CN107848880B

CN107848880B - Method for manufacturing glass film and method for manufacturing electronic device including glass film

Info

Publication number: CN107848880B
Application number: CN201680042722.0A
Authority: CN
Inventors: 山崎康夫; 南贵博; 飨场久敏; 冈隆雄; 藤田崇
Original assignee: Nippon Electric Glass Co Ltd
Current assignee: Nippon Electric Glass Co Ltd
Priority date: 2015-07-24
Filing date: 2016-07-05
Publication date: 2020-07-31
Anticipated expiration: 2036-07-05
Also published as: TW201718427A; KR20180032561A; JP6519951B2; WO2017018136A1; CN107848880A; JP2017024950A; TWI681939B; KR102457961B1

Abstract

When peeling a glass film (2) from a support (1), a first supporting point (P1) for supporting the support (1) is provided at a corner (4) of the support (1) that protrudes from the glass film (2), and a second supporting point (P2) for supporting a laminate (3) is provided at a position that is spaced apart from the first supporting point (P1). By providing an action point of an external force (F) between the first fulcrum (P1) and the second fulcrum (P2) by the external force applying member (18), a part of the laminate (3) is deformed into a concave shape so that a concave portion (3c) is generated on the support body (1) side. Then, while a part of the laminate (3) is deformed into a concave shape, a wedge member (19) is inserted between the glass film (2) and the support (1), thereby peeling a part of the glass film (2) from the support (1).

Description

Method for manufacturing glass film and method for manufacturing electronic device including glass film

Technical Field

The present invention relates to a method for manufacturing a glass film and a method for manufacturing an electronic device including a glass film, and more particularly to a technique for peeling a glass film from a support.

Background

In recent years, flat panel displays such as liquid crystal displays, plasma displays, organic E L displays, and field emission displays have become popular in place of CRT-type displays that have been popular in the past from the viewpoint of space saving.

In particular, organic E L displays and organic E L illuminators have a function of being foldable or windable by utilizing the fact that the thickness is very small (thin), and thus are expected to be used in various applications because they are portable and can be used in a curved state in addition to a conventional flat state.

In order to impart flexibility to the glass substrate, it is effective to thin the glass substrate. Here, for example, patent document 1 proposes a glass film having a thickness of 200 μm or less, which can impart a high degree of flexibility to a glass substrate to enable use in a curved state.

On the other hand, glass substrates used for electronic devices such as flat panel displays and solar cells are subjected to various electronic device manufacturing-related processes such as secondary processing and cleaning. However, when the glass substrate used for these electronic devices is thinned, since glass is a brittle material, it may be broken even by slight stress change, and there is a problem that handling is very difficult when handling related to electronic device manufacturing. Further, since a glass film having a thickness of 200 μm or less is highly flexible, there is a problem that positioning (for example, displacement occurs when patterning) is difficult when various manufacturing-related processes are performed.

Regarding the above problem, for example, as shown in patent document 2, a laminate in which a glass film and a support glass supporting the glass film are laminated and fixed to each other is proposed. When various manufacturing-related treatments are applied to this laminate, the support glass functions as a reinforcing material even when a glass film lacking strength and rigidity is used in the case of a single body, and therefore positioning as a laminate can be easily performed at the time of each treatment. After the completion of the treatment, the support glass is peeled off from the glass film, whereby only the glass film subjected to the desired treatment can be finally obtained. Further, by setting the thickness dimension of the laminate including the glass film to be the same as the thickness dimension of the conventional (conventional) glass substrate, it is expected that the conventional production line for glass substrates can be used (shared) as the production line for electronic devices.

On the other hand, among various manufacturing-related processes, there are processes accompanied by heating, such as a film formation process and a sealing process of a transparent conductive film. When the laminate having the above-described structure is subjected to a treatment involving heating, the fixing force between the support glass and the glass film in a state of being in direct or indirect close contact via a resin layer, an inorganic thin film layer, or the like increases, and therefore, there arises a problem that it is difficult to peel the glass film from the support glass.

In order to solve the above problem, for example, patent document 3 proposes the following method: when peeling a support body composed of a support glass substrate and a resin layer from an electronic device with a support body in which the resin layer having releasability is fixed to the support glass substrate and is closely attached to the glass substrate, a cutter is inserted into the interface between the resin layer of the support body and the glass substrate, thereby peeling the support body from the electronic device including the glass substrate.

In order to solve the above problem, for example, patent document 4 proposes a glass film laminate in which: the support glass is laminated so as to extend from the glass film, and a thin portion is provided at an edge of the support glass, and at least a part of the edge of the glass film is separated from the support glass at the thin portion.

Prior art documents

Patent document

Patent document 1: japanese laid-open patent application No. 2010-132531

Patent document 2: international publication No. 2011/048979

Patent document 3: japanese patent laid-open publication No. 2013-147325

Patent document 4: japanese laid-open patent publication No. 2012-131664

Disclosure of Invention

Problems to be solved by the invention

However, when it is desired to insert a cutter between the glass film and the support body to start peeling as described in patent document 3, it is necessary to check the position of the inserted cutter each time and move the cutter based on the detection result. Therefore, the required mechanism is complicated. In addition, when the glass film and the support body are in close contact with each other over the end portions thereof, there is no gap in which the cutter is inserted in the interface between the glass film and the support body, and it is necessary to press the cutter into the interface with a strong force. When the cutter is pressed into the interface in this manner, the end portion of the glass film may be damaged by the pressing force acting on the glass film.

On the other hand, in patent document 4, since the thin portion is provided at the end portion of the support glass and a part of the edge of the glass film is separated from the support glass by the thin portion, it is considered that the glass film can be easily gripped and can be relatively easily peeled without breaking the glass film. However, this method requires special processing of a part of the support glass in advance, which increases processing cost. Further, in some cases, a solvent such as a chemical liquid is used in a process related to the production of an electronic device, and if there is a gap between the glass film and the support glass in the state of the laminate, the solvent enters the gap and is fixed, and there is a problem that the glass film is broken when the glass film is peeled from the support glass, and the applicable range is limited.

In view of the above, the present specification has defined as a first technical problem to be solved by the present invention a glass film to be peeled from a support simply at low cost regardless of the type of process involved in the production.

In view of the above circumstances, the present specification has set forth a second technical problem to be solved by the present invention, which is an electronic device including a glass film that is easily and inexpensively peeled from a support regardless of the type of processing involved in the manufacturing.

Means for solving the problems

The first technical problem is solved by a method for producing a glass film according to the present invention. That is, the manufacturing method relates to a method for manufacturing a glass film, including: a laminate forming step of forming a laminate including a glass film by laminating the glass film and a support for supporting the glass film so that the support protrudes from the glass film; a manufacturing-related processing step of performing manufacturing-related processing on the laminated body; and a peeling step of peeling the glass film from the support in the peeling step after the production-related treatment step, wherein the peeling step includes: a peeling starting point portion production step of peeling a part of the glass film from the support to produce a peeling starting point portion serving as a starting point when peeling the glass film over the entire surface of the glass film; and a peeling and advancing step of advancing the peeling of the glass film from the support using the peeling start point portion as a start point, the peeling start point portion producing step including: a fulcrum forming step of providing a first fulcrum for supporting the support at a corner portion of the support protruding from the glass film, and providing a second fulcrum for supporting the laminate at a position spaced apart from the first fulcrum; a concave deforming step of providing an external force acting point on which an external force applying member acts between the first fulcrum and the second fulcrum, thereby deforming a part of the laminate into a concave shape so as to generate a concave portion on the support body side; and an insertion step of inserting an insertion member between the glass film and the support body while the portion of the laminate is deformed into a concave shape, thereby peeling off the portion of the glass film. The "treatment related to production" as referred to herein includes not only a treatment in which a certain processing is directly performed on the glass film, but also a treatment for indirectly bringing the glass film or a device including the glass film close to a final product (shipped state), such as mounting of other members, cleaning of the surface of the glass film, and the like.

