TWI798412B - 介電體磁器組成物及陶瓷電子零件 - Google Patents
介電體磁器組成物及陶瓷電子零件 Download PDFInfo
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- TWI798412B TWI798412B TW108112153A TW108112153A TWI798412B TW I798412 B TWI798412 B TW I798412B TW 108112153 A TW108112153 A TW 108112153A TW 108112153 A TW108112153 A TW 108112153A TW I798412 B TWI798412 B TW I798412B
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Abstract
本發明之介電體磁器組成物包含第一成分與第二成分,第一成分包含0.00~35.85mol%之Ca之氧化物、0.00~47.12mol%之Sr之氧化物、0.00~51.22mol%之Ba之氧化物、0.00~17.36mol%之Ti之氧化物、0.00~17.36mol%之Zr之氧化物、0.00~2.60mol%之Sn之氧化物、0.00~35.32mol%之Nb之氧化物、0.00~35.32mol%之Ta之氧化物、及0.00~2.65mol%之V之氧化物,且作為第二成分係至少含有0.005~3.500質量%之Mn之氧化物(a)、Cu之氧化物及/或Ru之氧化物(b)。
根據本發明,可提供一種絕緣電阻值較高、即使於高溫環境下靜電電容之變化亦較少、25℃及200℃下之介電損失較小之介電體磁器組成物。
Description
本發明係關於一種介電體磁器組成物及將該介電體磁器組成物用作介電體層之陶瓷電子零件。
近年來,針對搭載於汽車之引擎室周邊等過於苛刻之溫度環境中之機器,於超過150℃之高溫環境下作動之電子零件之要求逐年高漲。尤其是於近年來之汽車市場中,為了提高安全性及環境性能,急速推進各功能之電子控制化,而電子機器之搭載率增加。其中,搭載於引擎室內之電子機器由於被曝露於過於苛刻之溫度環境中,故而於電子零件中,除要求較高之可靠性以外,亦要求較高之耐熱性。
習知,作為滿足此種要求之電容器等陶瓷電子零件,其介電體層使用鋯酸鈣等顯示順電性之磁器組成物(順電體)。然而,具有由順電體構成之介電體層之電子零件之磁器組成物之相對介電係數較低而無法獲得高容量之電容器。
已知為代表性之陶瓷電容器用磁器組成物之鈦酸鋇(BaTiO3)具有較高之相對介電係數,於被稱為鐵電轉移溫度之特性溫度下相對介電係數具有峰值,當變成120℃以上時,特性急速降低。
因此,要求開發出即使於高溫環境(例如150℃以上) 下亦具有較高之相對介電係數之介電體磁器組成物。
又,近年來,於陶瓷電子零件中,使用鎳或銅等卑金屬作為內部電極之材質之情況較多。於將卑金屬用作內部電極層之情況下,由於係對介電體層與內部電極同時進行煅燒,故而係以於煅燒中該卑金屬不致被氧化之方式,涵括構成介電體層之磁器組成物在內於還原環境下進行煅燒。
於非專利文獻1中記載有通式M2+ 6M4+ 2Nb8O30所表示之鎢青銅構造之介電體磁器組成物。於該非專利文獻1中,為了獲得實驗試樣(樣品),於將磁器組成物原料混合後,將其於1000℃左右之溫度下煅燒15小時,將所獲得者粉碎及乾燥而成形後,進而於1250~1350℃下燒結5~6小時。
又,於專利文獻1~11中亦進行各種鎢青銅構造之介電體磁器組成物之研究。
[非專利文獻1]Mat. Res. Bull., Vol. 27(1992), pp. 677-684; R. R. Neurgaonkar, J. G. Nels on and J. R. Oliver
[專利文獻1]日本專利特開2002-211975號公報
[專利文獻2]日本專利特開2007-197277號公報
[專利文獻3]日本專利特開平11-043370公報
[專利文獻4]日本專利特開2000-169215公報
[專利文獻5]日本專利特開2008-189487公報
[專利文獻6]國際公開WO08/102608號公報
[專利文獻7]國際公開WO06/114914號公報
[專利文獻8]日本專利特開2013-180906公報
[專利文獻9]日本專利特開2013-180907公報
[專利文獻10]日本專利特開2013-180908公報
[專利文獻11]日本專利特開2012-169635公報
然而,於非專利文獻1中,針對鎢青銅構造之介電體磁器組成物本身之特性,自學術觀點進行了研究,另一方面,針對其應用(application)並未做任何考慮。即,於非專利文獻1中,介電體磁器組成物係於通常之環境氛圍下於某一實驗室內進行煅燒,而本發明者等對上述通式所示之鎢青銅構造之介電體磁器組成物進行了詳細研究,結果得知於添加特定之添加成分並且於近年來針對介電體磁器組成物而要求之還原環境下進行煅燒及燒結之情況下,可獲得特性與非專利文獻1之報告完全不同之介電體磁器組成物。
又,於專利文獻1~11中雖亦對鎢青銅構造之介電體磁器組成物進行了研究,但均未獲得可同時實現「可於還原環境下煅燒」、「獲得充分高之相對介電係數」、「廣泛之溫度區域中之介電特性良好」、「介電損失較小」等作用效果者。
又,對於介電體磁器組成物,除要求上述性能以外,作為使用介電體磁器組成物之電子零件,亦要求某種程度(例如於 200℃下為40MΩ左右)以上之較高之絕緣電阻值。
因此,本發明之目的在於提供一種可於還原環境下進行煅燒且相對介電係數較高,於用作積層陶瓷電容器等陶瓷電子零件之介電體層之情況下,即使於高溫環境下、例如150~200℃之條件下靜電電容之變化亦較少且25℃及200℃下之介電損失較小,進而即使於200℃下亦可獲得較高之絕緣電阻值之介電體磁器組成物、及將其用作介電體層之陶瓷電子零件。
上述課題係藉由以下之本發明而解決。
即,本發明(1)提供一種介電體磁器組成物,其特徵在於包含第一成分與第二成分;第一成分包括:相對於換算成下述氧化物時之第一成分之合計mol數,含有比例以CaO換算計為0.00~35.85mol%之Ca之氧化物、以SrO換算計為0.00~47.12mol%之Sr之氧化物、以BaO換算計為0.00~51.22mol%之Ba之氧化物、以TiO2換算計為0.00~17.36mol%之Ti之氧化物、以ZrO2換算計為0.00~17.36mol%之Zr之氧化物、以SnO2換算計為0.00~2.60mol%之Sn之氧化物、以Nb2O5換算計為0.00~35.32mol%之Nb之氧化物、以Ta2O5換算計為0.00~35.32mol%之Ta之氧化物、及以V2O5換算計為0.00~2.65mol%之V之氧化物;該第一成分含有選自Ca之氧化物、Sr之氧化物及Ba之氧化物中之至少1種、選自Ti之氧化物及Zr之氧化物中之至少1種、及選自Nb之氧化物及Ta之氧化物中之至少1種作為必需成分,且相對於換算成上述氧化物時之第一成分之合計mol數,CaO換算之 Ca之氧化物、SrO換算之Sr之氧化物及BaO換算之Ba之氧化物之合計含有比例為48.72~51.22mol%,TiO2換算之Ti之氧化物、ZrO2換算之Zr氧化物及SnO2換算之Sn之氧化物之合計含有比例為15.97~17.36mol%,Nb2O5換算之Nb之氧化物、Ta2O5換算之Ta氧化物及V2O5換算之V之氧化物之合計含有比例為31.42~35.31mol%;且作為第二成分,係至少含有相對於換算成上述氧化物時之第一成分之合計質量,含有比例以MnO換算計為0.005~3.500質量%之Mn之氧化物(a)、以及Cu之氧化物及Ru之氧化物中之一者或兩者(b)。
又,本發明(2)提供一種介電體磁器組成物,其特徵在於包含第一成分與第二成分;作為第一成分,係含有下述通式(1):AaM1 bM2 cOd (1)
