TWI453184B

TWI453184B - 光起始劑混合物

光起始劑混合物 Download PDF

Info

Publication number: TWI453184B
Authority: TW; Taiwan
Prior art keywords: alkyl; phenyl; group; substituted; optionally
Prior art date: 2008-11-03

Application number

TW098137142A

Other languages

English (en)

Chinese (zh)

Other versions

TW201033161A (en

Inventor

Katia Studer

Sebastien Villeneuve

Akira Matsumoto

Hisatoshi Kura

Jan Sueltemeyer

Original Assignee

Basf Se

Priority date

2008-11-03

Filing date

2009-11-02

Publication date

2014-09-21

2009-11-02 Application filed by Basf Se filed Critical Basf Se

2010-09-16 Publication of TW201033161A publication Critical patent/TW201033161A/zh

2014-09-21 Application granted granted Critical

2014-09-21 Publication of TWI453184B publication Critical patent/TWI453184B/zh

Links

239000000203 mixture Substances 0.000 title claims description 282
-1 diphenylethylene Ketoketal Chemical compound 0.000 claims description 349
150000001875 compounds Chemical class 0.000 claims description 208
125000000217 alkyl group Chemical group 0.000 claims description 196
125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 189
NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 175
UUEVFMOUBSLVJW-UHFFFAOYSA-N oxo-[[1-[2-[2-[2-[4-(oxoazaniumylmethylidene)pyridin-1-yl]ethoxy]ethoxy]ethyl]pyridin-4-ylidene]methyl]azanium;dibromide Chemical group [Br-].[Br-].C1=CC(=C[NH+]=O)C=CN1CCOCCOCCN1C=CC(=C[NH+]=O)C=C1 UUEVFMOUBSLVJW-UHFFFAOYSA-N 0.000 claims description 108
239000000976 ink Substances 0.000 claims description 106
229910052736 halogen Inorganic materials 0.000 claims description 102
150000002367 halogens Chemical group 0.000 claims description 101
239000000049 pigment Substances 0.000 claims description 90
238000007639 printing Methods 0.000 claims description 82
239000001257 hydrogen Substances 0.000 claims description 72
229910052739 hydrogen Inorganic materials 0.000 claims description 72
238000000576 coating method Methods 0.000 claims description 60
150000002431 hydrogen Chemical class 0.000 claims description 54
229910052760 oxygen Inorganic materials 0.000 claims description 50
125000001624 naphthyl group Chemical group 0.000 claims description 45
238000004519 manufacturing process Methods 0.000 claims description 42
239000011248 coating agent Substances 0.000 claims description 40
239000000463 material Substances 0.000 claims description 40
239000000758 substrate Substances 0.000 claims description 38
238000000034 method Methods 0.000 claims description 36
239000000853 adhesive Substances 0.000 claims description 35
230000001070 adhesive effect Effects 0.000 claims description 35
125000000753 cycloalkyl group Chemical group 0.000 claims description 34
229920002120 photoresistant polymer Polymers 0.000 claims description 34
SNOOUWRIMMFWNE-UHFFFAOYSA-M sodium;6-[(3,4,5-trimethoxybenzoyl)amino]hexanoate Chemical compound [Na+].COC1=CC(C(=O)NCCCCCC([O-])=O)=CC(OC)=C1OC SNOOUWRIMMFWNE-UHFFFAOYSA-M 0.000 claims description 34
239000012965 benzophenone Substances 0.000 claims description 32
229910052717 sulfur Inorganic materials 0.000 claims description 32
125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 31
125000001072 heteroaryl group Chemical group 0.000 claims description 30
239000000654 additive Substances 0.000 claims description 29
ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 claims description 29
229910052740 iodine Inorganic materials 0.000 claims description 25
125000001424 substituent group Chemical group 0.000 claims description 25
125000004432 carbon atom Chemical group C* 0.000 claims description 24
239000002270 dispersing agent Substances 0.000 claims description 24
125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 24
229920005989 resin Polymers 0.000 claims description 24
239000011347 resin Substances 0.000 claims description 24
UHOVQNZJYSORNB-UHFFFAOYSA-N monobenzene Chemical group C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 22
229920000647 polyepoxide Polymers 0.000 claims description 21
125000003837 (C1-C20) alkyl group Chemical group 0.000 claims description 20
239000000843 powder Substances 0.000 claims description 20
125000004433 nitrogen atom Chemical group N* 0.000 claims description 19
125000004765 (C1-C4) haloalkyl group Chemical group 0.000 claims description 18
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 18
125000004642 (C1-C12) alkoxy group Chemical group 0.000 claims description 17
