TWI576577B - Object detection method and device - Google Patents

Object detection method and device Download PDF

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Publication number
TWI576577B
TWI576577B TW104121948A TW104121948A TWI576577B TW I576577 B TWI576577 B TW I576577B TW 104121948 A TW104121948 A TW 104121948A TW 104121948 A TW104121948 A TW 104121948A TW I576577 B TWI576577 B TW I576577B
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detected
detecting device
seat
rail
light source
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TW104121948A
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Chinese (zh)
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TW201702583A (en
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han-sheng Lin
rui-ming Chen
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All Ring Tech Co Ltd
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Description

物件檢測方法及裝置 Object detecting method and device

本發明係有關於一種檢測方法及裝置,尤指一種用以進行電子元件疊片之品質瑕疵檢測之物件檢測方法及裝置。 The invention relates to a detecting method and device, in particular to an object detecting method and device for performing quality defect detection of electronic component laminations.

按,一般電子元件的封裝製程常會用到黏膠,特別在基板上作散熱片之植放時,使散熱片與基板間先塗覆黏膠,再將二者進行壓合固定為一般常見的製程,但塗覆黏膠的多寡會影響壓合的品質,例如過多的黏膠會造成散熱片與基板間在壓合時出現溢膠於二疊片細縫間的現象,如此將造成不良品的發生,因此在散熱片與基板的壓合過程中必須以人工方式進行溢膠情況的檢查,以適時判定不良品並予檢出。 According to the general electronic component packaging process, the adhesive is often used. Especially when the heat sink is placed on the substrate, the adhesive is first applied between the heat sink and the substrate, and then the two are pressed and fixed to be common. Process, but the amount of adhesive applied will affect the quality of the press. For example, too much adhesive will cause the glue between the heat sink and the substrate to overlap between the slits of the two laminated sheets, which will cause defective products. Therefore, in the process of pressing the heat sink and the substrate, it is necessary to manually check the overflow condition to determine the defective product at a proper time and check it out.

該先前技術以人工方式進行溢膠情況的檢查,雖然能判定不良品並予檢出,但在效率上無法因應龐大的產能,故僅能採樣檢出,且在判定不良品的標準上容易因人而異,人工目檢的誤判率高,無法使品質趨於一致。 In the prior art, the inspection of the overflow condition is performed manually. Although it is possible to determine the defective product and detect it, the efficiency cannot be matched with the large capacity, so it can only be sampled and detected, and it is easy to determine the standard of the defective product. Different from person to person, the false positive rate of manual visual inspection is high, and the quality cannot be consistent.

爰是,本發明的目的,在於提供一種可用以自動檢測二物件藉黏膠所形成的疊片物件之物件檢測方法。 Accordingly, it is an object of the present invention to provide an object detecting method which can be used to automatically detect a laminated object formed by a two-object adhesive.

本發明的另一目的,在於提供一種可用以自動檢測二物件藉黏膠所形成的疊片物件之物件檢測裝置。 Another object of the present invention is to provide an object detecting device which can be used for automatically detecting a laminated object formed by a two-object adhesive.

本發明的又一目的,在於提供一種用以執行如本發明目的之物件檢測方法的裝置。 It is still another object of the present invention to provide an apparatus for performing an object detecting method according to the object of the present invention.

依據本發明目的之物件檢測方法,包括:使複數個待檢測物以矩陣排列於一載盤中;該待檢測物為二物件藉黏膠所形成的疊片物件;使待檢測物被搬昇至載盤上方一預定高度;以一定位檢測裝置對該待檢測物進行取像定位;以一溢膠檢測裝置對待檢測物之待檢測部位取像,以進行溢膠檢測。 The object detecting method according to the object of the present invention comprises: arranging a plurality of objects to be detected in a matrix in a carrier; the object to be detected is a laminated object formed by using two adhesives; and the object to be detected is lifted. And a predetermined height above the loading tray; taking a positioning position of the object to be detected by a positioning detecting device; taking an image of the to-be-detected portion of the object to be detected by an overflow detecting device to perform overflow detection.

依據本發明目的之另一物件檢測方法,包括:一到位步驟,使一搬昇裝置位於一載盤上待檢測物下方一鏤空區間的下方;該待檢測物為二物件藉黏膠所形成的疊片物件;一搬昇步驟,使該搬昇裝置以一吸座上昇穿經載盤鏤空區間,將待檢測物向上搬昇至載盤上方一預定高度;一定位步驟,以一定位檢測裝置對該待檢測物進行取像,並使吸座調整方位以進行補正,使待檢測物位於一預定之檢測定位;一溢膠檢測步驟,以一溢膠檢測裝置對待檢測物之待檢測部位進行取像,以進行溢膠檢測。 Another object detecting method according to the object of the present invention comprises: a step of positioning, wherein a lifting device is located below a hollow space below the object to be detected on a carrier; the object to be detected is formed by the adhesive of two objects. a stacking object; a lifting step, causing the lifting device to rise through the tray hollowing interval with a suction seat, and lift the object to be detected upward to a predetermined height above the carrier; a positioning step to a positioning detecting device The object to be detected is imaged, and the abutment is adjusted to make a correction, so that the object to be detected is located at a predetermined detection position; and an overflow detection step is performed by a glue detection device to be detected on the portion to be detected of the object to be detected. Take the image for the glue detection.

