WO2013114778A1

WO2013114778A1 - Optical component inspecting apparatus

Info

Publication number: WO2013114778A1
Application number: PCT/JP2012/083777
Authority: WO
Inventors: 浩彦関; 明湯瀬
Original assignee: コニカミノルタ株式会社
Priority date: 2012-01-31
Filing date: 2012-12-27
Publication date: 2013-08-08
Also published as: JP2015083921A

Abstract

An optical component inspecting apparatus (100) inspects defects of a plurality of optical components held by means of a pallet (10). The optical component inspecting apparatus is provided with: an image pickup apparatus (40) that has an illuminating apparatus (41), which irradiates optical components (K) with light, said optical components being held by means of the pallet (10), and a camera apparatus (42), which picks up image of respective optical components (K) irradiated with light by means of the illuminating apparatus (41); a moving apparatus (50), which moves the image pickup apparatus (40) parallel to an upper surface of the pallet (10); and an image pickup control means, which picks up the images of the optical components (K), while moving the image pickup apparatus (40) by means of the moving apparatus (50) with respect to the pallet (10) in the stationary state at a predetermined position. Consequently, in the cases of inspecting defects of the optical components held by means of the pallet, positional shifts of the optical components are not generated, and generation of inspection accuracy fluctuation can be eliminated.

Description

Optical component inspection equipment

The present invention relates to an optical component inspection apparatus that performs optical component defect inspection.

2. Description of the Related Art Conventionally, in a manufacturing process of optical components used in various optical devices, a method is known in which a plurality of optical components are held together and managed by a jig called a pallet.
FIG. 7 shows a cross-sectional view of the pallet.
As shown in FIG. 7, the pallet 80 includes a tray 81 on which the optical component 1 is placed on the upper surface side, and a lid 82 that is superimposed on the tray 81 from above, and the optical component 1 is interposed therebetween. Is to hold.
The optical component 1 includes two parts, a lens part 2 and a flange part 3 that surrounds the outer periphery of the lens part 2.
The tray 81 has a plurality of recesses 81a, and a through hole 81b is formed in the center of each recess 81a. And the flange part 3 of the optical component 1 is mounted in each recessed part 81a, and one surface of the lens part 2 is exposed from the through-hole 81b.
On the other hand, a plurality of concave portions 82 a and through holes 82 b are also formed in the lid 82 of the pallet 80, similarly to the tray 81. The lid 82 is placed on the tray 81 on which the optical component 1 is placed so that the concave portion 82a is on the lower side, and the flange portion 3 of the optical component 1 is pressed from above.

By the way, various defects such as scratches and cracks may occur in the optical component during the manufacturing process. Such defects can have a significant impact on the performance of the optical components, so it is necessary to carefully perform defect inspection.
In general, the defect inspection is performed while the optical component is held on the pallet. This method is preferable because the optical components are aligned on the pallet even after the defect inspection is completed.
In recent years, an apparatus for automatically performing such a defect inspection has been proposed. For example, in Patent Document 1, a pallet is set on a table capable of moving in the XY directions and a robot having a positioning function, and fixed inspection is performed. An apparatus is disclosed in which a pallet is moved with respect to a camera and an inspection light source to obtain an image for defect inspection of optical components held on the pallet.

Japanese Patent No. 4550610

However, the apparatus of Patent Document 1 performs an operation of frequently repeating the movement and stop of the pallet.
For this reason, when inspecting both the lens part and flange part of the optical component, if the lid of the pallet is removed and the optical component is simply placed on the tray, the press from the top by the lid In some cases, the optical components vibrate and image blurring occurs.
Further, the vibration of the optical component sometimes causes the flange portion 3 of the optical component 1 to ride on the upper surface of the tray 81 as shown in FIG.
Such a problem tends to become more prominent as the flange portion becomes thinner as the optical component becomes smaller, or as the moving speed increases in order to increase the inspection speed.
And when a shift | offset | difference arises in the position of an optical component in this way, variation will arise also in inspection accuracy.

An object of the present invention is to provide an optical component inspection apparatus capable of preventing a variation in inspection accuracy without causing a displacement of the position of the optical component when performing a defect inspection of the optical component held on the pallet. Is to provide.

