TWI620278B - 電子封裝件及其製法 - Google Patents

電子封裝件及其製法 Download PDF

Info

Publication number
TWI620278B
TWI620278B TW105122019A TW105122019A TWI620278B TW I620278 B TWI620278 B TW I620278B TW 105122019 A TW105122019 A TW 105122019A TW 105122019 A TW105122019 A TW 105122019A TW I620278 B TWI620278 B TW I620278B
Authority
TW
Taiwan
Prior art keywords
substrate
electronic package
conductive
layer
electronic
Prior art date
Application number
TW105122019A
Other languages
English (en)
Other versions
TW201803034A (zh
Inventor
陳彥亨
江政嘉
Original Assignee
矽品精密工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 矽品精密工業股份有限公司 filed Critical 矽品精密工業股份有限公司
Priority to TW105122019A priority Critical patent/TWI620278B/zh
Priority to CN201610619453.1A priority patent/CN107622981B/zh
Publication of TW201803034A publication Critical patent/TW201803034A/zh
Application granted granted Critical
Publication of TWI620278B publication Critical patent/TWI620278B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/58Structural electrical arrangements for semiconductor devices not otherwise provided for
    • H01L2223/64Impedance arrangements
    • H01L2223/66High-frequency adaptations
    • H01L2223/6661High-frequency adaptations for passive devices
    • H01L2223/6677High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • H01L2924/15172Fan-out arrangement of the internal vias
    • H01L2924/15174Fan-out arrangement of the internal vias in different layers of the multilayer substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Details Of Aerials (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)

Abstract

一種電子封裝件,係包括:基板、設於該基板上之電子元件與導電柱、包覆該電子元件與該導電柱之封裝層、以及設於該封裝層上之天線結構,藉由該天線結構具有凹部之設計,以增加該天線結構的表面積,而能增加天線增益。本發明復提供該電子封裝件之製法。