In the present invention, the first fulcrum is provided at the corner of the support protruding from the glass film, the second fulcrum is provided at a position spaced apart from the first fulcrum, and the point of action of external force is provided between the two fulcrums, whereby a part of the laminate is deformed into a concave shape. This can increase the shearing force generated by the difference in curvature between the support and the glass film, and can easily peel off a part of the glass film from the support in the subsequent insertion step. Further, by deforming a part of the laminate into a concave shape so that a concave portion is formed on the support body side, a large bending stress (compressive stress) acts on the support body side which is easily formed thicker than the glass film (the restriction on the thickness dimension is small) when the concave shape of the laminate is deformed. This can prevent the glass film and the support from being damaged by an excessive load applied to them. Further, since the insertion member is inserted between the support and the glass film after a part of the laminate is deformed into a concave shape, there is no problem in that the amount of deformation of the laminate is not increased while the insertion member is inserted. Therefore, it is possible to prevent the glass film and the support from being damaged when the peeling start point portion is formed by avoiding an excessive load from being applied to the glass film and the support.

In the method for producing a glass film according to the present invention, the laminate may be placed on the placing table such that the support is located on the upper side and the glass film is located on the lower side, at least a corner portion of the support may be protruded from the placing surface of the placing table, and a second fulcrum may be provided by an end portion of the placing surface.

If the second fulcrum is provided in this manner, the second fulcrum can be easily provided simply by placing the laminate on the mounting table. Further, the form of the second supporting point can be adjusted only by changing the shape of the end portion of the mounting surface. Therefore, the concave deformation of a part of the laminate can be controlled relatively easily.

In the method for producing a glass film according to the present invention, the first support point may be provided by an insertion member.

When the first fulcrum is provided in this manner, the first fulcrum can be easily provided as in the case where the second fulcrum is provided through the end of the placement surface. In addition, in the insertion step, since the insertion member itself functions as a formation member of the first fulcrum, the position of the first fulcrum also advances in the advancing direction of the separation as the insertion member moves after the start of insertion. This makes it possible to maintain the insertion mode of the insertion member in a constant state, and to smoothly perform the operation of forming the peeling starting point portion. Of course, the insertion member also serves as a forming member of the first fulcrum, which contributes to reduction in the number of components, and is therefore preferable in view of equipment cost.

In the method for producing a glass film according to the present invention, the suction member may be used as the external force applying member, and the suction member may be moved in a direction away from the support body by sucking between the first fulcrum and the second fulcrum from the glass film side.

Alternatively, in the method for producing a glass film according to the present invention, the pressing member may be used as the external force applying member, and the pressing member may press the gap between the first fulcrum and the second fulcrum from the support side toward the glass film side.

By moving the adsorbing member in the direction away from the support after adsorbing between the first fulcrum and the second fulcrum as described above, or by pressing between the first fulcrum and the second fulcrum from the support side toward the glass film side by the pressing member, it is possible to provide the point of action of the external force in the direction away from the support in the thickness direction of the glass film, at a position (for example, an intermediate point between the first fulcrum and the second fulcrum) suitable for deforming a part of the laminate into a concave shape, without applying an excessive load to the glass film or the support. Therefore, the concave deformation of the laminate can be stably generated. In particular, when the suction member is moved in a direction away from the support (the laminate is pulled by the suction member) after a part of the laminate is sucked by the suction member and deformed into a concave shape, it is possible to avoid the case where the external force applying member continues to remain in the concave portion formed on the support side. Therefore, the glass film is deformed into the concave shape after the insertion of the insertion member is started, and the insertion member can be smoothly inserted until the peeling start point portion is formed while avoiding interference between the insertion member and the external force applying member. Further, by deforming a part of the laminate into a concave shape so as to form a concave portion on the support body side, a reaction force (restoring force) in an orientation to return to a flat state before deformation into a concave shape acts on the support body and the glass film. Therefore, when the suction member sucks the glass film side, the restoring force generated in the glass film is canceled by the downward pulling force generated by the suction member, and as a result, the above-described restoring force acts only on the support side. In this case, for example, the insertion member is moved in the planar direction of the mounting surface after the insertion of the insertion member between the glass film and the support body is started in a state where the laminate is supported flatly by the mounting surface and a part of the laminate is deformed into a concave shape.

In the method for producing a glass film according to the present invention, the wedge-shaped member may be used as the insertion member, and the wedge-shaped member may be inserted between the glass film and the support body by setting an angle formed between an insertion direction of the wedge-shaped member and a blade edge direction of the wedge-shaped member to 20 ° or more and 45 ° or less, and preferably 20 ° or more and 30 ° or less.

When the wedge member is used as the insertion member as described above, the wedge member can be inserted without applying an excessive load to the glass film and the support body by determining the relationship between the shape of the cutting edge of the wedge member and the insertion direction, and the operation of producing the peeling starting point portion can be smoothly performed.

In the method for producing a glass film according to the present invention, the shortest distance from the first fulcrum to the second fulcrum may be set to 30mm or more and 200mm or less, preferably 30mm or more and 150mm or less, and more preferably 50mm or more and 100mm or less. In the case where a plurality of second supporting points are present, such as when the second supporting points are provided at the end portions of the placement surface as described above, the linear distance between the first supporting point and one of the plurality of second supporting points, which is the shortest distance from the first supporting point, is treated as the "shortest distance from the first supporting point to the second supporting point".

In this way, by deforming a part of the laminate into a concave shape in a state where the distance between the fulcrums of the laminate to be deformed into a concave shape is set, it is possible to efficiently and stably start peeling of the glass film by the insertion member from the corner of the laminate. That is, this is because if the distance between the fulcrums is too long, the peeling start force (restoring force) due to the concave deformation cannot be sufficiently applied to the corner, and if the distance between the fulcrums is too short, the possibility of breakage of the glass film due to excessive force applied due to the concave deformation increases.

In the method for producing a glass film according to the present invention, the maximum depth dimension of the concave portion formed on the support side while the laminate is partially deformed into a concave shape may be set to 1mm or more and 5mm or less, and preferably 2mm or more and 4mm or less.

In this way, by setting the degree of concave deformation with respect to a part of the laminate, peeling of the glass film by the insertion operation of the insertion member can be efficiently and stably started from the corner portion of the laminate. Namely, this is because: if the degree of concave deformation is too small (the maximum depth dimension of the concave portion is too small), a peeling start force (restoring force) due to concave deformation cannot be sufficiently applied to the corner portion, and it is difficult to smoothly insert the insertion member. Alternatively, this is because: if the degree of the concave deformation is too large (the maximum depth dimension is too large), the glass film may be damaged.

In the method for producing a glass film according to the present invention, the movement distance of the insertion member from the start of insertion between the glass film and the support body may be 5mm or more and 50mm or less, and preferably 10mm or more and 30mm or less.

In this way, by setting the moving distance of the insertion member from the start of the insertion operation, the insertion member can be inserted without applying an excessive load to the glass film and the support, and the operation of creating the peeling starting point portion can be performed smoothly.

In the method for producing a glass film according to the present invention, the support may be a plate-like glass. In this case, the laminate may be formed by directly adhering the plate-shaped glass and the glass film to each other.

By using the plate-like glass as the support, a support having excellent surface accuracy can be produced at low cost. In addition, by directly bringing the plate-shaped glass having excellent surface precision into close contact with the glass film in this manner, the glass film can be fixed to the support without being displaced, and at the same time, the glass film can be reliably and safely peeled from the plate-shaped glass as the support by the present invention.

