JP6702923B2 - 質量流量コントローラ - Google Patents
質量流量コントローラ Download PDFInfo
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- JP6702923B2 JP6702923B2 JP2017201833A JP2017201833A JP6702923B2 JP 6702923 B2 JP6702923 B2 JP 6702923B2 JP 2017201833 A JP2017201833 A JP 2017201833A JP 2017201833 A JP2017201833 A JP 2017201833A JP 6702923 B2 JP6702923 B2 JP 6702923B2
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- 238000005259 measurement Methods 0.000 claims description 36
- 230000006870 function Effects 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 14
- 238000011144 upstream manufacturing Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000008901 benefit Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/005—Valves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
- G01F25/13—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using a reference counter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
- Y10T137/776—Control by pressures across flow line valve
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8326—Fluid pressure responsive indicator, recorder or alarm
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Measuring Volume Flow (AREA)
Description
本出願は、2012年1月20日に出願された米国特許出願第13/354,988号の優先権を米国特許法第119条の下で主張するものであり、その内容は参照として全体が本明細書に組み入れられる。
12,14 流量計
16 システムコントローラ
18 制御弁
20 MFC
28 ブロック
30,70 第1の流量計
32 吸気口
34 主流路
36 熱質量流量センサ
38 バイパス素子
40 毛管
42 抵抗素子
50,72 第2の流量計
52,74 流量制限器
54 温度センサ
56 上流圧センサ
58 下流センサ
60 排気口
76 比較器
78 閾値検出器
80 閾値設定
Claims (6)
- 半導体工程のための単一の制御弁を持つ主流路を画定する、質量流量コントローラであって、
前記主流路を画定する導管を含み、吸気口と排気口とを有するブロックと、
前記主流路に沿って配置され、質量流量コントローラを通るガスの質量流量を、工程の実行中に実時間で測定し、前記質量流量コントローラを通る測定された流量を表す第1の流量測定信号を生成するように機能する第1の流量計と、
前記主流路に沿って配置され、前記質量流量コントローラを通るガスの質量流量を、工程の実行中に実時間で測定し、前記質量流量コントローラを通る測定された流量を表す第2の流量測定信号を生成するように機能する第2の流量計であって、前記第1の流量計と同時に質量流量を測定する第2の流量計と、
システムコントローラであって、前記第1の流量計と前記第2の流量計とのそれぞれによって生成された前記第1の流量測定信号と前記第2の流量測定信号とを受信し、前記第1の流量測定信号および前記第2の流量測定信号から選ばれた1つに基づいて制御信号を生成し、前記第1の流量測定信号および前記第2の流量測定信号のもう1つは選ばれた流量測定信号を検証するために当該システムコントローラによって使用され、前記第1の流量測定信号と前記第2の流量測定信号の差が所定の閾値を超えた場合を示すアラーム信号を提供するように機能するシステムコントローラと、
を含み、
前記第1の流量計は熱質量流量計であり、前記第2の流量計は温度センサを含む差圧流量計であり、
前記制御弁は、前記主流路に沿って前記第1の流量計と前記第2の流量計との間に配置され、前記第1の流量計は前記制御弁の上流に配置され、前記第2の流量計は前記制御弁の下流に配置され、前記第1の流量計と前記第2の流量計とのそれぞれによって生成された前記第1の流量測定信号と前記第2の流量測定信号との両方を受信する前記システムコントローラによって提供された前記制御信号に応じて、前記質量流量コントローラを通るガスの質量流量を制御するように機能し、
前記システムコントローラは、
(i)前記第1および前記第2の流量計によって生成された2つの信号を受信し、これらの信号のうち1つを前記制御弁のための前記制御信号のために用いるように機能する流量制御部と、
(ii)前記第1および前記第2の流量計によってそれぞれ生成された前記第1および前記第2の流量測定信号を受信し、前記第1および前記第2の流量計のそれぞれから受信した前記第1および前記第2の流量測定信号の差を示す差信号を出力信号として生成するように機能する比較器と、
(iii)前記差信号を所定の閾値と比較し、前記差信号が前記所定の閾値を超えた場合にアラーム信号を生成するように機能する閾値検出器と
を含む、
質量流量コントローラ。 - 前記制御信号は、前記熱質量流量計によって測定された流量の関数として生成される、請求項1に記載の質量流量コントローラ。
- 前記制御信号は、前記差圧流量計によって測定された流量の関数として生成される、請求項1に記載の質量流量コントローラ。
- 前記閾値はユーザ設定である、請求項1に記載の質量流量コントローラ。
- 前記閾値は工場設定である、請求項1に記載の質量流量コントローラ。
- 前記閾値は、ガスを送るために前記質量流量コントローラを使用する工程の質量流量における許容差の関数として設定される、請求項1に記載の質量流量コントローラ。
Priority Applications (1)
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JP2019188054A JP6926168B2 (ja) | 2012-01-20 | 2019-10-11 | 質量流量コントローラ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/354,988 US9846074B2 (en) | 2012-01-20 | 2012-01-20 | System for and method of monitoring flow through mass flow controllers in real time |
