TWI721447B - 異物檢查裝置及異物檢查方法 - Google Patents

異物檢查裝置及異物檢查方法 Download PDF

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Publication number
TWI721447B
TWI721447B TW108119929A TW108119929A TWI721447B TW I721447 B TWI721447 B TW I721447B TW 108119929 A TW108119929 A TW 108119929A TW 108119929 A TW108119929 A TW 108119929A TW I721447 B TWI721447 B TW I721447B
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TW
Taiwan
Prior art keywords
inspection
inspection object
foreign
color
light
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TW108119929A
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English (en)
Chinese (zh)
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TW202004557A (zh
Inventor
佐野栄一
中村瑞樹
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日商Ｆｋ光學研究所股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW108119929A 2018-06-12 2019-06-10 異物檢查裝置及異物檢查方法 TWI721447B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
WOPCT/JP2018/022470 2018-06-12
PCT/JP2018/022470 WO2019239501A1 (ja) 2018-06-12 2018-06-12 異物検査装置及び異物検査方法

Publications (2)

Publication Number Publication Date
TW202004557A TW202004557A (zh) 2020-01-16
TWI721447B true TWI721447B (zh) 2021-03-11

Family

ID=68842040

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108119929A TWI721447B (zh) 2018-06-12 2019-06-10 異物檢查裝置及異物檢查方法

Country Status (4)

Country Link
JP (1) JP6980241B2 (ja)
CN (1) CN112236671A (ja)
TW (1) TWI721447B (ja)
WO (1) WO2019239501A1 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0426844A (ja) * 1990-05-22 1992-01-30 Dainippon Printing Co Ltd 異物検査方法
JP2007040862A (ja) * 2005-08-04 2007-02-15 Dainippon Printing Co Ltd 異物検査装置および異物検査方法
JP2012002661A (ja) * 2010-06-16 2012-01-05 Io Giken Co Ltd 外観検査装置
TW201324646A (zh) * 2005-08-12 2013-06-16 Ebara Corp 檢查裝置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1056652A (en) * 1964-04-14 1967-01-25 Int Standard Electric Corp Flaw detection apparatus
JP2004219108A (ja) * 2003-01-09 2004-08-05 Dainippon Printing Co Ltd 着色膜の膜厚ムラ検査方法及び装置
JP2007085964A (ja) * 2005-09-26 2007-04-05 Toshiba Matsushita Display Technology Co Ltd 透明膜の測定システムおよび測定方法
WO2011049190A1 (ja) * 2009-10-24 2011-04-28 株式会社Djtech 外観検査装置及び印刷半田検査装置
US8501503B2 (en) * 2011-04-28 2013-08-06 Nanda Technologies Gmbh Methods of inspecting and manufacturing semiconductor wafers
JP2014077685A (ja) * 2012-10-10 2014-05-01 Ntn Corp パターン欠陥検出装置およびパターン欠陥検出方法
JP6500518B2 (ja) * 2015-03-10 2019-04-17 オムロン株式会社 シート検査装置
JP2017156659A (ja) * 2016-03-04 2017-09-07 凸版印刷株式会社 カラーフィルタの欠陥検査装置および欠陥検査方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0426844A (ja) * 1990-05-22 1992-01-30 Dainippon Printing Co Ltd 異物検査方法
JP2007040862A (ja) * 2005-08-04 2007-02-15 Dainippon Printing Co Ltd 異物検査装置および異物検査方法
TW201324646A (zh) * 2005-08-12 2013-06-16 Ebara Corp 檢查裝置
JP2012002661A (ja) * 2010-06-16 2012-01-05 Io Giken Co Ltd 外観検査装置

Also Published As

Publication number Publication date
CN112236671A (zh) 2021-01-15
WO2019239501A1 (ja) 2019-12-19
JPWO2019239501A1 (ja) 2021-03-18
JP6980241B2 (ja) 2021-12-15
TW202004557A (zh) 2020-01-16

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