TWI679100B - 樹脂成形裝置及樹脂成形品製造方法 - Google Patents
樹脂成形裝置及樹脂成形品製造方法 Download PDFInfo
- Publication number
- TWI679100B TWI679100B TW106118377A TW106118377A TWI679100B TW I679100 B TWI679100 B TW I679100B TW 106118377 A TW106118377 A TW 106118377A TW 106118377 A TW106118377 A TW 106118377A TW I679100 B TWI679100 B TW I679100B
- Authority
- TW
- Taiwan
- Prior art keywords
- resin material
- frame
- resin
- film
- film tension
- Prior art date
Links
- 229920005989 resin Polymers 0.000 title claims abstract description 261
- 239000011347 resin Substances 0.000 title claims abstract description 261
- 238000000465 moulding Methods 0.000 title claims abstract description 48
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000463 material Substances 0.000 claims abstract description 264
- 238000003860 storage Methods 0.000 claims abstract description 78
- 238000003825 pressing Methods 0.000 claims abstract description 45
- 230000007246 mechanism Effects 0.000 claims abstract description 23
- 238000001179 sorption measurement Methods 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims description 22
- 238000011109 contamination Methods 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 description 24
- 238000000748 compression moulding Methods 0.000 description 22
- 239000000945 filler Substances 0.000 description 9
- 239000002245 particle Substances 0.000 description 8
- 238000009826 distribution Methods 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 230000007723 transport mechanism Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001721 transfer moulding Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000037303 wrinkles Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67121—Apparatus for making assemblies not otherwise provided for, e.g. package constructions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
- B29C2043/181—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
- B29C2043/3405—Feeding the material to the mould or the compression means using carrying means
- B29C2043/3411—Feeding the material to the mould or the compression means using carrying means mounted onto arms, e.g. grippers, fingers, clamping frame, suction means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
- B29C2043/3483—Feeding the material to the mould or the compression means using band or film carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP2016-151026 | 2016-08-01 | ||
JP2016151026A JP6672103B2 (ja) | 2016-08-01 | 2016-08-01 | 樹脂成形装置及び樹脂成形品製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201805137A TW201805137A (zh) | 2018-02-16 |
TWI679100B true TWI679100B (zh) | 2019-12-11 |
Family
ID=61134186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106118377A TWI679100B (zh) | 2016-08-01 | 2017-06-03 | 樹脂成形裝置及樹脂成形品製造方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6672103B2 (ko) |
KR (1) | KR102122318B1 (ko) |
CN (1) | CN107672103B (ko) |
TW (1) | TWI679100B (ko) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7417429B2 (ja) * | 2020-01-17 | 2024-01-18 | Towa株式会社 | 樹脂成形装置、樹脂成形品の製造方法 |
JP7277936B2 (ja) * | 2020-04-28 | 2023-05-19 | アピックヤマダ株式会社 | 樹脂モールド装置 |
JP7277935B2 (ja) * | 2020-04-28 | 2023-05-19 | アピックヤマダ株式会社 | 樹脂モールド装置 |
JP7428384B2 (ja) * | 2020-10-06 | 2024-02-06 | アピックヤマダ株式会社 | 樹脂封止装置及び樹脂封止方法 |
JP2022061238A (ja) * | 2020-10-06 | 2022-04-18 | アピックヤマダ株式会社 | 樹脂封止装置及び樹脂封止方法 |
CN112635366B (zh) * | 2020-12-24 | 2024-03-12 | 江苏汇成光电有限公司 | 一种uv机晶圆铁框定位装置 |
WO2022264374A1 (ja) * | 2021-06-17 | 2022-12-22 | アピックヤマダ株式会社 | 樹脂封止装置及び樹脂封止方法 |
CN113547683B (zh) * | 2021-07-29 | 2023-03-24 | 广州聚仕达橡胶机械技术有限公司 | 一种橡胶自动热压成型生产设备及方法 |
WO2024190500A1 (ja) * | 2023-03-13 | 2024-09-19 | 株式会社村田製作所 | 電子部品の製造方法および製造装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105082432A (zh) * | 2014-05-22 | 2015-11-25 | 东和株式会社 | 树脂成型装置及树脂成型方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06106629A (ja) * | 1992-09-30 | 1994-04-19 | Hitachi Chem Co Ltd | シート状物の製造方法 |
JP4953619B2 (ja) * | 2005-11-04 | 2012-06-13 | Towa株式会社 | 電子部品の樹脂封止成形装置 |
JP2008012741A (ja) * | 2006-07-05 | 2008-01-24 | Matsui Mfg Co | 圧縮成形加工における粉粒体材料の充填装置 |
MY182097A (en) * | 2007-03-13 | 2021-01-18 | Towa Corp | Method of compression molding for electronic part and apparatus therefor |
JP2008254266A (ja) * | 2007-04-03 | 2008-10-23 | Towa Corp | 電子部品の圧縮成形方法及び装置 |
JP2010247429A (ja) * | 2009-04-15 | 2010-11-04 | Apic Yamada Corp | 樹脂封止装置とこれを用いた樹脂封止方法 |
JP5576197B2 (ja) * | 2010-07-08 | 2014-08-20 | Towa株式会社 | 電子部品の圧縮成形方法及び成形装置 |
JP5627619B2 (ja) * | 2012-02-28 | 2014-11-19 | Towa株式会社 | 樹脂封止装置及び樹脂封止体の製造方法 |
JP2013184413A (ja) * | 2012-03-08 | 2013-09-19 | Sumitomo Heavy Ind Ltd | 樹脂封止装置及び樹脂封止方法 |
JP6127660B2 (ja) * | 2013-03-29 | 2017-05-17 | 株式会社カネカ | 発光素子実装用リードフレーム、発光素子実装用樹脂成型体及びその製造方法、並びにトランスファ成型用金型 |
JP6057880B2 (ja) * | 2013-11-28 | 2017-01-11 | Towa株式会社 | 圧縮成形装置の樹脂材料供給方法及び供給装置 |
JP6298719B2 (ja) * | 2014-06-09 | 2018-03-20 | Towa株式会社 | 樹脂封止装置及び樹脂封止方法 |
-
2016
- 2016-08-01 JP JP2016151026A patent/JP6672103B2/ja active Active
-
2017
- 2017-06-03 TW TW106118377A patent/TWI679100B/zh active
- 2017-07-25 KR KR1020170094343A patent/KR102122318B1/ko active IP Right Grant
- 2017-07-31 CN CN201710641786.9A patent/CN107672103B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105082432A (zh) * | 2014-05-22 | 2015-11-25 | 东和株式会社 | 树脂成型装置及树脂成型方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2018020445A (ja) | 2018-02-08 |
JP6672103B2 (ja) | 2020-03-25 |
CN107672103A (zh) | 2018-02-09 |
CN107672103B (zh) | 2020-08-21 |
KR20180014660A (ko) | 2018-02-09 |
KR102122318B1 (ko) | 2020-06-12 |
TW201805137A (zh) | 2018-02-16 |
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