TW201609375A - Method for manufacturing glass film, and method for manufacturing electronic device including glass film - Google Patents

Abstract

The method for manufacturing a glass film (2) pertaining to the present invention is provided with a layered body formation step (S1) for forming a layered body (3) including a glass film (2) by layering and peelably fixing a glass film (2) and a support (1) for supporting the glass film (2), a manufacturing-related processing step (S2) for performing manufacturing-related processing of the layered body (3), and a separation step (S3) for separating the layered body (3) into the glass film (2) and the support (1) by peeling the support (1) from the glass film (2) after the manufacturing-related processing step (S2). In the separation step (S3), a gap (18) as a starting point for peeling is formed between the glass film (2) and the support (1) by applying an external force (F) only to the support (1) and bending the support (1) away from the glass film (2).

Description

Method for producing glass film, and method for producing electronic component containing the same

The present invention relates to a method for producing a glass film and a method for producing an electronic device including the glass film.

In recent years, in view of the space saving, a flat panel display such as a liquid crystal display, a plasma display, an organic EL display, or a field emission display has been popularized in place of a conventional CRT type display. Moreover, in these flat displays, it is required to be more thin.

In particular, the organic EL display and the organic EL illumination have a function of being foldable and rolled up by using a very small (thin) thickness. In this way, not only is it easy to carry, but it can be used in a curved state in addition to the conventional planar state, and therefore it can be expected to be used for various purposes. Therefore, further improvement in flexibility is required for the glass substrate and the cover glass used for these electronic components.

In order to impart flexibility to the glass substrate, it is effective to reduce the thickness of the glass substrate. Here, for example, Patent Document 1 proposes a glass film having a thickness of 200 μm or less, whereby a glass substrate can be given a curved surface. The degree of flexibility used in the state.

On the other hand, a glass substrate used for an electronic component such as a flat panel display or a solar cell is a process related to the manufacture of various electronic components such as secondary processing and cleaning. However, when the glass substrate used for the electronic component is made thinner, since the glass is a brittle material, it may be damaged due to a certain stress change, and it is extremely difficult to handle the electronic component manufacturing process. The problem. Further, since the glass film having a thickness of 200 μm or less has high flexibility, there is a problem in that it is difficult to perform positioning (for example, variation in patterning) when performing various manufacturing-related processes.

Regarding the above problem, for example, Patent Document 2 proposes a laminated body in which a glass film and a supporting glass for supporting the glass film are laminated and fixed to each other. If various manufacturing-related processes are performed on such a component, even if a glass film lacking strength and rigidity alone is used, since the supporting glass has a function as a reinforcing material, it can be a laminated body and can be easily positioned when various treatments are performed. . Further, after the treatment is completed, the supporting glass is peeled off from the glass film, and finally, only the glass film subjected to the desired treatment can be obtained. In other words, the thickness of the laminated body containing the glass film is set to be the same as the thickness of the conventional (existing) glass substrate, and the manufacturing line for the conventional glass substrate can be used as a manufacturing line for electronic components ( The benefits of sharing are expected.

On the other hand, in various manufacturing-related processes, the film-forming process of the transparent conductive film, the encapsulation process, and the like are also included. When the laminate having the above configuration is subjected to a treatment accompanied by heating, The fixing force of the supporting glass and the glass film in a state of being indirectly in close contact with the resin layer or the inorganic thin film layer is increased, and the problem that the glass film is peeled off from the supporting glass is difficult.

In order to solve the above problem, for example, Patent Document 3 proposes a method in which a resin layer having an easily peelable property fixed to a supporting glass substrate is adhered to a glass substrate to constitute an electronic component including a support, and from the electronic component When the support made of the glass substrate and the resin layer is peeled off, the insert is inserted from the electronic component containing the glass substrate after the insert is inserted into the interface between the resin layer and the glass substrate of the support.

Further, in order to solve the above problem, for example, Patent Document 4 proposes a glass film laminate in which a support glass is laminated to be exposed from a glass film, and a thinned portion is provided at an end of the support glass so that at least a part of the end side of the glass film is The thinned portion is separated from the support glass.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-132531

[Patent Document 2] International Publication No. 2011/048979

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2013-147325

[Patent Document 4] Japanese Patent Laid-Open Publication No. 2012-131664

In Patent Document 3, peeling starts to progress by inserting a blade between a glass film and a support, and when the glass film and the support are formed so that their ends are in close contact with each other, in the case of the glass film and the support Interface and There is no gap in which the insert is inserted, and the blade must be forced into the interface. When the blade is squeezed into the interface as described above, the pressing force acting on the glass film may damage the end portion of the glass film, which is not preferable.

On the other hand, Patent Document 4 is configured such that a thinned portion is provided at an end portion of the supporting glass, and a part of the edge of the glass film is separated from the supporting glass on the thinned portion, so that the glass film can be easily held without causing The glass film is broken and is easily peeled off. However, according to this method, special processing must be performed in advance on a part of the supporting glass, resulting in an increase in processing cost. In addition, a solvent such as a chemical liquid may be used in the process of manufacturing the electronic component. When there is a gap between the glass film and the supporting glass in the state of the laminated body, the solvent penetrates into the gap and is fixed. When the supporting glass peels off the glass film, problems such as breakage of the glass film occur, and thus the range in which it can be used is limited.

In view of the above, in the present specification, the technical problem to be solved by the present invention is to easily and inexpensively peel the glass film from the support regardless of the type of the relevant processing.

