JPH03211601A - Gas flow rate controller - Google Patents
Gas flow rate controllerInfo
- Publication number
- JPH03211601A JPH03211601A JP785090A JP785090A JPH03211601A JP H03211601 A JPH03211601 A JP H03211601A JP 785090 A JP785090 A JP 785090A JP 785090 A JP785090 A JP 785090A JP H03211601 A JPH03211601 A JP H03211601A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- sensor
- rate sensor
- gas flow
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011109 contamination Methods 0.000 abstract description 11
- 238000001514 detection method Methods 0.000 abstract description 10
- 230000002159 abnormal effect Effects 0.000 abstract description 3
- 230000007257 malfunction Effects 0.000 abstract description 2
- 230000010485 coping Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 38
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Flow Control (AREA)
Abstract
Description
【発明の詳細な説明】
〔概要〕
ガス流量制御装置に係り、特に半導体装置の製造工程で
使用するガス流量制御装置に関しガスのコンタミネーシ
ョンによる誤動作を直ちにキャッチして被害を防止する
ガス流量制御装置の提供を目的とし。[Detailed Description of the Invention] [Summary] A gas flow rate control device that immediately detects malfunctions due to gas contamination and prevents damage, particularly regarding gas flow rate control devices used in the manufacturing process of semiconductor devices. For the purpose of providing.
第１の流量センサと、第２の流量センサと、バルブと、
比較回路と、警報器と、比較制御回路を有し。a first flow sensor, a second flow sensor, a valve,
It has a comparison circuit, an alarm, and a comparison control circuit.
該第１の流量センサ及び該第２の流量センサはガス流量
を検知して電気信号に変換し、該バルブはガス流量を［
ｆｆＬ、該比較回路は該第１の流量センサの出力電圧と
該第２の流量センサの出力電圧を比較し、その差が予め
設定した値より大きい時に該警報器を作動させ、該比較
制御回路は該第１の流量センサの出力電圧と予めガス流
量に応じて設定した設定電圧を比較し、その差に応じて
該バルブを作動させてガス流量を一定に制御するガス流
量１ｊＪａ装置により構成する。The first flow sensor and the second flow sensor detect the gas flow rate and convert it into an electrical signal, and the valve converts the gas flow rate into an electric signal.
ffL, the comparison circuit compares the output voltage of the first flow rate sensor and the output voltage of the second flow rate sensor, activates the alarm when the difference is greater than a preset value, and operates the comparison control circuit. is constituted by a gas flow rate 1jJa device that compares the output voltage of the first flow rate sensor with a set voltage preset according to the gas flow rate, and operates the valve according to the difference to control the gas flow rate at a constant level. .
本発明はガス流量制御装置に係り、特に半導体装置の製
造工程で使用するガス流量制御装置に関する。The present invention relates to a gas flow rate control device, and more particularly to a gas flow rate control device used in the manufacturing process of semiconductor devices.
現在、−船釣に使用されているマスフローコントローラ
は、窒素（ＮＺ）、水素（Ｈｉ、酸素（０２）等のガス
流量をコントロールする場合はコンタミネーションによ
る流量センサ目詰まり等のトラブルを起こすことはない
が、半導体集積回路の製造工程中のエツチングで使用す
る２例えば３塩化はう素（ＢＣＩｓ）、 シラン（Ｓ
＋Ｈ４）４塩化炭素（ＣＣ１，）等のガスはコンタミネ
ーションによるトラブルを起こしやすい。Currently, the mass flow controllers used for boat fishing do not cause problems such as flow rate sensor clogging due to contamination when controlling the flow rate of gases such as nitrogen (NZ), hydrogen (Hi, oxygen (02), etc.). However, there are some materials used in etching during the manufacturing process of semiconductor integrated circuits, such as boron trichloride (BCIs) and silane (S
+H4) Gases such as carbon tetrachloride (CC1,) tend to cause problems due to contamination.
特にシラン系ガスは、水分や他のガスと結合し易く、数
々のトラブルを引き起こしてしまう。In particular, silane gases tend to combine with moisture and other gases, causing a number of problems.
