JP2018085407A - Method and device for detaching glass film, method for manufacturing glass film, and method for manufacturing electronic device including glass film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detach a glass film from a support body with safety while preventing the glass film or the support body from being broken, and to perform the detachment at a minimum cost.SOLUTION: A method for detaching a glass film 2 according to the present invention comprises: Step S31 of holding the glass film 2 by a holding member 11; Step S32 of attracting a support body 1 by a suction member 12; Step S33 of moving the suction member 12 in a first direction d1 to detach the support body 1 from the glass film 2; Step S34 of leading a member 13 for preventing reattachment into a gap 7 formed between the support body 1 and the glass film 2 as a result of the detachment; Step S35 of dissolving the state by the suction member 12 attracting the support body 1 by suction with the reattachment-preventing member 13 put in the gap; and Step S36 of moving the suction member 12 in a second direction d2 to change a position for the suction member 12 to attract by suction with respect to the support body 1.SELECTED DRAWING: Figure 15

Description

  The present invention relates to a method for peeling a glass film and a peeling apparatus therefor, a method for producing a glass film, and a method for producing an electronic device including the glass film.

  In recent years, mobile terminals such as smartphones and tablet terminals, which are rapidly spreading, are required to be thinner and lighter, and there is a demand for thinning glass substrates incorporated in these terminals. The current situation is increasing.

  Under such circumstances, plate glass thinned to a film shape (for example, plate glass having a thickness dimension of 300 μm or less) has been developed and manufactured. This type of plate glass is called a glass film and has a very flexible property because its thickness dimension is extremely small.

  By the way, when a glass substrate to be incorporated into a mobile terminal is manufactured by applying a treatment to form a transparent conductive film such as ITO on the glass film, the glass film and the support are supported for easy handling of the glass film. In some cases, a laminated body formed by laminating supporting glasses to be fixed to each other is used (see, for example, Patent Document 1). When the glass film is laminated in this manner and the above-described treatment is performed on the laminated body, the supporting glass is not used even when a single glass film having poor strength and rigidity is used. Since it acts as a reinforcing material, positioning as a laminated body can be easily performed during the above processing. In addition, since the two laminated glass sheets are firmly adhered to each other, for example, there is a merit that displacement can be effectively prevented during patterning processing of the conductive film.

  By the way, since the support glass which makes a laminated body with a glass film becomes unnecessary finally, after finishing the said process, it is necessary to make it isolate | separate from a glass film. Separation of the glass film and the support glass is usually performed by peeling one of the workpieces of the glass film and the support glass from the other workpiece in a state where they are laminated with each other. Here, Patent Document 2 proposes a peeling apparatus that is used to peel one workpiece from another while being stacked on each other.

  That is, the peeling apparatus described in Patent Document 2 is for peeling a glass plate from an adsorbing sheet on a laminate formed by laminating a glass plate corresponding to one work and an adsorbing sheet corresponding to the other work. And a plurality of suction pads for sucking glass plates. And the structure which supplies a high pressure fluid with respect to the interface of a glass plate and an adsorption sheet in the state in which the tensile force of the direction which separates the glass plate attracted | attached the glass plate was acting on the glass plate It has become. Thereby, the adhesive force at the interface is lowered by the supplied high-pressure fluid below the tensile force, and the suction pads in the rows corresponding to the places where the adhesive force is reduced are sequentially moved away from the suction sheet. The plate can be peeled from the suction sheet.

International Publication No. 2011/048979 JP2015-104800A

  However, in order to peel off the glass film by the method described in Patent Document 2, a very large number of suction pads are required. In particular, when a glass film having an extremely large area compared to the final product is manufactured for the purpose of multi-cavity and the like, it is necessary to arrange as many suction pads as possible to cover the entire surface of the glass film. This requires an extremely large number of suction pads, which inevitably increases equipment costs.

  In view of the above circumstances, in this specification, it is possible to prevent the glass film or the support from being damaged, to peel the glass film from the support safely, and to perform the peeling as low as possible. The first technical issue to be addressed.

  Further, in view of the above circumstances, in this specification, the glass film or the support is prevented from being damaged, and the electronic device including the glass film can be safely peeled from the support, and the peeling can be performed as low as possible. This is the second technical problem to be solved by the present invention.

  The solution of the first technical problem is achieved by the glass film peeling method according to the present invention. That is, this peeling method is a method for peeling a glass film on a laminate of a glass film formed by laminating a glass film and a support that supports the glass film, and the glass film and the support. A holding step of holding one of the workpieces by the holding member, an adsorption step of adsorbing the other workpiece by the adsorption member, and moving the adsorption member in the first direction away from the one workpiece, In a glass film peeling method comprising a peeling step for peeling a workpiece from one workpiece, a member for preventing the two workpieces from reattaching to a gap formed between the two workpieces by peeling. The anti-reattachment member introduction step for introducing the anti-adhesion member and the anti-adhesion member in the state where the anti-adhesion prevention member is introduced eliminate the adsorption state of the other workpiece by the adsorption member It is characterized by the point further provided with the adsorption | suction cancellation step and the adsorption | suction position change step which changes the adsorption | suction position of the adsorption | suction member with respect to the other workpiece | work by relatively moving the adsorption | suction member to the 2nd direction where peeling of a glass film advances. .

  As described above, in the present invention, in addition to the holding step of one workpiece, the adsorption step of the other workpiece, and the peeling step, the reattachment prevention member is introduced into the gap formed between the two workpieces by peeling. A step of removing the adsorption state of the other workpiece by the adsorption member in a state where the anti-reattachment member is introduced, and a relative movement of the adsorption member in the peeling progress direction (second direction) of the glass film, A suction position changing step for changing the suction position is newly provided. By comprising in this way, the other workpiece | work can be peeled off from one workpiece | work in the state which changed the re-adsorption position of the other workpiece | work to the front side of the peeling progress direction. As a result, the same adsorption member can be used repeatedly to peel off the other workpiece, so that the peeling of the glass film can be advanced, so that multiple rows of adsorption members are arranged along the peeling progress direction as in the past. It is possible to peel off the glass film with a smaller number than the above configuration. In addition, by introducing a re-adhesion prevention member into the gap formed between the two workpieces by peeling, when the suction state of the other workpiece by the suction member is canceled, one of the other workpieces already peeled off Since it can be prevented from reattaching to the workpiece, it can be peeled off stably with a small force. As described above, the glass film can be peeled safely while preventing cracking at the time of peeling, and the glass film can be peeled while keeping the equipment cost low by reducing the number of adsorbing members to be used. It becomes possible.

  In the glass film peeling method according to the present invention, the suction member may be a suction pad. In this case, the plurality of suction pads may be arranged in a line along a direction orthogonal to the second direction.

  As described above, by using the suction pad as the suction member, it is possible to easily and reliably suck only the target position and region of the other stacked workpieces. In addition, by preparing a plurality of the suction pads and arranging the plurality of suction pads in a row along a direction perpendicular to the second direction, which is the peeling progress direction of the glass film, in the second direction. Even after the movement, all of the plurality of suction pads can be arranged in a state in which they are arranged in a direction orthogonal to the peeling progress direction of the glass film. Accordingly, the adsorption operation and the peeling operation can be performed more stably.

  In the glass film peeling method according to the present invention, the reattachment preventing member may be a sheet-like member.

