SG11201607383UA - System for and method of monitoring flow through mass flow controllers in real time - Google Patents

System for and method of monitoring flow through mass flow controllers in real time

Info

Publication number
SG11201607383UA
SG11201607383UA SG11201607383UA SG11201607383UA SG11201607383UA SG 11201607383U A SG11201607383U A SG 11201607383UA SG 11201607383U A SG11201607383U A SG 11201607383UA SG 11201607383U A SG11201607383U A SG 11201607383UA SG 11201607383U A SG11201607383U A SG 11201607383UA
Authority
SG
Singapore
Prior art keywords
real time
mass flow
monitoring
flow
controllers
Prior art date
Application number
SG11201607383UA
Inventor
Junhua Ding
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/205,030 external-priority patent/US9557744B2/en
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of SG11201607383UA publication Critical patent/SG11201607383UA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00—Arrangements for supervising or controlling working operations
    • F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/001—Means for regulating or setting the meter for a predetermined quantity
    • G01F15/002—Means for regulating or setting the meter for a predetermined quantity for gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/13—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using a reference counter
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
SG11201607383UA 2014-03-11 2015-02-13 System for and method of monitoring flow through mass flow controllers in real time SG11201607383UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/205,030 US9557744B2 (en) 2012-01-20 2014-03-11 System for and method of monitoring flow through mass flow controllers in real time
PCT/US2015/015831 WO2015138085A1 (en) 2014-03-11 2015-02-13 System for and method of monitoring flow through mass flow controllers in real time

Publications (1)

Publication Number Publication Date
SG11201607383UA true SG11201607383UA (en) 2016-10-28

Family

ID=54072261

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201607383UA SG11201607383UA (en) 2014-03-11 2015-02-13 System for and method of monitoring flow through mass flow controllers in real time

Country Status (7)

Country Link
EP (1) EP3117137B1 (en)
JP (2) JP6677646B2 (en)
KR (1) KR102303943B1 (en)
CN (2) CN106233061B (en)
SG (1) SG11201607383UA (en)
TW (1) TWI521190B (en)
WO (1) WO2015138085A1 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105387345A (en) * 2015-12-10 2016-03-09 济南华信自动化工程有限公司 Automatic changing cabinet for quantitative-type gas
KR20190059298A (en) * 2016-09-19 2019-05-30 플로우 디바이시스 앤드 시스템즈 인크. Apparatus and method for a self-compensating pressure-based mass flow controller
US10409295B2 (en) * 2016-12-31 2019-09-10 Applied Materials, Inc. Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)
CN107908201A (en) * 2017-09-25 2018-04-13 湖南工业大学 A kind of mixed gas flow intelligence control system and method
US10927920B2 (en) * 2017-10-04 2021-02-23 Illinois Tool Works, Inc Passive damping system for mass flow controller
CN107676627A (en) * 2017-10-26 2018-02-09 北京华福工程有限公司 The method of controlling security of producing ethylene with acetylene hydrogenation device
KR102628015B1 (en) * 2017-12-01 2024-01-23 삼성전자주식회사 mass flow controller, manufacturing apparatus of semiconductor device and maintenance method of the same
US10649471B2 (en) * 2018-02-02 2020-05-12 Mks Instruments, Inc. Method and apparatus for pulse gas delivery with isolation valves
JP2019200067A (en) * 2018-05-14 2019-11-21 横河電機株式会社 Measuring system, measuring method, and pressure measuring device
CN109681782A (en) * 2019-01-07 2019-04-26 上海嘉麟杰纺织科技有限公司 A kind of intelligent type automatic flow conveyance system
JP6687205B1 (en) * 2019-02-13 2020-04-22 株式会社昭和バルブ製作所 Control valve device
CN110425429B (en) * 2019-09-09 2021-04-23 山东拙诚智能科技有限公司 Method for monitoring state of valve port of pressure regulating device in real time and estimating downstream flow
KR102502013B1 (en) * 2020-09-18 2023-02-21 엠케이피 주식회사 Mass flow control device and control method therefor
EP3995791A1 (en) * 2020-11-04 2022-05-11 Focus-On V.O.F. Computer-implemented method for operating a shut-off valve and corresponding shut-off valve
KR102534971B1 (en) * 2020-12-17 2023-05-22 주식회사 한국가스기술공사 System and method for testing flow computer
CN113717757B (en) * 2021-11-03 2022-02-08 华能（天津）煤气化发电有限公司 Variable proportion feedback adjustment method for pulverized coal pressurized conveying
KR102526253B1 (en) * 2021-12-06 2023-04-28 대우조선해양 주식회사 Measurement unit of fuel oil flow for dual fuel engine, fuel oil supply system including the same unit, and vessel including the same system
KR102573651B1 (en) * 2021-12-06 2023-09-01 한화오션 주식회사 Measurement unit of fuel oil flow for dual fuel engine, fuel oil supply system including the same unit, and vessel including the same system
CN114935374A (en) * 2022-07-26 2022-08-23 克拉玛依市富城天然气有限责任公司 Control method and system for oil well natural gas flow metering process