According to one aspect of the invention,
In an optical component inspection apparatus that performs defect inspection of a plurality of optical components held on a pallet,
An illuminating device that irradiates light to the plurality of optical components held on the pallet; and an imaging unit that includes a camera device that captures images of the plurality of optical components irradiated with light by the illuminating device; ,
Moving means for moving the imaging means parallel to the top surface of the pallet;
Imaging control means for capturing images of each of the plurality of optical components while moving the imaging means by the moving means with respect to the pallet in a stationary state at a predetermined position;
It is characterized by providing.

According to the present invention, when the pallet holding a plurality of optical components is in a stationary state at a predetermined position, the imaging means moves in parallel with the top surface of the pallet and the plurality of optical components held on the pallet. Each image of is taken.
For this reason, since the pallet is in a stationary state at the time of image pickup by the image pickup means, the optical component held on the pallet does not vibrate, and the position of the optical component does not shift. Therefore, it is possible to perform a stable inspection with no variation in inspection accuracy.

It is a perspective view which shows the optical component inspection apparatus concerning embodiment of this invention. It is a side view which shows the optical component inspection apparatus of FIG. It is a block diagram which shows the control structure of the optical component inspection apparatus of FIG. It is a perspective view which shows a pallet. It is sectional drawing which shows the principal part structure of a pallet. It is a figure for demonstrating the movement path | route of an imaging device. It is sectional drawing for demonstrating the structure of a pallet. It is a figure for demonstrating the conventional problem.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the scope of the invention is not limited to the illustrated examples.

First, the configuration will be described.
An optical component inspection apparatus 100 according to an embodiment of the present invention is an apparatus that is used to perform defect inspections such as scratches and cracks in the optical component K and on the surface, and contamination with foreign matter.
The optical component inspection apparatus 100 transports a pallet 10 (also referred to as 10A to 10D) holding a plurality of optical components K as a group while pausing at a predetermined position. With respect to the optical component K, images for defect inspection of each optical component K are taken in order by the three imaging devices 40A to 40C.
In the following description, the conveyance direction of the pallet 10 is the X direction, the horizontal direction orthogonal to the X direction is the Y direction, and the vertical direction orthogonal to the X and Y directions is the Z direction.

As shown in FIGS. 1 to 3, the optical component inspection apparatus 100 is placed on a transport device 20 that transports the pallet 10, a lid body detaching device 30 that detaches the lid body 12 of the pallet 10, and the tray 11 of the pallet 10. An imaging device 40 (a first imaging device 40A, a second imaging device 40B, and a third imaging device 40C) that captures an image of the optical component K, and a moving device 50 that moves the imaging device 40 in the XY directions. The reversing device 60 for reversing the pallet 10 and the control unit 70 for controlling these components overall are provided.

Here, the pallet 10 will be described.
As shown in FIGS. 4 and 5, the pallet 10 is configured by stacking a tray 11 and a lid 12 that are two plates having a substantially rectangular shape in plan view, and a plurality of pallets 10 are arranged between the tray 11 and the lid 12. The optical parts K ... are held.
Examples of the optical component K held on the pallet 10 include resin optical lenses used for glasses, cameras, image sensors, optical pickup devices, and the like.
The optical component K includes two parts, a lens part R having an optical function and a flange part F surrounding the outer periphery of the lens part R. In the following description, the front surface and the back surface of the lens portion R are referred to as an optical surface R1 and an optical surface R2, respectively. The optical surfaces R1 and R2 are more convex than the flange portion F.
The size of the optical component K that can be inspected by the optical component inspection apparatus 100 of the present embodiment is not particularly limited. For example, the diameter (including the flange portion F) in plan view is 10 mm or less, particularly 8 mm or less. Thus, the flange portion F is suitably used for a thickness designed to be 2 mm or less, particularly 1 mm or less.

The tray 11 is formed with a plurality of circular recesses 11a that are recessed from the upper surface toward the lower surface in a matrix shape, and a flat surface that penetrates the upper and lower surfaces at the center of each recess 11a. A through-hole 11b having a circular shape is formed.
And in the tray 11, the flange part F of the optical component K is mounted in each recessed part 11a, and one optical surface R2 of the lens part R of the optical component K is arrange | positioned in the through-hole 11b, and an upper surface side is arrange | positioned. A plurality of optical components K are placed on the surface.
In addition, the lid 12 has the concave portion 12a on the lower side, and the other optical surface R1 of the lens portion R of the optical component K placed on the tray 11 is disposed in the through hole 12b. It is designed to be placed on the top surface.
In this way, a plurality of optical components K are placed on the tray 11, and the lid 12 presses against the flange portion F of the optical component K by being overlaid on the tray 11. A plurality of optical components K are held.
The number of optical components K held on the pallet 10 is not particularly limited.

