TWI456853B - 雷射振盪器及雷射放大器 - Google Patents

雷射振盪器及雷射放大器 Download PDF

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Publication number
TWI456853B
TWI456853B TW099131409A TW99131409A TWI456853B TW I456853 B TWI456853 B TW I456853B TW 099131409 A TW099131409 A TW 099131409A TW 99131409 A TW99131409 A TW 99131409A TW I456853 B TWI456853 B TW I456853B
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TW
Taiwan
Prior art keywords
mirror
orthogonal
laser
light
optical axis
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TW099131409A
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English (en)
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TW201130195A (en
Inventor
Shuichi Fujikawa
Junichi Nishimae
Tatsuya Yamamoto
Yoichi Tanino
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Mitsubishi Electric Corp
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Publication of TW201130195A publication Critical patent/TW201130195A/zh
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Publication of TWI456853B publication Critical patent/TWI456853B/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08018—Mode suppression
    • H01S3/08022—Longitudinal modes
    • H01S3/08031—Single-mode emission
    • H01S3/08036—Single-mode emission using intracavity dispersive, polarising or birefringent elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08054—Passive cavity elements acting on the polarization, e.g. a polarizer for branching or walk-off compensation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Claims (5)

  1. 一種正交型氣體雷射振盪器，係具備有：往返型光共振器，具有反射鏡及輸出鏡；雷射介質，設於光共振器內，用以放大光線；以及偏光選擇元件，設於光共振器內，用以將振盪光控制為直線偏光，其中，反射鏡係二個反射面正交的正交型鏡；偏光選擇元件係配置成使振盪光的偏光方向成為平行於設定在正交於光共振器之光軸的面內的基準軸；正交型鏡係配置成使振盪光的偏光方向成為平行於正交型鏡的谷線；雷射氣體流的方向係設定為垂直於光共振器的光軸的第一方向，並且，放電方向係設定為垂直於光軸及第一方向的第二方向；前述基準軸係設定成相對於放電方向以45度的角度交叉。
  2. 一種正交型氣體雷射振盪器，係具備有：往返型光共振器，具有反射鏡及輸出鏡；雷射介質，設於光共振器內，用以放大光線；以及偏光選擇元件，設於光共振器內，用以將振盪光控制為直線偏光，其中，反射鏡係二個反射面正交的正交型鏡；偏光選擇元件係配置成使振盪光的偏光方向成為垂直於設定在正交於光共振器之光軸的面內的基準軸； 正交型鏡係配置成使振盪光的偏光方向成為垂直於正交型鏡的谷線；雷射氣體流的方向係設定為垂直於光共振器的光軸的第一方向，並且，放電方向係設定為垂直於光軸及第一方向的第二方向；前述基準軸係設定成相對於放電方向以45度的角度交叉。
  3. 一種正交型氣體雷射振盪器，係具備有：往返型光共振器，具有反射鏡及輸出鏡；雷射介質，設於光共振器內，用以放大光線；以及偏光選擇元件，設於光共振器內，用以將振盪光控制為直線偏光，其中，反射鏡係二個反射面正交的正交型鏡；偏光選擇元件係配置成使振盪光的偏光方向成為平行於設定在正交於光共振器之光軸的面內的基準軸；於正交型鏡的各反射面，係施加有反射膜，該膜令P偏光及S偏光之間產生四分之一波長份的相位差；雷射氣體流的方向係設定為垂直於光共振器的光軸的第一方向，並且，放電方向係設定為垂直於光軸及第一方向的第二方向；前述基準軸係設定成相對於放電方向以45度的角度交叉。
  4. 一種雷射放大器，係具備有：折返鏡，係用以將沿著預定的光軸前進的直線偏光 的雷射光沿著相同的光軸予以反射；以及雷射介質，係用以放大沿著光軸前進的雷射光；並且折返鏡係二個反射面正交之正交型鏡；正交型鏡係配置成使正交型鏡的谷線成為平行於設定在正交於前述光軸的面內之基準軸，並使雷射光的偏光方向相對於正交型鏡的谷線呈45度。
  5. 如申請專利範圍第4項所述之雷射放大器，係一種正交型氣體雷射放大器，其中，將雷射氣體流的方向設定於垂直於雷射光的光軸的第一方向，並將放電方向設定於垂直於光軸及第一方向的第二方向；並且前述基準軸係設定成相對於放電方向以45度的角度交叉。
TW099131409A 2009-09-30 2010-09-16 雷射振盪器及雷射放大器 TWI456853B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009227375 2009-09-30

Publications (2)

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TW201130195A TW201130195A (en) 2011-09-01
TWI456853B true TWI456853B (zh) 2014-10-11

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US (1) US8958453B2 (zh)
JP (1) JP5220198B2 (zh)
KR (1) KR101347477B1 (zh)
CN (1) CN102549855B (zh)
DE (1) DE112010003879B4 (zh)
TW (1) TWI456853B (zh)
WO (1) WO2011040264A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012253092A (ja) * 2011-05-31 2012-12-20 Mitsubishi Electric Corp 固体レーザ発振器
JP2016136167A (ja) * 2013-05-21 2016-07-28 三菱電機株式会社 赤外光学膜、円偏光ミラー、円偏光ミラーを備えたレーザ加工機、および赤外光学膜の製造方法
JPWO2017029729A1 (ja) 2015-08-19 2018-05-31 ギガフォトン株式会社 レーザ装置
KR102226980B1 (ko) * 2016-12-14 2021-03-11 미쓰비시덴키 가부시키가이샤 레이저 발진기 및 레이저 가공 장치
JPWO2019163335A1 (ja) * 2018-02-26 2021-03-18 パナソニックＩｐマネジメント株式会社 光共振器及びレーザ加工機
JP7076914B2 (ja) * 2018-12-17 2022-05-30 住友重機械工業株式会社 折返し光共振器
JP7262217B2 (ja) * 2018-12-17 2023-04-21 住友重機械工業株式会社 光共振器

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TW430581B (en) * 1998-10-12 2001-04-21 Mitsubishi Electric Corp Laser apparatus
TW200737625A (en) * 2005-11-01 2007-10-01 Cymer Inc Laser system
TW200931745A (en) * 2007-12-20 2009-07-16 Cymer Inc Drive laser for EUV light source

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TW430581B (en) * 1998-10-12 2001-04-21 Mitsubishi Electric Corp Laser apparatus
TW200737625A (en) * 2005-11-01 2007-10-01 Cymer Inc Laser system
TW200931745A (en) * 2007-12-20 2009-07-16 Cymer Inc Drive laser for EUV light source

Also Published As

Publication number Publication date
CN102549855A (zh) 2012-07-04
US8958453B2 (en) 2015-02-17
DE112010003879B4 (de) 2016-05-04
CN102549855B (zh) 2015-02-18
WO2011040264A1 (ja) 2011-04-07
TW201130195A (en) 2011-09-01
KR101347477B1 (ko) 2014-01-02
KR20120075465A (ko) 2012-07-06
JP5220198B2 (ja) 2013-06-26
US20120182604A1 (en) 2012-07-19
JPWO2011040264A1 (ja) 2013-02-28
DE112010003879T5 (de) 2013-01-03

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