The solution to the above problems is achieved by the method for producing a glass film of the present invention. That is, the manufacturing method is a method for producing a glass film, comprising: a layer forming step, a manufacturing-related processing step, and a separating step of: the glass film and the support for supporting the glass film are provided Laminating and fixing to a degree of peeling, forming a laminate containing a glass film; the manufacturing-related processing steps are for the laminated body The separation process is performed by separating the support from the glass film after the manufacturing process step, thereby separating the laminate into a glass film and a support, characterized in that, in the separation step, only the support The body gives an external force and bends the support in a direction away from the glass film. The term "support only" as used herein means that the external force applied to bend the support body is limited to the support body, but the action point of the external force given by the purpose of bending the support body is not excluded. Outside the body. In addition, the term "manufacturing-related treatment" as used herein includes, of course, the treatment of some processes directly performed on the glass film, and broadly includes the installation of other members, the cleaning of the surface of the glass film, etc., the grounding of the glass film or The component containing the glass film becomes a process close to the final product (shipped state).

In this manner, when the glass film and the support for supporting the support are separated, an external force is applied to the support, and the support is bent in a direction away from the glass film, whereby the support is oriented from the flat state in the direction of the external force. bending. On the other hand, since the glass film is fixed to the support, it is intended to be bent together with the support from a flat state. At this time, the movement of the support body in the direction in which the flat state is to be restored is limited by the external force. On the other hand, since the glass film does not have such a restriction force, only the force (restoration force) to be restored to the flat state is exerted. With. That is, the restraining force and the restoring force act synergistically to cause a force in a direction in which the glass film and the support body are separated from each other, and can be easily applied to the end portion and the support of the glass film without greatly bending the support body. A gap is formed between the bodies as a starting point for the start of peeling. Further, since the support body is bent by applying only an external force to the support body, the starting point of the peeling start can be formed without contacting the glass film. In this way, compared It is conventionally known that the blade is pressed into the interface between the glass film and the support to form the starting point of the peeling start, and the starting point of the peeling start can be formed safely. Further, the support body and the glass film can be brought into full contact and the support body can be formed into a flat shape, and special secondary processing is not required, so that an increase in processing cost can be avoided. In particular, if the laminated body is formed by supporting the entire glass film by the support, it is possible to prevent the solvent of the chemical solution or the like from penetrating into the gap, and to use the glass film for a wide range of applications regardless of the type of the relevant treatment. The present invention can be applied at the time of manufacture.

Further, in the method for producing a glass film of the present invention, the support may be exposed from the glass film in a state where the laminate is planar, and in the separation step, only the exposed portion of the support with respect to the glass film may be used. An external force is applied, and the support is bent in a direction away from the glass film.

In this manner, an external force is applied to a portion of the support exposed from the glass film, and the point of application of the external force is at a position away from the fixed surface (interface) of the glass film. Therefore, a larger bending moment can be generated at the interface end of the support body and the glass film, and a gap which is the starting point of the peeling start can be formed with a smaller amount of bending. Further, when an external force is applied to a region in which the support body and the glass film are repeated in the thickness direction, even if an external force is applied to the surface of the support opposite to the glass film, the influence of the external force is concentrated on the back surface and on the back surface thereof. The state of the glass film is still difficult to completely eliminate, but if an external force is applied to the exposed portion, the above situation will not occur but is ideal.

Further, in the method for producing a glass film of the present invention, the glass film and the support may have corner portions, and in the laminate, the support is The corner portion is exposed from the glass film, and in the separating step, an external force is applied only to the exposed portion of the corner portion of the support body, and the support body is bent in a direction away from the glass film.

In this manner, the force for forming the starting point of the peeling start (the force other than the above-described restraining force and the restoring force) can be preferentially and collectively applied to the top of the corner portion of the glass film. Further, as the peeling progresses, the peeling area is gradually increased, and the starting point of the peeling start can be formed more smoothly. That is, although the starting point of the start of peeling is described, it is important to form a gap between the glass film and the support over a certain range in consideration of the smooth peeling operation after the formation of the starting point. For this reason, it is preferable that the gap is formed in order from the top of the corner as described above.

Further, in the method for producing a glass film of the present invention, the support may be bent by applying an external force to the edges of the support members constituting the corner portions.

In this way, the corners of the support can be bent in a quadrangular shape in a plan view. In this way, the corner portion of the glass film supported by the support can be uniformly formed into a gap which is the starting point of the peeling start, and the glass film can be peeled off without being strong.

Further, in the method for producing a glass film of the present invention, it is preferable that the external force is an adsorption force in a direction away from the glass film on the surface of the support opposite to the glass film. Alternatively, the external force may be a pressing force in a direction away from the glass film on the surface of the glass film side of the exposed portion of the support.

In this way, as an external force, if the adsorption force is given to the surface of the support opposite to the glass film, even if there is no exposed portion, An external force of an appropriate size is simply given to the support body, and the support body is bent in a predetermined direction. Further, when the exposed portion is provided, by applying a pressing force to the surface on the glass film side of the exposed portion of the support, it is possible to more easily apply an external force of an appropriate size to the support only, and to bend the support in a predetermined direction.

Further, in the method for producing a glass film of the present invention, in the separation step, in a state in which the glass film is adsorbed by the adsorption member from the side opposite to the support, only the external force is applied to the support, and the separation is performed. The direction of the glass film bends the support.

