一种制备等轴状α相氮化硅粉末的方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5997507A (ja) * 1982-11-26 1984-06-05 Agency Of Ind Science & Technol 等軸的粒状粒子からなる高純度窒化ケイ素粉末の製法
JPS6340709A (ja) * 1986-08-05 1988-02-22 Showa Denko Kk 易焼結性高純度窒化ケイ素微粉体の製造方法
JP3283292B2 (ja) * 1992-05-11 2002-05-20 電気化学工業株式会社 窒化珪素粉末の製造方法
JP3438928B2 (ja) * 1994-01-12 2003-08-18 電気化学工業株式会社 窒化珪素粉末の製造方法
JPH10218613A (ja) * 1997-02-03 1998-08-18 Shin Etsu Chem Co Ltd 窒化ケイ素粉末の高純化方法
JP5045926B2 (ja) * 2007-12-28 2012-10-10 戸田工業株式会社 窒化ケイ素粉末の製造法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109608205A (zh) * 2019-02-02 2019-04-12 清华大学 一种制备等轴状α相氮化硅粉末的方法

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TW202106615A (zh) 2021-02-16
WO2020241700A1 (ja) 2020-12-03
JPWO2020241700A1 (https=) 2020-12-03
JP7620545B2 (ja) 2025-01-23

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