As shown in FIGS. 1 to 3, the conveying device (conveying means) 20 extends a pair of guide frames 21 and 21 extending in the X direction and spaced apart in the Y direction, and the pallet 10 along the guide frames 21 and 21. A pallet driving mechanism 23 to be conveyed is provided.
The first imaging device 40A, the second imaging device 40B, the inverting device 60, and the reversing device 60 are arranged outside the guide frames 21 and 21 in order from the upstream side along the conveyance direction (X direction) of the pallet 10. A third imaging device 40C is installed.

Both ends of the guide frames 21 and 21 are supported by the columns 22. In addition, illustration of the support | pillar 22 is abbreviate | omitted in FIG. Further,

groove portions

21a and 21a for installing the pallet 10 are formed in the X direction on the inner surface side of the guide frames 21 and 21, and the pallet 10 is slidably fitted in the

groove portions

21a and 21a. .

The pallet driving mechanism 23 includes, for example, a conveyance belt and belt driving rollers (both not shown) disposed in the

grooves

21a and 21a. The pallet driving mechanism 23 drives the belt driving rollers under the control of the control unit 70, and guides them. The pallet 10 fitted in the

grooves

21a and 21a of the

frames

21 and 21 is conveyed in the X direction.
Here, the pallet driving mechanism 23 is controlled by the control unit 70 to stop the conveyance when the pallet 10 being conveyed reaches a predetermined position, and to resume the conveyance after a lapse of a certain time from the stop. .
Specifically, the pallet driving mechanism 23 stops the conveyance when the pallet 10 being conveyed reaches a predetermined position corresponding to the imaging device 40 provided along the X direction. Further, the pallet driving mechanism 23 resumes the conveyance of the pallet 10 after a certain time has elapsed from the stop, that is, after the imaging by the imaging device 40 is completed.
Thereby, the pallet 10 moves intermittently on the guide frames 21 and 21.

As shown in FIGS. 1 and 2, the lid body detaching device (lid body detaching means) 30 includes a head portion 31 extending in the X direction and a head portion 31 connected to the head portion 31 in the Y direction and Z direction. An arm 32 that moves in the direction and an arm drive mechanism 33 that drives the arm 32 are provided.

The head unit 31 has a suction port (not shown) on its lower surface, and includes a vacuum generator (not shown) that generates a vacuum state at the suction port.
As the arm 32 is driven, the head unit 31 can move in the Y direction and the Z direction above the pallet 10 stopped at a predetermined position corresponding to the imaging device 40 on the guide frame 21. Yes.
Specifically, the head portion 31 is initially located outside the guide frames 21 and 21. When the conveyed pallet 10 stops at the predetermined position described above, the head unit 31 moves to a position facing the pallet 10 inside the guide frames 21, 21, and the lid 12 of the pallet 10 by the suction port. And move to the outside of the guide frames 21 and 21. As a result, the lid 12 is removed from the tray 11.
Further, after a predetermined time has elapsed, that is, when the imaging by the imaging device 40 is completed, the head unit 31 moves to a position facing the pallet 10 inside the guide frames 21 and 21 to release the suction of the suction port, and the guide frame It moves to the outside of 21 and 21. Thereby, the lid body 12 is put on the tray 11.

The arm 32 is a support member having an L shape in sectional view, and is connected to the head portion 31 to support the head portion 31 so as to be movable in the Y direction and the Z direction. The arm 32 is driven by an arm drive mechanism 33.

The arm drive mechanism 33 includes a motor (not shown), and drives the motor 32 in the Y direction and the Z direction under the control of the control unit 70.