依據本發明另一目的之物件檢測裝置,設於一機台台面上,包括:一軌架,其上形成盛載待檢測物之一載盤可於其上進行輸送的流路;該待檢測物為二物件藉黏膠所形成的疊片物件;一視覺定位單元,設有一定位檢測裝置對該載盤上待檢測物進行定位檢測;一視覺檢測單元,設有一膠檢測裝置對該載盤上待檢測物進行溢膠檢測;一基板移載單元,設有一搬昇裝置對該載盤上待檢測物進行搬昇操作。 An object detecting device according to another object of the present invention is provided on a machine table, comprising: a rail frame on which a flow path for carrying a carrier on a tray to be detected is formed; the to-be-detected The object is a laminated object formed by the adhesive of the two objects; a visual positioning unit is provided with a positioning detecting device for positioning detection of the object to be detected on the carrier; and a visual detecting unit is provided with a glue detecting device for the carrier The object to be detected is subjected to overflow detection; a substrate transfer unit is provided with a lifting device for carrying out the lifting operation of the object to be detected on the carrier.

依據本發明又一目的之物件檢測裝置,包括:用以執行如所述物件檢測方法的裝置。 An object detecting device according to still another object of the present invention comprises: means for performing the object detecting method as described.

本發明實施例之物件檢測方法及裝置,由於經由視覺定位單元對該載盤上待檢測物進行Z軸向之檢測定位,再經視覺檢測單元進行溢膠檢測,可達到垂直面對待檢測物的最佳取像品質,提高檢測之精準度,而在 基板移載單元對待檢測物進行Z軸向搬昇至載盤上方定位及R軸向之間歇旋轉操作下,可以自動完成二物件藉黏膠所形成的疊片物件之待檢測物檢測,特別是包括基板及散熱片之物件其全周各側的溢膠檢測,使檢測效率提昇,檢測品質一致;而藉由更換搬昇裝置之吸座,不僅可適合不同的待檢測物規格大小,亦可採一個或數個待檢測物同時升降進行檢測,提昇檢測效率;且視覺定位單元採由上往下執行對待檢測物之定位檢測,可兼具植片偏移檢測用途,而視覺檢測單元因正對待檢測物側邊且作四邊之全周取像,將使舉凡疊片等之品質瑕疵均可一併檢出,且視覺定位單元與視覺檢測單元雖不同一軸向進行檢測,卻可共用該第一光源與該第二光源,使成本有效降低。 The object detecting method and device of the embodiment of the present invention can detect the positioning of the object to be detected on the carrier by the visual positioning unit, and then perform the glue detection by the visual detecting unit, thereby achieving the vertical surface to be detected. The best image quality, improve the accuracy of detection, and The substrate transfer unit performs Z-axis lifting to the upper position of the carrier and the intermittent rotation operation of the R-axis, and can automatically detect the object to be detected of the laminated object formed by the two objects, especially The object including the substrate and the heat sink has the overflow detection on each side of the whole circumference, so that the detection efficiency is improved and the detection quality is consistent; and by replacing the suction seat of the lifting device, not only can the size of different objects to be detected be adapted, but also One or several objects to be tested are simultaneously raised and lowered for detection to improve the detection efficiency; and the visual positioning unit performs the position detection of the object to be detected from the top to the bottom, which can also be used for the detection of the offset of the implant, and the visual detection unit is positive The image of the side of the object to be detected and the full circumference of the four sides can be detected, and the quality of the laminated piece can be detected together, and the visual positioning unit and the visual inspection unit are detected in different axial directions, but the image can be shared. The first light source and the second light source are cost effective to reduce.

A‧‧‧待檢測物 A‧‧‧Testables

A1‧‧‧基板 A1‧‧‧Substrate

A2‧‧‧散熱片 A2‧‧‧ heat sink

A3‧‧‧溢膠部位 A3‧‧‧Over the glue

B‧‧‧軌架 B‧‧‧rail

B1‧‧‧載盤 B1‧‧‧ Carrier

B11‧‧‧鏤空區間 B11‧‧‧ Short-term interval

C‧‧‧機台台面 C‧‧‧ machine table

D‧‧‧視覺定位單元 D‧‧‧Visual Positioning Unit

D1‧‧‧腳架 D1‧‧‧ tripod

D2‧‧‧第一滑軌 D2‧‧‧ first slide

D3‧‧‧第一軌座 D3‧‧‧First rail seat

D4‧‧‧第一滑座 D4‧‧‧First slide

D5‧‧‧第二滑軌 D5‧‧‧Second rail

D6‧‧‧第二軌座 D6‧‧‧Second rail seat

D7‧‧‧第二滑座 D7‧‧‧Second slide

D8‧‧‧定位檢測裝置 D8‧‧‧ Positioning detection device

E‧‧‧視覺檢測單元 E‧‧‧Visual Inspection Unit

E1‧‧‧第三滑軌 E1‧‧‧ third slide

E2‧‧‧第三軌座 E2‧‧‧ third rail seat

E3‧‧‧第三滑座 E3‧‧‧ third slide

E4‧‧‧第四滑軌 E4‧‧‧fourth rail

E5‧‧‧第四軌座 E5‧‧‧fourth rail seat

E6‧‧‧第四滑座 E6‧‧‧fourth slide

E7‧‧‧溢膠檢測裝置 E7‧‧‧Overflow detection device

E8‧‧‧第一光源 E8‧‧‧ first light source

E9‧‧‧第二光源 E9‧‧‧second light source

F‧‧‧基板移載單元 F‧‧‧Substrate transfer unit

F1‧‧‧第五滑軌 F1‧‧‧ fifth slide

F2‧‧‧第五軌座 F2‧‧‧ fifth rail seat

F3‧‧‧第五滑座 F3‧‧‧5th slide

F4‧‧‧第六滑軌 F4‧‧‧ sixth slide

F5‧‧‧第六軌座 F5‧‧‧ sixth rail seat

F6‧‧‧第六滑座 F6‧‧‧6th slide

F7‧‧‧搬昇裝置 F7‧‧‧lifting device

F71‧‧‧搬昇座 F71‧‧‧lifting seat

F711‧‧‧第一固定座 F711‧‧‧first fixed seat

F712‧‧‧第七滑軌 F712‧‧‧ seventh slide

F713‧‧‧第七滑座 F713‧‧‧ seventh slide

F714‧‧‧搬昇驅動件 F714‧‧‧Moving drive parts

F715‧‧‧皮帶 F715‧‧‧Leather belt

F716‧‧‧螺桿 F716‧‧‧ screw

F717‧‧‧感應器 F717‧‧‧ sensor

F72‧‧‧旋轉座 F72‧‧‧ rotating seat

F721‧‧‧第二固定座 F721‧‧‧Second mount

F722‧‧‧旋轉驅動件 F722‧‧‧Rotary drive

F723‧‧‧皮帶 F723‧‧‧Leather belt

F724‧‧‧軸桿 F724‧‧‧ shaft

F725‧‧‧吸座 F725‧‧‧ suction seat

F726‧‧‧吸嘴 F726‧‧ ‧ nozzle

F727‧‧‧感應件 F727‧‧‧Inductive parts

圖1係本發明實施例中待檢測物溢膠實施例之立體示意圖。 FIG. 1 is a schematic perspective view of an embodiment of an overflow of a substance to be detected in an embodiment of the present invention.

圖2係本發明實施例中物件檢測裝置各機構配置關係立體示意圖。 2 is a perspective view showing the arrangement relationship of each mechanism of the object detecting device in the embodiment of the present invention.

圖3係本發明實施例中視覺檢測單元之立體示意圖。 3 is a perspective view of a visual inspection unit in an embodiment of the present invention.

圖4係本發明實施例中基板移載單元之立體示意圖。 4 is a perspective view of a substrate transfer unit in an embodiment of the present invention.

圖5係本發明實施例中搬昇裝置之立體分解示意圖。 FIG. 5 is a perspective exploded view of the lifting device in the embodiment of the present invention.

圖6係本發明實施例之軌架中,搬昇裝置位於待檢測物下方之示意圖。 Fig. 6 is a schematic view showing the lifting device located below the object to be detected in the rail frame of the embodiment of the invention.

圖7係本發明實施例之軌架中,搬昇裝置將待檢測物搬昇至載盤上方之立體示意圖。 Fig. 7 is a perspective view showing the lifting device of the embodiment of the present invention in which the lifting device lifts the object to be detected to the top of the carrier.

圖8 係本發明實施例中之到位步驟示意圖。 Figure 8 is a schematic diagram of the steps in place in the embodiment of the present invention.

圖9 係本發明實施例中之搬昇步驟示意圖。 Figure 9 is a schematic view showing the steps of lifting in the embodiment of the present invention.

圖10 係本發明實施例中之定位步驟示意圖。 FIG. 10 is a schematic diagram of a positioning step in an embodiment of the present invention.

圖11 係本發明實施例中之檢測對位步驟示意圖。 FIG. 11 is a schematic diagram of a step of detecting alignment in an embodiment of the present invention.

圖12 係本發明實施例中之溢膠檢測步驟示意圖。 Figure 12 is a schematic view showing the steps of detecting the overflow glue in the embodiment of the present invention.

圖13 係本發明實施例中之旋轉步驟示意圖。 Figure 13 is a schematic view showing the steps of rotation in the embodiment of the present invention.

請參閱圖1,本發明實施例中之待檢測物A為一包括基板A1及散熱片A2之物件,其呈一矩形體,具有四個直的側邊,每一側邊由於基板A1及散熱片A2以黏膠黏附所形成的上下二疊片狹縫間,因二疊片壓合而形成於整體待檢測物A周側二疊片狹縫間的溢膠部位A3將形成瑕疵,而致整體待檢測物A形成不良品,故應予檢測出。 Referring to FIG. 1 , an object to be detected A in the embodiment of the present invention is an object including a substrate A1 and a heat sink A2, which has a rectangular body and has four straight sides, each side being separated by the substrate A1 and the heat dissipation. The sheet A2 is formed by adhesive adhesion between the upper and lower two lamination slits, and the overflowing portion A3 formed between the two lamination slits on the circumference of the whole object to be detected A by the lamination of the two laminations will form a crucible. The entire object to be detected A forms a defective product and should be detected.

請參閱圖2、3,本發明實施例之物件檢測方法及裝置實施例可以如圖中所示之裝置來說明,包括:一軌架B,設於一機台台面C上,其上形成一載盤B1可於其上進行Y軸向輸送的流路;一視覺定位單元D,設於該機台台面C上,包括一兩側各受腳架D1架立而其上設有Y軸向第一滑軌D2的第一軌座D3,以及設於該第一滑軌D2的一第一滑座D4上之具有X軸向第二滑軌D5的第二軌座D6,第二滑軌D5上設有一第二滑座D7,其上設有一定位檢測裝置D8,其可為一CCD鏡頭,其用以由上往下執行對該載盤B1上物件進行Z軸向之定位檢測;一視覺檢測單元E,設於該機台台面C上,並位於軌架B一側之視覺定位單元D的第一軌座D3下方,用以由一側執行對該載盤B1上物件進行Y軸向之溢膠檢測;一基板移載單元F,設於該機台台面C上,並位於軌架B上載盤B1的下方,用以由下往上執行對該載盤B1上物件進行Z軸向之搬昇及R軸向之旋轉操作。 Referring to FIG. 2 and FIG. 3, an embodiment of an object detecting method and apparatus according to an embodiment of the present invention may be described as shown in the figure, including: a rail frame B disposed on a machine table C, and a device is formed thereon. The loading plate B1 can be used for the Y-axis conveying flow path; a visual positioning unit D is disposed on the machine table C, and includes a side stand D1 standing on the two sides and a Y-axis on the side a first rail D3 of the first slide rail D2, and a second rail mount D6 having a X-axis second slide rail D5 disposed on a first slide D4 of the first slide rail D2, and a second slide rail The D5 is provided with a second sliding seat D7, and is provided with a positioning detecting device D8, which can be a CCD lens for performing Z-axis positioning detection on the object on the carrier B1 from top to bottom; The visual detecting unit E is disposed on the machine table C and located below the first rail D3 of the visual positioning unit D on the side of the rail B for performing the Y-axis of the object on the carrier B1 by one side. A substrate transfer unit F is disposed on the machine table C and located below the loading frame B1 of the rail B for performing the carrier B1 from bottom to top. Z-axis of the conveying member for rotational operation of the axial and R l.

請參閱圖2、3,該視覺檢測單元E包括:一其上設有Y軸向第三滑軌E1之第三軌座E2,第三滑軌E1上設有一第三滑座E3;第三滑座E3上設有一其上設有X軸向第四滑軌E4的第四軌座E5,第四滑軌E4上設有一第四滑座E6;第四滑座E6上設有一溢膠檢測裝置E7,其可為一CCD鏡頭,在溢膠檢測裝置E7進行檢測之前方設有一第一光源E8,以及三個圍設呈矩形三個邊的第二光源E9,該第一光源E8與該三個第二光源E9共同圍設呈一矩形狀而各分別為矩形的四個邊並提供一面形光源,其所圍設矩形平面與軌架B上載盤B1之平面約略平行,且矩形框圍的區間恰位於該受檢測之待檢測物A上方,該第一光源E8與該第二光源E9各分別對應於該待檢測物A上方的外側;該第一光源E8與第二光源E9與溢膠檢測裝置E7同步連動並可分別獨立啟閉光源,該第一光源E8與第二光源E9所共同圍設的光源係供該定位檢測裝置D8進行定位檢測時使用,故定位檢測裝置D8進行定位檢測時,該第一光源E8與第二光源E9皆呈開啟狀態,該第一光源E8係供溢膠檢測裝置E7檢測時使用,故溢膠檢測裝置E7進行溢膠檢測時,第二光源E9皆呈關閉狀態,僅第一光源E8呈開啟狀態,且該第一光源E8之方位與溢膠檢測裝置E7之檢測訊號軸向呈垂直。 Referring to FIG. 2 and FIG. 3, the visual detecting unit E includes: a third rail seat E2 having a Y-axis third slide rail E1 disposed thereon, and a third slide rail E3 disposed on the third rail E1; The slide seat E3 is provided with a fourth rail seat E5 on which the X-axis fourth slide rail E4 is disposed, and the fourth slide rail E4 is provided with a fourth slide seat E6; the fourth slide seat E6 is provided with an overflow glue detection. The device E7, which can be a CCD lens, is provided with a first light source E8 and three second light sources E9 surrounded by three sides of the rectangle before the detection of the glue detecting device E7, the first light source E8 and the The three second light sources E9 are arranged in a rectangular shape and each of the four sides of the rectangle and provide a one-side light source, and the rectangular plane is arranged to be approximately parallel to the plane of the tray B on the tray B1, and the rectangular frame is surrounded. The first light source E8 and the second light source E9 respectively correspond to the outer side above the object to be detected A; the first light source E8 and the second light source E9 and the overflow are located just above the detected object to be detected A. The glue detecting device E7 is synchronously linked and can independently open and close the light source, and the light source enclosed by the first light source E8 and the second light source E9 is provided for The position detecting device D8 is used for positioning detection. Therefore, when the positioning detecting device D8 performs the positioning detection, the first light source E8 and the second light source E9 are both turned on, and the first light source E8 is used for detecting the overflow detecting device E7. Therefore, when the overflow detecting device E7 performs the overflow detection, the second light source E9 is in a closed state, only the first light source E8 is in an open state, and the orientation of the first light source E8 and the detection signal axial direction of the overflow detecting device E7 Vertical.

請參閱圖4,該基板移載單元F包括:一其上設有Y軸向第五滑軌F1之第五軌座F2,第五滑軌F1上設有一第五滑座F3;第五滑座F3上設有一其上設有X軸向第六滑軌F4的第六軌座F5,第六滑軌F4上設有一第六滑座F6,第六滑座F6上設有一搬昇裝置E7;請參閱圖4、5,該搬昇裝置F7包括一搬昇座F71及一旋轉座F72;其中,該搬昇座F71以一第一固定座F711設於該第六滑座F6上,其上設有一Z軸向第七滑軌F712,該第七滑軌F712上設有第七滑座F713,其受一搬昇驅動件F714經一皮帶F715連動一螺桿F716所驅動,而能在Z軸向上、下位移;該旋 轉座F72以一第二固定座F721設於該第七滑座F713上,其設有一旋轉驅動件F722經一皮帶F723連動一軸桿F724上端的一吸座F725進行旋轉,該吸座F725上設有複數個吸嘴F726可被通以負壓,該旋轉座F72之第二固定座F721一側設有一感應件F727可於該搬昇座F71之第一固定座F711側上下方所設之二感應器F717間受感應,以確立該旋轉座F72在該搬昇座F71之上下位移定位。 Referring to FIG. 4, the substrate transfer unit F includes: a fifth rail seat F2 having a Y-axis fifth rail F1 disposed thereon, and a fifth slider F3 disposed on the fifth rail F1; The seat F3 is provided with a sixth rail seat F5 on which the X-axis sixth rail F4 is disposed, the sixth rail F4 is provided with a sixth sliding seat F6, and the sixth sliding seat F6 is provided with a lifting device E7. Referring to FIGS. 4 and 5, the lifting device F7 includes a lifting base F71 and a rotating base F72. The lifting base F71 is disposed on the sixth sliding seat F6 by a first fixing seat F711. There is a Z-axis seventh slide rail F712, and the seventh slide rail F712 is provided with a seventh slide seat F713, which is driven by a lifting drive F714 via a belt F715 and driven by a screw F716. Axial up and down displacement; the rotation The rotating seat F72 is disposed on the seventh sliding seat F713 by a second fixing base F721, and is provided with a rotating driving member F722 for rotating a suction seat F725 of the upper end of the shaft F724 via a belt F723. The suction seat F725 is provided. A plurality of nozzles F726 can be connected with a negative pressure. The second fixing base F721 of the rotating base F72 is provided with a sensing member F727, which can be disposed on the upper and lower sides of the first fixing seat F711 of the lifting base F71. The sensor F717 is sensed to establish that the rotating base F72 is displaced and positioned above the lifting base F71.

請參閱圖6,該搬昇裝置F7可被驅動恰位於該軌架B上載盤B1的下方,並使旋轉座F72上吸座F725恰對應載盤B1上一待檢測物A下方,該載盤B1可以矩陣方式排列複數個待檢測物A,每一個待檢測物A下方的載盤B1各分別形成一鏤空區間B11,該鏤空區間B11可供旋轉座72上的吸座F725伸經,請參閱圖7旋轉座72上的吸座F725並可在吸附及搬昇待檢測物A於載盤B1上方一預設定位下進行旋轉,不同的待檢測物A大小規格,可以更換不同規格的吸座F725。 Referring to FIG. 6, the lifting device F7 can be driven just below the loading tray B1 of the rail B, and the suction seat F725 on the rotating base F72 corresponds to a lower object to be detected A on the loading tray B1. B1 may arrange a plurality of objects to be detected A in a matrix manner, and each of the carriers B1 under the object A to be detected respectively forms a hollow interval B11, and the hollow interval B11 can be extended by the suction seat F725 on the rotating base 72, see The suction seat F725 on the rotating base 72 of FIG. 7 can be rotated under the preset positioning of the object A to be detected and moved on the loading plate B1. Different sizes of the object to be detected A can be exchanged for different specifications. F725.

本發明實施例之物件檢測方法,包括:一到位步驟,請參閱圖6、8,使該基板移載單元F之搬昇裝置F7被驅動恰位於該載盤B1的下方,並使旋轉座F72上吸座F725恰對應載盤B1上待檢測物A下方鏤空區間B11下方;一搬昇步驟,請參閱圖5、7、9,使該基板移載單元F之搬昇裝置F7中搬昇座F71以搬昇驅動件F714驅動第七滑座F713在Z軸向第七滑軌F712上移,以連動旋轉座F72上的吸座F725垂直上昇穿經載盤B1鏤空區間B11,並以吸嘴F726吸附待檢測物A下方下,將待檢測物A向上搬昇至載盤B1上方越過軌架B的一預定高度;一定位步驟,請參閱圖10,以視覺定位單元D之定位檢測裝置D8的CCD鏡頭由上往下執行對該載盤B1上待檢測物A進行取像,確認待檢測 物A放置之偏角量,並將取像結果以搬昇裝置F7中旋轉座F72上的吸座F725調整方位以進行角度補正,使吸座F725搬昇及吸附的待檢測物A位於一預定之檢測定位;一檢測對位步驟,請參閱圖11,使視覺檢測單元E之溢膠檢測裝置E7的CCD鏡頭進行對焦待檢測物A之待檢測部位;一溢膠檢測步驟,請參閱圖12,以視覺檢測單元E之溢膠檢測裝置E7的CCD鏡頭由一側執行對待檢測物A之待檢測部位進行Y軸向之取像,以進行溢膠檢測;一旋轉步驟,請參閱圖7、13,使旋轉座72上的吸座F725吸附待檢測物A進行水平旋轉九十度,使待檢測物A另一側的待檢測部位與視覺檢測單元E之溢膠檢測裝置E7的CCD鏡頭對應;一全周檢測步驟,循環前述圖11~13之檢測對位步驟、溢膠檢測步驟、旋轉步驟,直到待檢測物A間歇旋轉全周各側邊都完成溢膠檢測後,吸座F725才連動待檢測物A下降,使待檢測物A落置於載盤B1上,完成待檢測物A之溢膠檢測。 The object detecting method of the embodiment of the present invention includes: a step of in-position, referring to FIGS. 6 and 8, the lifting device F7 of the substrate transfer unit F is driven just below the carrier B1, and the rotating seat F72 is rotated. The upper suction seat F725 corresponds to the lower portion B11 below the object A to be detected on the carrier B1; for the lifting step, please refer to FIGS. 5, 7, and 9, to lift the base of the lifting device F7 of the substrate transfer unit F. The F71 drives the seventh sliding seat F713 to move the seventh sliding rail F712 in the Z-axis by the lifting driving member F714, so as to vertically move the suction seat F725 on the rotating base F72 to vertically pass through the hollow section B11 of the loading tray B1, and use the suction nozzle. F726 adsorbs the underside of the object to be detected A, and lifts the object to be detected A up to a predetermined height above the carrier B above the carrier B1; a positioning step, please refer to FIG. 10, the positioning detecting device D8 of the visual positioning unit D The CCD lens performs image capturing of the object to be detected A on the carrier B1 from top to bottom, and confirms that it is to be detected. The amount of declination of the object A is placed, and the image capturing result is adjusted by the suction seat F725 on the rotating seat F72 of the lifting device F7 to perform angle correction, so that the object A to be detected and adsorbed by the suction cup F725 is located at a predetermined position. For the detection and positioning step, as shown in FIG. 11, the CCD lens of the overflow detecting device E7 of the visual detecting unit E is focused on the portion to be detected of the object A to be detected; and the step of detecting the overflow glue is shown in FIG. The CCD lens of the overflow detecting device E7 of the visual detecting unit E performs the Y-axis image capturing of the portion to be detected of the object A to be detected by one side to perform the overflow detecting; for a rotating step, refer to FIG. 13. The suction seat F725 on the rotating base 72 is attracted to the object A to be horizontally rotated by ninety degrees, so that the portion to be detected on the other side of the object to be detected A corresponds to the CCD lens of the overflow detecting device E7 of the visual detecting unit E. a full-circumference detection step, looping the detection alignment step, the overflow glue detection step, and the rotation step of the foregoing FIGS. 11-13, until the intermittent detection of the object A intermittently rotates all the sides to complete the overflow glue detection, the suction seat F725 Linking the object to be detected A down, making it to be inspected A drop was placed on a platen B1, excess glue complete detection of the object A to be detected.

本發明實施例之物件檢測方法及裝置,由於經由視覺定位單元D對該載盤B1上待檢測物A進行Z軸向之檢測定位,再經視覺檢測單元E進行溢膠檢測,可達到垂直面對待檢測物A的最佳取像品質,提高檢測之精準度,而在基板移載單元F對待檢測物A進行Z軸向搬昇至載盤B1上方定位及R軸向之間歇旋轉操作下,可以自動完成二物件藉黏膠所形成的疊片物件之待檢測物A檢測,特別是包括基板及散熱片之物件其全周各側的溢膠檢測,使檢測效率提昇,檢測品質一致;而藉由更換搬昇裝置F7之吸座F725,不僅可適合不同的待檢測物A規格大小,亦可採一個或數個待檢測物A同時升降進行檢測,提昇檢測效率;且視覺定位單元D採由上 往下執行對待檢測物A之定位檢測,可兼具植片偏移檢測用途,而視覺檢測單元E因正對待檢測物A側邊且作四邊之全周取像,將使舉凡疊片等之品質瑕疵均可一併檢出,且視覺定位單元D與視覺檢測單元E雖不同一軸向進行檢測,卻可共用該第一光源E8與該第二光源E9,使成本有效降低。 The object detecting method and device of the embodiment of the present invention can detect the positioning of the object A to be detected on the carrier B1 via the visual positioning unit D, and then perform the overflow detection by the visual detecting unit E to achieve the vertical surface. The best image quality of the object A to be treated is improved, and the accuracy of the detection is improved, and in the substrate transfer unit F, the object A is subjected to Z-axis lifting to the upper position of the carrier B1 and the intermittent rotation of the R axis. The detection of the object to be detected A of the laminated object formed by the two objects can be automatically completed, in particular, the detection of the overflow of the substrate on both sides of the substrate and the heat sink, so that the detection efficiency is improved and the detection quality is consistent; By replacing the suction seat F725 of the lifting device F7, not only can different size of the object A to be detected, but also one or several objects to be detected A can be simultaneously raised and lowered for detection, thereby improving the detection efficiency; and the visual positioning unit D is adopted. From above The positioning detection of the object A to be tested is performed, and the object can be used for the detection of the offset of the implant, and the visual detection unit E is to take the image of the side of the object A and perform the whole circumference of the four sides. The quality 瑕疵 can be detected together, and the visual positioning unit D and the visual detecting unit E are detected in different axial directions, but the first light source E8 and the second light source E9 can be shared, so that the cost is effectively reduced.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

B‧‧‧軌架 B‧‧‧rail

B1‧‧‧載盤 B1‧‧‧ Carrier

C‧‧‧機台台面 C‧‧‧ machine table

D‧‧‧視覺定位單元 D‧‧‧Visual Positioning Unit

D1‧‧‧腳架 D1‧‧‧ tripod

D2‧‧‧第一滑軌 D2‧‧‧ first slide

D3‧‧‧第一軌座 D3‧‧‧First rail seat

D4‧‧‧第一滑座 D4‧‧‧First slide

D5‧‧‧第二滑軌 D5‧‧‧Second rail

D6‧‧‧第二軌座 D6‧‧‧Second rail seat

D7‧‧‧第二滑座 D7‧‧‧Second slide

D8‧‧‧定位檢測裝置 D8‧‧‧ Positioning detection device

E‧‧‧視覺檢測單元 E‧‧‧Visual Inspection Unit

F‧‧‧基板移載單元 F‧‧‧Substrate transfer unit

Claims (14)

一種物件檢測方法,包括:使複數個待檢測物以矩陣排列於一載盤中;該待檢測物為二物件藉黏膠所形成的疊片物件;使待檢測物被搬昇至載盤上方一預定高度;以一定位檢測裝置對該待檢測物進行取像定位;以一溢膠檢測裝置對待檢測物之待檢測部位取像,以進行溢膠檢測。 An object detecting method comprises: arranging a plurality of objects to be detected in a matrix in a carrier; the object to be detected is a laminated object formed by two pieces of adhesive; and the object to be detected is lifted above the carrier. a predetermined height; taking a position of the object to be detected by a positioning detecting device; taking an image of the object to be detected of the object to be detected by an overflow detecting device to perform the glue detecting. 一種物件檢測方法,包括:一到位步驟,使一搬昇裝置位於一載盤上待檢測物下方一鏤空區間的下方;該待檢測物為二物件藉黏膠所形成的疊片物件;一搬昇步驟,使該搬昇裝置以一吸座上昇穿經載盤鏤空區間,將待檢測物向上搬昇至載盤上方一預定高度;一定位步驟,以一定位檢測裝置對該待檢測物進行取像,並使吸座調整方位以進行補正,使待檢測物位於一預定之檢測定位;一溢膠檢測步驟,以一溢膠檢測裝置對待檢測物之待檢測部位進行取像,以進行溢膠檢測。 An object detecting method includes: a step of positioning, wherein a lifting device is located below a hollow space below a to-be-detected object on a carrier; the object to be detected is a laminated object formed by two pieces of adhesive; a step of lifting the lifting device through a suction pocket and moving the object to be detected upward to a predetermined height above the carrier; and a positioning step of the object to be detected by a positioning detecting device Taking the image and adjusting the orientation of the suction seat to make correction, so that the object to be detected is located at a predetermined detection position; and an overflow detection step is to take an image of the object to be detected of the object to be detected by an overflow detection device to perform overflow Glue detection. 如申請專利範圍第1或2項所述物件檢測方法,其中,該溢膠檢測裝置對待檢測物之待檢測部位取像過程中,使待檢測物進行旋轉,以使待檢測物另一側的待檢測部位被溢膠檢測裝置取像,以進行溢膠檢測。 The object detecting method according to claim 1 or 2, wherein the overflow detecting device rotates the object to be detected during the image capturing process of the object to be detected, so that the other side of the object to be detected is The part to be detected is taken by the overflow detection device to perform the glue detection. 如申請專利範圍第1或2項所述物件檢測方法,其中,該待檢測物為包括基板及散熱片之物件。 The object detecting method according to claim 1 or 2, wherein the object to be detected is an object including a substrate and a heat sink. 一種物件檢測裝置,設於一機台台面上,包括:一軌架,其上形成盛載待檢測物之一載盤可於其上進行輸送的流路;該待檢測物為二物件藉黏膠所形成的疊片物件; 一視覺定位單元,設有一定位檢測裝置對該載盤上待檢測物進行定位檢測;一視覺檢測單元,設有一膠檢測裝置對該載盤上待檢測物進行溢膠檢測;一基板移載單元,設有一搬昇裝置對該載盤上待檢測物進行搬昇操作。 An object detecting device is disposed on a table top, and comprises: a rail frame on which a flow path for carrying a carrier on which one of the objects to be detected can be transported is formed; the object to be detected is bonded by two objects. a laminated object formed by glue; a visual positioning unit is provided with a positioning detecting device for detecting the position of the object to be detected on the carrier; a visual detecting unit is provided with a glue detecting device for detecting the overflow of the object to be detected on the carrier; and a substrate transfer unit A lifting device is provided to carry out the lifting operation of the object to be detected on the carrier. 如申請專利範圍第5項所述物件檢測裝置,其中,該視覺定位單元包括:一兩側各受腳架架立而其上設有Y軸向第一滑軌的第一軌座,以及設於該第一滑軌的一第一滑座上之具有X軸向第二滑軌的第二軌座,第二滑軌上設有一第二滑座,其上設該定位檢測裝置,其為一CCD鏡頭,以由上往下執行對該載盤上物件進行Z軸向之定位檢測。 The object detecting device of claim 5, wherein the visual positioning unit comprises: a first rail seat on each of which is supported by the tripod and has a Y-axis first slide rail disposed thereon, and a second rail seat having a X-axis second slide rail on a first slide of the first slide rail, and a second slide rail disposed on the second slide rail, the positioning detecting device is disposed on the first slide rail A CCD lens performs Z-axis positioning detection on the object on the carrier from top to bottom. 