KR101650320B1 - 오링을 이동하는 대응 부분에 커플링시키기 위한 슬롯이 형성된 ｔｓｓｌ 도어 - Google Patents

오링을 이동하는 대응 부분에 커플링시키기 위한 슬롯이 형성된 ｔｓｓｌ 도어 Download PDF

Info

Publication number
KR101650320B1
KR101650320B1 KR1020117007165A KR20117007165A KR101650320B1 KR 101650320 B1 KR101650320 B1 KR 101650320B1 KR 1020117007165 A KR1020117007165 A KR 1020117007165A KR 20117007165 A KR20117007165 A KR 20117007165A KR 101650320 B1 KR101650320 B1 KR 101650320B1
Authority
KR
South Korea
Prior art keywords
valve door
slit valve
coupled
chamber
load lock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020117007165A
Other languages
English (en)
Korean (ko)
Other versions
KR20110069033A (ko
Inventor
메란 베드자트
시니치 쿠리타
존 엠. 화이트
수하일 앤워
마코토 이나가와
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20110069033A publication Critical patent/KR20110069033A/ko
Application granted granted Critical
Publication of KR101650320B1 publication Critical patent/KR101650320B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/24—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0441—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Gasket Seals (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Drying Of Semiconductors (AREA)
KR1020117007165A 2008-08-28 2009-08-27 오링을 이동하는 대응 부분에 커플링시키기 위한 슬롯이 형성된 ｔｓｓｌ 도어 Active KR101650320B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9248008P 2008-08-28 2008-08-28
US61/092,480 2008-08-28

Publications (2)

Publication Number Publication Date
KR20110069033A KR20110069033A (ko) 2011-06-22
KR101650320B1 true KR101650320B1 (ko) 2016-08-23

Family

ID=41722269

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117007165A Active KR101650320B1 (ko) 2008-08-28 2009-08-27 오링을 이동하는 대응 부분에 커플링시키기 위한 슬롯이 형성된 ｔｓｓｌ 도어

Country Status (6)

Country Link
US (2) US8567756B2 (https=)
JP (1) JP5528452B2 (https=)
KR (1) KR101650320B1 (https=)
CN (2) CN102138033B (https=)
TW (1) TWI476338B (https=)
WO (1) WO2010025257A2 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8567756B2 (en) 2008-08-28 2013-10-29 Applied Materials, Inc. Slit valve door able to compensate for chamber deflection
CN105336656B (zh) * 2014-06-18 2020-01-21 上海华力微电子有限公司 一种单晶圆承载腔室结构
US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
TW201823613A (zh) * 2016-08-22 2018-07-01 美商應用材料股份有限公司 具有可膨脹密封件之真空腔室
US10636629B2 (en) 2017-10-05 2020-04-28 Applied Materials, Inc. Split slit liner door
GB2573110A (en) * 2018-04-23 2019-10-30 Emerson & Renwick Ltd Load Lock
DE102019133555A1 (de) 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
KR20250119115A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR20250119108A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR102682885B1 (ko) * 2024-04-22 2024-07-09 주식회사 에이치앤이루자 로드락 챔버의 도어

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006005348A (ja) * 2004-06-14 2006-01-05 Applied Materials Inc 湾曲したスリットバルブドア

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH582842A5 (https=) * 1974-07-15 1976-12-15 Vat Ag
US4381100A (en) * 1981-01-02 1983-04-26 Fairchild Industries, Inc. Valve and valving apparatus
JPS60136671A (ja) * 1983-12-26 1985-07-20 Fuji Seikou Kk ゲ−トバルブのシ−ル構造
JPS61124778A (ja) * 1984-11-21 1986-06-12 Fuji Seiko Kk 真空用バルブのシ−ル方法
JPS63254275A (ja) * 1987-04-10 1988-10-20 Irie Koken Kk 高真空用無しゆう動ゲ−トバルブ
JPH05215275A (ja) * 1992-02-03 1993-08-24 Ebara Corp 弁装置及び開閉装置における可動要素構造
JP2655576B2 (ja) * 1992-09-30 1997-09-24 信越半導体株式会社 単結晶引上装置におけるアイソレーションバルブ
US6390448B1 (en) * 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
KR100914087B1 (ko) 2003-05-13 2009-08-27 어플라이드 머티어리얼스, 인코포레이티드 처리 챔버의 개구를 밀봉하기 위한 방법 및 장치
US8648977B2 (en) * 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
US8206075B2 (en) * 2004-06-02 2012-06-26 Applied Materials, Inc. Methods and apparatus for sealing a chamber
US7497414B2 (en) * 2004-06-14 2009-03-03 Applied Materials, Inc. Curved slit valve door with flexible coupling
US7802772B2 (en) * 2005-12-20 2010-09-28 Vat Holding Ag Pendulum and slide gate vacuum valve
TWI388754B (zh) * 2006-06-16 2013-03-11 Vat Holding Ag 真空閥
US7822324B2 (en) * 2006-08-14 2010-10-26 Applied Materials, Inc. Load lock chamber with heater in tube
US8567756B2 (en) 2008-08-28 2013-10-29 Applied Materials, Inc. Slit valve door able to compensate for chamber deflection

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006005348A (ja) * 2004-06-14 2006-01-05 Applied Materials Inc 湾曲したスリットバルブドア

Also Published As

Publication number Publication date
JP2012501424A (ja) 2012-01-19
CN102138033B (zh) 2015-05-20
TWI476338B (zh) 2015-03-11
TW201017016A (en) 2010-05-01
US8567756B2 (en) 2013-10-29
US20100050534A1 (en) 2010-03-04
CN103939628B (zh) 2016-05-18
KR20110069033A (ko) 2011-06-22
CN103939628A (zh) 2014-07-23
US10453718B2 (en) 2019-10-22
CN102138033A (zh) 2011-07-27
WO2010025257A2 (en) 2010-03-04
WO2010025257A3 (en) 2010-05-20
JP5528452B2 (ja) 2014-06-25
US20140023460A1 (en) 2014-01-23

Similar Documents

Publication Publication Date Title
KR101650320B1 (ko) 오링을 이동하는 대응 부분에 커플링시키기 위한 슬롯이 형성된 ｔｓｓｌ 도어
CN100383918C (zh) 门阀装置、处理系统及密封部件的更换方法
US7282097B2 (en) Slit valve door seal
US7575220B2 (en) Curved slit valve door
US6308932B1 (en) Isolation valves
US20040149214A1 (en) Vacuum processing apparatus
US9383036B2 (en) Bonded slit valve door seal with thin non-metallic film gap control bumper
KR102164625B1 (ko) 진공 챔버를 위한 도어 시일
US20030129044A1 (en) Erosion resistant slit valve
CN102138199B (zh) 狭缝阀门的控制
KR20180002250U (ko) 슬릿 밸브 도어들을 구비한 로드 락 챔버
US7497414B2 (en) Curved slit valve door with flexible coupling
US4861563A (en) Vacuum load lock
US7845618B2 (en) Valve door with ball coupling
US7642523B1 (en) Vacuum chamber stage with application of vacuum from below
JP2010135536A (ja) ロードロック装置および真空処理システム
CN101794709A (zh) 真空装置和基板处理装置
CN1789485B (zh) 为室门提供浮动密封的方法和装置
US9558975B2 (en) System and method for transferring articles between vacuum and non-vacuum environments
WO1994018695A1 (fr) Appareil de traitement thermique
JPH11241155A (ja) シール部材および真空装置
JP6405067B1 (ja) ゲートバルブの制御方法

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

X091 Application refused [patent]
AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PX0901 Re-examination

St.27 status event code: A-2-3-E10-E12-rex-PX0901

PX0701 Decision of registration after re-examination

St.27 status event code: A-3-4-F10-F13-rex-PX0701

X701 Decision to grant (after re-examination)
GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20190801

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20200803

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20210723

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20220722

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 10