TWI681939B - Method for manufacturing glass film, and method for manufacturing electronic device including glass film - Google Patents

Abstract

When peeling the glass film (2) from the support (1), the first fulcrum (P1) of the support (1) is provided at the corner (4) of the support (1) beyond the glass (2) ), and at a position away from the first fulcrum (P1), a second fulcrum (P2) supporting the laminate (3) is provided. Then, the external force imparting member (18) is provided with an action point of the external force (F) between the first fulcrum (P1) and the second fulcrum (P2), so that a recess (3c) is formed on the support (1) side Method deforms a part of the laminate (3) into a concave shape. Then, while a part of the laminate (3) is deformed into a concave shape, a wedge-shaped member (19) is inserted between the glass film (2) and the support (1), thereby making a part of the glass film (2) Peel off from the support (1).

Description

Method for manufacturing glass film, and method for manufacturing electronic device including glass film

The present invention relates to a method of manufacturing a glass thin film and a method of manufacturing an electronic device including the glass thin film, and particularly to a technique for peeling the glass thin film from the support.

In recent years, from the viewpoint of space saving, flat panel displays such as liquid crystal displays, plasma displays, organic EL displays, and field emission displays have become popular, replacing the previously popular CRT type displays. Then, in such flat panel displays, further thinning is required.

In particular, the organic EL display and the organic EL lighting can be folded or wound with a very small thickness (thin). As a result, it is not only easy to transport, but also can be used in a curved surface state in addition to the previous flat state, so it is expected to be used for various purposes. Therefore, the glass substrate and cover glass used in such electronic devices are required to be further improved in flexibility.

To give flexibility to the glass substrate, make the glass substrate thin Transformation is an effective method. Here, for example, in Patent Document 1, a glass thin film having a thickness of 200 μm or less is proposed, whereby a high degree of flexibility that can be used in a curved state can be given to a glass substrate.

On the other hand, various processing related to the manufacture of various electronic devices is applied to glass substrates used in electronic devices such as flat panel displays and solar cells, which are subjected to secondary processing and washing. However, when thinning the glass substrate used in such electronic devices, because the glass is a brittle material, it may be damaged due to slight stress changes, and there is a problem that the processing is very difficult when processing related to the manufacture of electronic devices . In addition, since the glass film with a thickness of 200 μm or less is flexible, there is also a problem that it is difficult to perform positioning (for example, deviation occurs during patterning) when performing various manufacturing-related processes.

Regarding the aforementioned problems, for example, as shown in Patent Document 2, there is proposed a laminate in which a laminated glass film and a supporting glass supporting the glass film are fixed to each other. When various manufacturing-related treatments are applied to this laminate, even in the case of using a glass film whose monomer lacks strength and rigidity, the supporting glass has a role as a reinforcing material, so it can be easily positioned as a laminate during each treatment . In addition, after the treatment is completed, by peeling the support glass from the glass film, finally only the glass film to which the required treatment is applied can be obtained. Furthermore, by setting the thickness of the laminate containing the glass thin film to be the same as the thickness of the previous (existing) glass substrate, it is expected that the manufacturing line for the previous glass substrate can be used (shared) Advantages as a manufacturing line for electronic devices.

On the other hand, in various manufacturing-related processes, there are also The film forming process and sealing process of the bright conductive film are accompanied by heating. When heat treatment is applied to the laminated structure of the above structure, the fixing force between the support glass and the glass film in a state of direct or indirect contact with the resin layer and the inorganic thin film layer will increase, so it is difficult to peel from the support glass The problem with glass films.

In order to solve the aforementioned problems, for example, in Patent Document 3, it is proposed to support an electronic device with a support adhered from a resin layer having easy peelability fixed to a glass substrate or a supporting glass substrate, to peel off the supporting glass substrate and the resin layer In the case of a support, a method of inserting a blade into the interface between the resin layer of the support and the glass substrate and peeling the support from the electronic device including the glass substrate.

In addition, in order to solve the aforementioned problems, for example, in Patent Document 4, it is proposed that the support glass be laminated from the glass film beyond the ground, and a thin edge portion is provided on the edge of the support glass. At least a part of the edge of the glass film is removed from the thin edge portion. A glass film laminate supporting glass separation.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Application Publication No. 2010-132531

[Patent Literature 2] International Publication No. 2011/048979

[Patent Document 3] Japanese Patent Laid-Open No. 2013-147325

[Patent Document 4] Japanese Unexamined Patent Publication No. 2012-131664

However, as described in Patent Document 3, when the blade is to be inserted between the glass film and the support to start peeling, it is necessary to detect the position of the insertion blade every time and move the blade based on the detection result. Therefore, the necessary institutions will be complicated. In addition, when the glass film and the support are in close contact with each other until the ends, the blade is not inserted into the gap between the interface of the glass film and the support, and the blade needs to be strongly pressed into the interface. When the blade is pressed into the interface in this way, the end of the glass film may be damaged due to the force acting on the glass film.

On the other hand, in Patent Document 4, a thin edge portion is provided at the end of the support glass, and a part of the edge of the glass film is separated from the support glass on the thin edge portion, so that the glass film can be easily held, It is easy to peel off without breaking the glass film. However, in this method, special processing needs to be applied to a part of the supporting glass in advance, and the processing cost will increase. In addition, there are also those who use solvents such as chemical liquids in the manufacturing-related processes of electronic devices. If there is a gap between the glass thin film and the support glass in the state of a laminate, the solvent is immersed and fixed in the gap, and the support When the glass peels off the glass film, there is a problem such as breakage of the glass film, so there is a problem that the applicable range is limited.

In view of the above circumstances, in this specification, the first technical problem to be solved by the present invention is that the glass film can be peeled from the support easily and at low cost regardless of the type of manufacturing-related processing.

In addition, in view of the above, in this specification, the second technical problem to be solved by the present invention is a type that does not depend on manufacturing-related processing. It can easily and inexpensively peel off an electronic device including a glass film from a support.

The solution of the aforementioned first technical problem is achieved by the method for manufacturing a glass film of the present invention. That is, the manufacturing method includes: a laminate forming process in which a glass thin film and a support supporting the glass thin film are stacked in such a manner that the support extends beyond the glass thin film to form a laminate containing the glass thin film; Manufacturing-related processing engineering is to apply manufacturing-related processing to the laminate; and peeling engineering is to peel the glass film from the support after the manufacturing-related processing engineering; its characteristics are: peeling engineering, which includes: peeling starting point manufacturing process, A part of the glass film is peeled off from the support, and a peeling starting point is produced. The peeling starting point is a starting point when peeling off the entire film of the glass film; and a peeling process is carried out by taking the peeling starting point as a starting point, starting from the support. The peeling of the glass film; the manufacturing process of the peeling starting point has: a fulcrum forming process, which is located at the corner of the support beyond the glass film, and the first fulcrum of the support is provided, and at a position away from the first fulcrum, Set up the second fulcrum of the supporting laminate; the concave deformation project is to set the action point of the external force between the first fulcrum and the second fulcrum by using external force to give the member a way to create a recess on the side of the support A part of the laminated body is deformed into a concave shape; and an insertion process is to use an insertion member to be inserted between the glass film and the support while a part of the laminated body is deformed into a concave shape, to peel off a part of the glass film. Furthermore, the so-called "manufacturing-related processing" here includes, of course, direct The processing of applying certain processing also includes the installation of other components and the cleaning of the surface of the glass film, etc., and is used indirectly to the processor of the glass film or the device containing the glass film close to the final product (shipping device).

In the present invention, the first fulcrum is provided at the corner of the support beyond the glass film, and the second fulcrum is provided at a position away from the first fulcrum, and the point of action of the external force is provided between the two fulcrums, so that Since a part of the laminate is deformed into a concave shape, a part of the aforementioned laminate can be deformed with a larger curvature than before. Therefore, the shear force caused by the difference in curvature between the support and the glass film can be increased, and a part of the glass film can be easily peeled from the support in the subsequent insertion process. In addition, a part of the laminated body is deformed into a concave shape by forming a concave portion on the support side. When the concave shape of the laminated body is deformed, a large bending stress (compressive stress) acts on easy formation It is the side of the support that is thicker than the glass film (less restricting the thickness). Therefore, it is possible to avoid the situation where an excessive burden acts on the glass film and the support, and to prevent damage to the glass film and the support. In addition, since a part of the laminate is deformed into a concave shape, the insertion member is inserted between the support and the glass thin film, so that the amount of deformation of the laminate cannot be increased between the insertion members. Therefore, it is possible to avoid the situation where an excessive load acts on the glass film and the support, and to prevent the glass film and the support from being damaged when the peeling starting point is produced.