  Thus, by using a sheet-like member as a re-adhesion preventing member, for example, the introduction direction of the sheet-like member and its width direction dimension (the width direction here refers to a direction orthogonal to the introduction direction). By appropriately setting, a reattachment prevention member can be easily interposed over the entire gap between the region where the other workpiece is peeled off and the one workpiece. Therefore, the reattachment of the other workpiece can be reliably prevented over the entire area, and the peeling progress of the stable glass film can be achieved.

  Moreover, the peeling method of the glass film which concerns on this invention may adsorb | suck only the area | region peeled from one workpiece | work among the other workpiece | works with an adsorption | suction member.

  When the adsorption member is moved in the first direction while the other workpiece is adsorbed by the adsorption member and the other workpiece is peeled off from the one workpiece, the portion that is actually adsorbing the other workpiece by the adsorption member is already The degree of stability of the peeling mode varies greatly depending on whether it is a peeled area or a non-peeled area. Furthermore, the glass film may be broken by adsorbing the other workpiece across the boundary between the area where the adsorbing member is exfoliated and the area where it is not yet exfoliated. In view of the above points, the suction member only sucks and peels only the already peeled area of the other workpiece. This stabilizes the force required for peeling and the deformation mode of the other workpiece during peeling. Therefore, it becomes possible to prevent the glass film from cracking more securely and to peel the glass film safely.

  Moreover, the peeling method of the glass film which concerns on this invention may set the direction along the edge | side of a glass film to a 2nd direction, when a glass film makes the rectangular shape which has four sides.

  Thus, when the glass film used as peeling object makes rectangular shape, peeling of a glass film can be advanced to the direction along the edge | side by setting the direction along the edge | side to a 2nd direction. . By progressing the peeling of the glass film in this direction, the peeling of the glass film progresses so that the boundary between the already peeled area and the area not yet peeled of the glass film is always linear. Therefore, for example, as described above, the already peeled region or part of the other workpiece can be easily adsorbed by the adsorbing member. Further, in this case, by adopting a configuration in which a plurality of suction pads are arranged in a line along the direction orthogonal to the second direction as the suction member, only the vicinity of the boundary with the unpeeled region of the already peeled regions. Can be reliably adsorbed by a plurality of adsorbing pads. Therefore, it is possible to easily control the progress of peeling and peel the glass film safely and quickly.

  Further, the glass film peeling method according to the present invention repeats the re-adhesion prevention member introducing step, the suction elimination step, the suction position changing step, the suction step, and the peeling step until the glass film is completely peeled from the support. You may do it.

  As described above, by repeating a series of steps from the reattachment prevention member introducing step to the peeling step, the glass film can be surely completely peeled from the support. The glass film may be peeled off completely by another means when it is peeled to some extent from the support, but after the film is peeled to some extent (for example, 60 to 70% of the whole), the remaining adhesion is achieved by means such as manual work. In consideration of certainty and labor when the part is peeled off, it is safer and more efficient to peel completely only by the peeling method according to the present invention as described above. Of course, depending on the material, thickness dimension, and surface area of the glass film, after the peeling method according to the present invention is peeled to a certain extent, the remaining contact portion may be peeled off by other means.

  Further, in the glass film peeling method according to the present invention, the moving amount of the adsorption member in the first direction may be set to 1.0 mm or more and 10 mm or less.

  Thus, by setting the moving amount of the suction member in the first direction, which is the peeling direction of the other workpiece, to 10 mm or less, the other workpiece is reliably peeled off by preventing cracking during peeling. be able to. On the other hand, if the amount of movement in the first direction is too small, the amount of peeling (peeling area) of the other workpiece also becomes small and the work efficiency decreases, so the amount of movement in the first direction is 1. It is preferable to set it to 0 mm or more.

  In the glass film peeling method according to the present invention, the moving speed of the adsorbing member in the first direction may be set to 0.01 mm / second or more and 1.0 mm / second or less. .

  According to the peeling method according to the present invention, when the moving speed of the adsorbing member in the first direction is increased to some extent, the ratio of the amount of progress of peeling of the glass film to the moving amount in the first direction decreases. I understood. Based on the above knowledge, by setting the moving speed in the first direction within the above-described range, it becomes possible to advance the peeling of the glass film efficiently in terms of working time.

  As described above, the glass film peeling method according to the present invention can prevent the glass film or the support from being damaged and can safely peel the glass film from the support as well as the equipment cost. Because it is superior to the prior art in terms of surface, for example, a laminated body forming step of laminating a glass film and a support that supports the glass film to form a laminated body of the glass film, and manufacturing related to the laminated body In the manufacturing method of the glass film provided with the manufacturing related processing process which performs a process, and the peeling process of peeling a glass film from a support body after a manufacturing related processing process, peeling of the glass film which concerns on this invention mentioned above in the peeling process The method can be suitably applied. In addition, in the “manufacturing-related processing” here, not only processing for directly processing the glass film such as film formation processing, but also attachment of other members such as sealing processing, cleaning of the surface of the glass film, or the next step A process for indirectly bringing a glass film or a device including a glass film close to a final product (a product in a state that can be shipped), such as conveyance to a substrate, is widely included.

  The solution of the first technical problem is also achieved by the glass film peeling apparatus according to the present invention. That is, this peeling apparatus is an apparatus for peeling a glass film on a laminate formed by laminating a glass film and a support that supports the glass film, and includes a glass film and a support. It is introduced into a holding member that holds one of the workpieces, an adsorption member that adsorbs the other workpiece and can eliminate the adsorbed state, and a gap formed between the two workpieces, and the two workpieces reattach to each other. The adhering member is configured to move in a first direction away from one workpiece and to move in a second direction in which the peeling of the glass film progresses. Is characterized by

  Thus, in the glass film peeling apparatus according to the present invention, in addition to the holding member for one workpiece and the suction member for the other workpiece, the glass film peeling device can be inserted into a gap formed between the two workpieces by peeling. In addition to providing an adhesion preventing member, the adsorption state of the other workpiece by the adsorption member can be eliminated, the adsorption member can be moved in a direction away from the one workpiece (first direction), and the glass film peeling progress direction (first In the second direction). According to this configuration, as in the glass film peeling method according to the present invention, the anti-reattachment member is introduced into the gap formed between the two workpieces by adsorbing and peeling the other workpiece with the adsorption member. After the reattachment preventing member is introduced, the suctioning state of the other workpiece by the suctioning member is eliminated, and then the suctioning member is moved relative to the glass film peeling progress direction (second direction) to change the suctioning position. can do. Therefore, the other workpiece can be peeled off from the one workpiece while the re-adsorption position of the other workpiece is changed to the front side in the peeling progress direction. Therefore, since the same adsorbing member can be repeatedly used to peel off the other workpiece, the peeling of the glass film can be advanced, so that a plurality of rows of adsorbing members are arranged along the peeling progress direction as in the past. It becomes possible to peel the glass film with a smaller number. In addition, by introducing a re-adhesion prevention member into the gap formed between the two workpieces by peeling, when the suction state of the other workpiece by the suction member is canceled, one of the other workpieces already peeled off Since it can be prevented from reattaching to the workpiece, it can be peeled off stably with a small force. As described above, the glass film can be peeled safely while preventing cracking at the time of peeling, and the glass film can be peeled while keeping the equipment cost low by reducing the number of adsorbing members to be used. It becomes possible.

