TWI639769B - 低溫泵及用於低溫泵之第二階段陣列 - Google Patents
低溫泵及用於低溫泵之第二階段陣列 Download PDFInfo
- Publication number
- TWI639769B TWI639769B TW105130813A TW105130813A TWI639769B TW I639769 B TWI639769 B TW I639769B TW 105130813 A TW105130813 A TW 105130813A TW 105130813 A TW105130813 A TW 105130813A TW I639769 B TWI639769 B TW I639769B
- Authority
- TW
- Taiwan
- Prior art keywords
- cryopump
- stage
- cooling
- top plate
- area
- Prior art date
Links
- 238000001816 cooling Methods 0.000 claims abstract description 38
- 230000005855 radiation Effects 0.000 claims description 62
- 238000005192 partition Methods 0.000 claims description 29
- 125000006850 spacer group Chemical group 0.000 claims description 10
- 239000002594 sorbent Substances 0.000 claims description 3
- 230000001427 coherent effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000009826 distribution Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 130
- 238000005086 pumping Methods 0.000 description 25
- 238000012545 processing Methods 0.000 description 18
- 239000003463 adsorbent Substances 0.000 description 15
- 239000000463 material Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 11
- 230000008901 benefit Effects 0.000 description 8
- 238000009835 boiling Methods 0.000 description 8
- 239000002184 metal Substances 0.000 description 7
- 230000008929 regeneration Effects 0.000 description 7
- 238000011069 regeneration method Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000013461 design Methods 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 6
- 238000009833 condensation Methods 0.000 description 5
- 230000005494 condensation Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 230000036461 convulsion Effects 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 238000003698 laser cutting Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910021536 Zeolite Inorganic materials 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 239000010457 zeolite Substances 0.000 description 2
- 206010010904 Convulsion Diseases 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000012421 spiking Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49229—Prime mover or fluid pump making
- Y10T29/49236—Fluid pump or compressor making
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161441027P | 2011-02-09 | 2011-02-09 | |
| US61/441,027 | 2011-02-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201700864A TW201700864A (zh) | 2017-01-01 |
| TWI639769B true TWI639769B (zh) | 2018-11-01 |
Family
ID=45757776
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105130813A TWI639769B (zh) | 2011-02-09 | 2012-02-08 | 低溫泵及用於低溫泵之第二階段陣列 |
| TW101104149A TWI557320B (zh) | 2011-02-09 | 2012-02-08 | 低溫泵、低溫泵的前隔板及製造低溫泵之前隔板的方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101104149A TWI557320B (zh) | 2011-02-09 | 2012-02-08 | 低溫泵、低溫泵的前隔板及製造低溫泵之前隔板的方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US9266038B2 (https=) |
| JP (2) | JP6031451B2 (https=) |
