TWI588103B - 用於接合鋯石基板的方法 - Google Patents
用於接合鋯石基板的方法 Download PDFInfo
- Publication number
- TWI588103B TWI588103B TW102142486A TW102142486A TWI588103B TW I588103 B TWI588103 B TW I588103B TW 102142486 A TW102142486 A TW 102142486A TW 102142486 A TW102142486 A TW 102142486A TW I588103 B TWI588103 B TW I588103B
- Authority
- TW
- Taiwan
- Prior art keywords
- refractory
- joined
- zircon
- substrate
- assembly
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims description 119
- 229910052845 zircon Inorganic materials 0.000 title claims description 86
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 title claims description 86
- 238000000034 method Methods 0.000 title claims description 63
- 230000000712 assembly Effects 0.000 claims description 32
- 238000000429 assembly Methods 0.000 claims description 32
- 238000010304 firing Methods 0.000 claims description 32
- 238000005304 joining Methods 0.000 claims description 28
- 238000005498 polishing Methods 0.000 claims description 17
- 230000003746 surface roughness Effects 0.000 claims description 16
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 13
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 7
- 230000000295 complement effect Effects 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 32
- 239000011230 binding agent Substances 0.000 description 31
- 238000004519 manufacturing process Methods 0.000 description 20
- 239000011819 refractory material Substances 0.000 description 18
- 230000007797 corrosion Effects 0.000 description 9
- 238000005260 corrosion Methods 0.000 description 9
- 229910003460 diamond Inorganic materials 0.000 description 7
- 239000010432 diamond Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 239000004576 sand Substances 0.000 description 6
- 238000001878 scanning electron micrograph Methods 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 5
- 239000006061 abrasive grain Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 230000009970 fire resistant effect Effects 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000006060 molten glass Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000013001 point bending Methods 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 238000009966 trimming Methods 0.000 description 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004630 atomic force microscopy Methods 0.000 description 2
- 230000006399 behavior Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004568 cement Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910018068 Li 2 O Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000005324 grain boundary diffusion Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/001—Joining burned ceramic articles with other burned ceramic articles or other articles by heating directly with other burned ceramic articles
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6567—Treatment time
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/963—Surface properties, e.g. surface roughness
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/343—Alumina or aluminates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/345—Refractory metal oxides
- C04B2237/348—Zirconia, hafnia, zirconates or hafnates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/78—Side-way connecting, e.g. connecting two plates through their sides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/80—Joining the largest surface of one substrate with a smaller surface of the other substrate, e.g. butt joining or forming a T-joint
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/685,149 US8956484B2 (en) | 2012-11-26 | 2012-11-26 | Method for bonding zircon substrates |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201431800A TW201431800A (zh) | 2014-08-16 |
| TWI588103B true TWI588103B (zh) | 2017-06-21 |
Family
ID=50772222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102142486A TWI588103B (zh) | 2012-11-26 | 2013-11-21 | 用於接合鋯石基板的方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8956484B2 (enExample) |