The second technical problem is solved by a method for manufacturing an electronic device including a glass film according to the present invention. That is, the manufacturing method relates to a manufacturing method of an electronic device, including: a laminate forming step of forming a laminate including a glass film by laminating the glass film and a support for supporting the glass film so that the support protrudes from the glass film; a mounting step of mounting an electronic device element on the glass film of the laminate to form an electronic device with a support; and a peeling step of peeling the electronic device including the glass film from the support of the electronic device with the support after the mounting step, wherein the peeling step includes: a peeling starting point portion production step of peeling a part of the glass film from the support to produce a peeling starting point portion serving as a starting point when peeling the glass film over the entire surface of the glass film; and a peeling and advancing step of advancing the electronic device to peel from the support body using the peeling start point portion as a start point, the peeling start point portion creating step including: a fulcrum forming step of providing a first fulcrum for supporting the support at a corner portion of the support protruding from the glass film, and providing a second fulcrum for supporting the electronic device at a position spaced apart from the first fulcrum; a concave deforming step of providing an external force acting point on which an external force applying member acts between the first fulcrum and the second fulcrum, thereby deforming a part of the laminate into a concave shape so as to generate a concave portion on the support body side; and an insertion step of inserting an insertion member between the glass film and the support body while the portion of the laminate is deformed into a concave shape, thereby peeling off the portion of the glass film.

In this way, when the electronic device including the glass film is peeled from the support of the electronic device with the support, in the present invention, the portion of the laminate is deformed into a concave shape by providing the first fulcrum at the corner of the support protruding from the glass film, providing the second fulcrum at a position spaced apart from the first fulcrum, and providing the point of action of external force between the both fulcrums, so that the portion of the laminate can be deformed with a curvature larger than that of the conventional one. This can increase the shearing force generated by the difference in curvature between the support and the glass film, and can easily peel off a part of the glass film from the support in the subsequent insertion step. Further, by deforming a part of the laminate into a concave shape so that a concave portion is formed on the support body side, a large bending stress (compressive stress) acts on the support body side which is easily formed thicker than the glass film (the restriction on the thickness dimension is small) when the concave shape of the laminate is deformed. This can prevent the glass film and the support from being damaged by an excessive load applied to them. Further, since the insertion member is inserted between the support and the glass film after a part of the laminate is deformed into a concave shape, there is no problem in that the amount of deformation of the laminate is not increased while the insertion member is inserted. Therefore, it is possible to prevent the glass film and the support from being damaged when the peeling start point portion is formed by avoiding an excessive load from being applied to the glass film and the support. Thus, according to the present invention, the electronic device including the glass film can be safely separated from the support without applying an excessive load to the glass film or the like.

Effects of the invention

As described above, according to the present invention, the glass film can be peeled from the support simply and at low cost regardless of the type of the process related to the production.

As described above, according to the present invention, an electronic device including a glass film can be peeled from a support simply and at low cost regardless of the type of processing related to production.

Drawings

Fig. 1 is a flowchart showing steps of a method for manufacturing an electronic device including a glass film according to a first embodiment of the present invention.

Fig. 2 is a flowchart showing details of the peeling step shown in fig. 1.

Fig. 3 is a flowchart showing details of the peeling starting point portion creation process shown in fig. 2.

Fig. 4 is a cross-sectional view of a laminate including a glass film.

Fig. 5 is a plan view of the laminate shown in fig. 4.

Fig. 6 is a cross-sectional view of an organic E L panel with a support body in which an organic E L element as an electronic device element is mounted on the laminate shown in fig. 4.

Fig. 7 is a plan view of a glass film peeling device according to a first embodiment of the present invention.

FIG. 8 is a sectional view of a main portion A-A of the peeling starting point portion forming apparatus shown in FIG. 7.

Fig. 9 is a main-part cross-sectional view for explaining an example of the operation of creating the peeling starting point using the peeling starting point creating apparatus shown in fig. 7, and is a view showing a state in which the glass film is sucked by the suction member.

Fig. 10 is a main-part cross-sectional view for explaining an example of the operation of producing the separation starting point using the separation starting point producing device shown in fig. 7, and is a view showing a state in which the suction member is lowered to pull a part of the laminate in a direction away from the support.

Fig. 11 is a main-part cross-sectional view for explaining an example of the operation of creating a peeling starting point using the peeling starting point creating apparatus shown in fig. 7, and is a view showing a state in which the insertion operation of the insertion member is started.

Fig. 12 is a main-part cross-sectional view for explaining an example of the operation of creating the peeling starting point using the peeling starting point creating apparatus shown in fig. 7, and is a view showing a state in which the insertion member is moved in a predetermined direction after the insertion operation of the insertion member is started.

Fig. 13 is a sectional view of a main portion for explaining an example of a production operation of a peeling starting point portion using the peeling starting point portion production apparatus shown in fig. 7, and is a view showing a state where the peeling starting point portion is produced by an insertion operation of an insertion member.

Fig. 14 is a main-part cross-sectional view for explaining an example of a peeling advance operation using the peeling advance device shown in fig. 7, and is a view showing a state in which a support is sucked by a plurality of suction pads.

Fig. 15 is a sectional view of a main portion for explaining an example of a peeling advance operation using the peeling advance device shown in fig. 7, and is a view showing a state in which the suction pad is sequentially raised from the peeling start point side.

Fig. 16 is a main-part cross-sectional view for explaining an example of a peeling and pushing operation using the peeling and pushing device shown in fig. 7, and is a view showing a state in which the glass film is peeled from the support over the entire surface thereof.

Fig. 17 is a sectional view of a main portion of a peeling starting point portion creation apparatus according to a second embodiment of the present invention.

Fig. 18 is a sectional view of a main portion for explaining an example of a production operation of the peeling starting point portion using the peeling starting point portion producing device shown in fig. 17, and is a view showing a state in which the pressing member is lowered to be brought into contact with the support body.

Fig. 19 is a sectional view of a main portion for explaining an example of a production operation of the peeling starting point portion using the peeling starting point portion producing device shown in fig. 17, and is a view showing a state in which the pressing member is further lowered from a state of being in contact with the support body.

Fig. 20 is a main-part cross-sectional view for explaining an example of the operation of creating a peeling starting point using the peeling starting point creating apparatus shown in fig. 17, and is a view showing a state in which the insertion operation of the insertion member is started.

Fig. 21 is a plan view of a separation starting point portion creation device according to a third embodiment of the present invention.

Fig. 22 is a cross-sectional view of a liquid crystal panel with a support body when the liquid crystal panel is manufactured as an electronic device to which the present invention is applied.

Detailed Description

A first embodiment of a method for manufacturing an electronic device including a glass film according to the present invention will be described below with reference to fig. 1 to 16, and this embodiment will be described by taking as an example a case where, when an organic E L panel serving as an electronic device is manufactured, the organic E L panel with a support attached thereto is separated into an organic E L panel and a support by peeling the glass film from the support.

As shown in fig. 1, a method for manufacturing an electronic device according to an embodiment of the present invention includes: a laminate forming step S1 of forming a laminate including a glass film in the laminate forming step S1; a mounting step S2 of forming an electronic device with a support by mounting an electronic device element on the glass film in association with heating of the glass film in the mounting step S2; and a peeling step S3 of peeling the electronic device including the glass film from the support of the electronic device with a support in the peeling step S3.

As shown in fig. 2, the peeling step S3 includes: a peeling starting point portion producing step S31 of producing a peeling starting point portion serving as a starting point when the glass film is peeled off over the entire surface of the glass film by peeling off a part of the glass film from the support in the peeling starting point portion producing step S31; and a peel advancing step S32 of advancing the electronic device to peel from the support body with the peel starting point portion as a starting point in the peel advancing step S32, wherein the peel starting point portion creating step S31 includes, as shown in fig. 3: a fulcrum forming step S311 of providing a first fulcrum for supporting the support at a corner portion of the support protruding from the glass film, and providing a second fulcrum for supporting the electronic device at a position spaced apart from the first fulcrum; a concave deforming step S312 in which a part of the laminate is deformed into a concave shape so that a concave portion is generated on the support body side in the concave deforming step S312; and an insertion step S313, in which the glass film is partially peeled off by inserting an insertion member between the glass film and the support body in the insertion step S313. Hereinafter, each step will be described in detail.

(S1) laminate Forming Process

First, as shown in fig. 4, a glass film 2 is laminated on a support 1 to form a laminated body 3.

Here, the glass film 2 is formed of, for example, silicate glass, silica glass, or the like, preferably borosilicate glass, and more preferably alkali-free glass. When the glass film 2 contains an alkali component, there is a possibility that cations are dropped off from the surface, and a phenomenon called alkali discharge (japanese: ソ - ダ blow き) occurs. In this case, a portion that is rough in structure is generated in the glass film 2, and if the glass film 2 is used in a state in which the glass film 2 is bent (including concave deformation), the portion that is rough may be damaged due to aging, starting from the rough portion. For the above reasons, when the glass film 2 may be used in a non-flat state, the glass film 2 is preferably formed of an alkali-free glass.

The alkali-free glass referred to herein means a glass containing substantially no alkali component (alkali metal oxide), specifically, a glass having an alkali component of 3000ppm or less. Of course, from the viewpoint of preventing or reducing the deterioration even in a slight amount due to the above reasons, the glass is preferably 1000ppm or less, more preferably 500ppm or less, and still more preferably 300ppm or less.

The thickness of the glass film 2 is set to 300 μm or less, more preferably 200 μm or less, and still more preferably 100 μm or less. The lower limit of the thickness dimension can be set without particular limitation, but is set to 1 μm or more, preferably 5 μm or more, in consideration of handling properties after molding (at the time of lamination to the support 1, at the time of peeling, or the like).

The support 1 is a plate-like glass in the present embodiment, and is formed of a known glass such as a silicate glass, a silica glass, a borosilicate glass, an alkali-free glass, or the like, as in the case of the glass film 2, but in the processing related to the production of electronic devices involving heating (in the mounting step S2 in the present embodiment), it is preferable that the difference in linear expansion coefficient between the support 1 and the glass film 2 in the range of 30 to 380 ℃ be 5 × 10 from the viewpoint of preventing unnecessary deformation and breakage of the glass film 2 due to the difference in thermal expansion as much as possible^-7The type of glass is selected so as to be within/° c. In this case, the support 1 and the glass film 2 are preferably formed of the same kind of glass.

The thickness of the support 1 is not particularly limited as long as the handling property of the glass film 2 can be improved, and is set to be the same level as the thickness of the glass film 2 or equal to or greater than the thickness of the glass film 2. Specifically, the thickness of the support 1 is set to 300 μm or more, preferably 400 μm or more. The upper limit of the thickness dimension can be set without particular limitation, but is preferably limited to a thickness dimension to such an extent that the support 1 can withstand bending (concave deformation) described later. Specifically, the thickness may be set to 1000 μm or less, preferably 700 μm or less. Alternatively, the thickness may be set to 500 μm or less.

The support 1 and the glass film 2 are formed by a known forming method such as a down-draw method, and preferably by an overflow down-draw method. Further, the molding may be performed by a float method, a slit draw-down method, a rolling method, a drawing method, or the like. If necessary, the thickness of the glass primary molded body may be set to a thickness of less than 100 μm by performing secondary processing (redrawing to draw the glass primary molded body).

In the state of the laminate 3, the support 1 and the glass film 2 are fixed to such an extent that they can be peeled off from each other. In the present embodiment, the plate-like glass as the support 1 and the glass film 2 are directly adhered to each other without interposing an adhesive or the like therebetween, thereby achieving mutual fixation.

At this time, both the surface roughness Ra of the surface 2a (lower surface in fig. 4) on the support 1 side of the glass film 2 and the surface roughness Ra of the surface 1a (upper surface in fig. 4) on the glass film 2 side of the support 1 are set to 2.0nm or less. By setting the surface roughness Ra of each of the surfaces 1a and 2a to the above range, the support 1 and the glass film 2 can be laminated (to form the laminated body 3) in a state of being fixed to each other without being positionally displaced. Of course, from the viewpoint of improving the adhesion, it is preferably set to 1.0nm or less, and more preferably set to 0.2nm or less.

On the other hand, the surface roughness Ra of the surface 2b of the glass film 2 on the side opposite to the support 1 is not particularly limited, and is preferably 2.0nm or less, more preferably 1.0nm or less, and even more preferably 0.2nm or less, because it is a target surface to be subjected to the electronic device-related processing such as film formation in the mounting step S2 described later.

In addition, from the viewpoint of protecting the edge portion of the glass film 2, the support 1 protrudes from the glass film 2 in a state where the glass film 2 and the support 1 are laminated (fig. 4). In this case, the amount of protrusion of the support 1 from the glass film 2 is set to, for example, 0.5mm or more and 10mm or less, and preferably 3mm or more and 5mm or less. By reducing the amount of protrusion of the support body 1 (about 10mm at maximum) as described above, the glass film 2 having a relatively large area can be supported efficiently over the entire surface.

In the present embodiment, as shown in fig. 5, both the support 1 and the glass film 2 have a rectangular shape. Further, the support 1 protrudes from the glass film 2 at the corner 4 of the support 1 because the support 1 protrudes from the glass film 2 over the entire periphery of the laminate 3 in which the glass film 2 is laminated on the support 1. In the present embodiment, the support 1 is shown as protruding from the glass film 2 at all four edges of the laminate 3, but it is needless to say that the support 1 may be protruding from the glass film 2 at three edges to one edge. In this case, it is preferable that the end face of the glass film 2 coincides with the end face of the support 1 at the edge of the non-protruding side.

In the formation of the laminate 3, the lamination operation may be performed under reduced pressure. This can reduce or eliminate air bubbles generated (remaining) between the glass film 2 and the support 1 when the glass film 2 is laminated on the support 1.

(S2) mounting step

As described above, after the laminate 3 including the glass film 2 is formed, the laminate 3 is subjected to a process related to the manufacture of an electronic device accompanied by heating, specifically, the mounting of the organic E L element 5 as an element of the electronic device is performed, whereby, as shown in fig. 6, the organic E L element 5 is formed on the surface 2b of the glass film 2 on the side opposite to the support 1 forming a part of the laminate 3, and further, the organic E L element 5 is sealed by placing the glass cover 6 on the organic E L element 5 and fixing the peripheral edge of the glass cover 6 to the glass film 2, whereby the organic E L panel 8 with a support is formed in a state where the support 1 is fixed to the organic E L panel 7 as an electronic device.

Here, the thickness of the glass cover 6 is set to, for example, 300 μm or less, preferably 200 μm or less, and more preferably 100 μm or less. By setting the thickness of the glass cover 6 in this manner, the glass cover 6 can have appropriate flexibility.

The organic E L elements 5 may be mounted on the glass film 2 in any manner, for example, by a known film forming method such as CVD or sputtering, and the organic E L elements 5 (not shown in detail) may be formed by forming an anode layer, a hole transport layer, a light emitting layer, an electron transport layer, a cathode layer, and the like in this order on the surface 2b of the glass film 2 on the side opposite to the support 1. in this case, the glass cover 6 may be fixed to the glass film 2 by any fixing means such as a known laser sealing technique, and in this case, the film forming process by CVD or sputtering is a process related to the production of an electronic device (organic E L panel 7) accompanied by heating, and therefore, the glass film 2 is heated by forming the organic E L elements 5 on the surface 2b of the glass film 2 on the side opposite to the support 1 as described above, and the glass film 2 is newly bonded to the

glass support

2 and 1 by this heating, and the force of the glass film 2 is increased as compared to the laminate when the glass film is laminated (the support 2 is formed).

In the embodiment shown in fig. 6, the glass cover 6 and the glass film 2 are directly fixed, but the glass cover 6 may be adhesively fixed to the glass film 2 by using a known frit, a separator, or the like (not shown). Alternatively, the support 1 (not shown) may be provided to the glass cover 6, and the present invention may be applied to the case where the glass cover 6 is peeled off from the support 1.

(S3) peeling step

In this way, after the organic E L panel 8 with a support is formed, the organic E L panel 7 (fig. 1) including the glass film 2 is peeled from the support 1 of the organic E L panel 8 with a support, fig. 7 shows a plan view of the peeling apparatus 10 for performing the peeling, and the peeling apparatus 10 is provided with the peeling starting point producing device 11 and the peeling advancing device 12, so that the peeling starting point producing device 11 is provided with the mounting table 13 on which the organic E L panel 8 with a support can be mounted, the concave deformation imparting portion 14 for imparting concave deformation to a part of the laminate 3 to be subjected to concave deformation (the protruding region 3a in the present embodiment), and the inserting mechanism 15, and it is noted that, after fig. 7, the illustration of the organic E L elements 5 and the glass cover 6 included in the organic E L panel 8 with a support is omitted.

The mounting table 13 is constituted by a flat table, for example, and can support the supported organic E L panel 8 including the laminate 3 by the flat mounting surface 16. in the present embodiment, the laminate 3 is mounted on the mounting surface 16 so that the mounting surface 16 is in contact with the surface of the glass film 2, that is, as shown in fig. 8, so that the support 1 is positioned on the upper side and the glass film 2 is positioned on the lower side, and thus the supported organic E L panel 8 including the laminate 3 can be supported, whereby, although not shown, in the case where the organic E L element 5 and the glass cover 6 are mounted on the glass film 2 as in the present embodiment, the mounting surface 16 may be formed in a shape capable of supporting the organic E L element 5 and the glass cover 6. of course, the mounting surface 16 may be formed in a shape capable of supporting only the peripheral edge portions of one or both of the glass film 2 (the glass cover 6 in the present embodiment) and the support 1. in order to perform the peeling step S57, the glass film mounting surface 16 may be formed so that the glass film mounting surface 16 (glass film mounting surface) can be adsorbed by the glass film mounting surface 367).

In the present embodiment, the concave distortion imparting portion 14 includes: a mounting surface 16; a first support point forming member 17 that provides a first support point P1 for supporting the support body 1 at a corner 4 of the support body 1 that extends from the placement surface 16 of the laminate 3; and an external force applying member 18 that applies an external force to the protruding region 3a of the stacked body 3.

In the present embodiment, the mounting surface 16 has a rectangular shape as a whole based on the laminate 3 to be supported (the organic E L panel 8 with a support), that is, a shape in which one corner is absent, whereby, in a state in which the organic E L panel 8 with a support is mounted on the mounting surface 16, the entire region of the organic E L panel 8 with a support except for one corner 4 is supported by the mounting surface 16 and a part of the region including the corner 4 is extended (see the lower left side of fig. 7), whereby, in this case, the end 16a of the mounting surface 16 on the side from which the corner 4 is extended becomes a second fulcrum forming member provided with a second fulcrum P2 supporting the organic E L panel 8 with a support at a position apart from the first fulcrum P1.

The first support point forming member 17 can support the corner 4 of the laminate 3 constituting the organic E L panel 8 with a support, and in the present embodiment, an insertion member (wedge member 19) described later is used as the first support point forming member 17, and in the case where the laminate 3 is constituted in a state where the support 1 is protruded from the glass film 2 (see fig. 5), the first support point forming member 17 can support the surface 1a on the glass film 2 side of the support 1 protruded from the glass film 2 at the corner 4, in other words, the first support point forming member 17 is provided with a first support point P1 for supporting the support 1 at the corner 4 of the support 1.

The external force applying member 18 is disposed between a first fulcrum P1 formed by the first fulcrum forming member 17 and a second fulcrum P2 formed by an end 16a of the placement surface 16 as a second fulcrum forming member. In the present embodiment, the external force applying member 18 includes: an adsorbing member 20 that can adsorb onto a surface 2b of the glass film 2 on the side opposite to the support 1 (actually, a surface of the glass cover 6 not shown); and a lifting member 21 capable of lifting and lowering the suction member 20 in a direction normal to the mounting surface 16, that is, in the thickness direction a of the stacked body 3 mounted on the mounting surface 16.

In the present embodiment, the insertion mechanism 15 includes: a wedge member 19 as an insertion member; and a slide member 22 that can slide the wedge-shaped member 19 in a direction parallel to the mounting surface 16 of the mounting table 13, that is, in a direction along the plane of the stacked body 3 in a state mounted on the mounting surface 16. In the present embodiment, the wedge member 19 is configured to be slidable in a direction passing through the top of the corner 4 of the support body 1 and the virtual center line of the external force applying member 18 (in other words, in a direction along the diagonal line of the glass film 2) (see fig. 7).

The posture of the wedge-shaped member 19 and the sliding direction of the sliding member 22 are set so that an angle (hereinafter, also referred to as a wedge angle) θ formed between the cutting edge direction c of the wedge-shaped member 19 and the insertion direction b of the wedge-shaped member 19 through the sliding member 22 is 20 ° or more and 45 ° or less, preferably 20 ° or more and 30 ° or less.

Next, an example of the operation of creating a peeling starting point using the peeling starting point creating apparatus 11 configured as described above will be described with reference to fig. 7 to 13.

(S31) peeling starting point portion producing step

First, as shown in fig. 7 and 8, the organic E L panel 8 with a support is placed on the placing surface 16 of the placing table 13, and the wedge member 19 as the first supporting point forming member 17 is disposed at a position capable of supporting the corner 4 (i.e., the corner 4 of the support 1) of the laminate 3 forming a part of the organic E L panel 8 with a support from the placing surface 16, whereby the organic E L panel 8 with a support including the laminate 3 is in a state of being supported by the placing surface 16 and the wedge member 19, specifically, the wedge member 19 is disposed at a position where the tip 19a of the wedge member 19 is brought into contact with the support 1 at the top of the corner 4, whereby the point where the tip 19a of the wedge member 19 is brought into contact with the support 1 is set as the first supporting point P1, and the plurality of contact points where the end 16a of the placing surface 16 is brought into contact with the glass film 2 (the glass cover glass 6 not shown in the present embodiment) are set as the second supporting point P1, and the support point P3 is set as the support point of the support 3, and the support area where the organic E3 with the support is deformed, thereby forming the flat panel with the support having the support with the support 3, the support having the support 3, the support being in the support area with the support having the support 3, the support point P3, the support with the support being in the flat supporting point of the flat support area with the.

At this time, the shortest distance (fig. 7) from the position of the first fulcrum forming member 17 for supporting the corner portion 4 (i.e., the first fulcrum P1) to the position of the end portion 16a of the mounting surface 16 for supporting the organic E L panel 8 with a tape support (i.e., the second fulcrum P2) is set to, for example, 30mm to 200mm, preferably 30mm to 150mm, and more preferably 50mm to 100mm, and in a state where the shape of the mounting surface 16 is set and the organic E L panel 8 with a tape support is mounted as in the present illustrative example, the straight-line distance from the position of the first fulcrum forming member 17 for supporting the support 1 (the first fulcrum P1 shown in fig. 7) to the second fulcrum P2 (fig. 7) located at the center in the longitudinal direction of the end portion 16a among the plurality of second fulcrum P2 provided at the end portion 16a of the mounting surface 16 is set to 30mm to 200 mm.