Description

電子封裝件及其製法
本發明係有關一種電子封裝件,尤指一種具天線結構之電子封裝件及其製法。
隨著電子產業的蓬勃發展,電子產品也逐漸邁向多功能、高性能的趨勢。目前無線通訊技術已廣泛應用於各式各樣的消費性電子產品以利接收或發送各種無線訊號。為了滿足消費性電子產品的外觀設計需求,無線通訊模組之製造與設計係朝輕、薄、短、小之需求作開發,其中,平面天線(Patch Antenna)因具有體積小、重量輕與製造容易等特性而廣泛利用在手機(cell phone)、個人數位助理(Personal Digital Assistant,PDA)等電子產品之無線通訊模組中。
如第1圖所示,習知具有天線之半導體封裝件1係包括:一基板10、複數半導體元件11、封裝膠體12、至少一導電柱13以及一天線層14。該些半導體元件11與該導電柱13係設於該基板10上且電性連接該基板10。該封裝膠體12係形成於該基板10上以包覆各該半導體元件11與 該導電柱13。該天線層14係設於該封裝膠體12上並電性連接該導電柱13。
前述半導體封裝件1中,因產品微小化之趨勢,致使該天線層14之表面積受限於該半導體封裝件1的面積縮小化,導致該天線層14之有效面積隨之縮小而影響天線增益。
因此,如何克服上述習知技術之問題,實已成目前亟欲解決的課題。
為克服習知技術之種種缺失,本發明係提供一種電子封裝件,係包括:基板;電子元件,係設於該基板上;導電柱,係立設於該基板上;封裝層,係形成於該基板上,以包覆該電子元件與該導電柱;以及天線結構,係設於該封裝層上並具有至少一凹部。
本發明復提供一種電子封裝件之製法,係包括:提供一其上設有電子元件之基板;形成導電柱與封裝層於該基板上,且令該封裝層包覆該導電柱與該電子元件;以及設置天線結構於該封裝層上,其中,該天線結構具有至少一凹部。
前述之電子封裝件及其製法中,該電子元件電性連接該基板。
前述之電子封裝件及其製法中,該導電柱電性連接該基板。
前述之電子封裝件及其製法中,該導電柱係外露於該 封裝層。例如,該導電柱外露於該封裝層之表面係齊平該封裝層之表面。
前述之電子封裝件及其製法中,該天線結構電性連接該導電柱。
由上可知,本發明之電子封裝件及其製法,係藉由該天線結構具有凹部之設計,以增加該天線結構的表面積,故相較於習知技術之天線層,本發明之電子封裝件因增加該天線結構之表面積,而能增加天線增益。
1‧‧‧半導體封裝件
10,20,20’‧‧‧基板
11‧‧‧半導體元件
12‧‧‧封裝膠體
13,23‧‧‧導電柱
14‧‧‧天線層
2,2’‧‧‧電子封裝件
20a‧‧‧上表面
20b‧‧‧下表面
200,200’,200”‧‧‧電性接觸墊
201‧‧‧線路層
21a,21b,21c‧‧‧電子元件
210‧‧‧銲球
210’‧‧‧銲線
22‧‧‧封裝層
22a‧‧‧頂面
22b‧‧‧底面
220‧‧‧貫穿孔
23a‧‧‧外露表面
24‧‧‧天線結構
24a‧‧‧導電層
240‧‧‧凹部
25‧‧‧結合層
26‧‧‧銲球
第1圖係為習知半導體封裝件之剖面示意圖;以及第2A至2D圖係為本發明之電子封裝件之製法之剖面示意圖;其中,第2B’及2B”圖係為第2B圖之其它不同實施例之示意圖,第2D’圖係為第2D圖之另一實施例之示意圖。
以下藉由特定的具體實施例說明本發明之實施方式,熟悉此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之其他優點及功效。
須知,本說明書所附圖式所繪示之結構、比例、大小等,均僅用以配合說明書所揭示之內容,以供熟悉此技藝之人士之瞭解與閱讀,並非用以限定本發明可實施之限定條件,故不具技術上之實質意義,任何結構之修飾、比例關係之改變或大小之調整,在不影響本發明所能產生之功效及所能達成之目的下,均應仍落在本發明所揭示之技術 內容得能涵蓋之範圍內。同時,本說明書中所引用之如“上”、“一”及“下”等之用語,亦僅為便於敘述之明瞭,而非用以限定本發明可實施之範圍,其相對關係之改變或調整,在無實質變更技術內容下,當亦視為本發明可實施之範疇。
請參閱第2A至2D圖,係為本發明之電子封裝件2之製法之剖面示意圖。
如第2A圖所示,提供一具有上表面20a及下表面20b之基板20,以接置複數電子元件21a,21b,21c於該基板20之上表面20a上。
所述之基板20之上表面20a上具有線路層,該線路層包含複數電性接觸墊200,200’,200”。
於本實施例中,該基板20之種類繁多,並無特別限制。例如,該基板20之線路層具有至少一內部線路(圖略),且該內部線路可選擇性地電性連接各該電性接觸墊200,200’,200”;或者,如第2D’圖所示之基板20’係為無核心層式(coreless)態樣,其包含複數電性接觸墊200,200’,200”之線路層201係為扇出(fan-out)構造,且於底側可結合複數如銲球26之導電元件。
所述之電子元件21a,21b,21c係為主動元件(如電子元件21a,21b)、被動元件(如電子元件21c)或其二者組合等,其中,該主動元件係例如半導體晶片,且該被動元件係例如電阻、電容及電感。
於本實施例中,該電子元件21a係為覆晶式晶片,即 藉由複數銲球210對應電性連接至該基板20上表面20a上之部分電性接觸墊200;或者,該電子元件21b係為打線式晶片,即藉由複數銲線210’對應電性連接該基板20上表面20a上之部分電性接觸墊200’。
如第2B圖所示,形成一封裝層22與至少一導電柱23於該基板20之上表面20a上。
所述之封裝層22係包覆各該電子元件21a,21b,21c與該導電柱23,且各該電子元件21a,21b,21c未外露於該封裝層22。
所述之導電柱23係為銅柱,其立設於該電性接觸墊200”上並電性連接該電性接觸墊200”。
於本實施例中,該封裝層22具有頂面22a及相對該頂面22a且結合至該基板20之上表面20a的底面22b,其中,該導電柱23係外露於該封裝層22之頂面22a。具體地,該導電柱23之外露表面23a係齊平該封裝層22之頂面22a。
再者,有關該封裝層22與該導電柱23之製作方式繁多,並無特別限制。例如,如第2B’圖所示,先形成該封裝層22,再於該封裝層22上形成至少一貫穿孔220,之後將導電材(如銅材或導電膠)填入該貫穿孔220以形成該導電柱23。或者,如第2B”圖所示,先形成該導電柱23,再形成該封裝層22。
如第2C圖所示,形成一導電層24a於該導電柱23之外露表面23a與該封裝層22之頂面22a上。
所述之導電層24a之材質係如銅(Cu)、鎳(Ni)、鐵(Fe)、鋁(Al)或不銹鋼(Sus)等。
於本實施例中,以例如電鍍、化學鍍膜、或物理氣相沈積,如濺鍍(sputtering)等方式形成該導電層24a。
如第2D圖所示,形成複數凹部240於該導電層24a上,以令該導電層24a與該凹部240成為天線結構24,且該天線結構24電性連接該導電柱23。
於其它實施例中,如第2D’圖所示,另可形成一結合層25於該封裝層22與該天線結構24之間,以增加該天線結構24與該封裝層22之間的結合性。具體地,形成該結合層25之材質係為聚對二唑苯(Polybenzoxazole,簡稱PBO)、聚醯亞胺(Polyimide,簡稱PI)或預浸材(Prepreg,簡稱PP)等之介電材。
應可理解地,亦可先製成該具有凹部240之天線結構24,再結合至該封裝層22上。
本發明之電子封裝件2,2’係藉由該天線結構24具有圖案化凹部240之設計,以增加該天線結構24的表面積,故相較於習知技術之天線層,本發明之電子封裝件2因增加該天線結構24之表面積,而能增加天線增益。
本發明復提供一種電子封裝件2,2’,係包括有一基板20、複數電子元件21a,21b,21c、至少一導電柱23、一封裝層22、以及一天線結構24。
所述之基板20係具有複數電性接觸墊200,200’,200”。
所述之電子元件21a,21b,21c係設於該基板20上且電性連接部分電性接觸墊200,200’。
所述之導電柱23係立設於該基板20上並電性連接部分電性接觸墊200”。
所述之封裝層22係設於該基板20上,以包覆各該電子元件21a,21b,21c與該導電柱23。於一實施例中,該導電柱23係外露於該封裝層22。
所述之天線結構24係形成於該封裝層22上並電性連接該導電柱23,且該天線結構24具有複數凹部240。
於一實施例中,所述之電子封裝件2’復包括一結合層25,係形成於該封裝層22與該天線結構24之間。
綜上所述,本發明之電子封裝件及其製法,主要藉由該凹部之設計,以增加該天線結構的表面積,而能增加天線增益。
上述實施例係用以例示性說明本發明之原理及其功效,而非用於限制本發明。任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述實施例進行修改。因此本發明之權利保護範圍,應如後述之申請專利範圍所列。

Claims (12)

  1. 一種電子封裝件,係包括:基板;電子元件,係設於該基板上;導電柱,係立設於該基板上;封裝層,係形成於該基板上,以包覆該電子元件與該導電柱;以及天線結構,係設於該封裝層上並具有至少一凹部。
  2. 如申請專利範圍第1項所述之電子封裝件,其中,該電子元件電性連接該基板。
  3. 如申請專利範圍第1項所述之電子封裝件,其中,該導電柱電性連接該基板。
  4. 如申請專利範圍第1項所述之電子封裝件,其中,該導電柱係外露於該封裝層。
  5. 如申請專利範圍第4項所述之電子封裝件,其中,該導電柱外露於該封裝層之表面係齊平該封裝層之表面。
  6. 如申請專利範圍第1項所述之電子封裝件,其中,該天線結構電性連接該導電柱。
  7. 一種電子封裝件之製法,係包括:提供一其上設有電子元件之基板;形成導電柱與封裝層於該基板上,且令該封裝層包覆該導電柱與該電子元件;以及設置天線結構於該封裝層上,其中,該天線結構具有至少一凹部。
  8. 如申請專利範圍第7項所述之電子封裝件之製法,其中,該電子元件電性連接該基板。
  9. 如申請專利範圍第7項所述之電子封裝件之製法,其中,該導電柱電性連接該基板。
  10. 如申請專利範圍第7項所述之電子封裝件之製法,其中,該導電柱係外露於該封裝層。
  11. 如申請專利範圍第10項所述之電子封裝件之製法,其中,該導電柱外露於該封裝層之表面係齊平該封裝層之表面。
  12. 如申請專利範圍第7項所述之電子封裝件之製法,其中,該天線結構電性連接該導電柱。
TW105122019A 2016-07-13 2016-07-13 電子封裝件及其製法 TWI620278B (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW105122019A TWI620278B (zh) 2016-07-13 2016-07-13 電子封裝件及其製法
CN201610619453.1A CN107622981B (zh) 2016-07-13 2016-08-01 电子封装件及其制法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW105122019A TWI620278B (zh) 2016-07-13 2016-07-13 電子封裝件及其製法

Publications (2)

Publication Number Publication Date
TW201803034A TW201803034A (zh) 2018-01-16
TWI620278B true TWI620278B (zh) 2018-04-01

Family

ID=61086955

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105122019A TWI620278B (zh) 2016-07-13 2016-07-13 電子封裝件及其製法

Country Status (2)

Country Link
CN (1) CN107622981B (zh)
TW (1) TWI620278B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201947727A (zh) * 2018-05-09 2019-12-16 矽品精密工業股份有限公司 電子封裝件及其製法
CN111642060B (zh) * 2020-05-28 2022-11-22 青岛歌尔微电子研究院有限公司 通讯模组及其制作方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7444734B2 (en) * 2003-12-09 2008-11-04 International Business Machines Corporation Apparatus and methods for constructing antennas using vias as radiating elements formed in a substrate
US20120280366A1 (en) * 2011-05-05 2012-11-08 Telesphor Kamgaing Radio- and electromagnetic interference through-silicon vias for stacked- die packages, and methods of making same
US20120293392A1 (en) * 2010-01-20 2012-11-22 Insight Sip Sas Antenna-in-package structure
US20140225795A1 (en) * 2013-02-08 2014-08-14 Sj Antenna Design Shielding module integrating antenna and integrated circuit component
TWI478439B (zh) * 2012-06-18 2015-03-21 Univ Nat Sun Yat Sen 具有天線之系統封裝
TWI521794B (zh) * 2013-03-04 2016-02-11 日月光半導體製造股份有限公司 包括天線基板之半導體封裝件及其製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8749063B2 (en) * 2005-01-28 2014-06-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
CN102324416B (zh) * 2010-09-16 2015-07-22 日月光半导体制造股份有限公司 整合屏蔽膜及天线的半导体封装件

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7444734B2 (en) * 2003-12-09 2008-11-04 International Business Machines Corporation Apparatus and methods for constructing antennas using vias as radiating elements formed in a substrate
US20120293392A1 (en) * 2010-01-20 2012-11-22 Insight Sip Sas Antenna-in-package structure
US20120280366A1 (en) * 2011-05-05 2012-11-08 Telesphor Kamgaing Radio- and electromagnetic interference through-silicon vias for stacked- die packages, and methods of making same
TWI478439B (zh) * 2012-06-18 2015-03-21 Univ Nat Sun Yat Sen 具有天線之系統封裝
US20140225795A1 (en) * 2013-02-08 2014-08-14 Sj Antenna Design Shielding module integrating antenna and integrated circuit component
TWI521794B (zh) * 2013-03-04 2016-02-11 日月光半導體製造股份有限公司 包括天線基板之半導體封裝件及其製造方法

Also Published As

Publication number Publication date
CN107622981B (zh) 2020-05-05
TW201803034A (zh) 2018-01-16
CN107622981A (zh) 2018-01-23

Similar Documents

Publication Publication Date Title
TWI663701B (zh) 電子封裝件及其製法
TWI655719B (zh) 電子模組
US8502370B2 (en) Stack package structure and fabrication method thereof
TWI684260B (zh) 電子封裝件及其製法
TWI569390B (zh) 電子封裝件及其製法
CN109755202B (zh) 电子封装件及其制法
TWI688075B (zh) 電子封裝件
TWI594390B (zh) 半導體封裝件及其製法
TWI611542B (zh) 電子封裝結構及其製法
TW201818529A (zh) 電子封裝件及其製法
TWI659518B (zh) 電子封裝件及其製法
TWI678772B (zh) 電子封裝件及其製法
TWI634640B (zh) 電子封裝件及其製法
TWI649853B (zh) 電子封裝件及其承載結構與製法
TWI620278B (zh) 電子封裝件及其製法
US11764162B2 (en) Electronic package and method for manufacturing the same
TWI619224B (zh) 電子封裝件及其製法
TWI723414B (zh) 電子封裝件及其製法
US11515269B2 (en) Semiconductor packaging structure having antenna module
TWI689067B (zh) 電子封裝件及其製法
TWI796726B (zh) 電子封裝件及其製法
TWI605544B (zh) 基板結構及其製法
TWI558286B (zh) 封裝結構及其製法
KR20150031592A (ko) 반도체 패키지