(式(1)中,A係由通式(2):Ba1-x-ySrxCay(2)(式(2)中,0≦x≦0.920,0≦y≦0.700)所表示;M1係選自Ti、Zr及Sn中之至少1種;M2係選自Nb、Ta及V中之至少1種;5.70≦a≦6.30,1.90≦b≦2.10,7.20≦c≦8.80,27.45≦d≦32.50)所表示之化合物(其中,於含有Sn之情況下,相對於TiO2換算之Ti之氧化物、ZrO2換算之Zr之氧化物及SnO2換算之Sn之氧化物之合計mol數,SnO2換算之Sn之氧化物之含有比例為15.00mol%以下,於含有V之情況下,相對於Nb2O5換算之Nb之氧化物、Ta2O5換算之Ta之氧化物及V2O5換算之V之氧化物之合計mol數,V2O5換算之V之氧化物之含有比例為7.50mol%以下); 作為第二成分,係至少含有相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,含有比例以MnO換算計為0.005~3.500質量%之Mn之氧化物(a)、以及Cu之氧化物及Ru之氧化物中之一者或兩者(b)。
又,本發明(3)提供一種介電體磁器組成物,其特徵在於包含第一成分與第二成分;作為第一成分,係含有下述通式(3):
(式(3)中,η1、η2及η3分別獨立地為5.70~6.30之範圍內之值;θ1、θ2及θ3分別獨立為0.95~1.05之範圍內之值;、及分別獨立為0.90~1.10之範圍內之值;ω1、ω2及ω3分別獨立為27.45~32.50之範圍內之值;M3係由通式(4):Ti2-ρ-σZrρSnσ(4)(式(4)中,0≦ρ≦2.0,0≦σ≦0.3)所表示;M4係由通式(5):(式(5)中,0≦π≦8.0,0≦≦0.6)所表示;α、β及γ滿足α+β+γ=1.00)所表示,且於將3元組成圖上之任意點表示成(α,β,γ)時,處於將點(0.05,0.95,0.00)、點B=(0.70,0,30,0.00)、點C=(0.70,0.00,0.30)、點D=(0.00,0.00,1.00)、點E=(0.00,0.90,0.10)連結之線段所包圍之範圍內之化合物;作為第二成分,係至少含有相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb205、Ta2O5、V2O5時之第一成分之合計質量,含有比例以MnO換算計為0.005~3.500質量%之Mn之氧化物(a)、以及Cu之氧化物及Ru之氧化物中之一者或兩者 (b)。
又,本發明(4)提供如(3)之介電體磁器組成物,其特徵在於上述第一成分係於上述3元組成圖中,處於將點A'=(0.05,0.95,0.00)、B'=(0.60,0.40,0.00)、點C'=(0.70,0.20,0.10)、點D'=(0.70,0.10,0.20)、點E'=(0.55,0.00,0.45)、點F'=(0.40,0.00,0.60)、點G'=(0.10,0.10,0.80)、點H'=(0.00,0.00,1.00)、點I'=(0.00,0.40,0.60)、點J'=(0.20,0.40,0.40)、點K'=(0.00,0.70,0.30)、點L'=(0.00,0.90,0.10)連結之線段所包圍之範圍內之化合物。
又,本發明(5)係如(1)~(4)中任一項之介電體磁器組成物,其特徵在於,作為第二成分,係含有相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分,合計質量之含有比例以CuO換算計為0.010質量%以上且未滿0.080質量%之Cu之氧化物及以RuO2換算計為0.050質量%以上且未滿0.300質量%之Ru之氧化物中之一者或兩者。
又,本發明(6)提供如(1)~(5)中任一項之介電體磁器組成物,其特徵在於含有D之氧化物(D係選自Li、Mg、Si、Cr、Al、Fe、Co、Ni、Zn、Ga、Ge、In、W、Mo、Y、Hf、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb及Lu中之至少1種)作為第二成分。
又,本發明(7)提供如(1)~(6)中任一項之介電體磁器組成物,其特徵在於含有鎢青銅型結晶相。
又,本發明(8)提供如(1)~(7)中任一項之介電體磁器組成物,其特徵在於25℃下之相對介電係數為100.0以上。
又,本發明(9)提供如(1)~(8)中任一項之介電體磁器組成物,其特徵在於靜電電容變化率於-55℃~200℃之溫度範圍內為-20.0%~5.0%之範圍內。
又,本發明(10)提供如(1)~(9)中任一項之介電體磁器組成物,其特徵在於25℃下之介電損失(tanδ)為10.0%以下,且200℃下之介電損失(tanδ)為10.0%以下。
又,本發明(11)提供如(1)~(10)中任一項之介電體磁器組成物,其特徵在於200℃下之絕緣電阻值為40MΩ以上且未滿100MΩ。
又,本發明(12)提供一種陶瓷電子零件,其特徵在於包含由(1)~(11)中任一項之介電體磁器組成物形成之介電體層、及包含卑金屬作為導電成分之電極層。
又,本發明(13)提供如(12)之陶瓷電子零件,其特徵在於:上述卑金屬係選自鎳及銅中之至少1種。
又,本發明(14)提供如(12)或(13)之陶瓷電子零件,其特徵在於:其係將上述介電體層與上述電極層複數積層而成。
根據本發明,可提供一種可於還原環境下煅燒且相對介電係數較高,於用作積層陶瓷電容器等陶瓷電子零件之介電體層之情況下,即使於150~200℃之高溫條件下靜電電容之變化亦較少、靜電電容變化率於-55℃~200℃之溫度範圍內為-50.0%~50.0%之範圍內(以下,有時記為±50.0%以內),25℃及200℃下之介電損失較小、進而即使於200℃下亦可獲得40MΩ以上之絕緣電阻值之介電體磁器組成物、及將其用作介電體層之陶瓷電子零件。
1‧‧‧積層陶瓷電容器
2‧‧‧介電體層
2a、2b‧‧‧內部電極
3‧‧‧內部電極層
4‧‧‧外部電極
10‧‧‧積層體
圖1係表示本發明之介電體磁器組成物之較佳組成範圍之三角圖。
圖2係表示本發明之介電體磁器組成物之更佳組成範圍之三角圖。
圖3係參考試樣8之掃描式電子顯微鏡(SEM,scanning electron microscope)圖像(10,000倍)。
圖4係參考試樣15之SEM圖像(10,000倍)。
圖5係參考試樣66之SEM圖像(10,000倍)。
圖6係表示參考試樣8、15及66之靜電電容變化率之推移之圖表。
圖7係表示參考試樣15及78之靜電電容變化率之推移之圖表。
圖8係圖解性地表示陶瓷電容器之剖面圖。
圖9係參考試樣15之X射線繞射測定之結果。
以下,基於圖式所示之實施形態對本發明進行說明。再者,於本發明中,只要未特別說明,則數值範圍之表述「○~△」包含○及△之數值。
(陶瓷電容器1)
圖8所示之陶瓷電容器1具備整體為長方體形狀之積層體10。積層體10包括經積層之複數介電體層3、及沿著介電體層3之不同界面所形成之複數個內部電極2a、2b。內部電極2a、2b於積層體 10內交替地配置,且分別於積層體10之不同端部與外部電極4電性接合。亦可於外部電極4之上視需要形成包括鎳、銅、鎳-銅合金等之第1鍍覆層,或於其上進而形成包括焊料、錫等之第2鍍覆層。
如上所述,複數個內部電極2a、2b係藉由以於積層體10之積層方向上相互重疊之狀態形成,而於相鄰之內部電極2a、2b之間累積電荷。又,藉由將內部電極2a、2b與外部電極4電性連接而提取該電荷。
(內部電極2a、2b)
於本發明中,於內部電極2a、2b中係使用卑金屬作為導電成分。作為用作導電成分之卑金屬,除鎳、銅、鋁等純金屬以外,亦可為包含該金屬成分之合金或混合物或者複合物。並且,作為用作導電成分之卑金屬,尤佳為選自鎳及銅中之1種。又,只要不損及本發明之作用效果,則內部電極2a、2b中亦可包含卑金屬以外之導電成分或下文提及之共同材料等。
內部電極2a、2b可利用任意方法形成,作為一例,可列舉使用藉由將包含該卑金屬之金屬粉末與黏合劑成分一起進行混練而獲得之導電膏形成之方法。於使用導電膏之情況下,作為內部電極2a、2b之形成方法,尤佳為藉由網版印刷般之印刷法形成。再者,該導電膏中亦可包含與下述本發明之介電體磁器組成物相同成分之介電體磁器組成物粉末作為用以控制金屬粉末之燒結之所謂共同材料。又,內部電極2a、2b此外亦可藉由噴墨法、蒸鍍法、鍍覆法等公知之方法形成。
(介電體層3)
介電體層3係由下述本發明之介電體磁器組成物構成,藉此維持較高之相對介電係數,並且即使於廣泛之溫度區域、尤其是200℃左右之高溫區域中靜電電容之變化亦較小,靜電電容變化率於-55℃~200℃之溫度範圍內成為±50.0%以內,25℃及200℃下之介電損失(tanδ)均成為10.0%以下。並且,本發明之介電體磁器組成物之耐還原性優異,即使於使用卑金屬作為內部電極之導電成分且在還原環境下同時進行煅燒之情況下,亦不易被還原而不致半導體化。
