TWI681939B - 玻璃薄膜的製造方法、及包含玻璃薄膜的電子裝置的製造方法 - Google Patents
玻璃薄膜的製造方法、及包含玻璃薄膜的電子裝置的製造方法 Download PDFInfo
- Publication number
- TWI681939B TWI681939B TW105122235A TW105122235A TWI681939B TW I681939 B TWI681939 B TW I681939B TW 105122235 A TW105122235 A TW 105122235A TW 105122235 A TW105122235 A TW 105122235A TW I681939 B TWI681939 B TW I681939B
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- Prior art keywords
- support
- glass
- glass film
- fulcrum
- film
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Links
- 239000011521 glass Substances 0.000 title claims abstract description 350
- 238000000034 method Methods 0.000 title claims abstract description 88
- 238000004519 manufacturing process Methods 0.000 title claims description 95
- 230000009471 action Effects 0.000 claims abstract description 15
- 239000010408 film Substances 0.000 claims description 236
- 239000010409 thin film Substances 0.000 claims description 74
- 238000003780 insertion Methods 0.000 claims description 73
- 230000037431 insertion Effects 0.000 claims description 73
- 230000008569 process Effects 0.000 claims description 52
- 238000003825 pressing Methods 0.000 claims description 18
- 238000001179 sorption measurement Methods 0.000 claims description 16
- 239000004973 liquid crystal related substance Substances 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 11
- 238000011900 installation process Methods 0.000 claims description 6
- 239000005357 flat glass Substances 0.000 claims description 5
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims 1
- 239000006059 cover glass Substances 0.000 description 20
- 239000010410 layer Substances 0.000 description 17
- 239000000758 substrate Substances 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 7
- 230000003746 surface roughness Effects 0.000 description 5
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- 230000007246 mechanism Effects 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000005368 silicate glass Substances 0.000 description 4
- 238000003280 down draw process Methods 0.000 description 3
- 239000012467 final product Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000006124 Pilkington process Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000005340 laminated glass Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000007500 overflow downdraw method Methods 0.000 description 1
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- 239000000843 powder Substances 0.000 description 1
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- 238000010008 shearing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/02—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
- B32B3/28—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer comprising a deformed thin sheet, i.e. the layer having its entire thickness deformed out of the plane, e.g. corrugated, crumpled
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
- B32B43/006—Delaminating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
- C03C27/06—Joining glass to glass by processes other than fusing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2315/00—Other materials containing non-metallic inorganic compounds not provided for in groups B32B2311/00 - B32B2313/04
- B32B2315/08—Glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Joining Of Glass To Other Materials (AREA)
- Electroluminescent Light Sources (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015-146954 | 2015-07-24 | ||
