JP2013520565A - 多層体を処理するための配列、システム、および方法 - Google Patents
多層体を処理するための配列、システム、および方法 Download PDFInfo
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Abstract
Description
縮小チャンバ空間を形成する装置として、具体的には処理システム内の静止保持のために構成された、処理フードの内部または下に配置するステップ。
間に空間を備えて配置され、そうして多層体配列を形成するように、少なくとも部分的に2つの多層体の間に、位置決め装置に含まれる(すなわち、位置決め装置の一部である)、少なくとも1つの第一離間要素を配置するステップ。
第二離間要素上に層体の底部を配置するステップと、
第二離間要素上に第一離間要素を配置するステップと、
第一離間要素上に上部多層体を配置するステップ。
従って、第二離間要素、底部多層体、第一離間要素、上部多層体がサンドイッチ状に配置され、それにより多層体配列を形成する。
11 処理チャンバ、処理トンネル
12 チャンバ空間
13 入り口ドア
14 出口ドア
15 チャンバカバー
16 チャンバ床
17 チャンバ壁
18 電磁放射源
20 縮小チャンバ空間を形成する装置、処理ボックス
21、21’ 処理空間
22 カバー要素
23 床要素
24 側壁要素
28a、28b、28c、28d、28e 配列、多層体配列
30a、30b、30c、30d、30e、30f、30g 位置決め装置
40 底部多層体、基板
41、51 縁領域
44、54 処理対象面
45、55 (前駆体)被膜
50 上部多層体、基板
60、61、62、63、64、65 開放領域配列
66、67 長手辺配列
68、69 横辺配列
70a、70b、70c、70d、70e 第一離間要素
71 フレーム要素
72、73 フレームストリップ要素
74、75、76、81 交差接続要素
77、82 支持領域
80a、80b 第二離間要素
90 支持要素
100a、100b 処理ガスを供給および/または排出する装置、ガス供給要素および/またはガス排出要素
101 コネクタ要素
G ガス流方向
P 処理方向
B 入り口ドア、出口ドアの移動方向
Claims (15)
- 多層体配列(28aから28e)であって、
各々が少なくとも1つの処理対象面(44、54)を有する少なくとも2つの多層体(40、50)と、
多層体(40、50)を位置決めするための少なくとも1つの装置(30aから30g)と、を含み、装置(30aから30g)は各処理対象面(44、54)が互いに向かい合っており、そうして表面(44、54)の間に設けられた準閉鎖処理空間(21’)を形成し、そこで処理が行われるように構成されている、多層体配列。 - 処理チャンバ内に、または
チャンバ空間(12)を備える処理システム(10)の処理トンネル(11)内に、および/または
縮小チャンバ空間を形成する装置(20)内、例えば、具体的には処理システム(10)内の静止保持のために形成された、処理ボックス(20)内または処理フードの内部に、および/または
処理システム(10)の内外に輸送装置によって輸送するための運搬要素上に設けられている、請求項1に記載の多層体配列(28aから28e)。 - 装置(30aから30g)が、少なくとも部分的に縮小チャンバ空間を形成する装置(20)を形成するように2つの多層体(40、50)を配置するように形成されている、請求項2に記載の多層体配列(28aから28e)。
- 装置(30aから30g)が、多層体(40、50)が使用中に互いの上にサンドイッチ状に設けられ、そうして底部多層体(40)および上部多層体(50)を形成するように構成されている、請求項1から3のいずれか一項に記載の多層体配列(28aから28e)。
- 装置(30aから30g)が、少なくとも1つの第一離間要素(70a、70b、70c、70d、70e)を有し、これは上部多層体(50)および/または底部多層体(40)を収容するように構成されており、離間要素(70aから70e)はその間に空間を備えて設けられるように少なくとも部分的に2つの多層体(40、50)の間に設けられる、請求項4に記載の多層体配列(28aから28e)。
- 装置(30aから30g)が、少なくとも1つの第二離間要素(80a、80b)を有し、これは上部多層体(50)および/または底部多層体(40)を収容するように構成されており、第二離間要素(80a、80b)、底部多層体(40)、第一離間要素(70aから70e)、および上部多層体(50)がサンドイッチ状に設けられるように、第一離間要素(70aから70e)を収容するように構成されている、請求項5に記載の多層体配列(28aから28e)。
- 第一離間要素(70aから70e)および/または第二離間要素(80a、80b)が、いずれの場合も、具体的にはその縁領域(41、51)上の多層体(40、50)が少なくとも部分的にフレーム要素および/またはフレームストリップ要素(71、72、73)と当接するかまたはその上に載置されるように、少なくとも1つのフレーム要素(71)および/またはフレームストリップ要素(72、73)を有する、請求項5または6のいずれか一項に記載の多層体配列(28aから28e)。