(介電體磁器組成物)
本發明之第一形態之介電體磁器組成物之特徵在於包含第一成分與第二成分,第一成分包含:相對於換算成下述氧化物時之第一成分之合計mol數,含有比例以CaO換算計為0.00~35.85mol%之Ca之氧化物、以SrO換算計為0.00~47.12mol%之Sr之氧化物、以BaO換算計為0.00~51.22mol%之Ba之氧化物、以TiO2換算計為0.00~17.36mol%之Ti之氧化物、以ZrO2換算計為0.00~17.36mol%之Zr之氧化物、以SnO2換算計為0.00~2.60mol%之Sn之氧化物、以Nb2O5換算計為0.00~35.32mol%之Nb之氧化物、以Ta2O5換算計為0.00~35.32mol%之Ta之氧化物、及以V2O5換算計為0.00~2.65mol%之V之氧化物;該第一成分含有選自Ca之氧化物、Sr之氧化物及Ba之氧化 物中之至少1種、選自Ti之氧化物及Zr之氧化物中之至少1種、及選自Nb之氧化物及Ta之氧化物中之至少1種作為必需成分,且相對於換算成上述氧化物時之第一成分之合計mol數,CaO換算之Ca之氧化物、SrO換算之Sr之氧化物及BaO換算之Ba之氧化物之合計含有比例為48.72~51.22mol%,TiO2換算之Ti之氧化物、ZrO2換算之Zr氧化物及SnO2換算之Sn之氧化物之合計含有比例為15.97~17.36mol%,Nb2O5換算之Nb之氧化物、Ta2O5換算之Ta氧化物及V2O5換算之V之氧化物之合計含有比例為31.42~35.31mol%;且作為第二成分,係至少含有相對於換算成上述氧化物時之第一成分之合計質量,含有比例以MnO換算計為0.005~3.500質量%之Mn之氧化物(a)、以及Cu之氧化物及Ru之氧化物中之一者或兩者(b)。
本發明之第一形態之介電體磁器組成物包含第一成分與第二成分。再者,於本發明之第一形態之介電體磁器組成物中,介電體磁器組成物中所包含之氧化物中,除作為第一成分而包含之氧化物以外,全部係作為第二成分而包含。
本發明之第一形態之介電體磁器組成物之第一成分包括作為必需成分之選自Ca之氧化物、Sr之氧化物及Ba之氧化物中之1種以上、選自Ti之氧化物及Zr之氧化物中之1種以上、選自Nb之氧化物及Ta之氧化物中之1種以上、及作為任意成分之選自Sn之氧化物及V之氧化物中之1種以上。
於本發明之第一形態之介電體磁器組成物中,作為第一成分中各氧化物所占之含量,以相對於換算成下述氧化物時之第 一成分之合計mol數之含有比例計,CaO換算之Ca之氧化物之含量為0.00~35.85mol%,SrO換算之Sr之氧化物之含量為0.00~47.12mol%,BaO換算之Ba之氧化物之含量為0.00~51.22mol%,TiO2換算之Ti之氧化物之含量為0.00~17.36mol%,ZrO2換算之Zr之氧化物之含量為0.00~17.36mol%,SnO2換算之Sn之氧化物之含量為0.00~2.60mol%,Nb2O5換算之Nb之氧化物之含量為0.00~35.32mol%,Ta2O5換算之Ta之氧化物之含量為0.00~35.32mol%,V2O5換算之V之氧化物之含量為0.00~2.65mol%。
於本發明之第一形態之介電體磁器組成物中,相對於換算成上述氧化物時之第一成分之合計mol數,CaO換算之Ca之氧化物、SrO換算之Sr之氧化物及BaO換算之Ba之氧化物之合計含有比例為48.72~51.22mol%,較佳為49.37~50.62mol%。
又,於本發明之第一形態之介電體磁器組成物中,相對於換算成上述氧化物時之第一成分之合計mol數之TiO2換算之Ti之氧化物、ZrO2換算之Zr之氧化物及SnO2換算之Sn之氧化物之合計含有比例為15.97~17.36mol%,較佳為16.32~17.01mol%。又,於第一成分含有Sn之情況下,相對於TiO2換算之Ti之氧化物、ZrO2換算之Zr之氧化物及SnO2換算之Sn之氧化物之合計mol數,SnO2換算之Sn之氧化物之含有比例為15.00mol%以下。
又,於本發明之第一形態之介電體磁器組成物中,相對於換算成上述氧化物時之第一成分之合計mol數,Nb2O5換算之Nb之氧化物、Ta2O5換算之Ta之氧化物及V2O5換算之V之氧化物之合計含有比例為31.42~35.31mol%,較佳為32.20~34.43 mol%。又,於第一成分含有V之情況下,相對於Nb2O5換算之Nb之氧化物、Ta2O5換算之Ta之氧化物及V2O5換算之V之氧化物之合計mol數,V2O5換算之V之氧化物之含有比例為7.50mol%以下。
本發明之第一形態之介電體磁器組成物至少含有(a)成分、即Mn之氧化物與(b)成分、即Cu之氧化物或者Ru之氧化物、或者Cu之氧化物及Ru之氧化物作為第二成分。即,本發明之第一形態之介電體磁器組成物含有Mn之氧化物與Cu之氧化物及Ru之氧化物中之一者或兩者作為必需之第二成分。
於本發明之第一形態之介電體磁器組成物中,Mn之氧化物之含量係相對於換算成上述氧化物時之第一成分之合計質量,以MnO換算計為0.005~3.500質量%,較佳為0.005~2.000質量%,尤佳為0.010~1.500質量%。
於本發明之第一形態之介電體磁器組成物含有Cu之氧化物作為第二成分之情況下,相對於換算成上述氧化物時之第一成分之合計質量,以CuO換算計較佳為0.010質量%以上且未滿0.080質量%,尤佳為0.020質量%以上且未滿0.080質量%,更佳為0.030質量%以上且未滿0.080質量%。
於本發明之第一形態之介電體磁器組成物含有Ru之氧化物作為第二成分之情況下,相對於換算成上述氧化物時之第一成分之合計質量,以RuO2換算計較佳為0.050質量%以上且未滿0.300質量%,尤佳為0.100質量%以上且未滿0.300質量%,更佳為0.200質量%以上且未滿0.300質量%。
藉由使本發明之第一形態之介電體磁器組成物含有上述含量之Mn之氧化物作為第二成分,於用作積層陶瓷電容器等 陶瓷電子零件之介電體層之情況下,即使於150~200℃之高溫條件下靜電電容之變化亦較少,靜電電容變化率於-55℃~200℃之溫度範圍內成為±50.0%以內,25℃及200℃下之介電損失(以下,有時簡記為tanδ)減小。
本發明之第一形態之介電體磁器組成物係藉由將第一成分之含量設為上述含量且以上述含量含有Mn之氧化物作為第二成分,而實現150~200℃之高溫條件下之靜電電容之變化較少、靜電電容變化率於-55℃~200℃之溫度範圍內成為±50.0%以內、25℃及200℃下之介電損失減小之效果,本發明之第一形態之介電體磁器組成物藉由含有Cu之氧化物及Ru之氧化物中之一者或兩者作為第二成分,可於不對藉由將第一成分設為上述含量且以上述含量含有第二成分之Mn之氧化物所帶來之效果、即150~200℃之高溫條件下之靜電電容之變化較少、靜電電容變化率於-55℃~200℃之溫度範圍內成為±50.0%以內、25℃及200℃下之介電損失減小之效果造成較大影響之下,提高絕緣電阻值。
本發明之第一形態之介電體磁器組成物含有Mn之氧化物(a)、以及Cu之氧化物及Ru之氧化物中之一者或兩者(b)作為第二成分,此外,可任意含有(a)成分及(b)成分以外之氧化物(以下,亦記載為(c)成分)。第二成分係為了改善耐還原性或其他特性而添加至本發明之介電體磁器組成物中。(b)成分以外之第二成分之氧化物換算之合計質量(即(a)成分與(c)成分之合計質量)之比例係相對於換算成上述氧化物時之第一成分之合計質量,較佳為10.000質量%以下,尤佳為0.100~5.500質量%。
作為本發明之第一形態之介電體磁器組成物所含有 之第二成分之任意成分,較佳為D之氧化物(D係選自Li、Mg、Si、Cr、Al、Fe、Co、Ni、Zn、Ga、Ge、In、W、Mo、Y、Hf、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb及Lu中之至少1種),尤佳為Mg之氧化物、Si之氧化物、Y之氧化物。