| KR (2) | KR101986159B1 (https=) |
| TW (2) | TWI639769B (https=) |
| WO (1) | WO2012109304A2 (https=) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH089522B2 (ja) | 1991-11-22 | 1996-01-31 | 扶桑化学工業株式会社 | 殺藻剤および海苔養殖法 |
| TWI639769B (zh) | 2011-02-09 | 2018-11-01 | 布魯克機械公司 | 低溫泵及用於低溫泵之第二階段陣列 |
| JP5557786B2 (ja) * | 2011-04-05 | 2014-07-23 | 住友重機械工業株式会社 | クライオポンプのための蓋構造、クライオポンプ、クライオポンプの立ち上げ方法、及びクライオポンプの保管方法 |
| JP6053552B2 (ja) | 2013-02-18 | 2016-12-27 | 住友重機械工業株式会社 | クライオポンプ及びクライオポンプ取付構造 |
| JP6057782B2 (ja) * | 2013-03-05 | 2017-01-11 | 住友重機械工業株式会社 | クライオポンプ |
| JP6076843B2 (ja) * | 2013-06-14 | 2017-02-08 | 住友重機械工業株式会社 | クライオポンプ |
| TWI580865B (zh) * | 2013-03-25 | 2017-05-01 | Sumitomo Heavy Industries | Low temperature pump |
| JP6338403B2 (ja) * | 2013-03-25 | 2018-06-06 | 住友重機械工業株式会社 | クライオポンプ及び真空排気方法 |
| JP6659930B2 (ja) | 2014-03-21 | 2020-03-04 | エドワーズ バキューム リミテッド ライアビリティ カンパニー | クライオポンプ・ハイブリッド前面アレイ |
| JP6415230B2 (ja) * | 2014-10-07 | 2018-10-31 | 住友重機械工業株式会社 | クライオポンプ |
| CN106014916B (zh) * | 2015-03-31 | 2018-07-03 | 住友重机械工业株式会社 | 低温泵 |
| JP6466225B2 (ja) * | 2015-03-31 | 2019-02-06 | 住友重機械工業株式会社 | クライオポンプ |
| JP6639129B2 (ja) * | 2015-07-13 | 2020-02-05 | アルバック・クライオ株式会社 | クライオトラップ |
| JP6857046B2 (ja) * | 2016-03-29 | 2021-04-14 | 住友重機械工業株式会社 | クライオポンプ |
| KR102136290B1 (ko) * | 2017-11-28 | 2020-08-26 | 주식회사 엔바이온 | 에너지 절감형 농축로터 및 이를 포함하는 폐가스 처리 시스템 |
| JP7339950B2 (ja) * | 2018-09-06 | 2023-09-06 | 住友重機械工業株式会社 | クライオポンプ |
| GB2596831A (en) * | 2020-07-08 | 2022-01-12 | Edwards Vacuum Llc | Cryopump |
| GB2600479A (en) * | 2020-11-02 | 2022-05-04 | Edwards Vacuum Llc | Cryopumps and inlet flow restrictors for cryopumps |
| KR102381667B1 (ko) | 2020-11-17 | 2022-03-31 | 박희주 | 외부 열침입 저감 구조를 적용한 극저온 왕복동 펌프 |
| JP7500403B2 (ja) * | 2020-11-24 | 2024-06-17 | アルバック・クライオ株式会社 | クライオポンプ |
| GB2613595A (en) * | 2021-12-08 | 2023-06-14 | Edwards Vacuum Llc | A cryopump with increased capacity |
| JP2025093787A (ja) * | 2023-12-12 | 2025-06-24 | 住友重機械工業株式会社 | クライオポンプ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4718241A (en) * | 1985-10-31 | 1988-01-12 | Helix Technology Corporation | Cryopump with quicker adsorption |
| US4896511A (en) * | 1987-01-27 | 1990-01-30 | Lessard Philip A | Optimally staged cryopump |
| JP2008297927A (ja) * | 2007-05-29 | 2008-12-11 | Sumitomo Heavy Ind Ltd | クライオパネルの製造方法およびクライオポンプ |
Family Cites Families (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3218815A (en) | 1964-06-17 | 1965-11-23 | Little Inc A | Cryogenic refrigeration apparatus operating on an expansible fluid and embodying a regenerator |
| FR2114039A5 (https=) * | 1970-11-13 | 1972-06-30 | Air Liquide | |
| DE2620880C2 (de) | 1976-05-11 | 1984-07-12 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe |
| US4212170A (en) * | 1979-04-16 | 1980-07-15 | Oerlikon Buhrle USA Incorporated | Cryopump |
| US4295338A (en) | 1979-10-18 | 1981-10-20 | Varian Associates, Inc. | Cryogenic pumping apparatus with replaceable pumping surface elements |
