CN107848880A - The manufacture method of the manufacture method of glass-film and electronic equipment comprising glass-film - Google Patents

The manufacture method of the manufacture method of glass-film and electronic equipment comprising glass-film Download PDF

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Publication number
CN107848880A
CN107848880A CN201680042722.0A CN201680042722A CN107848880A CN 107848880 A CN107848880 A CN 107848880A CN 201680042722 A CN201680042722 A CN 201680042722A CN 107848880 A CN107848880 A CN 107848880A
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CN
China
Prior art keywords
glass
film
supporting mass
fulcrum
stripping
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Granted
Application number
CN201680042722.0A
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Chinese (zh)
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CN107848880B (en
Inventor
山崎康夫
南贵博
飨场久敏
冈隆雄
藤田崇
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Nippon Electric Glass Co Ltd
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Nippon Electric Glass Co Ltd
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Publication of CN107848880A publication Critical patent/CN107848880A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06—Joining glass to glass by processes other than fusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
    • B32B3/02—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by features of form at particular places, e.g. in edge regions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
    • B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
    • B32B3/28—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer comprising a deformed thin sheet, i.e. the layer having its entire thickness deformed out of the plane, e.g. corrugated, crumpled
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006—Delaminating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2315/00—Other materials containing non-metallic inorganic compounds not provided for in groups B32B2311/00 - B32B2313/04
    • B32B2315/08—Glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Engineering (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Electroluminescent Light Sources (AREA)
  • Laminated Bodies (AREA)

Abstract

When peeling off glass-film (2) from supporting mass (1), the first fulcrum (P1) of supporting supporting mass (1) is set from the corner (4) that glass-film (2) stretches out in supporting mass (1), and the second fulcrum (P2) of supporting stack (3) is set in the position separated with the first fulcrum (P1).And, component (18) is assigned by external force the application point of external force (F) is set between the first fulcrum (P1) and the second fulcrum (P2), so as to make a part for layered product (3) be deformed into concavity in a manner of producing recess (3c) in supporting mass (1) side.Then, by being deformed into concave period in a part for layered product (3), to wedge formation (19) is inserted between glass-film (2) and supporting mass (1), so as to peel off a part for glass-film (2) from supporting mass (1).

Description

The manufacture method of the manufacture method of glass-film and electronic equipment comprising glass-film
Technical field
The manufacture method of electronic equipment the present invention relates to the manufacture method of glass-film and comprising glass-film, more particularly to For peeling off the technology of glass-film from supporting mass.
Background technology
In recent years, from the viewpoint of space saving, instead of the CRT escopes popularized in the past, liquid crystal display, etc. from The flat-panel monitors such as daughter display, organic el display, Field Emission Display are gradually popularized.Also, these flat-panel monitors Seek further to be thinned.
Particularly, in organic el display, organic EL illuminating, using the situation of its thickness very small (thin), from And such function can be folded or wind by making it have.Thus, it is not only convenient for carrying, and in addition to conventional flat state The use under curved surface state can also be realized, it is therefore contemplated that being flexibly applied to various purposes.Therefore, these electronic equipments Used glass substrate, cloche also require flexible further raising.
Flexible in order to be assigned to glass substrate, it is effective to make glass substrate thin-walled property.Here, for example in patent document 1 In, it is proposed that thickness is less than 200 μm of glass-film, and thereby, it is possible to glass substrate is assigned to realize curved surface state Under the high flexibility of the degree used.
On the other hand, secondary add is implemented to glass substrate used in the electronic equipments such as flat-panel monitor, solar cell The various electronic equipment manufacturing relevant treatments such as work, cleaning.However, working as makes glass substrate used in these electronic equipments During thin-walled property, because glass is fragile material, therefore the stress variation produced even slightly also results in the situation of breakage, When carrying out electronic equipment manufacturing relevant treatment, the problem of operation is extremely difficult such be present.In addition, thickness be 200 μm with Under glass-film rich in flexible, therefore also exist and positioning is difficult to when implementing various manufacture relevant treatments (such as is carrying out During patterning produce skew) it is such the problem of.
On above mentioned problem, such as shown in patent document 2, it is proposed that by the supporting glass of glass-film and the supporting glass-film The layered product that glass is laminated and interfixed.If implementing various manufacture relevant treatments to the layered product, exist even in use In the case of lacking intensity, rigid glass-film in the case of monomer, supporting glass also serves as reinforcement material and played a role, because This can easily be positioned when carrying out each processing as layered product.In addition, after processing terminates, by the way that glass will be supported Glass is peeled off from glass-film, finally only can obtain implementing the glass-film of required processing.It is further illustrated, by that will wrap The thickness of layered product containing glass-film is set to identical with the thickness of the glass substrate of (existing) in the past, and can expect can The advantages of production line of conventional glass substrate is made into electronic equipment production line with (shared).
On the other hand, in various manufacture relevant treatments, there is also the film process of transparent conducting film, encapsulation process etc. With the processing of heating.To the layered product of said structure implement with heating processing in the case of, in directly or Person be close to indirectly via resin bed, inorganic thin film layer etc. in the state of supporting glass and glass-film fixed force increase, Therefore produce and be difficult to peel off the problem of glass-film is such from supporting glass.
In order to solve the above problems, such as following method is proposed in patent document 3：It is being close to from glass substrate There is the electronic equipment with supporting mass for being fixed on support glass substrate and the resin bed with release performance to peel off by supporting glass During the supporting mass that substrate and resin bed are formed, the interface insertion cutter of resin bed and glass substrate to supporting mass, thus from Electronic equipment comprising glass substrate peels off supporting mass.
In addition, in order to solve the above problems, such as following glass film laminate is proposed in patent document 4：Supporting Glass is laminated in a manner of being stretched out from glass-film, the end edge of supporting glass is provided with thinner wall section, the end edge of glass-film is at least A part separates in thinner wall section with supporting glass.
Citation
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2010-132531 publications
Patent document 2：International Publication 2011/048979
Patent document 3：Japanese Unexamined Patent Publication 2013-147325 publications
Patent document 4：Japanese Unexamined Patent Publication 2012-131664 publications
The content of the invention
The invention problem to be solved
However, as described in patent document 3, it is desirable to by being opened to cutter is inserted between glass-film and supporting mass Begin in the case of peeling off, it is necessary to check the position of insertion cutter every time, and cutter is moved according to testing result.Therefore, institute The mechanism needed complicates.In addition, in glass-film and supporting mass in the case of until being mutually close in the range of its end, in glass The gap of insertion cutter is not present, it is necessary to which cutter is pressed into interface with stronger power in the interface of glass film and supporting mass.Like this , may be because causing the end of glass-film damaged acting on the pressing-in force of glass-film in the case that cutter is pressed into interface.
On the other hand, in patent document 4, there is a thinner wall section in the end set of supporting glass, the one of the end edge of glass-film Part separates in the thinner wall section with supporting glass, it is taken as that glass-film can easily be held, can not make glass Relatively easily peeled off in the case of film breakage.However, according to this method, then need real to a part for supporting glass in advance Special processing is applied, processing cost improves.In addition, decoction equal solvent is used in the manufacture relevant treatment of electronic equipment sometimes, If there are gap between glass-film and supporting glass in the state of layered product, presence is because solvent enters the gap and consolidates , the problems such as damaged, therefore the model that presence can apply occurs so as to there is the glass-film when peeling off glass-film from supporting glass It is with the problem of limit is such.
In view of the foregoing, in this manual, by the independently simple and low cost with the species of manufacture relevant treatment Glass-film is peeled off as the first technical task to be solved by this invention from supporting mass in ground.
In addition, in view of the foregoing, in this manual, will be independently simple and low with the species of manufacture relevant treatment The electronic equipment comprising glass-film is peeled off as the second technical task to be solved by this invention into local from supporting mass.
Means for solving the problems
The solution of first technical task is realized by the manufacture method of glass-film involved in the present invention.That is, should Manufacture method is related to a kind of manufacture method of glass-film, and it possesses：Layered product formation process, in the layered product formation process, The supporting mass of glass-film and supporting glass film is laminated in a manner of supporting mass stretches out from glass-film, so as to be formed comprising glass-film Layered product；Relevant treatment process is manufactured, in the manufacture relevant treatment process, implements manufacture relevant treatment to layered product；With And stripping process, after relevant treatment process is manufactured, in the stripping process, glass-film is peeled off from supporting mass, glass-film Manufacture method is characterised by that stripping process has：Stripping starting point portion production process, in the stripping starting point portion production process, A part for glass-film is peeled off from supporting mass, to make the stripping for turning into the starting point when peeling off glass-film on the whole face of glass-film Starting point portion；Process is promoted with peeling off, in the stripping promotes process, glass-film is promoted using stripping starting point portion as starting point from supporting Body is peeled off, and stripping starting point portion production process has：Fulcrum formation process, in the fulcrum formation process, in supporting mass from glass The corner that glass film stretches out sets the first fulcrum of supporting supporting mass, and sets supporting course in the position separated with the first fulcrum Second fulcrum of stack；Concavity deform process, the concavity deform process in, between the first fulcrum and the second fulcrum set by External force assigns the application point for the external force that component is acted on, and thus makes the one of layered product in a manner of producing recess on supporting side Part is deformed into concavity；And insertion process, in the insertion process, concave period is deformed into a part for layered product, To insertion insertion component between glass-film and supporting mass, so as to peel off a part for glass-film.It is it should be noted that referred to herein " manufacture relevant treatment " include the processing for directly implementing certain processing to glass-film certainly, also include the peaces of other components extensively Dress, the cleaning etc. on glass-film surface, for making glass-film or equipment comprising glass-film (be dispatched from the factory close to final products indirectly State) processing.