Next, in a state where the organic E L panel 8 with the support of the laminate 3 is supported from below by the first fulcrum P1 and the second fulcrum P2, the adsorbing member 20 is raised in the direction of the arrow a by the raising and lowering member 21, the adsorbing member 20 is brought into contact with the surface 2b of the glass film 2 (the surface of the glass cover 6 not shown in the present embodiment) positioned on the lower side of the laminate 3 (fig. 9), then the adsorbing member 20 is adsorbed to the surface 2b of the glass film 2 by suction or the like from this state, and at the stage where the glass film 2 is adsorbed, the organic E L panel 8 with the support of the laminate 3 remains supported flat.

After the glass film 2 is adsorbed in this manner, as shown in fig. 10, the adsorbing member 20 is lowered in the direction of the arrow a by the raising and lowering member 21, and a downward tensile force F is applied to the region of the organic E L panel 8 with a support protruding from the mounting surface 16, in other words, an operating point of the tensile force F is provided between the first fulcrum P1 formed by the first fulcrum forming member 17 (in the present embodiment, the wedge-shaped member 19) and the second fulcrum P2 formed by the end 16a of the mounting surface 16, and thereby the protruding region 3a which is a part of the laminate 3 is deformed into a concave shape so that the concave portion 3c is generated on the support 1 side (concave deformation step S312), and in the present embodiment, the protruding region 3a is deformed into a concave shape so that a circular concave portion 3c is generated at a position (fig. 7) which becomes the approximate center of gravity of the protruding region 3a, as viewed from the support 1 side in plan view.

In the state where the protruding region 3a is deformed into a concave shape as described above, the maximum depth d of the concave portion 3c formed on the support body 1 side is set to be 1mm or more and 5mm or less, and preferably 2mm or more and 4mm or less. The maximum concave deformation amount of the protruding region 3a at this time (the deformation amount in the thickness direction a at the position of the surface 1b of the support 1 where the glass film 2 is deformed most largely from the state before the concave deformation) is adjusted by, for example, the supporting position of the mounting surface 16 and the first supporting point forming member 17, the shape and the area of the protruding region 3a, and the amount of lowering H1 in the direction of the arrow a from the suction position of the suction member 20. In the case of the configuration according to the present embodiment, the maximum depth d is substantially equal to the amount of decrease H1 of the external force applying member 18 (the suction member 20). That is, the amount of decrease H1 of the adsorption member 20 is set to 1mm or more and 5mm or less, and preferably 2mm or more and 4mm or less.

While the protruding region 3a which is a part of the laminate 3 is deformed into a concave shape, the wedge-shaped member 19 starts to move in the direction along the arrow b by driving the slide member 22, and the blade edge 19a of the wedge-shaped member 19 is inserted between the support 1 and the glass film 2 which are positioned at the top of the corner 4 of the protruding region 3a (press-fit in this case). As a result, as shown in fig. 11, the upper surface 2a of the glass film 2 in close contact with the lower surface 1a of the support 1 starts to peel off from the surface 1a of the support 1 from the end 2a1 thereof. Then, by driving the slide member 22 from the state shown in fig. 11, the wedge member 19 is further moved (slid) in the arrow b direction, and the peeling region of the glass film 2 is gradually enlarged (fig. 12).

At this time, reaction forces (restoring forces f1, f2) in directions to restore the state before the support 1 and the glass film 2 are deformed into the concave shape (the state shown by the two-dot chain line in fig. 12) are generated, respectively. Therefore, when the glass film 2 side is sucked by the suction member 20, the restoring force F2 generated in the glass film 2 is canceled by the downward pulling force F generated by the suction member 20, and the above-described restoring force fl substantially acts only on the support 1 side. Therefore, according to the above-described case, the peeling region where the glass film 2 is peeled from the support 1 is also expanded, and for example, as shown in fig. 13, at the stage when the support 1 is substantially restored to the state before being deformed into a concave shape, a peeling starting point portion 9 serving as a starting point when the glass film 2 is peeled over the entire surface thereof is formed between the support 1 and the glass film 2 (insertion step S313).

(S32) peeling and advancing step

After the peeling starting point portion 9 is created in this manner, the glass film 2 is peeled from the support 1 over the entire surface thereof by pulling the holding support 1 side or the glass film 2 side away from the other side by an unillustrated suction pad or the like, or by blowing a fluid such as water toward the peeling starting point portion 9.

In the present embodiment, for example, as shown in fig. 7 and 14, the peeling of the glass film 2 is advanced by using a peeling advancing device 12 having a plurality of suction pads 23 and a driving section 24 capable of independently driving the suction pads 23 in the vertical direction a, and specifically, as shown in fig. 7, from a state in which the plurality of suction pads 23 are arranged on the upper side of the support 1, the suction pads 23 are moved downward by the driving section 24, and the upper surface 1b of the support 1 is sucked by the suction pads 23 (fig. 14). then, as shown in fig. 15, the glass film 2 is advanced along the diagonal line of the peeling film to be peeled from the support 1 by sequentially raising the suction pads 23 from the peeling starting point section 9 side, whereby the glass film 2 is peeled from the support 1 over the entire surface thereof, and the organic E L panel 8 with the support is separated into the organic E L panel 7 including the glass film 2 and the support 1 (fig. 16).

In this way, when the organic E L panel 7 as an electronic device including the glass film 2 is peeled from the support 1 of the organic E L panel 8 with a support, in the present invention, the first fulcrum P1 is provided at the corner 4 of the support 1 protruding from the glass film 2, and the second fulcrum P2 is provided at a position spaced apart from the first fulcrum P1, and an action point of an external force (tensile force F) is provided between the above-mentioned both fulcrums P1, P2, so that the protruding region 3a as a part of the laminate 3 is deformed with a larger curvature than the conventional one, whereby a shearing force generated due to a difference in curvature between the support 1 and the glass film 2 can be increased, in the subsequent insertion step S313, a part of the glass film 2 can be easily peeled from the support 1, and in addition, a part of the laminate 3 is deformed into a concave shape in such a manner that a concave portion of the glass film 2 is generated in the support 1 side, and a concave shape is formed in such a manner that a concave portion 3c is generated in the glass film 2 (glass film 2) is easily peeled off), and thus, when the glass film support 3 is inserted into the glass film 2, a glass film is too large thickness of the glass film 2 is prevented from being excessively deformed, and a glass film is too much larger glass film 2, and a glass film is prevented from being excessively deformed, and a glass film 2, and a glass film is also being excessively deformed, and a glass film laminate 2, therefore, a glass film laminate 2 is prevented from being excessively deformed, a glass film laminate 2, a glass film 2 is prevented from being excessively deformed, and a glass film 2, which is also being excessively deformed, a glass film 2 is prevented from being excessively deformed, and a glass film 2, a glass film 2.

In the present embodiment, since the first fulcrum P1 is provided by the wedge-shaped member 19, when the concave deformation of the protruding region 3a starts (fig. 10), the wedge-shaped member 19 functions as the first fulcrum forming member 17 of the protruding region 3a, and on the other hand, the wedge-shaped member 19 is already in contact with the glass film 2 and the support 1 in the state of being deformed into the concave shape (fig. 10). Therefore, the wedge-shaped member 19 can be inserted between the glass film 2 and the support 1 only by directly moving (sliding) the wedge-shaped member 19 in the insertion direction b, and the peeling start point portion 9 can be easily and reliably produced. Further, since the wedge member 19 itself functions as the first fulcrum forming member 17, the supporting position of the wedge member 19 with respect to the protruding region 3a, that is, the first fulcrum P1, also advances in the advancing direction of the peeling, that is, toward the center side in the direction along the plane of the stacked body 3, in accordance with the insertion operation of the wedge member 19. This can maintain the insertion manner of the wedge member 19 in a constant state, and can smoothly perform the operation of creating the separation starting point portion 9.