再者,上述D之氧化物之質量係針對Li換算成Li2O、針對Mg換算成MgO、針對Si換算成SiO2、針對Cr換算成Cr2O3、針對Al換算成Al2O3、針對Fe換算成Fe2O3、針對Co換算成CoO、針對Ni換算成NiO、針對Zn換算成ZnO、針對Ga換算成Ga2O3、針對Ge換算成GeO2、針對In換算成In2O3、針對W換算成WO3、針對Mo換算成MoO3、針對Y換算成Y2O3、針對Hf換算成HfO2、針對La換算成La2O3、針對Ce換算成CeO2、針對Pr換算成Pr6O11、針對Nd換算成Nd2O3、針對Sm換算成Sm2O3、針對Eu換算成Eu2O3、針對Gd換算成Gd2O3、針對Tb換算成Tb4O7、針對Dy換算成Dy2O3、針對Ho換算成Ho2O3、針對Er換算成Er2O3、針對Tm換算成Tm2O3、針對Yb換算成Yb2O3、針對Lu換算成Lu2O3所得之值。
本發明之第一形態之介電體磁器組成物較佳為於進行X射線繞射等結晶構造解析之情況下,顯示鎢青銅型結晶相之存在。本發明之第一形態之介電體磁器組成物之平均晶粒尺寸較佳為5以下,尤佳為3μm以下。
本發明之第二形態之介電體磁器組成物之特徵在於包含第一成分與第二成分;作為第一成分,係含有下述通式(1):AaM1 bM2 cOd (1)
(式(1)中,A係由通式(2):Ba1-x-ySrxCay(2)(式(2)中,0≦x≦0.920,0≦y≦0.700)所表示;M1係選自Ti、Zr及Sn中之至少1種;M2係選自Nb、Ta及V中之至少1種;5.70≦a≦6.30,1.90≦b≦2.10,7.20≦c≦8.80,27.45≦d≦32.50)所表示之化合物(其中,於含有Sn之情況下,相對於TiO2換算之Ti之氧化物、ZrO2換算之Zr之氧化物及SnO2換算之Sn之氧化物之合計mol數,SnO2換算之Sn之氧化物之含有比例為15.00mol%以下;於含有V之情況下,相對於Nb2O5換算之Nb之氧化物、Ta2O5換算之Ta之氧化物及V2O5換算之V之氧化物之合計mol數,V2O5換算之V之氧化物之含有比例為7.50mol%以下);作為第二成分,係至少含有相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量之含有比例以MnO換算計為0.005~3.500質量%之Mn之氧化物(a)、以及Cu之氧化物及Ru之氧化物中之一者或兩者(b)。
本發明之第二形態之介電體磁器組成物包含第一成分與第二成分。再者,於本發明之第二形態之介電體磁器組成物中,介電體磁器組成物中所包含之氧化物中除作為第一成分而包含之氧化物以外,全部係作為第二成分而包含。
於本發明之第二形態之介電體磁器組成物中,第一成分係由下述通式(1):AaM1 bM2 cOd (1)所表示之化合物。
通式(1)中,A係由通式(2):Ba1-x-ySrxCay(2)(式(2)中, 0≦x≦0.920,0≦y≦0.700)所表示。即,A可為Ba單體,亦可為Ca、Sr及Ba中之任2種之組合(Ca及Sr、Ca及Ba、Sr及Ba),亦可為Ca、Sr及Ba之組合。
通式(1)中,M1係選自Ti、Zr及Sn中之至少1種。其中,M1必須為選自Ti及Zr中之1種以上。即,M1係Ti單獨、Zr單獨、Ti及Sn之組合、Zr及Sn之組合、Ti及Zr之組合、Ti、Zr及Sn之組合。
通式(1)中,M2係選自Nb、Ta及V中之至少1種。其中,M2必須為選自Nb及Ta中之1種以上。即,M2係Nb單獨、Ta單獨、Nb及V之組合、Ta及V之組合、Nb及Ta之組合、Nb、Ta及V之組合。
通式(1)中,a為5.70≦a≦6.30之範圍,b為1.90≦b≦2.10之範圍,c為7.20≦c≦8.80之範圍,d為27.45≦d≦32.50。
於本發明之第二形態之介電體磁器組成物含有Sn之情況下,相對於TiO2換算之Ti之氧化物、ZrO2換算之Zr之氧化物及SnO2換算之Sn之氧化物之合計mol數,SnO2換算之Sn之氧化物之含有比例為15.00mol%以下。又,於本發明之第二形態之介電體磁器組成物含有V之情況下,相對於Nb2O5換算之Nb之氧化物、Ta2O5換算之Ta之氧化物及V2O5換算之V之氧化物之合計mol數,V2O5換算之V之氧化物之含有比例為7.50mol%以下。
本發明之第二形態之介電體磁器組成物係至少含有(a)成分、即Mn之氧化物、及(b)成分、即Cu之氧化物、或者Ru之氧化物、或者Cu之氧化物及Ru之氧化物作為第二成分。即,本發明之第二形態之介電體磁器組成物係含有Mn之氧化物、以及Cu 之氧化物及Ru之氧化物中之一者或兩者作為必需之第二成分。
於本發明之第二形態之介電體磁器組成物中,Mn之氧化物之含量係相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,以MnO換算計為0.005~3.500質量%,較佳為0.005~2.000質量%,尤佳為0.010~1.500質量%。
於本發明之第二形態之介電體磁器組成物含有Cu之氧化物作為第二成分之情況下,Cu之氧化物之含量係相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,以CuO換算計較佳為0.010質量%以上且未滿0.080質量%,尤佳為0.020質量%以上且未滿0.080質量%,更佳為0.030質量%以上且未滿0.080質量%。
於本發明之第二形態之介電體磁器組成物含有Ru之氧化物作為第二成分之情況下,Ru之氧化物之含量係相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,以RuO2換算計較佳為0.050質量%以上且未滿0.300質量%,尤佳為0.100質量%以上且未滿0.300質量%,更佳為0.200質量%以上且未滿0.300質量%。
藉由使本發明之第二形態之介電體磁器組成物含有(a)成分、即上述含量之Mn之氧化物作為第二成分,於用作積層陶瓷電容器等陶瓷電子零件之介電體層之情況下,即使於150~200℃之高溫條件下靜電電容之變化亦較少,靜電電容變化率於-55℃~200℃之溫度範圍內成為±50.0%以內,25℃及200℃下之介電損失減小。
本發明之第二形態之介電體磁器組成物係藉由將第一成分之含量設為上述含量且以上述含量含有Mn之氧化物作為第二成分,而實現150~200℃之高溫條件下之靜電電容之變化較少、靜電電容變化率於-55℃~200℃之溫度範圍內成為±50.0%以內、25℃及200℃下之介電損失減小之效果,本發明之第二形態之介電體磁器組成物係藉由含有Cu之氧化物及Ru之氧化物中之一者或兩者作為第二成分,可於不對藉由將第一成分設為上述含量且以上述含量含有第二成分之Mn之氧化物所造成之效果、即150~200℃之高溫條件下之靜電電容之變化較少、靜電電容變化率於-55℃~200℃之溫度範圍內成為±50.0%以內、25℃及200℃下之介電損失減小之效果造成較大影響之下,提高絕緣電阻值。
本發明之第二形態之介電體磁器組成物係含有Mn之氧化物(a)以及Cu之氧化物及Ru之氧化物中之一者或兩者(b)作為第二成分,此外,可任意含有(a)成分及(b)成分以外之氧化物(以下,亦記載為(c)成分)。第二成分係為了改善耐還原性或其他特性而添加至本發明之介電體磁器組成物中。(b)成分以外之第二成分之氧化物換算之合計質量(即(a)成分與(c)成分之合計質量)之比例係相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,較佳為10.000質量%以下,尤佳為0.100~5.500質量%。
作為本發明之第二形態之介電體磁器組成物所含有之第二成分之任意成分((c)成分),較佳為D之氧化物(D係選自Li、Mg、Si、Cr、Al、Fe、Co、Ni、Zn、Ga、Ge、In、W、Mo、Y、Hf、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb 及Lu中之至少1種),尤佳為Mg之氧化物、Si之氧化物、Y之氧化物。
再者,上述D之氧化物之質量係針對Li換算成Li2O、針對Mg換算成MgO、針對Si換算成SiO2、針對Cr換算成Cr2O3、針對Al換算成Al2O3、針對Fe換算成Fe2O3、針對Co換算成CoO、針對Ni換算成NiO、針對Zn換算成ZnO、針對Ga換算成Ga2O3、針對Ge換算成GeO2、針對In換算成In2O3、針對W換算成WO3、針對Mo換算成MoO3、針對Y換算成Y2O3、針對Hf換算成HfO2、針對La換算成La2O3、針對Ce換算成CeO2、針對Pr換算成Pr6O11、針對Nd換算成Nd2O3、針對Sm換算成Sm2O3、針對Eu換算成Eu2O3、針對Gd換算成Gd2O3、針對Tb換算成Tb4O7、針對Dy換算成Dy2O3、針對Ho換算成Ho2O3、針對Er換算成Er2O3、針對Tm換算成Tm2O3、針對Yb換算成Yb2O3、針對Lu換算成Lu2O3所得之值。