In the present invention, by setting the first fulcrum in the corner of the supporting mass stretched out from glass-film, and with first The position that fulcrum separates sets the second fulcrum, and the application point of external force is set between the fulcrum of above-mentioned both sides, so that layer A part for stack is deformed into concavity, therefore can make a part for above-mentioned layered product with curvature defomation big than ever.Thus, Can improve because of the different of the curvature between supporting mass and glass-film and caused by shearing force, in insertion process afterwards, energy Enough parts that glass-film is easily peeled off from supporting mass.In addition, making stacking in a manner of producing recess on supporting side A part for body is deformed into concavity, so as in the deformation of the concavity of layered product, be formed as easily than glass-film heavy wall (thickness gauge Very little limitation is lacked) supporting side effect have larger bending stress (compression stress).Thereby, it is possible to avoid glass-film and supporting Effect has the situation of excessive load on body, so as to prevent the breakage of glass-film and supporting mass.In addition, make one of layered product Divide after being deformed into concavity and insert insertion component between supporting mass and glass-film, therefore do not increase during inserted with insertion component The deflection of big layered product also has no problem.Therefore, effect on glass-film and supporting mass thus can be also avoided to have excessive bear The situation of lotus, so as to prevent that glass-film and supporting mass are damaged when making stripping starting point portion.
In addition, in the manufacture method of glass-film involved in the present invention, or, upside is in supporting mass and glass Layered product is placed in mounting table by the mode that glass film is in downside, and at least corner of supporting mass is stretched from the mounting surface of mounting table Go out, utilize the fulcrum of end set second of mounting surface.
If setting the second fulcrum like this, only by the way that layered product is placed in into mounting table, just can be easy to set up Two fulcrums.In addition, only by changing the end shape of mounting surface, the form of the second fulcrum just can be adjusted.Therefore, it is possible to compare The concavity of a part for above-mentioned layered product is easily controlled to deform.
In addition, in the manufacture method of glass-film involved in the present invention, or, set first using component is inserted Fulcrum.
It is same with the situation of the fulcrum of end set second by mounting surface if setting the first fulcrum like this, can It is easy to set up the first fulcrum.In addition, in process is inserted, insertion component is sent out itself as the formation component of the first fulcrum Function is waved, therefore with the movement for inserting the insertion component after starting, the position of the first fulcrum is also along the direction of propulsion row peeled off Enter.Thereby, it is possible to which the inserted mode for inserting component is remained into constant state, so as to swimmingly carry out the shape in stripping starting point portion Into action.Certainly, by by insert component double as the first fulcrum formation component, so as to contribute to the reduction of number of components, Therefore in terms of equipment cost it is also preferred that.
In addition, in the manufacture method of glass-film involved in the present invention, or, assign component as external force and make With adsorption element, by adsorption element from glass-film side to being adsorbed between the first fulcrum and the second fulcrum, and make adsorption element Moved to the direction away from supporting mass.
Or in the manufacture method of glass-film involved in the present invention, or, assign component as external force and make With pressing member, by pressing member from supporting side towards glass-film side to being pressed between the first fulcrum and the second fulcrum.
By as described above to making adsorption element after being adsorbed between the first fulcrum and the second fulcrum to away from branch Hold body direction movement, or, by pressing member from supporting side towards glass-film side to the first fulcrum and the second fulcrum Between pressed, can be in the part suitable for making layered product so as to which excessive load will not be applied to glass-film, supporting mass Concave position (for example, intermediate location of the first fulcrum and the second fulcrum) is deformed into, is arranged on the thickness direction of glass-film The application point of the external force in the direction away from supporting mass.Therefore, it is possible to stably produce the deformation of the concavity of layered product.Particularly, if After being adsorbed by adsorption element to a part for layered product, by making the adsorption element be moved to the direction away from supporting mass Dynamic (pulling layered product by adsorption element) is morphed into concavity, then external force can be avoided to assign component and continued to stay in propping up Hold the situation in recess caused by side.Therefore, it is possible to which after the insertion of insertion component starts, glass-film keeps being deformed into concavity State, and avoid inserting the situation that component and external force assign component interference simultaneously, so as to until forming stripping starting point portion and being During only, insertion component is swimmingly inserted.In addition, making the one of layered product in a manner of producing recess on supporting side Part is deformed into concavity, so as to which effect has the flat state that return to before being deformed into concavity on supporting mass and glass-film The reaction force (recuperability) of direction.Therefore, in the case where being adsorbed using adsorption element to glass-film side, in glass-film Caused recuperability is offset by the pulling force as caused by adsorption element downward, as a result, as only in supporting side work With the state for having above-mentioned recuperability.Thus, such as mounting surface flatly supporting stack, and make the one of layered product is being passed through Part is deformed into the state of concavity, is being started to after insertion insertion component between glass-film and supporting mass, is being made insertion component edge The in-plane movement of mounting surface, in this case, insertion component can be made flatly to be supported along with layered product The parallel direction in position is slided, and can swimmingly carry out the making action in stripping starting point portion.
In addition, in the manufacture method of glass-film involved in the present invention, or, use wedge as insertion component Shape component, by angle formed by the blade tip direction of the direction of insertion of wedge formation and wedge formation be set as more than 20 ° and 45 ° with Under, more than 20 ° and less than 30 ° are preferably set to, wedge formation is inserted between glass-film and supporting mass.
In the case where using wedge formation as insertion component as described above, by the blade tip for determining wedge formation The relation of shape and direction of insertion, wedge-like structure can be inserted in the case where not applying excessive load to glass-film and supporting mass Part, so as to swimmingly carry out the making action in stripping starting point portion.
, can be by from the first fulcrum to the second fulcrum in addition, in the manufacture method of glass-film involved in the present invention Beeline is set as more than 30mm and below 200mm, is preferably set to more than 30mm and below 150mm, is more preferably set as More than 50mm and below 100mm.It should be noted that in the feelings for the fulcrum of end set second for utilizing mounting surface as described above Condition etc., in the case of multiple second fulcrums being present, by most short second of the distance away from the first fulcrum in multiple second fulcrums Point is handled with the air line distance of the first fulcrum as " from the first fulcrum to the beeline of the second fulcrum ".
So, by set as concavity deform object layered product so-called distance between the fulcrum in the state of, A part for layered product is deformed into concavity, can be carried out since the corner of the layered product is efficiently and stably by insertion component Glass-film stripping.That is, because, if distance between the fulcrum is long, can not diagonal section fully assign because concavity deform produce Raw stripping starts power (recuperability), if distance between the fulcrum is too short in addition, because of concavity deformation, acting on excessive power causes The damaged possibility rise of glass-film.
In addition, in the manufacture method of glass-film involved in the present invention, will can be deformed into a part for layered product Concave period, more than 1mm and below 5mm are dimensioned so as in the depth capacity of recess caused by supporting side, is preferably set For more than 2mm and below 4mm.
So, the degree deformed by the concavity set for a part for layered product, also can be from the angle of the layered product Portion efficiently and stably starts the stripping of the glass-film by the insert action progress of insertion component.That is, because：If concavity becomes The degree of shape is too small (depth capacity of recess is undersized), then can not diagonal section fully assign because concavity deformation caused by stripping Leave beginning power (recuperability), it is difficult to swimmingly insert insertion component.Or because：If the degree of concavity deformation is excessive (depth capacity is oversized), then it may cause the breakage of glass-film.
In addition, in the manufacture method of glass-film involved in the present invention, can be by insertion component from starting to glass-film The displacement inserted between supporting mass is set to more than 5mm and below 50mm, is preferably set to more than 10mm and below 30mm.
So, by setting displacement of the insertion component from being initially inserted into action, also can not to glass-film and Supporting mass applies insertion insertion component in the case of excessive load, so as to swimmingly carry out the making action in stripping starting point portion.
In addition, in the manufacture method of glass-film involved in the present invention, or, supporting mass is plate glass.Separately Outside, in this case, or, by making plate glass and glass-film abut directly on to form layered product.