In this way, when the support is bent, the glass film is given the same force (recovery force) as it is to be retracted from the state in which it is to be bent together with the support, and the same direction as the restoring force is given by the adsorption member. Adsorption force. Thereby, even if the support body is bent in the direction away from the glass film, the glass film can be maintained as flat as possible. Thus, the glass film itself hardly bends, and the gap which is the starting point of peeling start can be formed more safely.

Further, in the method for producing a glass film of the present invention, the adsorption member may be moved in a direction away from the support in a state in which the glass film is adsorbed by the adsorption member and the support is bent.

By bending the support in a state in which the glass film is adsorbed, the starting point of the peeling start at this point is not sufficiently formed (the gap which can be easily peeled off by the subsequent main peeling action is not formed). From this state, the adsorption member is further moved in a direction away from the support, and the glass film can be stretched in a direction away from the support. force. Thereby, the starting point of the peeling start can be reliably formed between the glass film and the support. Further, the adsorption member that has been in the adsorbed state with the glass film is moved, and the above-described tensile force in the separation direction is imparted to the flat glass film. Therefore, the tensile force can be imparted to the glass film without any reluctance and without any deviation. Further, since the restoring force acts on the glass film, an appropriate size gap which is the starting point of the peeling start can be formed even without exerting such a large tensile force. For the above reasons, the doubt that the glass film is broken is very small.

Further, in the method for producing a glass film of the present invention, the glass film and the adsorption portion of the adsorption member may have corner portions, and in the separation step, in a state where the corner portion of the adsorption portion is aligned with the corner portion of the glass film, The glass film is adsorbed by an adsorption member.

In this way, the adsorption force can be most effectively applied to the glass film, and the glass film can be kept as flat as possible until the end portion thereof. In this way, it is possible to avoid bending the glass film as much as possible to form a gap which is the starting point of the peeling start.

Further, in the method for producing a glass film of the present invention, the support may be a plate glass. Further, in this case, in the laminated body, the plate glass and the glass film are directly adhered.

In such a support, the plate-shaped glass is used, and the support body excellent in surface precision can be manufactured at low cost. Further, by directly adhering the plate glass and the glass film having excellent surface precision as described above, the glass film can be fixed to the support without any positional deviation, and the glass film can be reliably and safely used by the present invention. The sheet glass of the support is peeled off.

In addition, the solution of the foregoing problems can also be solved by the present invention. A method of manufacturing an electronic component is achieved. That is, the manufacturing method is a method of manufacturing an electronic component, comprising a laminate forming step, a mounting step, and a separating step of laminating a glass film and a support for supporting the glass film. The layered body containing the glass film is formed to be peelable, and the mounting step is to mount the electronic component on the glass film of the laminated body; the separating step is to peel the support from the glass film after the mounting step Thereby, the electronic component including the support body on which the electronic component is mounted on the laminated body is separated into an electronic component including a glass film and a support; wherein in the separating step, only the external force is applied to the support. The support is bent in a direction away from the glass film.

In the same manner, in the separation of the electronic component containing the glass film and the support for supporting the same, according to the present invention, the above-mentioned limiting force (external force) and the restoring force are synergistically the direction in which the glass film and the support are separated from each other. The force acts to make it easier to form a gap between the end of the glass film and the support as a starting point for the start of peeling, even if the support is not bent so much. Further, since the support body is bent by applying only an external force to the support body, the starting point of the peeling start can be formed without contacting the glass film.

Thereby, the starting point of the peeling start can be formed safely by pressing the blade into the interface between the glass film and the support to form the starting point of the peeling start. Further, the support body and the glass film can be brought into full contact and the support body can be formed into a flat shape, and special secondary processing is not required, so that an increase in processing cost can be avoided. Of course, if the laminated body is formed by supporting the entire glass film by the support, it is possible to avoid the liquid medicine or the like. In the case where the solvent penetrates into the gap, the present invention can be applied to the manufacture of electronic components for a wide range of applications regardless of the contents of the mounting of the electronic component.

As described above, according to the present invention, peeling of the support and the glass film can be easily and inexpensively started regardless of the type of the relevant treatment.

1‧‧‧Support

1a, 1b‧‧‧ surface of the support

2‧‧‧glass film

2a, 2b‧‧‧ surface of the glass film

3‧‧‧Layer

4‧‧‧ corner (support)

5‧‧‧Organic EL components

6‧‧‧ Cover glass

7‧‧‧Organic EL panel

8‧‧‧Organic EL panel with support

9‧‧‧ corner (glass film)

10‧‧‧ starting point forming device

11‧‧‧ Keeping the table

12‧‧‧ External Forces Department

13‧‧‧Loading surface

14‧‧‧ Department of Maintenance

15‧‧‧ corner (holding station)

16‧‧‧ Lifting Department

16a‧‧‧above

17‧‧‧Cards

17a‧‧‧Sloping surface

18‧‧‧ gap

19‧‧‧Adsorption components

20‧‧‧Adsorption Department

21,22‧‧‧Adsorption plate

23‧‧‧Liquid LCD panel with support

24‧‧‧LCD panel

25‧‧‧ spacers

F‧‧‧External force

G‧‧‧Resilience

H‧‧‧Adsorption

Fig. 1 is a flow chart showing the procedure of a method of manufacturing an electronic component according to a first embodiment of the present invention.

2 is a cross-sectional view of a laminate including a glass film.

Fig. 3 is a plan view showing the laminated body shown in Fig. 2.

Fig. 4 is a cross-sectional view showing an electronic component including a support member in which an electronic component element is mounted on the laminated body shown in Fig. 2;

Fig. 5 is a plan view of a starting point forming device for forming a starting point of peeling of the glass film and the support.