The imaging device (imaging means) 40 includes a first imaging device 40A, a second imaging device 40B, and a third imaging device 40C.
These imaging devices 40A to 40C are arranged outside the guide frames 21 and 21 in order from the upstream side along the X direction.
Each of the imaging devices 40A to 40C includes an illumination device 41, a camera device 42, a frame 43 that supports them, a lifting mechanism 44 that adjusts the position in the Z direction, and the like.
The image pickup apparatuses 40A to 40C have the same basic configuration, but the first image pickup apparatus 40A takes an image for defect determination inside the optical component K (first inspection), and performs the second image pickup. The device 40B captures a defect determination image on one surface of the optical component K (second inspection), and the third imaging device 40C captures a defect determination image on the other surface of the optical component K (third inspection). It is like that.
At this time, since imaging is performed with the lid 12 removed from the pallet 10, the imaging devices 40A to 40C capture images of the lens portion R and the flange portion F of the optical component K.
Since the tray 11 is stationary, the optical component K on the tray 11 does not vibrate even when the lid 12 is removed.
It should be noted that the images taken by each of the imaging devices 40A to 40C are managed together for each optical component K.

The illuminating device 41 includes a light source that emits light of a predetermined wavelength, and irradiates the optical component K held on the pallet 10 with light. In addition, as the illuminating device 41, surface emitting illumination, LED (Light Emitting Diode) spot illumination, coaxial epi-illumination, etc. are used, for example.
The illumination device 41 is connected to the camera device 42 via the frame 43 and moves in the XY directions simultaneously with the camera device 42.

The camera device 42 includes a CCD (Charge Coupled Device) camera and a CMOS (Complementary Metal Oxide Semiconductor) camera, and takes an image of the optical component K irradiated with light by the illumination device 41.
Specifically, the camera device 42 keeps parallel to the placement surface 11c of the tray 11 of the pallet 10 while the transport of the pallet 10 by the transport device 20 is stopped and the lid 12 is removed from the pallet 10. Then, it moves so as to pass above all the optical components K on the mounting surface 11c (see FIG. 6), and an image of the optical component K is taken at a position facing each optical component K during this movement.
More specifically, the camera device 42 performs imaging while moving along the X direction with respect to the first row of optical components in the stopped pallet 10, and when imaging of the first row of optical components ends, the second row Move to the position where the optical component of the eye can be imaged in the Y direction, and perform imaging while moving in the opposite direction to the first row with respect to the second row of optical components. The same operation is repeated until imaging is completed.

The frame 43 is a support member having an upright portion 43a and

support portions

43b and 43c extending in the horizontal direction from the upper end and the lower end of the upright portion 43a.
A camera device 42 is mounted on the support portion 43b extending from the upper end portion of the frame 43, and an illumination device 41 is mounted on the support portion 43c extending from the lower end portion of the frame 43. The pallet 10 is conveyed between the devices 42.
The frame 43 is moved up and down in the Z direction by the lifting mechanism 44, and thereby the camera device 42 is focused.
In addition, the frame 43 is moved in the XY direction by the moving device 50, whereby the illumination device 41 and the camera device 42 are simultaneously moved in the XY direction.

The elevating mechanism 44 includes a motor (not shown), and controls the camera device 42 by driving the motor and moving the frame 43 in the Z direction under the control of the control unit 70.

In the present embodiment, as described above, the camera device 42 and the illumination device 41 are installed above and below the frame 43, and the pallet 10 is conveyed between the camera device 42 and the illumination device 41. The illumination device 41 can also be configured to be positioned above the pallet 10.
As the illumination device 41 in this case, for example, dome illumination, ring illumination, or the like is used.

The moving device (moving means) 50 is an orthogonal robot that includes an X-direction drive mechanism 51, a Y-direction drive mechanism 52, and the like, and the imaging device 40 is placed in parallel with the placement surface 11c of the tray 11 of the pallet 10. Move.
The X-direction drive mechanism 51 and the Y-direction drive mechanism 52 include a motor (not shown), and the control unit 70 controls the motor to move the frame 43 in the XY direction, thereby moving the camera device 42 during imaging. I do.

The reversing device (reversing means) 60 includes a clamping member 61 and a clamping member drive mechanism 62.
The reversing device 60 is installed between the second imaging device 40B and the third imaging device 40C, and sandwiches the pallet 10 to invert the pallet 10.
The clamping member 61 includes an upper member that contacts the upper surface of the pallet 10 (lid 12) and a lower member that contacts the lower surface of the pallet 10 (tray 11), and holds the pallet 10 by the upper member and the lower member.
The clamping member drive mechanism 62 includes a rotation motor (not shown), and the rotation motor is driven under the control of the control unit 70 to rotate the clamping member 61 in a state of clamping the pallet 10 by 180 °. Is reversed.