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03211601A (en) * 1990-01-17 1991-09-17 Fujitsu Ltd Gas flow rate controller
US6810308B2 (en) * 2002-06-24 2004-10-26 Mks Instruments, Inc. Apparatus and method for mass flow controller with network access to diagnostics
JP4137666B2 (en) 2003-02-17 2008-08-20 株式会社堀場エステック Mass flow controller
JP4086057B2 (en) * 2004-06-21 2008-05-14 日立金属株式会社 Mass flow control device and verification method thereof
US7204158B2 (en) * 2004-07-07 2007-04-17 Parker-Hannifin Corporation Flow control apparatus and method with internally isothermal control volume for flow verification
US7296465B2 (en) * 2005-11-22 2007-11-20 Mks Instruments, Inc. Vertical mount mass flow sensor
JP4788920B2 (en) * 2006-03-20 2011-10-05 日立金属株式会社 Mass flow control device, verification method thereof, and semiconductor manufacturing device
US7636640B2 (en) * 2006-09-05 2009-12-22 Brooks Instrument, Llc Multi-gas flow device
US7891228B2 (en) * 2008-11-18 2011-02-22 Mks Instruments, Inc. Dual-mode mass flow verification and mass flow delivery system and method
JP2010169657A (en) * 2008-12-25 2010-08-05 Horiba Stec Co Ltd Mass flow meter and mass flow controller
JP4750866B2 (en) * 2009-02-18 2011-08-17 信越化学工業株式会社 Method and apparatus for producing quartz glass
US8793082B2 (en) * 2009-07-24 2014-07-29 Mks Instruments, Inc. Upstream volume mass flow verification systems and methods
TWI435196B (en) * 2009-10-15 2014-04-21 Pivotal Systems Corp Method and apparatus for gas flow control
DE102009046758A1 (en) * 2009-11-17 2011-05-19 Endress + Hauser Process Solutions Ag Self-monitoring flowmeter assembly and method of operation
CN202329700U (en) * 2011-12-01 2012-07-11 于邦仲 Controlling and correcting device of flow sensor
US9846074B2 (en) * 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time

Also Published As

Publication number Publication date
CN106233061A (en) 2016-12-14
CN106233061B (en) 2019-07-02
EP3117137A4 (en) 2017-11-01
KR20160132404A (en) 2016-11-18
JP2020098653A (en) 2020-06-25
CN110244780A (en) 2019-09-17
TWI521190B (en) 2016-02-11
EP3117137B1 (en) 2020-12-16
WO2015138085A1 (en) 2015-09-17
JP6677646B2 (en) 2020-04-08
EP3117137A1 (en) 2017-01-18
JP2017516183A (en) 2017-06-15
KR102303943B1 (en) 2021-09-27
TW201538934A (en) 2015-10-16

Similar Documents

Publication Publication Date Title
SG11201607383UA (en) System for and method of monitoring flow through mass flow controllers in real time
GB2534452B (en) Mass flow measurement apparatus and method
IL281065A (en) Inhalation monitoring system and method
SG11201403889PA (en) System for and method of monitoring flow through mass flow controllers in real time
PL3090416T3 (en) Method and system for monitoring
GB201501863D0 (en) Monitoring system and method
GB2588361B (en) System and method for pipeline maintenance
GB201510267D0 (en) Method and apparatus for monitoring pipeline
GB201408778D0 (en) Monitoring system and method
SG11201701772TA (en) Traffic flow control system and traffic flow control method
GB201702387D0 (en) An online meeting system and method
EP3207368A4 (en) Device and method for changing solution conditions in serial flow
IL248582B (en) Method and system for characterizing plant behavior
IL246905A0 (en) System and method for non-intrusive complete aircraft inspection
NO345245B1 (en) System and method for calculating flow velocity
EP3104136A4 (en) Flow speed measurement method and flow speed measurement system
GB201405881D0 (en) Method of determining a flow rate and related apparatus
GB2539825B (en) System and method for flow diversion
SG11201606712XA (en) System for and method of providing pressure insensitive self verifying mass flow controller
SG11201700287VA (en) Method and system for performing online advertisement monitoring
PL3089915T3 (en) Device and method for portioning a flow of individual products
GB2538688B (en) Means and method for monitoring fluid flow
GB201501850D0 (en) Monitoring system and method
GB201508079D0 (en) Plant operation training simulator system and method
GB201501299D0 (en) Flow control method and apparatus