  The solution of the second technical problem is achieved by the method for manufacturing an electronic device according to the present invention. That is, in this manufacturing method, a glass film and a support that supports the glass film are laminated to form a laminate including the glass film, and an electronic device element is attached to the glass film of the laminate. In the manufacturing method of an electronic device, comprising: an attaching step of forming an electronic device with a support; and a peeling step of peeling an electronic device including a glass film from the support of the electronic device with the support after the attaching step. The process includes a holding step for holding either one of the glass film and the support with a holding member, an adsorption step for adsorbing the other workpiece with the adsorption member, and a first direction in which the adsorption member is separated from the one workpiece. And a peeling step to peel off the other workpiece from one workpiece, A reattachment prevention member introduction step for introducing a member for preventing reattachment of both workpieces to the gap formed between the two, and in a state where the reattachment prevention member is introduced, An adsorption elimination step for eliminating the adsorption state, and an adsorption position changing step for changing the adsorption position of the adsorption member with respect to the other workpiece by relatively moving the adsorption member in the second direction in which the peeling of the glass film proceeds. Characterized with points.

  As described above, the glass film peeling method according to the present invention can prevent the glass film or the support from being damaged and can safely peel the glass film from the support as well as the equipment cost. Since the surface is superior to the prior art, for example, as described above, a laminated body forming step for forming a laminated body including a glass film, an attaching step for forming an electronic device with a support, and after this attaching step In the manufacturing method of the electronic device provided with the peeling process of peeling the electronic device containing a glass film from the support body of the electronic device with a support body, By applying the peeling method of the glass film which concerns on this invention to a peeling process Preventing breakage of the glass film or the support and safely peeling the electronic device containing the glass film from the support It becomes ability.

  As described above, according to the present invention, it is possible to prevent the glass film or the support from being damaged, and to peel the glass film from the support safely, and to perform the peeling as low as possible. Become.

  In addition, as described above, according to the present invention, the glass film or the support is prevented from being damaged, and the electronic device including the glass film is safely peeled from the support, and the peeling is made as low as possible. It becomes possible to carry out.

It is a flowchart which shows the procedure of the manufacturing method of the electronic device containing the glass film which concerns on 1st embodiment of this invention. It is a flowchart which shows the detail of the peeling process shown in FIG. It is sectional drawing of the laminated body containing a glass film. It is a top view of the laminated body shown in FIG. It is sectional drawing of the glass substrate with a support body which attaches the transparent conductive film as an electronic device element to the laminated body shown in FIG. It is a top view of the peeling apparatus of the glass film which concerns on 1st embodiment of this invention. It is principal part AA sectional drawing of the peeling apparatus shown in FIG. It is the side view which looked at the peeling apparatus shown in FIG. It is a principal part side view of the peeling apparatus in the state which adsorbed support glass with the adsorption member. It is a principal part top view of the peeling apparatus in the state which adsorbed supporting glass with the adsorbing member. It is a principal part side view of the peeling apparatus in the state which peeled off support glass with the adsorption member. It is a principal part top view of the peeling apparatus in the state which peeled off support glass with the adsorption member. It is a principal part side view of the peeling apparatus in the state which introduced the reattachment prevention member. It is a principal part top view of the peeling apparatus in the state which introduced the reattachment prevention member. It is a principal part side view of the peeling apparatus in the state which eliminated the adsorption state of support glass by an adsorption member. It is a principal part side view of the peeling apparatus in the state which moved the adsorption member along the peeling progress direction of a glass film. It is a principal part top view of the peeling apparatus in the state which moved the adsorption member along the peeling progress direction of a glass film. It is a principal part side view of the peeling apparatus in the state which made the adsorption | suction member adsorb | suck to support glass in the position shown in FIG. It is a principal part side view of the peeling apparatus in the state which peeled off support glass with the adsorption member from the state shown in FIG. It is a side view of the peeling apparatus which concerns on 2nd embodiment of this invention. It is a principal part side view of the peeling apparatus in the state which peeled off by the 1st suction pad group. It is a principal part side view of the peeling apparatus in the state which peeled off by the 2nd suction pad group. It is a principal part side view of the peeling apparatus in the state which introduced the reattachment prevention member. It is a principal part side view of the peeling apparatus in the state which moved the 1st and 2nd adsorption pad group along the peeling progress direction of a glass film. It is a side view of the peeling apparatus which concerns on 3rd embodiment of this invention.

<< First embodiment of the present invention >>
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. In addition, in this embodiment, after attaching the transparent conductive film as an electronic device element to a glass film and forming a glass substrate with a support body (an aggregate thereof), the support body is peeled from the glass film to obtain an electronic device. The details will be described below, taking as an example the case of separation into a glass substrate with a transparent conductive film and a support.

  As shown in FIG. 1, the manufacturing method of the electronic device according to the first embodiment of the present invention includes a laminated body forming step S1 for forming a laminated body including a glass film, and a support by attaching an electronic device element to the glass film. A mounting step S2 for forming the attached electronic device and a peeling step S3 for peeling the support of the electronic device with the support from the electronic device including the glass film are provided.

  Further, as shown in FIG. 2, the peeling step S3 includes a holding step S31, an adsorption step S32, a peeling step S33, a reattachment prevention member introduction step S34, an adsorption elimination step S35, and an adsorption position changing step S36. And have. Hereinafter, each process will be described in detail.

(S1) Laminate Forming Step First, as shown in FIG. 3, a glass film 2 is laminated on a support 1 to form a laminate 3.

  Here, the glass film 2 is formed of, for example, silicate glass, silica glass, or the like, preferably formed of borosilicate glass, and more preferably formed of alkali-free glass. If the glass film 2 contains an alkali component, cations may drop on the surface, and so-called soda blowing may occur. In that case, since the part which becomes structurally rough arises in the glass film 2, when this glass film 2 is used in the curved state (including the concave deformation), the part which becomes rough due to aging deterioration starts. There is a risk of causing damage. For the above reasons, when there is a possibility of using the glass film 2 in a non-flat state, it is preferable to form the glass film 2 with non-alkali glass.

  In addition, an alkali-free glass here refers to the glass which does not contain an alkali component (alkali metal oxide) substantially, and specifically refers to the glass whose alkali component is 3000 ppm or less. Of course, from the viewpoint of preventing or reducing deterioration over time due to the above reason, glass of 1000 ppm or less is preferable, glass of 500 ppm or less is more preferable, and glass of 300 ppm or less is more preferable.

  The thickness dimension of the glass film 2 is set to 300 μm or less, preferably 200 μm or less, and more preferably 100 μm or less. The lower limit of the thickness dimension can be set without any particular restriction, but in consideration of the handleability after molding (when laminated with the support 1 or during peeling), it is set to 1 μm or more, preferably 5 μm or more. Should be done.

The support 1 is a plate-like glass in the present embodiment, and is formed of a known glass such as silicate glass, silica glass, borosilicate glass, non-alkali glass, and the like, similar to the glass film 2. However, when manufacturing-related processing of an electronic device involving heating is performed on the laminate 3, from the viewpoint of preventing as much as possible unnecessary deformation and breakage of the glass film 2 due to the difference in thermal deformation, 30 ° C. to 380 ° C. It is preferable to select the type of glass so that the difference in coefficient of linear expansion between the support 1 and the glass film 2 is 5 × 10 ⁻⁷ / ° C. at the maximum. In this case, it is preferable to form the support body 1 and the glass film 2 with the same kind of glass.