By the way that supporting mass is set into plate glass like this, the excellent supporting mass of face precision can be manufactured at low cost.Separately Outside, by making precision excellent plate glass in face be abutted directly on glass-film like this, it is inclined can glass-film to that position do not occur Move ground and be fixed on supporting mass, and simultaneously can be by the present invention reliably and safely by glass-film from the tabular glass for being used as supporting mass Glass is peeled off.
In addition, the system that the solution of second technical task passes through the electronic equipment comprising glass-film involved in the present invention Method is made to realize.That is, the manufacture method is related to the manufacture method of a kind of electronic equipment, and it possesses：Layered product formation process, In the layered product formation process, by the supporting mass of glass-film and supporting glass film by supporting mass from glass-film stretch out in a manner of layer It is folded, so as to form the layered product comprising glass-film；Installation procedure, in the installation procedure, electricity is installed to the glass-film of layered product Sub- equipment component and form the electronic equipment with supporting mass；And stripping process, after installation procedure, in the stripping process In, the electronic equipment for including glass-film, the electronic equipment comprising glass-film are peeled off from the supporting mass of the electronic equipment with supporting mass Manufacture method be characterised by that stripping process has：Stripping starting point portion production process, in the stripping starting point portion production process In, from a part for supporting mass stripping glass-film, to make as the starting point when peeling off glass-film on the whole face of glass-film Stripping starting point portion；Process is promoted with peeling off, in the stripping promotes process, electronic equipment is promoted using stripping starting point portion as starting point Peeled off from supporting mass, stripping starting point portion production process has：Fulcrum formation process, in the fulcrum formation process, in supporting mass The first fulcrum that supporting supporting mass is set from the corner that glass-film stretches out, and set in the position that is separated with the first fulcrum Second fulcrum of supporting electronic equipment；Concavity deforms process, in the concavity deforms process, the first fulcrum and the second fulcrum it Between set and assign the application point of external force that component acted on by external force, thus make layer in a manner of producing recess on supporting side A part for stack is deformed into concavity；And insertion process, in the insertion process, concavity is deformed into a part for layered product During, to insertion insertion component between glass-film and supporting mass, so as to peel off a part for glass-film.
So, when peeling off the electronic equipment comprising glass-film from the supporting mass of the electronic equipment with supporting mass, in this hair In bright, the first fulcrum also is set in the corner of the supporting mass stretched out from glass-film, and in the position separated with the first fulcrum Second fulcrum is set, and the application point of external force is set between the fulcrum of above-mentioned both sides, so that the part deformation of layered product For concavity, therefore a part for above-mentioned layered product can be made with curvature defomation big than ever.Thereby, it is possible to improve because of supporting mass The different and caused shearing forces of curvature between glass-film, can be easily from supporting mass in insertion process afterwards Peel off a part for glass-film.In addition, being deformed into a part for layered product in a manner of producing recess on supporting side Concavity, so as in the deformation of the concavity of layered product, easily be formed as the branch than glass-film heavy wall (limitation of thickness is few) Holding side effect has larger bending stress (compression stress).It is excessive thereby, it is possible to avoid on glass-film and supporting mass effect from having Load situation, so as to prevent the breakage of glass-film and supporting mass.In addition, after the part for making layered product is deformed into concavity Insertion component is inserted between supporting mass and glass-film, therefore does not increase the deformation of layered product during inserted with insertion component Amount also has no problem.Therefore, effect on glass-film and supporting mass thus can be also avoided to have the situation of excessive load, so as to prevent Only when making stripping starting point portion, glass-film and supporting mass are damaged.Thus, in accordance with the invention it is possible to not apply to glass-film etc. The electronic equipment comprising glass-film is securely isolated from supporting mass in the case of excessive load.
Invention effect
As described above, in accordance with the invention it is possible to and low cost independently simple with the species of manufacture relevant treatment Glass-film is peeled off from supporting mass in ground.
In addition, as described above, in accordance with the invention it is possible to independently simple and low with the species of manufacture relevant treatment The electronic equipment for including glass-film is peeled off into local from supporting mass.
Brief description of the drawings
Fig. 1 is the manufacture method for showing the electronic equipment comprising glass-film involved by the first embodiment of the present invention The flow chart of step.
Fig. 2 is the flow chart for the details for showing the stripping process shown in Fig. 1.
Fig. 3 is the flow chart for the details for showing the stripping starting point portion production process shown in Fig. 2.
Fig. 4 is the sectional view of the layered product comprising glass-film.
Fig. 5 is the top view of the layered product shown in Fig. 4.
Fig. 6 is the band supporting mass formed in the layered product installation shown in Fig. 4 as the organic EL element of electronic equipment part Organic EL panel sectional view.
Fig. 7 is the top view of the stripping off device of the glass-film involved by the first embodiment of the present invention.
Fig. 8 is the A-A main portion sectional views of the stripping starting point portion producing device shown in Fig. 7.
Fig. 9 is for being acted to the making for having used the stripping starting point portion of the stripping starting point portion producing device shown in Fig. 7 One main portion sectional view illustrated, and be the state for showing to adsorb glass-film using adsorption element Figure.
Figure 10 is for being acted to the making for having used the stripping starting point portion of the stripping starting point portion producing device shown in Fig. 7 One main portion sectional view illustrated, and be to show to make adsorption element decline and pull to the direction away from supporting mass The figure of the state of a part for layered product.
Figure 11 is for being acted to the making for having used the stripping starting point portion of the stripping starting point portion producing device shown in Fig. 7 One main portion sectional view illustrated, and be the figure for showing the state that the insert action for inserting component has started.
Figure 12 is for being acted to the making for having used the stripping starting point portion of the stripping starting point portion producing device shown in Fig. 7 One main portion sectional view illustrated, and be after showing that the insert action for inserting component starts, to make the insertion component The figure for the state that the direction as defined in moves.
Figure 13 is for being acted to the making for having used the stripping starting point portion of the stripping starting point portion producing device shown in Fig. 7 One main portion sectional view illustrated, and be to show to make stripping starting point portion by the insert action for inserting component The figure of state.
Figure 14 is for being illustrated to one that has used the stripping propulsion of the stripping propulsion plant shown in Fig. 7 to act Main portion sectional view, and be the figure of state for showing to adsorb supporting mass by multiple absorption layers.
Figure 15 is for being illustrated to one that has used the stripping propulsion of the stripping propulsion plant shown in Fig. 7 to act Main portion sectional view, and be the figure for the state for representing to make absorption layer from stripping starting point portion side successively increase.
Figure 16 is for being illustrated to one that has used the stripping propulsion of the stripping propulsion plant shown in Fig. 7 to act Main portion sectional view, and be the figure of state for showing to have peeled off glass-film from supporting mass on its whole face.
Figure 17 is the main portion sectional view of the stripping starting point portion producing device involved by second embodiment of the present invention.
Figure 18 is the making action for the stripping starting point portion to having used the stripping starting point portion producing device shown in Figure 17 A main portion sectional view illustrated, and be the state for representing to make pressing member to decline and being abutted with supporting mass Figure.
Figure 19 is the making action for the stripping starting point portion to having used the stripping starting point portion producing device shown in Figure 17 A main portion sectional view illustrated, and be to show to make pressing member further from the state abutted with supporting mass The figure of the state of decline.
Figure 20 is the making action for the stripping starting point portion to having used the stripping starting point portion producing device shown in Figure 17 A main portion sectional view illustrated, and be to show to insert the figure of state that the insert action of component has started.
Figure 21 is the top view of the stripping starting point portion producing device involved by third embodiment of the present invention.
Figure 22 is the liquid crystal with supporting mass as the application i.e. electronic equipment of the present invention and when manufacturing liquid crystal panel The sectional view of panel.
Embodiment
Hereinafter, 1~Figure 16 of reference picture to the manufacture method of the electronic equipment comprising glass-film involved in the present invention One embodiment illustrates.It should be noted that in the present embodiment, illustrated by taking following situation as an example：Making During affected organic EL panel for electronic equipment, by the stripping of glass-film and supporting mass, by having for the state with supporting mass Machine EL panels are separated into organic EL panel and supporting mass.
As shown in figure 1, the manufacture method of the electronic equipment involved by one embodiment of the present invention possesses：Layered product is formed Process S1, in layered product formation process S1, form the layered product for including glass-film；Installation procedure S2, in the installation procedure In S2, electronic equipment part is installed to glass-film with the heating to glass-film, to form the electronic equipment with supporting mass； And stripping process S3, in stripping process S3, peeled off from the supporting mass of the electronic equipment with supporting mass comprising glass-film Electronic equipment.