JP2015146954A JP6519951B2 (ja) | 2015-07-24 | 2015-07-24 | ガラスフィルムの製造方法、及びガラスフィルムを含む電子デバイスの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201718427A TW201718427A (zh) | 2017-06-01 |
TWI681939B true TWI681939B (zh) | 2020-01-11 |
Family
ID=57884535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW105122235A TWI681939B (zh) | 2015-07-24 | 2016-07-14 | 玻璃薄膜的製造方法、及包含玻璃薄膜的電子裝置的製造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6519951B2 (ko) |
KR (1) | KR102457961B1 (ko) |
CN (1) | CN107848880B (ko) |
TW (1) | TWI681939B (ko) |
WO (1) | WO2017018136A1 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102073743B1 (ko) * | 2017-12-19 | 2020-02-05 | 성진세미텍주식회사 | 필름 분리장치 |
JP2020100502A (ja) * | 2018-12-20 | 2020-07-02 | 日本電気硝子株式会社 | ガラスフィルムの製造方法及び製造装置、並びにガラスフィルムを含む電子デバイスの製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102171745A (zh) * | 2009-02-06 | 2011-08-31 | 旭硝子株式会社 | 电子器件的制造方法及该方法中使用的剥离装置 |
WO2015041165A1 (ja) * | 2013-09-17 | 2015-03-26 | 日本電気硝子株式会社 | ガラスフィルム剥離装置 |
TW201514110A (zh) * | 2013-09-30 | 2015-04-16 | Nippon Electric Glass Co | 膜狀玻璃的製造方法、電子元件的製造方法及玻璃膜積層體的製造方法 |
TW201604927A (zh) * | 2014-05-03 | 2016-02-01 | 半導體能源研究所股份有限公司 | 疊層體的基板分離設備 |
TW201609375A (zh) * | 2014-06-13 | 2016-03-16 | Nippon Electric Glass Co | 玻璃膜之製造方法、及含有該玻璃膜的電子元件之製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100579333C (zh) * | 2003-01-23 | 2010-01-06 | 东丽株式会社 | 电路基板用部件、电路基板的制造方法及电路基板的制造装置 |
JP2009046283A (ja) * | 2007-08-22 | 2009-03-05 | Sharp Corp | フィルム剥離工具およびフィルム剥離装置 |
JP5435267B2 (ja) | 2008-10-01 | 2014-03-05 | 日本電気硝子株式会社 | ガラスロール、ガラスロールの製造装置、及びガラスロールの製造方法 |
KR101093517B1 (ko) | 2009-11-04 | 2011-12-14 | 현대자동차주식회사 | 전기자동차용 모터 위치 초기각 오프셋 보정 방법 |
JP5692513B2 (ja) * | 2010-12-22 | 2015-04-01 | 日本電気硝子株式会社 | ガラスフィルム積層体 |
JP5807554B2 (ja) * | 2012-01-19 | 2015-11-10 | 旭硝子株式会社 | 剥離装置、及び電子デバイスの製造方法 |
JP6047439B2 (ja) * | 2013-03-26 | 2016-12-21 | 株式会社Screenホールディングス | 剥離装置および剥離方法 |
CN105359253B (zh) * | 2013-07-01 | 2017-08-25 | 旭硝子株式会社 | 剥离起点制作装置和剥离起点制作方法 |
WO2015012268A1 (ja) | 2013-07-23 | 2015-01-29 | 日本電気硝子株式会社 | ガラスフィルムの製造方法およびガラスフィルムの剥離方法 |
WO2015012261A1 (ja) * | 2013-07-23 | 2015-01-29 | 日本電気硝子株式会社 | ガラスフィルムの製造方法およびガラスフィルムの剥離方法 |
-
2015
- 2015-07-24 JP JP2015146954A patent/JP6519951B2/ja active Active
-
2016
- 2016-07-05 WO PCT/JP2016/069853 patent/WO2017018136A1/ja active Application Filing
- 2016-07-05 KR KR1020187001406A patent/KR102457961B1/ko active IP Right Grant
- 2016-07-05 CN CN201680042722.0A patent/CN107848880B/zh active Active
- 2016-07-14 TW TW105122235A patent/TWI681939B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102171745A (zh) * | 2009-02-06 | 2011-08-31 | 旭硝子株式会社 | 电子器件的制造方法及该方法中使用的剥离装置 |
WO2015041165A1 (ja) * | 2013-09-17 | 2015-03-26 | 日本電気硝子株式会社 | ガラスフィルム剥離装置 |
TW201514110A (zh) * | 2013-09-30 | 2015-04-16 | Nippon Electric Glass Co | 膜狀玻璃的製造方法、電子元件的製造方法及玻璃膜積層體的製造方法 |
TW201604927A (zh) * | 2014-05-03 | 2016-02-01 | 半導體能源研究所股份有限公司 | 疊層體的基板分離設備 |
TW201609375A (zh) * | 2014-06-13 | 2016-03-16 | Nippon Electric Glass Co | 玻璃膜之製造方法、及含有該玻璃膜的電子元件之製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2017024950A (ja) | 2017-02-02 |
TW201718427A (zh) | 2017-06-01 |
JP6519951B2 (ja) | 2019-05-29 |
CN107848880A (zh) | 2018-03-27 |
KR20180032561A (ko) | 2018-03-30 |
WO2017018136A1 (ja) | 2017-02-02 |
KR102457961B1 (ko) | 2022-10-24 |
CN107848880B (zh) | 2020-07-31 |
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