TWI516556B - Metal nano-particle paste, and the use of metal nano-particles paste electronic parts assembly, LED module and printed circuit board circuit formation method - Google Patents
Metal nano-particle paste, and the use of metal nano-particles paste electronic parts assembly, LED module and printed circuit board circuit formation method Download PDFInfo
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- TWI516556B TWI516556B TW100120378A TW100120378A TWI516556B TW I516556 B TWI516556 B TW I516556B TW 100120378 A TW100120378 A TW 100120378A TW 100120378 A TW100120378 A TW 100120378A TW I516556 B TWI516556 B TW I516556B
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- Prior art keywords
- metal nanoparticle
- metal
- group
- protective film
- nanoparticle paste
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- 239000002082 metal nanoparticle Substances 0.000 title claims description 238
- 238000000034 method Methods 0.000 title claims description 36
- 230000015572 biosynthetic process Effects 0.000 title description 3
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- 239000011135 tin Substances 0.000 claims description 24
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Classifications
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- H—ELECTRICITY
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/52—Electrically conductive inks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
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- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
- H05K1/097—Inks comprising nanoparticles and specially adapted for being sintered at low temperature
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/181—Printed circuits structurally associated with non-printed electric components associated with surface mounted components
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3485—Applying solder paste, slurry or powder
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
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- H01L2224/29298—Fillers
- H01L2224/29399—Coating material
- H01L2224/2949—Coating material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8384—Sintering
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15788—Glasses, e.g. amorphous oxides, nitrides or fluorides
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Description
本發明,係關於一種含有表面以保護膜被覆之金屬奈米粒子與羧酸之金屬奈米粒子糊,更具體而言,係關於藉網版印刷或噴墨印刷等印刷,能以非常低溫之熱處理於基板上形成配線圖型、或能以非常低溫之熱處理於基板上接合電子零件之金屬奈米粒子糊。
近年來,於基板構裝電子零件之領域中,電氣接合,係以鉛游離焊料、特別是錫-銀-銅合金焊料為主流,但由於構裝溫度為240℃以上之非常高的溫度,故並非所有的電子零件及基板皆能因應。例如,當使用PET等耐熱性差之基板時、或由於模組之耐熱性之問題等而必需以低溫接合時,係使用能以較低溫電氣接合之鉍或銦系合金。然而,鉍於接合強度及合金的脆度上有問題,而銦系合金有高價之問題。
又,於耐熱性的觀點,當於不適於焊接之電子零件的構裝或模組的組裝時,係使用能以較低溫電氣接合之銀糊,但與錫電極之局部電池所致之傳導電阻的上昇、可根戴爾微孔(Kirkendall void)之產生及成本等會成為問題。另一方面,為了防止傳導電阻的上昇,係於銀糊進行低熔點金屬或導電填料、金屬奈米粒子的添加。