| US4311018A (en) * | 1979-12-17 | 1982-01-19 | Varian Associates, Inc. | Cryogenic pump |
| US4356701A (en) | 1981-05-22 | 1982-11-02 | Helix Technology Corporation | Cryopump |
| JPS58124679A (ja) | 1982-01-20 | 1983-07-25 | Fuji Xerox Co Ltd | サ−マルヘツド駆動方式 |
| JPS58124679U (ja) * | 1982-02-19 | 1983-08-24 | 日本電子株式会社 | クライオポンプ |
| DE3216591A1 (de) | 1982-05-04 | 1983-11-10 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe mit jalousieartigem baffle |
| US4449373A (en) * | 1983-02-28 | 1984-05-22 | Helix Technology Corporation | Reduced vacuum cryopump |
| US4494381A (en) * | 1983-05-13 | 1985-01-22 | Helix Technology Corporation | Cryopump with improved adsorption capacity |
| US4555907A (en) | 1984-05-18 | 1985-12-03 | Helix Technology Corporation | Cryopump with improved second stage array |
| JPS6138179A (ja) * | 1984-07-31 | 1986-02-24 | Hitachi Ltd | クライオポンプ |
| JPS6251777A (ja) * | 1985-08-28 | 1987-03-06 | バリアン・アソシエイツ・インコ−ポレイテツド | 真空ポンプ装置内へのガス流を制御するためのオリフイス板 |
| JPS63501585A (ja) * | 1985-10-31 | 1988-06-16 | ヘリツクス テクノロジ− コ−ポレ−シヨン | 迅速吸着クライオポンプ |
| US4785666A (en) * | 1986-12-19 | 1988-11-22 | Martin Marietta Corporation | Method of increasing the sensitivity of a leak detector in the probe mode |
| JPS63112282U (https=) * | 1987-01-14 | 1988-07-19 | ||
| CA1315111C (en) * | 1987-01-27 | 1993-03-30 | Philip A. Lessard | Optimally staged cryopump |
| DE4006755A1 (de) * | 1990-03-03 | 1991-09-05 | Leybold Ag | Zweistufige kryopumpe |
| US5211022A (en) * | 1991-05-17 | 1993-05-18 | Helix Technology Corporation | Cryopump with differential pumping capability |
| JP3062706B2 (ja) | 1991-08-13 | 2000-07-12 | アルバック・クライオ株式会社 | 低温トラップ付クライオポンプ |
| US5301511A (en) | 1992-06-12 | 1994-04-12 | Helix Technology Corporation | Cryopump and cryopanel having frost concentrating device |
| EP0895484A4 (en) * | 1996-03-26 | 2000-12-06 | Saes Pure Gas Inc | COMBINATION OF CRYOPUMP AND GETTER PUMP AND METHOD FOR REGENERATING IT |
| US5782096A (en) * | 1997-02-05 | 1998-07-21 | Helix Technology Corporation | Cryopump with improved shielding |
| US6155059A (en) | 1999-01-13 | 2000-12-05 | Helix Technology Corporation | High capacity cryopump |
| US6327863B1 (en) * | 2000-05-05 | 2001-12-11 | Helix Technology Corporation | Cryopump with gate valve control |
| DE602004005047T2 (de) * | 2003-06-27 | 2007-09-27 | Helix Technology Corp., Mansfield | Integration einer automatisierten kryopumpensicherheitsspülung |
| WO2005050018A1 (ja) * | 2003-11-20 | 2005-06-02 | Sumitomo Heavy Industries, Ltd. | クライオポンプ |
| US7320224B2 (en) * | 2004-01-21 | 2008-01-22 | Brooks Automation, Inc. | Method and apparatus for detecting and measuring state of fullness in cryopumps |
| US7313922B2 (en) * | 2004-09-24 | 2008-01-01 | Brooks Automation, Inc. | High conductance cryopump for type III gas pumping |
| JP4287422B2 (ja) * | 2005-11-10 | 2009-07-01 | 住友重機械工業株式会社 | クライオポンプ及びスパッタリング装置及び半導体製造装置 |
| JP4430042B2 (ja) * | 2006-06-07 | 2010-03-10 | 住友重機械工業株式会社 | クライオポンプおよび半導体製造装置 |
| KR101456889B1 (ko) * | 2007-01-17 | 2014-10-31 | 브룩스 오토메이션, 인크. | 압력 이탈이 없는 고용량 극저온 펌프 |
| US20090038319A1 (en) * | 2007-08-08 | 2009-02-12 | Sumitomo Heavy Industries, Ltd. | Cryopanel and Cryopump Using the Cryopanel |
| US7866371B2 (en) | 2007-09-12 | 2011-01-11 | United Technologies Corporation | Lost wax investment casting gating fixtures |
| TWI359548B (en) | 2007-11-16 | 2012-03-01 | Advance Smart Ind Ltd | Alarm protected addapatus for lithium-ion battery |
| JP5031548B2 (ja) * | 2007-12-28 | 2012-09-19 | 住友重機械工業株式会社 | クライオポンプ |
| JP4686572B2 (ja) * | 2008-05-14 | 2011-05-25 | 住友重機械工業株式会社 | クライオポンプ、真空排気システム、及びその診断方法 |
| JP4521047B2 (ja) * | 2008-05-16 | 2010-08-11 | 住友重機械工業株式会社 | クライオポンプ |
| JP5184995B2 (ja) * | 2008-07-04 | 2013-04-17 | 住友重機械工業株式会社 | クライオポンプ |
| JP5193786B2 (ja) * | 2008-10-01 | 2013-05-08 | 住友重機械工業株式会社 | クライオポンプ |
| JP5123820B2 (ja) * | 2008-10-27 | 2013-01-23 | 東京エレクトロン株式会社 | 基板処理装置の真空排気方法及び基板処理装置 |
| TWI639769B (zh) | 2011-02-09 | 2018-11-01 | 布魯克機械公司 | 低溫泵及用於低溫泵之第二階段陣列 |
-
2012
- 2012-02-08 TW TW105130813A patent/TWI639769B/zh active
- 2012-02-08 TW TW101104149A patent/TWI557320B/zh active
- 2012-02-08 KR KR1020137023831A patent/KR101986159B1/ko active Active
- 2012-02-08 WO PCT/US2012/024243 patent/WO2012109304A2/en not_active Ceased
- 2012-02-08 KR KR1020187034235A patent/KR102033142B1/ko active Active
- 2012-02-08 US US13/983,973 patent/US9266038B2/en active Active
- 2012-02-08 JP JP2013553508A patent/JP6031451B2/ja active Active
-
2016
- 2016-02-01 US US15/012,399 patent/US9926919B2/en active Active
- 2016-10-24 JP JP2016207558A patent/JP6475211B2/ja active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4718241A (en) * | 1985-10-31 | 1988-01-12 | Helix Technology Corporation | Cryopump with quicker adsorption |
| US4896511A (en) * | 1987-01-27 | 1990-01-30 | Lessard Philip A | Optimally staged cryopump |
| JP2008297927A (ja) * | 2007-05-29 | 2008-12-11 | Sumitomo Heavy Ind Ltd | クライオパネルの製造方法およびクライオポンプ |
Non-Patent Citations (1)
| Title |
|---|
| 「Calculations of pumping coefficients for cryopumps using a combined Oatley-Monte Carlo menthod （Vaccum/volume 39/number 6/page 543 to 546/1989）」 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014509365A (ja) | 2014-04-17 |
| US20160146200A1 (en) | 2016-05-26 |
| WO2012109304A3 (en) | 2012-11-29 |
| KR20140006021A (ko) | 2014-01-15 |
| US9266038B2 (en) | 2016-02-23 |
| TW201700864A (zh) | 2017-01-01 |
| TW201239196A (en) | 2012-10-01 |
| US20130312431A1 (en) | 2013-11-28 |
| KR102033142B1 (ko) | 2019-10-16 |
| KR20180129975A (ko) | 2018-12-05 |
| WO2012109304A2 (en) | 2012-08-16 |
| JP6475211B2 (ja) | 2019-02-27 |
| TWI557320B (zh) | 2016-11-11 |
| KR101986159B1 (ko) | 2019-06-05 |
| JP2017015098A (ja) | 2017-01-19 |
| US9926919B2 (en) | 2018-03-27 |
| JP6031451B2 (ja) | 2016-11-24 |
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