In particular, in this case, after the extended regions 3a of the laminate 3 are attracted from the glass film 2 side by the attraction members 20, the extended regions 3a are pulled downward and deformed into a concave shape, so that the external force applying member 18 can be prevented from remaining in the concave portion 3c formed on the support 1 side. Therefore, the glass film 2 can be kept deformed into the concave shape after the start of insertion of the wedge member 19, and interference between the wedge member 19 and the external force applying member 18 can be avoided, so that the insertion operation of the wedge member 19 can be smoothly advanced at a position where the glass film 2 and the support 1 can be peeled off safely and reliably, that is, until the peeling start point portion 9 is formed. When the protruding region 3a is deformed into the concave shape so that the concave portion 3c is formed on the support 1 side as described above, restoring forces f1 and f2 in directions to restore the flat state before the deformation into the concave shape act on the support 1 and the glass film 2. Therefore, when the suction member 20 sucks the glass film 2 side, the restoring force F2 generated in the glass film 2 is canceled by the downward pulling force F generated by the suction member 20, and the above-described restoring force F1 substantially acts only on the support 1 side. This makes it possible to more smoothly perform the insertion operation of the wedge member 19, and to safely and easily produce the separation starting point 9.

Although an embodiment (first embodiment) of the method for manufacturing an electronic device including a glass film according to the present invention has been described above, it is needless to say that the method for manufacturing the electronic device may be any method within the scope of the present invention.

Fig. 17 shows a cross-sectional view of a main part of a peeling starting point producing device 25 according to a second embodiment of the present invention (a cross-sectional view at the same position as the cross-sectional view of the main part a-a of the peeling device 10 shown in fig. 7). The peeling starting point portion creation device 25 arranges the suction member 20 and the elevation member 21 above the stacked body 3, that is, on the support body 1 side. The other structures are the same as those of the first embodiment, and therefore, the description thereof is omitted.

Fig. 17 to 20 show an example of the operation of creating the separation starting point 9 (separation starting point creating step S31) by using the separation starting point creating apparatus 25 having the above-described configuration.

First, as shown in fig. 17, the organic E L panel 8 with a support is placed on the placement surface 16 of the placement table 13, and the wedge member 19 is disposed at a position to support the corner 4 of the stacked body 3 protruding from the placement surface 16, which forms a part of the organic E L panel 8 with a support, whereby the organic E L panel 8 with a support including the stacked body 3 is in a state of being supported by the placement surface 16 and the wedge member 19, in the present embodiment, the wedge member 19 is disposed at a position at which the blade tip 19a is in contact with between the support 1 and the glass film 2 at the top of the corner 4, whereby the contact point between the blade tip 19a of the wedge member 19 and the corner 4, and the contact point between the end 16a of the placement surface 16 and the corner 4 are set to the first fulcrum P1 and the second fulcrum P2, respectively, and the organic E L panel 8 with a support is in a state of being supported, and the organic E L with a support has an influence on the weight of the entire supported panel 358, in addition to the flat support of the organic E L.

Next, the suction member 20 is lowered from the position shown in fig. 16 in the direction of the arrow a by the lifting member 21, and as shown in fig. 18, the suction member 20 is brought into contact with the surface 1b of the support body 1 located on the upper side of the stacked body 3. Then, from this state, the suction member 20 is continuously lowered in the direction of the arrow a, and a downward pressing force G is applied to the stacked body 3. As a result, as shown in fig. 19, the protruding region 3a is deformed into a concave shape so that the concave portion 3c is generated on the support body 1 side by providing an operating point of the pressing force G between the first fulcrum P1 provided by the first fulcrum forming member 17 and the second fulcrum P2 provided by the end portion 16a of the mounting surface 16.

Then, the wedge member 19 starts to move in the direction along the arrow b by driving the slide member 22 after the protruding region 3a is deformed into the concave shape, and the edge of the wedge member 19 is brought into contact with (e.g., pressed against) the support 1 and the glass film 2 at the top of the corner portion 4. Thereby, as shown in fig. 20, the insertion of the wedge member 19 into the space between the support 1 and the glass film 2 is started, and the separation region from the end portion 2a1 of the glass film 2 is expanded to a certain extent, whereby the separation start point 9 shown in fig. 13 is produced (separation start point producing step S31).

Then, after the peeling start point section 9 is produced, although not shown, the glass film 2 is peeled off from the support 1 over the entire surface thereof by holding the support 1 side or the glass film 2 side with an unillustrated suction pad or the like and pulling one side away from the other side, or by spraying a fluid such as water toward the peeling start point section 9, whereby the organic E L panel 8 with a support is separated into the organic E L panel 7 including the glass film 2 and the support 1 (peeling advancing step S32). in this case, although not shown, for example, the support 1 may be pulled upward from the peeling start point section 9 side by using a peeling advancing device 12 shown in fig. 14 capable of sucking the support 1 from above at a position not interfering with the suction member 20, thereby peeling the glass film 2 from the support 1 over the entire surface thereof.

In this way, by pressing the protruding region 3a downward from the support 1 side in the direction of the arrow a, that is, in the thickness direction of the laminate 3 placed on the placement surface 16 in a flat state, the protruding region 3a can be stably deformed into a concave shape without applying an excessive load to the glass film 2 and the support 1. Therefore, the protruding region 3a can be deformed with a larger curvature than in the conventional art, and the peeling start point portion 9 can be relatively easily formed between the support 1 and the glass film 2 by the shear force due to the difference in curvature as described above.

As in the present embodiment, the pressing force G is applied from the support body 1 side, and thus the pressing force is not necessarily limited to the suction member 20. For example, a rod-shaped member having a spherical tip may be used, and a pressing member having any shape and structure may be used as long as it does not cause a problem such as damage to the support 1 and the glass film 2.

Further, with regard to the point of action of the external force (the pulling force F, the pressing force G), in the above-described embodiment, the case where the point of action of the pulling force F or the pressing force G is provided at the intermediate position between the support position of the organic E L panel with support 8 at the corner portion 4 (the abutment position where the edge 19a of the wedge-shaped member 19 abuts against the support 1) and the end portion 16a of the mounting surface 16 has been exemplified, but it is needless to say that the point of action may be provided at other positions as well, and for example, the point of contact between the adsorbing member 20 and the support 1 or the glass film 2, that is, the point of action of the pulling force F or the pressing force G may be provided on the side closer to the corner portion 4 than the end portion 16a so that a force in the direction of separating each other is generated between the support 1 and the glass film 2 at the position closer to the.

In the above embodiment, the case where the tensile force F or the pressing force G directed downward in the direction along the thickness direction a of the stacked body 3 is applied to the protruding region 3a has been described as an example, but the protruding region 3a may be deformed into a concave shape by applying an external force in another manner. For example, although not shown, the following method may be adopted: by pressing the corner portion of the support body 1 in the protruding region 3a slightly downward from the direction of the arrow b, the protruding region 3a is deformed into a concave shape so that a concave portion 3c is generated on the support body 1 side.

In the above-described embodiment, although a member having a shape lacking one corner portion is used as the mounting surface 16, it is needless to say that the separation of the support 1 and the glass film 2 can be achieved by using a mounting surface 16 having another shape, and fig. 21 shows a plan view of the separation starting point producing device 26 according to one example (third embodiment), the separation starting point producing device 26 is formed by integrally providing the extension support portion 27 and the mounting surface 16, and the extension support portion 27 extends from both ends of the end portion 16a of the mounting surface 16 shown in fig. 7 along the edge of the laminate 3 (the organic E L panel 8 with a support) to be supported, and according to this configuration, the organic E L panel 8 with a support can be supported by the mounting surface 16, the wedge-shaped member 19 as the first support point forming member 17, and the extension support portion 27, and the projecting region 3a between the mounting surface 16, the wedge-shaped member 19, and the extension support portion 27 can be deformed into a concave shape, and therefore, the series of operations for producing the separation starting point 9 can be performed more stably.