表面被被覆之分散成膠狀之金屬奈米粒子之製造方法,可舉例如氣體中蒸發法或還原析出法等(專利文獻1、專利文獻2)。又,活性連續界面蒸鍍法亦為表面被被覆之分散成膠狀之金屬奈米粒子之製造方法之一,其能以較簡單之裝置製得最小、均一尺寸與均一形狀之金屬、合金微粒子膠體,且可使用於多種之金屬、合金(專利文獻3)。
金屬奈米粒子,由於比表面積大反應活性高,故與金屬塊狀相比,具有能以低溫焊接之低溫燒結特性。例如,當為銀時,已知能以較原本之熔點964℃低許多之200~300℃左右之加熱處理產生焊接接合現象,顯示與金屬塊狀同等之導通性。
另一方面,近年來,由於加熱步驟的複雜化,金屬接點可能再度暴露於熱中,該場合之以錫-鉍合金為代表之低熔點合金,會因再熔融而有連接可靠性降低的問題。又,適於功率電晶體等高溫發熱部位之高熔點焊接,依然使用著對環境有不良影響之可能性之高鉛焊接。因此,利用金屬奈米粒子、特別是銀奈米粒子之低溫燒結特性與燒結後之回復金屬原本之熔點的性質,謀求連接可靠性降低的防止與接合之耐高溫性。如此,藉由使用銀奈米粒子,能以較金屬本來所具之熔點低之加熱溫度,將電子零件接合於基板、或形成配線圖型,但高成本之問題點並未解決。
因此,於專利文獻4,提出以低溫且短時間使用銅奈米粒子形成配線圖型之方法。然而,與錫同樣的,銅於大氣中亦容易氧化,故必須將氧化銅粒子於還原性氣體存在下所產生之等離子體環境氣氛中使其進行還原反應,藉此形成銅奈米粒子之燒結體。因此,於上述技術,必須嚴密地控制反應環境氣氛,且必須使用特殊裝置,是其問題。
專利文獻1:WO2005/025787號公報
專利文獻2:日本特開2005-26081號公報
專利文獻3:日本特開2008-150630號公報
專利文獻4:日本特開2004-119686號公報
本發明,有鑑於上述情事,其目的在於提供一種金屬奈米粒子糊,其係使用金屬奈米粒子之低溫燒結特性,可簡單地得到導電性及機械強度優異之金屬接合,且可形成導電性優異之配線圖型。
本發明之樣態之金屬奈米粒子糊,其特徵係含有:(A)金屬奈米粒子、(B)被覆於該金屬奈米粒子之表面的保護膜、(C)羧酸類、與(D)分散介質。藉由起因於(A)金屬奈米粒子與(B)保護膜之構成成分之化合物之間所產生之靜電力的分子間力、亦即靜電之結合,以於(A)金屬奈米粒子之表面結合(B)保護膜,而使(B)保護膜被覆於(A)金屬奈米粒子之表面。藉由使(A)金屬奈米粒子之表面以(B)保護膜被覆,能以防止(A)金屬奈米粒子於(D)分散介質中凝集的狀態保存金屬奈米粒子糊。又,若將金屬奈米粒子糊以較金屬奈米粒子之熔點低之既定溫度加熱處理、亦即低溫燒結,則由於(B)保護膜與(C)羧酸類之反應,(A)金屬奈米粒子與(B)保護膜之間之起因於靜電力之分子間力所致之結合斷裂,而使(B)保護膜由(A)金屬奈米粒子之表面分離。而於上述加熱條件下,若(B)保護膜由(A)金屬奈米粒子之表面分離,則(A)金屬奈米粒子會互相凝集、燒結。又,所謂「低溫燒結」,係指以較構成金屬奈米粒子之金屬之固有熔點低之溫度,金屬奈米粒子相互焊接而燒結之意。
本發明之樣態之金屬奈米粒子糊,其特徵為,該(A)金屬奈米粒子之平均初級粒徑為1~100nm。本發明之樣態之金屬奈米粒子糊,其特徵為,該(A)金屬奈米粒子,係選自金、銀、銅、鉑、鈀、鎳、鉍、鉛、銦、錫、鋅、鈦、鋁及銻所構成群中之至少一種之金屬。本發明之樣態之金屬奈米粒子糊,其特徵為,該(A)金屬奈米粒子,係選自金、銀、銅、鉑、鈀、鎳、鉍、鉛、銦、錫、鋅、鈦、鋁及銻所構成群中之至少一種之金屬合金。本發明之樣態之金屬奈米粒子糊,其特徵為,該(A)金屬奈米粒子係錫,該錫之平均初級粒徑為1~50nm。
本發明之樣態之金屬奈米粒子糊,其特徵為,該(B)被覆於金屬奈米粒子之表面的保護膜,係包含具有含可藉孤立電子對與該(A)金屬奈米粒子配位鍵結之氧原子、氮原子或硫原子之基的有機化合物。於(A)金屬奈米粒子,構成(B)保護膜之有機化合物之氧原子、氮原子或硫原子係以來自靜電力之分子間力鍵結,而推測藉此使(B)保護膜被覆(A)金屬奈米粒子。
本發明之樣態之金屬奈米粒子糊,其特徵為,該含氧原子之基為羥基(-OH)或氧基(-O-),該含氮原子之基為胺基(-NH2),該含硫原子之基為巰基(-SH)。於(A)金屬奈米粒子,構成(B)保護膜之有機化合物之羥基(-OH)或氧基(-O-)之氧原子、胺基(-NH2)之氮原子或巰基(-SH)之硫原子係以起因於靜電力之分子間力鍵結,推測藉此使(B)保護膜被覆(A)金屬奈米粒子。
本發明之樣態之金屬奈米粒子糊,其特徵為,該具有含氧原子之基的有機化合物,係下述通式(I)
(式中,R1、R2、R3係分別獨立表示碳數2~20之一價之基,為飽和烴基或不飽和烴基)所表示之化合物。通式(I),係分子內脫水之糖醇與之脂肪酸之酯,分子內脫水之糖醇之羥基(-OH)之氧原子,藉由起因於靜電力之分子間力與(A)金屬奈米粒子表面鍵結,推測藉此使(B)保護膜被覆(A)金屬奈米粒子。又,如後述,通式(I)之糖醇脂肪酸酯,推測藉由下述通式(II)之單羧酸、下述通式(III)之二羧酸等羧酸類反應、亦即糖醇之羥基與羧酸類之羧基反應,而使(B)保護膜由(A)金屬奈米粒子表面分離。本發明之樣態之金屬奈米粒子糊,其特徵為,該具有含氮原子之基的有機化合物,係下述通式(IV)
【化2】
R6-NH2 (IV)
(式中,R6表示碳數2~20之一價之基,為飽和烴基或不飽和烴基)所表示之化合物。通式(IV)為胺,胺基之氮原子,藉由起因於靜電力之分子間力與(A)金屬奈米粒子表面鍵結,推測藉此使(B)保護膜被覆(A)金屬奈米粒子。
本發明之樣態之金屬奈米粒子糊,其特徵為,該(C)單羧酸類,為單羧酸或其之酸酐、或二羧酸或其之酸酐。本發明之樣態,該單羧酸,係下述通式(II)
【化3】
R4-COOH (II)
(式中,R4係表示碳數6~10之一價之基,為飽和烴基或不飽和烴基)所表示之化合物。本發明之樣態之金屬奈米粒子糊,其特徵為,該二羧酸,係下述通式(III)
【化4】
HOOC-R5-COOH (III)
(式中,R5係表示可具有醚鍵之碳數1~12之二價之基)所表示之化合物。
本發明之樣態之金屬奈米粒子糊,其特徵為,該(A)金屬奈米粒子含有銀,該(D)分散介質為萜烯醇類。亦即,(A)金屬奈米粒子之金屬種為銀,或至少含有銀。
本發明之樣態之電子零件接合體,其特徵為,使用上述之金屬奈米粒子糊將電子零件構裝於基板。於該樣態,係使用該金屬奈米粒子糊作為基板與電子零件之導電性接合材料。
本發明之樣態之LED模組,其特徵為,以上述之金屬奈米粒子糊,將LED元件接合於基板。
本發明之樣態之印刷配線板之電路形成方法,其特徵為,使用上述之金屬奈米粒子糊以網版印刷法或噴墨法於印刷配線板上形成電極及配線圖型,且藉由以250℃以上加熱將該配線圖型進行燒成處理。於該樣態,係使用該金屬奈米粒子糊作為基板之配線材料。