本發明之第二形態之介電體磁器組成物於進行X射線繞射等結晶結構解析之情況下,顯示鎢青銅型結晶相之存在,其平均晶粒尺寸較佳為5μm以下,尤佳為3μm以下。
(式(3)中,η1、η2及η3分別獨立為5.70~6.30之範圍內之值;θ1、θ2及θ3分別獨立為0.95~1.05之範圍內之值;、及 3分別獨立為0.90~1.10之範圍內之值;ω1、ω2及ω3分別獨立為27.45~32.50之範圍內之值;M3係由通式(4):Ti2-ρ-σZrρSnσ(4)(式(4)中,0≦ρ≦2.0,0≦σ≦0.3)所表示;M4係由通式(5): (式(5)中,0≦π≦8.0,0≦≦0.6)所表示;α、β及γ滿足α+β+γ=1.00)所表示,且於將3元組成圖上之任意點表示成(α,β,γ)時,處於將點A=(0.05,0.95,0.00)、點B=(0.70,0.30,0.00)、點C=(0.70,0.00,0.30)、點D=(0.00,0.00,1.00)、點E=(0.00,0.90,0.10)連結之線段所包圍之範圍內之化合物,
作為第二成分,係至少含有相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,含有比例以MnO換算計為0.005~3.500質量%之Mn之氧化物(a)、以及Cu之氧化物及Ru之氧化物中之一者或兩者(b)。
本發明之第三形態之介電體磁器組成物包括第一成分與第二成分。再者,於本發明之第三形態之介電體磁器組成物中,介電體磁器組成物中所包含之氧化物中除作為第一成分而包含之氧化物以外,全部係作為第二成分而包含。
本發明之第三形態之介電體磁器組成物之第一成分係於以(α,β,γ)表示圖1所示之Caη1M3 θ1 Oω1-Srη2M3 θ22Oω2-Baη3M3 θ3 Oω3之3元組成圖上之點時(其中,α、β及γ滿足α+β+γ=1.00),處於將點A=(0.05,0.95,0.00)、點B=(0.70,0.30,0.00)、點C=(0.70,0.00,0.30)、點D=(0.00,0.00,1.00)、點E=(0.00,0.90.0.10)連結之線段所包圍之範圍內之化合物(以下,有時亦記載為處於將圖1所示之3元組成圖上之點A、點B、 點C、點D、點E連結之線段所包圍之範圍內之化合物)。藉由使第一成分之組成處於上述範圍內,25℃下之相對介電係數成為100以上而顯示出鐵電性。
又,本發明之第三形態之介電體磁器組成物較佳為第一成分係於圖2所示之Caη1M3 θ1 Oω1-Srη2M3 θ22Oω2-Baη3M3 θ3 Oω3之3元組成圖上,處於將點A'=(0.05,0.95,0.00)、點B'=(0.60,0.40,0.00)、點C'=(0.70,0.20,0.10)、點D'=(0.70,0.10,0.20)、點E'=(0.55,0.00,0.45)、點F'=(0.40,0.00,0.60)、點G'=(0.10,0.10,0.80)、點H'=(0.00,0.00,1.00)、點I'=(0.00,0.40,0.60)、點J'=(0.20,0.40,0.40)、點K'=(0.00,0.70,0.30)、點L'=(0.00,0.90,0.10)連結之線段所包圍之範圍內之化合物(以下,有時亦記載為處於將圖2所示之3元組成圖上之點A'、點B'、點C'、點D'、點E'、點F'、點G'、點H'、點I'、點J'、點K'、點L'連結之線段所包圍之範圍內之化合物)。藉由使第一成分之組成處於上述範圍內,於25℃下容易獲得200以上之相對介電係數而顯示出鐵電性。再者,圖2所示之「Caη1M3 θ11Oω1-Srη2M3 θ2 Oω2-Baη3M3 θ3 Oω3」之3元組成圖與圖1所示之「Caη1M3 θ1 Oω1-Srη2M3 θ2 Oω2-Baη3M3 θ3 Oω3」之3元組成圖相同。
其中,於本發明之第三形態之介電體磁器組成物之「Caη1M3 θ1 Oω1-Srη2M3 θ2 Oω2-Baη3M3 θ3 Oω3」之3元組成圖中,η1、η2及η3分別獨立為5.70~6.30之範圍內之值。θ1、θ2及θ3分別獨立為0.95~1.05之範圍內之值。、及分別獨立為0.90~1.10之範圍內之值。ω1、ω2及ω3分別獨立為27.45 ~32.50之範圍內之值。M3係由通式(4):Ti2-ρ-σZrρSnσ(4)(式(4)中,0≦ρ≦2.0,0≦σ≦0.3)所表示。M4係由通式(5):(式(5)中,0≦π≦8.0,0≦≦0.6)所表示。
本發明之第三形態之介電體磁器組成物至少含有(a)成分、即Mn之氧化物、及(b)成分、即Cu之氧化物、或者Ru之氧化物、或者Cu之氧化物及Ru之氧化物作為第二成分。即,本發明之第三形態之介電體磁器組成物含有Mn之氧化物、以及Cu之氧化物及Ru之氧化物中之一者或兩者作為必需之第二成分。
於本發明之第三形態之介電體磁器組成物中,Mn之氧化物之含量係相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,以MnO換算計為0.005~3.500質量%,較佳為0.005~2.000質量%,尤佳為0.010~1.500質量%。
於本發明之第三形態之介電體磁器組成物含有Cu之氧化物作為第二成分之情況下,Cu之氧化物之含量係相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,以CuO換算計較佳為0.010質量%以上且未滿0.080質量%,尤佳為0.020質量%以上且未滿0.080質量%,更佳為0.030質量%以上且未滿0.080質量%。
於本發明之第三形態之介電體磁器組成物含有Ru之氧化物作為第二成分之情況下,Ru之氧化物之含量係相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,以RuO2換算計較佳為0.050質量%以上且未滿0.300質量%,尤佳為0.100質量%以上且未滿0.300 質量%,更佳為0.200質量%以上且未滿0.300質量%。
藉由使本發明之第三形態之介電體磁器組成物含有(a)成分、即上述含量之Mn之氧化物作為第二成分,於用作積層陶瓷電容器等陶瓷電子零件之介電體層之情況下,即使於150~200℃之高溫條件下靜電電容之變化亦較少,靜電電容變化率於-55℃~200℃之溫度範圍內成為±50.0%以內,25℃及200℃下之介電損失減小。
本發明之第三形態之介電體磁器組成物係藉由將第一成分之含量設為上述含量且依上述含量含有Mn之氧化物作為第二成分,而實現150~200℃之高溫條件下之靜電電容之變化較少、靜電電容變化率於-55℃~200℃之溫度範圍內成為±50.0%以內、25℃及200℃下之介電損失減小之效果,本發明之第三形態之介電體磁器組成物係藉由含有Cu之氧化物及Ru之氧化物中之一者或兩者作為第二成分,可於不對藉由將第一成分設為上述含量且以上述含量含有第二成分之Mn之氧化物所造成之效果、即150~200℃之高溫條件下之靜電電容之變化較少、靜電電容變化率於-55℃~200℃之溫度範圍內成為±50.0%以內、25℃及200℃下之介電損失減小之效果造成較大影響之下,提高絕緣電阻值。
本發明之第三形態之介電體磁器組成物含有Mn之氧化物(a)以及Cu之氧化物及Ru之氧化物中之一者或兩者(b)作為第二成分,此外,可任意含有(a)成分及(b)成分以外之氧化物(以下,亦記載為(c)成分)。第二成分係為了改善耐還原性或其他特性而添加至本發明之介電體磁器組成物中。(b)成分以外之第二成分之氧化物換算之合計質量(即(a)成分與(c)成分之合計質量)之比例係相對 於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,較佳為10.000質量%以下,尤佳為0.100~5.500質量%。
作為本發明之第二形態之介電體磁器組成物所含有之第二成分之任意成分((c)成分),較佳為D之氧化物(D係選自Li、Mg、Si、Cr、Al、Fe、Co、Ni、Zn、Ga、Ge、In、W、Mo、Y、Hf、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb及Lu中之至少1種),尤佳為Mg之氧化物、Si之氧化物、Y之氧化物。