Fig. 6 is a perspective view of a locking portion constituting the external force applying portion.

Fig. 7 is a cross-sectional view showing the principal part of the starting point forming device shown in Fig. 5.

Fig. 8 is a cross-sectional view of an essential part for explaining an operation of forming a starting point of peeling starting using the starting point forming device shown in Fig. 5;

Fig. 9 is a perspective view of an essential part for explaining an operation of forming a starting point of peeling starting using the starting point forming device shown in Fig. 5;

Fig. 10 is a cross-sectional view of an essential part of a starting point forming apparatus according to a second embodiment of the present invention.

Fig. 11 is a cross-sectional view of an essential part for explaining an operation of forming a starting point of peeling starting using the starting point forming device shown in Fig. 10 .

Fig. 12 is a plan view showing an essential part of another configuration of the adsorption member of the starting point forming device shown in Fig. 10.

Fig. 13 is a cross-sectional view of an essential part showing another configuration of the adsorption member of the starting point forming device shown in Fig. 10.

Figure 14 is a cross-sectional view of an essential part of a starting point forming device according to a third embodiment of the present invention.

Figure 15 is a cross-sectional view of an essential part of a starting point forming apparatus according to a fourth embodiment of the present invention.

FIG. 16 is a cross-sectional view showing a liquid crystal panel including a support when an electronic component to be used as an object of the present invention, that is, a liquid crystal panel.

Hereinafter, a first embodiment of a method of manufacturing an electronic component according to the present invention will be described with reference to Figs. 1 to 9 . In the present embodiment, when the organic EL panel as the electronic component is produced, the organic EL panel having the support is separated into the organic EL panel and the support by peeling off the glass film and the support. Case.

As shown in Fig. 1, the method for producing an electronic component according to the embodiment of the present invention includes a laminate forming step S1 for forming a laminate including a glass film, and a glass film in accordance with heating of the glass film. The mounting step S2 of mounting the electronic component elements and the separating step S3 of separating the laminated body on which the electronic component elements are mounted into the electronic component and the support are performed. Hereinafter, each step will be described in detail.

(S1) laminated body forming step

First, as shown in FIG. 2, the glass film 2 is laminated on the support 1, and the laminated body 3 is formed.

Here, the glass film 2 is formed, for example, of silicate glass, yttria glass, or the like, preferably formed of borosilicate glass, and more preferably formed of alkali-free glass. When the glass film 2 contains an alkali component, cations may fall off on the surface, and a so-called soda blowing phenomenon may occur. In this case, since the thickened portion is formed in the structure of the glass film 2, when the glass film 2 is used in a bent state, it may be damaged by the thickened portion as it deteriorates over the years. For the above reasons, it is possible to use the glass film 2 in a non-flat state, and it is preferable to form the glass film 2 using an alkali-free glass.

The alkali-free glass referred to herein means a glass which does not substantially contain an alkali component (alkali metal oxide), and specifically refers to a glass having an alkali component of 3,000 ppm or less. Of course, a glass having an alkali content of 1000 ppm or less is preferable, and a glass having an alkali component of 500 ppm or less is more preferable, and a glass having an alkali component of 300 ppm or less is particularly preferable, from the viewpoint of preventing or reducing the deterioration of the above-mentioned reasons as much as possible.

The thickness of the glass film 2 is set to 300 μm or less, preferably 200 μm or less, and more preferably 100 μm or less. thick The lower limit of the degree of the dimension is not particularly limited, and is set to 1 μm or more, preferably 5 μm or more, in consideration of handleability after molding (when laminated with the support 1 or peeling).

In the present embodiment, the support body 1 is a sheet glass, and similarly to the glass film 2, it can be formed of a known glass such as bismuth silicate glass, bismuth oxide glass, borosilicate glass or alkali-free glass. However, in the manufacturing process related to the heating of the electronic component (in the present embodiment, the mounting step S2), it is preferable to select the viewpoint of preventing unnecessary deformation and breakage of the glass film 2 due to the difference in thermal deformation. The type of glass is such that the difference in linear expansion coefficient between the support 1 and the glass film 2 between 30 ° C and 380 ° C is within 5 × 10 ^-7 / ° C. In this case, it is preferable to form the support 1 and the glass film 2 using the same kind of glass.

The thickness of the support body 1 is not particularly limited as long as the handleability of the glass film 2 can be improved, and is set to be equal to or greater than the thickness of the glass film 2. Specifically, the thickness of the support 1 is set to 400 μm or more, and preferably 500 μm or more. The upper limit of the thickness dimension is not particularly limited, but is preferably limited to a thickness dimension that can withstand the bending of the support 1 described later. Specifically, it can be set to 1000 μm or less, and preferably set to 700 μm or less.

Further, the support 1 and the glass film 2 can be molded by a known molding method such as a down-draw method, and it is preferably molded by an overflow down-draw method. Further, it can also be molded by a float method, a slit down method, a roll-out method, a pull-up method, or the like. Further, it is also possible to carry out secondary processing as needed (stretching the glass primary molded body by re-stretching), and The thickness is determined to be less than 100 μm.

In the state in which the laminated body 3 is comprised, the support body 1 and the glass film 2 are fixed so that it can peel. Any means can be employed as the fixing means. In the present embodiment, the plate-shaped glass and the glass film 2 as the support 1 are directly adhered to each other without being adhered to an adhesive or the like, thereby achieving mutual fixation.