藉由本發明,使用金屬奈米粒子之低溫燒結特性,可廉價且簡單地得到導電性、機械強度優異之金屬接合,且可形成導電性優異之配線圖型。又,藉由本發明,由於金屬奈米粒子之表面係以保護膜被覆,故於金屬奈米粒子糊之保存時,可防止金屬奈米粒子之凝集而提昇分散安定性。再者,若以較金屬奈米粒子之熔點之低溫進行加熱處理保護膜會與羧酸類進行反應,藉此保護膜會由金屬奈米粒子之表面分離,故保存時之分散安定性優異,而金屬奈米粒子能容易地凝集、燒結。
特別是,若使用以萜烯醇類作為含有銀之金屬奈米粒子之分散介質的金屬奈米粒子糊形成塗膜,則不僅導電性與機械強度優異,亦可得具有高反射率之塗膜。又,含有銀之金屬奈米粒子糊,具有優異之導電性、同時具有高熱傳導性與散熱性。因此,配合有含有銀之金屬奈米粒子與萜烯醇類的金屬奈米粒子糊,反射率與熱傳導性亦優異,故例如藉由塗布於電路基板表面,即可賦予電路基板優異之反射率,且適於作為用以接合電子零件(例如,LED元件)之接合材。
接著,說明本發明之金屬奈米粒子糊。本發明之金屬奈米粒子糊,係含有(A)金屬奈米粒子、(B)被覆於該金屬奈米粒子之表面的保護膜、(C)羧酸類、與(D)分散介質之混合物。
(A)金屬奈米粒子
(A)成分之金屬奈米粒子,係具有奈米等級之平均初級粒徑之金屬粉。由於具有奈米等級之平均初級粒徑,比表面積大而粒子表面之反應活性增高,故能以遠低於金屬原本熔點之加熱溫度,將電子零件電氣接合於基板上、或於基板上形成配線圖型。金屬奈米粒子之金屬種,只要具有良導電性、可被覆後述(B)成分之保護膜者即可,並無特別限定,可舉例如金、銀、銅、鉑、鈀、鎳、鉍、鉛、銦、錫、鋅、鈦、鋁及銻等使用於焊接之金屬單體及含有上述金屬種之金屬合金。上述金屬種之中,由對環境的負荷、成本及防止遷移現象的觀點考量,以錫、銅較佳。
又,當使用金屬奈米粒子糊作為將LED元件接合於電路基板之導電性接合材料時,由可得高亮度之LED模組的觀點考量,上述金屬種以銀較佳。
金屬奈米粒子之平均初級粒徑之上限值,由可得低溫燒結特性的觀點考量為100nm,由可迅速地進行低溫燒結的觀點考量以50nm較佳,而由於緻密之電子零件接合部之使用及形成微細之配線圖型的觀點考量以20nm為特佳。又,金屬奈米粒子之平均初級粒徑之下限值,由分散安定性的觀點考量為1nm,由低溫燒結性的觀點考量以2nm較佳,而由生產安定性的觀點考量以3nm為特佳。該等金屬奈米粒子可單獨使用、亦可混合2種以上使用。
(B)被覆於金屬奈米粒子之表面的保護膜
(B)成分之被覆於金屬奈米粒子之表面的保護膜,係藉由於(A)成分之金屬奈米粒子表面之反應活性高而防止金屬奈米粒子之互相焊接,而用以賦予金屬奈米粒子於分散介質中之均勻地分散、亦即分散安定性者。該保護膜之構成成分,只要能被覆金屬奈米粒子表面,於分散介質中對金屬奈米粒子能發揮均勻地分散性者即可,並無特別限定,可舉例如包含具有含可藉孤立電子對與金屬奈米粒子配位鍵結之氧原子、氮原子或硫原子之基的有機化合物。上述氧原子、氮原子或硫原子係藉由起因於靜電力之分子間力鍵結於金屬奈米粒子表面,藉此使保護膜被覆金屬奈米粒子。又,由於有機化合物與有機溶劑等分散介質具有親和性,故能具有分散安定性。再者,含氧原子之基之例可舉例如羥基(-OH)或氧基(-O-),含氮原子之基之例可舉例如胺基(-NH2),含硫原子之基之例可舉例如巰基(-SH)。
又,保護膜之構成成分之有機化合物,由室溫下之熱安定性與金屬奈米粒子之分散性的觀點考量,較佳為,具有能藉孤立電子對與金屬奈米粒子鍵結之具有含氧原子、氮原子或硫原子之基、且碳數2~20之飽和或不飽和烴基的有機化合物,特佳為,具有複數之能藉孤立電子對與金屬奈米粒子鍵結之具有含氧原子、氮原子或硫原子之基、且碳數4~18之飽和或不飽和烴基的有機化合物。
上述之保護膜之構成成分之有機化合物,可舉例如糖醇與脂肪酸之酯。糖醇,並無特別限定,可舉例如甘油、山梨醇及山梨醇之分子內脫水者、甘露糖醇及甘露糖醇之分子內脫水者、木糖醇及木糖醇之分子內脫水者、以及赤藻糖醇及赤藻糖醇之分子內脫水者等。又,脂肪酸,並無特別限定,可舉例如丁酸、己酸、庚酸、辛酸、癸酸、月桂酸、肉荳蔻酸、軟脂酸、硬脂酸、油酸等。糖醇脂肪酸酯,可舉例如下述通式(I)
(式中,R1、R2、R3係分別獨立表示碳數2~20之一價之基,為飽和烴基或不飽和烴基)所表示之分子內脫水之糖醇與脂肪酸之酯,上述通式(I)之糖醇與脂肪酸之酯之具體例,可舉例如下述式(I-1)
所表示之化合物。再者,保護膜之構成成分之有機化合物,可舉例如下述式(IV)
【化7】
R6-NH2 (IV)
(式中,R6表示碳數2~20之一價之基,為飽和烴基或不飽和烴基)所表示之胺,胺之具體例,可舉例如下述式(IV-1)
所表示之化合物。
對於金屬奈米粒子之保護膜之被覆量之上限值,相對於金屬奈米粒子100質量份,由防止傳導電阻值上昇的觀點考量為30質量份,由低溫燒結性的觀點考量以20質量份較佳。另一方面,對於金屬奈米粒子之保護膜之被覆量之下限值,相對於金屬奈米粒子100質量份,由保持金屬奈米粒子於室溫下之分散安定性的觀點考量為5質量份,由使分散安定性更確實的觀點考量以10質量份較佳。該等保護膜之構成成分可單獨使用、亦可混合2種以上使用。
以(B)成分之保護膜被覆之金屬奈米粒子之製造方法,並無特別限定,而由能簡單地製造具有均一尺寸與形狀之金屬‧合金微粒子膠體、且為能以錫、銅及鎳等容易氧化之卑金屬類或純金屬之狀態奈米粒子化的觀點考量,以上述專利文獻3所記載之活性連續界面蒸鍍法為佳。
活性連續界面蒸鍍法,係使用由下述所構成之裝置:將液體介質貯留於下部之旋轉式真空槽、配置於上述旋轉式真空槽內部之金屬材料之蒸發裝置、與使上述旋轉式真空槽可環繞真空槽之中心軸旋轉之可變速旋轉機構。
所謂活性連續界面蒸鍍法,具體而言,係於旋轉式真空槽之內部,裝填既定量(例如200ml)之配合有保護膜之構成成分(例如,山梨醇脂肪酸酯)10質量%之溶液(例如烷基萘溶液),於電阻加熱蒸發源裝填既定量(例如10g)之金屬奈米粒子之原料之金屬塊。於使旋轉式真空槽以既定之轉數(例如100mm/s)旋轉之下,真空排氣,於5×10-5Torr之真空中,加熱電阻加熱蒸發源,使金屬蒸氣以既定之速度(例如0.2g/min)蒸發。藉由以該條件運轉既定時間(例如120分鐘),金屬塊大致消失,所蒸發之金屬吸附於溶液而可於旋轉式真空槽之底部得到金屬奈米粒子之膠體。使溶劑(例如環己烷溶液)由所得之金屬奈米粒子之膠體揮發,可製造以保護膜被覆之金屬奈米粒子。
(C)羧酸類
