TWI540662B - 基板處理裝置及基板處理系統 - Google Patents
基板處理裝置及基板處理系統 Download PDFInfo
- Publication number
- TWI540662B TWI540662B TW101136727A TW101136727A TWI540662B TW I540662 B TWI540662 B TW I540662B TW 101136727 A TW101136727 A TW 101136727A TW 101136727 A TW101136727 A TW 101136727A TW I540662 B TWI540662 B TW I540662B
- Authority
- TW
- Taiwan
- Prior art keywords
- ion beam
- substrate
- substrate processing
- upper plate
- processing apparatus
- Prior art date
Links
- 238000012545 processing Methods 0.000 title claims description 169
- 239000000758 substrate Substances 0.000 title claims description 128
- 238000010884 ion-beam technique Methods 0.000 claims description 113
- 230000000903 blocking effect Effects 0.000 claims description 64
- 238000012546 transfer Methods 0.000 claims description 44
- 238000001816 cooling Methods 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 229910052755 nonmetal Inorganic materials 0.000 claims description 8
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 229910000838 Al alloy Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 3
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 2
- 239000004917 carbon fiber Substances 0.000 claims description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 2
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 229910003468 tantalcarbide Inorganic materials 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 16
- 238000001704 evaporation Methods 0.000 description 8
- 230000008020 evaporation Effects 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 230000001678 irradiating effect Effects 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- 238000005468 ion implantation Methods 0.000 description 6
- 239000003507 refrigerant Substances 0.000 description 5
- 238000011109 contamination Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000009529 body temperature measurement Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical group [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- ZKEYULQFFYBZBG-UHFFFAOYSA-N lanthanum carbide Chemical compound [La].[C-]#[C] ZKEYULQFFYBZBG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/06—Screens for shielding; Masks interposed in the electron stream
- H01J29/07—Shadow masks for colour television tubes
- H01J29/076—Shadow masks for colour television tubes characterised by the shape or distribution of beam-passing apertures
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/13625—Patterning using multi-mask exposure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/3115—Doping the insulating layers
- H01L21/31155—Doping the insulating layers by ion implantation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020110141228A KR101769493B1 (ko) | 2011-12-23 | 2011-12-23 | 기판처리장치 및 그를 가지는 기판처리시스템 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201327706A TW201327706A (zh) | 2013-07-01 |
TWI540662B true TWI540662B (zh) | 2016-07-01 |
Family
ID=48637705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101136727A TWI540662B (zh) | 2011-12-23 | 2012-10-04 | 基板處理裝置及基板處理系統 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6190579B2 (ko) |
KR (1) | KR101769493B1 (ko) |
CN (1) | CN103177924B (ko) |
TW (1) | TWI540662B (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108766877A (zh) * | 2018-04-19 | 2018-11-06 | 中国科学院上海应用物理研究所 | 一种具有周期性的表面电势梯度的材料的制备方法 |
US20220028707A1 (en) * | 2020-07-21 | 2022-01-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Warm wafer after ion cryo-implantation |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6283467A (ja) * | 1985-10-09 | 1987-04-16 | Sharp Corp | パレツト移動型スパツタリング装置 |
JPH03269940A (ja) * | 1990-03-19 | 1991-12-02 | Hitachi Ltd | イオン注入装置及びそれを用いた半導体集積回路装置の製造方法 |
JPH0581268U (ja) * | 1992-04-07 | 1993-11-05 | 住友金属工業株式会社 | イオン注入機用試料支持台 |
JPH0636198U (ja) * | 1992-10-06 | 1994-05-13 | 日新電機株式会社 | 真空処理装置 |
US5825035A (en) * | 1993-03-10 | 1998-10-20 | Hitachi, Ltd. | Processing method and apparatus using focused ion beam generating means |
JPH1027568A (ja) * | 1996-07-11 | 1998-01-27 | Nissin Electric Co Ltd | イオン注入装置 |
JPH1060624A (ja) * | 1996-08-20 | 1998-03-03 | Matsushita Electric Ind Co Ltd | スパッタリング装置 |
JP3239779B2 (ja) * | 1996-10-29 | 2001-12-17 | 日新電機株式会社 | 基板処理装置および基板処理方法 |
US5983906A (en) * | 1997-01-24 | 1999-11-16 | Applied Materials, Inc. | Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment |
US6194734B1 (en) * | 1999-02-19 | 2001-02-27 | Axcelis Technologies, Inc. | Method and system for operating a variable aperture in an ion implanter |
JP2000285846A (ja) * | 1999-03-30 | 2000-10-13 | Sony Corp | イオン注入装置 |
NL1015155C2 (nl) * | 2000-05-11 | 2001-11-13 | Tno | Elektronenstraallithografie. |
JP2002155358A (ja) * | 2000-11-16 | 2002-05-31 | Ishikawajima Harima Heavy Ind Co Ltd | イオンシャワー装置 |
CN1322538C (zh) * | 2001-01-18 | 2007-06-20 | 瓦里安半导体设备联合公司 | 具有包括可调传动限制缝隙的分隔墙的靶腔的离子注入机 |
US6815696B2 (en) * | 2002-05-29 | 2004-11-09 | Ibis Technology Corporation | Beam stop for use in an ion implantation system |
JP4371011B2 (ja) * | 2004-09-02 | 2009-11-25 | 日新イオン機器株式会社 | イオンビーム照射装置およびイオンビーム照射方法 |
KR100734308B1 (ko) * | 2006-01-26 | 2007-07-02 | 삼성전자주식회사 | 가변 스크린 어퍼쳐를 갖는 이온 주입 시스템 및 이를이용한 이온 주입 방법 |
GB2443279A (en) * | 2006-07-18 | 2008-04-30 | Applied Materials Inc | Beam stop for an ion implanter |
US7605382B2 (en) * | 2006-10-31 | 2009-10-20 | Nissin Ion Equipment Co., Ltd. | Ion implanter |
US7977628B2 (en) * | 2008-06-25 | 2011-07-12 | Axcelis Technologies, Inc. | System and method for reducing particles and contamination by matching beam complementary aperture shapes to beam shapes |
US7816239B2 (en) * | 2008-11-20 | 2010-10-19 | Varian Semiconductor Equipment Associates, Inc. | Technique for manufacturing a solar cell |
JP2010174345A (ja) * | 2009-01-30 | 2010-08-12 | Seiko Epson Corp | 成膜装置 |
JP2009200048A (ja) * | 2009-04-06 | 2009-09-03 | Toyo Tanso Kk | イオン注入装置用黒鉛部材 |
US8198610B2 (en) * | 2009-10-20 | 2012-06-12 | Advanced Ion Beam Technology, Inc. | Ion implanter with variable aperture and ion implant method thereof |
JP5311681B2 (ja) * | 2010-05-26 | 2013-10-09 | 日新イオン機器株式会社 | イオン注入装置 |
-
2011
- 2011-12-23 KR KR1020110141228A patent/KR101769493B1/ko active IP Right Grant
-
2012
- 2012-09-10 JP JP2012198171A patent/JP6190579B2/ja not_active Expired - Fee Related
- 2012-09-12 CN CN201210336972.9A patent/CN103177924B/zh not_active Expired - Fee Related
- 2012-10-04 TW TW101136727A patent/TWI540662B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW201327706A (zh) | 2013-07-01 |
KR20130073401A (ko) | 2013-07-03 |
KR101769493B1 (ko) | 2017-08-30 |
JP2013134986A (ja) | 2013-07-08 |
CN103177924A (zh) | 2013-06-26 |
JP6190579B2 (ja) | 2017-08-30 |
CN103177924B (zh) | 2017-06-09 |
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Legal Events
Date | Code | Title | Description |
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MM4A | Annulment or lapse of patent due to non-payment of fees |