In addition, as shown in Fig. 2 stripping process S3 has：Stripping starting point portion production process S31, in the stripping starting point portion system Make in process S31, a part for glass-film is peeled off from supporting mass, turn into make when peeling off glass-film on the whole face of glass-film Starting point stripping starting point portion；Promote process S32 with peeling off, in the stripping promotes process S32, using stripping starting point portion as Point propulsion electronic equipment is peeled off from supporting mass, wherein, as shown in figure 3, stripping starting point portion production process S31 has：Fulcrum is formed Process S311, in fulcrum formation process S311, supporting supporting mass is set from the corner that glass-film stretches out in supporting mass First fulcrum, and in the second fulcrum that supporting electronic equipment is set from the position that the first fulcrum separates；Concavity deforms process S312, in concavity deformation process S312, it is deformed into a part for layered product in a manner of producing recess on supporting side Concavity；And insertion process S313, in insertion process S313, by inserting structure to insertion between glass-film and supporting mass Part, so as to peel off a part for glass-film.Hereinafter, each operation is described in detail.
(S1) layered product formation process
First, as shown in figure 4, on supporting mass 1 laminated glass film 2 and form layered product 3.
Here, glass-film 2 is formed such as silicate glass, silica glass, preferably by pyrex shape Into more preferably being formed by alkali-free glass.If contain alkali composition in glass-film 2, it is likely that the de- of cation occurs on surface Fall, occur it is so-called go out alkali (Japanese：The ダ of ソ mono- blow I) phenomenon.In this case, produced in glass-film 2 in configuration aspects , may if using the glass-film 2 in the state of the glass-film 2 is bent (including concavity deformation) as coarse part Due to aging to cause breakage as starting point as coarse part.The reasons why based on the above, made existing with non-flat forms state In the case of possibility with glass-film 2, glass-film 2 is preferably formed by alkali-free glass.
It should be noted that alkali-free glass mentioned here refers to containing substantially no alkali composition (alkali metal oxide) Glass, specifically, refer to alkali composition be below 3000ppm glass.Certainly, from even it is micro because it is above-mentioned the reasons why From the viewpoint of caused aging also will be prevented or mitigated to it, preferably below 1000ppm glass, more preferably The glass of below 500ppm glass, more preferably below 300ppm.
The thickness of glass-film 2 is set as less than 300 μm, is more preferably set as less than 200 μm, further preferably setting For less than 100 μm.It can be set for the lower limit of thickness without not special limitation, but in view of the treatability after shaping (when being laminated relative to supporting mass 1 or when peeling off etc.) etc. and be set as more than 1 μm, be preferably set to more than 5 μm.
Supporting mass 1 is plate glass in the present embodiment, with glass-film 2 equally by silicate glass, silica glass Glass known to glass, pyrex, alkali-free glass etc. is formed.But the manufacture in the electronic equipment with heating is related Handle in (being in the present embodiment installation procedure S2), need not from prevent the glass-film 2 caused by the difference of thermal expansion as far as possible That wants deforms, from the viewpoint of breakage, preferably with the supporting mass 1 in 30 DEG C~380 DEG C of section and the linear expansion coefficient of glass-film 2 Difference be 5 × 10-7/ DEG C within mode select the species of glass.In such a situation it is preferred that branch is formed by the glass of identical type Hold body 1 and glass-film 2.
As long as the treatability that the thickness of supporting mass 1 can improve glass-film 2 is then not particularly limited, it is set as and glass It is more than the thickness identical level of glass film 2 or the thickness of glass-film 2.Specifically, the thickness of supporting mass 1 It is set as more than 300 μm, is preferably set to more than 400 μm.It can be set with no particular limitation for the higher limit of thickness, But it is preferably limited to bear the thickness of the degree of the bending (concavity deformation) of supporting mass 1 described later.Specifically, can be with It is set as less than 1000 μm, is preferably set to less than 700 μm.Or less than 500 μm can also be set as.
In addition, these supporting masses 1 and glass-film 2 are shaped by manufacturing process known to glass tube down-drawing etc., preferably pass through overflow Glass tube down-drawing shapes.Alternatively, it is also possible to be shaped by floating method, slot draw method, rolling process, pulling method etc..It should be noted that Secondary operation (being stretched by drawing again to the once-forming body of glass) can also be implemented as needed, so as to be set smaller than 100 μm of thickness.
In the state of layered product 3 is formed, supporting mass 1 and glass-film 2 are fixed as the degree that can mutually peel off.As solid Arbitrary means can be used by determining means, in the present embodiment, by making the plate glass and glass-film 2 of being used as supporting mass 1 Adhesive etc. is not accompanied and is abutted directly on, and is interfixed so as to realize.
Now, the surface 2a (surface of the downside in Fig. 4) of the side of supporting mass 1 of glass-film 2 surface roughness Ra and branch The surface roughness Ra for holding the surface 1a (surface of the upside in Fig. 4) of the side of glass-film 2 of body 1 is set as below 2.0nm.It is logical Cross and each surface 1a, 2a surface roughness Ra are set as above-mentioned scope, supporting mass 1 can be made with glass-film 2 not occur The state stacking (forming layered product 3) that position offsets and interfixed.Certainly, from the viewpoint of close property is improved, preferably set It is set to below 1.0nm, is more preferably set as below 0.2nm.
On the other hand, the size of the surface 2b of the side opposite with supporting mass 1 of glass-film 2 surface roughness Ra is not It is particularly limited to, because it turns into the object surface of the electronic equipment relevant treatments such as implementation film forming in installation procedure S2 described later, because This its surface roughness Ra is preferably below 2.0nm, more preferably below 1.0nm, more preferably below 0.2nm.
In addition, from the viewpoint of the end of protective glass film 2, in the state of glass-film 2 and supporting mass 1 are laminated, Supporting mass 1 stretches out (Fig. 4) from glass-film 2.In this case, the overhang of supporting mass 1 from glass-film 2 is for example set as 0.5mm Above and below 10mm, more than 3mm and below 5mm are preferably set to.By the overhang for reducing supporting mass 1 as described above (being up to 10mm or so), whole face and it can efficiently support the glass-film 2 of relative large area.
In the present embodiment, as shown in figure 5, supporting mass 1 and the rectangular shape of glass-film 2.In addition, in the supporting mass 1 The whole periphery for the layered product 3 that upper laminated glass film 2 forms, supporting mass 1 stretch out from glass-film 2, thus in the corner of supporting mass 1 At 4, supporting mass 1 stretches out from glass-film 2.It should be noted that in the present embodiment, exemplified with whole the four of layered product 3 The form that individual edge supporting mass 1 stretches out from glass-film 2, but can certainly use and be supported three edge~mono- edges The form that body 1 stretches out from glass-film 2.In such a situation it is preferred that in the edge for the side not extended out, the end face of glass-film 2 with The end face of supporting mass 1 is consistent.
It should be noted that when forming above-mentioned layered product 3, stacking operation can also be carried out at reduced pressure conditions.By This, the bubble that can make to produce (residual) between glass-film 2 and supporting mass 1 when glass-film 2 is layered on supporting mass 1 subtracts Less or disappear.
(S2) installation procedure
As described above after the layered product 3 comprising glass-film 2 is formed, the electricity with heating is carried out to the layered product 3 The manufacture relevant treatment of sub- equipment, specifically, carry out the installation of the organic EL element 5 as electronic equipment part.Thus, such as Shown in Fig. 6, formed with having on the surface 2b of the side opposite with supporting mass 1 of the glass-film 2 for the part for forming layered product 3 Machine EL element 5.Moreover, by the way that cloche 6 is positioned in organic EL element 5 and the periphery of cloche 6 is fixed on into glass-film 2, so as to be sealed to organic EL element 5.Thus, formed and be fixed with supporting mass 1 in the organic EL panel 7 as electronic equipment State the organic EL panel 8 with supporting mass.
Here, the thickness of cloche 6 is for example set as less than 300 μm, less than 200 μm are preferably set to, more preferably It is set as less than 100 μm.By setting the thickness of cloche 6 like this, it can make cloche 6 that there is appropriate flexibility.
In addition, be arbitrary to the mounting means of organic EL element 5 is installed on glass-film 2, for example, can by CVD, Film build method known to sputtering etc., film forming forms anode successively on the surface 2b of the side opposite with supporting mass 1 of glass-film 2 Layer, hole transporting layer, luminescent layer, electron supplying layer, cathode layer etc., so as to form organic EL element 5 (omission detailed view). In addition, the fixing means that cloche 6 is fixed to glass-film 2 are also arbitrary, such as known package sealing with laser technology can be used Cloche 6 is fixed on glass-film 2.In this case, belong to be accompanied by by the film process of the progress such as CVD, sputtering and add The manufacture relevant treatment of the electronic equipment (organic EL panel 7) of heat.Therefore, by as described above forming organic EL element 5 On the surface 2b of the side opposite with supporting mass 1 of glass-film 2, so as to which glass-film 2 is heated.In addition, by the heating and New combination is formed between glass-film 2 and supporting mass 1, when stacking compared with when layered product 3 (formed), glass-film 2 and supporting The fixed force of body 1 improves.
