JP7277936B2 - 樹脂モールド装置 - Google Patents
樹脂モールド装置 Download PDFInfo
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- JP7277936B2 JP7277936B2 JP2020079464A JP2020079464A JP7277936B2 JP 7277936 B2 JP7277936 B2 JP 7277936B2 JP 2020079464 A JP2020079464 A JP 2020079464A JP 2020079464 A JP2020079464 A JP 2020079464A JP 7277936 B2 JP7277936 B2 JP 7277936B2
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- JP
- Japan
- Prior art keywords
- work
- chuck
- workpiece
- resin molding
- moving device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/52—Heating or cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
- B29C2043/181—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
- B29C2043/182—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated completely
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
- B29C2043/3405—Feeding the material to the mould or the compression means using carrying means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
- B29C2043/5808—Measuring, controlling or regulating pressure or compressing force
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
- B29C2043/5833—Measuring, controlling or regulating movement of moulds or mould parts, e.g. opening or closing, actuating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
Description
2 ワーク搬送部
4 ローダ
5 ホルダープレート
6 ディスペンサ
8 クリーニング装置
9 プリヒート部
10 プリヒータ
11 プレス部
12 モールド金型
13 フィルム搬送機構
22 枠体
32 チャック
A ワーク供給ユニット
B 樹脂供給ユニット
C ワーク受渡しユニット
D プレスユニット
E 冷却ユニット
F リリースフィルム
R モールド樹脂
W ワーク
Claims (6)
- キャリアの内側に電子部品が搭載されたワークの樹脂モールドを行うモールド金型と、
前記ワークの搬送を行うローダと、を備え、
前記ローダは、前記ワークの下面における外縁部に接離するチャックと、前記ワークの上面における外縁部に接離する枠体と、前記枠体を上下移動させる第1移動装置と、前記チャックを移動させる第2移動装置と、を有し、少なくとも搬送時において前記チャックと前記枠体とで前記ワークを挟持可能に構成されており、
前記第1移動装置及び前記第2移動装置の移動の制御を行う制御部をさらに備え、
前記制御部は、前記第1移動装置を制御することによって、前記枠体が前記ワークに当接する際の押圧力の制御を行うこと
を特徴とする樹脂モールド装置。 - 前記チャックは、平面視において環状となる配置で、前記ワークの前記外縁部に対して間隔を空けた多点位置で当接して支持するように複数のチャック爪が設けられていること
を特徴とする請求項1記載の樹脂モールド装置。 - 前記チャックは、一辺に設けられた複数の前記チャック爪が後端側で一体に構成されていることによって、前記第2移動装置を作動させた際に該チャック爪が前記ワークの平面視投影面に対して一体的に進入及び退避可能に構成されていること
を特徴とする請求項2記載の樹脂モールド装置。 - 前記移動装置は、前記チャックが、前記ワークの平面視投影面内に入る位置で且つ前記ワークの側方外周部に当接しないように所定隙間で近接する位置と、前記ワークの平面視投影面内から外れる位置と、をとれるように水平移動、回転移動、もしくはそれらの組合せ移動をさせる構成であること
を特徴とする請求項1~3のいずれか一項に記載の樹脂モールド装置。 - 前記ワークのプリヒートを行うプリヒートステージをさらに備え、
前記プリヒートステージは、前記ワークの下面を当接させた状態で前記チャックを退避させる退避溝を有すること
を特徴とする請求項1~4のいずれか一項に記載の樹脂モールド装置。 - 前記チャックおよび前記枠体は、外径が異なる複数種類の前記ワークに対応する複数種類のアッセンブリとして設けられており、
前記ローダは、前記各アッセンブリの着脱および動作を行うことが可能に構成されていること
を特徴とする請求項1~5のいずれか一項に記載の樹脂モールド装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020079464A JP7277936B2 (ja) | 2020-04-28 | 2020-04-28 | 樹脂モールド装置 |
CN202110432539.4A CN113561396A (zh) | 2020-04-28 | 2021-04-21 | 树脂模塑装置 |
TW110114797A TWI787792B (zh) | 2020-04-28 | 2021-04-23 | 樹脂模塑裝置 |
US17/242,323 US11699604B2 (en) | 2020-04-28 | 2021-04-28 | Resin molding apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020079464A JP7277936B2 (ja) | 2020-04-28 | 2020-04-28 | 樹脂モールド装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021172052A JP2021172052A (ja) | 2021-11-01 |
JP7277936B2 true JP7277936B2 (ja) | 2023-05-19 |
Family
ID=78161246
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020079464A Active JP7277936B2 (ja) | 2020-04-28 | 2020-04-28 | 樹脂モールド装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11699604B2 (ja) |
JP (1) | JP7277936B2 (ja) |
CN (1) | CN113561396A (ja) |
TW (1) | TWI787792B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7277935B2 (ja) * | 2020-04-28 | 2023-05-19 | アピックヤマダ株式会社 | 樹脂モールド装置 |
JP7277936B2 (ja) * | 2020-04-28 | 2023-05-19 | アピックヤマダ株式会社 | 樹脂モールド装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007320222A (ja) | 2006-06-02 | 2007-12-13 | Apic Yamada Corp | 樹脂モールド装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5229292B2 (ja) * | 2010-10-01 | 2013-07-03 | 第一精工株式会社 | 樹脂封止装置および樹脂封止方法 |
JP6062810B2 (ja) * | 2013-06-14 | 2017-01-18 | アピックヤマダ株式会社 | 樹脂モールド金型及び樹脂モールド装置 |
JP6104787B2 (ja) * | 2013-12-18 | 2017-03-29 | Towa株式会社 | 樹脂成形装置及び樹脂成形方法 |
TWI689396B (zh) * | 2014-07-22 | 2020-04-01 | 日商山田尖端科技股份有限公司 | 成形模具、成形裝置及成形品的製造方法 |
JP6541546B2 (ja) * | 2015-10-21 | 2019-07-10 | 株式会社ディスコ | 切削装置 |
JP6672103B2 (ja) * | 2016-08-01 | 2020-03-25 | Towa株式会社 | 樹脂成形装置及び樹脂成形品製造方法 |
JP6094781B1 (ja) * | 2016-08-02 | 2017-03-15 | 第一精工株式会社 | リードフレーム搬送装置及びリードフレームの搬送方法 |
JP6164380B1 (ja) | 2017-01-30 | 2017-07-19 | 第一精工株式会社 | 基材の搬送装置及び基材の搬送方法 |
JP7277936B2 (ja) * | 2020-04-28 | 2023-05-19 | アピックヤマダ株式会社 | 樹脂モールド装置 |
JP7406247B2 (ja) * | 2020-05-22 | 2023-12-27 | アピックヤマダ株式会社 | 樹脂モールド装置 |
-
2020
- 2020-04-28 JP JP2020079464A patent/JP7277936B2/ja active Active
-
2021
- 2021-04-21 CN CN202110432539.4A patent/CN113561396A/zh active Pending
- 2021-04-23 TW TW110114797A patent/TWI787792B/zh active
- 2021-04-28 US US17/242,323 patent/US11699604B2/en active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007320222A (ja) | 2006-06-02 | 2007-12-13 | Apic Yamada Corp | 樹脂モールド装置 |
Also Published As
Publication number | Publication date |
---|---|
US20210335633A1 (en) | 2021-10-28 |
JP2021172052A (ja) | 2021-11-01 |
TWI787792B (zh) | 2022-12-21 |
TW202141654A (zh) | 2021-11-01 |
CN113561396A (zh) | 2021-10-29 |
US11699604B2 (en) | 2023-07-11 |
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