  The thickness dimension of the support 1 is not particularly limited as long as the handleability of the glass film 2 can be improved, and is set to the same level or more as the thickness dimension of the glass film 2. Specifically, the thickness dimension of the support 1 is set to 300 μm or more, preferably 400 μm or more. The upper limit value of the thickness dimension can be set without any particular limitation, but it is preferable to keep the thickness dimension so as to withstand bending (deformation during peeling) of the support 1 described later.

  The support 1 and the glass film 2 are formed by a known forming method such as a down draw method, preferably by an overflow down draw method. It is also possible to mold by a float method, a slot down draw method, a roll out method, an up draw method or the like. In addition, it is also possible to set it to the thickness dimension of less than 100 micrometers by giving a secondary process as needed (stretching a glass primary molded object by a redraw).

  In the state in which the laminate 3 is configured, the support 1 and the glass film 2 are fixed to each other. Arbitrary means can be adopted as the fixing means, and in this embodiment, the plate-like glass as the support 1 and the glass film 2 are directly brought into close contact with each other without interposing an adhesive or the like. Realized.

  At this time, the surface roughness Ra of the surface 2a on the support 1 side of the glass film 2 (the lower surface in FIG. 3) and the surface 1a of the support 1 on the side of the glass film 2 (same in FIG. 3). In this case, the surface roughness Ra of the upper surface is set to 2.0 nm or less. By setting the surface roughness Ra of each of the surfaces 1a and 2a within the above-described range, it is possible to form the laminate 3 by fixing the support 1 and the glass film 2 to each other without displacement. Of course, from the viewpoint of improving adhesion, the thickness is preferably 1.0 nm or less, and more preferably 0.3 nm or less. The surface roughness Ra is measured according to JIS R 1683: 2014 (hereinafter the same in this specification).

  On the other hand, the size of the surface roughness Ra of the surface 2b opposite to the support 1 of the glass film 2 (upper surface in FIG. 3) is not particularly limited. Therefore, the surface roughness Ra is preferably 2.0 nm or less, more preferably 1.0 nm or less, and preferably 0.3 nm or less. Further preferred.

  Moreover, in the state which laminated | stacked the glass film 2 and the support body 1 from the viewpoint of protecting the edge part of the glass film 2, the support body 1 has protruded from the glass film 2 (refer FIG. 3). In this case, the amount of protrusion of the support 1 from the glass film 2 is set to, for example, 0.5 mm or more and 10 mm or less, preferably 0.5 mm or more and 1.0 mm or less. As described above, by reducing the amount of protrusion of the support 1 (about 10 mm at the maximum), the glass film 2 having a relatively large area can be efficiently supported on the entire surface.

  In this embodiment, as shown in FIG. 4, both the support body 1 and the glass film 2 are rectangular. Further, the support 1 protrudes from the glass film 2 at the entire periphery of the laminate 3 formed by laminating the glass film 2 on the support 1. In the present embodiment, the support 1 protrudes from the glass film 2 at all four edges of the laminate 3. Of course, the support 1 is the glass film 2 at three edges or one edge. It is also possible to take a form that protrudes from. In this case, it is desirable that the end surface of the glass film 2 and the end surface of the support 1 coincide with each other on the non-projecting side edge.

  In addition, when forming the above-mentioned laminated body 3, you may make it perform a lamination | stacking operation under reduced pressure. Thereby, when the glass film 2 is laminated | stacked on the support body 1, it becomes possible to reduce or eliminate the bubble which arises (remains) between the glass film 2 and the support body 1. FIG.

(S2) Attachment process After forming the laminated body 3 including the glass film 2 as described above, manufacturing related processing involving heating the laminated body 3, specifically, the transparent conductive film as an electronic device element Install. As a result, as shown in FIG. 5, a transparent conductive film 4 such as an ITO film is formed on the surface 2b opposite to the support 1 of the glass film 2 forming a part of the laminate 3, which is used for an electronic device. A glass substrate 6 with a support in a state where the support 1 is fixed to the glass substrate 5 to be formed is formed.

(S3) Peeling Step After forming the glass substrate 6 with the support in this manner, the support 1 of the glass substrate 6 with the support is peeled from the glass substrate 5 including the glass film 2. 6 is a plan view of the peeling apparatus 10 for performing the above-described peeling, FIG. 7 is a cross-sectional view of the main part AA of the peeling apparatus 10 shown in FIG. 6, and FIG. 8 is a side view of the peeling apparatus 10 shown in FIG. The figure is shown. As shown in these drawings, the peeling apparatus 10 includes a glass substrate 5 including a glass film 2 and a support member 11 that holds one of the workpieces, and a suction member 12 that sucks the other workpiece. The anti-adhesion preventing member 13 is provided to prevent the two workpieces from adhering again after peeling. In the present embodiment, the peeling device 10 includes a first moving mechanism 14 that moves the suction member 12 along the first direction d1 (see FIG. 8), and the suction member 12 in the second direction d2 (see FIG. 8). 6), and a second moving mechanism 15 that moves along the second moving mechanism 15. Details of each element will be described below. In FIG. 6 and subsequent figures, illustration of the transparent conductive film 4 included in the glass substrate 5 is omitted, and only the glass film 2 is illustrated.

  The holding member 11 has a flat placement surface 16 and enables the glass substrate 6 with a support to be supported by the placement surface 16 as shown in FIG. In the present embodiment, the surface 2 b of the glass film 2 opposite to the support 1 (actually, the transparent conductive film 4 formed on the surface 2 b) is in contact with the mounting surface 16. The body-attached glass substrate 6 is supported.

  As shown in FIG. 6, a groove 17 having a predetermined shape is formed on the mounting surface 16 of the holding member 11, and a suction hole 18 opening to the groove 17 is formed. This groove | channel 17 is formed so that the peripheral part (the peripheral part 2c of the glass film 2 in this embodiment) of the glass substrate 6 with a support body mounted on the mounting surface 16 may be formed, and the glass substrate 6 with a support body. Is placed on the placement surface 16, the entire region of the groove 17 is covered with the glass film 2. Accordingly, the mounting surface 16 is driven by driving the suction device 19 (see FIG. 8) connected to the suction hole 18 and sucking (for example, vacuuming) the space surrounded by the glass film 2 and the groove 17. The glass film 2 is held by suction.

  Further, the adsorption pressure (vacuum pressure) at this time is set to such a size that the glass film 2 can be reliably held without being damaged during the peeling operation, for example. Specifically, the adsorption pressure of the glass film 2 is set to 0.03 MPa or more and 0.15 MPa or less, preferably 0.05 MPa or more and 0.10 MPa or less.

  For example, as shown in FIG. 7, the adsorbing member 12 is configured to adsorb the surface 1 b opposite to the glass film 2 of the support 1 constituting the glass substrate 6 with support. Moreover, this adsorption member 12 is comprised so that the said adsorption | suction state can be eliminated at arbitrary timings from the state which adsorb | sucked the target object (here support body 1).

  In the present embodiment, the suction member 12 includes a plurality of suction pads 20. As shown in FIG. 6, the plurality of suction pads 20 are arranged in a line along a direction orthogonal to the second direction d <b> 2 that is the peeling progress direction of the glass film 2. Further, as shown in FIG. 7, the plurality of suction pads 20 are arranged in a line along a direction orthogonal to the first direction d <b> 1 parallel to the direction in which the suction member 12 is separated from the one workpiece (glass film 2). It is arranged in a state. The diameter D of the suction pad 20 is set to, for example, 20 mm or more and 80 mm or less, preferably 20 mm or more and 40 mm or less, taking into account the amount of separation progressed by one peeling operation. Further, the adsorption pressure of the support 1 by the adsorption pad 20 is set to, for example, 0.1 MPa or more and 1.0 MPa or less, preferably 0.2 MPa or more and 0.8 MPa or less.