再者,上述D之氧化物之質量係針對Li換算成Li2O、針對Mg換算成MgO、針對Si換算成SiO2、針對Cr換算成Cr2O3、針對Al換算成Al2O3、針對Fe換算成Fe2O3、針對Co換算成CoO、針對Ni換算成NiO、針對Zn換算成ZnO、針對Ga換算成Ga2O3、針對Ge換算成GeO2、針對In換算成In2O3、針對W換算成WO3、針對Mo換算成MoO3、針對Y換算成Y2O3、針對Hf換算成HfO2、針對La換算成La2O3、針對Ce換算成CeO2、針對Pr換算成Pr6O11、針對Nd換算成Nd2O3、針對Sm換算成Sm2O3、針對Eu換算成Eu2O3、針對Gd換算成Gd2O3、針對Tb換算成Tb4O7、針對Dy換算成Dy2O3、針對Ho換算成Ho2O3、針對Er換算成Er2O3、針對Tm換算成Tm2O3、針對Yb換算成Yb2O3、針對Lu換算成Lu2O3所得之值。
本發明之第三形態之介電體磁器組成物於進行X射線繞射等結晶結構解析之情況下,顯示鎢青銅型結晶相之存在,其平均晶粒尺寸較佳為5μm以下,尤佳為3μm以下。
本發明之第一形態之介電體磁器組成物、本發明之第二形態之介電體磁器組成物及本發明之第三形態之介電體磁器組成物係25℃下之相對介電係數越高越佳,為100.0以上,較佳為200.0以上,視組成較佳為300.0以上,進而較佳為400.0以上,進而較佳為500.0以上。
本發明之第一形態之介電體磁器組成物、本發明之第二形態之介電體磁器組成物及本發明之第三形態之介電體磁器組成物之靜電電容變化率於-55℃~200℃之溫度範圍內為±50.0%以內,較佳為-33.0%~22.0%之範圍內。再者,於本發明中,所謂靜電電容變化率,係藉由下述方法所得之值。
於本發明之第一形態之介電體磁器組成物、本發明之第二形態之介電體磁器組成物及本發明之第三形態之介電體磁器組成物中,25℃下之介電損失(tanδ)為10.0%以下且200℃下之介電損失(tanδ)為10.0%以下,高頻特性良好。
於本發明之第一形態之介電體磁器組成物、本發明之第二形態之介電體磁器組成物及本發明之第三形態之介電體磁器組成物中,200℃下之絕緣電阻值較佳為40MΩ以上,200℃下之絕緣電阻值尤佳為40MΩ以上且未滿100MΩ。
本發明之第一形態之介電體磁器組成物、本發明之第二形態之介電體磁器組成物及本發明之第三形態之介電體磁器組成物即使於150~200℃之高溫條件下靜電電容之變化亦較少,靜電電容變化率於-55℃~200℃之溫度範圍內為-50.0%~50.0%之範圍內,較佳為-33.0%~22.0%之範圍內,尤佳為-20.0%~5.0%之範圍內。適合作為除要求25℃及200℃下之介電損失較小以外、亦要求 絕緣電阻值較高之用途之電子零件用。
本發明之第一形態之介電體磁器組成物、本發明之第二形態之介電體磁器組成物及本發明之第三形態之介電體磁器組成物可於還原環境下進行煅燒。
(外部電極4)
外部電極4通常係藉由對將積層體10同時進行煅燒後之端部賦予外部電極用導電膏並對其進行燒付而形成,但本發明並不限定於此,亦可使用包含熱硬化型樹脂或熱塑性樹脂之膏並進行加熱處理而形成外部電極4。外部電極用導電膏所使用之導電成分並無特別限定,例如除鎳、銅、銀、鈀、鉑、金等純金屬以外,亦可為包含該金屬成分之合金或混合物或複合物。又,此外,亦存在視需要向導電膏中添加玻璃料之情況。又,外部電極4亦存在與積層體10一起同時煅燒之情況。
(陶瓷電容器1之製造方法)
陶瓷電容器1係使用本發明之第一形態之介電體磁器組成物、本發明之第二形態之介電體磁器組成物或本發明之第三形態之介電體磁器組成物,此外藉由公知之方法而製造。以下,對其一例進行說明。
首先,準備用以形成介電體層3之起始原料。作為起始原料之一例,可列舉CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5等氧化物、及藉由煅燒而生成該氧化物之碳酸鹽、硝酸鹽等。
將該等起始原料以成為目標組成之方式進行稱量並混合,將所獲得之混合物於空氣中,於700~900℃左右之溫度下預燒3~6小時左右。繼而,對所獲得之產物進行微粉碎,將所獲得之介電體原料作為第一成分用原料。
又,準備MnO或MnCO3等Mn化合物作為Mn源,於含有Cu之氧化物作為第二成分之情況下係準備CuO或Cu2O、Cu(NO3)2、Cu(OH)2、CuCO3等Cu化合物作為Cu源,於含有Ru之氧化物作為第二成分之情況下係準備RuO2或RuO4、Ru3(CO)12等Ru化合物作為Ru源,此外,準備視需要所添加之包含Li、Mg、Si、Cr、Al、Fe、Co、Ni、Zn、Ga、Ge、In、W、Mo、Y、Hf、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb及Lu等之化合物作為第二成分用原料。
繼而,將該等第一成分用原料與第二成分用原料於適當之黏合劑成分中進行混練及分散,製備介電體膏或介電體漿體。再者,介電體膏或介電體漿體亦可視需要包含塑化劑等添加物。
繼而,將所獲得之介電體膏或介電體漿體成形成為片狀,繼而,使用上述內部電極用之導電膏於所獲得之坯片之表面形成導體圖案。將其重複積層既定次數,並進行壓接而獲得未煅燒之積層體(以下,稱為生坯晶片)。
繼而,針對生坯晶片,視需要進行脫黏合劑處理。脫黏合劑處理條件並無特別限定,可舉例如保持溫度180~400℃且1~3小時之加熱處理。
繼而,將生坯晶片於還原環境下並於1150~1350℃左右之溫度下進行煅燒,獲得已煅燒之積層體10(以下,稱為燒結體 10)。
其後,針對燒結體10,視需要進行再氧化處理(以下,稱為退火)。退火條件可為於本業界中廣泛使用之公知之條件,例如較佳為將退火時之氧分壓設為高於煅燒時之氧分壓之氧分壓,並將保持溫度設為1100℃以下。
於對以如上方式獲得之燒結體10實施端面研磨後,塗佈外部電極用導電膏並燒付,形成外部電極4,並視需要於外部電極4之表面形成上述鍍覆層。
以如上方式獲得之陶瓷電容器1係藉由焊接等而安裝於印刷基板上等,用於各種電子機器等。
以上,對本發明之實施形態進行了說明,但本發明並不受上述實施形態任何限定,可於不脫離本發明之主旨之範圍內進行各種應用。
例如,上文中對陶瓷電容器進行了說明,但關於電感器或致動器等其他陶瓷電子零件亦可同樣地實施。
以下,根據具體實驗例對本發明進行說明,但本發明並不限定於該等。再者,以下所記載之介電體磁器組成物之組成係藉由原料組成(添加組成)或結晶結構分析而推定,於本說明書中亦相同。
首先,針對第一成分之含量之規定與Mn氧化物之添加效果進行確認試驗(參考試樣1~90及參考試樣91~107)。
(參考例1)
(1)介電體磁器組成物參考試樣1~90之製作
作為第一成分之起始原料,將CaCO3、SrCO3、BaCO3、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5之各粉末以依氧化物換算計成為表1、表3及表5所示之比率之方式進行稱量,利用球磨機並使用純水進行20小時濕式混合。
繼而,將所獲得之各混合物於100℃下乾燥後,於大氣中於750~900℃下預燒3小時,並再次同樣地利用球磨機細細粉碎而製成第一成分用介電體原料。
又,作為第二成分,準備分別稱量MnCO3 18.2mg、MgO 32mg、SiO2 58.6mg、Y2O3 89.5mg並將該等混合而成者作為第二成分用原料。其中,於參考試樣43中,上述第二成分用原料中僅採用除SiO2以外之MnCO3、MgO及Y2O3之3成分。於參考試樣44中,作為第二成分用原料,僅採用除MgO以外之MnCO3、SiO2及Y2O3之3成分。於參考試樣45中,僅採用除Y2O3以外之MnCO3、MgO及SiO2之3成分。於參考試樣78及79中,僅採用除MnCO3以外之MgO、SiO2及Y2O3之3成分。又,於參考試樣41中,將上述第二成分用原料中之MnCO3之量變更為0.404mg,於參考試樣42中,將MnCO3之量變更為0.198g,於參考試樣80中,將MnCO3之量變更為2.055g。
又,以聚乙烯醇濃度成為6質量%之方式將離子交換水與聚乙烯醇投入至容器中,於90℃下混合1小時,準備聚乙烯醇水溶液。
接下來,將各第一成分用介電體原料25g與上述量之第二成分用原料進行混合,針對該等混合物,以聚乙烯醇水溶液之濃度成為10質量%之方式向原料混合物中添加聚乙烯醇水溶液,於乳缽中進行混合及造粒而製作造粒粉。