(C)成分之羧酸類,係於既定之加熱條件下、亦即較構成金屬奈米粒子之固有熔點低之加熱溫度的條件下,與被覆金屬奈米粒子之保護膜反應,藉此使保護膜由金屬奈米粒子之表面脫離,而使保護膜之功能喪失者。由於於上述加熱條件下,保護膜會由金屬奈米粒子之表面脫離,故金屬奈米粒子彼此互相凝集、燒結。亦即,羧酸類,係具有保護膜分離劑之功能。例如,羧酸類,係與保護膜之構成成分之有機化合物之含有可藉孤立電子對與金屬奈米粒子配位鍵結之氧原子、氮原子或硫原子之基反應。
更具體而言,若舉保護膜之構成成分之通式(I)之糖醇脂肪酸酯之例,羧酸類之羧基與分子內脫水之糖醇之羥基反應而酯化,藉此,起因於糖醇之羥基之糖醇脂肪酸酯‧金屬奈米粒子間之分子間力所致之鍵結斷裂,而保護膜由金屬奈米粒子之表面分離。又,若舉保護膜之構成成分之通式(IV)之胺之例,胺之胺基與羧酸類之羧基反應而醯亞胺化,藉此,起因於胺基之胺‧金屬奈米粒子間之分子間力所致之鍵結斷裂,而保護膜由金屬奈米粒子之表面分離。
可配合於金屬奈米粒子糊之羧酸類,只要為單羧酸及其之酸酐、二羧酸及其之酸酐、三羧酸及其之酸酐等具有羧基之有機化合物即可,並無特別限定。單羧酸,可舉例如通式(II)
【化9】
R4-COOH (II)
(式中,R4係表示碳數6~10之一價之基,為飽和烴基或不飽和烴基)所表示之化合物。具體例,可舉例如庚酸、辛酸、壬酸、癸酸等飽和脂肪酸及上述各飽和脂肪酸之酸酐、以及反式-3-己烯酸、2-壬烯酸等不飽和脂肪酸及上述各不飽和脂肪酸之酸酐,由保護膜能順利地分離的觀點,以壬烯酸較佳。二羧酸,可舉例如通式(III)
【化10】
HOOC-R5-COOH (III)
(式中,R5係表示可具有醚鍵之碳數1~12之二價之基)所表示之化合物。具體例,可舉例如戊二酸、己二酸、辛二酸、氧二乙酸、琥珀酸、苯二甲酸及上述各酸之酸酐或衍生物等,由殘渣之不易殘留性及順利之保護膜分離能力的觀點考量,以氧二乙酸、氧二乙酸酐、琥珀酸酐較佳。又,三羧酸之例,可舉例如檸檬酸、異檸檬酸、烏頭酸等。
羧酸類之配合量之上限值,相對於被覆有保護膜之金屬奈米粒子100質量份,由羧酸類所致之金屬奈米粒子之抗氧化的觀點考量為300質量份,而由確保金屬奈米粒子糊整體之金屬比率的觀點考量以200質量份為佳。另一方面,羧酸類之配合量之下限值,相對於被覆有保護膜之金屬奈米粒子100質量份,由使保護膜確實地由金屬奈米粒子之表面分離的觀點考量為30質量份,而由使導通性安定的觀點考量以40質量份為佳。該等羧酸類可單獨使用、亦可混合2種以上使用。
(D)分散介質
(D)成分之分散介質,於調整金屬奈米粒子糊之黏度的同時,亦具有作為於低溫燒結時之金屬奈米粒子於金屬奈米粒子糊中移動之際之潤滑劑的功能。分散介質之例,可舉例如癸烷、十四烷、十八烷等飽和或不飽和脂肪族烴類、甲乙酮、環己酮等酮類;甲苯、二甲苯、四甲基苯等芳香族烴類;甲基賽璐蘇、乙基賽璐蘇、丁基賽璐蘇、甲卡必醇、丁卡必醇、丙二醇單甲醚、二乙二醇單甲醚、二乙二醇單乙醚、二丙二醇單乙醚、三乙二醇單乙醚等二醇醚類;乙酸乙酯、乙酸丁酯、乙酸賽璐蘇、二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸酯、丙二醇單甲醚乙酸酯及上述二醇醚類之酯化合物等之酯類;乙醇、丙醇、乙二醇、丙二醇、己二醇等醇類、鯊烷等碳數30以上之不飽和烴類等。
又,分散介質,亦可使用單萜烯醇、倍半萜烯醇及二萜烯醇等萜烯醇類。金屬奈米粒子,特別是使用含有銀之金屬奈米粒子時,若使用上述之萜烯醇類之分散介質,可得到能形成導電性優異且具有高反射率之塗膜的金屬奈米粒子糊。單萜烯醇之例,可舉例如α-萜品醇、β-萜品醇、γ-萜品醇、δ-萜品醇、淚柏醇、龍腦、萜品烯-4-醇、及1-羥基-對薄荷烷及8-羥基-對薄荷烷等二氫萜品醇等。倍半萜烯醇之例,可舉例如cartrol、雪松醇、橙花叔醇、藿香醇、α-甜沒藥醇、綠花白千層醇、杜松醇等。
該等分散介質,由能於室溫下安定地保存、且可抑制低溫燒結時之蒸散的觀點考量,較佳為,閃火點為50℃以上且沸點為150℃以上之有機溶劑,可舉例如己二醇。又,由低溫燒結時之潤滑劑功能的觀點考量,特佳為,具有(B)成分之保護膜由金屬奈米粒子表面分離之溫度以上之沸點的有機溶劑,例如,具有250℃以上之沸點之鯊烷、十四烷等。
分散介質之配合量,可視所欲之黏度適當地配合,相對於以保護膜被覆之金屬奈米粒子100質量份,例如為1~300質量份,而由防止塗膜破裂的觀點考量,以20~200質量份為佳。金屬奈米粒子糊之B型黏度計之黏度,例如,於25℃下為5Pa‧s~400Pa‧s,而由塗布之作業性的觀點考量,較佳為,於25℃下為20Pa‧s~300Pa‧s,而由網版印刷或分配器之塗布及作為潤滑劑之功能的觀點考量,特佳為,於25℃下為50Pa‧s~200Pa‧s。又,該等分散介質可單獨使用、亦可混合2種以上使用。
金屬奈米粒子糊,視用途可適當地配合慣用之添加劑。添加劑,可舉例如光澤賦予劑、抗金屬腐蝕劑、安定劑、流動性提昇劑、分散安定化劑、增黏劑、黏度調整劑、保濕劑、觸變性賦予劑、消泡劑、殺菌劑、填充材等。該等添加劑,可單獨使用、亦可混合2種以上使用。
接著,說明本發明之金屬奈米粒子糊之製造方法。金屬奈米粒子糊之製造方法並無特別限定,例如,可藉由於既定之分散介質,添加、分散以既定製法(例如,活性連續界面蒸鍍法)製造之保護膜所被覆之金屬奈米粒子、與羧酸類而製得。
接著,說明本發明之金屬奈米粒子糊之用途例及使用方法例。本發明之金屬奈米粒子糊,可使用於各種用途。本發明之金屬奈米粒子糊,亦高密度含有金屬奈米粒子,又,能以較金屬奈米粒子之熔點低之溫度(例如,當為錫時150~200℃左右,當為銀、銅時250~350℃左右)燒結,亦即具有低溫燒結性,故例如有作為將電子零件電氣且物理地接合於配線基板的導電性接合材料、形成導電性膜之膜材料、特別是於基板形成配線圖型之配線材料的用途。
當作為導電性接合材料使用時,係於配線基板上之接合電子零件的位置,塗布金屬奈米粒子糊,於所塗布之金屬奈米粒子糊膜上載置電子零件後,進行燒成處理,以將電子零件接合於配線基板上。金屬奈米粒子糊之塗布方法,並無特別限定,可舉例如網版印刷法、分配器法等。金屬奈米粒子糊之塗布量,可適當地調整,例如以使成為1~20μm之厚度的方式塗布。燒成溫度,只要為被覆於金屬奈米粒子表面之保護膜由金屬奈米粒子分離而金屬奈米粒子互相焊接而低溫燒結的溫度即可,並無特別限定,例如,當金屬奈米粒子為錫、保護膜為式(I-1)之山梨醇脂肪酸酯時,為150~200℃、較佳為150~170℃,當金屬奈米粒子為銅或銀、保護膜為式(I-1)之山梨醇脂肪酸酯時,為250~350℃、較佳為280~320℃。又,燒成時間,可適當選擇,例如為5~120分鐘。所使用之配線基板之材質,並無特別限定,除玻璃類、金屬氧化物等無機材料之外,由於本發明之金屬奈米粒子糊具有低溫燒結性,故亦可使用耐熱性較無機材料差之聚酯系樹脂、聚碳酸酯系樹脂、苯乙烯系樹脂、氟樹脂等有機材料。
其之使用方法例,由於金屬粒子為奈米尺寸,故於配線基板上之微細區域亦可接合電子零件。例如,本發明之金屬奈米粒子糊,於以往之焊接之印刷供給量之偏差會成為問題之0402晶片或0.3mm以下之窄間距之構裝區域等亦可接合。
又,當作為配線材料使用時,係於基板上,以金屬奈米粒子糊描繪所欲之配線圖型,將描繪之配線圖型進行燒成處理,而於基板上形成燒結之配線圖型。金屬奈米粒子糊之塗布方法,只要可形成配線圖型之塗布方法即可,並無特別限定,可舉例如網版印刷法、噴墨印刷法等。又,金屬奈米粒子糊之塗布量、燒成條件、可使用之基板之材質,係與上述作為導電性接合材料使用時相同。其之使用方法例,可利用金屬粒子為奈米尺寸,而亦適用於微細之配線圖型的形成。
再者,本發明之金屬奈米粒子糊,若使用含有銀之金屬奈米粒子、與萜烯醇類之分散介質,則可形成導電性優異且具有高反射率之塗膜,故於塗布有金屬奈米粒子糊之電路基板,使用晶粒接合器將LED元件接合以製造LED模組時,亦可作為反射塗膜、接合用材料使用。
[實施例]
接著,使用實施例以更詳細地說明本發明。唯,本發明並不限於以下所示實施例之樣態。
實施例1~11、比較例1~6
以下,說明使用本發明之金屬奈米粒子糊作為導電性接合材料之實施例。
(1)關於金屬奈米粒子糊之配合成分
導電性材料
‧關於以保護膜被覆之金屬奈米粒子(以下,以「被覆金屬奈米粒子」表示)
被覆金屬奈米粒子I:以上述活性連續界面蒸鍍法,於錫奈米粒子被覆式(I-1)之山梨醇脂肪酸酯所構成之保護膜者。
被覆金屬奈米粒子II:以上述活性連續界面蒸鍍法,於錫奈米粒子被覆式(IV-1)之油胺所構成之保護膜者。
被覆金屬奈米粒子III:以上述活性連續界面蒸鍍法,於銀奈米粒子被覆式(I-1)之山梨醇脂肪酸酯所構成之保護膜者。
被覆金屬奈米粒子IV:以上述活性連續界面蒸鍍法,於銅奈米粒子被覆式(I-1)之山梨醇脂肪酸酯所構成之保護膜者。
以熱分析法(TG-DTA法),上述被覆金屬奈米粒子I~IV之保護膜成分之含量皆為20質量%。
‧關於金屬粉
SAC305焊料粉:(股)Tamura製作所製,以離心霧化法製作。
乾粉錫奈米粒子:無保護膜所成之被膜者。Aldrich(股)製,「Tin nanopowder」。
(2)作為導電性接合材料使用之金屬奈米粒子糊之調製方法
將含有20質量%之以上述活性連續界面蒸鍍法所得之被覆金屬奈米粒子之環己烷分散液,投入既定量至瑪瑙研缽,以減壓乾燥使環己烷分全部揮發,製得具有保護膜成分20質量%之被覆金屬奈米粒子。於該被覆金屬奈米粒子,加入既定量之羧酸類與既定量之溶劑,使用杵臼混合5分鐘,藉此調製成作為導電性接合材料使用之金屬奈米粒子糊。
使用上述導電性接合材料之調製方法,將下述表1所示之各成分以下述表1所示之配合比例配合,製作成實施例1~11及比較例1~6之金屬奈米粒子糊。下述表1所示之配合量係表示質量%。
(3)性能評價
(一) 晶片傳導電阻
於表面形成有銅箔焊墊之玻璃環氧基板上,將如上述所調製之金屬奈米粒子糊使用200μmt之金屬光罩以金屬刮板印刷,使用YAMAHA(股)製表面黏著機(chip mounter)搭載電阻值為0Ω之鍍錫之1608CR晶片。接著,以回焊加熱(以與配合有金屬種為錫之被覆金屬奈米粒子之實施例1~8與比較例1、3~4、配合有乾粉錫奈米粒子之比較例2、配合有SAC305焊料粉之比較例5~6、以及SAC305焊料粉同樣之組成的方式,配合有金屬種為錫之被覆金屬奈米粒子、金屬種為銀之被覆金屬奈米粒子及金屬種為銅之被覆金屬奈米粒子之實施例11,係圖1所示之回焊加熱圖表(回焊加熱時之氧濃度為50ppm以下)、配合有金屬種為銀或銅之被覆金屬奈米粒子之實施例9~10,係圖2所示之回焊加熱圖表(回焊加熱時之氧濃度為50ppm以下))將搭載於玻璃環氧基板之1608CR晶片接合,使用岩通計測(股)製測微器,測定該接合體之傳導電阻之值。
(二) 晶片電阻零件之剪切強度
於表面上形成有銅箔焊墊之玻璃環氧基板上,將如上述所調製之金屬奈米粒子糊使用150μmt之金屬光罩以金屬刮板印刷,將鍍錫之1608CR晶片載置10個於銅箔焊墊之印刷膜上。接著,以回焊加熱(以與配合有金屬種為錫之被覆金屬奈米粒子之實施例1~8與比較例1、3~4、配合有乾粉錫奈米粒子之比較例2、配合有SAC305焊料粉之比較例5~6、以及SAC305焊料粉同樣之組成的方式,配合有金屬種為錫之被覆金屬奈米粒子、金屬種為銀之被覆金屬奈米粒子及金屬種為銅之被覆金屬奈米粒子之實施例11,係圖1所示之回焊加熱圖表(回焊加熱時之氧濃度為50ppm以下)、配合有金屬種為銀或銅之被覆金屬奈米粒子之實施例9~10,係圖2所示之回焊加熱圖表(回焊加熱時之氧濃度為50ppm以下))將載置於玻璃環氧基板之1608CR晶片接合製作成試驗片。對該試驗片,使用拉伸試驗機(SHIMADZU(股)製EZ-L),以5mm/min之條件測定1608CR晶片之剪切強度。又,測定結果,係測定剪切強度之10個1608CR晶片之平均值。
(三) 表面狀態
對以與上述(一)晶片傳導電阻相同之方法所製作之接合體,以目視觀察基板、晶片間之接合部。評價,係以下述4階段進行。
◎:具金屬光澤,表面光滑。
○:具金屬光澤,但表面不光滑。
△:不甚具金屬光澤,表面有凹凸與氣泡。
×:不具金屬光澤,與加熱前沒有改變。
將實施例1~11、比較例1~6之評價結果示於下述表2。
關於表2之剪切強度,所謂「無法測定」,係指由於無法將1608CR晶片接合於玻璃環氧基板上,故無法測定剪切強度之意。
如表2所示,若使用配合有被覆山梨醇脂肪酸酯膜之金屬奈米粒子與羧酸類之金屬奈米粒子糊(實施例1~4、6~10)及配合有被覆油胺膜之金屬奈米粒子與羧酸類之金屬奈米粒子糊(實施例5)將晶片接合於基板,則可得晶片傳導電阻值減低、具有優異之導通性之接合部。又,實施例1~10,接合於基板上之晶片之剪切強度增高使接合部之機械強度提昇,接合部之表面狀態亦良好。如實施例11所示,即使使被覆金屬奈米粒子為3種金屬奈米粒子之金屬種之混合品,亦可得具有優異導通性之接合部,接合部之表面狀態亦良好。又,實施例11,與實施例1~10相比,特別是晶片之剪切強度增高而使接合部之機械強度更提昇。
由實施例1、3~6、8~11與實施例2的比較可知,若使氧二乙酸、氧二乙酸酐或辛烯基琥珀酸酐之配合比率為30質量%以上,則接合部之導通性、剪切強度及表面狀態皆更提昇。又,若使用二羧酸或二羧酸之酸酐(實施例1、5、6、8~11),與使用單羧酸的情形(實施例7)相比,則接合部之導通性、剪切強度及表面狀態皆更提昇。由實施例9、10可知,若於金屬種為銀(實施例9)或銅(實施例10)之被覆金屬奈米粒子,使用高沸點之烴系溶劑之鯊烷作為分散介質,則接合部之導通性與表面狀態特別優異。
另一方面,由比較例1可知,於被覆有保護膜之金屬奈米粒子之糊未配合保護膜分離劑之羧酸類,又,由比較例3、4可知,若於被覆有保護膜之金屬奈米粒子糊未配合保護膜分離劑之羧酸類(於比較例3配合胺,於比較例4配合鹵素系活性劑),接合本身皆不充分,且亦未確認到於接合部之導通性。再者,接合部之表面狀態亦不佳。又,由比較例2、6可知,即使於使用未被覆有保護膜之金屬奈米粒子或以往之焊料粉之糊配合羧酸類,晶片傳導電阻亦高、接合部之導通性差。又,比較例2、5、6,與比較例1、3、4相同的,接合不充足、接合部之表面狀態亦不佳。
實施例12~14、比較例7
以下,說明使用本發明之金屬奈米粒子糊作為配線材料之實施例。
(1) 關於金屬奈米粒子糊之配合成分
導電性材料
被覆金屬奈米粒子III、被覆金屬奈米粒子IV,係與上述之將金屬奈米粒子糊作為導電性接合材料使用之實施例相同。
金屬奈米粒子IV,係無保護膜所成之被膜者。
(2) 作為配線材料使用之金屬奈米粒子糊之調製方法
將含有20質量%之上述活性連續界面蒸鍍法所得之被覆金屬奈米粒子之環己烷分散液,投入既定量於瑪瑙研缽,以減壓乾燥使環己烷分全部揮發,製得具有20質量%之保護膜成分之被覆金屬奈米粒子。於該被覆金屬奈米粒子,添加既定量之羧酸類與既定量之溶劑,使用杵臼混合5分鐘,藉此調製成作為配線材料使用之金屬奈米粒子糊。
使用上述配線材料之調製方法,將下述表3所示之各成分以下述表3所示之配合比例配合,製作成實施例12~14及比較例7之金屬奈米粒子糊。下述表3所示之配合量係表示質量%。
(3) 性能評價
(四) 體積電阻
於載玻片上,將如上述所調製之金屬奈米粒子糊以網版印刷塗布長度5cm×寬度1cm,以下述表4所示之燒成條件(於圖2顯示回焊加熱圖表)將塗膜燒成後,測定膜厚,使用岩通計測(股)製測微器測定電阻值,藉此計算出體積電阻(比電阻)。
將實施例12~14、比較例7之評價結果示於下述表4。
※塊狀銅之比電阻為1.67E-06Ω‧cm
如表4所示,若於以山梨醇脂肪酸酯膜被覆表面之金屬奈米粒子配合羧酸類,則可形成體積電阻值被抑制之配線圖型。
實施例15~19、比較例8~10
以下,關於本發明之金屬奈米粒子糊,說明作為具有高反射率之塗膜、接合用材料使用之實施例。
(1) 關於金屬奈米粒子糊之配合成分
導電性材料
‧被覆金屬奈米粒子III,係與上述之將金屬奈米粒子糊作為導電性接合材料使用之實施例之被覆金屬奈米粒子III相同。
‧銀粉,係福田金屬(股)製,「AgC-A」
分散介質
‧萜品醇C:日本萜(股)製,α-萜品醇、β-萜品醇及γ-萜品醇之混合物。既存化學物質編號3-2323、CAS. No. 8000-41-7,純度85質量%以上。
‧二氫萜品醇:日本萜(股)製,1-羥基-對薄荷烷及8-羥基-對薄荷烷之混合物。既存化學物質編號3-2315、CAS. No. 498-81-7,純度96質量%以上。
(2) 作為基板之塗膜(反射塗膜、LED元件接合用材料)使用之被覆金屬奈米粒子糊之調製方法
將含有20質量%之上述活性連續界面蒸鍍法所得之被覆金屬奈米粒子之環己烷分散液,投入既定量於瑪瑙研缽,以減壓乾燥使環己烷分全部揮發,製得具有20質量%之保護膜成分之被覆金屬奈米粒子。於該被覆金屬奈米粒子,添加既定量之羧酸類與既定量之溶劑,使用杵臼混合5分鐘,藉此調製成作為LED元件之基板之接合材料使用之金屬奈米粒子糊。
使用上述調製方法,將下述表5所示之各成分以下述表5所示之配合比例配合,調製成實施例15~19及比較例8~10之金屬奈米粒子糊。下述表5所示之配合量係表示質量%。
(3) 性能評價
(五) 反射率
於6cm×3cm之載玻片上,將如上述所調製之金屬奈米粒子糊使用200μmt之金屬光罩以金屬刮板印刷。印刷後,以下述表6所示之燒成條件加熱(配合有金屬種為銀之被覆金屬奈米粒子之實施例15~19中之實施例15、18、19與比較例8~10係圖2所示之回焊加熱圖表,實施例16係圖3所示之回焊加熱圖表,實施例17係圖4所示之回焊加熱圖表),於載玻片上形成3cm×2cm之金屬塗膜。對燒成之前之上述金屬塗膜,使用日立先端科技(股)製之分光光度計「日立分光光度計U-4100」,測定450nm之金屬塗膜之反射率。又,一併測定250~800μm範圍中之反射率之最大值。反射率之測定,實施例、比較例皆係以YAG雷射以入射角10°進行者,測定當以氧化鋁作為基準試樣(日立先端科技(股)製「氧化鋁製標準白板」)之入射角10°之其之反射率作為100時之全光線相對反射率。
(六) 塗膜之狀態
以目視觀察與上述(五)以同樣方法形成之金屬塗膜。於金屬塗膜未產生破裂而均一地塗布者評價為「均一」,於金屬塗膜產生破裂實用上無法使用者評價為「破裂」。
又,體積電阻係與上述(四)、晶片電阻零件之剪切強度,係與上述(二)以同樣方法測定。
將實施例15~19、比較例8~10之評價結果示於下述表6。
如表6所示,若以銀作為被覆奈米粒子之金屬種、於分散介質使用萜烯醇類,則可得具有低體積電阻值與高反射率、晶片電阻零件之剪切強度優異之塗膜。又,由實施例15~19與比較例8、9可知,藉由於分散介質使用萜烯醇類,可防止塗膜之破裂並提昇反射率。藉由使燒成之環境氣氛為大氣而非惰性氣體,可進一步提昇塗膜之反射率。又,由實施例15~17、19可知,藉由使加熱溫度為250℃、特別是300℃,可更提昇塗膜之反射率。
本發明之金屬奈米粒子糊,能藉較金屬奈米粒子之熔點低溫之熱處理將基板與電子零件電氣接合,且可藉上述低溫之熱處理於基板上形成配線圖型,故於基板上構裝電子零件之領域中的利用價值高。又,配合有含銀之金屬奈米粒子與萜烯醇類之金屬奈米粒子糊,反射率與熱傳導性皆優異,故特別於作為基板之反射塗膜材料及接合LED元件之接合材料的利用價值高。
圖1,係說明於金屬奈米粒子之金屬種使用錫或焊料粉時之回焊加熱圖表之圖。
圖2,係說明於金屬奈米粒子之金屬種使用銀或銅時之回焊加熱圖表之圖。
圖3,係說明於金屬奈米粒子之金屬種使用銀時之回焊加熱圖表之圖。
圖4,係說明於金屬奈米粒子之金屬種使用銀時之第2回焊加熱圖表之圖。
Claims (9)
- 一種金屬奈米粒子糊,其特徵係含有:(A)平均初級粒徑為1~100nm之金屬奈米粒子、(B)被覆於該金屬奈米粒子之表面的保護膜、(C)羧酸類、與(D)分散介質;該(A)金屬奈米粒子係選自由金、銀、銅、鉑、鈀、鎳、鉍、鉛、銦、錫、鋅、鈦、鋁及銻所成群中之至少一種之金屬,或,選自由金、銀、銅、鉑、鈀、鎳、鉍、鉛、銦、錫、鋅、鈦、鋁及銻所構成群中之至少一種之金屬合金;該(B)被覆於該金屬奈米粒子之表面的保護膜係包含糖醇與脂肪酸之酯及選自由下述式(IV)所表示之化合物所成群之至少一種;R 6 -NH 2 (IV)式中,R6表示碳數2~20之一價之基且為不飽和烴基;該(C)羧酸類為單羧酸或其之酸酐、或二羧酸或其之酸酐;相對於該(A)金屬奈米粒子100質量份,該(B)被覆於該金屬奈米粒子之表面的保護膜的被覆量為5質量份~30質量份;相對於該(A)金屬奈米粒子100質量份,該(C)羧酸類之配合量為30質量份~300質量份。
- 如申請專利範圍第1項之金屬奈米粒子糊,其中,該(A)金屬奈米粒子係錫,該錫之平均初級粒徑為1~ 50nm。
- 如申請專利範圍第1項之金屬奈米粒子糊,其中,該糖醇與脂肪酸之酯係下述通式(I)所表示之化合物,
- 如申請專利範圍第1項之金屬奈米粒子糊,其中,該單羧酸係下述通式(II)所表示之化合物,R 4 -COOH (II)式中,R4係表示碳數6~10之一價之基且為飽和烴基或不飽和烴基。
- 如申請專利範圍第1項之金屬奈米粒子糊,其中,該二羧酸係下述通式(III)所表示之化合物,HOOC-R 5 -COOH (III)式中,R5係表示可具有醚鍵之碳數1~12之二價之基。
- 如申請專利範圍第1項之金屬奈米粒子糊,其中,該(A)金屬奈米粒子含有銀,該(D)分散介質為萜烯醇類。
- 一種電子零件接合體,其特徵為,使用如申請專利範圍第1至6項中任一項之金屬奈米粒子糊將電子零件構裝於基板。
- 一種LED模組,其特徵為,以如申請專利範圍第6項之金屬奈米粒子糊,將LED元件接合於基板。
- 一種印刷配線板之電路形成方法,其特徵為,使用如申請專利範圍第1至6項中任一項之金屬奈米粒子糊以網版印刷法或噴墨法於印刷配線板上形成電極及配線圖型,且藉由以250℃以上加熱將該配線圖型進行燒成處理。
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KR (1) | KR101867978B1 (zh) |
CN (1) | CN103003891B (zh) |
TW (1) | TWI516556B (zh) |
WO (1) | WO2011158659A1 (zh) |
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JP5966370B2 (ja) * | 2012-01-16 | 2016-08-10 | 株式会社村田製作所 | 金属粉末、その製造方法、導電性ペースト、および電子部品 |
EP2812139B1 (en) * | 2012-02-10 | 2017-12-27 | Lockheed Martin Corporation | Nanoparticle paste formulations and methods for production and use thereof |
EP2938683B1 (en) * | 2012-12-28 | 2019-10-02 | Printed Energy Pty Ltd | Nickel inks and oxidation resistant and conductive coatings |
JP6153076B2 (ja) * | 2013-05-22 | 2017-06-28 | 株式会社豊田中央研究所 | 金属ナノ粒子ペースト、それを含有する接合材料、及びそれを用いた半導体装置 |
JP6354760B2 (ja) * | 2013-07-25 | 2018-07-11 | 石原産業株式会社 | 金属銅分散液及びその製造方法並びにその用途 |
US9053405B1 (en) * | 2013-08-27 | 2015-06-09 | Flextronics Ap, Llc | Printed RFID circuit |
US10174208B2 (en) | 2013-11-22 | 2019-01-08 | Toyo Seikan Group Holdings, Ltd. | Curable resin composition having antibacterial power |
WO2015098658A1 (ja) * | 2013-12-24 | 2015-07-02 | Dic株式会社 | 金属ナノ粒子を含有する接合用材料 |
EP2942129B1 (de) * | 2014-05-05 | 2017-07-05 | Heraeus Deutschland GmbH & Co. KG | Metallpaste und deren Verwendung zum Verbinden von Bauelementen |
JP6373066B2 (ja) * | 2014-05-30 | 2018-08-15 | Dowaエレクトロニクス株式会社 | 接合材およびそれを用いた接合方法 |
JP6367013B2 (ja) * | 2014-06-05 | 2018-08-01 | 三井金属鉱業株式会社 | スズ粉及びその製造方法 |
US9966479B2 (en) | 2014-06-12 | 2018-05-08 | E I Du Pont De Nemours And Company | Aluminum-tin paste and its use in manufacturing solderable electrical conductors |
CN104259455B (zh) * | 2014-09-17 | 2016-08-17 | 长沙市宇顺显示技术有限公司 | 纳米铜粉的在线包覆制备方法及装置 |
WO2016076306A1 (ja) * | 2014-11-12 | 2016-05-19 | ハリマ化成株式会社 | 導電性ペースト |
KR102101474B1 (ko) * | 2015-12-15 | 2020-04-16 | 주식회사 엘지화학 | 금속 페이스트 및 열전 모듈 |
EP3408427A4 (en) | 2016-01-29 | 2019-11-06 | Hewlett-Packard Development Company, L.P. | ARTICLES BASED ON PARTICLES WITH METALLIC CONNECTIONS |
US20170283629A1 (en) * | 2016-03-29 | 2017-10-05 | University Of North Texas | Metal-based ink for additive manufacturing process |
JP6796448B2 (ja) * | 2016-10-20 | 2020-12-09 | Dowaエレクトロニクス株式会社 | 導電性ペーストおよびその製造方法、ならびに太陽電池セル |
JP7222346B2 (ja) * | 2017-03-15 | 2023-02-15 | 株式会社レゾナック | 接合用金属ペースト、接合体及びその製造方法、並びに半導体装置及びその製造方法 |
WO2019093119A1 (ja) * | 2017-11-13 | 2019-05-16 | 京セラ株式会社 | ペースト組成物、半導体装置及び電気・電子部品 |
CN110294965A (zh) * | 2018-03-21 | 2019-10-01 | Tcl集团股份有限公司 | 墨水及其制备方法 |
US11515281B2 (en) * | 2019-04-22 | 2022-11-29 | Panasonic Holdings Corporation | Bonded structure and bonding material |
CN110967889A (zh) * | 2019-12-23 | 2020-04-07 | Tcl华星光电技术有限公司 | 显示面板 |
JP7561698B2 (ja) * | 2021-06-18 | 2024-10-04 | スタンレー電気株式会社 | 車載用灯具 |
WO2024111095A1 (ja) * | 2022-11-24 | 2024-05-30 | 花王株式会社 | 接合用組成物、及び接合体の製造方法 |
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CA2426861C (en) * | 2000-10-25 | 2008-10-28 | Yorishige Matsuba | Conductive metal paste |
JP4205393B2 (ja) | 2002-09-26 | 2009-01-07 | ハリマ化成株式会社 | 微細配線パターンの形成方法 |
JP4414145B2 (ja) * | 2003-03-06 | 2010-02-10 | ハリマ化成株式会社 | 導電性ナノ粒子ペースト |
JP2005026081A (ja) | 2003-07-02 | 2005-01-27 | Nippon Paint Co Ltd | 導電性金属ペースト、導電性ペースト用添加剤、及び、導電性構造物 |
US9006296B2 (en) | 2003-09-12 | 2015-04-14 | Harima Chemicals, Inc. | Metal nanoparticle dispersion usable for ejection in the form of fine droplets to be applied in the layered shape |
JP4246134B2 (ja) * | 2003-10-07 | 2009-04-02 | パナソニック株式会社 | 半導体素子の実装方法、及び半導体素子実装基板 |
JP5164239B2 (ja) * | 2006-09-26 | 2013-03-21 | Dowaエレクトロニクス株式会社 | 銀粒子粉末、その分散液および銀焼成膜の製造法 |
JP2008150630A (ja) | 2006-12-14 | 2008-07-03 | National Institute For Materials Science | 微粒子コロイド製造方法とそれを実施するための装置 |
JP2009068053A (ja) * | 2007-09-11 | 2009-04-02 | Dowa Electronics Materials Co Ltd | 銀粒子の製造方法および銀粒子分散液 |
JP2009097074A (ja) * | 2007-09-27 | 2009-05-07 | Mitsuboshi Belting Ltd | 金属ナノ粒子ペーストおよびパターン形成方法 |
JP2010095789A (ja) * | 2007-12-26 | 2010-04-30 | Dowa Electronics Materials Co Ltd | 金属粒子分散液、塗膜、金属膜および導電ペースト並びに金属膜の製造方法 |
JP5399110B2 (ja) * | 2008-04-23 | 2014-01-29 | トヨタ自動車株式会社 | 接合材料及び接合材料の成分算出方法 |
JP5301385B2 (ja) * | 2008-10-29 | 2013-09-25 | ニホンハンダ株式会社 | 金属製部材用接合剤、金属製部材接合体の製造方法、金属製部材接合体および電気回路接続用バンプの製造方法 |
JP5176893B2 (ja) * | 2008-11-18 | 2013-04-03 | 日立金属株式会社 | はんだボール |
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2010
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- 2011-06-02 US US13/704,581 patent/US20130265735A1/en not_active Abandoned
- 2011-06-02 KR KR1020127032833A patent/KR101867978B1/ko active IP Right Grant
- 2011-06-02 WO PCT/JP2011/062687 patent/WO2011158659A1/ja active Application Filing
- 2011-06-10 TW TW100120378A patent/TWI516556B/zh active
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KR101867978B1 (ko) | 2018-06-15 |
JP5811314B2 (ja) | 2015-11-11 |
TW201207055A (en) | 2012-02-16 |
US20130265735A1 (en) | 2013-10-10 |
WO2011158659A1 (ja) | 2011-12-22 |
CN103003891A (zh) | 2013-03-27 |
CN103003891B (zh) | 2015-06-24 |
KR20130107207A (ko) | 2013-10-01 |
JP2012023014A (ja) | 2012-02-02 |
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