US13/354,988 | 2012-01-20 |
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JP2016136282A Division JP2016189219A (ja) | 2012-01-20 | 2016-07-08 | 質量流量コントローラ |
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JP2018010696A JP2018010696A (ja) | 2018-01-18 |
JP6702923B2 true JP6702923B2 (ja) | 2020-06-03 |
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JP2016136282A Pending JP2016189219A (ja) | 2012-01-20 | 2016-07-08 | 質量流量コントローラ |
JP2017201833A Active JP6702923B2 (ja) | 2012-01-20 | 2017-10-18 | 質量流量コントローラ |
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JP2016136282A Pending JP2016189219A (ja) | 2012-01-20 | 2016-07-08 | 質量流量コントローラ |
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US (1) | US9846074B2 (ja) |
EP (1) | EP2805136B1 (ja) |
JP (4) | JP2015509250A (ja) |
KR (3) | KR20160142895A (ja) |
CN (1) | CN104114982A (ja) |
SG (1) | SG11201403889PA (ja) |
TW (1) | TWI563242B (ja) |
WO (1) | WO2013109443A1 (ja) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5433660B2 (ja) * | 2011-10-12 | 2014-03-05 | Ckd株式会社 | ガス流量監視システム |
JP5809012B2 (ja) * | 2011-10-14 | 2015-11-10 | 株式会社堀場エステック | 流量制御装置、流量測定機構、又は、当該流量測定機構を備えた流量制御装置に用いられる診断装置及び診断用プログラム |
DE102012109206B4 (de) * | 2011-11-30 | 2019-05-02 | Hanon Systems | Ventil-Sensor-Anordnung |
US9846074B2 (en) | 2012-01-20 | 2017-12-19 | Mks Instruments, Inc. | System for and method of monitoring flow through mass flow controllers in real time |
US9557744B2 (en) | 2012-01-20 | 2017-01-31 | Mks Instruments, Inc. | System for and method of monitoring flow through mass flow controllers in real time |
US9471066B2 (en) | 2012-01-20 | 2016-10-18 | Mks Instruments, Inc. | System for and method of providing pressure insensitive self verifying mass flow controller |
US20140060159A1 (en) * | 2012-08-31 | 2014-03-06 | Johnson & Johnson Consumer Companies, Inc. | Permeability flow cell and hydraulic conductance system |
US10031005B2 (en) | 2012-09-25 | 2018-07-24 | Mks Instruments, Inc. | Method and apparatus for self verification of pressure-based mass flow controllers |
CN106104402B (zh) * | 2014-02-13 | 2020-03-24 | Mks 仪器公司 | 提供压力不敏感自我验证的质量流量控制器的系统和方法 |
SG11201607383UA (en) * | 2014-03-11 | 2016-10-28 | Mks Instr Inc | System for and method of monitoring flow through mass flow controllers in real time |
JP6264152B2 (ja) * | 2014-03-31 | 2018-01-24 | 日立金属株式会社 | 質量流量計、及び当該質量流量計を使用する質量流量制御装置 |
JP6215120B2 (ja) * | 2014-04-11 | 2017-10-18 | 株式会社堀場エステック | 流量制御装置の検査方法、流量制御装置の検査システム、及び、流量制御装置の検査システム用プログラム |
US10359308B2 (en) * | 2014-12-12 | 2019-07-23 | Natural Gas Solutions North America, Llc | Flow meter and a method of calibration |
CN104596602A (zh) * | 2015-02-13 | 2015-05-06 | 广东奥迪威传感科技股份有限公司 | 超声波测量系统及其测量方法 |
US10514712B2 (en) * | 2015-08-31 | 2019-12-24 | Mks Instruments, Inc. | Method and apparatus for pressure-based flow measurement in non-critical flow conditions |
CN105353782B (zh) * | 2015-12-16 | 2018-10-09 | 笃为(上海)精密仪器有限公司 | 燃料流速控制方法和装置 |