マスフローコントローラ内でコンタミネーションにより
流量センサに目詰まりが生じると、設定流量とは異なる
流量となり、ウェハの処理条件が変わってしまい１発見
が遅れると多大の被害を被ることになる。If the flow rate sensor becomes clogged due to contamination in the mass flow controller, the flow rate will be different from the set flow rate, and the wafer processing conditions will change, causing great damage if the detection is delayed.
また、コンタミネーションによる固化物が塵埃としてウ
ェハに影響することもある。Furthermore, solidified matter due to contamination may affect the wafer as dust.
コンタミネーションの主な原因はマスフローコントロー
ラ内でのガスのリークと、微量の水分等の不純物を含む
パージガスによるパージである。The main causes of contamination are gas leaks within the mass flow controller and purging with purge gas containing impurities such as trace amounts of moisture.
これらを防止すればトラブルは発生しないが実際問題と
して完全に防止できるわけはなく、ある程度発生しにく
くはできるものの、コンタミネーションは必ず発生する
。If these problems can be prevented, problems will not occur, but as a practical matter, they cannot be completely prevented, and although it is possible to make them less likely to occur to some extent, contamination will always occur.
このため、コンタミネーションが発生してもそれに対処
する方法あるいは装置を開発する必要がある。Therefore, it is necessary to develop a method or device that can deal with contamination even if it occurs.
第２図はマスフローコントローラの従来例を説明するた
めの図であり、１は流量センサ １ａはセンサ管、 ｌ
ｂは検出回路、 ｌｃは増幅回路、３はバルブ、６は比
較制御回路、７は電圧設定回路を表す。FIG. 2 is a diagram for explaining a conventional example of a mass flow controller, in which 1 is a flow rate sensor, 1a is a sensor pipe, l
b represents a detection circuit, lc represents an amplifier circuit, 3 represents a valve, 6 represents a comparison control circuit, and 7 represents a voltage setting circuit.
センサ管１ａにはサーモレジスタが巻かれヒータの役目
も兼ねており、検出回路１ｂのブリッジ回路の一部を構
成している。A thermoresistor is wound around the sensor tube 1a, which also serves as a heater, and constitutes a part of the bridge circuit of the detection circuit 1b.
ガスが流れていない時ブリッジ回路は平衡で。The bridge circuit is in equilibrium when no gas is flowing.
ガスが流れている時は上流側の熱が下流側に移動し平衡
がくずれ、検出回路ｔｂに電圧が現れ、それが増幅回路
１ｃに送られる。When gas is flowing, heat from the upstream side moves to the downstream side, causing imbalance, and a voltage appears in the detection circuit tb, which is sent to the amplifier circuit 1c.
比較制御回路６は電圧設定回路７からの設定電圧と増幅
回路１ｃからの出力電圧（センサー出力）とを比較し、
それらの差信号を発生し、その差信号がゼロになるまで
バルブ３を制御してガス流量を一定に制御する。The comparison control circuit 6 compares the set voltage from the voltage setting circuit 7 and the output voltage (sensor output) from the amplifier circuit 1c,
A difference signal between them is generated, and the valve 3 is controlled until the difference signal becomes zero, thereby controlling the gas flow rate to a constant value.
ところが、もし、センサ管１ａに目詰まりが発生したと
すると、センサ管１ａのガスの流れが悪くなり、設定流
量が流れているにもかかわらすセンサ管１ａでは流量が
減少するので、比較制御回路６は設定流量が確保されて
いないと判断し、バルブ３を開けて流量を確保しようと
する。そのため、設定流量以上のガスが流れてしまうと
いった問題を生ずる。However, if clogging occurs in the sensor tube 1a, the flow of gas in the sensor tube 1a becomes poor and the flow rate in the sensor tube 1a decreases even though the set flow rate is flowing, so the comparison control circuit 6 determines that the set flow rate is not secured, and attempts to secure the flow rate by opening valve 3. Therefore, a problem arises in that gas flows at a flow rate higher than the set flow rate.
しかも、センサ管１ａの目詰まりを直ちに発見すること
ができないため流量異常の発見が遅れ、大きな被害を被
ること（こなる。Moreover, since clogging of the sensor tube 1a cannot be detected immediately, the detection of flow abnormality is delayed, resulting in great damage.
本発明はセンサ管に目詰まりが生じてガスの流れが悪く
なったら直ちにそれをキャッチして警報を発し、流量の
異常を防止するガス流量制御装置を提供することを目的
とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a gas flow rate control device that immediately detects clogging of a sensor pipe and causes a decrease in gas flow and issues an alarm to prevent flow rate abnormalities.
［課題を解決するための手段］
上記課題は、第１の流量センサ１と、第２の流量センサ
２と、バルブ３と、比較回路４と、警報器５と、比較＠
御回路６を有し、該第１の流量センサ１及び該第２の流
量センサ２はガス流量を検知して電気信号に変換し、該
バルブ３はガス流量を調節し、該比較回路４は該第１の
流量センサ１の出力電圧と該第２の流量センサ２の出力
電圧を比較し、その差が予め設定した値より大きい時に
該警報器５を作動させ、該比較制御回路６は該第１の流
量センサｌの出力電圧と予めガス流量に応じて設定した
設定電圧を比較し、その差に応じて該バルブ３を作動さ
せてガス流量を一定に制御するガス流量制御装置によっ
て解決される。[Means for solving the problem] The above problem is solved by the first flow rate sensor 1, the second flow rate sensor 2, the valve 3, the comparison circuit 4, the alarm device 5, and the comparison@
It has a control circuit 6, the first flow rate sensor 1 and the second flow rate sensor 2 detect the gas flow rate and convert it into an electric signal, the valve 3 adjusts the gas flow rate, and the comparison circuit 4 The output voltage of the first flow rate sensor 1 and the output voltage of the second flow rate sensor 2 are compared, and when the difference between them is larger than a preset value, the alarm 5 is activated, and the comparison control circuit 6 is activated. This problem is solved by a gas flow rate control device that compares the output voltage of the first flow rate sensor l with a set voltage preset according to the gas flow rate, and operates the valve 3 according to the difference to control the gas flow rate at a constant level. Ru.
本発明では第１の流量センサ１と第２の流量センサ２で
ガス流量を検知して電気信号に変換する。In the present invention, the first flow rate sensor 1 and the second flow rate sensor 2 detect the gas flow rate and convert it into an electrical signal.
もし、第１の流量センサｌと第２の流量センサ２のどち
らかに目詰まりが生じてガスの流れが悪くなると両者の
出力電圧に差を生じ、比較回路４が働いて警報器５を作
動させる。使用途中において第１の流量センサ１七第２
の流量センサ２が同時に目詰まりを起こし、同様にガス
の流れが悪（なるといった確率は極めて低いので、ｌ実
に目詰まりの発生を知ることができる。したがって、セ
ンサの目詰まりといったトラブルが発生しても、直ちに
対処することができ、ガス流量が設定量からはずれるこ
とを防止することができる。If either the first flow rate sensor 1 or the second flow rate sensor 2 becomes clogged and the gas flow deteriorates, a difference will occur in the output voltage between the two, and the comparison circuit 4 will operate to activate the alarm 5. let During use, the first flow rate sensor 17 and the second
The probability that the flow rate sensor 2 of the sensor 2 will become clogged at the same time and the gas flow will also be poor is extremely low, so you can actually know that the flow rate sensor 2 is clogged. Even if a problem occurs, it can be dealt with immediately and the gas flow rate can be prevented from deviating from the set amount.
第１図は実施例で２本発明によるマスフローコントロー
ラを説明するための図であり、１は第１の流量センサで
第１のセンサ管１ａ、検出回路１ｂ。FIG. 1 is a diagram for explaining a mass flow controller according to an embodiment of the present invention. Reference numeral 1 indicates a first flow rate sensor, a first sensor pipe 1a, and a detection circuit 1b.
増幅回路１ｃからなり、２は第２の流量センサで第２の
センサ管２ ａ ＋検出回路２ｂ、増幅回路２ｃからな
り、３はバルブ２４は比較回路、５は警報器、６は比較
制御回路、７は電圧設定回路を表す。It consists of an amplifier circuit 1c, 2 is a second flow rate sensor, a second sensor tube 2a + a detection circuit 2b, and an amplifier circuit 2c, 3 is a valve 24, a comparison circuit, 5 is an alarm, and 6 is a comparison control circuit. , 7 represents a voltage setting circuit.
第１のセンサ管１ａ、第２のセンサ管２ａはともにサー
モレジスタをもっていて、これらは検出回路ｌｂ、 ２
ｂのブリッジ回路の一部を構成し、ガス流量に比例した
出力電圧が増幅回路１ｃ、 ２ｃに送られる。Both the first sensor tube 1a and the second sensor tube 2a have thermoresistors, and these detect circuits lb, 2.
The output voltage proportional to the gas flow rate is sent to the amplifier circuits 1c and 2c.
比較回路は第１の流量センサ１からの出力電圧と第２の
流量センサ２からの出力電圧を比較する。The comparison circuit compares the output voltage from the first flow rate sensor 1 and the output voltage from the second flow rate sensor 2.
そして、その差が予め設定しである異常値を超えると警
報器５を動作させる。Then, when the difference exceeds a preset abnormal value, the alarm 5 is activated.
一方、第１の流量センサ１からの出力電圧は予め流すべ
きガス流量に応じて電圧設定回路７に設定された設定電
圧と比較制御回路６で比較され。On the other hand, the output voltage from the first flow rate sensor 1 is compared by the comparison control circuit 6 with a set voltage set in advance in the voltage setting circuit 7 according to the gas flow rate to be supplied.
その差に応じてバルブ３が駆動されてガス流量を一定に
保つように制御系が動作する。The control system operates so that the valve 3 is driven according to the difference and the gas flow rate is kept constant.
このようにして、警報器が動作しない間はガス流量を一
定に保ち、警報器が動作したら直ちにその事態に対処す
ることができる。In this way, the gas flow rate can be kept constant while the alarm is not activated, and the situation can be dealt with as soon as the alarm is activated.
なお、実施例（第１図）では第１の流量センサｌと第２
の流量センサ２をバルブ３の上流側に設置したが、下流
側に設置してもよく、警報器５を動作させる異常値の設
定に注意を払えば第１の流量センサ１と第２の流量セン
サ２を上流側と下流側に分けて設置することもできる。In addition, in the embodiment (Fig. 1), the first flow rate sensor l and the second
Although the flow rate sensor 2 is installed on the upstream side of the valve 3, it may be installed on the downstream side, and if care is taken to set the abnormal value that activates the alarm 5, the first flow rate sensor 1 and the second flow rate sensor The sensor 2 can also be installed separately on the upstream side and the downstream side.
さらに、電圧設定回路７の設定電圧と比較する出力電圧
は第１の流量センサ■と第２の流量センサ２のどちらか
らとってもよい。Further, the output voltage to be compared with the set voltage of the voltage setting circuit 7 may be obtained from either the first flow rate sensor 2 or the second flow rate sensor 2.
〔発明の効果］
以上説明した様に１本発明によれば、ガスフローコント
ローラにより一定流量のガスを供給し。[Effects of the Invention] As explained above, according to the present invention, a constant flow rate of gas is supplied by a gas flow controller.
その途中でコンタミネーション等によるセンサ管の目詰
まりがあっても直ちにそれをキャッチして。If the sensor tube becomes clogged due to contamination during the process, it can be caught immediately.
その事態に対処することができ、被害を避けることがで
きる。You can deal with the situation and avoid damage.
第１図は実施例を説明するための同
第２図は従来例を説明するための図
である。
図において５
■は流量センサであって第１の流量センサ。
１ａはセンサ管であって第１のセンサ管１ｂは検出回路
。
１ｃは増幅回路。
２は流量センサであって第２の流量センサ。
２ａはセンサ管であって第２のセンサ管。
２ｂは検出回路。
２ｃは増幅回路。
３はバルブ。
４は比較回路。
５は警報器
６は比較制御回路。
７は電圧設定回路FIG. 1 is a diagram for explaining an embodiment, and FIG. 2 is a diagram for explaining a conventional example. In the figure, 5 (2) is a flow rate sensor, which is a first flow rate sensor. 1a is a sensor tube, and the first sensor tube 1b is a detection circuit. 1c is an amplifier circuit. 2 is a flow rate sensor, which is a second flow rate sensor. 2a is a sensor tube, which is a second sensor tube. 2b is a detection circuit. 2c is an amplifier circuit. 3 is a valve. 4 is a comparison circuit. 5 is an alarm device 6 is a comparison control circuit. 7 is voltage setting circuit
Claims (1)
、バルブ（３）と、比較回路（４）と、警報器（５）と
、比較制御回路（６）を有し、 該第１の流量センサ（１）及び該第２の流量センサ（２
）はガス流量を検知して電気信号に変換し、該バルブ（
３）はガス流量を調節し、該比較回路（４）は該第１の
流量センサ（１）の出力電圧と該第２の流量センサ（２
）の出力電圧を比較し、その差が予め設定した値より大
きい時に該警報器（５）を作動させ、該比較制御回路（
６）は該第１の流量センサ（１）の出力電圧と予めガス
流量に応じて設定した設定電圧を比較し、その差に応じ
て該バルブ（３）を作動させてガス流量を一定に制御す
ることを特徴とするガス流量制御装置。[Claims] A first flow rate sensor (1), a second flow rate sensor (2), a valve (3), a comparison circuit (4), an alarm (5), a comparison control circuit ( 6), the first flow rate sensor (1) and the second flow rate sensor (2).
) detects the gas flow rate, converts it into an electrical signal, and connects the valve (
3) adjusts the gas flow rate, and the comparison circuit (4) compares the output voltage of the first flow rate sensor (1) with the second flow rate sensor (2).
), and when the difference is greater than a preset value, the alarm (5) is activated, and the comparison control circuit (
6) compares the output voltage of the first flow rate sensor (1) with a set voltage preset according to the gas flow rate, and operates the valve (3) according to the difference to control the gas flow rate at a constant level. A gas flow rate control device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP785090A JPH03211601A (en) | 1990-01-17 | 1990-01-17 | Gas flow rate controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP785090A JPH03211601A (en) | 1990-01-17 | 1990-01-17 | Gas flow rate controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03211601A true JPH03211601A (en) | 1991-09-17 |
Family
ID=11677101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP785090A Pending JPH03211601A (en) | 1990-01-17 | 1990-01-17 | Gas flow rate controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03211601A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5605969B2 (en) * | 2011-05-10 | 2014-10-15 | 株式会社フジキン | Pressure type flow rate control device with flow rate monitor, fluid supply system abnormality detection method using the same, and treatment method for monitor flow rate abnormality |
| CN104114982A (en) * | 2012-01-20 | 2014-10-22 | Mks仪器公司 | System for and method of monitoring flow through mass flow controllers in real time |
| JP2015104400A (en) * | 2013-11-28 | 2015-06-08 | エスイー工業株式会社 | Device for air purification treatment, and method for air purification treatment using the device |
| JP2015194421A (en) * | 2014-03-31 | 2015-11-05 | 日立金属株式会社 | Mass flowmeter, and mass flow rate controller using the mass flowmeter |
| US9471066B2 (en) | 2012-01-20 | 2016-10-18 | Mks Instruments, Inc. | System for and method of providing pressure insensitive self verifying mass flow controller |
| US9557744B2 (en) | 2012-01-20 | 2017-01-31 | Mks Instruments, Inc. | System for and method of monitoring flow through mass flow controllers in real time |
| US10031005B2 (en) | 2012-09-25 | 2018-07-24 | Mks Instruments, Inc. | Method and apparatus for self verification of pressure-based mass flow controllers |
| CN110244780A (en) * | 2014-03-11 | 2019-09-17 | Mks 仪器公司 | The system and method for the flow of mass flow controller are passed through for real-time monitoring |
-
1990
- 1990-01-17 JP JP785090A patent/JPH03211601A/en active Pending
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5605969B2 (en) * | 2011-05-10 | 2014-10-15 | 株式会社フジキン | Pressure type flow rate control device with flow rate monitor, fluid supply system abnormality detection method using the same, and treatment method for monitor flow rate abnormality |
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