  In the present embodiment, as shown in FIG. 7, the first moving mechanism 14 includes a support portion 21 that supports and suspends a plurality of suction pads 20, a movable portion 22 connected to the support portion 21, and a fixed portion 23 as a base. And a lift drive unit 25 fixed to the unit 24. The elevating drive unit 25 is a cylinder that uses, for example, hydraulic pressure or air as a working fluid, and can move the movable unit 22 up and down with respect to the fixed unit 23 along the first direction d1. Thereby, the some suction pad 20 connected with the movable part 22 via the support part 21 can be moved now along the 1st direction d1.

  In the present embodiment, as shown in FIG. 6, the second moving mechanism 15 includes a rail portion 26 extending along the second direction d2 and a slide portion 27 that fits on the rail portion 26 and moves on the rail portion 26. Have. The slide part 27 has a built-in drive part, for example, so that it can run on the rail part 26. For example, two rail portions 26 and two slide portions 27 having the above-described configuration are provided, and a base portion 24 is fixed to the lower side of each slide portion 27. Since the plurality of suction pads 20 are connected to the base portion 24 via the lifting drive unit 25 and the support portion 21, a plurality of suction pads 20 are moved by moving the two slide portions 27 on the corresponding rail portions 26. The pad 20 can move along the second direction d2.

  The reattachment preventing member 13 is a sheet-like member 28, for example. The sheet-like member 28 may be made of any material or property that has at least a surface that is poor in adhesion to the support 1 and the glass film 2 (hard to adhere). For example, paper, a resin sheet, or the like may be used. At this time, the thickness dimension of the sheet-like member 28 (see FIG. 8) is set to, for example, 0.05 mm or more and 1.0 m or less, preferably 0.1 mm or more and 0.2 mm or less.

  Moreover, in this embodiment, as shown in FIG. 8, the roll body 29 of the sheet-like member 28 is arrange | positioned in the vicinity of the peeling start position of the glass substrate 6 with a support body. The roll body 29 and its drawn portion, that is, the sheet-like member 28 are on the support base 30 and are set at the same level as the surface 2 a on the support 1 side of the glass film 2 held by the holding member 11. Therefore, by rotating the rotating shaft 31 of the roll body 29 by the rotation driving unit 32 (see FIG. 6) in the state shown in FIG. 8, the sheet-like member 28 is directed from the roll body 29 toward the glass substrate 6 with the support. It comes to be supplied. Moreover, the width direction dimension of the sheet-like member 28 is set larger than the width direction dimension of the support body 1 and the glass film 2, and the clearance gap 7 which arises between the support body 1 and the glass film 2 so that it may mention later. The sheet-like member 28 can be introduced over the entire width direction (see FIG. 11).

  Next, an example of the peeling operation | movement of the glass substrate 6 from the support body 1 using the peeling apparatus 10 of the said structure is demonstrated based on FIGS. 9-19 mainly with the effect. 9 to 19, only elements particularly related to the peeling operation are shown in the drawings, and some elements are omitted.

(S31) Holding Step First, the glass substrate 6 with a support to be peeled is placed on the holding member 11 (see FIG. 6). Then, by driving the suction device 19, the glass film 2 (glass substrate 5) positioned below the glass substrate 6 with support is sucked and held on the placement surface 16 of the holding member 11 (see FIG. 8). At this time, a glass substrate with a support so that any one side 1d, 2d of the four sides of the rectangular support 1 and glass film 2 is parallel to the second direction d2 (see FIG. 6). 6 is mounted on the mounting surface 16.

(S32) Suction Step Further, the plurality of suction pads 20 as the suction members 12 disposed above the glass substrate 6 with the support are lowered from the position shown in FIG. The suction pad 20 is attracted to the support body 1 located on the upper side of 6 (see FIG. 9). In the present embodiment, a peeling start point 8 having a predetermined dimension is formed in advance between the support 1 and the glass film 2 (see FIG. 9), and a plurality of suction pads 20 are provided above the peeling start point 8. By lowering from the arranged state, the portion of the support 1 in which the close contact state with the glass film 2 is eliminated (the region where the peeling start point portion 8 is formed) is adsorbed. At this point, both the support 1 and the glass film 2 are in a flat state.

  In addition, the means for forming the peeling start part 8 is arbitrary, for example, by pressing a member having a blade part against the interface between the support 1 and the glass film 2 from the peripheral part thereof in the second direction d2. It is possible to form the peeling start part 8 having a predetermined dimension along the entire width direction of the glass film 2.

(S33) Peeling step In this manner, with the suction member 12 (the plurality of suction pads 20) being sucked to the predetermined position of the support 1, the lifting drive unit 25 raises the plurality of suction pads 20, The support 1 is peeled off from the glass film 2 (see FIG. 11). By this peeling operation, the close contact state between the support 1 and the glass film 2 is eliminated, and the peeling of the glass film 2 from the one end of the peeling start point 8 (the right end of the peeling start point 8 in FIG. 11) is the second. While progressing along the direction d <b> 2, a new gap 7 is formed between the support 1 and the glass film 2. The size of the gap 7 in the second direction d2 is equal to the amount of separation newly developed by this peeling operation. In this embodiment, the support body 1 is peeled off from the glass film 2 using a plurality of suction pads 20 arranged in a line along a direction orthogonal to the second direction d2, and the entire width direction of the support body 1 is covered. The peeling is progressing by the same amount (see FIG. 12).

  At this time, the amount of movement h (the amount of increase from the suction state) of the suction pad 20 in the first direction d1 is set to 1 mm or more and 10 mm or less, preferably 3 mm or more and 5 mm or less. The By setting the amount of movement h in the first direction d1 to 10 mm or less, the support 1 can be reliably peeled from the glass film 2 while preventing cracking during peeling. Further, the moving speed of the suction pad 20 in the first direction d1 is set to 0.01 mm / second or more and 1.0 mm / second or less, preferably 0.05 mm / second or more and 0.5 mm / second. Set to:

(S34) Reattachment Prevention Member Introducing Step Next, the sheet-like member 28 as the attachment prevention member 13 is introduced toward the gap 7 newly generated between the support 1 and the glass film 2 by the peeling. (See FIG. 13). As a result, the sheet-like member 28 is interposed between the support 1 and the glass film 2. At this time, the position of the suction pad 20 is maintained at the position at the end of the peeling operation (position shown in FIG. 11). At this time, the sheet-like member 28 may be introduced to the maximum so that the tip of the sheet-like member 28 reaches the end of the newly generated gap 7, but as shown in FIG. The introduction position of the sheet-like member 28 may be adjusted so that the tip of the sheet-like member 28 is fastened slightly before the base end of the gap 7.

(S35) Adsorption cancellation step With the sheet-like member 28 as the reattachment prevention member 13 introduced as described above, the adsorption state of the support 1 by the adsorption pad 20 is eliminated. As a result, the portion of the support 1 that has been lifted by the suction pad 20 moves toward the position before peeling, and is placed on the sheet-like member 28 (see FIG. 15).