- 第一離間要素および/または第二離間要素(80a、80b)が、多層体配列(28aから28e)上に、具体的にはいずれの場合も横辺(68、69)上に、処理空間(21’)の内外に処理ガスを供給および/または排出するための少なくとも1つの開放領域(60、61)が形成されるように、具体的には縁領域(41、51)上で、具体的にはその長手辺で、多層体(40、50)が、フレームストリップ要素(72、73)と少なくとも部分的に当接するかまたはその上に載置されるように、多層体(40、50)の延伸平面内で使用中に互いに向かい合っている、2つのフレームストリップ要素(72、73)を有する、請求項5から7のいずれか一項に記載の多層体配列(28aから28e)。
- 第一離間要素(70aから70e)および/または第二離間要素(80a、80b)が、処理空間(21、21’)の内外に処理ガスを供給および/または排出するためのガス供給要素および/またはガス排出要素(100a、100b)を有し、ガス供給要素および/またはガス排出要素(100a、100b)は、例えば、ガス供給ラインおよび/またはガス排出ラインを接続するための少なくとも1つのコネクタ要素(101)を用いて第一離間要素(70aから70e)および/または第二離間要素(80a、80b)に組み込まれたガス拡散器コームとして構成されている、請求項5から8のいずれか一項に記載の多層体配列(28aから28e)。
- 多層体(複数可)(40、50)もまた曲がりを防止するために支持されることが可能なように、第一離間要素(70aから70e)および/または第二離間要素(80a、80b)は、多層体(40、50)の延伸平面内で互いに向かい合っているそれぞれのフレーム要素(71)、使用中に互いに向かい合っているフレームストリップ要素(72、73)の領域の接続のために、それぞれ少なくとも1つの交差接続要素(74、75、76、81)を有する、請求項5から9のいずれか一項に記載の多層体配列(28aから28e)。
- 交差接続要素(74、75、76、81)が、多層体(40、50)が支持要素(90)を通じて交差接続要素(74、75、76、81)上に載置されるかまたはこれと当接するように、少なくとも1つの支持要素(90)、具体的には点状支持要素、例えば球状要素を有し、支持要素(90)は、それぞれの少なくとも1つのフレーム要素またはフレームストリップ要素(71、72、73)と同じ高さを有するように形成されている、請求項10に記載の多層体配列(28aから28e)。
- 少なくとも1つのフレーム要素またはフレームストリップ要素(71、72、73)が、多層体配列(40、50)の横辺(68、69)上および/または長手辺(66、67)上で、処理空間(21’)の内外に処理ガスを供給および/または排出するために、少なくとも1つの開放領域(60、61、62、63、64、65)が形成されるように、多層体(40、50)が支持要素(90)上に載置されるかまたはこれと当接するように、少なくとも2つの支持要素(90)を有する、請求項7から11のいずれか一項に記載の多層体配列(28aから28e)。
- 各々が少なくとも1つの処理対象面(44、54)を有する少なくとも2つの多層体(40、50)を処理するため、具体的にはセレン化するためのシステム(10)であって、チャンバ空間(12)を有する少なくとも1つの処理チャンバ(11)および請求項1から12のいずれか一項によって設けられた多層体配列を含む、システム。
- 各々が少なくとも1つの処理対象面(44、54)を有する少なくとも2つの多層体(40、50)を処理する方法であって、2つの多層体(40、50)は、それぞれの処理対象面(44、54)が互いに向かい合っており、そうして表面(44、54)の間に設けられた準閉鎖処理空間(21’)を形成し、そこで処理が行われるように設けられている、方法。
- 具体的には、各多層体がガラスパネルの形状で実現され、黄銅鉱薄膜半導体のセレン化および/または硫化のために少なくともCu、InまたはCu、In、GaまたはCu、In、Ga、セレン元素で被膜されている、薄膜太陽電池または薄膜太陽電池モジュール、具体的にはCIS(CIGSSe)−薄膜太陽電池またはCIS(CIGSSe)−薄膜太陽電池モジュールの製造のための、請求項1から12のいずれか一項に記載の多層体配列、ならびに請求項14に記載の方法の、使用。
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EP10154370A EP2360721A1 (de) | 2010-02-23 | 2010-02-23 | Vorrichtung zum Positionieren von mindestens zwei Gegenständen, Anordnungen, insbesondere Mehrschichtkörperanordnungen, Anlage zum Prozessieren, insbesondere zum Selenisieren, von Gegenständen, Verfahren zum Positionieren von mindestens zwei Gegenständen |
