CN102138033B - 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门 - Google Patents

具有移动适配部分的用以耦接o形环的狭缝化tssl阀门 Download PDF

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Publication number
CN102138033B
CN102138033B CN200980134015.4A CN200980134015A CN102138033B CN 102138033 B CN102138033 B CN 102138033B CN 200980134015 A CN200980134015 A CN 200980134015A CN 102138033 B CN102138033 B CN 102138033B
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CN
China
Prior art keywords
chamber
slit valve
slit
coupled
bellows
Prior art date
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CN200980134015.4A
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English (en)
Chinese (zh)
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CN102138033A (zh
Inventor
梅兰·贝德亚特
栗田真一
约翰·M·怀特
苏希尔·安瓦尔
稻川真
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Applied Materials Inc
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Applied Materials Inc
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Priority to CN201410128270.0A priority Critical patent/CN103939628B/zh
Publication of CN102138033A publication Critical patent/CN102138033A/zh
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Publication of CN102138033B publication Critical patent/CN102138033B/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/24—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0441—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Gasket Seals (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Drying Of Semiconductors (AREA)
CN200980134015.4A 2008-08-28 2009-08-27 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门 Active CN102138033B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410128270.0A CN103939628B (zh) 2008-08-28 2009-08-27 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US9248008P 2008-08-28 2008-08-28
US61/092,480 2008-08-28
PCT/US2009/055206 WO2010025257A2 (en) 2008-08-28 2009-08-27 Slotted tssl door to couple o-ring with moving mating part

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201410128270.0A Division CN103939628B (zh) 2008-08-28 2009-08-27 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门

Publications (2)

Publication Number Publication Date
CN102138033A CN102138033A (zh) 2011-07-27
CN102138033B true CN102138033B (zh) 2015-05-20

Family

ID=41722269

Family Applications (2)

Application Number Title Priority Date Filing Date
CN200980134015.4A Active CN102138033B (zh) 2008-08-28 2009-08-27 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门
CN201410128270.0A Active CN103939628B (zh) 2008-08-28 2009-08-27 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201410128270.0A Active CN103939628B (zh) 2008-08-28 2009-08-27 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门

Country Status (6)

Country Link
US (2) US8567756B2 (https=)
JP (1) JP5528452B2 (https=)
KR (1) KR101650320B1 (https=)
CN (2) CN102138033B (https=)
TW (1) TWI476338B (https=)
WO (1) WO2010025257A2 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8567756B2 (en) 2008-08-28 2013-10-29 Applied Materials, Inc. Slit valve door able to compensate for chamber deflection
CN105336656B (zh) * 2014-06-18 2020-01-21 上海华力微电子有限公司 一种单晶圆承载腔室结构
US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
TW201823613A (zh) * 2016-08-22 2018-07-01 美商應用材料股份有限公司 具有可膨脹密封件之真空腔室
US10636629B2 (en) 2017-10-05 2020-04-28 Applied Materials, Inc. Split slit liner door
GB2573110A (en) * 2018-04-23 2019-10-30 Emerson & Renwick Ltd Load Lock
DE102019133555A1 (de) 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
KR20250119115A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR20250119108A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR102682885B1 (ko) * 2024-04-22 2024-07-09 주식회사 에이치앤이루자 로드락 챔버의 도어

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4381100A (en) * 1981-01-02 1983-04-26 Fairchild Industries, Inc. Valve and valving apparatus
US5356113A (en) * 1992-09-30 1994-10-18 Shin-Etsu Handotai Co., Ltd. Isolation valve for single crystal pulling apparatus
CN1755175A (zh) * 2004-06-14 2006-04-05 应用材料股份有限公司 曲状狭缝阀门
CN1788175A (zh) * 2003-05-13 2006-06-14 应用材料股份有限公司 密封－处理室－开口的方法与装置

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
CH582842A5 (https=) * 1974-07-15 1976-12-15 Vat Ag
JPS60136671A (ja) * 1983-12-26 1985-07-20 Fuji Seikou Kk ゲ−トバルブのシ−ル構造
JPS61124778A (ja) * 1984-11-21 1986-06-12 Fuji Seiko Kk 真空用バルブのシ−ル方法
JPS63254275A (ja) * 1987-04-10 1988-10-20 Irie Koken Kk 高真空用無しゆう動ゲ−トバルブ
JPH05215275A (ja) * 1992-02-03 1993-08-24 Ebara Corp 弁装置及び開閉装置における可動要素構造
US6390448B1 (en) * 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
US8648977B2 (en) * 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
US8206075B2 (en) * 2004-06-02 2012-06-26 Applied Materials, Inc. Methods and apparatus for sealing a chamber
US7497414B2 (en) * 2004-06-14 2009-03-03 Applied Materials, Inc. Curved slit valve door with flexible coupling
US7802772B2 (en) * 2005-12-20 2010-09-28 Vat Holding Ag Pendulum and slide gate vacuum valve
TWI388754B (zh) * 2006-06-16 2013-03-11 Vat Holding Ag 真空閥
US7822324B2 (en) * 2006-08-14 2010-10-26 Applied Materials, Inc. Load lock chamber with heater in tube
US8567756B2 (en) 2008-08-28 2013-10-29 Applied Materials, Inc. Slit valve door able to compensate for chamber deflection

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4381100A (en) * 1981-01-02 1983-04-26 Fairchild Industries, Inc. Valve and valving apparatus
US5356113A (en) * 1992-09-30 1994-10-18 Shin-Etsu Handotai Co., Ltd. Isolation valve for single crystal pulling apparatus
CN1788175A (zh) * 2003-05-13 2006-06-14 应用材料股份有限公司 密封－处理室－开口的方法与装置
CN1755175A (zh) * 2004-06-14 2006-04-05 应用材料股份有限公司 曲状狭缝阀门

Also Published As

Publication number Publication date
JP2012501424A (ja) 2012-01-19
TWI476338B (zh) 2015-03-11
TW201017016A (en) 2010-05-01
US8567756B2 (en) 2013-10-29
US20100050534A1 (en) 2010-03-04
KR101650320B1 (ko) 2016-08-23
CN103939628B (zh) 2016-05-18
KR20110069033A (ko) 2011-06-22
CN103939628A (zh) 2014-07-23
US10453718B2 (en) 2019-10-22
CN102138033A (zh) 2011-07-27
WO2010025257A2 (en) 2010-03-04
WO2010025257A3 (en) 2010-05-20
JP5528452B2 (ja) 2014-06-25
US20140023460A1 (en) 2014-01-23

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Applicant after: Applied Materials Inc.

Address before: American California

Applicant before: Applied Materials Inc.

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