At this time, the surface roughness Ra of the surface 2a (the lower surface in FIG. 2) on the support 1 side of the glass film 2 and the surface 1a (the upper surface in FIG. 2) on the glass film 2 side of the support 1 are both It is set to 2.0 nm or less. By setting the surface roughness Ra of each of the surfaces 1a and 2a to the above range, the support 1 and the glass film 2 can be laminated in a state in which the positional deviation is not fixed (the laminated body 3 is formed). Of course, the surface roughness Ra is preferably 1.0 nm or less, and more preferably 0.2 nm or less, from the viewpoint of adhesion improvement.

On the other hand, the surface roughness Ra of the surface 2b of the glass film 2 on the opposite side to the support 1 is not particularly limited, but the mounting step S2 to be described later is an electronic component-related process for performing film formation or the like. The surface roughness Ra of the target surface is preferably 2.0 nm or less, more preferably 1.0 nm or less, and particularly preferably 0.2 nm or less.

Further, from the viewpoint of protecting the end portion of the glass film 2, the support 1 is exposed from the glass film 2 in a state where the glass film 2 and the support 1 are laminated (FIG. 2). In this case, the amount of exposure of the support 1 from the glass film 2 is set to, for example, 0.5 mm or more and 10 mm or less, and is preferably set to 0.5 mm or more and 1.0 mm or less. As described above, the exposure amount of the support body 1 is reduced (maximum only about 10 mm), and a relatively large area of glass can be used. The film 2 is supported in an all-round and efficient manner.

In the present embodiment, as shown in FIG. 3, the support body 1 is exposed from the glass film 2 over the entire periphery of the laminated body 3, whereby the support body 1 is exposed from the glass film 2 at the corner portion 4 of the support body 1. . In the present embodiment, the support body 1 is exposed from the glass film 2 at all four edges of the laminated body 3, and it is needless to say that the support body 1 is exposed from the glass film 2 at three edges or one edge. . In this case, it is preferable that the end surface of the glass film 2 and the end surface of the support body 1 are aligned on the edge which is not exposed.

Further, when the laminated body 3 described above is formed, the lamination operation may be performed under reduced pressure. Thereby, it is possible to reduce or eliminate bubbles generated (remaining) between the glass film 2 and the support 1 when the glass film 2 is laminated on the support 1.

(S2) installation steps

After the laminated body 3 containing the glass film 2 is formed as described above, the laminated body 3 is subjected to a manufacturing process related to heating of the electronic component, and specifically, the electronic component element, that is, the organic EL element 5 is mounted. As a result, as shown in FIG. 4, the organic EL element 5 is formed on the surface 2b of the glass film 2 constituting a part of the laminated body 3 on the side opposite to the support 1. Next, the cover glass 6 is placed on the organic EL element 5, and the periphery of the cover glass 6 is fixed to the glass film 2, whereby the organic EL element 5 is packaged. In this way, the organic EL panel 8 having the support in a state in which the support 1 is fixed to the organic EL panel 7 is formed.

The thickness dimension of the cover glass 6 is set, for example, to 300 μm. The thickness is preferably set to 200 μm or less, and more preferably set to 100 μm or less. In this manner, by setting the thickness dimension of the cover glass 6, the cover glass 6 can be made to have appropriate flexibility.

Further, the mounting state of the organic EL element 5 on the glass film 2 may be arbitrary, for example, on the surface 2b of the glass film 2 opposite to the support 1, and may be known by CVD or sputtering. In the film method, the anode layer, the hole transport layer, the light-emitting layer, the electron transport layer, the cathode layer, and the like are sequentially formed into a film, whereby the organic EL element 5 is formed (the detailed illustration is omitted). Further, the means for fixing the cover glass 6 to the glass film 2 is also arbitrary, and the cover glass 6 may be fixed to the glass film 2 by a known laser encapsulation technique, for example. In this case, the film formation process by the CVD method, sputtering, or the like is equivalent to the process related to the manufacture of the electronic component with heating. Therefore, when the organic EL element 5 is formed on the surface 2b of the glass film 2 on the side opposite to the support 1 as described above, the glass film 2 is heated. Further, a new bond is formed between the glass film 2 and the support 1 due to the heating, and the fixing force of the glass film 2 and the support 1 is improved as compared with the case of laminating (when the laminated body 3 is formed).

Further, in the embodiment shown in Fig. 4, the cover glass 6 and the glass film 2 are directly fixed. However, the cover glass 6 may be adhered and fixed by a glass frit, a spacer, or the like (not shown). On the glass film 2.

(S3) separation step

In this manner, after the organic EL panel 8 having the support is formed, The glass film 2 constituting the organic EL panel 8 including the support body is peeled off from the support 1 to separate the organic EL panel 8 including the support into the organic EL panel 7 and the support 1 . Fig. 5 is a plan view showing the starting point forming device 10 for forming a starting starting point of separation at the time of the above separation. This apparatus 10 mainly includes a holding base 11 for holding the laminated body 3 including the glass film 2, and a force applying portion 12 for applying an external force only to the support 1. Further, starting from Fig. 5, the organic EL element 5 and the cover glass 6 are omitted.

The holding table 11 can hold the laminated body 3 in a flat state, and in the present embodiment, the mounting surface 13 on which the surface 1b of the support 1 opposite to the glass film 2 is placed, and the mounting surface 13 are provided. The upper grip portion 14 is an edge portion that grips the support body 1 in the thickness direction between the grip portion 14 and the mounting surface 13. In the present embodiment, the grip portion 14 is disposed at a position where the edge of the adjacent support body 1 constituting the corner portion 4 of the support body 1 can be held between the holding portion 14 and the mounting surface 13.