As shown in FIG. 3, the control unit (control unit) 70 includes a CPU (Central Processing Unit) 71, a RAM (Random Access Memory) 72, a storage unit 73, and the like, and is stored in the storage unit 73. When the program is executed, it has a function of performing operation control for performing a predetermined operation.

The CPU 71 controls the entire optical component inspection apparatus 100 by reading out a processing program or the like stored in the storage unit 73, developing the program in the RAM 72, and executing it.

The RAM 72 develops the processing program executed by the CPU 71 in the program storage area in the RAM 72, and stores the input data and the processing result generated when the processing program is executed in the data storage area.

The storage unit 73 includes, for example, a recording medium (not shown) that stores programs, data, and the like, and this recording medium is configured by a semiconductor memory or the like.
Further, the storage unit 73 stores various data, various processing programs, data processed by executing these programs, and the like for realizing the function of the CPU 71 controlling the entire optical component inspection apparatus 100. Specifically, the storage unit 73 stores, for example, an imaging control program 731, a conveyance control program 732, a determination program 733, a captured image storage unit 734, a reference image storage unit 735, and the like.

The imaging control program 731 is a program that causes the CPU 71 to realize a function of capturing an image of each optical component K while moving the imaging device 40 by the moving device 50 with respect to the pallet 10 in a stationary state at a predetermined position, for example. is there.
The CPU 71 functions as an imaging control unit by executing the imaging control program 731.

Further, the conveyance control program 732 is a program that causes the CPU 71 to realize a function of stopping the conveyance of the pallet 10 by the conveyance device 20 when the pallet 10 reaches a predetermined position, for example.
That is, the CPU 71 executes the conveyance control program 732 to cause the conveyance device 20 to convey the pallet 10 to a predetermined position corresponding to the imaging devices 40A to 40C, and the pallet 10 to a predetermined position corresponding to the imaging devices 40A to 40C. When it reaches, the conveyance of the pallet 10 by the conveyance device 20 is stopped.
The CPU 71 functions as a conveyance control unit by executing the conveyance control program 732.

Further, the determination program 733 compares, for example, an image captured by each of the imaging devices 40A to 40C with a reference image stored in advance in the reference image storage unit 735 for each of the plurality of optical components K. This is a program for causing the CPU 71 to realize the function of determining the presence or absence of defects for each optical component K.
That is, the CPU 71 executes the determination program 733 to compare the three images stored in the captured image storage unit 734 for each optical component K with the reference image stored in the reference image storage unit 735, and The presence or absence of a defect in each optical component is determined.
The CPU 71 functions as a determination unit by executing the determination program 733.

In the captured image storage unit 734, images captured by the imaging devices 40A to 40C are stored for each optical component K.

In the reference image storage unit 735, images (internal images and surface images) obtained when normal optical components are imaged are stored as reference images.

Next, the operation of the optical component inspection apparatus 100 as described above will be described.
Such an operation is executed under the control of the control unit 70.
Moreover, in the following description, the pallet 10 inspected by the optical component inspection apparatus 100 is referred to as a pallet 10A, a pallet 10B,.

First, the pallet 10A is transported on the guide frames 21 and 21 by the transport device 20, reaches a predetermined position corresponding to the first imaging device 40A, and the transport is stopped.

Next, the lid body 12 of the pallet 10 A is removed by the lid body detaching device 30. The removed lid 12 is retracted outside the guide frames 21 and 21.

Next, the frame 43 is moved in the Z direction by the lifting mechanism 44, and the imaging apparatus 40A is focused.
Next, the imaging device 40A is moved in parallel with the placement surface 11c of the tray 11 of the pallet 10A by moving the frame 43 in the XY directions by the X direction driving mechanism 51 and the Y direction driving mechanism 52 of the moving device 50. .
At this time, imaging is performed at the timing when the camera device 42 reaches right above each optical component K.

Next, when the imaging of all the optical components K held on the pallet 10A is completed, the lid 12 of the pallet 10A is put on the tray 11 again by the lid removing device 30.

Next, the

pallets

10A and 10B are transported on the guide frames 21 and 21 by the transport device 20. This conveyance is stopped when the pallet 10A reaches a predetermined position corresponding to the second imaging device 40B and the pallet 10B reaches a predetermined position corresponding to the first imaging device 40A.

Next, the

lid bodies

12 and 12 of the pallets 10 A and 10 B are simultaneously removed by the lid body detaching device 30. The removed

lids

12 and 12 are retracted outside the guide frames 21 and 21.