進而將所獲得之造粒粉投入至直徑14.0mm之模具中,並以1ton/cm2之壓力進行加壓成形,藉此獲得圓板狀之生坯成形體。
繼而,將所獲得之生坯成形體於還原性環境中進行煅燒,藉此製作燒結體。此時之煅燒係將升溫速度設為300℃/hr、將保持溫度設為1150~1300℃、將保持時間設為2小時。環境氣體設為經加濕之氫氣/氮氣混合氣體(氫氣濃度0.5%),加濕係使用加濕器(加濕器溫度35℃)。
繼而,針對所獲得之燒結體,於燒結體之2個主面塗佈直徑8mm之In-Ga電極,藉此獲得分別與參考試樣1~90對應之圓板狀之陶瓷電容器。
(2)介電體磁器組成物參考試樣1~90之分析
針對以如上方式獲得之與參考試樣1~90對應之圓板狀之陶瓷電容器,藉由以下所示之方法分別對晶粒尺寸、結晶相、相對介電係數、靜電電容變化率及介電損失(tanδ)進行分析。將其結果示於表2、表4及表6。
<晶粒尺寸>
使用掃描式電子顯微鏡(SEM)對各電容器之表面進行觀察,將根據隨機抽取之20個結晶粒子之晶界求出之圓當量徑之平均值設為晶粒尺寸。再者,圖3~圖5分別為參考試樣8、15及66之SEM像。
<結晶相>
藉由X射線繞射測定進行結晶相之特定。作為代表例,將參考試樣15之X射線繞射測定之結果示於圖9。圖中之下段為參考之鎢青銅型結晶相,確認到參考試樣15含有鎢青銅型結晶相。將包含其他試樣在內之X射線繞射測定結果示於表2、表4及表6。再者,表中之符號「T」表示確認到鎢青銅型結晶相之存在。
<相對介電係數>
針對各電容器,於基準溫度25℃下,使用電感電容電阻(LCR,inductance capacitance resistance)測定計(安捷倫科技公司製造4284A),以頻率1kHz、測定電壓1Vrms測定靜電電容C。其後,根據燒結體之厚度、有效電極面積、及進行測定所獲得之靜電電容C算出相對介電係數。又,於基準溫度200℃下亦同樣地算出相對介電係數。
再者,相對介電係數以較高者為佳,只要於25℃下為100.0以上即設為良好。
<靜電電容變化率>
於與相對介電係數之測定相同之條件(安捷倫科技公司製造4284A、頻率1kHz、測定電壓1Vrms)下測定-55℃至200℃之溫度區域中之各溫度t之靜電電容Ct。接下來,根據成為基準之25℃之靜電電容C25,算出靜電電容變化率=((Ct-C25)/C25)×100(%)(以下,有時將靜電電容變化率記為△Ct/C25)。
再者,靜電電容變化率以接近0者為佳,只要為50.0%以內即設為良好。
又,針對參考試樣8、15及66,將-55℃至200℃之靜電電容變化率之推移記於圖6中。再者,圖中之符號「×」為參考試樣8、「○」為參考試樣15、「△」為參考試樣66之靜電電容變化率。進而,針對參考試樣15及78,將-55℃至200℃之靜電電容變化率之推移記於圖7中。圖中之符號「○」為參考試樣15、「×」為參考試樣78之靜電電容變化率。
<介電損失(tanδ)>
針對各電容器試樣,使用LCR測定計(安捷倫科技公司製造4284A)以頻率1kHz、測定電壓1Vrms測定tanδ。只要tanδ於25℃及200℃下均為10.0%以下即設為良好。
再者,表1、表3及表5中,第一成分之氧化物換算組成係相對於第一成分之各氧化物成分之表中所記載之氧化物換算之合計mol數的各氧化物於表中所記載之氧化物換算之mol%。又,Mn氧化物之含量係相對於第一成分之各氧化物成分於表中所記載之氧化物換算之合計質量的MnO換算之Mn氧化物之質量%,又,第二成分之氧化物之合計含量係相對於第一成分之各氧化物成分於表中所記載之氧化物換算之合計質量的第二成分之氧化物之合計之質量%。
(3)評價
根據以上之分析結果,處於由圖1之線段A-B-C-D-E包圍之範圍內之試樣於25℃下之相對介電係數為100.0以上。即,確認到該等試樣具有鐵電性。又,處於由圖1之線段A-B-C-D-E包圍之範圍內之試樣之靜電電容之變化率於-55℃~200℃之溫度範圍內為±50.0%以內,25℃及200℃下之介電損失(tanδ)為10.0%以下。
進而,處於由圖2之線段點A'-點B'-點C'-點D'-點E'-點F'-點G'-點H'-點I'-點J'-點K'-點L'包圍之範圍內之試樣於25℃下之相對介電係數為200.0以上。
其中,參考試樣編號5、8、12、15、17、18、23~25、27、29~36、38、41、43~45之相對介電係數顯示500.0以上而尤佳。
又,參考試樣編號1~4、7~13、16~18、23~28、38~40、46、47、49~62、87~90於-55℃至200℃之溫度區域中之靜電電容變化率△Ct/C25顯示-33.0%~+22.0%,而溫度特性尤其優異。
相對於該等,於參考試樣編號65~86中,關於相對介電係數、靜電電容變化率及tanδ中之1個以上之性能並未獲得良好之特性。
又,如圖6所示,得知於使用參考試樣8、15之情況下,靜電電容變化率於-55℃至200℃之溫度範圍內處於-30.0%~30.0%之範圍內,參考試樣66自超過150℃起靜電電容變化率急遽地增加。
又,參考試樣15與參考試樣78係不同之處僅在於有無作為第二成分之Mn之氧化物之試樣,但如圖7所示,得知兩者之特性大幅不同。
(參考例2)
將上述第一成分原料以按氧化物換算計成為表7所示之組成之方式進行稱量,進而,將作為第二成分原料之MnCO3及SiO2以按氧化物換算計成為表7所示之組成之方式進行稱量,除此以外,其餘與參考例1同樣地製作參考試樣91~107,獲得與各試樣對應之圓板狀之陶瓷電容器。
其後,與參考例1同樣地測定晶粒尺寸、結晶相、相對介電係數、靜電電容變化率及介電損失(tanδ),將其結果示於表8。
根據該等結果得知,於相對於氧化物換算之第一成分之合計質量、作為第二成分之MnO換算之Mn含量為3.500質量%以下之試樣中,關於相對介電係數、靜電電容變化率及tanδ獲得良好之結果。
再者,表7中,第一成分之氧化物換算組成係相對於第一成分之各氧化物成分於表中所記載之氧化物換算之合計mol數 的各氧化物於表中所記載之氧化物換算之mol%。又,Mn氧化物之含量係相對於第一成分之各氧化物成分於表中所記載之氧化物換算之合計質量的MnO換算之Mn氧化物之質量%,又,第二成分之氧化物之合計含量係相對於第一成分之各氧化物成分於表中所記載之氧化物換算之合計質量的第二成分之氧化物之合計之質量%。
根據以上之結果,由與第一成分之含量偏離本發明之規定量之範圍或者Mn之氧化物之含量偏離本發明之規定量之範圍 之試樣的比較得知,第一成分之含量處於本發明之規定量之範圍且Mn之氧化物之含量處於本發明之規定量之範圍、不含Cu之氧化物及Ru之氧化物之試樣係實現以下效果:即使於150~200℃之高溫條件下靜電電容之變化亦較少,靜電電容變化率於-55℃~200℃之溫度範圍內為-50.0%~50.0%之範圍內,25℃及200℃下之介電損失減小。
(實施例1及比較例1)
(1)介電體磁器組成物試樣1~20之製作
作為第一成分之起始原料,將CaCO3、SrCO3、BaCO3、TiO2、ZrO2、Nb2O5、Ta2O5之各粉末以按氧化物換算計成為表9所示之比率之方式進行稱量,利用球磨機並使用純水進行20小時濕式混合。
繼而,將所獲得之各混合物於100℃下乾燥後,於大氣中於750~900℃下預燒3小時,再次同樣地利用球磨機細細粉碎,製成第一成分用介電體原料。
又,準備分別稱量MnCO3 41.2mg、MgO 72.2mg、SiO2 53.9mg並將該等混合而成者作為第二成分,製成第二成分用原料。其中,於試樣1~6、8、9、11、15~19中,將上述第二成分用原料分別使用1.3倍量。又,於試樣8~11、15~20中,作為第二成分用原料,除上述原料以外,亦準備相對於第一成分之各氧化物成分於表中所記載之氧化物換算之合計質量為0.036~0.680質量%之CuO。進而,於試樣12~14中,作為第二成分用原料,除上述原料以外,亦準備相對於第一成分之各氧化物成分於表中所記載之氧化物換算之合計質量為0.100~0.500質量%之RuO2。
又,以聚乙烯醇濃度成為6質量%之方式將離子交換水與聚乙烯醇投入至容器中,於90℃下混合1小時,準備聚乙烯醇水溶液。
接下來,將各第一成分用介電體原料25g與上述量之第二成分用原料進行混合,針對該等混合物,以聚乙烯醇水溶液之濃度成為10質量%之方式於原料混合物中添加聚乙烯醇水溶液,於乳缽中進行混合及造粒而製作造粒粉。
