TWI476338B - 具有移動適配部分之用以耦接ｏ形環的狹縫化ｔｓｓｌ閥門 - Google Patents

具有移動適配部分之用以耦接ｏ形環的狹縫化ｔｓｓｌ閥門 Download PDF

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Publication number
TWI476338B
TWI476338B TW098129078A TW98129078A TWI476338B TW I476338 B TWI476338 B TW I476338B TW 098129078 A TW098129078 A TW 098129078A TW 98129078 A TW98129078 A TW 98129078A TW I476338 B TWI476338 B TW I476338B
Authority
TW
Taiwan
Prior art keywords
slit valve
chamber
slit
coupled
bellows
Prior art date
Application number
TW098129078A
Other languages
English (en)
Chinese (zh)
Other versions
TW201017016A (en
Inventor
德傑特米漢貝
栗田真一
懷特約翰Ｍ
安瓦蘇華
稻川真
Original Assignee
應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 應用材料股份有限公司 filed Critical 應用材料股份有限公司
Publication of TW201017016A publication Critical patent/TW201017016A/zh
Application granted granted Critical
Publication of TWI476338B publication Critical patent/TWI476338B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/24—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0441—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Gasket Seals (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Drying Of Semiconductors (AREA)
TW098129078A 2008-08-28 2009-08-28 具有移動適配部分之用以耦接ｏ形環的狹縫化ｔｓｓｌ閥門 TWI476338B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US9248008P 2008-08-28 2008-08-28

Publications (2)

Publication Number Publication Date
TW201017016A TW201017016A (en) 2010-05-01
TWI476338B true TWI476338B (zh) 2015-03-11

Family

ID=41722269

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098129078A TWI476338B (zh) 2008-08-28 2009-08-28 具有移動適配部分之用以耦接ｏ形環的狹縫化ｔｓｓｌ閥門

Country Status (6)

Country Link
US (2) US8567756B2 (https=)
JP (1) JP5528452B2 (https=)
KR (1) KR101650320B1 (https=)
CN (2) CN102138033B (https=)
TW (1) TWI476338B (https=)
WO (1) WO2010025257A2 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8567756B2 (en) 2008-08-28 2013-10-29 Applied Materials, Inc. Slit valve door able to compensate for chamber deflection
CN105336656B (zh) * 2014-06-18 2020-01-21 上海华力微电子有限公司 一种单晶圆承载腔室结构
US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
TW201823613A (zh) * 2016-08-22 2018-07-01 美商應用材料股份有限公司 具有可膨脹密封件之真空腔室
US10636629B2 (en) 2017-10-05 2020-04-28 Applied Materials, Inc. Split slit liner door
GB2573110A (en) * 2018-04-23 2019-10-30 Emerson & Renwick Ltd Load Lock
DE102019133555A1 (de) 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
KR20250119115A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR20250119108A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR102682885B1 (ko) * 2024-04-22 2024-07-09 주식회사 에이치앤이루자 로드락 챔버의 도어

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4052036A (en) * 1974-07-15 1977-10-04 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Sliding device for the gas-tight and air-tight closure of a container opening or of a conduit
JPS63254275A (ja) * 1987-04-10 1988-10-20 Irie Koken Kk 高真空用無しゆう動ゲ−トバルブ
US6601824B2 (en) * 2000-03-30 2003-08-05 Lam Research Corporation Single shaft, dual cradle vacuum slot valve
JP2006005348A (ja) * 2004-06-14 2006-01-05 Applied Materials Inc 湾曲したスリットバルブドア
US7086638B2 (en) * 2003-05-13 2006-08-08 Applied Materials, Inc. Methods and apparatus for sealing an opening of a processing chamber

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4381100A (en) * 1981-01-02 1983-04-26 Fairchild Industries, Inc. Valve and valving apparatus
JPS60136671A (ja) * 1983-12-26 1985-07-20 Fuji Seikou Kk ゲ−トバルブのシ−ル構造
JPS61124778A (ja) * 1984-11-21 1986-06-12 Fuji Seiko Kk 真空用バルブのシ−ル方法
JPH05215275A (ja) * 1992-02-03 1993-08-24 Ebara Corp 弁装置及び開閉装置における可動要素構造
JP2655576B2 (ja) * 1992-09-30 1997-09-24 信越半導体株式会社 単結晶引上装置におけるアイソレーションバルブ
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
US8648977B2 (en) * 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
US8206075B2 (en) * 2004-06-02 2012-06-26 Applied Materials, Inc. Methods and apparatus for sealing a chamber
US7497414B2 (en) * 2004-06-14 2009-03-03 Applied Materials, Inc. Curved slit valve door with flexible coupling
US7802772B2 (en) * 2005-12-20 2010-09-28 Vat Holding Ag Pendulum and slide gate vacuum valve
TWI388754B (zh) * 2006-06-16 2013-03-11 Vat Holding Ag 真空閥
US7822324B2 (en) * 2006-08-14 2010-10-26 Applied Materials, Inc. Load lock chamber with heater in tube
US8567756B2 (en) 2008-08-28 2013-10-29 Applied Materials, Inc. Slit valve door able to compensate for chamber deflection

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4052036A (en) * 1974-07-15 1977-10-04 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Sliding device for the gas-tight and air-tight closure of a container opening or of a conduit
JPS63254275A (ja) * 1987-04-10 1988-10-20 Irie Koken Kk 高真空用無しゆう動ゲ−トバルブ
US6601824B2 (en) * 2000-03-30 2003-08-05 Lam Research Corporation Single shaft, dual cradle vacuum slot valve
US7086638B2 (en) * 2003-05-13 2006-08-08 Applied Materials, Inc. Methods and apparatus for sealing an opening of a processing chamber
JP2006005348A (ja) * 2004-06-14 2006-01-05 Applied Materials Inc 湾曲したスリットバルブドア

Also Published As

Publication number Publication date
JP2012501424A (ja) 2012-01-19
CN102138033B (zh) 2015-05-20
TW201017016A (en) 2010-05-01
US8567756B2 (en) 2013-10-29
US20100050534A1 (en) 2010-03-04
KR101650320B1 (ko) 2016-08-23
CN103939628B (zh) 2016-05-18
KR20110069033A (ko) 2011-06-22
CN103939628A (zh) 2014-07-23
US10453718B2 (en) 2019-10-22
CN102138033A (zh) 2011-07-27
WO2010025257A2 (en) 2010-03-04
WO2010025257A3 (en) 2010-05-20
JP5528452B2 (ja) 2014-06-25
US20140023460A1 (en) 2014-01-23

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