(S36) Suction position changing step Thereafter, the plurality of suction pads 20 are moved in the peeling progress direction along the second direction d2 (see FIG. 16). Thereby, the position which adsorb | sucks the support body 1 by the suction pad 20 is changed to the front side of a peeling progress direction. At this time, only the region already peeled from the glass film 2 of the support 1 is sucked, and the vicinity of the boundary b with the region not yet peeled is sucked (see FIG. 17). ), The amount of movement of the suction pad 20 in the second direction d2 is preferably set. Specifically, when the support 1 is peeled off under the movement amount h and the movement speed in the first direction d1, the movement amount L in the second direction d2 is 10 mm or more and 100 mm or less. It is set, preferably 40 mm or more and 60 mm or less.

(S32) Suction Step After the suction position is changed in this way, the suction pad 20 is lowered again from the position shown in FIG. 16 to suck the support 1 (see FIG. 18). At this time, the sheet-like member 28 as the anti-reattachment member 13 does not necessarily exist immediately below the portion where the support 1 is adsorbed, and the support 1 is adsorbed from the glass film 2 as shown in FIG. It is only necessary to float a little in this state.

(S33) Peeling Step After that, the suction pad 20 is lifted from the position shown in FIG. 18, and the support 1 is peeled off from the glass film 2 again (see FIG. 19). Thereby, peeling from the glass film 2 of the support 1 further progresses, and a new gap 7 is generated again between the support 1 and the glass film 2. At this time, if the moving amount and moving speed of the suction pad 20 in the first direction d1 are set to the same conditions as in the first peeling, the deformation mode in the portion to be sucked of the support 1 is changed to the first pulling. Almost the same as when peeling. Therefore, peeling progresses stably.

(S37) Peeling completion judgment step After performing the peeling operation of the support 1 again as described above, it is judged whether or not the support 1 is completely peeled from the glass film 2 (FIG. 2). (See step S37). And when it determines that the support body 1 has not yet peeled completely from the glass film 2, the anti-reattachment member introduction step S34, the suction elimination step S35, the suction position changing step 36, the suction step S32, and the peeling step S33. Repeat. The series of steps S34 to S36, S32, and S33 are repeatedly performed until it is determined that the support 1 is completely peeled from the glass film 2 in the peeling completion determination step S37. Thereby, since the support body 1 peels completely, the glass substrate 5 used for an electronic device is obtained by separating the glass substrate 5 from the holding member 11 after that. In addition, the judgment whether the support body 1 peeled completely from the glass film 2 measured the magnitude | size of the reaction force which the suction pad 20 receives, for example when the suction pad 20 raises, and the magnitude | size of the measured reaction force is This can be done by comparing with a preset threshold value.

  Thus, in the present invention, in addition to the holding step S31 of the glass film 2 (glass substrate 6) as one work, the adsorption step S32 of the support 1 as the other work, and the peeling step S33, the pulling is performed. Step S34 for introducing the reattachment preventing member 13 into the gap 7 formed between the support 1 and the glass film 2 by peeling, and the adsorbing member 12 adsorbing the support 1 with the adhering prevention member 13 being introduced. Step S35 for canceling the state and the suction position changing step S36 for changing the suction position by moving the suction member 12 relative to the peeling progress direction (second direction d2) of the glass film 2 are newly provided. By comprising in this way, the support body 1 can be peeled from the glass film 2 in the state which changed the re-adsorption position of the support body 1 to the front side of the peeling progress direction. Thereby, since the same adsorption | suction member 12 (here adsorption pad 20) can be repeatedly used for peeling from the glass film 2, and peeling of the glass film 2 can be advanced, it follows a peeling progress direction like the past. Thus, the glass film 2 can be peeled with a smaller number than the configuration in which a plurality of adsorption members are arranged. In addition, by introducing the anti-reattachment member 13 into the gap 7 generated by peeling, the already peeled area of the support 1 when the adsorption state of the support 1 by the adsorption member 12 is eliminated is the glass film 2. Reattachment can be prevented. Therefore, it is possible to perform peeling with a small force stably. As described above, the glass film 2 can be safely peeled off by preventing cracking at the time of peeling, and the equipment cost is kept low by reducing the number of suction members 12 (here, suction pads 20) to be used. The glass film 2 can be peeled off.

  Further, by removing the adsorption state of the support 1 by the adsorption member 12 in the adsorption elimination step S35, most of the already peeled area of the support 1 (reattachment in the vicinity of the boundary b with the area not yet peeled) (Excluding the area) is in a state where it is not restrained at the time of another peeling operation. Therefore, as compared with the case where movement and deformation are regulated to the end by the adsorbing member as in the prior art (Patent Document 2), excessive deformation of the already peeled area is suppressed and cracking is prevented more reliably. can do.

  Further, as in the present embodiment, the deformation behavior of the support 1 at the time of peeling is always increased by pulling up the same position (a part away from the boundary b) by the same height (movement amount h) of the support 1. Is stable. Therefore, the separation progress distance is also constant, and positioning of the next adsorption member 12 is easy, so that the overall control becomes easy.

  As mentioned above, although one embodiment (1st embodiment) of the peeling method of the glass film which concerns on this invention, its peeling apparatus, the manufacturing method of a glass film, and the manufacturing method of the electronic device containing a glass film was described, this invention is Of course, the present invention is not limited to the above embodiment, and any form can be adopted within the scope of the present invention.

<< Second Embodiment of the Present Invention >>
FIG. 20 shows a side view of the peeling apparatus 50 according to the second embodiment of the present invention. The peeling device 50 mainly includes a plurality of suction pads 20 and 51 arranged in two rows as the suction member 12, and the suction pads 20 and 51 in each row can be moved up and down independently. It differs from the peeling apparatus 10 which concerns on one Embodiment. Hereinafter, details will be described focusing on the differences.

  In the present embodiment, the suction member 12 includes a plurality of suction pads 20 arranged in a row, and a plurality of suction pads 51 arranged in a row in the same manner as the plurality of suction pads 20 (hereinafter, in the present embodiment, the plurality of suction pads 20 described above). The suction pads 20 are collectively referred to as a first suction pad 20 group, and a plurality of suction pads 51 described later are collectively referred to as a second suction pad 51 group. The first suction pad 20 group and the second suction pad 51 group are arranged in parallel to each other. At this time, the second suction pad 51 group is suspended and supported by the support portion 52 in the same manner as the first suction pad 20 group.

  In the present embodiment, the first moving mechanism 14 includes a support portion 21 that supports the first suction pad 20 group in a suspended manner, and an elevating drive portion 25 that moves the support portion 21 up and down, and a second suction pad. The support unit 52 that supports the 51 group is suspended, and the elevating drive unit 55 that connects the movable unit 53 to the support unit 52 and fixes the fixed unit 54 to the base unit 24. In this case, as shown in FIG. 20, the first suction pad 20 group and the second suction pad 51 group are connected to the common base portion 24 via the lifting drive portions 25 and 55. Therefore, by driving each lifting drive unit 25, 55, the first suction pad 20 group and the second suction pad 51 group can be moved independently along the first direction d1. . In addition, as the two slide portions 27 move on the corresponding rail portions 26, the first suction pad 20 group and the second suction pad 51 group move synchronously along the second direction d2. It can be done.

  Next, an example of the peeling operation | movement of the support body 1 from the glass substrate 5 using the peeling apparatus 50 of the said structure is mainly demonstrated based on FIGS.

