TWI503425B - 電子機器用銅合金，電子機器用銅合金之製造方法以及電子機器用銅合金軋製材 - Google Patents
電子機器用銅合金，電子機器用銅合金之製造方法以及電子機器用銅合金軋製材 Download PDFInfo
- Publication number
- TWI503425B TWI503425B TW100116852A TW100116852A TWI503425B TW I503425 B TWI503425 B TW I503425B TW 100116852 A TW100116852 A TW 100116852A TW 100116852 A TW100116852 A TW 100116852A TW I503425 B TWI503425 B TW I503425B
- Authority
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- Prior art keywords
- copper alloy
- electronic device
- less
- copper
- atom
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- 229910000881 Cu alloy Inorganic materials 0.000 title claims description 85
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 229910000765 intermetallic Inorganic materials 0.000 claims description 47
- 238000010438 heat treatment Methods 0.000 claims description 43
- 239000000463 material Substances 0.000 claims description 42
- 239000010949 copper Substances 0.000 claims description 28
- 238000012545 processing Methods 0.000 claims description 28
- 239000002245 particle Substances 0.000 claims description 26
- 229910052802 copper Inorganic materials 0.000 claims description 22
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 16
- 238000010791 quenching Methods 0.000 claims description 14
- 230000000171 quenching effect Effects 0.000 claims description 14
- 229910052698 phosphorus Inorganic materials 0.000 claims description 12
- 229910052796 boron Inorganic materials 0.000 claims description 11
- 229910052804 chromium Inorganic materials 0.000 claims description 11
- 229910052742 iron Inorganic materials 0.000 claims description 11
- 229910052748 manganese Inorganic materials 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 229910052718 tin Inorganic materials 0.000 claims description 11
- 229910052725 zinc Inorganic materials 0.000 claims description 11
- 229910052726 zirconium Inorganic materials 0.000 claims description 11
- 239000012535 impurity Substances 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 238000005096 rolling process Methods 0.000 claims description 9
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 description 19
- 239000000956 alloy Substances 0.000 description 19
- 229910052749 magnesium Inorganic materials 0.000 description 16
- 229910052782 aluminium Inorganic materials 0.000 description 15
- 239000006104 solid solution Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- 238000011156 evaluation Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 239000012071 phase Substances 0.000 description 10
- 238000001556 precipitation Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 7
- 229910017532 Cu-Be Inorganic materials 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000005482 strain hardening Methods 0.000 description 5
- 238000000137 annealing Methods 0.000 description 4
- 238000001953 recrystallisation Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
- 238000005097 cold rolling Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910001096 P alloy Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000009749 continuous casting Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 238000005242 forging Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000004881 precipitation hardening Methods 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 238000005204 segregation Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000005491 wire drawing Methods 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910017876 Cu—Ni—Si Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- UREBDLICKHMUKA-CXSFZGCWSA-N dexamethasone Chemical compound C1CC2=CC(=O)C=C[C@]2(C)[C@]2(F)[C@@H]1[C@@H]1C[C@@H](C)[C@@](C(=O)CO)(O)[C@@]1(C)C[C@@H]2O UREBDLICKHMUKA-CXSFZGCWSA-N 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 238000009864 tensile test Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C9/00—Alloys based on copper
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/02—Making non-ferrous alloys by melting
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C9/00—Alloys based on copper
- C22C9/01—Alloys based on copper with aluminium as the next major constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C9/00—Alloys based on copper
- C22C9/04—Alloys based on copper with zinc as the next major constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/08—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
- H01B1/026—Alloys based on copper
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/03—Contact members characterised by the material, e.g. plating, or coating materials
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Conductive Materials (AREA)
- Non-Insulated Conductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010112267A JP5045784B2 (ja) | 2010-05-14 | 2010-05-14 | 電子機器用銅合金、電子機器用銅合金の製造方法及び電子機器用銅合金圧延材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201213562A TW201213562A (en) | 2012-04-01 |
| TWI503425B true TWI503425B (zh) | 2015-10-11 |
Family
ID=44914480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100116852A TWI503425B (zh) | 2010-05-14 | 2011-05-13 | 電子機器用銅合金，電子機器用銅合金之製造方法以及電子機器用銅合金軋製材 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20130056116A1 (enExample) |
| EP (1) | EP2570505B1 (enExample) |
| JP (1) | JP5045784B2 (enExample) |
| KR (1) | KR101477884B1 (enExample) |
| CN (1) | CN102892908B (enExample) |
| TW (1) | TWI503425B (enExample) |
| WO (1) | WO2011142428A1 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5712585B2 (ja) * | 2010-12-03 | 2015-05-07 | 三菱マテリアル株式会社 | 電子機器用銅合金、電子機器用銅合金の製造方法及び電子機器用銅合金圧延材 |
| JP6248389B2 (ja) * | 2012-12-05 | 2017-12-20 | 三菱マテリアル株式会社 | 電子・電気機器用銅合金、電子・電気機器用部品及び端子 |
| JP6248386B2 (ja) * | 2012-12-05 | 2017-12-20 | 三菱マテリアル株式会社 | 電子・電気機器用銅合金、電子・電気機器用部品及び端子 |
| JP6248387B2 (ja) * | 2012-12-05 | 2017-12-20 | 三菱マテリアル株式会社 | 電子・電気機器用銅合金、電子・電気機器用部品及び端子 |
| JP6248388B2 (ja) * | 2012-12-05 | 2017-12-20 | 三菱マテリアル株式会社 | 電子・電気機器用銅合金、電子・電気機器用部品及び端子 |
| JP5962707B2 (ja) * | 2013-07-31 | 2016-08-03 | 三菱マテリアル株式会社 | 電子・電気機器用銅合金、電子・電気機器用銅合金塑性加工材、電子・電気機器用銅合金塑性加工材の製造方法、電子・電気機器用部品及び端子 |
| JP5668814B1 (ja) * | 2013-08-12 | 2015-02-12 | 三菱マテリアル株式会社 | 電子・電気機器用銅合金、電子・電気機器用銅合金薄板、電子・電気機器用部品、端子およびバスバー |
| JP5983589B2 (ja) | 2013-12-11 | 2016-08-31 | 三菱マテリアル株式会社 | 電子・電気機器用銅合金圧延材、電子・電気機器用部品及び端子 |
| CN103695704A (zh) * | 2013-12-26 | 2014-04-02 | 青岛友铭辰生物技术有限公司 | 一种电气电子设备用耐疲劳铜合金材料及其制备方法 |
| CN104051080B (zh) * | 2014-07-03 | 2016-06-15 | 深圳市凯中和东新材料有限公司 | 绝缘性导线的制备方法 |
| CN104100950B (zh) * | 2014-08-05 | 2017-01-18 | 东莞市闻誉实业有限公司 | 组装式的散热器 |
| CN106834787A (zh) * | 2015-12-03 | 2017-06-13 | 黄波 | 一种Gu-Pm-Au-B合金导线及其制备方法 |
| CN106834788A (zh) * | 2015-12-03 | 2017-06-13 | 黄波 | 一种含钐元素抗拉伸铜合金导线及其制备方法 |
| CN106834785A (zh) * | 2015-12-03 | 2017-06-13 | 黄波 | 一种Gu-Nd-Au-B合金导线及其制备方法 |
| CN106834790A (zh) * | 2015-12-03 | 2017-06-13 | 黄波 | 一种Gu-Gd-Au-B合金导线及其制备方法 |
| CN106834789A (zh) * | 2015-12-03 | 2017-06-13 | 黄波 | 一种Gu-Ce-Au-B合金导线及其制备方法 |
| CN105463237B (zh) * | 2015-12-05 | 2017-12-01 | 烟台一诺电子材料有限公司 | 一种铜银合金键合丝及其制备方法 |
| CN105506349A (zh) * | 2015-12-22 | 2016-04-20 | 江苏艾克斯展示器材有限公司 | 展示架 |
| CN105506366A (zh) * | 2015-12-24 | 2016-04-20 | 常熟市易安达电器有限公司 | 矿用扇形喷雾杆 |
| CN105506354A (zh) * | 2015-12-25 | 2016-04-20 | 苏州露宇电子科技有限公司 | 核磁共振成像装置 |
| CN105568043A (zh) * | 2016-02-03 | 2016-05-11 | 安徽华联电缆集团有限公司 | 一种钪合金高性能电缆 |
| US11203806B2 (en) | 2016-03-30 | 2021-12-21 | Mitsubishi Materials Corporation | Copper alloy for electronic and electrical equipment, copper alloy plate strip for electronic and electrical equipment, component for electronic and electrical equipment, terminal, busbar, and movable piece for relay |
| US11319615B2 (en) | 2016-03-30 | 2022-05-03 | Mitsubishi Materials Corporation | Copper alloy for electronic and electrical equipment, copper alloy plate strip for electronic and electrical equipment, component for electronic and electrical equipment, terminal, busbar, and movable piece for relay |
| CN106222482A (zh) * | 2016-08-29 | 2016-12-14 | 芜湖楚江合金铜材有限公司 | 一种抗拉性能良好的高强度铜线及其制备方法 |
| CN110446795B (zh) * | 2017-03-24 | 2021-06-04 | 株式会社Ihi | 耐磨耗性铜锌合金以及使用其的机械装置 |
| EP3778941A4 (en) | 2018-03-30 | 2021-11-24 | Mitsubishi Materials Corporation | COPPER ALLOY FOR ELECTRONIC / ELECTRIC DEVICE, SHEET / STRIP MATERIAL COPPER ALLOY FOR ELECTRONIC / ELECTRIC DEVICE, ELECTRONIC / ELECTRIC DEVICE COMPONENT, TERMINAL AND OMNIBUS BAR |
| JP6780187B2 (ja) | 2018-03-30 | 2020-11-04 | 三菱マテリアル株式会社 | 電子・電気機器用銅合金、電子・電気機器用銅合金板条材、電子・電気機器用部品、端子、及び、バスバー |
| CN112593115A (zh) * | 2020-12-21 | 2021-04-02 | 杭州昶海电力科技有限公司 | 一种高压开关触片加工工艺 |
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| JP2010053445A (ja) * | 2008-08-01 | 2010-03-11 | Mitsubishi Materials Corp | フラットパネルディスプレイ用配線膜形成用スパッタリングターゲット |
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| JPS5675541A (en) * | 1979-11-22 | 1981-06-22 | Sumitomo Light Metal Ind Ltd | Copper alloy for water or hot water supply piping material and heat exchanger tube material |
| JPS62227051A (ja) | 1986-03-28 | 1987-10-06 | Mitsubishi Shindo Kk | Ｃｕ合金製電気機器用コネクタ |
| JPH04268033A (ja) | 1991-02-21 | 1992-09-24 | Ngk Insulators Ltd | ベリリウム銅合金の製造方法 |
| JPH059619A (ja) * | 1991-07-08 | 1993-01-19 | Furukawa Electric Co Ltd:The | 高力銅合金の製造方法 |
| JP3796784B2 (ja) * | 1995-12-01 | 2006-07-12 | 三菱伸銅株式会社 | コネクタ製造用銅合金薄板およびその薄板で製造したコネクタ |
| JP3465541B2 (ja) | 1997-07-16 | 2003-11-10 | 日立電線株式会社 | リードフレーム材の製造方法 |
| CN1062608C (zh) * | 1998-02-13 | 2001-02-28 | 北京有色金属研究总院 | 一种用于冷阴极材料的铜合金及其制法 |
| SE525460C2 (sv) * | 2002-02-28 | 2005-02-22 | Sandvik Ab | Användning av en kopparlegering i uppkolande miljöer |
| JP4787986B2 (ja) * | 2002-11-25 | 2011-10-05 | Ｄｏｗａメタルテック株式会社 | 銅合金およびその製造方法 |
| US8715431B2 (en) * | 2004-08-17 | 2014-05-06 | Kobe Steel, Ltd. | Copper alloy plate for electric and electronic parts having bending workability |
| US7628873B2 (en) * | 2005-09-09 | 2009-12-08 | Ngk Insulators, Ltd. | Beryllium copper alloy and method of manufacturing beryllium copper alloy |
| CN100462458C (zh) * | 2006-10-30 | 2009-02-18 | 西安交通大学 | 熔体快淬铜铬钛锆钴触头材料 |
| CN101646792B (zh) * | 2007-03-30 | 2012-02-22 | Jx日矿日石金属株式会社 | 电子材料用Cu-Ni-Si系合金 |
| CN101952465B (zh) * | 2008-01-31 | 2012-09-19 | 古河电气工业株式会社 | 电气电子零件用铜合金材料及其制造方法 |
| JP5260992B2 (ja) * | 2008-03-19 | 2013-08-14 | Ｄｏｗａメタルテック株式会社 | 銅合金板材およびその製造方法 |
| CN101487091A (zh) * | 2009-02-25 | 2009-07-22 | 中南大学 | 一种无铅易切削镁硅黄铜 |
| JP5712585B2 (ja) * | 2010-12-03 | 2015-05-07 | 三菱マテリアル株式会社 | 電子機器用銅合金、電子機器用銅合金の製造方法及び電子機器用銅合金圧延材 |
| JP5903842B2 (ja) * | 2011-11-14 | 2016-04-13 | 三菱マテリアル株式会社 | 銅合金、銅合金塑性加工材及び銅合金塑性加工材の製造方法 |
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2010
- 2010-05-14 JP JP2010112267A patent/JP5045784B2/ja active Active
-
2011
- 2011-05-12 CN CN201180023685.6A patent/CN102892908B/zh active Active
- 2011-05-12 EP EP11780685.1A patent/EP2570505B1/en active Active
- 2011-05-12 WO PCT/JP2011/060962 patent/WO2011142428A1/ja not_active Ceased
- 2011-05-12 KR KR1020127030659A patent/KR101477884B1/ko active Active
- 2011-05-12 US US13/697,441 patent/US20130056116A1/en not_active Abandoned
- 2011-05-13 TW TW100116852A patent/TWI503425B/zh active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010053445A (ja) * | 2008-08-01 | 2010-03-11 | Mitsubishi Materials Corp | フラットパネルディスプレイ用配線膜形成用スパッタリングターゲット |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102892908A (zh) | 2013-01-23 |
| CN102892908B (zh) | 2015-07-01 |
| WO2011142428A1 (ja) | 2011-11-17 |
| JP2011241413A (ja) | 2011-12-01 |
| US20130056116A1 (en) | 2013-03-07 |
| EP2570505B1 (en) | 2016-12-28 |
| TW201213562A (en) | 2012-04-01 |
| EP2570505A4 (en) | 2014-08-06 |
| KR20130010018A (ko) | 2013-01-24 |
| EP2570505A1 (en) | 2013-03-20 |
| JP5045784B2 (ja) | 2012-10-10 |
| KR101477884B1 (ko) | 2014-12-30 |
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