In addition, the method of manufacturing a glass film of the present invention is such that the support is on the upper side and the glass film is on the lower side, the laminate is placed on the mounting table, and at least the corners of the support are removed from the mounting table If the mounting surface exceeds, it is also possible to use the end of the mounting surface to set the second fulcrum.

When the second fulcrum is provided in this manner, the second fulcrum can be easily provided by simply placing the laminate on the mounting table. In addition, the shape of the second fulcrum can be adjusted only by changing the shape of the end of the placement surface. Therefore, it is relatively easy to control the concave deformation of a part of the above-mentioned laminate.

In addition, the method for manufacturing a glass film of the present invention may use an insertion member and provide a first fulcrum.

Setting the first fulcrum in this way is the same as setting the second fulcrum at the end of the mounting surface, and the first fulcrum can be easily installed. In addition, in the insertion process, the insertion member itself functions as a forming member of the first fulcrum. Therefore, the position of the first fulcrum also shifts in the direction of the peeling along with the movement of the insertion member after the start of insertion. Therefore, keeping the insertion state of the insertion member constant, the forming operation of the peeling starting point portion can be smoothly performed. Of course, the formation member using the insertion member as the first fulcrum can also be connected to the reduction in the number of parts, so it is also preferable from the viewpoint of equipment cost.

In addition, the method for manufacturing a glass film of the present invention uses an adsorption member as an external force imparting member. The adsorption member sucks between the first fulcrum and the second fulcrum from the glass film side to move the adsorption member away from the support Also.

Alternatively, the method for manufacturing a glass film of the present invention may use a pressing member as an external force imparting member, and the pressing member may press the first fulcrum and the second fulcrum from the support side toward the glass film side.

As described above, by adsorbing between the first fulcrum and the second fulcrum, the adsorption member is moved away from the support, or, to The pressing member presses between the first fulcrum and the second fulcrum from the support side to the glass film side, so that the glass film and the support are not overloaded, and the part is suitable for deforming a part of the laminate into a concave shape (for example, the first The intermediate point between the fulcrum and the second fulcrum is set at the point of action of the external force that faces away from the support in the thickness direction of the glass film. Therefore, the concave deformation of the laminate can be stably generated. In particular, after a part of the laminate is adsorbed by the adsorption member, if the adsorption member is moved away from the support (the laminate is stretched by the adsorption member) to become concave, the external force can be avoided It is located in the recessed portion generated on the support side. Therefore, after the insertion of the insertion member is started, the insertion of the insertion member can be smoothly performed until the peeling starting point is formed while avoiding the interference between the insertion member and the external force imparting member while keeping the glass film deformed into a concave state. In addition, a part of the laminate is deformed into a concave shape by forming a concave portion on the support side, and a reaction force (restoring force) to restore the orientation of the flat state before the concave shape will act on the support and the glass film . Therefore, when the glass film side is adsorbed by the suction member, the restoring force generated by the glass film cancels the downward stretching force caused by the suction member, and as a result, the restoring force described above acts only on the support side. Therefore, for example, in a state where the mounting surface supports the laminated body flatly, and a part of the laminated body is deformed into a concave shape, after the insertion of the insertion member between the glass film and the support is started, the insertion member is moved along When the mounting surface is moved in the plane direction, the insertion member can be slid in a direction parallel to the flatly supported portion of the laminate, and the peeling starting point can be produced smoothly.

Moreover, the method of manufacturing the glass film of the present invention is For the insertion member, a wedge-shaped member is used; the angle formed by the insertion direction of the wedge-shaped member and the blade-edge direction of the wedge-shaped member is set to 20° or more and 45° or less, and ideally set to 20° or more and 30° or less, and It is also possible to insert the wedge-shaped member between the glass film and the support.

As described above, when a wedge-shaped member is used as the insertion member, the relationship between the blade shape of the wedge-shaped member and the insertion direction is determined, and the wedge-shaped member can be inserted without excessively burdening the glass film and the support, and the starting point of peeling can be smoothly performed Department's production actions.

In addition, the method for manufacturing a glass film of the present invention sets the shortest distance from the first fulcrum to the second fulcrum to 30 mm or more and 200 mm or less, preferably 30 mm or more and 150 mm or less, more preferably 50 mm Above and below 100mm are also possible. Furthermore, as described above, when the second fulcrum is provided by the end of the mounting surface, when there are plural second fulcrums, the second fulcrum having the shortest distance from the first fulcrum among the plural second fulcrums may be The straight-line distance of the fulcrum is set as "the shortest distance from the first fulcrum to the second fulcrum".

In this way, in a state where the so-called inter-fulcrum distance of the laminated body to be concavely deformed is set, by deforming a part of the laminated body into a concave shape, it is possible to effectively and stably start to insert the glass caused by the member from its corner Film peeling. That is, if the distance between the fulcrums is too long, the peeling start force (recovery force) due to the concave deformation cannot be sufficiently given to the corners, and if the distance between the fulcrums is too short, the excessive force due to the concave deformation Action, leading to increased risk of damage to the glass film.

Moreover, the method of manufacturing the glass film of the present invention is based on the layer While a part of the integrated body is deformed into a concave shape, the maximum depth dimension of the concave portion generated on the support side may be set to 1 mm or more and 5 mm or less, preferably 2 mm or more and 4 mm or less.

In this way, even by setting the degree of concave deformation with respect to a part of the laminate, the peeling of the glass film due to the insertion operation of the insertion member can be effectively and stably started from the corner portion thereof. That is, if the degree of concave deformation is too small (if the maximum depth dimension of the concave portion is small), the peeling start force (restoring force) due to the concave deformation cannot be sufficiently applied to the corner portion, and it is difficult to smoothly insert the insertion member. Or, if the degree of concave deformation is too large (if the maximum depth dimension is large), the glass thin film may be damaged.

In addition, the method for producing a glass film of the present invention may set the moving distance of the insertion member from the beginning of insertion between the glass film and the support to 5 mm or more and 50 mm or less, preferably 10 mm or more and 30 mm or less can.

In this way, even by setting the movement distance from the start of the insertion operation of the insertion member, the insertion member can be inserted without excessively burdening the glass film and the support, and the production operation of the peeling starting point portion can be smoothly performed.

In addition, in the method for manufacturing a glass film of the present invention, the support may be plate glass. In this case, the laminated glass may be formed by directly adhering the plate-shaped glass and the glass thin film.

By using the support as plate glass in this way, a support with excellent surface accuracy can be manufactured at low cost. In addition, the plate-like glass having such excellent surface accuracy and the glass thin film are directly in close contact, allowing one side The glass film is fixed to the support without deviation, and the glass film is surely and safely peeled from the plate-like glass as the support by the present invention.

Moreover, the solution of the aforementioned second technical problem is achieved by the method for manufacturing an electronic device including a glass film of the present invention. That is, the manufacturing method includes: a laminate forming process in which a glass thin film and a support supporting the glass thin film are stacked in such a manner that the support extends beyond the glass thin film to form a laminate containing the glass thin film; Installation process, which is attached to the glass film of the laminate, to install the electronic device elements to form the electronic device with a support; and peeling process, which is to remove the glass film from the support of the electronic device with the support after the installation process Electronic device; characterized by: a peeling process, which includes: a peeling starting point manufacturing process, which is to peel off a part of the glass film from the support, to produce a peeling starting point, which is a starting point when peeling the entire film of the glass film ; And the peeling process, which uses the starting point of peeling as the starting point, to peel off the electronic device from the support; the starting point of the peeling process, including: the formation of the fulcrum, which is attached to the corner of the support beyond the glass film Department, set up a first fulcrum to support the support, and at a position away from the first fulcrum, set up a second fulcrum to support the electronic device; the concave deformation project is to use external force between the first fulcrum and the second fulcrum The member is provided with an action point of an external force, whereby a part of the laminated body is deformed into a concave shape by forming a concave portion on the support side; and the insertion process is to use the period during which a part of the laminated body is deformed into a concave shape The member is inserted between the glass film and the support, and part of the glass film is peeled off.