(S31) Holding Step First, as shown in FIG. 20, the glass substrate 6 with the support to be peeled is placed on the holding member 11, and the glass film positioned below the glass substrate 6 with the support. 2 (glass substrate 6) is sucked and held by the holding member 11.

(S32) Suction Step (S33) Peeling Step Further, the first suction pad 20 group and the second suction pad 51 group disposed above the glass substrate 6 with the support are illustrated by the lift drive units 25 and 55, respectively. The suction pads 20 and 51 are attracted to the support body 1 positioned above the glass substrate 6 with the support body by lowering from the position indicated by 20. After that, first, the first suction pad 20 group is raised by the lift drive unit 25, and the support 1 is peeled off from the glass film 2 (see FIG. 21). By this peeling operation, the close contact state between the support 1 and the glass film 2 is eliminated, and the peeling of the glass film 2 progresses along the second direction d2, and between the support 1 and the glass film 2. A new gap 7 is formed.

  Subsequently, the second suction pad 51 group is raised by the lifting drive unit 55, and the support 1 is further peeled from the glass film 2 (see FIG. 22). By this peeling operation, the peeling of the glass film 2 further progresses along the second direction d2, and a new gap 7 is formed between the support 1 and the glass film 2.

(S34) Reattachment Prevention Member Introducing Step Next, the sheet-like member 28 as the attachment prevention member 13 is introduced toward the gap 7 newly generated between the support 1 and the glass film 2 by the peeling. (See FIG. 23). As a result, the sheet-like member 28 is interposed between the support 1 and the glass film 2. At this time, the positions of the first suction pad 20 group and the second suction pad 51 group are maintained at the positions at the end of the peeling operation (positions shown in FIG. 22).

(S35) Adsorption elimination step With the sheet-like member 28 as the reattachment prevention member 13 introduced as described above, the adsorption state of the support 1 by the first adsorption pad 20 group and the second adsorption pad 51 group is changed. Eliminate. As a result, the portion of the support 1 that has been lifted by the first suction pad 20 group and the second suction pad 51 group moves toward the position before peeling, and is placed on the sheet-like member 28. (See FIG. 24).

(S36) Suction position changing step After that, the second moving mechanism 15 moves the first suction pad 20 group and the second suction pad 51 group in the peeling progress direction along the second direction d2 (FIG. 24). See). Thereby, the position which adsorb | sucks the support body 1 by the 1st suction pad 20 group and the 2nd suction pad 51 group is changed to the front side of a peeling progress direction.

(S32) Suction step (S33) Peeling step After changing the suction position in this way, the first suction pad 20 group and the second suction pad 51 group are lowered again from the position shown in FIG. The body 1 is adsorbed (not shown). And like the time of the 1st time, the suction pad group (1st suction pad 20 group) of the side far from the area | region which has not yet peeled among the support bodies 1 is raised first, and the support body 1 is made into the glass film 2. Is peeled off again (not shown). Subsequently, the support 1 is further peeled from the glass film 2 by raising the suction pad group (second suction pad 51 group) on the side of the support 1 that is not yet peeled. By the above two peeling operations, the peeling of the support 1 from the glass film 2 further proceeds twice.

  Thereafter, as in the first embodiment, the support 1 is replaced with the reattachment prevention member introduction step S34, the suction elimination step S35, the suction position changing step 36, the suction step S32, and the peeling step S33. Repeat until it is judged that the glass film 2 is completely peeled off. Thereby, since the support body 1 peels completely, the glass substrate 5 used for an electronic device is obtained by separating the glass substrate 5 from the holding member 11 after that.

  As described above, in the present embodiment, the first suction pad 20 group and the second suction pad 51 group that are moved up and down independently are provided, and the peeling operation of the support 1 is continued twice in the peeling step S33. Therefore, the remaining steps (for example, the reattachment prevention member introduction step S34, the suction elimination step S35, the suction position changing step S36, and the suction step S32) are substantially the same as the case of the first suction pad 20 group only. Can be done at the same time. Therefore, as compared with the first embodiment, the time required to completely peel the support 1 from the glass substrate 5 can be shortened. Of course, also in this embodiment, the same suction member 12 (here, the first suction pad group 20 and the second suction pad group 51) is repeatedly used for peeling from the glass film 2 to peel off the glass film 2. Since it can be advanced, as in the past, a configuration in which adsorption members of a plurality of rows (a number of rows capable of covering the entire dimension in the direction along the peeling progress direction of the glass film) are arranged along the peeling progress direction The glass film 2 can be peeled with a smaller number. Therefore, it becomes possible to peel off the glass film 2 while keeping the equipment cost low.

<< Third embodiment of the present invention >>
FIG. 25 shows a side view of the peeling apparatus 60 according to the third embodiment of the present invention. The peeling device 60 is configured to allow the plurality of suction pads 20 as the suction member 12, the first moving mechanism 14, and the reattachment prevention member 13 to face not only one side of the glass substrate 6 with a support but also this side. It differs from the peeling apparatus 10 according to the first embodiment in that it is also disposed on the other side.

  In this case, after the holding step S31, the suction step S32, the peeling step S33, the reattachment prevention member introducing step S34, the suction elimination step S35, and the suction position changing step S36 can be performed simultaneously on the left and right sides. Thereby, since peeling of the support body 1 can be advanced from both the left and right sides of the glass substrate 6 with the support body, the time required for completely peeling the support body 1 from the glass substrate 5 is shown in FIG. Can be made shorter.

  In the above description, a plurality of suction pads 20 (51) are exemplified as the suction member 12, but it is of course possible to adopt other configurations. That is, as long as the adsorption state can be eliminated, other known adsorption members such as a member having an adhesive tape can also be applied.

  Moreover, although the case where the material or property sheet-like member 28 with low adhesiveness with respect to the support body 1 and the glass film 2 was applied as the re-adhesion prevention member 13 in the above description was illustrated, of course other configurations are taken. It is also possible. For example, although illustration is omitted, by supplying a substance (gas containing fine particles, liquid such as water) that impedes adhesion between the support 1 and the glass film 2 toward the gap 7, the substance is supported by the support. You may make it adhere to the surface 1a of 1 or the surface 2a of the glass film 2. FIG.

  Further, even if the second moving mechanism 15 is configured so that the holding member 11 can be moved along the second direction d2 with the suction member 12 fixed, the above-described suction position changing step S36 may be performed. Good.

  In the above description, the case where the glass substrate 5 including the glass film 2 is held by the holding member 11 and the support 1 is adsorbed by the adsorbing member 12 has been exemplified. It is. For example, although not shown, the support 1 is held by the holding member 11 and the glass substrate 5 is adsorbed by the adsorbing member 12, and then the peeling step S33, the reattachment preventing member introducing step S34, the adsorption eliminating step S35, and The suction position changing step S36 may be performed.

  In the above description, a member (here, the glass substrate 5) on the mounting surface 16 is used as the holding member 11 using the groove 17 provided on the mounting surface 16 and the suction hole 18 formed in the groove 17. ) Is illustrated as an example, but it is needless to say that the member on the mounting surface 16 may be held by means other than suction (for example, a clamp mechanism).

  Moreover, in the above description, although the case where this invention was applied with respect to the laminated body 3 (glass substrate 6 with a support body) of the state which the support body 1 protruded from the glass film 2 was illustrated, of course, the support body 1 It is possible to apply the present invention even when the glass film 2 and the glass film 2 have a positional relationship other than the above (for example, when the support 1 and the glass film 2 are completely overlapped without protruding). It is.