In the above-described embodiment, the first fulcrum-forming member 17 is exemplified as the wedge-shaped member 19 and disposed at the corner 4 of the support body 1, but it goes without saying that other configurations may be employed. For example, although not shown, the following method may be adopted: the first fulcrum forming member 17 is provided separately from the wedge member 19 in a range where the first fulcrum forming member 17 does not hinder the press-fitting operation of the wedge member 19, and the wedge member 19 is brought into contact with the top of the corner portion 4 by supporting the region other than the top of the corner portion 4.

Although the second fulcrum P2 is formed in the above-described embodiment by the way of example in which the plurality of second fulcrums P2 are provided continuously by the end 16a of the mounting surface 16, it is needless to say that other methods may be employed, and for example, although not shown, a method may be employed in which the organic E L panel 8 of the tape support body is supported by a support member (a roller or the like) other than the mounting surface, the corner 4 of the support body 1 is supported by the first fulcrum forming member 17, and the second fulcrum forming member is provided separately from the support member other than the mounting surface at a position apart from the first fulcrum P1, whereby the second fulcrums P2 can be provided at any position of the organic E L panel 8 of the tape support body by any member, and the number of the second fulcrums P2 is also arbitrary, and one or a plurality of second fulcrums P2 can be provided.

In the above-described embodiment, the insertion direction of the wedge-shaped member 19 is exemplified by a method in which the wedge-shaped member 19 is slid by the slide member 22 in a direction along the planar direction of the flat layered body 3, but it goes without saying that other insertion methods may be adopted. For example, the moving direction of the wedge member 19 may be changed according to the deformation mode of the protruding region 3a after the peeling start point 9 is formed (the deformation mode at the time of peeling advance).

In the above-described embodiment, the case where (the placement surface 16 of) the placement table 13 is shared by the peeling starting point portion creation device 11 and the peeling propulsion device 12 has been described as an example, but the peeling device 10 is not limited to this example, and the peeling propulsion step S32 may be performed by creating the peeling starting point portion creation device 11 and the peeling propulsion device 12 completely independently and placing the organic E L panel 8 with a support on which the peeling starting point portion 9 has been created temporarily on the suction surface of the peeling propulsion device 12.

In the above embodiment, the case where the plate-shaped glass is used as the support 1 and the glass film 2 are directly adhered and fixed to each other is exemplified, but it is needless to say that the present invention can be applied to a laminate 3 in which the glass film 2 and the support 1 are fixed by other means. For example, the present invention may be applied to a laminate (not shown) in which a layer made of a non-glass material such as an acrylic pressure-sensitive adhesive layer, a silicone thin film layer, an inorganic thin film layer (ITO, oxide, metal, carbon), or the like, and a plate-shaped glass support 1 are laminated, and the non-glass material layer is brought into close contact with the glass film 2.

In the above description, the case of manufacturing the organic E L panel 7 as an electronic device has been exemplified, but it is needless to say that the present invention can be applied to a manufacturing method of other electronic devices as well, fig. 22 shows a cross-sectional view of the liquid crystal panel 28 with a support according to one example, this panel 28 is formed by fixing a pair of supports 1, 1 on both sides of the liquid crystal panel 29 as a final product, for example, in such a manner that a pair of laminates 3, 3 in which the supports 1 and the glass film 2 are laminated are formed (laminate forming step S1), then, a separator 30 is formed on the surface 2b of the glass film 2 of one laminate 3, this separator 30 forms a space for enclosing a liquid crystal not shown, the glass film 2 of the other laminate 3 is fixed to this separator 30 (mounting step S2), after the liquid crystal panel 28 with a support is formed in this manner, the supports 1 are peeled off one by the above peeling method (peeling step S3), the two liquid crystal panels 28 with a liquid crystal are separated into 1, 1 and one by the glass film 29, and this liquid crystal panel can be easily manufactured without breaking the liquid crystal panel 29 and the liquid crystal panel can be applied to the present invention.

Of course, when the glass film 2 itself is obtained (manufactured) as a final product, the glass film 2 can be peeled from the support 1 safely and easily without breaking the glass film 2 by applying the method for manufacturing a glass film according to the present invention.

Claims

1. A method for producing a glass film, comprising:

a laminate forming step of forming a laminate including a glass film by laminating the glass film and a support for supporting the glass film such that the support protrudes from the glass film;

a manufacturing-related processing step of performing manufacturing-related processing on the laminate; and

a peeling step of peeling the glass film from the support in the peeling step after the manufacturing-related treatment step,

the peeling step includes: a peeling starting point portion production step of peeling a part of the glass film from the support to produce a peeling starting point portion serving as a starting point when the glass film is peeled over the entire surface of the glass film; and a peeling advancing step of advancing the peeling of the glass film from the support with the peeling starting point portion as a starting point,

the method for producing a glass film is characterized in that,

the peeling starting point portion producing step includes:

a fulcrum forming step of providing a first fulcrum for supporting the support body at a corner portion of the support body protruding from the glass film, and providing a second fulcrum for supporting the laminate body at a position spaced apart from the first fulcrum;

a concave deforming step of providing an external force application point on which an external force application member is applied between the first fulcrum and the second fulcrum, thereby deforming a part of the laminate into a concave shape so as to generate a concave portion on the support body side; and

an insertion step of inserting an insertion member between the glass film and the support body while a portion of the laminate is deformed into a concave shape, thereby peeling off a portion of the glass film.

2. The method for producing a glass film according to claim 1,

the laminate is placed on a placing table such that the support body is located on the upper side and the glass film is located on the lower side, at least a corner portion of the support body is projected from a placing surface of the placing table, and the second fulcrum is provided by an end portion of the placing surface.

3. The method for producing a glass film according to claim 1 or 2,

the first fulcrum is provided with the insertion member.

4. The method for producing a glass film according to claim 1 or 2,

an attracting member is used as the external force applying member, and the attracting member attracts and holds the space between the first fulcrum and the second fulcrum from the glass film side and moves the attracting member in a direction away from the support body.

5. The method for producing a glass film according to claim 1 or 2,

a pressing member is used as the external force applying member, and the pressing member presses the gap between the first fulcrum and the second fulcrum from the support side toward the glass film side.

6. The method for producing a glass film according to claim 1 or 2,

a wedge-shaped member is used as the insertion member,

the wedge-shaped member is inserted between the glass film and the support body by setting an angle formed by an insertion direction of the wedge-shaped member and a blade edge direction of the wedge-shaped member to 20 ° or more and 45 ° or less.

7. The method for producing a glass film according to claim 1 or 2,

the shortest distance from the first fulcrum to the second fulcrum is set to be 30mm or more and 200mm or less.

8. The method for producing a glass film according to claim 1 or 2,

the maximum depth dimension of the recessed portion generated on the support side while the portion of the laminate is deformed into the recessed shape is set to be 1mm or more and 5mm or less.

9. The method for producing a glass film according to claim 1 or 2,

the movement distance of the insertion member from the start of insertion between the glass film and the support body is set to be 5mm or more and 50mm or less.

10. The method for producing a glass film according to claim 1 or 2,

the support is a plate-shaped glass, and the laminate is formed by directly bringing the plate-shaped glass into close contact with the glass film.

11. A method for manufacturing an electronic device including a glass film, comprising:

a mounting step of mounting an electronic device element on the glass film of the laminate to form an electronic device with a support; and

a peeling step of peeling the electronic device including the glass film from the support of the electronic device with a support after the mounting step,

the peeling step includes: a peeling starting point portion production step of peeling a part of the glass film from the support to produce a peeling starting point portion serving as a starting point when the glass film is peeled over the entire surface of the glass film; and a peeling advancing step of advancing the electronic device to peel from the support body with the peeling start point portion as a start point,

the method for manufacturing an electronic device including a glass film is characterized in that,

the peeling starting point portion producing step includes:

a fulcrum forming step of providing a first fulcrum for supporting the support at a corner portion of the support protruding from the glass film, and providing a second fulcrum for supporting the electronic device at a position spaced apart from the first fulcrum;