US10386864B2 (en) * | 2016-04-12 | 2019-08-20 | Hitachi Metals, Ltd. | Mass flow controller and a method for controlling a mass flow rate |
US10684159B2 (en) * | 2016-06-27 | 2020-06-16 | Applied Materials, Inc. | Methods, systems, and apparatus for mass flow verification based on choked flow |
CN109891353A (zh) * | 2016-09-19 | 2019-06-14 | 流体设备系统有限公司 | 用于流量测量的可变限制 |
US10031004B2 (en) * | 2016-12-15 | 2018-07-24 | Mks Instruments, Inc. | Methods and apparatus for wide range mass flow verification |
US10409295B2 (en) * | 2016-12-31 | 2019-09-10 | Applied Materials, Inc. | Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS) |
US11105664B2 (en) | 2017-03-23 | 2021-08-31 | Honeywell International Inc. | Apparatus and method for creating inferential process flow measurements using flow restrictor and upstream and downstream pressure measurements |
JP7164938B2 (ja) * | 2017-07-31 | 2022-11-02 | 株式会社堀場エステック | 流量制御装置、流量制御方法、及び、流量制御装置用プログラム |
DK179765B1 (en) * | 2017-11-10 | 2019-05-14 | Danfoss A/S | A METHOD FOR CONTROLLING A FLUID FLOW THROUGH A VALVE |
KR102101068B1 (ko) | 2017-12-11 | 2020-04-14 | 조북룡 | 통합 분석기에 의한 질량 유량 최적화 제어 시스템 |
EP3511683B1 (fr) * | 2018-01-10 | 2022-04-20 | ABB France | Procédé de contrôle d'une installation de dosage |
US11002461B2 (en) * | 2018-02-15 | 2021-05-11 | Johnson Controls Technology Company | System and method for output compensation in flow sensors |
US10558227B2 (en) | 2018-02-15 | 2020-02-11 | Johnson Controls Technology Company | System and method for output compensation in flow sensors using pulse width modulation |
US10725484B2 (en) | 2018-09-07 | 2020-07-28 | Mks Instruments, Inc. | Method and apparatus for pulse gas delivery using an external pressure trigger |
AT522357B1 (de) * | 2019-03-18 | 2020-11-15 | Avl List Gmbh | Messsystem zur Messung eines Massendurchflusses, einer Dichte, einer Temperatur und/oder einer Strömungsgeschwindigkeit |
KR20210139347A (ko) * | 2019-04-25 | 2021-11-22 | 가부시키가이샤 후지킨 | 유량 제어 장치 |
EP3734233B1 (en) * | 2019-04-30 | 2023-12-13 | Fas Medic S.A. | Fluid sensing apparatus |
EP3734234B1 (en) | 2019-04-30 | 2022-05-04 | Fas Medic S.A. | Fluid sensing apparatus |
EP3848579B1 (de) * | 2020-01-13 | 2023-08-02 | Promix Solutions AG | System und verfahren zur dosierung eines flüssigen oder gasförmigen mediums |
CN111663192B (zh) * | 2020-05-11 | 2021-05-25 | 浙江恒澜科技有限公司 | 一种控制腈纶上油时丝束含油均匀稳定性的装置及方法 |
WO2022025017A1 (ja) * | 2020-07-30 | 2022-02-03 | ファナック株式会社 | 加圧流体供給システム |
DE102020210777A1 (de) * | 2020-08-26 | 2022-03-03 | Festo Se & Co. Kg | Durchflussregler, Ventilanordnung und Verfahren |
CN113514135B (zh) * | 2021-05-20 | 2024-06-28 | 中国烟草总公司郑州烟草研究院 | 基于质量流量反馈调节的流量盘流量测量装置和方法 |
EP4384780A1 (en) * | 2021-08-13 | 2024-06-19 | TSI Incorporated | Differential pressure liquid flow controller |
Family Cites Families (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3952759A (en) | 1974-08-14 | 1976-04-27 | M & J Valve Company | Liquid line break control system and method |
US4487213A (en) * | 1982-09-09 | 1984-12-11 | Omicron Technology Corporation | Mass flow controller apparatus |
JPH03166611A (ja) | 1989-11-27 | 1991-07-18 | Nec Corp | 質量流量制御装置 |