It should be noted that in the form shown in Fig. 6, cloche 6 and glass-film 2 is directly fixed, but electricity can fit When cloche 6 is adhesively fixed in glass-film 2 by frit, separator etc. known to utilization (omitting diagram).Or can also be right Cloche 6 sets supporting mass 1 (omitting diagram), when peeling off cloche 6 from supporting mass 1, can also apply the present invention.
(S3) stripping process
So, after the organic EL panel 8 with supporting mass is formed, shelled from the supporting mass 1 of the organic EL panel 8 with supporting mass From the organic EL panel 7 (Fig. 1) comprising glass-film 2.Fig. 7 shows the top view of the stripping off device 10 for carrying out above-mentioned stripping. The stripping off device 10 possesses stripping starting point portion producing device 11 and peels off propulsion plant 12, therefore stripping starting point portion producing device 11 Possess the mounting table 13 that can load the organic EL panel 8 with supporting mass, the layered product 3 for the object to being deformed as concavity A part (being in the present embodiment projecting area 3a) assign concavity deformation assigning unit 14 and the insertion of concave deformation Mechanism 15.It should be noted that after Fig. 7, save organic EL element 5 that the organic EL panel 8 of slightly supporting mass included with And the diagram of cloche 6.
Mounting table 13 is for example made up of platform, can support the band branch comprising layered product 3 using flat mounting surface 16 Hold the organic EL panel 8 of body.In the present embodiment, in a manner of being abutted by mounting surface 16 with the surface of glass-film 2, i.e., such as Shown in Fig. 8, in a manner of supporting mass 1 is located at upside and glass-film 2 is located at downside, layered product 3 is positioned in mounting surface 16, from And the organic EL panel 8 with supporting mass comprising layered product 3 can be supported.Thus, although diagram is omitted, in such as this embodiment party Formula is such, and in the case of organic EL element 5 and cloche 6 are provided with glass-film 2, can be set to mounting surface 16 can Support organic EL element 5 and the shape of cloche 6.It is of course also possible to which mounting surface 16 is set to only being capable of supporting glass film 2 The shape of the peripheral part of (being in the present embodiment cloche 6) and the one side or both sides in supporting mass 1.Need what is illustrated It is to promote process S32 to by stripping propulsion plant 12 described later peel off, can also be in the mounting surface 16 of mounting table 13 Adsorption hole is set, is thus configured to glass-film 2 (organic EL panel 7 for including glass-film 2) can be adsorbed in into mounting surface 16.
In the present embodiment, concavity deformation assigning unit 14 includes：Mounting surface 16；First fulcrum formed component 17, its The corner 4 that the mounting surface 16 from layered product 3 of supporting mass 1 is stretched out sets the first fulcrum P1 of supporting supporting mass 1；And external force is assigned Component 18 is given, its projecting area 3a to layered product 3 assigns external force.
In the present embodiment, mounting surface 16 is in the layered product 3 to be supported (organic EL with supporting mass as entirety Panel 8) on the basis of shape, i.e., rectangular shape, and in making the shape that one corner lacks.Thus, by with supporting mass In the state of organic EL panel 8 is positioned in mounting surface 16, turn into following state：Organic EL panel 8 with supporting mass removes Zone Full beyond one corner 4 is supported by mounting surface 16, and (reference is stretched out in a part of region including corner 4 Fig. 7 lower left).Thus, in this case, the end 16a of the mounting surface 16 for the side that corner 4 is stretched out turns into the second fulcrum shape Into component, second fulcrum forms component and the position separated with the first fulcrum P1 is provided with organic EL of supporting strip supporting mass Second fulcrum P2 of panel 8.
First fulcrum, which forms component 17, can support the corner 4 for the layered product 3 for forming the organic EL panel 8 with supporting mass, In the present embodiment, insertion component (wedge formation 19) described later is formed into component 17 as the first fulcrum.In addition, supporting Body 1 is formed in the state of the stretching of glass-film 2 in the case of layered product 3 (reference picture 5), and the first fulcrum forms component 17 can be The surface 1a of the side of glass-film 2 for the supporting mass 1 that supporting is stretched out from glass-film 2 at corner 4.In other words, the first fulcrum forms component 17 are provided with the first fulcrum P1 of supporting supporting mass 1 in the corner 4 of supporting mass 1.
External force assigns component 18 and configured is forming the first fulcrum P1 that component 17 formed and by as second by the first fulcrum Between the second fulcrum P2 that the end 16a that fulcrum forms the mounting surface 16 of component is formed.In the present embodiment, external force assigns structure Part 18 includes：Adsorption element 20, it is (actual for province that it can be adsorbed in the surface 2b of the side opposite with supporting mass 1 of glass-film 2 The surface for the cloche 6 that sketch map shows)；With lift component 21, its can make normal direction of the adsorption element 20 along mounting surface 16, The thickness direction a liftings for the layered product 3 being positioned in mounting surface 16.
In the present embodiment, interposer 15 includes：Wedge formation 19 as insertion component；With sliding component 22, It can make wedge formation 19 on the direction parallel with the mounting surface 16 of mounting table 13, i.e. along being positioned in mounting surface 16 In the state of layered product 3 plane square upward sliding.In the present embodiment, wedge formation 19 is configured to, can be logical The direction of the top in the corner 4 of supporting mass 1 and the imagining center line of external force imparting component 18 is crossed (in other words, along glass-film 2 Cornerwise direction) on slide (reference picture 7).
In addition, with the blade tip direction c of the wedge formation 19 and direction of insertion b that wedge formation 19 is inserted by sliding component 22 The mode that formed angle (below, also referred to as angle of wedge degree) θ is more than 20 ° and less than 45 °, preferably more than 20 ° and less than 30 °, Set the posture of wedge formation 19 and the glide direction of sliding component 22.
Next, according to Fig. 7~Figure 13 to having used the stripping starting point of the stripping starting point portion producing device 11 of said structure One of the making action in portion illustrates.
(S31) stripping starting point portion production process
First, as shown in Figure 7 and Figure 8, the organic EL panel 8 with supporting mass is positioned in the mounting surface 16 of mounting table 13 On, and can to formed the organic EL panel 8 with supporting mass a part layered product 3 from mounting surface 16 stretch out angle The position that portion 4 (i.e. the corner 4 of supporting mass 1) is supported, configure the wedge formation 19 that component 17 is formed as the first fulcrum.By This, turns into the state that the organic EL panel 8 with supporting mass comprising layered product 3 is supported by mounting surface 16 and wedge formation 19.Tool For body, the position configuration wedge formation for making blade tip 19a be connected between supporting mass 1 and glass-film 2 is at the top in corner 4 19, the blade tip 19a of wedge formation 19 is thus set to the first fulcrum P1 with the abutment that supporting mass 1 abuts, by mounting surface 16 Multiple abutments that end 16a abuts with glass-film 2 (cloche 6 for omitting diagram in the present embodiment) are (i.e. in this implementation It is abutting line in mode) the second fulcrum P2 is set to, propped up so as to which the organic EL panel 8 with supporting mass comprising layered product 3 turns into The state (fulcrum formation process S311) held.In addition, the state of the organic EL panel 8 in supporting strip supporting mass as described above Under, in addition to the influence for the deformation to projecting area 3a of conducting oneself with dignity, the organic EL panel 8 with supporting mass is overall by flat twelve Earthly Branches Hold.
In addition, now, from the bearing position (i.e. the first fulcrum P1) of the first fulcrum formation diagonal section 4 of component 17 to mounting surface 16 end 16a to the beeline (Fig. 7) of the bearing position (i.e. the second fulcrum P2) of the organic EL panel 8 with supporting mass for example It is set as more than 30mm and below 200mm, is preferably set to more than 30mm and below 150mm, is more preferably set as more than 50mm And below 100mm.The shape of mounting surface 16 is set as this illustrated example and loads the organic EL panel 8 with supporting mass Under state, component 17 is formed to the bearing position (the first fulcrum P1 shown in Fig. 7) of supporting mass 1 to being arranged on load from the first fulcrum Put the second fulcrum P2 (figures positioned at end 16a length direction center in multiple second fulcrum P2 on the end 16a in face 16 7) air line distance is set as more than 30mm and below 200mm as above-mentioned beeline.
Next, the band supporting mass comprising layered product 3 is being supported from below using the first fulcrum P1 and the second fulcrum P2 Organic EL panel 8 in the state of, direction of the adsorption element 20 along arrow a is increased using lift component 21, make absorption structure The surface 2b of part 20 and the glass-film 2 positioned at the downside of layered product 3 (omits the table of the cloche 6 of diagram in the present embodiment Face) abut (Fig. 9).Then, adsorption element 20 is made to be adsorbed in the surface 2b of glass-film 2 by suction etc. from the state. The stage of glass-film 2 is adsorbed with, the organic EL panel 8 with supporting mass comprising layered product 3 still keeps what is flatly supported State.