Next, focusing of each

imaging device

40A, 40B is performed by the raising / lowering mechanism 44, respectively.
Next, the imaging device 40B is moved in parallel with the placement surface 11c of the tray 11 of the pallet 10A by the X direction driving mechanism 51 and the Y direction driving mechanism 52 of the moving device 50, and the imaging device 40A is moved to the tray 11 of the pallet 10B. It is moved parallel to the mounting surface 11c.
At this time, imaging is performed at the timing when the camera device 42 of the

imaging devices

40A and 40B reaches directly above each optical component K.

Next, when the imaging is finished, the

lids

12 and 12 of the

pallets

10A and 10B are again put on the

trays

11 and 11 by the lid removing device 30.

Next, the

pallets

10A, 10B, and 10C are transported on the guide frames 21 and 21 by the transport device 20. In this conveyance, the pallet 10A reaches a predetermined position corresponding to the reversing device 60, the pallet 10B reaches a predetermined position corresponding to the second imaging device 40B, and the pallet 10C reaches a predetermined position corresponding to the first imaging device 40A. Stopped when reached.

Next, the pallet 10A is inverted by the reversing device 60, and the

lids

12 and 12 of the

pallets

10B and 10C are simultaneously removed by the lid removing device 30 at almost the same timing. The removed

lids

12 and 12 are retracted outside the guide frames 21 and 21.

Next, the

imaging mechanism

40A, 40B is focused by the lifting mechanism 44.
Next, the imaging device 40B is moved in parallel with the placement surface 11c of the tray 11 of the pallet 10B by the X direction driving mechanism 51 and the Y direction driving mechanism 52 of the moving device 50, and the imaging device 40A is moved to the tray 11 of the pallet 10C. It is moved parallel to the mounting surface 11c.
At this time, imaging is performed at the timing when the camera device 42 of the

imaging devices

40A and 40B reaches directly above each optical component K.

Next, when the imaging is finished, the

lids

12 and 12 of the

pallets

10B and 10C are put on the

trays

11 and 11 again by the lid removing device 30.

Next, the pallets 10 A, 10 B, 10 C, 10 D are transported on the guide frames 21, 21 by the transport device 20. In this conveyance, the pallet 10A reaches a predetermined position corresponding to the third imaging device 40C, the pallet 10B reaches a predetermined position corresponding to the reversing device 60, and the pallet 10C reaches a predetermined position corresponding to the second imaging device 40B. When the pallet 10D reaches a predetermined position corresponding to the first imaging device 40A, the pallet 10D is stopped.

Next, the pallet 10B is reversed by the reversing device 60, and the

lids

12, 12, and 12 of the

pallets

10A, 10C, and 10D are simultaneously removed by the lid removing device 30 at substantially the same timing. The removed

lid bodies

12, 12, 12 are retracted to the outside of the guide frames 21, 21.

Next, focusing of each

imaging device

40A, 40B, 40C is performed by the raising / lowering mechanism 44, respectively.
Next, the X direction driving mechanism 51 and the Y direction driving mechanism 52 of the moving device 50 move the imaging device 40C in parallel with the placement surface 11c of the tray 11 of the pallet 10A, and the imaging device 40B is moved to the tray 11 of the pallet 10C. The imaging device 40A is moved in parallel with the placement surface 11c of the tray 11 of the pallet 10D.
At this time, imaging is performed at the timing when the camera device 42 of the

imaging devices

40A, 40B, and 40C reaches directly above each optical component K.

Next, when the imaging is completed, the

lids

12, 12, 12 of the pallets 10 A, 10 C, 10 D are again put on the

trays

11, 11, 11 by the lid removing device 30.

With the series of operations described above, image capturing for the palette 10A is completed. Thereafter, the same operation is repeated for the subsequent pallets 10B to 10D.
Note that images captured by the imaging devices 40A to 40C are stored in the captured image storage unit 734 for each optical component K.

Next, after the above-described operation is completed, the presence / absence of a defect is determined for each optical component based on images captured by the imaging devices 40A to 40C.
Note that the optical component determined to have a defect is discarded.