如申請專利範圍第5項所述物件檢測裝置,其中,該視覺檢測單元包括:一其上設有Y軸向第三滑軌之第三軌座,第三滑軌上設有一第三滑座;第三滑座上設有一其上設有X軸向第四滑軌的第四軌座,第四滑軌上設有一第四滑座;第四滑座上設該溢膠檢測裝置,其可為一CCD鏡頭。 The object detecting device of claim 5, wherein the visual detecting unit comprises: a third rail seat having a third sliding rail in the Y direction; and a third sliding seat on the third sliding rail The third sliding seat is provided with a fourth rail seat on which the X-axis fourth sliding rail is disposed, and the fourth sliding rail is provided with a fourth sliding seat; the fourth sliding seat is provided with the overflow detecting device, Can be a CCD lens. 如申請專利範圍第5項所述物件檢測裝置,其中,該視覺檢測單元包括溢膠檢測裝置進行檢測之前方設有一第一光源,以及三個圍設呈矩形三個邊的第二光源,該第一光源與該三個第二光源共同圍設呈一矩形而各分別為矩形的四個邊。 The object detecting device of claim 5, wherein the visual detecting unit comprises a first light source before the detecting of the overflow detecting device, and three second light sources surrounding the three sides of the rectangle. The first light source and the three second light sources together define four sides which are rectangular and each are respectively rectangular. 如申請專利範圍第8項所述物件檢測裝置,其中,該第一光源與第二光源與溢膠檢測裝置同步連動並可分別獨立啟閉光源。 The object detecting device of claim 8, wherein the first light source and the second light source are synchronously linked with the overflow detecting device and can independently open and close the light source. 如申請專利範圍第8項所述物件檢測裝置,其中,該第一光源與第二光源所共同圍設的光源係供該定位檢測裝置進行定位檢測時使用,定位檢測裝置進行定位檢測時,該第一光源與第二光源皆呈開啟狀態;該 第一光源係供溢膠檢測裝置檢測時使用,溢膠檢測裝置進行溢膠檢測時,第二光源皆呈關閉狀態,僅第一光源呈開啟狀態。 The object detecting device of claim 8, wherein the light source enclosed by the first light source and the second light source is used when the positioning detecting device performs positioning detection, and when the positioning detecting device performs positioning detection, The first light source and the second light source are both turned on; The first light source is used for detecting the overflow glue detecting device, and when the overflow glue detecting device performs the glue overflow detection, the second light source is turned off, and only the first light source is turned on. 如申請專利範圍第8項所述物件檢測裝置,其中,該第一光源之方位與溢膠檢測裝置之檢測訊號軸向呈垂直。 The object detecting device of claim 8, wherein the orientation of the first light source is perpendicular to the axial direction of the detection signal of the overflow detecting device. 如申請專利範圍第5項所述物件檢測裝置,其中,該基板移載單元包括:一其上設有Y軸向第五滑軌之第五軌座,第五滑軌上設有一第五滑座;第五滑座上設有一其上設有X軸向第六滑軌的第六軌座,第六滑軌上設有一第六滑座,第六滑座上設該搬昇裝置。 The object detecting device of claim 5, wherein the substrate transfer unit comprises: a fifth rail seat having a Y-axis fifth slide rail thereon, and a fifth slide rail on the fifth slide rail The fifth sliding seat is provided with a sixth rail seat on which the X-axis sixth sliding rail is disposed, and the sixth sliding rail is provided with a sixth sliding seat, and the lifting device is disposed on the sixth sliding seat. 如申請專利範圍第5項所述物件檢測裝置,其中,該搬昇裝置包括一搬昇座及一旋轉座;其中,該搬昇座設有一可受驅動在Z軸向上、下位移第七滑座;該旋轉座設於該第七滑座上,其設有一吸座以搬昇該待檢測物並以一軸桿可受驅動進行旋轉。 The object detecting device of claim 5, wherein the lifting device comprises a lifting seat and a rotating seat; wherein the lifting seat is provided with a seventh sliding driveable in the Z-axis. The rotating seat is disposed on the seventh sliding seat, and is provided with a suction seat for lifting the object to be detected and being driven to rotate by a shaft. 一種物件檢測裝置,包括:用以執行如申請專利範圍第1至4項任一項所述物件檢測方法的裝置。 An object detecting device comprising: means for performing the object detecting method according to any one of claims 1 to 4.
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Citations (2)

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TW201315611A (en) * 2011-10-07 2013-04-16 Eevision Corp Automatic excess paste detection system and method for screen printing
TW201445145A (en) * 2013-05-20 2014-12-01 Nidec Read Corp Substrate inspecting method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201315611A (en) * 2011-10-07 2013-04-16 Eevision Corp Automatic excess paste detection system and method for screen printing
TW201445145A (en) * 2013-05-20 2014-12-01 Nidec Read Corp Substrate inspecting method

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