In this way, after peeling off the support from the electronic device with the support When separating an electronic device containing a glass film, in the present invention, it is also used to provide a first fulcrum at the corner of the support beyond the glass film, and a second fulcrum at a position away from the first fulcrum, and A point of application of an external force is provided between the two fulcrums to deform a part of the laminate into a concave shape. Therefore, a part of the laminate can be deformed with a larger curvature than before. Therefore, the shear force caused by the difference in curvature between the support and the glass film can be increased, and a part of the glass film can be easily peeled from the support in the subsequent insertion process. In addition, a part of the laminated body is deformed into a concave shape by forming a concave portion on the support side. When the concave shape of the laminated body is deformed, a large bending stress (compressive stress) acts on a film that is more easily formed than a glass Thick (less thickness restrictions) side of the support. Therefore, it is possible to avoid the situation where an excessive burden acts on the glass film and the support, and to prevent damage to the glass film and the support. In addition, since a part of the laminate is deformed into a concave shape, the insertion member is inserted between the support and the glass thin film, so that the amount of deformation of the laminate cannot be increased between the insertion members. Therefore, it is possible to avoid the situation where an excessive load acts on the glass film and the support, and to prevent damage to the glass film and the support during the production of the peeling starting point. According to the above, according to the present invention, an electronic device including a glass film and a support can be safely separated without excessively burdening the glass film or the like.

As described above, according to the present invention, the glass thin film can be peeled from the support easily and at low cost regardless of the type of manufacturing-related processing.

Also, as described above, according to the present invention, it is possible The type of the combined treatment makes it easy and low-cost to peel off the electronic device including the glass film from the support.

1‧‧‧Support

1a‧‧‧surface

2‧‧‧glass film

2a‧‧‧surface

2a1‧‧‧End

2b‧‧‧surface

3‧‧‧Layered body

3a‧‧‧Out of area

3c‧‧‧recess

4‧‧‧ Corner

5‧‧‧ organic EL element

6‧‧‧Cover glass

7‧‧‧ organic EL panel

8‧‧‧ Organic EL panel with support

10‧‧‧Stripping device

11‧‧‧Stripping device

12‧‧‧Stripping device

13‧‧‧Stage

14‧‧‧Concave deformation imparting part

15‧‧‧insertion mechanism

16‧‧‧ Placement surface

16a‧‧‧End

17‧‧‧The first fulcrum forming member

18‧‧‧Exterior component

19‧‧‧Wedge-shaped member

19a‧‧‧blade

20‧‧‧Adsorption member

21‧‧‧Lifting member

22‧‧‧Sliding member

23‧‧‧adsorption pad

24‧‧‧Drive Department

25‧‧‧Stripping start device

26‧‧‧Stripping start device

27‧‧‧Extended Support Department

28‧‧‧LCD panel with support

29‧‧‧LCD panel

30‧‧‧ spacer

P1‧‧‧First pivot

P2‧‧‧Second Fulcrum

[Fig. 1] A flowchart showing the sequence of the method for manufacturing an electronic device including a glass film according to the first embodiment of the present invention.

[FIG. 2] A flowchart showing the stripping process shown in FIG. 1 in detail.

[FIG. 3] A flowchart showing the manufacturing process of the peeling starting point shown in FIG. 2 in detail.

[Fig. 4] A cross-sectional view of a laminate including a glass thin film.

[Fig. 5] A plan view of the laminate shown in Fig. 4.

[Fig. 6] A cross-sectional view of an organic EL panel with a support formed by mounting an organic EL element as an element of an electronic device on a laminate formed in Fig. 4.

7 is a plan view of the glass film peeling device according to the first embodiment of the present invention.

[Fig. 8] A-A cross-sectional view of the main part of the peeling starting point producing apparatus shown in Fig. 7.

[Fig. 9] A cross-sectional view of a main part for explaining an example of a manufacturing operation of a peeling starting point portion using the peeling starting point producing apparatus shown in Fig. 7 and showing a state in which the glass film is adsorbed by the suction member.

[FIG. 10] A cross-sectional view of a main part for explaining an example of a manufacturing operation of a peeling starting point using the peeling starting point manufacturing apparatus shown in FIG. Direction of departure Diagram of the state of tension.

[Fig. 11] A cross-sectional view of a main part for explaining an example of a manufacturing operation of a peeling starting point using the peeling starting point manufacturing apparatus shown in Fig. 7 and showing a state in which the insertion operation of the insertion member is started.

[FIG. 12] A cross-sectional view of a main part for explaining an example of a manufacturing operation of a peeling starting point portion using the peeling starting point producing apparatus shown in FIG. 7, and revealing that the insertion member is started, and then the insertion member is moved in a predetermined direction Diagram of the state of movement.

[FIG. 13] A cross-sectional view of a main part for explaining an example of a manufacturing operation of a peeling starting point using the peeling starting point manufacturing apparatus shown in FIG. Figure.

14 is a cross-sectional view of a main part for explaining an example of a peeling operation using the peeling performing device shown in FIG. 7, and a view showing a state where a plurality of adsorption pads are used to adsorb a support.

[Fig. 15] A cross-sectional view of a main part for explaining an example of a peeling operation using the peeling performing device shown in Fig. 7 and showing a state in which the suction pad is raised in order from the peeling starting point side.

[Fig. 16] A cross-sectional view of a main part for explaining an example of a peeling operation using the peeling apparatus shown in Fig. 7 and showing a state where the entire glass film is peeled from the support.

[Fig. 17] A cross-sectional view of a main part of a peeling starting point production device according to a second embodiment of the present invention.

[FIG. 18] A cross-sectional view of a main part for explaining an example of a manufacturing operation of a peeling starting point using the peeling starting point manufacturing apparatus shown in FIG. 17, and reveals A diagram showing a state where the pressing member is lowered and abutted against the support.

[FIG. 19] A cross-sectional view of a main part for explaining an example of the manufacturing operation of the peeling starting point using the peeling starting point manufacturing apparatus shown in FIG. Diagram of the state.

[Fig. 20] A cross-sectional view of a main part for explaining an example of a manufacturing operation of a peeling starting point portion using the peeling starting point producing apparatus shown in Fig. 17 and showing a state in which the insertion operation of the insertion member is started.

[Fig. 21] A plan view of a peeling starting point production device according to a third embodiment of the present invention.

[Fig. 22] A cross-sectional view of a liquid crystal panel with a support when an electronic device that is an application object of the present invention is used to manufacture a liquid crystal panel.

Hereinafter, a first embodiment of the method for manufacturing an electronic device including a glass thin film of the present invention will be described with reference to FIGS. 1 to 16. Furthermore, in this embodiment, when manufacturing an organic EL panel as an electronic device, the organic EL panel in a state where a support is mounted is separated into an organic EL panel and a support by peeling off the glass film and the support As an example, the following description will be given.

A method for manufacturing an electronic device according to an embodiment of the present invention includes, as shown in FIG. 1, a laminate forming process S1 for forming a laminate including a glass thin film, and mounting of an electronic device element on a glass thin film with heating of the glass thin film And the installation process of forming the electronic device with support S2. Peeling process of peeling off the electronic device including the glass film from the support of the electronic device with a support S3.

In addition, as shown in FIG. 2, the peeling process S3 has a peeling starting point manufacturing process S31 that peels off a part of the glass film from the support and becomes a starting point when the entire film of the peeling glass film is made, and a peeling starting point As a starting point, a peeling-off process S32 for peeling off the electronic device from the support is carried out. The peeling-off point manufacturing process S31 is provided at the corner of the support beyond the glass film as shown in FIG. 3 Support the first fulcrum of the support, and at a position away from the first fulcrum, provide a fulcrum forming process S311 to support the second fulcrum of the electronic device, and deform a part of the laminate into a concave shape so that a recess is formed on the support Concave deformation process S312, and the insertion process S313 of inserting the insertion member between the glass film and the support to peel off part of the glass film. Hereinafter, each process will be described in detail.

(S1) Laminate formation process

First, as shown in FIG. 4, a glass thin film 2 is laminated on the support 1 to form a laminate 3.

Here, the glass film 2 is formed of, for example, silicate glass, silicate glass, etc., preferably formed of borosilicate glass, and more preferably formed of alkali-free glass. If the glass film 2 contains an alkaline component, cations may fall off on the surface, and a phenomenon called soda blow may occur. At this time, the glass film 2 has a structurally roughened portion, so the glass film 2 is used in a state of being bent (including concave deformation) In case of 2, there is a risk of damage from the roughened part due to deterioration over the years. For the above reasons, when there is a possibility of using the glass film 2 in an uneven state, it is preferable to form the glass film 2 using alkali-free glass.

In addition, the alkali-free glass here means the glass which does not contain an alkaline component (alkali metal oxide) substantially, specifically, the glass whose alkaline component is 3000 ppm or less. Of course, from the viewpoint of preventing or reducing as much as possible the deterioration over the years due to the above reasons, glass below 1000 ppm is preferable, glass below 500 ppm is more preferable, and glass below 300 ppm is more preferable.

The thickness of the glass film 2 is set to 300 μm or less, preferably 200 μm or less, and more preferably 100 μm or less. The lower limit value of the thickness dimension can be set without particular limitations, but when considering the processing characteristics after molding (when laminated with the support 1 or during peeling, etc.), etc., it is set to 1 μm or more, and ideally set to 5μm or more.

The support 1 is a plate-shaped glass in the present embodiment, and is formed of known glass such as silicate glass, silicate glass, borosilicate glass, and alkali-free glass, similar to the glass thin film 2. However, in the manufacturing process associated with heating of electronic devices (in this embodiment, mounting process S2), from the viewpoint of preventing unnecessary deformation and breakage of the glass film 2 due to the difference in thermal expansion as much as possible, it is 30 The difference between the linear expansion coefficients of the support 1 and the glass film 2 between ℃ and 380°C is within 5×10 ^-7 /°C, and the type of glass is preferably selected. At this time, it is preferable to form the support 1 and the glass thin film 2 with the same kind of glass.

The thickness dimension of the support 1 is not particularly limited as long as the processing characteristics of the glass film 2 can be improved, and can be set to the same level or more as the thickness dimension of the glass film 2. Specifically, the thickness dimension of the support 1 is set to 300 μm or more, and ideally 400 μm or more. The upper limit value of the thickness dimension can be set without particular limitation, but it is preferably limited to a thickness dimension that can withstand bending (concave deformation) of the support 1 described later. Specifically, it is preferably 1000 μm or less, and ideally 700 μm or less. Alternatively, it may be set to 500 μm or less.

In addition, the support 1 and the glass film 2 are formed by a known forming method such as a downdraw method, and it is preferably formed by an overflow downdraw method. In addition, it can also be formed by a float glass process (Float glass process), a slot down draw process (Slot down draw process), a roll out method (Roll out method), an up draw method (Up draw method), etc. In addition, secondary processing may be applied as necessary (redrawing the primary glass forming body), and the thickness may be set to less than 100 μm.

In a state where the laminate 3 is constituted, the support 1 and the glass film 2 are fixed to each other to such a degree that they can be peeled off. Any means can be adopted as the fixing means. In the present embodiment, the plate-like glass and the glass film 2 as the support 1 are directly adhered to each other without passing through an adhesive or the like, thereby realizing mutual fixing.

At this time, the surface roughness Ra of the surface 2a (the lower surface in FIG. 4) of the glass film 2 on the support 1 side is different from the glass thickness of the support 1 The surface roughness Ra of the surface 1a (the upper surface in FIG. 4) of the glass film 2 side is set to 2.0 nm or less. By setting the surface roughness Ra of each surface 1a, 2a to the above-mentioned range, the support 1 and the glass thin film 2 can be laminated in a state where they are fixed to each other (positioning of the laminate 3). Of course, from the viewpoint of improving adhesion, it is preferably 1.0 nm or less, and more preferably 0.2 nm or less.

On the other hand, the surface roughness Ra of the surface 2b on the opposite side of the support 1 of the glass thin film 2 is not particularly limited. However, in the installation process S2 to be described later, it is an electronic device-related process such as film formation. The surface roughness of the target surface is preferably 2.0 nm or less, 1.0 nm or less is better, and 0.2 nm or less is more ideal.

In addition, from the viewpoint of protecting the end of the glass film 2, in the state where the glass film 2 and the support 1 are laminated, the support 1 exceeds the glass film 2 (FIG. 4 ). At this time, the excess amount of the support 1 from the glass thin film 2 is, for example, 0.5 mm or more and 10 mm or less, and preferably 3 mm or more and 5 mm or less. As described above, by reducing the amount of excess of the support 1 even if it is at most 10 mm, the glass thin film 2 with a relatively large area can be efficiently supported on the entire surface.

In the present embodiment, as shown in FIG. 5, both the support 1 and the glass film 2 have a rectangular shape. In addition, on the entire circumference of the laminated body 3 formed by laminating the glass film 2 on the support 1, the support 1 extends beyond the glass film 2, whereby the support 1 is removed from the glass in the corner 4 of the support 1 Film 2 exceeded. In addition, in this embodiment, the shape of the support 1 beyond the glass thin film 2 has been exemplified in all four edges of the laminate 3, but of course, It is possible to adopt a configuration in which the support 1 extends beyond the glass thin film 2 at 3 edges or even 1 edge. At this time, it is preferable that the end surface of the glass film 2 and the end surface of the support 1 coincide with the edge of the side that does not exceed.

In addition, during the formation of the aforementioned laminate 3, the lamination operation may be performed under a reduced pressure. Thereby, the bubbles generated (remaining) between the glass thin film 2 and the support 1 when the glass thin film 2 is laminated on the support 1 can be reduced or disappeared.

(S2) Installation works

As described above, after the laminate 3 including the glass thin film 2 is formed, the laminate 3 is subjected to a manufacturing-related process involving heating of the electronic device, and specifically, the organic EL element 5 as an electronic device element is mounted. As a result, as shown in FIG. 6, the organic EL element 5 is formed on the surface 2 b of the glass thin film 2 that becomes part of the laminate 3 on the side opposite to the support 1. Then, the cover glass 6 is placed on the organic EL element 5 and the periphery of the cover glass 6 is fixed to the glass film 2 to seal the organic EL element 5. With this, the organic EL panel 8 with a support formed in a state where the support 1 is fixed to the organic EL panel 7 as an electronic device.

Here, the thickness dimension of the cover glass 6 is set to, for example, 300 μm or less, preferably 200 μm or less, and more preferably 100 μm or less. In this way, by setting the thickness dimension of the cover glass 6, the cover glass 6 can have appropriate flexibility.

In addition, the mounting state of the organic EL element 5 on the glass film 2 may be arbitrary, for example, on the side opposite to the support 1 of the glass film 2 On the surface 2b, an organic EL element 5 is formed by forming a positive electrode layer, a hole transport layer, a light emitting layer, an electron transport layer, a cathode layer, etc. by a known film forming method such as CVD method and sputtering. Also (detailed illustration omitted). In addition, the means for fixing the cover glass 6 to the glass film 2 may be any. For example, the cover glass 6 may be fixed to the glass film 2 using a known laser sealing technique. At this time, the film forming process by the CVD method, sputtering, or the like corresponds to the manufacturing-related process of the electronic device (organic EL panel 7) accompanying heating. Therefore, as described above, the organic EL element 5 is formed on the surface 2b of the glass thin film 2 opposite to the support 1 to heat the glass thin film 2. Also, due to this heating, a new bond is formed between the glass film 2 and the support 1, and the fixing force of the glass film 2 and the support 1 is more improved than when the laminate is formed (when the laminate 3 is formed) .

In addition, in the form shown in FIG. 6, the cover glass 6 and the glass film 2 are directly fixed, but the cover glass 6 is then fixed to the glass film 2 using well-known glass powder, spacers, etc. (not shown). Also. Alternatively, the support 1 may be provided to the cover glass 6 (not shown), and the present invention may be applied when the cover glass 6 is peeled from the support 1.

(S3) Stripping works

In this manner, after the organic EL panel 8 with a support is formed, the organic EL panel 7 including the glass film 2 is peeled from the support 1 of the organic EL panel 8 with a support (FIG. 1 ). FIG. 7 shows a top view of the peeling device 10 for peeling. The peeling device 10 includes a peeling starting point The manufacturing device 11 and the peeling progressing device 12, the peeling starting point manufacturing device 11 are a mounting table 13 provided with a support-supportable organic EL panel 8, and a part of the laminated body 3 that is a target for concave deformation (In the present embodiment, it is beyond the region 3a) The concave deformation imparting portion 14 and the insertion mechanism 15 that impart the concave deformation. Furthermore, after FIG. 7, illustration of the organic EL element 5 and the cover glass 6 included in the organic EL panel 8 with a support is omitted.

The mounting table 13 is constituted by, for example, a platform, and the flat supporting surface 16 can support the organic EL panel 8 with a support including the laminate 3. In this embodiment, the laminated body is formed in such a manner that the mounting surface 16 is in contact with the surface of the glass film 2, that is, as shown in FIG. 8, with the support 1 becoming the upper side and the glass film 2 being the lower side 3 is placed on the mounting surface 16, whereby the organic EL panel 8 with the support including the laminate 3 can be supported. Therefore, although the illustration is omitted, as in the present embodiment, when the organic EL element 5 and cover glass 6 are mounted on the glass film 2, the mounting surface 16 is shaped to support the organic EL element 5 and cover glass 6 Better. Of course, the mounting surface 16 may support only one or both of the peripheral edges of the glass film 2 (cover glass 6 in this embodiment) and the support 1. In addition, for the peeling process S32 caused by the peeling apparatus 12 described later, suction holes may be provided on the mounting surface 16 of the mounting table 13, and the glass film 2 (organic EL panel 7 including the glass film 2) may be configured. It is adsorbed by the mounting surface 16.

In the present embodiment, the concave deformation imparting portion 14 is based on the placement surface 16 at the angle of the support 1 that extends beyond the placement surface 16 of the laminate 3 The corner portion 4 includes a first fulcrum forming member 17 that supports the first fulcrum P1 of the support 1, and an external force imparting member 18 that imparts an external force to the excess area 3 a of the laminate 3.

In the present embodiment, the placement surface 16 is shaped according to the shape of the laminated body 3 (the organic EL panel 8 with a support) to be supported as a whole, that is, rectangular, and has a shape lacking one corner. With this, in a state where the organic EL panel 8 with a support is placed on the placement surface 16, all regions except the corner portion 4 of the organic EL panel 8 with a support are supported on the placement surface 16, and include A part of the corner portion 4 is in a state of overrun (see the lower left of FIG. 7). Therefore, at this time, the end portion 16a of the corner mounting portion 16 beyond the mounting surface 16 becomes a second fulcrum where the second fulcrum P2 of the organic EL panel 8 with a support is provided at a position away from the first fulcrum P1 Forming member.

The first fulcrum forming member 17 is provided to support the corner portion 4 of the laminate 3 constituting the organic EL panel 8 with a support. In this embodiment, an insertion member (wedge member 19) described later is provided As the first fulcrum forming member 17. In addition, when the support 1 constitutes the laminate 3 in a state where it exceeds the glass thin film 2 (see FIG. 5 ), the first fulcrum forming member 17 is set in the corner portion 4 and can support the support beyond the glass thin film 2. The surface 1a of the body 1 on the glass film 2 side. In other words, the first fulcrum forming member 17 is attached to the corner portion 4 of the support 1, and the first fulcrum P1 of the support 1 is provided.

The external force imparting member 18 is disposed at the first fulcrum P1 formed by the first fulcrum forming member 17 and the second fulcrum forming member Between the second fulcrums P2 formed by the end portion 16a of the placement surface 16. In the present embodiment, the external force imparting member 18 is an adsorption member 20 that can adsorb the surface 2b of the glass film 2 on the opposite side of the support 1 (actually, the surface of the cover glass 6 not shown) and the The member 20 may be constituted by a lifting member 21 that rises and falls along the normal direction of the mounting surface 16, that is, in the thickness direction a of the laminate 3 placed on the mounting surface 16.

The insertion mechanism 15 is a wedge-shaped member 19 as an insertion member in this embodiment, and the wedge-shaped member 19 can be placed in a direction parallel to the mounting surface 16 of the mounting table 13, that is, along the mounting The sliding member 22 that slides in the plane direction of the laminate 3 on the surface 16 is configured. In this embodiment, the wedge-shaped member 19 has conventionally passed the top of the corner 4 of the support 1 and the direction of the virtual center line of the external force imparting member 18 (in other words, the direction along the diagonal of the glass film 2) The sliding structure (refer to Figure 7).

In addition, the angle formed by the blade edge direction c of the wedge-shaped member 19 and the insertion direction b of the wedge-shaped member 19 by the sliding member 22 (hereinafter, also referred to as wedge angle) θ becomes 20° or more and 45° or less It is desirable to set the posture of the wedge-shaped member 19 and the sliding direction of the sliding member 22 so as to be 20° or more and 30° or less.

Next, an example of the manufacturing operation of the peeling starting point using the peeling starting point manufacturing apparatus 11 of the aforementioned structure will be described based on FIGS. 7 to 13.

(S31) Production process of starting point of stripping

First, as shown in FIG. 7 and FIG. 8, the organic EL panel 8 with a support is placed on the mounting surface 16 of the mounting table 13, and a part of the organic EL panel 8 that becomes a support can be supported. The wedge-shaped member 19 as the first fulcrum forming member 17 is arranged at a position of the corner portion 4 beyond the placement surface 16 of the laminate 3 (that is, the corner portion 4 of the support 1 ). As a result, the organic EL panel 8 with the support including the laminate 3 is supported by the placement surface 16 and the wedge-shaped member 19. Specifically, a wedge-shaped member 19 is arranged at a position where the blade edge 19a abuts between the support 1 and the glass film 2 in the top of the corner portion 4, whereby the blade 19a of the wedge-shaped member 19 and the support are arranged The contact point of 1 is the first fulcrum P1, and the contact point of the end portion 16a of the placement surface 16 and the glass film 2 (the cover glass 6 not shown in this embodiment) is the contact point (that is, in this embodiment In the form of a butted line) as the second fulcrum P2, the organic EL panel 8 with a support including the laminate 3 is in a supported state (fulcrum formation process S311). In addition, as described above, in the state where the organic EL panel 8 with a support is supported, the whole organic EL panel 8 with a support is flatly supported in addition to the influence of deformation beyond the region 3a due to its own weight.

At this time, from the support position of the corner portion 4 (that is, the first fulcrum P1) caused by the first fulcrum forming member 17, to the support-attached organic EL panel caused by the end 16a of the mounting surface 16 The shortest distance up to the support position of 8 (that is, the second fulcrum P2) (FIG. 7) is, for example, set to 30 mm or more and 200 mm or less, ideally set to 30 mm or more and 150 mm or less, more preferably set to 50 mm or more and 100 mm the following. Set the shape of the mounting surface 16 as in the example of this figure, and mount In the state of the organic EL panel 8 of the support, from the support position of the support 1 (the first support P1 shown in FIG. 7) by the first support forming member 17 to the end 16 a provided on the mounting surface 16 The linear distance to the second fulcrum P2 (FIG. 7) located in the center of the longitudinal direction of the end portion 16a of the plural second fulcrums P2 is set to 30 mm or more and 200 mm or less as the above-mentioned shortest distance.

Next, with the first fulcrum P1 and the second fulcrum P2 supporting the organic EL panel 8 including the laminate 3 from below, the suction member 20 is raised in the direction of arrow a by the lifting member 21, The suction member 20 is brought into contact with the surface 2b of the glass film 2 (the surface of the cover glass 6 not shown in the present embodiment) located on the lower side of the laminate 3 (FIG. 9 ). Then, from this state, the suction member 20 is attracted to the surface 2b of the glass thin film 2 by suction or the like. In the stage where the glass thin film 2 is adsorbed, the organic EL panel 8 with the support including the laminate 3 is still supported in a flat state.

After the glass thin film 2 is adsorbed in this way, as shown in FIG. 10, the suction member 20 is lowered in the direction of arrow a by the lifting member 21, and the region of the organic EL panel 8 with a support beyond the placement surface 16 is given Lower tensile force F. In other words, between the first fulcrum P1 caused by the first fulcrum forming member 17 (wedge member 19 in this embodiment) and the second fulcrum P2 caused by the end 16a of the mounting surface 16 The point of action of the tensile force F. Thereby, the overhanging region 3a which becomes a part of the laminated body 3 is deformed into a concave shape so that the concave portion 3c is generated on the side of the support 1 (concave deformation process S312). In this embodiment, pairing is used The downward stretching force F is applied to a position beyond the approximate center of the region 3a (FIG. 7), and the excess region 3a is deformed into a concave shape so that a circular concave portion 3c is generated when viewed from the support 1 in a plan view.

In addition, as described above, in the state where the excess area 3a is deformed into a concave shape, the maximum depth dimension d of the concave portion 3c generated on the support 1 side is set to be 1 mm or more and 5 mm or less, and preferably set to 2 mm or more and 4 mm the following. Furthermore, at this time, the maximum concave deformation amount of the region 3a is exceeded (the amount of deformation in the thickness direction a on the surface 1b of the support 1 is changed from the state before the concave deformation to the position closest to the glass film 2 side). For example, it is adjusted by the support position by the mounting surface 16 and the first fulcrum forming member 17, the shape and area of the overrun area 3a, and the amount of drop H1 in the direction of arrow a from the suction position of the suction member 20 to adjust . With the structure of this embodiment, the maximum depth dimension d is approximately equal to the amount of drop H1 of the external force imparting member 18 (adsorption member 20). That is, the descending amount H1 of the suction member 20 is set to be 1 mm or more and 5 mm or less, and preferably set to 2 mm or more and 4 mm or less.

Then, while the excess area 3a that becomes a part of the laminate 3 is deformed into a concave shape, the sliding member 22 is driven to start the movement of the wedge member 19 in the direction of the arrow b to move the wedge member The blade 19a of 19 is inserted between the support 1 and the glass film 2 (here, push-up) located on the top of the corner 4 of the area 3a. As a result, as shown in FIG. 11, the upper surface 2 a of the glass film 2 in close contact with the lower surface 1 a of the support 1 starts to peel off the surface 1 a of the support 1 from its end 2 a 1. Then, from the state shown in Figure 11, drive The sliding member 22 is moved, and the wedge-shaped member 19 is further moved (slided) in the direction of the arrow b to expand the peeling area of the glass film 2 (FIG. 12 ).

At this time, the reaction force (restoring force f1, f2) of the state before the support 1 and the glass thin film 2 are to be restored to the state before being transformed into a concave shape (the state indicated by the two-dotted line in FIG. 12). Therefore, when the suction member 20 adsorbs the glass film 2 side, the restoring force f2 generated by the glass film 2 cancels the downward stretching force F due to the suction member 20, and as a result, the above-mentioned restoring force f1 is substantially only The state acting on the support 1 side. Therefore, by this, the peeling area from the support 1 of the glass film 2 also expands. For example, as shown in FIG. 13, in the stage before the support 1 returns to a concave shape, the support 1 and the glass film Between the two, the peeling starting point 9 which becomes the starting point when the whole film of the glass film 2 is peeled is formed (insertion process S313).

(S32) Stripping off for construction

After the peeling starting point 9 is produced in this way, the support 1 side or the glass film 2 side is grasped with an unillustrated suction pad or the like, by stretching one toward the direction separating from the other, or by drawing a fluid such as water Blowing toward the peeling starting point 9 peels the entire glass film 2 from the support 1.

In this embodiment, for example, as shown in FIGS. 7 and 14, a peeling device 12 having a plurality of suction pads 23 and a drive unit 24 that can be driven in the vertical direction a independently of each suction pad 23 is used to perform the glass film 2. Peel off. Specifically, as shown in FIG. 7, the plural adsorption pads 23 Arranged on the upper side of the support 1, each suction pad 23 is moved downward by the driving section 24, and each suction pad 23 is used to suction the upper surface 1 b of the support 1 (FIG. 14 ). Then, as shown in FIG. 15, by sequentially raising the suction pad 23 from the peeling starting point 9 side, the peeling from the support 1 of the glass film 2 proceeds along its diagonal line. As a result, the glass thin film 2 is completely peeled off from the support 1, and the organic EL panel 8 with a support is separated into the organic EL panel 7 including the glass thin film 2 and the support 1 (FIG. 16 ).

In this way, when the organic EL panel 7 as an electronic device including the glass film 2 is peeled from the support 1 of the organic EL panel 8 with a support, in the present invention, the corner of the support 1 that exceeds the glass film 2 Part 4 is provided at the first fulcrum P1, and at the position away from the first fulcrum P1, a second fulcrum P2 is provided, and an action point of an external force (tensile force F) is provided between the fulcrums P1, P2 of the two sides, As a result, the excess area 3a is deformed into a concave shape. According to this, it is possible to deform the excess region 3a which is a part of the laminate 3 with a larger curvature than before. Therefore, the shear force caused by the difference in curvature between the support 1 and the glass film 2 can be raised, and in the subsequent insertion process S313, a part of the glass film 2 can be easily peeled from the support 1. In addition, a part of the laminated body 3 is deformed into a concave shape so that a concave portion 3c is generated on the support 1 side. When the concave shape of the laminated body 3 is deformed, a large bending stress (compressive stress) acts on the easy formation It is the side of the support 1 that is thicker than the glass film 2 (with less restriction on the thickness dimension). Therefore, it is possible to avoid a situation where an excessive load acts on the glass thin film 2 and the support 1 and prevent damage to the glass thin film 2 and the support 1. In addition, after deforming a part of the laminate 3 into a concave shape, the wedge-shaped member 19 is inserted into the support Between 1 and the glass film 2, the amount of deformation of the laminate 3 can be prevented from increasing between the insertion of the wedge-shaped member 19. Therefore, it is possible to avoid the situation where an excessive load acts on the glass thin film 2 and the support 1, and to prevent the glass thin film 2 and the support 1 from being damaged when the peeling starting point 9 is produced. Based on the above, according to the present invention, the organic EL panel 8 with a support can be safely separated into the organic EL panel 7 including the glass thin film 2 without excessively burdening the glass thin film 2, the organic EL element 5, the support 1, etc. With support 1.

Furthermore, in this embodiment, the first fulcrum P1 is provided by the wedge-shaped member 19, so that when the concave deformation beyond the region 3a starts (FIG. 10), the wedge-shaped member 19 has the first fulcrum forming member as the excess region 3a In addition to the function of 17, in the state of being deformed into a concave shape, the wedge-shaped member 19 has been in a state of contacting between the glass thin film 2 and the support 1 (FIG. 10). Therefore, only by directly moving (moving) the wedge-shaped member 19 in the insertion direction b, the wedge-shaped member 19 can be inserted between the glass film 2 and the support 1, and the peeling starting point 9 can be easily and surely produced. In addition, since the wedge-shaped member 19 itself has the function as the first fulcrum forming member 17, with the insertion operation of the wedge-shaped member 19, the support position of the wedge-shaped member 19 beyond the region 3a, that is, the first fulcrum P1 also shifts The direction of travel to the peeling, that is, the center side along the plane of the laminate 3. Therefore, keeping the insertion state of the wedge-shaped member 19 constant, the production operation of the peeling starting point portion 9 can be smoothly performed.

In particular, at this time, after the excess area 3a of the laminate 3 is adsorbed by the adsorption member 20 from the glass film 2 side, the excess area 3a is utilized When it is stretched downward and deformed into a concave shape, it is possible to avoid the concave portion 3c generated by the external force imparting member 18 continuing to be located on the support 1 side. Therefore, after the insertion of the wedge-shaped member 19 is started, the glass film 2 is deformed into a concave state, while avoiding the interference between the wedge-shaped member 19 and the external force imparting member 18, until the glass film 2 and the support 1 are formed safely The position where the peeling is reliably performed, that is, between the peeling starting point 9 and the wedge-shaped member 19 can be smoothly inserted. In addition, as described above, when the excess region 3a is deformed into a concave shape so that the concave portion 3c is generated on the support 1 side, the restoring forces f1, f2 to restore the orientation of the flat state before the deformation to the concave shape act on the support 1 And glass film 2. Therefore, when the suction member 20 adsorbs the glass film 2 side, the restoring force f2 generated by the glass film 2 cancels the downward stretching force F due to the suction member 20, and as a result, the above-mentioned restoring force f1 is substantially only The state acting on the support 1 side. Therefore, the insertion operation of the wedge-shaped member 19 can be performed more smoothly, and the peeling starting point portion 9 can be produced safely and easily.

In the above, one embodiment (first embodiment) of the manufacturing method of the electronic device including the glass film of the present invention has been described, but of course, the manufacturing method may adopt any form within the scope of the present invention.

FIG. 17 is a cross-sectional view showing the main part of the peeling starting point producing device 25 of the second embodiment of the present invention (a cross-sectional view at the same place as the cross-sectional view of the main part A-A of the peeling device 10 shown in FIG. 7 ). This peeling starting point producing device 25 arranges the suction member 20 and the lifting member 21 above the laminate 3, that is, the support 1 side. The other structures are the same as in the first embodiment, so detailed explanations are omitted.

An example of the manufacturing operation of the peeling starting point 9 (peeling starting point manufacturing process S31) using the peeling starting point producing device 25 of the aforementioned structure is shown in FIGS. 17 to 20.

First, as shown in FIG. 17, the organic EL panel 8 with a support is placed on the mounting surface 16 of the mounting table 13, and the laminate can support a part of the organic EL panel 8 that becomes a support The wedge-shaped member 19 is arranged at the position of the corner portion 4 where the placement surface 16 of 3 exceeds. As a result, the organic EL panel 8 with the support including the laminate 3 is supported by the placement surface 16 and the wedge-shaped member 19. In this embodiment, the blade 19a abuts between the support 1 and the glass film 2 in the top of the corner 4 and the wedge-shaped member 19 is arranged. By this, the blade 19a of the wedge-shaped member 19 is The contact point of the support 4 serves as the first fulcrum P1, and the contact point of the end portion 16a of the mounting surface 16 and the corner portion 4 serves as the second fulcrum P2, and the organic EL panel 8 with the support becomes supported. . In addition, as described above, in a state where the organic EL panel 8 with a support is supported, in addition to the influence of its own weight, the entire organic EL panel 8 with a support is flatly supported.

Next, the suction member 20 is lowered from the position shown in FIG. 16 in the direction of arrow a by the lifting member 21, and as shown in FIG. 18, the suction member 20 is brought into contact with the support 1 located on the upper side of the laminate 3 Surface 1b. Then, from this state, the suction member 20 is then lowered in the direction of arrow a, and the pressing force G downward is applied to the laminate 3. Thereby, as shown in FIG. 19, between the first fulcrum P1 provided by the first fulcrum forming member 17 and the second fulcrum P2 provided by the end 16a of the mounting surface 16, set By setting the point of action of the pressing force G, the excess area 3a is deformed into a concave shape so that the concave portion 3c is generated on the support 1 side.

Then, from the state where the excess area 3a is deformed into a concave shape, the sliding member 22 is driven to start the movement of the wedge member 19 in the direction of the arrow b, and the blade of the wedge member 19 is brought into contact with Between the support 1 located on the top of the corner 4 and the glass film 2 (for example, push-up). As a result, as shown in FIG. 20, the insertion of the wedge member 19 between the support 1 and the glass film 2 is started, and the peeling area from the end 2a1 of the glass film 2 is expanded to a certain extent. The peeling starting point portion 9 shown in FIG. 13 (peeling starting point production process S31).

Then, after the peeling starting point 9 is produced, although not shown in the figure, for example, the support 1 side or the glass film 2 side is grasped by an unillustrated suction pad or the like, and by stretching one toward the direction away from the other, Or, by blowing a fluid such as water toward the peeling starting point 9, the entire glass film 2 is peeled off from the support 1. With this, the organic EL panel 8 with a support is separated into the organic EL panel 7 including the glass thin film 2 and the support 1 (peeling process S32). Of course, at this time, although not shown in the figure, for example, at a position that does not interfere with the suction member 20, a peeling apparatus 12 as shown in FIG. 14 that can suck the support 1 from the upper side is used, and the support 1 is removed from the peeling starting point 9 The side may be stretched upward to peel off the entire glass film 2 from the support 1.

In this way, by pressing in the direction of arrow a, that is, the thickness direction of the laminated body 3 placed on the mounting surface 16 in a flat state, from the support 1 side, downward pressing beyond the region 3a, it is possible and The support 1 causes an excessive burden, and steadily deforms the excess area 3a into a concave shape. Therefore, it is possible to deform the excess area 3a with a larger curvature than before, and it is relatively easy to make the peeling starting point 9 between the support 1 and the glass film 2 using the shearing force due to the difference in curvature as described above .

Furthermore, as in the present embodiment, as long as the pressing force G is applied from the support 1 side, it is not necessary to be limited to the suction member 20. For example, as long as it is a rod-shaped member whose tip is spherical, there is no problem such as damage to the support 1 and the glass thin film 2, and a pressing member of an arbitrary shape and structure may be used.

In addition, the point of action of the external force (tensile force F, pressing force G) has been exemplified in the support position of the organic EL panel 8 with a support (the blade edge of the wedge-shaped member 19) in the corner section 4 in the foregoing embodiment. 19a and the support 1 abutting position), the position of the tensile force F or the pressing force G is provided at the intermediate position of the end portion 16a of the mounting surface 16, but of course it is also possible to provide the action point at other positions . For example, the contact point between the suction member 20 and the support 1 or the glass film 2 is pulled in such a manner that a force is generated at the end of the corner 4 to separate the support 1 and the glass film 2 from each other. The point of action of the extension force F or the pressing force G may be provided closer to the corner 4 than the end 16a.

Moreover, in the foregoing embodiment, the case where the tensile force F or the pressing force G directed downward along the thickness direction a of the laminate 3 is given to the area beyond the region 3a has been exemplified. The external force may be applied to deform the excess area 3a into a concave shape. For example, although not shown in the figure, it is used in the area 3a that is slightly downward from the direction of arrow b The corner of the support 1 may be pressed, and the excess region 3a may be deformed into a concave shape so that a recess 3c is formed on the support 1 side.

Furthermore, in the foregoing embodiment, the case where the one lacking one corner portion is used as the mounting surface 16 has been exemplified, but of course, using the mounting surface 16 having a shape other than that, the support 1 and the glass thin film 2 can also be obtained Peel off. FIG. 21 is a plan view showing an example of a peeling starting point producing device 26 (third embodiment). This peeling starting point production device 26 is an extension support that extends along the edge of the laminate 3 (the organic EL panel 8 with a support) that should be supported from both ends of the end 16a of the placement surface 16 shown in FIG. 7 The portion 27 is provided integrally with the mounting surface 16. According to this structure, while the mounting surface 16 and the wedge-shaped member 19 as the first fulcrum forming member 17 and the extended support portion 27 support the organic EL panel 8 with a support, the mounting surface 16 and the wedge The excess area 3a between the shape member 19 and the extension support portion 27 is deformed into a concave shape. Therefore, it is possible to more easily perform one of the above-described series of operations for producing the peeling starting point 9.

In addition, regarding the first fulcrum forming member 17, in the foregoing embodiment, the case where the first fulcrum forming member 17 is disposed as the wedge-shaped member 19 in the corner portion 4 of the support 1 has been exemplified, but of course, it may be used Outside the structure. For example, although not shown in the figure, the first fulcrum forming member 17 may be provided separately from the wedge-shaped member 19 to support the corner portion within the range where the first fulcrum forming member 17 does not hinder the pressing operation of the wedge-shaped member 19 The area other than the top of 4 makes the wedge-shaped member 19 abut against the top of the corner 4.

In addition, regarding the formation of the second fulcrum P2, the In the embodiment, the case where a plurality of second fulcrums P2 are continuously provided at the end portion 16a of the placement surface 16 has been exemplified, but of course other structures may be adopted. For example, although not shown in the drawings, it is also possible to support the organic EL panel 8 with a support using a support member (roller, etc.) other than the placement surface, and the corner portion 4 of the support 1 is supported by the first fulcrum forming member 17 at At a position away from the first fulcrum P1, a second fulcrum forming member is provided separately from the support member other than the aforementioned mounting surface. According to the above, any member can be used to provide the second fulcrum P2 at any position of the organic EL panel 8 with a support. In addition, the number of the second pivot point P2 is also arbitrary, and one or more second pivot points P2 may be provided.

In addition, regarding the insertion direction of the wedge-shaped member 19, in the foregoing embodiment, the form in which the wedge-shaped member 19 is slid toward the plane direction of the flat body 3 by the sliding member 22 has been exemplified, but Of course, other insertion modes can also be adopted. For example, a structure in which the moving direction of the wedge-shaped member 19 may be changed in accordance with the deformation state (deformation state when peeling progresses) in response to the formation of the region 3a beyond the peeling start point 9 is formed.

Furthermore, in the foregoing embodiment, the case where the peeling starting point creating device 11 and the peeling proceeding device 12 share the mounting table 13 (the mounting surface 16) has been exemplified, but of course, the peeling device 10 is not limited to this example. The peeling starting point producing device 11 and the peeling proceeding device 12 are completely prepared separately, and the organic EL panel 8 with a support once the peeling starting point 9 is produced is placed on the suction surface of the peeling proceeding device 12, and the peeling proceeding process S32 may be performed. .

Moreover, in the foregoing embodiment, it has been exemplified as a support 1. A plate-shaped glass is used, and the support 1 and the glass film 2 are fixed to each other in a direct adhesion manner, but of course, a laminate 3 formed by fixing the glass film 2 and the support 1 by other means can also be used The invention is applicable. For example, the support 1 may be composed of a layer made of a non-glass material such as an acrylic adhesive layer, a siloxane thin film layer, an inorganic thin film layer (ITO, oxide, metal, carbon) and plate glass, and a non-glass layer may be in close contact The present invention is applicable to a laminate (not shown) formed by the material layer and the glass film 2.

In addition, in the above description, the case where the organic EL panel 7 is manufactured as an electronic device has been exemplified, but of course, the present invention can be applied to other methods of manufacturing an electronic device. 22 is a cross-sectional view showing an example of a liquid crystal panel 28 with a support. This panel 28 is formed by fixing a pair of supports 1 and 1 on both sides of a liquid crystal panel 29 as a final product, and is produced as follows, for example. That is, first, a pair of laminated bodies 3 and 3 formed by respectively laminating the support 1 and the glass thin film 2 is formed (laminated body forming process S1). Then, on the surface 2b of the glass film 2 of one of the laminates 3, a spacer 30 is formed to form a space for enclosing liquid crystal (not shown), and the other laminate is fixed to the spacer 30 3 glass film 2 (installation project S2). After the liquid crystal panel with a support 28 is formed in this manner, the support 1 is peeled off one by one using the above-mentioned peeling method (peeling process S3), and one liquid crystal panel with a support 28 is separated into two supports 1, 1. , With 1 LCD panel 29. Therefore, the present invention can be applied even in a state where the liquid crystal panel 29 is manufactured, and the liquid crystal panel 28 with a support can be separated into the support 1 and the liquid crystal panel 29 safely and easily without breaking the glass film 2.

Of course, even when the glass film 2 itself is obtained (manufactured) as the final product, the glass film 2 can be safely and easily peeled off from the support 1 without breaking the glass film 2 by applying the manufacturing method of the glass film of the present invention Glass film 2.

1‧‧‧Support

1a‧‧‧surface

1b‧‧‧surface

2‧‧‧glass film

2a‧‧‧surface

2a1‧‧‧End

2b‧‧‧surface

3‧‧‧Layered body

3a‧‧‧Out of area

3c‧‧‧recess

4‧‧‧ Corner

8‧‧‧ Organic EL panel with support

11‧‧‧Stripping device

13‧‧‧Stage

14‧‧‧Concave deformation imparting part

15‧‧‧insertion mechanism

16‧‧‧ Placement surface

16a‧‧‧End

17‧‧‧The first fulcrum forming member

18‧‧‧Exterior component

19‧‧‧Wedge-shaped member

19a‧‧‧blade

20‧‧‧Adsorption member

21‧‧‧Lifting member

22‧‧‧Sliding member

P1‧‧‧First pivot

P2‧‧‧Second Fulcrum

Claims (11)

A method for manufacturing a glass thin film, comprising: a laminate forming process, in which a glass thin film and a support supporting the glass thin film are stacked such that the support extends beyond the glass thin film to form a layer containing the glass thin film Integrated body; manufacturing-related processing engineering, which applies manufacturing-related processing to the laminate; and peeling engineering, which is to peel off the glass film from the support after the manufacturing-related processing engineering; characterized by: the aforementioned peeling engineering, It includes: a peeling starting point production process, which is to peel off a part of the glass film from the support, to produce a peeling starting point, which is a starting point when peeling the entire film of the glass film; and a peeling process, based on the foregoing The peeling starting point is used as a starting point to peel off the glass film from the support; the peeling starting point manufacturing process includes a fulcrum forming process, which is provided at a corner of the support beyond the glass film Support the first fulcrum of the support, and at a position away from the first fulcrum, set a second fulcrum to support the laminate; the concave deformation project is between the first fulcrum and the second fulcrum, The external force imparting member is provided with a point of action of the external force, whereby a part of the laminated body is deformed in such a manner that a recess is formed on the support side Concave shape; and the insertion process is to use a period in which a part of the laminated body is deformed into a concave shape by inserting an insertion member between the glass film and the support to peel off a part of the glass film. The method for manufacturing a glass thin film as described in item 1 of the patent application range, wherein the laminate is placed on a mounting table such that the support becomes the upper side and the glass thin film becomes the lower side, and the support is made At least a corner portion of the lens extends beyond a mounting surface of the mounting table, and the second fulcrum is provided by an end of the mounting surface. The method for manufacturing a glass film as described in item 1 or 2 of the patent application scope, wherein the first fulcrum is provided by the insertion member. The method for manufacturing a glass film as described in item 1 or 2 of the patent application range, wherein as the external force imparting member, an adsorption member is used, and the first fulcrum and the first Between the two fulcrums, the suction member is moved away from the support. The method for manufacturing a glass film as described in item 1 or 2 of the patent application range, wherein a pressing member is used as the external force imparting member, and the pressing member is pressed from the support side toward the glass film side with the pressing member Between the first fulcrum and the aforementioned second fulcrum. The glass thin as described in item 1 or 2 of the scope of patent application A method for manufacturing a film, wherein a wedge-shaped member is used as the insertion member; an angle formed by an insertion direction of the wedge-shaped member and a blade edge direction of the wedge-shaped member is set to 20° or more and 45° or less, and The wedge-shaped member is inserted between the glass film and the support. The method for manufacturing a glass film as described in the first or second patent application scope, wherein the shortest distance from the first fulcrum to the second fulcrum is set to 30 mm or more and 200 mm or less. The method for manufacturing a glass thin film as described in item 1 or 2 of the patent application scope, wherein the maximum depth of the concave portion generated on the support side during the period when part of the laminated body is deformed into the concave shape The size is set to 1 mm or more and 5 mm or less. The method for manufacturing a glass film as described in item 1 or item 2 of the patent application range, wherein the moving distance of the insertion member from the beginning of insertion between the glass film and the support is set to 5 mm or more and 50 mm or less . The method of manufacturing a glass film as described in the first or second patent application, wherein the support system plate glass is formed by directly adhering the plate glass and the glass film to form the laminate. A method for manufacturing an electronic device containing a glass film, including: The laminate forming process is to laminate the glass film and the support supporting the glass film so that the support extends beyond the glass film to form a laminate including the glass film; the installation process is based on the foregoing The glass thin film of the laminated body is mounted with organic EL elements as elements of an electronic device to form an organic EL panel with a support as an electronic device with a support, or the glass thin film as a component of an electronic device is formed by mounting A spacer for enclosing the space of the liquid crystal to form a liquid crystal panel with a support as the electronic device with a support; and a peeling process after the installation process, from the support of the electronic device with a support , Peeling off the electronic device including the glass film; characterized in that the peeling process includes: a peeling starting point preparation process, which is to peel off a part of the glass film from the support to produce a peeling starting point, the peeling starting point is The starting point when peeling the entire film of the glass film; and the peeling process, which uses the peeling starting point as a starting point, to peel off the electronic device from the support; the peeling starting point manufacturing process, which has: a fulcrum formation The project is to provide a first fulcrum for supporting the support at the corner of the support beyond the glass film, and a second fulcrum for supporting the electronic device at a position away from the first fulcrum; The concave deformation process is to change a part of the laminated body such that a concave portion is generated on the side of the support body by setting an action point of an external force between the first fulcrum and the second fulcrum by using an external force imparting member Forming a concave shape; and inserting a process by using an insertion member inserted between the glass thin film and the support while a part of the laminate is deformed into a concave shape to peel off a part of the glass thin film.

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