TWI636281B - 使用亮視野暗視野物鏡的獨特斜射照明技術及與該技術有關的成像方法 - Google Patents

使用亮視野暗視野物鏡的獨特斜射照明技術及與該技術有關的成像方法 Download PDF

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Publication number
TWI636281B
TWI636281B TW104133705A TW104133705A TWI636281B TW I636281 B TWI636281 B TW I636281B TW 104133705 A TW104133705 A TW 104133705A TW 104133705 A TW104133705 A TW 104133705A TW I636281 B TWI636281 B TW I636281B
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Taiwan
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light
arc
sample
illumination light
dark
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TW104133705A
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Chinese (zh)
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TW201617681A (zh
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馬修 普特曼
約翰 普特曼
茱莉 奧蘭多
約瑟夫 包曼
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美商奈米創尼克影像公司
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/06Means for illuminating specimens
    • G02B21/08Condensers
    • G02B21/12Condensers affording bright-field illumination
    • G02B21/125Condensers affording bright-field illumination affording both dark- and bright-field illumination
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/06Means for illuminating specimens
    • G02B21/08Condensers
    • G02B21/082Condensers for incident illumination only
    • G02B21/084Condensers for incident illumination only having annular illumination around the objective
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361Optical details, e.g. image relay to the camera or image sensor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365Control or image processing arrangements for digital or video microscopes
    • G02B21/367Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/005Diaphragms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Microscoopes, Condenser (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW104133705A 2014-10-14 2015-10-14 使用亮視野暗視野物鏡的獨特斜射照明技術及與該技術有關的成像方法 TWI636281B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462063564P 2014-10-14 2014-10-14
US62/063,564 2014-10-14

Publications (2)

Publication Number Publication Date
TW201617681A TW201617681A (zh) 2016-05-16
TWI636281B true TWI636281B (zh) 2018-09-21

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TW104133705A TWI636281B (zh) 2014-10-14 2015-10-14 使用亮視野暗視野物鏡的獨特斜射照明技術及與該技術有關的成像方法
TW107123342A TWI683130B (zh) 2014-10-14 2015-10-14 使用亮視野暗視野物鏡的獨特斜射照明技術及與該技術有關的成像方法

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Country Status (7)

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US (4) US10437034B2 (enExample)
EP (2) EP4030201B1 (enExample)
JP (2) JP6596492B2 (enExample)
KR (1) KR102058453B1 (enExample)
CN (1) CN107250872B (enExample)
TW (2) TWI636281B (enExample)
WO (1) WO2016061070A1 (enExample)

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US10901327B2 (en) 2018-12-20 2021-01-26 Canon Kabushiki Kaisha Automatic defect analyzer for nanoimprint lithography using image analysis
US11294162B2 (en) 2019-02-07 2022-04-05 Nanotronics Imaging, Inc. Fluorescence microscopy inspection systems, apparatus and methods with darkfield channel
CN109884082B (zh) * 2019-03-27 2020-04-03 爱丁堡(南京)光电设备有限公司 一种光滑表面缺陷的检测方法
CN110609039B (zh) * 2019-09-23 2021-09-28 上海御微半导体技术有限公司 一种光学检测装置及其方法
CN110926429A (zh) * 2019-12-23 2020-03-27 中芯长电半导体(江阴)有限公司 一种光源识别设备
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KR102315010B1 (ko) * 2020-02-19 2021-10-21 한국표준과학연구원 파라볼릭 미러를 이용한 반사형 fpm
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US11689821B2 (en) * 2020-08-07 2023-06-27 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Incoherent Fourier ptychographic super-resolution imaging system with priors
CN113092415A (zh) * 2021-03-09 2021-07-09 中国科学院苏州生物医学工程技术研究所 用于无标记生物样品的相衬成像装置
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Also Published As

Publication number Publication date
CN107250872B (zh) 2020-09-08
US20210208377A1 (en) 2021-07-08
KR102058453B1 (ko) 2019-12-23
TWI683130B (zh) 2020-01-21
US20170235117A1 (en) 2017-08-17
EP3207409B1 (en) 2022-04-13
JP6596492B2 (ja) 2019-10-23
US10437034B2 (en) 2019-10-08
JP7072892B2 (ja) 2022-05-23
CN107250872A (zh) 2017-10-13
EP4030201B1 (en) 2024-12-04
KR20170091089A (ko) 2017-08-08
US11846765B2 (en) 2023-12-19
US11561383B2 (en) 2023-01-24
JP2020079927A (ja) 2020-05-28
US20200026053A1 (en) 2020-01-23
US10955651B2 (en) 2021-03-23
WO2016061070A1 (en) 2016-04-21
TW201908805A (zh) 2019-03-01
US20230161144A1 (en) 2023-05-25
TW201617681A (zh) 2016-05-16
EP4030201A1 (en) 2022-07-20
JP2017532561A (ja) 2017-11-02
EP3207409A1 (en) 2017-08-23

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