239000004305 biphenyl Substances 0.000 claims description 17
239000007795 chemical reaction product Substances 0.000 claims description 17
FAQJJMHZNSSFSM-UHFFFAOYSA-N phenylglyoxylic acid Chemical compound OC(=O)C(=O)C1=CC=CC=C1 FAQJJMHZNSSFSM-UHFFFAOYSA-N 0.000 claims description 17
125000003545 alkoxy group Chemical group 0.000 claims description 16
125000006710 (C2-C12) alkenyl group Chemical group 0.000 claims description 15
235000010290 biphenyl Nutrition 0.000 claims description 15
229920006395 saturated elastomer Polymers 0.000 claims description 15
229910052799 carbon Inorganic materials 0.000 claims description 12
125000004169 (C1-C6) alkyl group Chemical group 0.000 claims description 11
125000006755 (C2-C20) alkyl group Chemical group 0.000 claims description 11
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 11
125000004414 alkyl thio group Chemical group 0.000 claims description 11
230000003287 optical effect Effects 0.000 claims description 11
150000008065 acid anhydrides Chemical class 0.000 claims description 10
125000004453 alkoxycarbonyl group Chemical group 0.000 claims description 10
239000007788 liquid Substances 0.000 claims description 10
239000002966 varnish Substances 0.000 claims description 10
125000006832 (C1-C10) alkylene group Chemical group 0.000 claims description 9
125000006552 (C3-C8) cycloalkyl group Chemical group 0.000 claims description 9
125000002252 acyl group Chemical group 0.000 claims description 9
150000007519 polyprotic acids Polymers 0.000 claims description 9
125000004400 (C1-C12) alkyl group Chemical group 0.000 claims description 8
HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 8
238000010894 electron beam technology Methods 0.000 claims description 8
239000003822 epoxy resin Substances 0.000 claims description 8
125000000951 phenoxy group Chemical class [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 claims description 8
125000006678 phenoxycarbonyl group Chemical group 0.000 claims description 8
229910000679 solder Inorganic materials 0.000 claims description 8
239000004820 Pressure-sensitive adhesive Substances 0.000 claims description 7
150000001335 aliphatic alkanes Chemical group 0.000 claims description 7
150000001336 alkenes Chemical class 0.000 claims description 7
125000002947 alkylene group Chemical group 0.000 claims description 7
VQNIOZLNRYKVEF-UHFFFAOYSA-N decylphosphane Chemical compound CCCCCCCCCCP VQNIOZLNRYKVEF-UHFFFAOYSA-N 0.000 claims description 7
125000005842 heteroatom Chemical group 0.000 claims description 7
238000007650 screen-printing Methods 0.000 claims description 7
125000004641 (C1-C12) haloalkyl group Chemical group 0.000 claims description 6
125000006729 (C2-C5) alkenyl group Chemical group 0.000 claims description 6
XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 6
230000000996 additive effect Effects 0.000 claims description 6
125000003342 alkenyl group Chemical group 0.000 claims description 5
125000005427 anthranyl group Chemical group 0.000 claims description 5
125000000332 coumarinyl group Chemical group O1C(=O)C(=CC2=CC=CC=C12)* 0.000 claims description 5
125000004956 cyclohexylene group Chemical group 0.000 claims description 5
238000013500 data storage Methods 0.000 claims description 5
ZZVUWRFHKOJYTH-UHFFFAOYSA-N diphenhydramine Chemical group C=1C=CC=CC=1C(OCCN(C)C)C1=CC=CC=C1 ZZVUWRFHKOJYTH-UHFFFAOYSA-N 0.000 claims description 5
230000005670 electromagnetic radiation Effects 0.000 claims description 5
238000003384 imaging method Methods 0.000 claims description 5
125000003356 phenylsulfanyl group Chemical group [*]SC1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 claims description 5
125000000008 (C1-C10) alkyl group Chemical group 0.000 claims description 4
125000003860 C1-C20 alkoxy group Chemical group 0.000 claims description 4
125000004183 alkoxy alkyl group Chemical group 0.000 claims description 4
125000000649 benzylidene group Chemical group [H]C(=[*])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 claims description 4
239000011152 fibreglass Substances 0.000 claims description 4
NLGDWWCZQDIASO-UHFFFAOYSA-N 2-hydroxy-1-(7-oxabicyclo[4.1.0]hepta-1,3,5-trien-2-yl)-2-phenylethanone Chemical compound OC(C(=O)c1cccc2Oc12)c1ccccc1 NLGDWWCZQDIASO-UHFFFAOYSA-N 0.000 claims description 3
238000009825 accumulation Methods 0.000 claims description 3