The external force applying portion 12 is provided at one corner portion 15 of the holding table 11. In the present embodiment, the external force applying portion 12 is a corner portion 15 constituting the holding table 11, and has a lifting portion 16 that can be moved up and down along the normal direction of the mounting surface 13, and a card that is provided at the upper portion of the lifting portion 16. The stopper portion 17 and the locking portion 17 are locked to the corner portion 4 of the support body 1 placed on the mounting surface 13 as the lifting portion 16 is lowered.

The locking portion 17 is configured to be in contact with the two edges of the corner portion 4 constituting the support body 1 at equal distance (see FIG. 5). Further, in the present embodiment, the locking portion 17 has an inclined surface 17a (see Fig. 6). This inclined surface 17a is used to adjust the curvature of the corner portion 4 when the support body 1 is bent as will be described later. The ratio (radius) can be controlled to a predetermined size by adjusting the inclination angle of the inclined surface 17a and the amount of downward movement of the lifting portion 16. In the example of the figure, the inclined surface 17a is provided at two points so as to abut against the two edges of the corner portion 4 of the support body 1, respectively, and the inclination angle corresponding to each inclined surface 17a is set to be such that when the corner portion 4 is predetermined When the curvature (radius) is curved, the upper surface of the corner portion 4 (the surface 1a on the glass film 2 side) is brought into contact along the inclined surfaces 17a at the two places. Of course, the inclined surface 17a may be a tapered surface as shown in the drawings, and may be a curved surface having a predetermined curvature for the above reason.

Next, an example of performing the separation operation using the starting point forming apparatus 10 having the above configuration will be mainly described with reference to FIGS. 5 to 9.

First, as shown in FIG. 5, the organic EL panel 8 including the support is placed on the mounting surface 13 of the starting point forming apparatus 10. At this time, the corner portion 4 of the support body 1 is placed on one of the corner portions 15 (lower left in FIG. 5) in which the external force applying portion 12 is provided in the holding table 11, and is placed. In this state, as shown in FIG. 7, the end surface of the support body 1 is in contact with the side surface of the locking portion 17, whereby the support body 1 and the organic EL panel 8 having the support body provided therein are in the planar direction. Positioning. Further, the two edges of the support body 1 are inserted between the grip portion 14 and the mounting surface 13 provided on the mounting surface 13, and the two edges are held in the thickness direction, thereby holding the support on the mounting surface 13. Body 1. Further, in a state in which the organic EL panel 8 including the support is placed on the mounting surface 13 and held, the support 1 and the glass film 2 are both in a flat state (FIG. 7). Further, at the corner portion 15 of the holding table 11, the upper surface 16a of the lifting portion 16 is disposed to be the same as the mounting surface 13. surface.

Next, the lifting portion 16 is lowered, and the locking portion 17 is pressed against the surface 1a of the support body 1. After the pressing, the lifting portion 16 is further lowered, whereby the support body 1 is given a downward external force F (Fig. 8) at the contact with the locking portion 17, whereby the support body 1 is directed away from the glass film 2. The direction is curved (Figure 9). On the other hand, since the glass film 2 is fixed to the support 1, it is intended to be bent together with the support 1 from a flat state (to be deformed from the form shown by the solid line in Fig. 8 to the shape shown by the chain line). At this time, the movement of the support body 1 in the direction of returning to the flat state is restricted by the external force F. On the other hand, the glass film 2 does not have such a regulating force, but only the force to return to the flat state (recovery) Force G) acts. In other words, the restraining force (external force F) and the restoring force G act synergistically to cause a force in a direction in which the glass film 2 and the support body 1 are separated from each other, and it is easier to bend the support body 1 without greatly bending it. A gap 18 (Fig. 8 and Fig. 9) which is a starting point of peeling start is formed between the end portion of the glass film 2 and the support 1. As long as a gap 18 having a suitable size is formed, after the support 1 or the glass film 2 is held and one is pulled away from the other, or air or the like is blown toward the gap 18, the glass film 2 can be easily The support 1 was peeled off throughout its entire area. Further, since the support 1 is bent only by applying the external force F to the support 1, the starting point (gap 18) at which the peeling starts can be formed without contacting the glass film 2. Thus, the starting point of the start of peeling can be safely formed in comparison with the conventional method of extruding the blade into the interface between the glass film 2 and the support 1 to form the starting point of the peeling start.

Further, in the present embodiment, by the support body 1 The portion exposed from the glass film 2 is given an external force, and the support 1 is bent. By applying the external force F in this manner, the point of application of the external force F is located away from the end of the fixed surface (interface) of the glass film 2. Therefore, at the interface end of the support 1 and the glass film 2, a larger bending moment can be generated, and the gap 18 which is the starting point of the peeling start can be formed with a smaller amount of bending. Further, when the external force F is given to the region where the support 1 and the glass film 2 are repeated in the thickness direction, even if the external force F is given to the surface 1b of the support 1 opposite to the glass film 2, the influence of the external force F is concentrated. The manner of the load and the state of the glass film 2 located on the back side are still difficult to completely eliminate. However, if the external force F is applied to the exposed portion, the above situation does not occur and is preferable.