As described above, according to this embodiment, in the optical component inspection apparatus 100, the illumination device 41 that irradiates light to the plurality of optical components K held on the pallet 10, and the illumination device 41 emits light. An imaging device 40 having a camera device 42 for capturing images of each of the plurality of optical components, a moving device 50 for moving the imaging device 40 in parallel with the upper surface of the pallet 10 (the placement surface 11c of the tray 11), Imaging control means (a CPU 71 and an imaging control program 731) for capturing images of each of the plurality of optical components K while moving the imaging device 40 by the moving device 50 with respect to the pallet 10 in a stationary state at a predetermined position; It is prepared for.
For this reason, when the pallet 10 holding the plurality of optical components K is stationary at a predetermined position, the imaging device 40 moves in parallel with the upper surface of the pallet 10 (the placement surface 11c of the tray 11). The images of the plurality of optical components K held on the pallet 10 are taken.
Therefore, since the pallet 10 is in a stationary state at the time of image pickup by the image pickup device 40, the optical component K held on the pallet 10 does not vibrate and no positional deviation occurs. For this reason, it is possible to prevent a variation in inspection accuracy and perform a stable inspection.

Further, according to the present embodiment, the conveyance device 20 that conveys the pallet 10 and the conveyance control means (the CPU 71 and the conveyance control program) that stop conveyance of the pallet 10 by the conveyance device 20 when the pallet 10 reaches a predetermined position. 732).
For this reason, the pallet 10 being conveyed can be stopped at a predetermined position and imaged by the imaging device 40.

In addition, according to the present embodiment, a plurality of imaging devices 40 are provided along the conveyance direction (X direction) of the conveyance device 20, and the conveyance control unit uses the conveyance device 20 to add a plurality of pallets 10 to each of the imaging devices 40. When the plurality of pallets 10 reach a predetermined position corresponding to each imaging device 40, the conveyance of the plurality of pallets 10 by the conveyance device 20 is stopped.
For this reason, since a plurality of images can be picked up by one optical component inspection apparatus 100, the equipment is compared with a case where a plurality of images are picked up using a plurality of optical component inspection apparatuses. Can be simplified, the apparatus size can be reduced, and the apparatus cost can be reduced.

In addition, according to the present embodiment, the pallet 10 includes a tray 11 on which a plurality of optical components are placed, and a lid body 12 that holds the plurality of optical components between the tray 11 by overlapping the tray 11. The lid body 12 is removed before imaging by the imaging device 40 is started, and the lid body detaching device 30 that covers the tray 12 on the tray 11 after imaging by the imaging device 40 is completed.
For this reason, when the pallet 10 is transported between the plurality of imaging devices 40, the optical component K is suppressed by the tray 11 and the lid body 12, and therefore the position of the optical component K is caused by vibration during transportation. The lens portion R and the flange portion F of the optical component K can be inspected while preventing the displacement.

In addition, according to the present embodiment, the imaging device 40, the first imaging device 40A that captures an image for defect determination inside the optical component K, and the second imaging that captures a defect determination image on one surface of the optical component. Device 40B and a third image pickup device 40C for picking up an image for defect determination on the other surface of the optical component. A lid is attached to the tray 11 between the second image pickup device 40B and the third image pickup device 40C. A reversing device 60 for reversing the pallet 10 on which the body 12 is superposed is provided.
For this reason, the front and back images of the optical component K can be captured by one optical component inspection apparatus 100, and a plurality of images necessary for defect inspection of one optical component K are stored in one optical component inspection apparatus 100. Thus, all images can be taken.
Therefore, compared with the case where a plurality of optical component inspection apparatuses are used to capture a plurality of images necessary for defect inspection of the optical component K, the equipment is simplified, the apparatus size is reduced, and the apparatus cost is reduced. Can be reduced.

Further, according to the present embodiment, for each of the plurality of optical components K, each of the optical components is compared with the image captured by each of the plurality of imaging units 40A to 40C and the reference image stored in advance. Determination means (CPU 71 and determination program 733) for determining the presence or absence of a defect for each component K is provided.
For this reason, it is possible to sort the defective optical components K together.

In addition, this invention is not limited to the said embodiment, In the range which does not deviate from the summary, it can change suitably.

For example, in the above-described embodiment, the optical surfaces R1 and R2 of the lens portion R have been described by exemplifying the configuration in which both are convex from the flange portion F. However, the optical surfaces R1 and R2 of the lens portion R are It is not necessarily convex.

In the above embodiment, the configuration including the transport device 20 has been described as an example, but a configuration without the transport device 20 may be employed. In this case, for example, the user may manually place the pallet 10 at a predetermined position corresponding to the imaging device 40 instead of the transport device 20.