| EP (1) | EP2923351B1 (enExample) |
| JP (1) | JP6246226B2 (enExample) |
| KR (1) | KR20150089068A (enExample) |
| CN (1) | CN105122333A (enExample) |
| TW (1) | TWI588103B (enExample) |
| WO (1) | WO2014081904A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7194592B2 (ja) * | 2016-04-07 | 2022-12-22 | マテリオン コーポレイション | 酸化ベリリウム一体抵抗加熱器 |
| CN108368761A (zh) * | 2016-10-21 | 2018-08-03 | 康明斯排放处理公司 | 包括板的催化剂基底和过滤器结构及其形成方法 |
| KR102069422B1 (ko) * | 2017-12-19 | 2020-01-22 | 주식회사 티씨케이 | 유체 흐름이 가능한 유로가 형성된 접합 세라믹 및 이의 제조방법 |
| KR102069423B1 (ko) * | 2017-12-19 | 2020-01-22 | 주식회사 티씨케이 | 접합 세라믹 및 이의 제조방법 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201210956A (en) * | 2010-05-28 | 2012-03-16 | Corning Inc | Composite isopipe |
| CN102762362A (zh) * | 2010-02-24 | 2012-10-31 | 康宁股份有限公司 | 通过深海中等静压制来制造致密体的方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3338696A (en) | 1964-05-06 | 1967-08-29 | Corning Glass Works | Sheet forming apparatus |
| BE757057A (fr) | 1969-10-06 | 1971-04-05 | Corning Glass Works | Procede et appareil de controle d'epaisseur d'une feuille de verre nouvellement etiree |
| US4925608A (en) | 1988-09-27 | 1990-05-15 | Norton Company | Joining of SiC parts by polishing and hipping |
| JPH08118467A (ja) * | 1994-10-21 | 1996-05-14 | Matsushita Electric Ind Co Ltd | スクリーン印刷用グリーンシート |
| JP4370624B2 (ja) * | 1997-09-22 | 2009-11-25 | 嘉信 本橋 | アルミナ部材の接合方法 |
| TW508600B (en) * | 2000-03-30 | 2002-11-01 | Taiyo Yuden Kk | Laminated ceramic capacitor and its manufacturing method |
| JP4471190B2 (ja) * | 2000-12-01 | 2010-06-02 | コーニング インコーポレイテッド | フュージョン法による板ガラスの製造に用いられるアイソパイプのサグコントロール |
| US7722731B2 (en) * | 2001-08-07 | 2010-05-25 | Uchicago Argonne, Llc | Joining of advanced materials by plastic deformation |
| WO2006057408A1 (ja) | 2004-11-29 | 2006-06-01 | Kyocera Corporation | 複合セラミック体とその製造方法およびマイクロ化学チップ並びに改質器 |
| JP2007119262A (ja) * | 2005-10-25 | 2007-05-17 | Hideaki Inoue | アルミナセラミックス物品の製造方法 |
| CN2874389Y (zh) * | 2006-01-07 | 2007-02-28 | 段红 | 一种氮窑用承烧板 |
| CN101108775B (zh) | 2007-08-27 | 2010-10-13 | 中钢集团洛阳耐火材料研究院有限公司 | 一种氧化锆制品的制造方法 |
| EP2225181A1 (en) | 2007-11-29 | 2010-09-08 | Corning Incorporated | Creep resistant multiple layer refractory used in a glass manufacturing system |
| US7988804B2 (en) | 2008-05-02 | 2011-08-02 | Corning Incorporated | Material and method for bonding zircon blocks |
| KR101572707B1 (ko) | 2008-05-20 | 2015-11-27 | 코닝 인코포레이티드 | 저-변형-율 변성 지르콘 재료 및 물품 |
| JP5841329B2 (ja) * | 2009-12-25 | 2016-01-13 | 株式会社日本セラテック | セラミックス接合体の製造方法 |
| US8652281B2 (en) * | 2011-01-31 | 2014-02-18 | The United States Of America, As Represented By The Secretary Of The Navy | Spinel ceramics via edge bonding |
| TWI541208B (zh) | 2011-04-29 | 2016-07-11 | 康寧公司 | 用於製造玻璃物件的設備與方法 |
-
2012
- 2012-11-26 US US13/685,149 patent/US8956484B2/en not_active Expired - Fee Related
-
2013
- 2013-11-21 EP EP13856812.6A patent/EP2923351B1/en not_active Not-in-force
- 2013-11-21 TW TW102142486A patent/TWI588103B/zh not_active IP Right Cessation
- 2013-11-21 CN CN201380067900.1A patent/CN105122333A/zh active Pending
- 2013-11-21 WO PCT/US2013/071119 patent/WO2014081904A1/en not_active Ceased
- 2013-11-21 KR KR1020157016997A patent/KR20150089068A/ko not_active Withdrawn
- 2013-11-21 JP JP2015544122A patent/JP6246226B2/ja not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102762362A (zh) * | 2010-02-24 | 2012-10-31 | 康宁股份有限公司 | 通过深海中等静压制来制造致密体的方法 |
| TW201210956A (en) * | 2010-05-28 | 2012-03-16 | Corning Inc | Composite isopipe |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2923351A1 (en) | 2015-09-30 |
| US20140144571A1 (en) | 2014-05-29 |
| EP2923351B1 (en) | 2018-01-31 |
| EP2923351A4 (en) | 2016-08-17 |
| US8956484B2 (en) | 2015-02-17 |
| JP6246226B2 (ja) | 2017-12-13 |
| WO2014081904A1 (en) | 2014-05-30 |
| TW201431800A (zh) | 2014-08-16 |
| KR20150089068A (ko) | 2015-08-04 |
| JP2016503387A (ja) | 2016-02-04 |
| CN105122333A (zh) | 2015-12-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |