TWI536027B - Substrate inspecting method - Google Patents

Description

Substrate detection method 【0001】

The present invention relates to a substrate detecting method, that is, a substrate detecting method, and more particularly to a substrate detecting method for improving the detection capability per unit time when detecting a multi-faceted IC package substrate.

【0002】

Conventionally, wiring formed on a substrate is used to transmit and receive electrical signals to an IC or a semiconductor component mounted on the substrate or an electronic component other than the above. Such wiring is formed to be finer and more complicated with the recent miniaturization of electronic components, and has lower resistance. As an example of such a substrate, there is a substrate called an IC package substrate.

[0003]

The IC package substrate is used for electrical connection or fixing of an IC chip and a printed wiring board, or for protecting an IC chip from external dust or the like.

[0004]

As described above, the IC package substrate has an interposer for connecting the IC chip and the printed wiring board. Therefore, the IC package substrate also requires a fine wiring technique corresponding to the IC wafer. In view of this, the wiring provided on the IC package substrate is formed by very fine wiring.

[0005]

In order to ensure that each wiring can accurately transmit an electrical signal, the IC package substrate measures electrical characteristics such as a resistance value or a leakage current between predetermined detection points by using a detection point set in advance on the wiring, and determines the result based on the measurement result. The wiring is good or not.

[0006]

Also, such an IC package substrate is mass-produced, but a plurality of IC package substrates are formed into one sheet in a manufacturing process. In view of this, there is a technique in which a plurality of detecting jigs are disposed in association with detection points of a plurality of unit substrates that are to be detected, and a plurality of unit substrates in the sheet substrate are subjected to one-time detection (for example, refer to Patent Document 1) ).

【0007】

In the sheet-like substrate in which a plurality of unit substrates are arranged in a plurality of rows and a plurality of rows, a plurality of detecting jigs corresponding to the unit substrate are combined to form a detecting jig, and the detecting jig is passed through the detecting jig. The detection is performed to simultaneously process a plurality of unit substrates with one-time detection, thereby improving the detection efficiency.

[0008]

Further, when the substrate detecting jig disclosed in Patent Document 1 is used, since the detecting jig heads corresponding to the respective unit substrates are provided, the detecting itself is electrically detected for each unit substrate. In particular, for a wiring having a plurality of terminals called a VG network (Voltage/Ground-net) used for supplying a power supply voltage or a ground or used for shielding, it is necessary to The other terminals perform conduction detection of the combined number of round Robin modes. Therefore, even if a plurality of detecting jigs are provided, it is necessary to electrically detect each unit substrate, so that the detection time cannot be shortened.

【0009】

Prior art literature

[0010]

Patent Document 1

[0011]

Japanese Patent Application Publication (E) No. 8-21867

[0012]

The present invention provides a substrate detecting method for improving the detection capability per unit time processing when detecting a sheet substrate having a plurality of unit substrates.

[0013]

According to the invention of one embodiment, there is provided a substrate detecting method for detecting two or more unit substrates when detecting a wiring pattern of a sheet substrate connected by a plurality of unit substrates having a plurality of wiring patterns having a plurality of ends The wiring pattern is connected to the substrate detecting device that performs electrical detection to determine whether the wiring pattern is good or not. The substrate detecting method includes the steps of: selecting one wiring pattern formed on one unit substrate to be a detecting object, and forming another wiring pattern Another wiring pattern formed on the unit substrate and formed in the same manner as one wiring pattern; in order to short-circuit one wiring pattern and another wiring pattern, one end of one wiring pattern is electrically connected to either end of another wiring pattern; Conduction detection between a terminal other than one end of one wiring pattern and a terminal other than either end of the other wiring pattern.

[0014]

According to one embodiment, a short-circuiting terminal for short-circuiting one wiring pattern and another wiring pattern is provided in a substrate detecting jig for electrically connecting the substrate detecting device and the sheet substrate.

[0015]

According to one embodiment, a short-circuiting terminal for short-circuiting one wiring pattern and another wiring pattern is provided on a connection portion for electrically connecting the substrate detecting jig to the substrate detecting device, wherein the substrate detecting jig is for electrically connecting the substrate The detecting device and the sheet substrate.

[0016]

According to one embodiment, the conduction detection is performed until the combination of the connection of one wiring pattern and another wiring pattern is completed.

[0017]

According to the present invention, in order to short-circuit one wiring pattern and another wiring pattern, one end of one wiring pattern is electrically connected to either end of another wiring pattern, and further, a terminal other than one end of one wiring pattern and another wiring Since the conduction detection is performed between the terminals other than the above-described one end of the pattern, the number of detections can be reduced.

[0018]

In particular, compared with the conventional detection method, since the number of detections can be reduced by about half, the detection capability per unit time processing can be greatly improved.

[0019]

Since the short-circuiting terminal for short-circuiting one wiring pattern and another wiring pattern is provided in the substrate-detecting jig for electrically connecting the substrate detecting device and the sheet substrate, the present invention can be implemented by manufacturing the substrate detecting jig. In view of this, the detection method of the present invention can be implemented inexpensively.

[0020]

A short-circuiting terminal for short-circuiting one wiring pattern and another wiring pattern is provided on a connection portion for electrically connecting the substrate detecting jig to the substrate detecting device, wherein the substrate detecting jig is for electrically connecting the substrate detecting device and the sheet shape Since the substrate is formed, a short-circuited portion is formed through the connection portion of the substrate detecting device, and the substrate can be easily and easily detected without forming a complicated device.

[0021]

The conduction detection between the terminal other than one end of one wiring pattern and the terminal other than the other wiring pattern is performed until the connection combination of one wiring pattern and the other wiring pattern is completed, so that one wiring pattern can be accurately performed. Turn-on detection with another wiring pattern and shorten the detection time.

1. . . Substrate detecting device

3. . . Hold body

4. . . Electrode body

5. . . Wire section

6. . . Connector

6a. . . Connection

20. . . Pallet

twenty one. . . Detection substrate

twenty two. . . Substrate holding unit

30. . . First detecting jig moving part

32. . . Detection fixture

33. . . Detection jig holding unit

34. . . Main camera

35. . . Contact terminal

40. . . Second detecting jig moving part

42. . . Detection fixture

43. . . Detection jig holding unit

44. . . Main camera

45. . . Contact terminal

60. . . Substrate moving part

61. . . Drive department

62. . . Ball screw

63. . . Bracket

B. . . Sheet substrate

CB. . . Unit substrate

CB1. . . surface

CB2. . . back

CB(A)~CB(D). . . Unit substrate

SW. . . Short circuit terminal

SW1. . . Short circuit terminal

SW2. . . Short circuit terminal

P. . . Wiring pattern

P(1)~P(4). . . Wiring pattern

T1~T5. . . Terminal

[0022]

Fig. 1 is a plan view showing an embodiment of a sheet substrate.

[0023]

Fig. 2 is a schematic cross-sectional view showing a unit substrate of a wiring pattern of a test object of the present invention.

[0024]

Fig. 3 is a cross-sectional view showing a schematic side view of the substrate detecting device of the present invention.

[0025]

Fig. 4 is a schematic side view of the substrate detecting jig of the present invention.

[0026]

Fig. 5 is a schematic view showing an embodiment of the present invention, and is a view schematically showing a state in which four unit substrates are detected.

[0027]

Figure 6 is a diagram conceptually showing the detection method of the present invention.

[0028]

The best mode for carrying out the invention will now be described.

[0029]

An object of the present invention is to efficiently perform detection of a sheet substrate B connected by a plurality of unit substrates CB having one or more wiring patterns P having a plurality of ends. Therefore, the sheet substrate B to be detected will be described.

[0030]

Fig. 1 shows an embodiment of a sheet substrate B. The sheet substrate B shown in Fig. 1 is arranged in a matrix shape by a plurality of unit substrates CB in which a plurality of wiring patterns are formed, and is formed in a sheet shape. As shown in Fig. 1, the sheet substrate B is formed in a matrix shape of a plurality of rows and columns by a plurality of unit substrates CB to be detected. The sheet substrate B is divided into each unit substrate CB after performing detection processing or the like. Each unit substrate CB is formed to have the same plurality of wiring patterns. The sheet substrate B shown in Fig. 1 is formed by a unit substrate CB having a structure of five rows and 15 columns. The number of rows formed on the unit substrate CB is not particularly limited. For convenience of explanation in the present specification and the drawings, the column direction of the sheet substrate B is represented by the x direction, the row direction orthogonal to the column direction is represented by the y direction, and the plane for the sheet substrate B is vertical. The direction (normal direction) is expressed in the z direction.

[0031]

A wiring pattern using a metal such as copper is formed on the unit substrate CB, and conduction and short-circuit detection of these wiring patterns are performed. A detection point for a contact terminal conduction contact to be described later is set in advance in these wiring patterns. Further, in the present specification, the detection point will be described as an end point of the wiring pattern P. The detection point is set so as to be normally connected to the contact terminal, and the electrical signal is transmitted and received from the substrate detecting device 1.

[0032]

Next, the multi-terminal wiring pattern will be described. The cross-sectional view of the unit substrate CB shown in Fig. 2 shows three wiring patterns P (P1 to P3). The wiring pattern P1 and the wiring pattern P2 are wirings called signal networks (signal-networks) for transmitting signals, and one side end thereof is formed on the surface CB1 of the unit substrate CB, and the other side end thereof Formed on the back surface CB2. Thereby, the surface CB1 and the back surface CB2 of the unit substrate CB can be electrically connected. Further, since the signal network is provided to connect between the two land portions so that electrical signals can be transmitted and received, there are many cases where the wiring path is simple, and the entire path length and surface area are small.

[0033]

The wiring pattern P3 is a wiring called a VG network (Voltage/Ground-net: a power supply layer or the like) used for supplying a power supply voltage or grounding or for masking. The embodiment of Fig. 2 shows a wiring pattern having four end points on the surface CB1 of the unit substrate CB and four end points on the back surface CB2. Since the VG network (wiring pattern P3) needs to supply a power supply voltage or a ground to a plurality of locations in the unit substrate CB and at the same time function as a mask for the signal network, there are many cases in which the unit substrate CB is arranged in a mesh shape. There are also many cases where the overall path length and surface area are large.

[0034]

An object of the present invention is to effectively detect a wiring pattern P which is formed at a plurality of ends of a wiring pattern P3 formed on a unit substrate CB of a sheet substrate B. The sheet substrate B has a plurality of unit substrates CB, and each unit substrate CB has a plurality of wiring patterns P. The wiring pattern P has a signal network, and there is also a VG network. Further, since the present invention is applied to the detection of the multi-terminal wiring pattern, the signal network (the wiring pattern at both ends) for connecting the two points as the wiring pattern P1 or the wiring pattern P2 will be substantially omitted in the following description. .

[0035]

Next, the substrate detecting device 1 for detecting a substrate used in the present invention will be described. Fig. 3 is a cross-sectional view showing the structure of a substrate detecting apparatus 1 according to an embodiment of the present invention. From the viewpoint of clarifying the moving direction of the transport table 20 and the first and second detecting jig moving portions 30 and 40, the orthogonal coordinate system according to the XYZ axis is shown in FIG. The Y-axis is a positive direction from the front side of the paper surface of the third drawing toward the back side.

[0036]

The substrate detecting device 1 includes a substrate moving portion 60 for moving the transfer table 20 along the X axis, and a first detecting jig 32, 42 for moving the plurality of substrate detecting contact terminals 35 and 45 in the YZ plane. And the second detecting jig moving parts 30, 40. The first and second detecting jig moving portions 30 and 40 are arranged symmetrically with respect to the XY plane.

[0037]

The transfer table 20 has a substrate holding portion 22 for carrying the detection substrate 21 and a cylindrical bracket 63 fixed to the lower surface thereof. The cylindrical holder 63 is formed with a screw hole penetrating in the longitudinal direction.

[0038]

The substrate moving portion 60 has a ball screw 62 that is screwed to the screw hole of the bracket 63, and a driving portion 61 that rotates the ball screw 62. The threads and grooves on the ball screw 62 are not shown for simplicity. When the ball screw 62 is rotated by the driving unit 61, the amount of movement and the moving direction of the carriage 63, that is, the conveyance table 20 in the X-axis direction, are determined based on the amount of rotation and the direction of rotation.

[0039]

The first detecting jig moving unit 30 includes a detecting jig holding unit 33 that moves the detecting jig 32 while holding the detecting jig 32 in which the plurality of contact terminals 35 for detecting the substrate are held. The plurality of contact terminals 35 for detecting the substrate are brought into contact with the detection points of the wirings of the detection target on the detection substrate 21. Further, the plurality of contact terminals 35 for detecting the substrate and the like are electrically connected to a scanner (not shown) for detecting and measuring the substrate via the detecting jig holding portion 33.

[0040]

The second detecting jig moving portion 40 has the same detecting jig holding portion 43 as the detecting jig holding portion 33 of the first detecting jig moving portion 30, and the detecting jig holding portion 43 has the detecting jig holding portion 33. The same function.

[0041]

The movement control of the first and second detecting jig moving portions 30, 40 and the substrate moving portion 60 is performed in accordance with a control device (not shown) of the substrate detecting device 1. Further, the first and second detecting jig moving units 30 and 40 are provided with main cameras 34 and 44 for specifying the positions of the detecting substrate 21 and the transfer table 20, respectively.

[0042]

Next, the detecting jigs 32 and 42 used in the substrate detecting device 1 will be described. Fig. 4 shows an embodiment of the detecting jig. The detecting jigs 32 and 42 include a plurality of contact terminals 35 and 45, a holding body 3 that holds the contact terminals in a multi-needle shape, and a contact with the contact terminal 35 and the substrate detecting device 1 while supporting the holding body 3. The electrode body 4 of the electrode portion in the on state; the lead portion 5 extending from the electrode portion and extending; and the connecting body 6 having the connecting portion 6a electrically connected to the substrate detecting device 1. Fig. 4 is a schematic side view for explaining the detecting jigs 32 and 42. Although the contact terminals 35 and 45 are illustrated in FIG. 4 as three, they are not particularly limited.

[0043]

The contact terminals 35 and 45 electrically connect the detection points set on the wiring pattern P to the electrode portions to be described later. One end of the contact terminal 35 is in contact with the detection point, and the other end of the contact terminals 35, 45 is in contact with the electrode portion. The detection points are electrically connected to the electrode portions through the contact terminals 35 and 45. The contact terminals 35, 45 may be, for example, members formed of an elongated rod shape and having both conductivity and flexibility. It is also possible to use a member that uses a spring that expands and contracts in the longitudinal direction.

[0044]

The electrode body 4 is for holding an electrode portion (not shown) electrically connected to the substrate detecting device 1 while being in contact with the other end of the contact terminals 35 and 45. The electrode portion is formed on substantially the same plane with respect to the surface of the electrode body 4. Preferably, the electrode portion is formed to be slightly larger than the outer diameter of the contact terminals 35, 45.

[0045]

The lead portion 5 electrically connects the electrode portion of the electrode body 4 to the connecting portion 6a of the connecting body 6 to be described later. The lead portion 5 may be electrically connected to the connecting portion 6a, and for example, a linear metal wire such as a copper wire may be used.

[0046]

When the lead portion 5 is manufactured by using a metal wire, a through hole can be formed in the electrode body 4, and a lead wire can be disposed in the through hole, and the lead wire can be cut in the same plane as the surface of the electrode body 4, whereby the electrode portion can be formed. At this time, one end portion of the metal wire can be used as the electrode portion, and the other end portion of the metal wire is electrically connected to the connection portion 6a.

[0047]

The connector 6 is for holding the connecting portion 6a electrically connected to the substrate detecting device 1. The connection portion 6a is electrically connected to the connection portion set at the connection of the substrate detecting device 1. The connection may be, for example, a connector connection formed in a concavo-convex shape.

[0048]

The holding body 3 guides one end of the contact terminals 35, 45 to the detection point and guides the other side end of the contact terminals 35, 45 to the electrode portion while holding the contact terminals 35, 45. The holding body 3 of Fig. 4 is formed by two plate-like members arranged at a predetermined interval, and the contact terminal 35 can be bent in a space formed by the two plate-shaped members.

[0049]

The substrate detecting jigs 32 and 42 are formed to include at least two or more detecting jig heads (not shown) corresponding to the unit substrate CB. The detecting jig head is placed in contact with the detection points previously set on the wiring pattern P of the unit substrate CB by the contact terminals 35 and 45. In view of this, for the unit substrate CB, the detecting jig heads are in one-to-one correspondence. Therefore, when the substrate detecting jigs 32 and 42 include four detecting jig heads, the four unit substrates CB of the sheet-like substrate B can be detected by one press, and can be set once according to the number of detecting jig heads. The number of unit substrates CB that can be detected when pressed down.

