TWI710437B - 末端執行器 - Google Patents
末端執行器 Download PDFInfo
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- TWI710437B TWI710437B TW107102183A TW107102183A TWI710437B TW I710437 B TWI710437 B TW I710437B TW 107102183 A TW107102183 A TW 107102183A TW 107102183 A TW107102183 A TW 107102183A TW I710437 B TWI710437 B TW I710437B
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Abstract
用於保持基板的末端執行器(10)具有多層主體(14)和設置在主體(14)中的流體通道(34)。主體(14)包括至少兩個層(40、42、44;66、68),其中該等層(44;68)中的至少一個不本質穩定。
Description
[0001] 本發明關於用於保持基板的末端執行器。
[0002] 末端執行器是運輸裝置的運動鏈的最後一個元件,例如,機器人。它們用於例如用於夾持或保持物體。 [0003] 在製造微結構部件時,例如,在晶片製造中,末端執行器通常用於保持基板以便在不同的處理站之間移動基板。 [0004] 在本發明的範圍內,基板尤其包括晶圓,例如半導體晶圓或玻璃晶圓、撓性基板、由晶片和澆注化合物所合成製造的晶圓(重構晶圓;具有嵌入晶粒的模製晶圓)或具有三維表面的基板。 [0005] 這種末端執行器是已知的並且通常由具有研磨的真空通道之主體和封閉真空通道的蓋子構成。抽吸可以被施加到晶圓上,並且可以藉由透過蓋上的開口之真空技術來保持。但是,由於它們的構造,這種末端執行器很厚並且很難生產。 [0006] 要由末端執行器拾取的晶圓經常設置在晶圓盒中。為了從晶圓盒中去除單獨的晶圓,首先移動末端執行器被在盒中的兩個晶圓之間,並被移動與該等晶圓中的一個連接或被與該等晶圓中的一個連接以固定該晶圓,例如,藉由真空或藉由使用伯努利效應的過壓的方式。 [0007] 為了在晶圓盒中容納最大可能數量的晶圓,晶圓通常以彼此非常小的間距設置。此外,晶圓可以是撓性的並且在水平放置時可以下垂,由此晶圓之間的間隔可以被進一步減小。因此,末端執行器也必須能夠被可靠地引導在晶圓之間而不接觸晶圓,例如在「末端面」上,從而破壞它們。
[0008] 因此,本發明的目的是提供一種特別薄且易於生產的末端執行器。 [0009] 該目的是藉由用於保持基板之末端執行器來實現,末端執行器具有主體和設置在主體中的流體通道,其中該主體包括至少兩個層所形成,其中這些層中的至少一個本身並不穩定。 [0010] “非本質穩定”意味著該層不足夠穩定以獨立地將基板保持在針對其中對應的末端執行器被針對基板而設置之目的而設置的保持區域中。所述至少一個層因此可以是薄的,由此可以減小末端執行器的整個構造高度,即厚度。非本質穩定並且僅具有必要的穩定性以在一旦彼此被固定時保持基板對於末端執行器的多個層或所有層來說甚至是可行的。非本質穩定的層可以是例如薄膜,或末端執行器可以由多個非常薄的金屬片構成。取決於末端執行器是否被以壓縮空氣源或真空源來操作,流體通道因此可用作真空通道或過壓通道。
在本發明的上下文中,術語“層”是指預製層,即處於固態的預製部件,特別是扁平和/或板狀。兩個或更多個預製部件可以彼此附接以形成末端執行器。
預製層可能已經具有末端執行器的輪廓,或者兩個或更多個層彼此附接,然後切割成末端執行器的期望形狀。
即使當施加到預製層上的塗層或液體材料被固化時,施加到預製層上的塗層或液體材料在本發明的意義上並不形成其自身的層。
末端執行器既可以從下方接近基板也可以從上方接近基板,並且從下方保持或固定它們或從上方保持或固定它們。
較佳地,溝和/或槽被結合在該等層的至少一個中並且可以部分地限定流體通道,由此可以容易地形成流體通道。
為了簡化生產過程,溝和/或槽可以被覆蓋並因此被該等層的至少另一個密封。
在本發明的一個實施例中,主體包括三個層,其中該等層中的中間一個設置有槽和/或溝,其是由兩個外層覆蓋,從而形成了流體通道。因此,外兩層中的至少一層可以是非本質穩定的層。因此,提供了更扁平或更薄的末端執行器。
例如,其中一個層,特別是其中結合有溝和/或槽的層由金屬片製成。金屬片可以是高級鋼或鉬製成。金屬片也可以由鈦、具有不同塗層的鋁或石英玻璃製成。由此確保流體通道總是具有期望的形狀。
該至少兩個層可以彼此一致並且/或者可以具有末端執行器的輪廓。這節省了組裝步驟。
在一個變型中,至少一個層中的至少一個是預製部件,簡化了該組裝。
該等層中的其中一個層,特別是非本質穩定的層,較佳由合成材料,特別是合成材料膜製成。合成材料是例如聚醚醚酮(polyether ether ketone;PEEK)。合成材料層特別是主體的最上層或最下層。因此,特別是,可以廉價且始終如一地製造非本質穩定的層。
例如,由聚醚醚酮(polyether ether ketone;PEEK)或類似的合成材料產生的非本質穩定的層具有0.1mm或更小的厚度。
為了確保流體通道的密封性,至少兩層可以黏合在一起。或者,所述至少兩個層也可以被焊接。另外,兩層也可以擰緊,由此末端執行器的穩定性進一步增加。
[0024] 在本發明的一個實施例中,主體包括接收端和緊固端,其中用於保持基板的保持區域設置在接收端上,使得基板可以可靠地保持在末端執行器上。 [0025] 切口較佳從接收端延伸到主體中,其中保持臂由切口所形成。切口可以延伸貫穿所有層。因此,基板可以被末端執行器拾取,並且例如,藉由保持引腳在一台機器中的一個台上而被大致居中地保持在其下側。 [0026] 為了改善各層和整個主體的穩定性,切口可以在其面向緊固端的末端上具有至少一個半徑,並且尤其可以是U形的。 [0027] 在一個實施變型中,流體通道從緊固端延伸到保持區域中,特別是延伸到保持臂中,並且在該位置處進入開口。因此,流體通道可以具有U形部分。保持基板所需的負壓或過壓可透過流體通道設置在保持區域中。 [0028] 例如,流體通道的U形部分的U的分支延伸到保持臂中。流體通道可以整體呈Y形或呈音叉的形狀。 [0029] 至少一個開口較佳設置在該等層中的一個中,特別是在該等保持臂其中一個中,流體通道透過其開口進入保持區中。因此,每個保持臂可以設置至少一個開口。開口設置於最上層。當末端執行器被如預期使用時,基板所在的主體的側被指定為“上”或“上側”。 [0030] 在本發明的一個實施例中,保持裝置被設置在開口中或開口處並且尤其包括密封唇,由此可以以可靠的方式固定基板。 [0031] 例如,保持裝置是抽吸裝置,特別是基於伯努利效應的真空吸盤或固定裝置。透過這種方式,可以藉由負壓或藉由過壓將基板固定在末端執行器上。 [0032] 抽吸裝置可以包括密封唇。抽吸裝置還可以包括真空溝或溝和/或多孔材料。 [0033] 凸緣區域可以設置在緊固端上,特別是凸緣板可以設置在緊固端上,以便將末端執行器固定到運輸裝置,特別是將末端執行器固定到機器人臂。
圖1示出了被引入到用於存儲基板(未示出)的空盒12中的末端執行器10。
末端執行器10是於運動鏈末端的機器人的部件。所示出的末端執行器10是保持器或夾持器,利用該保持器或夾持器可以拾取和移動諸如晶圓的基板。因此,它可以連接到機器人手臂(未示出)。
末端執行器10具有主體14和兩個保持裝置15,其中主體14具有接收端16和緊固端18。
凸緣區域20設置在緊固端18處,凸緣區域中的凸緣板22固定到主體14。凸緣板22用於將末端執行器10固定到機器人臂。
在接收端16處,用於保持基板(在圖1中由虛線表示)的保持區域24被形成在末端執行器10的上側0上。在圖2中,圓形基板的中心點M被指示為基板所被期望被容納在保持區域24中的位置。
切口26從接收端16朝向緊固端18延伸到主體14中。
切口26首先具有從接收端16開始的兩個平行側壁28,該等側壁28然後藉由過渡區域30而被連接在一
起。在該第一實施例中,過渡區域30具有半徑R1,從而使得過渡區域30是半圓形的。
特別地,切口26是在主體14背離緊固端18的一側上之主體14中的U形孔。
主體14上的保持臂32由切口26形成,平行側壁28是所述主體的內側。
另外,流體通道34形成在主體14中並且從凸緣區域20沿接收端16的方向延伸,即流體通道34從緊固端18沿接收端16的方向延伸。
在所示實施例中,流體通道34是真空通道。但是,流體通道34也可以是過壓通道。
如圖2所示,流體通道34從凸緣區域20開始,並分支成兩個分支36,兩個分支36在保持區域24中延伸到保持臂32中。
流體通道34作為整體呈Y形或呈音叉形狀,其中兩個分支36形成流體通道34的U形部分。因此U的分支由延伸到保持臂32中該等分支36的部分形成。
在分支36的末端處,在主體14中設置分別的開口38,使得流體通道34進入上側O上的保持區域24中。
保持裝置15被緊固在開口38中。因此,保持裝置15可以設置在保持臂32上。因此,每個保持臂32設置至少一個開口38。
圖3示出了主體14的爆炸圖。在所示實施例中,主體14具有三層,即上層40、中間層42和下層44。上層40和下層44各自形成主體14的外層。
[0051] 這三個層40、42、44全部一致並且被緊固在一起。例如,層40、42、44黏附在一起並且還可以另外擰在一起。三層40、42、44也可以被焊接在一起。 [0052] 由於該等層40、42、44的一致佈置,切口26延伸穿過所有層40、42、44。 [0053] 下層44在整個範圍內被封閉,中間層42具有槽46以形成流體通道34,並且上層40除了設置有兩個開口38之外其他整個都被封閉。 [0054] 所有層40、42、44可以另外具有用於螺釘的孔口。 [0055] 例如,上層40和中間層42各自由金屬片製成。例如,高級鋼或鉬是合適的材料。 [0056] 在任何情況下,由於金屬片的材料特性之緣故,上層40和中間層42一起具有足夠高水準的穩定性,也就是基板可以在這兩個層40、42上的保持區域24中被保持。當然,已假設使用具有針對末端執行器10被作為整體而設計的尺寸的基板。 [0057] 相反地,下層44本身不是穩定的,即,該層不夠穩定,無法獨立地將對應尺寸的基板保持在保持區域24中。 [0058] 下層可以由合成材料膜製造。例如,聚醚醚酮(polyether ether ketone;PEEK)是合適的合成材料。 [0059] 例如,下層44具有0.1mm或更小的厚度。 [0060] 為了形成流體通道34,形狀為流體通道34的槽46設置在中間層42中。因此,槽46同樣為Y形或音叉的形狀。 [0061] 當主體14處於組裝狀態時,該槽46從上方和下方以氣密方式(與設置在凸緣板22的區域中的該等開口38和該等連接開口隔開)被完全覆蓋和封閉,即在垂直方向上被上層40和下層44被完全覆蓋和封閉。 [0062] 流體通道34終止於中間層42的槽46的末端處於該等開口38設置在最上層40中的區域中。 [0063] 如圖4所示,該等保持裝置15中的一個被緊固在所示的開口38中。 [0064] 在所示實施例中,保持裝置15是抽吸裝置,特別是真空吸盤,並且具有托架48和具有被緊固在托架48中的密封唇50。 [0065] 托架48具有兩個圓柱形部分,即基部52和緊固部54,其中緊固部54的直徑大於基部的直徑並且還大於開口38的直徑。 [0066] 緊固部54具有大致對應於中間層42的厚度並設置在上層40和下層44之間的厚度。 [0067] 基部52延伸穿過開口38並且在其上側具有接觸表面56,即在其背離緊固部54的側上具有接觸表面56。 [0068] 抽吸溝60設置在接觸表面56中並且藉助於托架48中的貫通通道62並藉助於緊固部54中的連接通道64與流體通道34流體連通。
