TWI635930B - 保持墊 - Google Patents
保持墊 Download PDFInfo
- Publication number
- TWI635930B TWI635930B TW103134004A TW103134004A TWI635930B TW I635930 B TWI635930 B TW I635930B TW 103134004 A TW103134004 A TW 103134004A TW 103134004 A TW103134004 A TW 103134004A TW I635930 B TWI635930 B TW I635930B
- Authority
- TW
- Taiwan
- Prior art keywords
- resin sheet
- resin
- holding
- holding mat
- polyurethane resin
- Prior art date
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 85
- 229920005749 polyurethane resin Polymers 0.000 claims abstract description 48
- 238000003860 storage Methods 0.000 claims abstract description 22
- 238000010521 absorption reaction Methods 0.000 claims abstract description 21
- 229920005989 resin Polymers 0.000 claims description 164
- 239000011347 resin Substances 0.000 claims description 164
- 239000005871 repellent Substances 0.000 claims description 54
- 230000002940 repellent Effects 0.000 claims description 45
- 229910052731 fluorine Inorganic materials 0.000 claims description 20
- 239000011737 fluorine Substances 0.000 claims description 19
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 17
- 239000003795 chemical substances by application Substances 0.000 claims description 12
- 125000005010 perfluoroalkyl group Chemical group 0.000 claims description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- 125000001153 fluoro group Chemical group F* 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 42
- 238000005498 polishing Methods 0.000 description 36
- 239000000243 solution Substances 0.000 description 28
- 239000010410 layer Substances 0.000 description 26
- 239000000463 material Substances 0.000 description 19
- 238000005259 measurement Methods 0.000 description 19
- 238000001179 sorption measurement Methods 0.000 description 19
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 17
- 239000002904 solvent Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 16
- 239000012790 adhesive layer Substances 0.000 description 15
- 239000007788 liquid Substances 0.000 description 15
- 230000015572 biosynthetic process Effects 0.000 description 14
- 239000011521 glass Substances 0.000 description 14
- 238000005345 coagulation Methods 0.000 description 12
- 230000015271 coagulation Effects 0.000 description 12
- 238000007517 polishing process Methods 0.000 description 12
- 229920000728 polyester Polymers 0.000 description 12
- 208000035874 Excoriation Diseases 0.000 description 11
- 238000000227 grinding Methods 0.000 description 10
- 239000002243 precursor Substances 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 239000011148 porous material Substances 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000000654 additive Substances 0.000 description 5
- 230000001112 coagulating effect Effects 0.000 description 5
- 230000008929 regeneration Effects 0.000 description 5
- 238000011069 regeneration method Methods 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 4
- -1 polyethylene terephthalate Polymers 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229920002799 BoPET Polymers 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000004925 denaturation Methods 0.000 description 3
- 230000036425 denaturation Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 229920000768 polyamine Polymers 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000009864 tensile test Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 241000501754 Astronotus ocellatus Species 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 125000005442 diisocyanate group Chemical group 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- BXKDSDJJOVIHMX-UHFFFAOYSA-N edrophonium chloride Chemical compound [Cl-].CC[N+](C)(C)C1=CC=CC(O)=C1 BXKDSDJJOVIHMX-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- WBJINCZRORDGAQ-UHFFFAOYSA-N formic acid ethyl ester Natural products CCOC=O WBJINCZRORDGAQ-UHFFFAOYSA-N 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920005906 polyester polyol Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- MWZNPHHDRLXXHO-UHFFFAOYSA-N rhodium;hydrate Chemical compound O.[Rh] MWZNPHHDRLXXHO-UHFFFAOYSA-N 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013204246 | 2013-09-30 | ||
| JP2013-204246 | 2013-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201521958A TW201521958A (zh) | 2015-06-16 |
| TWI635930B true TWI635930B (zh) | 2018-09-21 |
Family
ID=52743339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103134004A TWI635930B (zh) | 2013-09-30 | 2014-09-30 | 保持墊 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6423352B2 (fr) |
| KR (1) | KR102225294B1 (fr) |
| CN (1) | CN105579195B (fr) |
| TW (1) | TWI635930B (fr) |
| WO (1) | WO2015046203A1 (fr) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6940363B2 (ja) * | 2017-10-10 | 2021-09-29 | 富士紡ホールディングス株式会社 | 保持パッド及びその製造方法 |
| JP6968651B2 (ja) * | 2017-10-12 | 2021-11-17 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法 |
| JP6971839B2 (ja) * | 2017-12-27 | 2021-11-24 | ニッタ・デュポン株式会社 | 研磨パッド |
| JP7193287B2 (ja) * | 2018-09-28 | 2022-12-20 | 富士紡ホールディングス株式会社 | 保持パッド及びその搬送又は保管方法 |
| TWI833018B (zh) * | 2019-05-07 | 2024-02-21 | 美商Ｃｍｃ材料有限責任公司 | 經基於槽生產之化學機械平坦化墊 |
| JP7421978B2 (ja) * | 2020-03-27 | 2024-01-25 | 富士紡ホールディングス株式会社 | 保持パッド及びその製造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002121274A (ja) * | 1999-09-30 | 2002-04-23 | Sekisui Chem Co Ltd | 熱可塑性エラストマー、その用途及びその製造方法 |
| JP2004090123A (ja) * | 2002-08-30 | 2004-03-25 | Central Glass Co Ltd | 基板の片面研磨装置 |
| TW201109123A (en) * | 2009-09-03 | 2011-03-16 | Fujibo Holdings Inc | Supporting pad |
| TW201307413A (zh) * | 2011-06-13 | 2013-02-16 | Dainippon Ink & Chemicals | 聚胺基甲酸酯組成物、撥水劑、含有其之皮革樣片之表皮層形成用之聚胺基甲酸酯樹脂組成物、及皮革樣片 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09254027A (ja) | 1996-03-25 | 1997-09-30 | Chiyoda Kk | 研磨用マウンテン材 |
| JPH11151665A (ja) * | 1997-11-20 | 1999-06-08 | Central Glass Co Ltd | バックパッド及びその吸水防止方法 |
| EP1236757A4 (fr) * | 1999-09-30 | 2005-01-19 | Sekisui Chemical Co Ltd | Elastomere thermoplastique, son utilisation et son procede de production |
| JP4455230B2 (ja) * | 2004-08-30 | 2010-04-21 | 富士紡ホールディングス株式会社 | 保持パッド及び保持パッドの製造方法 |
| CN102448669B (zh) * | 2009-05-27 | 2014-12-10 | 罗杰斯公司 | 抛光垫、其聚氨酯层及抛光硅晶片的方法 |
| JP5184448B2 (ja) * | 2009-06-23 | 2013-04-17 | 富士紡ホールディングス株式会社 | 研磨パッド、その製造方法および研磨加工方法 |
| JP5398376B2 (ja) * | 2009-06-23 | 2014-01-29 | 富士紡ホールディングス株式会社 | 保持パッド |
| JP2011235385A (ja) * | 2010-05-10 | 2011-11-24 | Teijin Cordley Ltd | 吸着パッド |
| JP2013094929A (ja) * | 2011-11-04 | 2013-05-20 | Nhk Spring Co Ltd | バッキング材 |
-
2014
- 2014-09-24 WO PCT/JP2014/075196 patent/WO2015046203A1/fr active Application Filing
- 2014-09-24 JP JP2015539236A patent/JP6423352B2/ja active Active
- 2014-09-24 CN CN201480048115.6A patent/CN105579195B/zh active Active
- 2014-09-24 KR KR1020167005205A patent/KR102225294B1/ko active IP Right Grant
- 2014-09-30 TW TW103134004A patent/TWI635930B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002121274A (ja) * | 1999-09-30 | 2002-04-23 | Sekisui Chem Co Ltd | 熱可塑性エラストマー、その用途及びその製造方法 |
| JP2004090123A (ja) * | 2002-08-30 | 2004-03-25 | Central Glass Co Ltd | 基板の片面研磨装置 |
| TW201109123A (en) * | 2009-09-03 | 2011-03-16 | Fujibo Holdings Inc | Supporting pad |
| TW201307413A (zh) * | 2011-06-13 | 2013-02-16 | Dainippon Ink & Chemicals | 聚胺基甲酸酯組成物、撥水劑、含有其之皮革樣片之表皮層形成用之聚胺基甲酸酯樹脂組成物、及皮革樣片 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102225294B1 (ko) | 2021-03-10 |
| WO2015046203A1 (fr) | 2015-04-02 |
| JPWO2015046203A1 (ja) | 2017-03-09 |
| TW201521958A (zh) | 2015-06-16 |
| CN105579195B (zh) | 2018-06-15 |
| CN105579195A (zh) | 2016-05-11 |
| JP6423352B2 (ja) | 2018-11-14 |
| KR20160065082A (ko) | 2016-06-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI635930B (zh) | 保持墊 | |
| TWI597126B (zh) | 研磨墊及其製造方法 | |
| JP5297096B2 (ja) | 研磨布 | |
| JP6608239B2 (ja) | 研磨パッド | |
| KR101588925B1 (ko) | 유지 패드 | |
| KR101595149B1 (ko) | 유지 패드 | |
| JP5917236B2 (ja) | 研磨パッド用シート及びその製造方法、研磨パッド及びその製造方法、並びに研磨方法 | |
| KR100811399B1 (ko) | 연마용 흡착 패드 및 그 제조방법 | |
| JP6178190B2 (ja) | 研磨パッド | |
| JP5502542B2 (ja) | 研磨パッド | |
| JP4364291B1 (ja) | 研磨パッド | |
| JP5968179B2 (ja) | 保持パッド | |
| JP5587636B2 (ja) | 研磨パッド | |
| JP5421618B2 (ja) | 保持具 | |
| JP5355004B2 (ja) | 研磨パッドおよびその製造方法 | |
| JP2009061524A (ja) | 保持パッド | |
| JP6189013B2 (ja) | 研磨布 | |
| JP5912770B2 (ja) | 保持パッド | |
| JP2012101338A (ja) | 研磨パッド | |
| JP7302848B2 (ja) | 研磨シートおよび研磨方法 | |
| JP2024051638A (ja) | 研磨パッド、及び研磨加工物の製造方法 | |
| JP2011067924A (ja) | 保持パッド | |
| JP2011073093A (ja) | シート状研磨部材 |