進而將所獲得之造粒粉投入至直徑14.0mm之模具中,並以1ton/cm2之壓力進行加壓成形,藉此獲得圓板狀之生坯成形體。
繼而,將所獲得之生坯成形體於還原性環境中進行煅燒,藉此製作燒結體。此時之煅燒係將升溫速度設為300℃/hr、將保持溫度設為1100~1300℃、將保持時間設為2小時。環境氣體設為經加濕之氫氣/氮氣混合氣體(氫氣濃度0.5%),加濕使用加濕器(加濕器溫度35℃)。
<絕緣電阻值>
針對各電容器試樣,使用數位超高電阻/微小電流計(UDC股份有限公司製造8340A)以施加電壓200V測定絕緣電阻值。絕緣電阻值只要於200℃下為40MΩ以上即設為良好。
再者,表9中,第一成分之氧化物換算組成係相對於 第一成分之各氧化物成分於表中所記載之氧化物換算之合計mol數的各氧化物於表中所記載之氧化物換算之mol%。又,Mn氧化物之含量係相對於第一成分之各氧化物成分於表中所記載之氧化物換算之合計質量的MuO換算之Mn氧化物之質量%,Cu氧化物之含量係相對於第一成分之各氧化物成分於表中所記載之氧化物換算之合計質量的CuO換算之Cu氧化物之質量%,Ru氧化物之含量係相對於第一成分之各氧化物成分於表中所記載之氧化物換算之合計質量的RuO2換算之Ru氧化物之質量%,又,第二成分之氧化物之合計含量係相對於第一成分之各氧化物成分於表中所記載之氧化物換算之合計質量的第二成分之氧化物之合計之質量%。
根據以上之結果確認,藉由使第一成分之含量為本發明之規定量之範圍且於本發明之規定量之範圍內含有Mn之氧化物且含有Cu之氧化物或Ru之氧化物中之一者或兩者,從而25℃下之相對介電係數較高,即使於150~200℃之高溫條件下靜電電容之變化亦較少,靜電電容變化率於-55℃~200℃之溫度範圍內為-50.0%~50.0%之範圍內,25℃及200℃下之介電損失較小,且200℃下之絕緣電阻值較高。
並且,根據與第一成分之含量處於本發明之規定量之範圍且Mn之氧化物之含量處於本發明之規定量之範圍,但不含Cu之氧化物及Ru之氧化物之參考試樣的比較得知,藉由使第一成分之含量 為本發明之規定量之範圍且於本發明之規定量之範圍內含有Mn之氧化物且含有Cu之氧化物或Ru之氧化物中之一者或兩者,可不對與相對介電係數或介電損失相關之作用效果造成較大影響而進一步縮小靜電電容之變化,並且提高絕緣電阻值。
再者,於上述例中係針對單板型之陶瓷電容器進行了評價,但關於將介電體層與內部電極積層而成之積層型之陶瓷電容器,亦可獲得相同之結果。
Claims (14)
- 一種介電體磁器組成物,其特徵在於包含第一成分之預燒物與第二成分之混合物燒結體;第一成分包含:相對於換算成下述氧化物時之第一成分之合計mol數,含有比例以CaO換算計為0.00~35.85mol%之Ca之氧化物、以SrO換算計為0.00~47.12mol%之Sr之氧化物、以BaO換算計為0.00~51.22mol%之Ba之氧化物、以TiO2換算計為0.00~17.36mol%之Ti之氧化物、以ZrO2換算計為0.00~17.36mol%之Zr之氧化物、以SnO2換算計為0.00~2.60mol%之Sn之氧化物、以Nb2O5換算計為0.00~35.32mol%之Nb之氧化物、以Ta2O5換算計為0.00~35.32mol%之Ta之氧化物、及以V2O5換算計為0.00~2.65mol%之V之氧化物;該第一成分含有選自Ca之氧化物、Sr之氧化物及Ba之氧化物中之至少1種;選自Ti之氧化物及Zr之氧化物中之至少1種;及選自Nb之氧化物及Ta之氧化物中之至少1種;作為必需成分,且,相對於換算成上述氧化物時之第一成分之合計mol數,CaO換算之Ca之氧化物、SrO換算之Sr之氧化物及BaO換算之Ba之氧化物之合計含有比例為48.72~51.22mol%,TiO2換算之Ti之氧化物、ZrO2換算之Zr氧化物及SnO2換算之Sn之氧化物之合計含有比例為15.97~17.36mol%,Nb2O5換算之Nb之氧化物、Ta2O5換算之Ta氧化物及V2O5換算之V之氧化物之合計含有比例為31.42~35.31mol%;作為第二成分,係至少含有相對於換算成上述氧化物時之第一成分之合計質量,含有比例以MnO換算計為0.005~3.500質量%之 Mn之氧化物(a)、以及Cu之氧化物及Ru之氧化物中之任一者或兩者(b)。
- 一種介電體磁器組成物,其特徵在於包含第一成分之預燒物與第二成分之混合物燒結體;作為第一成分,係含有下述通式(1):AaM1 bM2 cOd (1)(式(1)中,A係由通式(2):Ba1-x-ySrxCay(2)(式(2)中,0≦x≦0.920,0≦y≦0.700)所表示;M1係選自Ti、Zr及Sn中之至少1種;M2係選自Nb、Ta及V中之至少1種;5.70≦a≦6.30,1.90≦b≦2.10,7.20≦c≦8.80,27.45≦d≦32.50)所表示之化合物(其中,於含有Sn之情況下,相對於TiO2換算之Ti之氧化物、ZrO2換算之Zr之氧化物及SnO2換算之Sn之氧化物之合計mol數,SnO2換算之Sn之氧化物之含有比例為15.00mol%以下;於含有V之情況下,相對於Nb2O5換算之Nb之氧化物、Ta2O5換算之Ta之氧化物及V2O5換算之V之氧化物之合計mol數,V2O5換算之V之氧化物之含有比例為7.50mol%以下);作為第二成分,係至少含有相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,含有比例以MnO換算計為0.005~3.500質量%之Mn之氧化物(a);以及Cu之氧化物及Ru之氧化物中之任一者或兩者(b)。
- 一種介電體磁器組成物,其特徵在於包含第一成分之預燒物與第二成分之混合物燒結體;作為第一成分,係含有下述通式(3):
- 如請求項3之介電體磁器組成物,其中,上述第一成分係於上述3元組成圖中,處於將點A'=(0.05,0.95,0.00)、點B'=(0.60,0.40,0.00)、點C'=(0.70,0.20,0.10)、點D'=(0.70,0.10,0.20)、點E'=(0.55,0.00,0.45)、點F'=(0.40,0.00,0.60)、點G'=(0.10,0.10,0.80)、點H'=(0.00,0.00,1.00)、點I'=(0.00,0.40,0.60)、點J'=(0.20,0.40,0.40)、點K'=(0.00,0.70,0.30)、點L'=(0.00,0.90,0.10)連結之線段所包圍之範圍內之化合物。
- 如請求項1至4中任一項之介電體磁器組成物,其中,作為第 二成分,係含有相對於將第一成分換算成CaO、SrO、BaO、TiO2、ZrO2、SnO2、Nb2O5、Ta2O5、V2O5時之第一成分之合計質量,含有比例以CuO換算計為0.010質量%以上且未滿0.080質量%之Cu之氧化物及以RuO2換算計為0.050質量%以上且未滿0.300質量%之Ru之氧化物中之任一者或兩者。
- 如請求項1至4中任一項之介電體磁器組成物,其含有D之氧化物(D係選自Li、Mg、Si、Cr、Al、Fe、Co、Ni、Zn、Ga、Ge、In、W、Mo、Y、Hf、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb及Lu中之至少1種)作為第二成分。
- 如請求項1至4中任一項之介電體磁器組成物,其含有鎢青銅型結晶相。
- 如請求項1至4中任一項之介電體磁器組成物,其25℃下之相對介電係數為100.0以上。
- 如請求項1至4中任一項之介電體磁器組成物,其靜電電容變化率於-55℃~200℃之溫度範圍內為-20.0%~5.0%之範圍內。
- 如請求項1至4中任一項之介電體磁器組成物,其25℃下之介電損失(tanδ)為10.0%以下且200℃下之介電損失(tanδ)為10.0%以下。
- 如請求項1至4中任一項之介電體磁器組成物,其200℃下之絕緣電阻值為40MΩ以上且未滿100MΩ。
- 一種陶瓷電子零件,其特徵在於包含由請求項1至11中任一項之介電體磁器組成物形成之介電體層、及包含卑金屬作為導電成分之電極層。
- 如請求項12之陶瓷電子零件,其中,上述卑金屬係選自鎳及 銅中之至少1種。
- 如請求項12或13之陶瓷電子零件,其係將上述介電體層與上述電極層複數積層而成。
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