[0050]

As will be described in detail later, the present invention preferably detects that one wiring pattern formed on one unit substrate CB is short-circuited with the same wiring pattern formed on another unit substrate CB different from the unit substrate CB. The detection jig head is set to an even number. This is because the detection jig can be effectively utilized by setting the jig head for detection to an even number, thereby shortening the detection time.

[0051]

Next, in order to carry out the present invention, one wiring pattern P formed on one unit substrate CB is short-circuited with the wiring pattern P formed on the other unit substrate CB, which is the same as the wiring pattern P. This is to electrically connect one end of one wiring pattern P of one unit substrate CB to one end of the wiring pattern P formed on the other unit substrate CB. That is, since one wiring pattern P is connected in series to the other wiring pattern P, the one unit substrate CB and the predetermined wiring pattern of the other unit substrate CB are connected in series.

[0052]

Further, in addition to the above, the short-circuiting terminal SW may be a connection portion (not shown) for electrically connecting the substrate detecting jigs 32 and 42 to the substrate detecting device 1 for electrically connecting the substrate detecting device 1 and the sheet substrate B. When the connection portion as described above is used, one end of one wiring pattern P and one end of the other wiring pattern P can be electrically connected to the connection portion. Further, as in the case described above, it is preferable that the short-circuiting terminal SW is made to have a switching function capable of ON/OFF switching in a short-circuit state.

[0053]

The positional relationship between one wiring pattern P and the other wiring pattern P is not particularly limited, and it is preferable to use the adjacent unit substrate CB. By using the respective wiring patterns P of the adjacent unit substrates CB, the unit substrate CB can be effectively utilized.

[0054]

When one wiring pattern P and another wiring pattern P can be connected in series, any one end connecting one wiring pattern P and another wiring pattern P is not particularly limited. The short-circuit terminals that are connected in series to each other between the wiring patterns P may be provided in the substrate detecting jigs 32, 42 for electrically connecting the substrate detecting device 1 and the sheet substrate B. More specifically, the lead portion 5 of the substrate detecting jigs 32 and 42 shown in Fig. 4 can be used. A method of providing a short-circuit terminal SW that electrically connects one end of the wiring portion 5 electrically connected to one end of one wiring pattern P and one end of another wiring pattern P connected in series to one end of the one wiring pattern P may be employed. The wire portion 5 is short-circuited. The short-circuit terminal SW may be a switching element, and is preferably set such that a person performing the detection can switch ON/OFF of the short-circuit state.

[0055]

Fig. 5 is an explanatory view for explaining a case where the short-circuiting terminal SW1 and the short-circuiting terminal SW2 are used. In the embodiment of Fig. 5, four unit substrates CB (A) to CB (D) are formed on the sheet substrate B, and wiring patterns P are formed on the unit substrates CB (A) to CB (D), respectively. 1)~P(4). Further, five terminals T1 to T5 serving as terminals are formed in the wiring patterns P(1) to P(4). Each of the terminals is provided with a group of contact terminals 35 for electrically connecting to the substrate detecting device 1. The unit substrates CB(A) to CB(D) are only exemplified by the so-called multi-terminal wiring patterns P(1) to P(4), and the wiring patterns P of all the unit substrates CB(A) to CB(D). 1) to P (4) are the same wiring pattern.

[0056]

In the embodiment of Fig. 5, the terminal T5 of the wiring pattern P(1) of the unit substrate CB (A) and the terminal T1 of the wiring pattern P (2) of the unit substrate CB (B) are electrically connected through the short-circuit terminal SW1. . The terminal T5 of the wiring pattern P(3) of the unit substrate CB (C) and the terminal T1 of the wiring pattern P (4) of the unit substrate CB (D) are electrically connected to each other through the short-circuit terminal SW2. The short-circuiting terminal SW1 and the short-circuiting terminal SW2 are respectively formed by switches that can be turned ON/OFF.

[0057]

The substrate detecting device 1 includes a switch group and a power source (not shown), a voltmeter or an ammeter, and can measure the detected object based on the ON/OFF operation of the switch group. For example, when it is determined whether the resistance of the wiring between the terminal T1 and the terminal T2 of the wiring pattern P(1) is good or not, a predetermined voltage is applied between the terminal T1 and the terminal T2, and the flow between the terminal T1 and the terminal T2 is measured. Current. The resistance value is calculated based on the potential difference (voltage value) and the current value at this time, and the determination of the good or bad is performed based on the calculated resistance value.