PCT/EP2011/052581 WO2011104222A1 (de) | 2010-02-23 | 2011-02-22 | Anordnung, anlage und verfahren zur prozessierung von mehrschichtkörpern |
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EP2360720A1 (de) * | 2010-02-23 | 2011-08-24 | Saint-Gobain Glass France | Vorrichtung zum Positionieren von mindestens zwei Gegenständen, Anordnungen, insbesondere Mehrschichtkörperanordnungen, Anlage zum Prozessieren, insbesondere zum Selenisieren, von Gegenständen, Verfahren zum Positionieren von mindestens zwei Gegenständen |
EP2360289A1 (de) | 2010-02-23 | 2011-08-24 | Saint-Gobain Glass France | Vorrichtung und Verfahren zum Abscheiden einer aus mindestens zwei Komponenten bestehenden Schicht auf einem Gegenstand |
EP2815426B1 (de) | 2012-02-16 | 2020-10-07 | (CNBM) Bengbu Design & Research Institute for Glass Industry Co., Ltd. | Prozessbox, anordnungen und verfahren zum prozessieren beschichteter substrate |
EP2875530B1 (de) | 2012-07-19 | 2020-12-09 | (CNBM) Bengbu Design & Research Institute for Glass Industry Co., Ltd. | Vermeidung von glasverbiegung bei thermischen verfahren |
US9899561B2 (en) | 2012-12-20 | 2018-02-20 | Bengbu Design & Research Institute For Glass Industry | Method for producing a compound semiconductor, and thin-film solar cell |
JP6567667B2 (ja) * | 2014-11-26 | 2019-08-28 | フォン アルデンヌ アセット ゲーエムベーハー ウント コー カーゲー | 基板保持デバイス、基板搬送デバイス、処理構成、及び基板を処理するための方法 |
DE102014224588B4 (de) | 2014-12-02 | 2019-08-01 | Heraeus Deutschland GmbH & Co. KG | Verfahren zum Herstellen eines plattenförmigen metallisierten Keramik-Substrats, Träger zum Herstellen des Substrats und Verwendung des Trägers |
KR102549544B1 (ko) | 2018-09-03 | 2023-06-29 | 삼성전자주식회사 | 메모리 장치 |
CN112938166B (zh) * | 2021-01-27 | 2022-10-21 | 珠海格力电器股份有限公司 | 一种包装结构及具有其的洗衣机 |
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EP2539927B1 (de) | 2019-12-04 |
KR20120123096A (ko) | 2012-11-07 |
WO2011104222A1 (de) | 2011-09-01 |
EP2539927A1 (de) | 2013-01-02 |
ES2774920T3 (es) | 2020-07-23 |
ZA201206143B (en) | 2013-09-25 |
CN102754197A (zh) | 2012-10-24 |
US20130029479A1 (en) | 2013-01-31 |
EA201290687A1 (ru) | 2013-05-30 |
KR101500820B1 (ko) | 2015-03-09 |
CN102754197B (zh) | 2016-05-25 |
EP2360721A1 (de) | 2011-08-24 |
JP5694384B2 (ja) | 2015-04-01 |
US9236282B2 (en) | 2016-01-12 |
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