密封唇50在主體14的上側O上被緊固到基部52並且完全圍繞接觸表面56。
托架48被緊固至末端執行器10,其中它被通過中間層42和上層40,並由下層44保持在該位置。此外,它由被支撐在下層40的上側上之密封唇50固定。
為了拾取基板,末端執行器10可以從下方朝向基板移動,然後抬起基板。同時,借助於真空源(未示出)可將吸力施加到基板上,所述真空源可藉助於流體通道34在抽吸溝60中產生負壓,然後流體通道34充當為真空通道。
然後,由於來自環境壓力的過大壓力的緣故,將基板壓靠接觸表面56,從而將其牢固地固定到末端執行器10上。然後,基板至少在接觸表面56上抵靠保持區域24。
基於伯努利效應將保持裝置15設計為固定裝置也是可行的。在這種情況下,借助於過壓源(未示出),處於壓力下的氣體被供應到流體通道34,然後在保持裝置15上以高速流出並且快速流過基板。由此在基板上產生朝向末端執行器10的力,使得基板被固定在末端執行器10上。在這種情況下,流體通道34是過壓通道。
另外,可以在保持臂32上形成支撐表面65,特別是在其面向接收端16的末端上。支撐表面65可以由軟材料例如橡膠製成。在最佳情況下,當基板固定到末端執行器10時,基板還抵靠在支撐表面65上。
儘管下層44是非本質穩定的,但是主體14的多層結構意味著實現了整體的穩定的末端執行器10。這是足夠穩定於能夠在其保持區域24中輸送針對該末端執行器10所設置的尺寸的基板。由於下層44形成為非本質穩定的薄膜的事實,末端執行器10的安裝高度被明顯減小,特別是在保持區域24中的安裝高度被明顯減小。
圖5和圖6示出了根據本發明的末端執行器10的第二實施例,其實質與第一實施例對應。因此,下面將僅討論這些差異,並且相同的部分和功能上等效的部分由相同的附圖標記表示。
第二實施例中所示的末端執行器10被設計用於比第一實施例的末端執行器10更大的基板,並且因此第二實施例中的部件的尺寸不同。
例如,主體14較寬,以便能夠由於該等接觸表面56之間更大的間隔的緣故而更穩定地保持複數個較大的基板。同時,切口26也較寬。
圖5從下方示出了第二實施例的末端執行器10的視圖,其中為了清楚起見沒有示出凸緣板22。
在該實施例中,主體14僅具有兩層,即上層66和下層68。
下層68對應於第一實施例的下層44並且與第一實施例的下層44相同。
相反,上層66對應於第一實施例的上層40和中間層42的組合。
部分限定流體通道34的溝70被合併在其下側上的上層66中。溝70因此對應於第一實施例的槽46,並且溝70被下層68封閉以形成流體通道34。
另外,上層66包括朝向末端執行器110的上側O的流體通道34的開口38。
上層66還可以包括用於保持裝置15的緊固部54的凹部。
為了說明的目的,在圖5中,下層68被透明地示出,使得上層66的溝70仍為可見的。
與第一實施例相反,切口26的過渡區域30不再是半圓形,而是具有兩個半徑R2,每個半徑R2描述四分之一圓。該兩個四分之一圓藉由短直線部分72而被連接在一起(見圖6)。
當然,所示實施例的該兩個特徵可以彼此組合。特別地,第一實施例的末端執行器10可以被形成有兩層,並且第二實施例的末端執行器可以被形成有三層。
僅藉由將這些層連接在一起來實現針對末端執行器的主體的任何層都不是本質穩定的以及針對保持基板所需的穩定性是同樣可行的。
圖7示出了三種具有不同尺寸的末端執行器10以及用於基板的對應尺寸的盒12。因此,最左邊所示的尺寸對應於第一實施例的尺寸,並且中間所示的尺寸對應於第二實施例的尺寸。此外,右側顯示了特別大的基板的更大尺寸。
例如,左側的末端執行器被設計用於具有至少100mm直徑的基板,中間末端執行器被設計用於直徑至少150mm的基板並且右側的末端執行器被設計適用於直徑至少為200mm的基板。
自然地,取決於晶圓的性質,相同的夾具也可以用於多個晶圓尺寸。
為了製造末端執行器,可以同時切出各個層,例如,借助於雷射或水噴流。這確保了各個層的產生完全一致。當該等層以一致的方式一個在另一個之上設置時,作為用於多個層的機械連接的多個開口也可以在一個操作中針對要被連接的該等層同時被產生。
10:末端執行器
12:空盒
14:主體
15:保持裝置
16:接收端
18:緊固端
20:凸緣區域
22:凸緣板
24:保持區域
26:切口
28:側壁
30:過渡區域
32:保持臂
34:流體通道
36:分支
38:開口
40:層
42:層
44:層
46:槽
48:托架
50:密封唇
52:基部
54:緊固部
56:接觸表面
60:抽吸溝
62:貫通通道
64:連接通道
65:支撐表面
66:層
68:層
70:溝
72:短直線部分
110:末端執行器
M:中心點
O:上側
R1:半徑
R2:半徑
[0034] 根據以下描述和所參考的附圖,本發明的其他優點和特徵將變得明確。在附圖中: 圖1示出根據本發明的末端執行器的透視圖,該末端執行器已經被引入到盒中, 圖2示出如圖1所示的根據本發明的末端執行器的平面圖; 圖3示出如圖2所示的根據本發明的末端執行器的主體的爆炸圖, 圖4示出根據本發明的末端執行器在保持裝置的其中一個的區域中的詳細橫截面視圖, 圖5示出根據本發明的末端執行器的第二實施例的從下方觀察的視圖, 圖6示出如圖5所示的從末端執行器的上層的下方觀察的視圖,圖7示出了根據本發明的多個末端執行器,其具有不同尺寸,在用於不同尺寸的基板的盒中。
14‧‧‧主體
38‧‧‧開口
40‧‧‧層
42‧‧‧層
44‧‧‧層
46‧‧‧溝
65‧‧‧支撐表面
Claims (16)
- 一種用於保持複數個基板的末端執行器,具有多層主體(14)和設置在該主體(14)內的流體通道(34),其中該主體(14)包含三個層(40、42、44),其中該三個層(40、42、44)中的每一個層都不是本質地穩定,但是當該三個層(40、42、44)被固定在一起時則具有充分的穩定性,以保持該等基板。
- 根據申請專利範圍第1項之末端執行器,其中溝(70)和/或槽(46)被合併在該等層中的至少一個層(42)中並且部分地定義該流體通道(34)。
- 根據申請專利範圍第2項之末端執行器,其中該溝(70)和/或該槽(46)由該等層(40、44)中的至少另一個層所覆蓋和密封。
- 根據申請專利範圍第3項之末端執行器,該三個層(40、42、44)中的該中間層(42)被設置有被該外部的兩層(40、44)所覆蓋的該槽(46),因此形成該流體通道(34)。
- 根據申請專利範圍第2項之末端執行器,其中該溝(70)和/或該槽(46)被合併在其中的該層(42)係由金屬片所製造。
- 根據申請專利範圍第1項之末端執行器,其中該三個層(40、42、44)彼此一致和/或具有該末端執行器(10)的輪廓。
- 根據申請專利範圍第1項之末端執行器,其中該等層(40、42、44)中的至少一個層是預製部件。
- 根據申請專利範圍第1項之末端執行器,其中不是本質地穩定的該等層(44)係由合成材料所製造。
- 根據申請專利範圍第1項之末端執行器,其中該三個層(40、42、44)被黏合在一起。
- 根據申請專利範圍第1項之末端執行器,其中該主體(14)包含接收端(16)和緊固端(18),其中用於保持該基板的保持區域(24)被設置在該接收端(16)上。
- 根據申請專利範圍第10項之末端執行器,其中切口(26)從該接收端(16)延伸到該主體(14)中,其中複數個保持臂(32)被該切口(26)形成。
- 根據申請專利範圍第11項之末端執行器,其中該切口(26)包含在其面向該緊固端(18)的末端上之至少一個半徑 (R1;R2)並且是U形。
- 根據申請專利範圍第10至12項中任一項之末端執行器,其中該流體通道(34)從該緊固端(18)延伸進入該等保持臂(32)中並且在那個位置進入複數個開口(38)。
- 根據申請專利範圍第13項之末端執行器,其中保持裝置(15)被設置在該開口(38)中或該開口(38)上並且包含密封唇(50)。
- 根據申請專利範圍第14項之末端執行器,其中該保持裝置(15)是真空吸盤或基於伯努利效應的固定裝置。
- 根據申請專利範圍第10項之末端執行器,其中凸緣板(22)被設置在該緊固端(18)上,以便將該末端執行器(10)緊固到運輸裝置。
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JP7175735B2 (ja) * | 2018-12-11 | 2022-11-21 | 平田機工株式会社 | 基板搬送装置 |
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FR3112980B1 (fr) * | 2020-07-28 | 2022-07-22 | Defitech | Caisson d’aspiration pour un préhenseur |
USD949219S1 (en) * | 2020-08-20 | 2022-04-19 | Grey Orange Pte. Ltd. | Spatula gripper |
TWI796709B (zh) * | 2021-06-16 | 2023-03-21 | 盛詮科技股份有限公司 | 晶圓懸浮手臂 |
EP4273911A1 (de) | 2022-05-03 | 2023-11-08 | Werner Lieb GmbH | Haltevorrichtung und verfahren zum halten und/oder transportieren von werkstücken und/oder bauteilen, optional mit werkzeugfrei auswechselbaren saugerelementen |
CN118156204A (zh) * | 2022-12-07 | 2024-06-07 | 纬创资通(重庆)有限公司 | 晶圆搬运设备及其吸盘模块 |
CN115632023B (zh) * | 2022-12-22 | 2023-08-04 | 河北博特半导体设备科技有限公司 | 一种双臂晶圆传输装置 |
TWI814679B (zh) * | 2023-02-13 | 2023-09-01 | 盛詮科技股份有限公司 | 載板懸浮手臂 |
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TW201829140A (zh) | 2018-08-16 |
KR20180088597A (ko) | 2018-08-06 |
JP7109927B2 (ja) | 2022-08-01 |
US20180215048A1 (en) | 2018-08-02 |
SG10201800713TA (en) | 2018-08-30 |
CN108364896A (zh) | 2018-08-03 |
DE102018100855A1 (de) | 2018-08-02 |
NL2018244B1 (en) | 2018-08-07 |
AT519588B1 (de) | 2021-10-15 |
JP2018174302A (ja) | 2018-11-08 |
AT519588A2 (de) | 2018-08-15 |
AT519588A3 (de) | 2020-02-15 |
US10343292B2 (en) | 2019-07-09 |
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