  Moreover, although the above description illustrated the case where this invention is applied with respect to the glass substrate 6 with a support which has previously formed the peeling start part 8 between the glass film 2 and the support 1, Depending on conditions, the present invention can also be applied to the glass substrate 6 with a support in a state where the glass film 2 and the support 1 are fixed over the entire surface (by direct contact or the like).

  Moreover, in the said embodiment, although the plate-like glass was employ | adopted as the support body 1 and this support body 1 and the glass film 2 were fixed to each other by direct contact | adherence, of course, glass glass was carried out by means other than this. The present invention can be applied to a laminate 3 in which 2 and the support 1 are fixed. For example, the support 1 is composed of a layer made of a non-glass material such as an acrylic adhesive layer, a silicone thin film layer, an inorganic thin film layer (ITO, oxide, metal, carbon) and a sheet glass, and the non-glass material layer and the glass film The present invention can also be applied to a laminate (not shown) in which 2 are closely attached.

  Moreover, although the above description illustrated the case where the glass substrate 5 formed by forming the transparent conductive film 4 on the surface 2b of the glass film 2 was manufactured as the glass substrate used for the electronic device, of course, the manufacturing of the electronic device is performed. The present invention can also be applied to a method. For example, the present invention can be applied to manufacturing a liquid crystal panel having a glass substrate 5 on which a transparent conductive film 4 is formed and a cover glass on which a color filter is formed. Moreover, although illustration is abbreviate | omitted, while forming an organic EL element on the surface 2b of the glass film 2, a cover glass is mounted on this organic EL element, and the periphery of a cover glass is fixed to the glass film 2. The present invention can also be applied when manufacturing an organic EL panel formed by sealing an organic EL element.

  Of course, even when the glass film 2 itself is obtained (manufactured) as a final product, by applying the present invention, the glass film 2 is peeled off from the support 1 safely and easily without damaging the glass film 2. It becomes possible.

DESCRIPTION OF SYMBOLS 1 Support body 2 Glass film 3 Laminate body 4 Transparent electrically conductive film 5 Glass substrate 6 Glass substrate 7 with support body Gap 8 Peeling origin part 10, 50, 60 Peeling device 11 Holding member 12 Adsorption member 13 Reattachment prevention member 14 First movement Mechanism 15 Second moving mechanism 16 Placement surface 17 Groove 19 Suction device 20, 51 Suction pad 21, 52 Support unit 22 Movable unit 23 Fixed unit 24 Base unit 25 Elevating drive unit 25, 55 Each elevating drive unit 26 Rail unit 27 Slide Section 28 Sheet-shaped member 29 Roll body 30 Support base 31 Rotating shaft 32 Rotation drive section 36 Suction position changing step 50 Peeling device 51 Suction pad 52 Support section 53 Movable section 54 Fixed section 55 Lifting drive section 60 Peeling apparatus b Boundary d1 First Direction d2 second direction h movement amount L in the first direction movement amount in the second direction

Claims (12)

It is a method for peeling the glass film against a laminate of glass films formed by laminating a glass film and a support that supports the glass film,
A holding step of holding any one of the glass film and the support with a holding member;
An adsorption step of adsorbing the other workpiece with an adsorption member;
In the peeling method of the glass film comprising the peeling step of moving the suction member in the first direction away from the one workpiece and peeling the other workpiece from the one workpiece,
A reattachment prevention member introducing step for introducing a member for preventing reattachment of the two workpieces to a gap generated between the two workpieces by the peeling;
With the re-adhesion prevention member introduced, an adsorption elimination step for eliminating the adsorption state of the other workpiece by the adsorption member; and the adsorption member is relatively moved in a second direction in which peeling of the glass film proceeds. And a suction position changing step of changing the suction position of the suction member with respect to the other workpiece.   The glass film peeling method according to claim 1, wherein the suction member is a suction pad.   The method for peeling a glass film according to claim 2, wherein the plurality of suction pads are arranged in a line along a direction orthogonal to the second direction.   The method for peeling a glass film according to any one of claims 1 to 3, wherein the reattachment prevention member is a sheet-like member.   The peeling method of the glass film as described in any one of Claims 1-4 which adsorb | suck only the area | region peeled from said one workpiece | work among said other workpiece | works with the said adsorption | suction member.   The method for peeling a glass film according to any one of claims 1 to 5, wherein when the glass film has a rectangular shape having four sides, the direction along the side of the glass film is set to the second direction.   7. The reattachment prevention member introducing step, the adsorption elimination step, the adsorption position changing step, the adsorption step, and the peeling step are repeatedly performed until the glass film completely peels from the support. The peeling method of the glass film as described in any one of these.   The method of peeling a glass film according to any one of claims 1 to 7, wherein an amount of movement of the adsorption member in the first direction is set to 1.0 mm or more and 10 mm or less.   The moving speed of the adsorption member in the first direction is set to 0.01 mm / second or more and 1.0 mm / second or less, and the glass film is peeled according to any one of claims 1 to 8. Method. A laminated body forming step of laminating a glass film and a support that supports the glass film to form a laminated body of the glass film, a manufacturing related processing step of applying a manufacturing related process to the laminated body, and the manufacturing related In the manufacturing method of the glass film provided with the peeling process of peeling the said glass film from the said support body after a process process,
The peeling step includes a holding step of holding any one of the glass film and the support with a holding member;
An adsorption step of adsorbing the other workpiece with an adsorption member;
A peeling step of moving the suction member in a first direction away from the one workpiece and peeling the other workpiece from the one workpiece;
A reattachment prevention member introducing step for introducing a member for preventing reattachment of the two workpieces to a gap generated between the two workpieces by the peeling;
With the re-adhesion prevention member introduced, an adsorption elimination step for eliminating the adsorption state of the other workpiece by the adsorption member; and the adsorption member is relatively moved in a second direction in which peeling of the glass film proceeds. And a suction position changing step of changing the suction position of the suction member with respect to the other workpiece. A laminate forming step of laminating a glass film and a support that supports the glass film to form a laminate including the glass film, and a support by attaching an electronic device element to the glass film of the laminate In the manufacturing method of an electronic device, comprising: an attaching step of forming an attached electronic device; and a peeling step of peeling the electronic device including the glass film from the support of the electronic device with the support after the attaching step.
The peeling step includes a holding step of holding any one of the glass film and the support with a holding member;
An adsorption step of adsorbing the other workpiece with an adsorption member;
A peeling step of moving the suction member in a first direction away from the one workpiece and peeling the other workpiece from the one workpiece;
A reattachment prevention member introducing step for introducing a member for preventing reattachment of the two workpieces to a gap generated between the two workpieces by the peeling;
With the re-adhesion prevention member introduced, an adsorption elimination step for eliminating the adsorption state of the other workpiece by the adsorption member; and the adsorption member is relatively moved in a second direction in which peeling of the glass film proceeds. And a suction position changing step of changing the suction position of the suction member with respect to the other workpiece. An apparatus for peeling the glass film on a laminate formed by laminating the glass film and a support that supports the glass film,
A holding member for holding any one of the glass film and the support;
An adsorbing member that adsorbs the other workpiece and can eliminate the adsorbed state;
Introducing into the gap generated between the two workpieces, and a reattachment prevention member for preventing the two workpieces from reattaching,
The adsorption member is configured to move in a first direction away from the one workpiece and to move relative to a second direction in which the peeling of the glass film progresses. apparatus.

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