[0058]

The above is a description of the substrate detecting device 1 and the substrate detecting jigs 32 and 42 and the short-circuiting terminal SW for carrying out the present invention.

[0059]

Next, the detection method of the present invention will be described using FIG. 5 and FIG. The present invention can effectively detect the wiring pattern P formed on the unit substrate CB. In the case of Fig. 4, first, the short-circuit terminal SW1 is turned ON.

[0060]

Next, the terminal T4 of the wiring pattern P1 and the terminal T2 of the wiring pattern P2 are formed as a closed circuit via the short-circuiting terminal SW1, and the resistance value between the terminal T4 and the terminal T2 is calculated, and the wiring is judged whether or not the wiring is good. Next, the terminal T3 of the wiring pattern P1 and the terminal T3 of the wiring pattern P2 are formed as a closed circuit via the short-circuit terminal SW1, and the resistance value between the terminal T3 of the wiring pattern P1 and the terminal T3 of the wiring pattern P2 is calculated, and further Determine whether the wiring is good or not. Next, the terminal T2 of the wiring pattern P1 and the terminal T4 of the wiring pattern P2 are formed as a closed circuit via the short-circuit terminal SW1, and the resistance value between the terminal T2 of the wiring pattern P1 and the terminal T4 of the wiring pattern P2 is calculated, and further Determine whether the wiring is good or not. Then, the terminal T1 of the wiring pattern P1 and the terminal T5 of the wiring pattern P2 are formed as a closed circuit via the short-circuiting terminal SW1, and the resistance value between the terminal T1 of the wiring pattern P1 and the terminal T5 of the wiring pattern P2 is calculated, and further, Judging whether the wiring is good or not. As described above, by connecting the connection wiring pattern P1 and the wiring pattern P2 in accordance with the short-circuit terminal SW1, the number of times of the conventional eight detections can be reduced to half, that is, four times.

[0061]

Although the detailed description is omitted, the same processing is performed on each of the wiring patterns P3 and P4 for the unit substrate CB (C) and the unit substrate CB (D), and the wiring pattern P is performed by halving the number of detection times. Detection.

[0062]

In the present invention, the IC package substrate is referred to as a test object, but the test object may be, for example, a printed wiring substrate, a flexible substrate, a ceramic multilayer wiring substrate, a liquid crystal display, or an electrode plate for a plasma display. Various substrates such as a package substrate for a semiconductor package or a film carrier can be applied to a semiconductor device such as a semiconductor wafer or a semiconductor wafer or a CSP (Chip Size Package).

B. . . Sheet substrate

P(2). . . Wiring pattern

CB(B). . . Unit substrate

T1. . . Terminal

T2. . . Terminal

T3. . . Terminal

T4. . . Terminal

T5. . . Terminal

SW1. . . Short circuit terminal

CB(A). . . Unit substrate

P(1). . . Wiring pattern

Claims (4)

[Item 1] A substrate detecting method for detecting two or more wiring patterns of the unit substrate and electrically detecting the wiring pattern of the sheet substrate connected by the plurality of unit substrates having the plurality of wiring patterns having the plurality of ends The substrate detecting device is connected to determine whether the wiring pattern is good or not. The substrate detecting method includes the following steps:
Selecting one wiring pattern formed on the unit substrate to be a detecting object, and another wiring pattern formed on the other unit substrate and formed in the same manner as the one wiring pattern;
In order to short-circuit the one wiring pattern and the other wiring pattern, either end of the one wiring pattern is electrically connected to either end of the other wiring pattern; and any one end of the one wiring pattern is performed Conduction detection between the terminals and terminals other than either end of the other wiring pattern. [Item 2] The substrate detecting method according to claim 1, wherein a short-circuiting terminal for short-circuiting the one wiring pattern and the other wiring pattern is provided for electrically connecting the substrate detecting device and the sheet substrate Substrate for detecting the substrate. [Item 3] The substrate detecting method according to claim 1, wherein the short-circuiting terminal for short-circuiting the one wiring pattern and the other wiring pattern is provided for electrically connecting the substrate detecting jig and the substrate detecting device The connection portion is configured to electrically connect the substrate detecting device and the sheet substrate. [Item 4] The substrate detecting method according to any one of claims 1 to 3, wherein the conduction detection is performed until all of the connection combinations of the one wiring pattern and the other wiring pattern are completed.