Moreover, in the said embodiment, although the structure which imaged the lens part R and the flange part F in the state which removed the cover body 12 of the pallet 10 with the cover body removal | desorption apparatus 30 was demonstrated, removing the cover body 12 Alternatively, only the lens portion R of the optical component K may be inspected.
In this case, the imaging device 40 moves in parallel with the upper surface of the pallet 10 (the upper surface of the lid body 12).

In the above embodiment, the configuration including the three imaging devices 40 has been described as an example. However, the number of the imaging devices 40 is not limited to this, and for example, a defect determination image on one surface of the optical component is captured. It is also possible to adopt a configuration including two imaging devices that capture an image for performing defect determination on the other surface of the optical component, and other imaging devices.

Further, in the above embodiment, the lid body detaching device 30 is a mechanism that removes the lid body 12 of the pallet 10 by suction, but is not limited to this mechanism as long as the lid body 12 can be removed. For example, a configuration in which both ends of the lid 12 are gripped and lifted may be used.

The present invention can be used as an optical component inspection apparatus that performs optical component defect inspection.

10 (10A-10D) Pallet 11 Tray 11a Recess 11b Through hole 11c Placement surface 12 Lid 12a Recess 12b Through hole 20 Conveying device (conveying means)
21

guide frame

21a, 21a groove part 22 support | pillar 23 pallet drive mechanism 30 cover body removal | desorption apparatus (lid body removal means)
31 Head part 32 Arm 33 Arm drive mechanism 40 (40A-40C) Imaging device (imaging means)
41 Illuminating device 42 Camera device 43 Frame 43a Standing portion 43b, 32c Supporting portion 44 Lifting mechanism 50 Moving device (moving means)
51 X-direction drive mechanism 52 Y-direction drive mechanism 60 Inversion device (inversion means)
61 clamping member 62 clamping member drive mechanism 70 control part (control means)
71 CPU (imaging control means, conveyance control means, determination means)
72 RAM
73 Storage Unit 731 Imaging Control Program (Imaging Control Unit)
732 Transfer control program (transfer control means)
733 Determination program (determination means)
734 Captured image storage unit 735 Reference image storage unit K Optical component R Lens unit R1, R2 Optical surface F Flange unit 100 Optical component inspection apparatus

Claims

In an optical component inspection apparatus that performs defect inspection of a plurality of optical components held on a pallet,
An illuminating device that irradiates light to the plurality of optical components held on the pallet; and an imaging unit that includes a camera device that captures images of the plurality of optical components irradiated with light by the illuminating device; ,
Moving means for moving the imaging means parallel to the top surface of the pallet;
Imaging control means for capturing images of each of the plurality of optical components while moving the imaging means by the moving means with respect to the pallet in a stationary state at a predetermined position;
An optical component inspection apparatus comprising:
Conveying means for conveying the pallet;
Transport control means for stopping transport of the pallet by the transport means when the pallet reaches the predetermined position;
The optical component inspection apparatus according to claim 1, further comprising:
A plurality of the imaging means are provided along the conveyance direction by the conveyance means,
The transport control means includes
Transporting the plurality of pallets to a predetermined position corresponding to each of the imaging means by the transport means;
The optical component inspection apparatus according to claim 2, wherein when the plurality of pallets reach a predetermined position corresponding to each of the imaging units, conveyance of the plurality of pallets by the conveyance unit is stopped.
The pallet is
A tray on which the plurality of optical components are placed, and a lid body that holds the plurality of optical components between the tray by overlapping the tray.
The apparatus further comprises: a lid body detaching means for removing the lid before imaging by the imaging means and for covering the tray with the lid after imaging by the imaging means is completed. The optical component inspection apparatus according to any one of the above.
A plurality of the imaging means,
First imaging means for imaging a defect determination image inside the optical component;
A second imaging means for imaging a defect determination image on one surface of the optical component;
A third imaging means for imaging a defect determination image on the other surface of the optical component;
With
5. The optical component according to claim 4, further comprising a reversing unit that reverses the pallet in a state in which the lid is superimposed on the tray between the second imaging unit and the third imaging unit. Inspection device.
Determination means for comparing each of the plurality of optical components with each of the plurality of imaging means and a reference image stored in advance to determine the presence or absence of a defect for each optical component. The optical component inspection apparatus according to any one of claims 3 to 5, further comprising: