SG11201403889PA - System for and method of monitoring flow through mass flow controllers in real time - Google Patents

System for and method of monitoring flow through mass flow controllers in real time

Info

Publication number
SG11201403889PA
SG11201403889PA SG11201403889PA SG11201403889PA SG11201403889PA SG 11201403889P A SG11201403889P A SG 11201403889PA SG 11201403889P A SG11201403889P A SG 11201403889PA SG 11201403889P A SG11201403889P A SG 11201403889PA SG 11201403889P A SG11201403889P A SG 11201403889PA
Authority
SG
Singapore
Prior art keywords
real time
mass flow
monitoring
flow
controllers
Prior art date
Application number
SG11201403889PA
Other languages
English (en)
Inventor
Junhua Ding
Original Assignee
Mks Instr Inc
Junhua Ding
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc, Junhua Ding filed Critical Mks Instr Inc
Publication of SG11201403889PA publication Critical patent/SG11201403889PA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/13—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using a reference counter
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y10T137/776—Control by pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8326—Fluid pressure responsive indicator, recorder or alarm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
SG11201403889PA 2012-01-20 2013-01-09 System for and method of monitoring flow through mass flow controllers in real time SG11201403889PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/354,988 US9846074B2 (en) 2012-01-20 2012-01-20 System for and method of monitoring flow through mass flow controllers in real time
PCT/US2013/020790 WO2013109443A1 (en) 2012-01-20 2013-01-09 System for and method of monitoring flow through mass flow controllers in real time

Publications (1)

Publication Number Publication Date
SG11201403889PA true SG11201403889PA (en) 2014-08-28

Family

ID=47630535

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201403889PA SG11201403889PA (en) 2012-01-20 2013-01-09 System for and method of monitoring flow through mass flow controllers in real time

Country Status (8)

Country Link
US (1) US9846074B2 (zh)
EP (1) EP2805136B1 (zh)
JP (4) JP2015509250A (zh)
KR (3) KR101717546B1 (zh)
CN (1) CN104114982A (zh)
SG (1) SG11201403889PA (zh)
TW (1) TWI563242B (zh)
WO (1) WO2013109443A1 (zh)

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Also Published As

Publication number Publication date
JP2016189219A (ja) 2016-11-04
US20130186486A1 (en) 2013-07-25
WO2013109443A1 (en) 2013-07-25
JP2018010696A (ja) 2018-01-18
KR20170032481A (ko) 2017-03-22
CN104114982A (zh) 2014-10-22
TWI563242B (en) 2016-12-21
JP6926168B2 (ja) 2021-08-25
KR20160142895A (ko) 2016-12-13
JP6702923B2 (ja) 2020-06-03
KR101717546B1 (ko) 2017-03-17
US9846074B2 (en) 2017-12-19
KR20140110083A (ko) 2014-09-16
JP2015509250A (ja) 2015-03-26
JP2020024728A (ja) 2020-02-13
EP2805136A1 (en) 2014-11-26
EP2805136B1 (en) 2021-03-10
TW201346227A (zh) 2013-11-16

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