JPH03211601A (ja) | 1990-01-17 | 1991-09-17 | Fujitsu Ltd | ガス流量制御装置 |
JP3516772B2 (ja) | 1995-05-15 | 2004-04-05 | 株式会社テイエルブイ | 蒸気乾き度制御装置 |
JPH09280913A (ja) * | 1996-04-18 | 1997-10-31 | Yamatake Honeywell Co Ltd | 差圧流量計 |
US6394120B1 (en) * | 2000-10-06 | 2002-05-28 | Scales Air Compressor | Method and control system for controlling multiple compressors |
US6439253B1 (en) * | 2000-12-28 | 2002-08-27 | International Business Machines Corporation | System for and method of monitoring the flow of semiconductor process gases from a gas delivery system |
GB2376080B (en) | 2001-05-30 | 2004-08-04 | Micro Motion Inc | Flowmeter proving device |
US6652240B2 (en) | 2001-08-20 | 2003-11-25 | Scales Air Compressor | Method and control system for controlling multiple throttled inlet rotary screw compressors |
JP3619187B2 (ja) | 2001-12-04 | 2005-02-09 | シーケーディ株式会社 | 流量制御装置と流量制御方法 |
WO2004010234A2 (en) | 2002-07-19 | 2004-01-29 | Celerity Group, Inc. | Methods and apparatus for pressure compensation in a mass flow controller |
JP4502590B2 (ja) * | 2002-11-15 | 2010-07-14 | 株式会社ルネサステクノロジ | 半導体製造装置 |
JP4137666B2 (ja) | 2003-02-17 | 2008-08-20 | 株式会社堀場エステック | マスフローコントローラ |
JP4086057B2 (ja) | 2004-06-21 | 2008-05-14 | 日立金属株式会社 | 質量流量制御装置及びこの検定方法 |
US7204158B2 (en) | 2004-07-07 | 2007-04-17 | Parker-Hannifin Corporation | Flow control apparatus and method with internally isothermal control volume for flow verification |
US7474968B2 (en) | 2005-03-25 | 2009-01-06 | Mks Instruments, Inc. | Critical flow based mass flow verifier |
US7757554B2 (en) | 2005-03-25 | 2010-07-20 | Mks Instruments, Inc. | High accuracy mass flow verifier with multiple inlets |
US7461549B1 (en) | 2007-06-27 | 2008-12-09 | Mks Instruments, Inc. | Mass flow verifiers capable of providing different volumes, and related methods |
US7654151B2 (en) * | 2005-05-10 | 2010-02-02 | Agar Corporation Ltd. | Method and apparatus for measuring multi-streams and multi-phase flow |
WO2007002190A2 (en) | 2005-06-22 | 2007-01-04 | Los Robles Advertising, Inc. | Mass velocity and area weighted averaging fluid composition sampler and mass flow meter |
JP4856905B2 (ja) | 2005-06-27 | 2012-01-18 | 国立大学法人東北大学 | 流量レンジ可変型流量制御装置 |
US7296465B2 (en) | 2005-11-22 | 2007-11-20 | Mks Instruments, Inc. | Vertical mount mass flow sensor |
WO2008030454A2 (en) * | 2006-09-05 | 2008-03-13 | Celerity, Inc. | Multi-gas flow device |
KR101840047B1 (ko) | 2008-01-18 | 2018-03-19 | 피포탈 시스템즈 코포레이션 | 가스 유동 제어기의 인 시투 시험을 위한 방법 및 장치 |
US8197133B2 (en) | 2008-02-22 | 2012-06-12 | Brooks Instruments, Llc | System and method for sensor thermal drift offset compensation |
US8504318B2 (en) | 2008-03-05 | 2013-08-06 | Brooks Instruments, Llc | System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensor |
US8205629B2 (en) | 2008-04-25 | 2012-06-26 | Applied Materials, Inc. | Real time lead-line characterization for MFC flow verification |
JP5177864B2 (ja) | 2008-06-04 | 2013-04-10 | 株式会社フジキン | 熱式質量流量調整器用自動圧力調整器 |
BRPI0917012A2 (pt) | 2008-08-13 | 2016-02-16 | Shell Int Research | método e aparelho para controlar o fluxo de gás entre uma ou mais correntes de entrada e uma ou mais correntes de saída através de uma conjunção |
US7826986B2 (en) | 2008-09-26 | 2010-11-02 | Advanced Energy Industries, Inc. | Method and system for operating a mass flow controller |
US7891228B2 (en) | 2008-11-18 | 2011-02-22 | Mks Instruments, Inc. | Dual-mode mass flow verification and mass flow delivery system and method |
US8109289B2 (en) * | 2008-12-16 | 2012-02-07 | Honeywell International Inc. | System and method for decentralized balancing of hydronic networks |
JP2010169657A (ja) * | 2008-12-25 | 2010-08-05 | Horiba Stec Co Ltd | 質量流量計及びマスフローコントローラ |
JP4750866B2 (ja) | 2009-02-18 | 2011-08-17 | 信越化学工業株式会社 | 石英ガラスの製造方法及び装置 |
US8793082B2 (en) | 2009-07-24 | 2014-07-29 | Mks Instruments, Inc. | Upstream volume mass flow verification systems and methods |
KR20120092585A (ko) * | 2009-10-01 | 2012-08-21 | 가부시키가이샤 호리바 에스텍 | 유량 조정 밸브 및 매스 플로우 콘트롤러 |
TWI435196B (zh) | 2009-10-15 | 2014-04-21 | Pivotal Systems Corp | 氣體流量控制方法及裝置 |
DE102009046758A1 (de) * | 2009-11-17 | 2011-05-19 | Endress + Hauser Process Solutions Ag | Sich selbst überwachende Durchflussmessanordnung und Verfahren zu deren Betrieb |
US8265888B2 (en) | 2009-12-09 | 2012-09-11 | Pivotal Systems Corporation | Method and apparatus for enhancing in-situ gas flow measurement performance |
US8271210B2 (en) | 2009-12-09 | 2012-09-18 | Pivotal Systems Corporation | Method and apparatus for enhancing in-situ gas flow measurement performance |
US8271211B2 (en) | 2009-12-09 | 2012-09-18 | Pivotal Systems Corporation | Method and apparatus for enhancing in-situ gas flow measurement performance |
JP5718577B2 (ja) * | 2010-03-04 | 2015-05-13 | 竹本油脂株式会社 | O/w/o型ピッケリングエマルション及びその製造方法 |
US9056366B2 (en) * | 2010-05-21 | 2015-06-16 | Illinois Tool Works Inc. | Welding gas leak detection system and method |
US9400004B2 (en) | 2010-11-29 | 2016-07-26 | Pivotal Systems Corporation | Transient measurements of mass flow controllers |
US10353408B2 (en) | 2011-02-25 | 2019-07-16 | Mks Instruments, Inc. | System for and method of fast pulse gas delivery |
JP5752521B2 (ja) | 2011-04-28 | 2015-07-22 | 株式会社堀場エステック | 診断装置及びその診断装置を備えた流量制御装置 |
US9846074B2 (en) | 2012-01-20 | 2017-12-19 | Mks Instruments, Inc. | System for and method of monitoring flow through mass flow controllers in real time |
JP6563656B2 (ja) | 2012-03-07 | 2019-08-21 | イリノイ トゥール ワークス インコーポレイティド | 質量流量制御器の制御を改善するためのモデルを用いるためのシステムおよび方法 |
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WO2013109443A1 (en) | 2013-07-25 |
JP2018010696A (ja) | 2018-01-18 |
US20130186486A1 (en) | 2013-07-25 |
KR20160142895A (ko) | 2016-12-13 |
KR101717546B1 (ko) | 2017-03-17 |
JP2016189219A (ja) | 2016-11-04 |
TWI563242B (en) | 2016-12-21 |
KR20140110083A (ko) | 2014-09-16 |
US9846074B2 (en) | 2017-12-19 |
SG11201403889PA (en) | 2014-08-28 |
CN104114982A (zh) | 2014-10-22 |
TW201346227A (zh) | 2013-11-16 |
JP2015509250A (ja) | 2015-03-26 |
JP6926168B2 (ja) | 2021-08-25 |
KR20170032481A (ko) | 2017-03-22 |
EP2805136A1 (en) | 2014-11-26 |
EP2805136B1 (en) | 2021-03-10 |
JP2020024728A (ja) | 2020-02-13 |
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