After glass-film 2 is adsorbed like this, as shown in Figure 10, adsorption element 20 is made along arrow a by lift component 21 Direction decline, to assigning pulling force downward from the region that mounting surface 16 is stretched out in the organic EL panel 8 with supporting mass F.In other words, by the first fulcrum formed the first fulcrum P1 that component 17 (being in the present embodiment wedge formation 19) formed with Pulling force F application point being set between the second fulcrum P2 formed by the end 16a of mounting surface 16.Thus, with the production of the side of supporting mass 1 Raw recess 3c mode, the projecting area 3a for becoming a part for layered product 3 are deformed into concavity (concavity deforms process S312). In the present embodiment, by assigning pulling force F downward to the position (Fig. 7) of the substantially center of gravity as projecting area 3a, So as in a manner of producing the recess 3c in round shape in the case of from the side top view of supporting mass 1, deform projecting area 3a For concavity.
In addition, in the state of projecting area 3a is deformed into concavity as described above, in recess caused by the side of supporting mass 1 3c depth capacity size d is set as more than 1mm and below 5mm, is preferably set to more than 2mm and below 4mm.Need what is illustrated Be, the maximum concavity deflection of projecting area 3a now (it is in the surface 1b of supporting mass 1, from the state before concavity deformation most The thickness direction a of the opening position significantly deformed to the side of glass-film 2 deflection) for example by mounting surface 16 and by first Fulcrum forms bearing position, projecting area the 3a shape and area and the adsorption potential from adsorption element 20 that component 17 supports The slippage H1 in the direction along arrow a put is adjusted.In the situation using the structure involved by present embodiment Under, the slippage H1 that depth capacity size d assigns component 18 (adsorption element 20) with external force is roughly equal.That is, adsorption element 20 Slippage H1 be set as more than 1mm and below 5mm, be preferably set to more than 2mm and below 4mm.
Moreover, being deformed into concave period in the projecting area 3a of the part as layered product 3, pass through sliding component 22 Driving start to make wedge formation 19 move to the direction in the direction along arrow b, the blade tip 19a of wedge formation 19 is inserted into position Between the supporting mass 1 and glass-film 2 at the top in projecting area 3a corner 4 (herein for overlay).Thus, as shown in figure 11, Surface 1a in the downside with supporting mass 1 be close to the surface 2a of the upside of the glass-film 2 of state from the 2a1 of its end relative to The surface 1a of supporting mass 1 starts to peel off.Then, by driving sliding component 22 from the state shown in Figure 11, so that wedge-like Component 19 moves (slip) further along arrow b direction, gradually expands (Figure 12) so as to the stripping area of glass-film 2.
Now, there is the state (figure that recover to before being deformed into concavity respectively in supporting mass 1 and glass-film 2 In 12, with the state shown in double dot dash line) direction reaction force (recuperability f1, f2).Therefore, adsorption element 20 is being utilized In the case of being adsorbed to the side of glass-film 2, caused recuperability f2 is by under the direction caused by adsorption element 20 in glass-film 2 The pulling force F of side is offset, and essentially becomes the state for only being acted in the side of supporting mass 1 and having above-mentioned recuperability fl.Therefore, according to above-mentioned Situation, the stripping area that glass-film 2 is peeled off from supporting mass 1 also expand, such as shown in figure 13, supporting mass 1 substantially recover to In the stage for the state being deformed into before concavity, between supporting mass 1 and glass-film 2, being formed into makes glass-film 2 on its whole face The stripping starting point portion 9 (insertion process S313) of starting point during stripping.
(S32) peel off and promote process
After stripping starting point portion 9 is made like this, the side of supporting mass 1 or glass-film 2 are held by absorption layer (not shown) etc. Side pulls direction of the direction away from the opposing party, or is blown water or other fluid towards stripping starting point portion 9, so as to from supporting mass 1 Glass-film 2 is peeled off on its whole face.
In the present embodiment, such as shown in Fig. 7 and Figure 14, using with multiple absorption layers 23 and can be to each suction Attached pad 23 independently along the above-below direction a drive divisions 24 driven stripping propulsion plant 12, to promote the stripping of glass-film 2.Tool For body, as shown in fig. 7, from being configured with the state of multiple absorption layers 23 in the upside of supporting mass 1, made respectively using drive division 24 Absorption layer 23 is moved downwards, and the surface 1b (Figure 14) of the upside of supporting mass 1 is adsorbed by each absorption layer 23.Then, as schemed Shown in 15, by making absorption layer 23 rise successively from the side of stripping starting point portion 9, thus glass is promoted along the diagonal of stripping film Film 2 is peeled off from supporting mass 1.Thus, glass-film 2 is peeled off on its whole face from supporting mass 1, the quilt of organic EL panel 8 with supporting mass It is separated into the organic EL panel 7 and supporting mass 1 (Figure 16) for including glass-film 2.
So, peeled off from the supporting mass 1 of the organic EL panel 8 with supporting mass as the electronic equipment for including glass-film 2 Organic EL panel 7 when, in the present invention, the first fulcrum P1 is set from the corner 4 that glass-film 2 stretches out in supporting mass 1, and The second fulcrum P2 is set in the position separated with the first fulcrum P1, and external force is set between fulcrum P1, P2 of above-mentioned both sides The application point of (pulling force F), so that projecting area 3a is deformed into concavity.Thereby, it is possible to make stretching for the part as layered product 3 Go out region 3a with curvature defomation big than ever.Thereby, it is possible to improve because of the difference of the curvature between supporting mass 1 and glass-film 2 And caused shearing force, in insertion process S313 afterwards, a part for glass-film 2 can be easily peeled off from supporting mass 1. In addition, making a part for layered product 3 be deformed into concavity in a manner of producing recess 3c in the side of supporting mass 1, so as to be laminated During the concavity deformation of body 3, have being easily formed as the side of supporting mass 1 effect than the heavy wall of glass-film 2 (limitation of thickness is few) Larger bending stress (compression stress).Thereby, it is possible to avoid acting on the feelings for having excessive load on glass-film 2 and supporting mass 1 Condition, so as to prevent the breakage of glass-film 2 and supporting mass 1.Further, since will after the part for making layered product 3 is deformed into concavity Wedge formation 19 is inserted between supporting mass 1 and glass-film 2, therefore does not increase layered product 3 during inserted with wedge formation 19 Deflection also have no problem.Therefore, thus can also avoid acting on the feelings for having excessive load on glass-film 2 and supporting mass 1 Condition, so as to prevent that glass-film 2 and supporting mass 1 are damaged when making stripping starting point portion 9.More than, in accordance with the invention it is possible to not right In the case that glass-film 2, organic EL element 5, supporting mass 1 etc. apply excessive load, the organic EL panel 8 with supporting mass is pacified Organic EL panel 7 and supporting mass 1 comprising glass-film 2 are separated into entirely.
In addition, in the present embodiment, first fulcrum P1 is set using wedge formation 19, therefore in the recessed of projecting area 3a When shape deformation starts (Figure 10), wedge formation 19 forms component 17 as projecting area 3a the first fulcrum and plays function, separately On the one hand, in the state of concavity is deformed into, wedge formation 19 turns into the shape being connected between glass-film 2 and supporting mass 1 State (Figure 10).Therefore, just can be by wedge formation only by directly making wedge formation 19 move (slip) along direction of insertion b Between 19 insertion glass-films 2 and supporting mass 1, stripping starting point portion 9 can be to easily and reliably made.In addition, wedge formation 19 Body forms component 17 as the first fulcrum and plays function, therefore right with the insert action of wedge formation 19, wedge formation 19 Projecting area 3a bearing position, i.e. the first fulcrum P1 also the direction of propulsion to stripping, i.e. to the side of the plane along layered product 3 To center side advance.Thereby, it is possible to which the inserted mode of wedge formation 19 to be remained to constant state, swimmingly peeled off The making action in starting point portion 9.
Particularly, in this case, in the projecting area 3a using adsorption element 20 from the side of glass-film 2 absorption layered product 3 Afterwards, pull projecting area 3a downwards and be morphed into concavity, so as to avoid external force assign component 18 continue to stay in Situation in recess 3c caused by the side of supporting mass 1.Therefore, it is possible to the holding of glass-film 2 change after the insertion of wedge formation 19 starts Shape is concave state, and avoids wedge formation 19 and external force to assign the situation that component 18 is interfered simultaneously, so as to glass-film 2 with Position that supporting mass 1 can be peeled off safely and reliably, i.e. during untill forming stripping starting point portion 9, can be swimmingly Promote the insert action of wedge formation 19.In addition, make stretching in a manner of producing recess 3c in the side of supporting mass 1 as described above Region 3a be deformed into it is concave in the case of, in supporting mass 1 and glass-film 2 effect have and to recover to before being deformed into concavity Recuperability f1, f2 of the direction of flat state.Therefore, in situation about being adsorbed using adsorption element 20 to the side of glass-film 2 Under, caused recuperability f2 is offset by the pulling force F as caused by adsorption element 20 downward in glass-film 2, is essentially become Only in the side of supporting mass 1, effect has above-mentioned recuperability f1 state.Thereby, it is possible to more swimmingly carry out inserting for wedge formation 19 Enter action, can safely and easily make stripping starting point portion 9.
More than, to an embodiment (first of the manufacture method of the electronic equipment comprising glass-film involved in the present invention Embodiment) it is illustrated, but the manufacture method can use arbitrary mode within the scope of the invention certainly.
Figure 17 shows that the major part of the stripping starting point portion producing device 25 involved by second embodiment of the present invention is cutd open View (sectional view with the A-A main portion sectional view identical opening positions of the stripping off device 10 shown in Fig. 7).The stripping starting point Portion's producing device 25 configures adsorption element 20 and lift component 21 in the top of layered product 3, the i.e. side of supporting mass 1.Other knots Structure is identical with first embodiment, therefore eliminates explanation.
The making in the stripping starting point portion 9 of the stripping starting point portion producing device 25 of said structure has been used to act (stripping starting point Portion production process S31) one for example shown in Figure 17~Figure 20.
First as shown in figure 17, the organic EL panel 8 with supporting mass is positioned in the mounting surface 16 of mounting table 13, and The layered product 3 that wedge formation 19 is configured in the part to forming the organic EL panel 8 with supporting mass is stretched from mounting surface 16 The position that the corner 4 gone out is supported.Thus, the organic EL panel 8 with supporting mass comprising layered product 3 turns into by mounting surface 16 The state supported with wedge formation 19.In the present embodiment, being at the top in corner 4 makes blade tip 19a be connected to supporting mass 1 Position configuration wedge formation 19 between glass-film 2, thus by the abutment in the blade tip 19a of wedge formation 19 and corner 4, with And the end 16a of mounting surface 16 and the abutment in corner 4 are set to the first fulcrum P1, the second fulcrum P2, having with supporting mass Machine EL panels 8 turn into the state being supported by.In addition, in the state of the organic EL panel 8 of supporting strip supporting mass as described above, In addition to conducting oneself with dignity to the influence of deformation, the entirety of organic EL panel 8 with supporting mass is supported to flat.
Next, adsorption element 20 is declined from the position shown in Figure 16 along arrow a direction by lift component 21, As shown in figure 18, abut adsorption element 20 and the surface 1b of the supporting mass 1 positioned at the upside of layered product 3.Then, from the state Act the direction for continuing to make adsorption element 20 along arrow a to decline, pressing force G downward is assigned to layered product 3.Thus, such as Shown in Figure 19, the first fulcrum P1 that component 17 sets and set by the end 16a of mounting surface 16 the are being formed by the first fulcrum Pressing force G application point is set between two fulcrum P2, so as to make projecting area 3a in a manner of producing recess 3c in the side of supporting mass 1 It is deformed into concavity.
Then, projecting area 3a is deformed into concave state, starting to make wedge-like by the driving of sliding component 22 Component 19 moves to the direction in the direction along arrow b, the blade tip of wedge formation 19 is connected to the branch positioned at the top in corner 4 Hold between body 1 and glass-film 2 (such as overlaying).Thus, as shown in figure 20, wedge formation 19 is started towards supporting mass 1 and glass Insertion between film 2, by the way that the stripping area from the end 2a1 of glass-film 2 is expanded to a certain extent, so as to make such as figure Stripping starting point portion 9 (stripping starting point portion production process S31) shown in 13.
Then, after stripping starting point portion 9 is made, although omitting diagram, the holding such as by absorption layer (not shown) The side of supporting mass 1 or the side of glass-film 2 simultaneously by a side towards away from the opposing party direction pull, or towards stripping starting point portion 9 water spray etc. Fluid, so as to be peeled off from supporting mass 1 by glass-film 2 on its whole face.Thus, the organic EL panel 8 with supporting mass is separated into Organic EL panel 7 and supporting mass 1 (peel off and promote process S32) comprising glass-film 2.Certainly, although now for example omitting diagram, But can also be in the following way：By the way that in the position use do not interfered with adsorption element 20 supporting mass 1 can be adsorbed from upside Stripping propulsion plant 12 as shown in figure 14, pull supporting mass 1 on the side from stripping starting point portion 9, so as to by glass-film 2 at it Peeled off on whole face from supporting mass 1.
So, by along arrow a direction, the thickness of layered product 3 in mounting surface 16 is positioned in flat state Direction is spent from the lateral lower section pressing projecting area 3a of supporting mass 1, also can not apply excessive bear to glass-film 2, supporting mass 1 Projecting area 3a is stably set to be deformed into concavity in the case of load.Therefore, it is possible to make projecting area 3a with curvature big than ever Deformation, the shearing force because of caused by the difference of curvature can be relied on as described above, come relatively easily in supporting mass 1 and glass-film Stripping starting point portion 9 is made between 2.
As long as it should be noted that for pressing force G situation is assigned from the side of supporting mass 1 as in the present embodiment, just not It is necessarily limited to adsorption element 20.Can also be such as the use of front end being in spherical rod member, as long as not giving supporting mass 1 and glass A problem that film 2 brings breakage, it can also just use arbitrary shape and the pressing member of structure.
In addition, the application point on external force (pulling force F, pressing force G), in the above-described embodiment, exemplified with corner 4 The organic EL panel 8 with supporting mass bearing position (abutted position that the blade tip 19a of wedge formation 19 abuts with supporting mass 1) The situation of pulling force F or pressing force G application point is set with the end 16a of mounting surface 16 centre position, but can certainly In position in addition, application point is set.For example, it is also possible in the following way：By adsorption element 20 and supporting mass 1 or The contact point of glass-film 2, i.e. pulling force F or pressing force G application point are arranged on the side closer to corner 4 than end 16a, with Just the power in the direction being located remotely from each other is produced between supporting mass 1 and glass-film 2 in the position for the end for more leaning on corner 4.
In addition, in the above-described embodiment, assigned exemplified with to projecting area 3a in the thickness direction a along layered product 3 Direction on pulling force F downward or pressing force G situation, but external force can also be assigned by way of in addition and Projecting area 3a is set to be deformed into concavity., can also be in the following way although being illustrated for example, omitting：Pass through the side with arrow b To the corner compared to the supporting mass 1 being slightly toward in the pressing projecting area 3a of lower section, so as to in the side of supporting mass 1 generation recess 3c Mode projecting area 3a is deformed into concavity.
In addition, in the above-described embodiment, exemplified with being used as mounting surface 16 in the shape for lacking a corner The situation of component, but supporting mass 1 and glass-film 2 can certainly be realized using the mounting surface 16 in shape in addition Peel off.Figure 21 shows the top view of the stripping starting point portion producing device 26 involved by wherein one (the 3rd embodiment).The stripping Be integrally provided and form with mounting surface 16 by the way that support 27 will be extended from starting point portion producing device 26, the extension support 27 from The end 16a of mounting surface 16 shown in Fig. 7 both ends are along the layered product 3 to be supported (organic EL panel 8 with supporting mass) Edge extends.According to the structure, can be formed by the use of mounting surface 16, as the first fulcrum component 17 wedge formation 19 and Extend support 27 carry out the organic EL panel 8 of supporting strip supporting mass, and make simultaneously above-mentioned mounting surface 16, wedge formation 19 and The projecting area 3a extended between support 27 is deformed into concavity.It is above-mentioned a series of therefore, it is possible to more stably implement The making action in stripping starting point portion 9.
In addition, forming component 17 on the first fulcrum, in the above-described embodiment, component is formed exemplified with by the first fulcrum 17 as wedge formation 19 and configure the situation in the corner 4 of supporting mass 1, but can certainly use structure in addition. , can also be in the following way such as although omission illustrates：Component 17, which is formed, in the first fulcrum does not hinder wedge formation 19 In the range of press-in action, the first fulcrum is set to form component 17 to support the top in corner 4 in addition relative to wedge formation 19 Region in addition, abut wedge formation 19 and the top in corner 4.
In addition, the generation type on the second fulcrum P2, in the above-described embodiment, exemplified with the end using mounting surface 16 Portion 16a is continuously provided multiple second fulcrum P2 situation, but can certainly be by the way of in addition.Although such as save Sketch map shows, but can also be in the following way：Utilize supporting member (rolling member etc.) supporting strip supporting mass beyond mounting surface Organic EL panel 8, and using the corner 4 of the first fulcrum formation supporting supporting mass 1 of component 17, separated with the first fulcrum P1 Position, set in addition relative to the supporting member beyond above-mentioned mounting surface the second fulcrum formed component.Thereby, it is possible to utilize Arbitrary component sets the second fulcrum P2 in the arbitrary position of the organic EL panel 8 with supporting mass.In addition, the second fulcrum P2 Quantity is also any, can set one or more second fulcrum P2.
In addition, the direction of insertion on wedge formation 19, in the above-described embodiment, makes exemplified with by sliding component 22 Wedge formation 19 but can certainly be adopted in the mode of the square upward sliding of the in-plane of the layered product 3 along flat condition With inserted mode in addition.Such as can also be using the deformation side according to the projecting area 3a behind formation stripping starting point portion 9 Formula while promoting (peel off mode of texturing) changes the structure of the moving direction of wedge formation 19.
In addition, in the above-described embodiment, exemplified with stripping starting point portion producing device 11 and stripping propulsion plant 12 The situation of mounting table 13 (mounting surface 16) is shared, but stripping off device 10 is not limited to the example certainly.Such as lower section can also be used Formula：Completely independent make stripping starting point portion producing device 11 and peel off propulsion plant 12, and temporary transient making is had into stripping starting point The organic EL panel 8 with supporting mass in portion 9 is positioned on the adsorption plane for peeling off propulsion plant 12 promotes process to implement to peel off S32。
In addition, in the above-described embodiment, exemplified with using plate glass as supporting mass 1 and make the supporting mass 1 The situation for abutting directly on and interfixing with glass-film 2, but can certainly apply the present invention to by hand in addition Section fixes glass-film 2 and supporting mass 1 layered product 3 formed.For example, it is also possible to apply the present invention to following layered product (omitting diagram), the layered product passes through acrylic adhesive, silicone film layer, inorganic thin film layer (ITO, oxide, metal, carbon) Form supporting mass 1 Deng the layer and plate glass being made up of non-glass materials, and non-glass materials layer is close to glass-film 2 and Into.
In addition, in the above description, exemplified with the situation that organic EL panel 7 is manufactured as electronic equipment, but certainly The manufacture method of electronic equipment in addition can also be applied the present invention to.Figure 22 shows the band branch wherein involved by one Hold the sectional view of the liquid crystal panel 28 of body.The panel 28 in the both sides for the liquid crystal panel 29 for being used as final products by fixing a pair Supporting mass 1,1 forms, such as is formed as follows.That is, form be laminated supporting mass 1 and glass-film 2 respectively first A pair of layered products 3,3 (layered product formation process S1).Then, formed and divided on the surface 2b of the glass-film 2 of the layered product 3 of a side Spacing body 30, the separator 30 form the space for enclosing liquid crystal (not shown), and the layer of the opposing party is fixed on the separator 30 The glass-film 2 (installation procedure S2) of stack 3.After the liquid crystal panel 28 with supporting mass is formed like this, pass through above-mentioned stripping Supporting mass 1 is peeled off (stripping process S3) by method one by one, and a liquid crystal panel 28 with supporting mass is separated into two branch Hold body 1,1 and a liquid crystal panel 29.Thus, by also applying the present invention, Neng Gou in the case where manufacturing liquid crystal panel 29 In the case of not making the breakage of glass-film 2, the liquid crystal panel 28 with supporting mass is safely and easily separated into supporting mass 1 and liquid crystal Panel 29.
Certainly, in the case where glass-film 2 itself is obtained into (manufacture) as final products, by applying institute of the present invention The manufacture method for the glass-film being related to, also can be in the case where not making the breakage of glass-film 2, safely and easily from supporting mass 1 Peel off glass-film 2.

Claims (11)

1. a kind of manufacture method of glass-film, it possesses：
Layered product formation process, in the layered product formation process, by glass-film with supporting the supporting mass of the glass-film with institute State the mode that supporting mass stretches out from the glass-film to be laminated, so as to form the layered product for including the glass-film；
Relevant treatment process is manufactured, in the manufacture relevant treatment process, implements manufacture relevant treatment to the layered product；And
Stripping process, after the manufacture relevant treatment process, in the stripping process, the glass is peeled off from the supporting mass Glass film,
The manufacture method of the glass-film is characterised by,
The stripping process has：Stripping starting point portion production process, in the stripping starting point portion production process, from the supporting mass A part for the glass-film is peeled off, to make as the starting point when peeling off the glass-film on the whole face of the glass-film Stripping starting point portion；Process is promoted with peeling off, in the stripping promotes process, using the stripping starting point portion as starting point described in propulsion Glass-film is peeled off from the supporting mass,
Stripping starting point portion production process has：
Fulcrum formation process, in the fulcrum formation process, set in the supporting mass from the corner that the glass-film stretches out The first fulcrum of the supporting mass is supported, and is set in the position separated with first fulcrum and supports the layered product Second fulcrum；
Concavity deforms process, in the concavity deforms process, is set between first fulcrum and second fulcrum by outer Power assigns the application point for the external force that component is acted on, and thus makes the stacking in a manner of producing recess on the supporting side A part for body is deformed into concavity；And
Process is inserted, in the insertion process, concave period is deformed into a part for the layered product, to the glass-film The insertion insertion component between the supporting mass, so as to peel off a part for the glass-film.
2. the manufacture method of glass-film according to claim 1, wherein,
The layered product is placed in mounting table in a manner of the supporting mass is in upside and the glass-film is in downside, and At least corner of the supporting mass is stretched out from the mounting surface of the mounting table, utilize described in the end set of the mounting surface the Two fulcrums.
3. the manufacture method of glass-film according to claim 1 or 2, wherein,
Using the insertion component, first fulcrum is set.
4. the manufacture method of glass-film according to any one of claim 1 to 3, wherein,
Component is assigned as the external force and uses adsorption element, by the adsorption element from the glass-film side to described first Adsorbed between fulcrum and second fulcrum, and the adsorption element is moved to the direction away from the supporting mass.
5. the manufacture method of glass-film according to any one of claim 1 to 3, wherein,
Component is assigned as the external force and uses pressing member, by the pressing member from the side that supports towards the glass Glass film side between first fulcrum and second fulcrum to pressing.
6. the manufacture method of glass-film according to any one of claim 1 to 5, wherein,
Wedge formation is used as the insertion component,
By angle formed by the blade tip direction of the direction of insertion of the wedge formation and the wedge formation be set as more than 20 ° and Less than 45 °, the wedge formation is inserted between the glass-film and the supporting mass.
7. the manufacture method of glass-film according to any one of claim 1 to 6, wherein,
More than 30mm and below 200mm will be set as from first fulcrum to the beeline of second fulcrum.
8. the manufacture method of glass-film according to any one of claim 1 to 7, wherein,
The concave period will be deformed into a part for the layered product, in the recess caused by the supporting side Depth capacity is dimensioned so as to more than 1mm and below 5mm.
9. the manufacture method of glass-film according to any one of claim 1 to 8, wherein,
The insertion component is set as 5mm from the displacement started to being inserted between the glass-film and the supporting mass Above and below 50mm.
10. the manufacture method of glass-film according to any one of claim 1 to 9, wherein,
The supporting mass is plate glass, by making the plate glass and the glass-film abut directly on to form the stacking Body.
11. a kind of manufacture method of the electronic equipment comprising glass-film, it possesses：
Layered product formation process, in the layered product formation process, by glass-film with supporting the supporting mass of the glass-film with institute State the mode that supporting mass stretches out from the glass-film to be laminated, so as to form the layered product for including the glass-film；
Installation procedure, in the installation procedure, electronic equipment part is installed to the glass-film of the layered product and forms band The electronic equipment of supporting mass；And
Stripping process, after the installation procedure, in the stripping process, from described in the electronic equipment with supporting mass Supporting mass peels off the electronic equipment for including the glass-film,
The manufacture method of the electronic equipment comprising glass-film is characterised by,
The stripping process has：Stripping starting point portion production process, in the stripping starting point portion production process, from the supporting mass A part for the glass-film is peeled off, to make as the starting point when peeling off the glass-film on the whole face of the glass-film Stripping starting point portion；Process is promoted with peeling off, in the stripping promotes process, using the stripping starting point portion as starting point described in propulsion Electronic equipment is peeled off from the supporting mass,
Stripping starting point portion production process has：
Fulcrum formation process, in the fulcrum formation process, set in the supporting mass from the corner that the glass-film stretches out The first fulcrum of the supporting mass is supported, and is set in the position separated with first fulcrum and supports the electronic equipment The second fulcrum；
Concavity deforms process, in the concavity deforms process, is set between first fulcrum and second fulcrum by outer Power assigns the application point for the external force that component is acted on, and thus makes the stacking in a manner of producing recess on the supporting side A part for body is deformed into concavity；And
Process is inserted, in the insertion process, concave period is deformed into a part for the layered product, to the glass-film The insertion insertion component between the supporting mass, so as to peel off a part for the glass-film.
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