TWI563242B - Mass flow controller - Google Patents

Mass flow controller

Info

Publication number
TWI563242B
TWI563242B TW102101890A TW102101890A TWI563242B TW I563242 B TWI563242 B TW I563242B TW 102101890 A TW102101890 A TW 102101890A TW 102101890 A TW102101890 A TW 102101890A TW I563242 B TWI563242 B TW I563242B
Authority
TW
Taiwan
Prior art keywords
mass flow
flow controller
controller
mass
flow
Prior art date
Application number
TW102101890A
Other languages
English (en)
Other versions
TW201346227A (zh
Inventor
Junhua Ding
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of TW201346227A publication Critical patent/TW201346227A/zh
Application granted granted Critical
Publication of TWI563242B publication Critical patent/TWI563242B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/13—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using a reference counter
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y10T137/776—Control by pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8326—Fluid pressure responsive indicator, recorder or alarm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
TW102101890A 2012-01-20 2013-01-18 Mass flow controller TWI563242B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/354,988 US9846074B2 (en) 2012-01-20 2012-01-20 System for and method of monitoring flow through mass flow controllers in real time

Publications (2)

Publication Number Publication Date
TW201346227A TW201346227A (zh) 2013-11-16
TWI563242B true TWI563242B (en) 2016-12-21

Family

ID=47630535

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102101890A TWI563242B (en) 2012-01-20 2013-01-18 Mass flow controller

Country Status (8)

Country Link
US (1) US9846074B2 (zh)
EP (1) EP2805136B1 (zh)
JP (4) JP2015509250A (zh)
KR (3) KR20160142895A (zh)
CN (1) CN104114982A (zh)
SG (1) SG11201403889PA (zh)
TW (1) TWI563242B (zh)
WO (1) WO2013109443A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
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TWI773705B (zh) * 2016-12-31 2022-08-11 美商應用材料股份有限公司 用於基於熱的質量流量控制器（ｍｆｃｓ）之增進流量偵測可重複性的方法、系統及設備

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US9557744B2 (en) 2012-01-20 2017-01-31 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9471066B2 (en) 2012-01-20 2016-10-18 Mks Instruments, Inc. System for and method of providing pressure insensitive self verifying mass flow controller
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KR102101068B1 (ko) 2017-12-11 2020-04-14 조북룡 통합 분석기에 의한 질량 유량 최적화 제어 시스템
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CN111663192B (zh) * 2020-05-11 2021-05-25 浙江恒澜科技有限公司 一种控制腈纶上油时丝束含油均匀稳定性的装置及方法
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Publication number Priority date Publication date Assignee Title
TWI773705B (zh) * 2016-12-31 2022-08-11 美商應用材料股份有限公司 用於基於熱的質量流量控制器（ｍｆｃｓ）之增進流量偵測可重複性的方法、系統及設備

Also Published As

Publication number Publication date
TW201346227A (zh) 2013-11-16
KR101717546B1 (ko) 2017-03-17
JP6926168B2 (ja) 2021-08-25
JP2016189219A (ja) 2016-11-04
US20130186486A1 (en) 2013-07-25
JP6702923B2 (ja) 2020-06-03
KR20160142895A (ko) 2016-12-13
SG11201403889PA (en) 2014-08-28
CN104114982A (zh) 2014-10-22
JP2020024728A (ja) 2020-02-13
WO2013109443A1 (en) 2013-07-25
EP2805136B1 (en) 2021-03-10
JP2015509250A (ja) 2015-03-26
EP2805136A1 (en) 2014-11-26
KR20140110083A (ko) 2014-09-16
US9846074B2 (en) 2017-12-19
KR20170032481A (ko) 2017-03-22
JP2018010696A (ja) 2018-01-18

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