Further, in the present embodiment, the external force F is applied only to the exposed portion of the corner portion 4 of the support body 1, and the support body 1 is bent in the direction away from the glass film 2, so that the top portion of the corner portion 9 of the glass film 2 can be applied. The force for forming the starting point of the start of peeling is given preferentially and intensively (the above-described force F and restoring force G as the limiting force). Further, as the peeling progresses, the peeling area is gradually increased, and the gap 18 which is the starting point of the peeling start can be formed without any reluctance and smoothly.

The above is an embodiment (first embodiment) for explaining a method for producing a glass film-containing electronic component of the present invention, and it is a matter of course that any method can be employed within the scope of the present invention.

Fig. 10 is a cross-sectional view showing the principal part of the starting point forming device 10 according to the second embodiment of the present invention. The starting point forming device 10 further includes a glass film 2 in addition to the holding stage 11 and the external force applying unit 12. The adsorption member 19 is adsorbed from the side opposite to the support 1. In the adsorption member 19, the pad-shaped adsorption portion 20 provided at the tip end thereof can be adsorbed on the surface 2b of the glass film 2 opposite to the support 1, and the glass film 2 can be given away from the support 1 by the adsorption operation. The force of direction (adsorption force H).

In this manner, the organic EL panel 8 including the support is placed on the mounting surface 13 of the holding table 11, and then the adsorption unit 20 is brought into contact with the surface 2b of the glass film 2 as shown in FIG. The adsorption portion 20 is adsorbed to the surface 2b. In this state, the lifting portion 16 is lowered, and the locking portion 17 is pressed against the surface 1a of the support body 1, and the support body 1 is given a downward external force F (FIG. 11). Thereby, the support body 1 is bent in a direction away from the glass film 2. In this case, in addition to the force (recovery force G) that is returned to the original state in a state to be bent together with the support body 1, the adsorption force is applied to the glass film 2 in the same direction as the restoring force G by the adsorption member 19. H. Thereby, even if the support body 1 is bent in the direction away from the glass film 2, the glass film 2 can be maintained as flat as possible, and the gap 18 which is the starting point of the peeling start can be formed safely and effectively. .

At this time, as shown in FIG. 12 and FIG. 13, the adsorption unit 20 is preferably substantially rectangular in plan view, and is adsorbed in a state where the corner portion 20a of the adsorption unit 20 and the corner portion 9 of the glass film 2 are aligned. By performing adsorption as described above, the adsorption force H is substantially at the top of the corner portion 9 of the glass film 2, that is, the end portion of the interface between the glass film 2 and the support 1. Therefore, the gap 18 which is the starting point of the start of peeling can be formed more easily. In addition, by When the adsorption unit 20 having a hardness of 50 Hv or more is used, the holding state of the glass film 2 can be maintained even when the support 1 is bent, and the gap 18 which is the starting point of the peeling start can be easily formed.

Fig. 14 is a cross-sectional view showing the principal part of the starting point forming device 10 according to the third embodiment of the present invention. In the present embodiment, a part of the mounting surface 13 is replaced with the adsorption plate 21, and a vacuum pump (not shown) connected to the adsorption plate 21 is driven to perform vacuum suction, and the support 1 is opposite to the glass film 2. The surface 1b is adsorbed and held by the adsorption plate 21. At this time, when the adsorption plate 21 is disposed so as to reach the boundary with the elevation portion 16, when the elevation portion 16 is lowered and the corner portion 4 of the support body 1 is bent by the locking portion 17, the support body 1 is at the corner portion. 4 may not be able to flex naturally (bend). Therefore, as shown in FIG. 10, the adsorption plate 21 is disposed at a constant distance (for example, about 50 mm) from the boundary of the elevation portion 16, so that the corner portion 4 can be prevented from being unnecessarily restrained to have a desired curvature (radius). Make a bend. When the support 1 is adsorbed and held in this manner, the holding portion 14 may not be provided.

Fig. 15 is a cross-sectional view showing the principal part of the starting point forming device 10 according to the fourth embodiment of the present invention. In the present embodiment, a part of the upper surface 16a of the elevating portion 16 is replaced with the adsorption plate 22, and a vacuum pump (not shown) connected to the adsorption plate 22 is driven to perform vacuum suction, and the surface of the corner portion 4 of the support 1 is placed. 1b is adsorbed and held by the adsorption plate 21. Thereby, the support body 1 can be bent without pressing the support body 1 by the locking portion 17, and therefore the load on the support body 1 is reduced (there is little concern of breakage). In this case, the adsorption plate 22 must also be chased along with the bending of the support body 1. When the deformation of the adsorption plate 22 is insufficient, the pad-shaped adsorption portion 20 can be disposed on the opposite side of the support 1 from the glass film 2 as shown in FIG. 1b is adsorbed.

Alternatively, instead of the adsorption plates 21 and 22, the suction grooves 21 and 22 may be provided on the mounting surface 13 or the upper surface 16a of the elevation portion 16, and vacuum suction may be performed to suction and hold the support body 1. On the mounting surface 13 or the upper surface 16a of the lifting portion 16.

Further, in the above-described embodiment, the case where the support body 1 is made of a plate-shaped glass and the support body 1 and the glass film 2 are directly adhered to each other and fixed to each other, of course, the glass is fixed by means other than the above. The present invention can also be applied to the laminated body 3 in which the film 2 and the support 1 are formed. For example, a support layer 1 is formed by using a layer formed of a non-glass material such as an alkaline adhesive layer, an fluorene ketone film layer, an inorganic thin film layer (ITO, oxide, metal, carbon), and a non-glass material. The present invention can also be applied to a laminate (not shown) in which a layer and a glass film 2 are in close contact with each other.

Further, in the above description, at the stage before the support 1 is bent, for example, at the interface end of the glass film 2 and the support 1 (the top of the interface of the corner portion 9), the starting point for the start of peeling can be initiated. A sharp blade of the degree of formation of the gap 18 can also abut the top of the interface. Alternatively, when the gap 18 which is the starting point of the peeling start is formed by the bending of the support 1, the sharp blade may be inserted into the gap 18. In either case, it is only necessary to apply a very small force compared to the case where the gap 18 which is the starting point of the peeling start is formed, and the fear that the glass film 2 is broken is extremely small.

In the above description, the case where the organic EL panel 7 is manufactured as the electronic component is exemplified, and of course, the present invention can be applied to other methods of manufacturing the electronic component. Fig. 16 is a cross-sectional view showing a liquid crystal panel 23 including a support, which is an example thereof. The panel 23 is a support body 1 and 1 which are fixed to both sides of the liquid crystal panel 24 as a final product, and are formed, for example, as follows. In other words, first, each of the support bodies 1 and the glass film 2 are laminated to form a pair of laminated bodies 3, 3 (layered body forming step S1). Then, a spacer 25 is disposed on the surface 2b of the glass film 2 of one of the laminated bodies 3, and the spacer 25 can be formed to form a space for enclosing a liquid crystal (not shown), and the other side of the spacer 25 is fixed. The glass film 2 of the laminated body 3 (installation step S2). After the liquid crystal panel 23 having the support is formed in this manner, the support 1 is peeled off one by one by the above-described peeling method, and separated into two support members 1, 1 and a liquid crystal panel 24 (separation step S3). As described above, even if the present invention is applied in the case of manufacturing the liquid crystal panel 24, the glass film 2 is not damaged, and the support 1 and the liquid crystal panel 24 can be separated safely and easily.

Of course, in the case where the glass film 2 itself is obtained (manufactured) as a final product, by using the present invention, the support film 1 and the glass film 2 can be separated safely and easily without causing damage to the glass film 2.

1‧‧‧Support

1a, 1b‧‧‧ surface of the support

2‧‧‧glass film

2a, 2b‧‧‧ surface of the glass film

4‧‧‧ corner (support)

9‧‧‧ corner (glass film)

11‧‧‧ Keeping the table

12‧‧‧ External Forces Department

13‧‧‧Loading surface

16‧‧‧ Lifting Department

16a‧‧‧above

17‧‧‧Cards

17a‧‧‧Sloping surface

18‧‧‧ gap

F‧‧‧External force

G‧‧‧Resilience

Claims (12)

A method for producing a glass film, comprising: a layer forming step, a manufacturing-related processing step, and a separating step of laminating and fixing the glass film and the support for supporting the glass film to be peelable To the extent that the laminate comprising the glass film is formed; the manufacturing-related processing step is to perform a manufacturing-related treatment on the laminate; the separation step is to remove the support from the glass film after the manufacturing-related processing step By peeling, the laminated body is separated into the glass film and the support, and in the separating step, an external force is applied to the support, and the support is bent in a direction away from the glass film. The method for producing a glass film according to the first aspect of the invention, wherein the support body is exposed from the glass film in a state in which the laminate is planar, and in the separating step, only the support body is provided. An external force is applied to the exposed portion of the glass film, and the support is bent in a direction away from the glass film. The method for producing a glass film according to claim 1 or 2, wherein the glass film and the support have a corner portion, and in the laminate, the support is at the corner from the glass The film is exposed, In the separating step, an external force is applied only to the exposed portion of the corner portion of the support, and the support is bent in a direction away from the glass film. The method for producing a glass film according to the third aspect of the invention, wherein the support member is bent by applying an external force to the edge of the support body constituting the corner portion. The method for producing a glass film according to the first aspect of the invention, wherein the external force is an adsorption force in a direction away from the glass film on a surface of the support opposite to the glass film. The method for producing a glass film according to the second aspect of the invention, wherein the external force is a pressing force in a direction away from the glass film on a surface of the exposed portion of the support on the glass film side. The method for producing a glass film according to the first or second aspect of the invention, wherein, in the separating step, the glass film is adsorbed by an adsorption member from a side opposite to the support. The external force is applied only to the support, and the support is bent in a direction away from the glass film. The method for producing a glass film according to claim 7, wherein the glass film is adsorbed by the adsorption member and The adsorption member is moved in a direction away from the support in a state where the support is bent. The method for producing a glass film according to claim 7, wherein the glass film and the adsorption portion of the adsorption member have a corner portion, and in the separating step, the corner portion of the adsorption portion and the glass are In the state in which the corners of the film are aligned, the glass film is adsorbed by the adsorption member. The method for producing a glass film according to claim 1 or 2, wherein the support is a plate glass. The method for producing a glass film according to claim 10, wherein in the laminated body, the plate glass and the glass film are directly adhered. A method of manufacturing an electronic component, comprising: a layer forming step, an attaching step, and a separating step, wherein the glass film and the support for supporting the glass film are laminated and fixed to a peelable degree And forming a laminate including the glass film; the mounting step of mounting the electronic component on the glass film of the laminate; the separating step of separating the support from the glass film after the mounting step Thereby, the aforementioned electric power is mounted on the aforementioned laminated body The electronic component including the support element of the sub-element element is separated into an electronic component including the glass film and the support; wherein, in the separating step, only the external force is applied to the support, and the glass film is separated from the glass film. The direction bends the aforementioned support.