125000000051 benzyloxy group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])O* 0.000 claims description 3
238000009713 electroplating Methods 0.000 claims description 3
230000001678 irradiating effect Effects 0.000 claims description 3
239000003094 microcapsule Substances 0.000 claims description 3
JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims description 3
125000005740 oxycarbonyl group Chemical group [*:1]OC([*:2])=O 0.000 claims description 3
229910000073 phosphorus hydride Inorganic materials 0.000 claims description 3
238000007747 plating Methods 0.000 claims description 3
125000006850 spacer group Chemical group 0.000 claims description 3
125000004209 (C1-C8) alkyl group Chemical group 0.000 claims description 2
125000006717 (C3-C10) cycloalkenyl group Chemical group 0.000 claims description 2
230000015572 biosynthetic process Effects 0.000 claims description 2
238000005530 etching Methods 0.000 claims description 2
125000005226 heteroaryloxycarbonyl group Chemical group 0.000 claims description 2
238000004377 microelectronic Methods 0.000 claims description 2
BUYIAIMTTAEIOB-UHFFFAOYSA-N oxo(phosphanylidyne)-lambda5-phosphane Chemical compound O=P#P BUYIAIMTTAEIOB-UHFFFAOYSA-N 0.000 claims description 2
239000003973 paint Substances 0.000 claims description 2
239000008247 solid mixture Substances 0.000 claims description 2
KOMDZQSPRDYARS-UHFFFAOYSA-N cyclopenta-1,3-diene titanium Chemical compound [Ti].C1C=CC=C1.C1C=CC=C1 KOMDZQSPRDYARS-UHFFFAOYSA-N 0.000 claims 1
150000002763 monocarboxylic acids Chemical class 0.000 claims 1
229920001577 copolymer Polymers 0.000 description 67
LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 63
229920000642 polymer Polymers 0.000 description 51
CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 46
PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 45
HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 44
239000010410 layer Substances 0.000 description 44
229920005862 polyol Polymers 0.000 description 37
239000002253 acid Substances 0.000 description 32
239000000178 monomer Substances 0.000 description 32
150000002148 esters Chemical class 0.000 description 30
239000002904 solvent Substances 0.000 description 30
125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 27
150000003077 polyols Chemical class 0.000 description 27
DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 26
RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 26
239000010408 film Substances 0.000 description 24
KEVMYFLMMDUPJE-UHFFFAOYSA-N 2,7-dimethyloctane Chemical group CC(C)CCCCC(C)C KEVMYFLMMDUPJE-UHFFFAOYSA-N 0.000 description 23
239000000975 dye Substances 0.000 description 23
CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 22
125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 22
PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 21
ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 19
RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 19
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 19
229920000728 polyester Polymers 0.000 description 19
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 19
239000002585 base Substances 0.000 description 18
238000002360 preparation method Methods 0.000 description 18
230000005855 radiation Effects 0.000 description 18
125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 17
238000001723 curing Methods 0.000 description 17
239000003960 organic solvent Substances 0.000 description 17
NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 16
238000009472 formulation Methods 0.000 description 16
VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 16
125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 15
239000006185 dispersion Substances 0.000 description 15
238000006116 polymerization reaction Methods 0.000 description 15
239000000047 product Substances 0.000 description 15
ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 14
PESYEWKSBIWTAK-UHFFFAOYSA-N cyclopenta-1,3-diene;titanium(2+) Chemical compound [Ti+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 PESYEWKSBIWTAK-UHFFFAOYSA-N 0.000 description 14
MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 14
239000000243 solution Substances 0.000 description 14
239000004094 surface-active agent Substances 0.000 description 14
SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 13
WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 13
150000001412 amines Chemical class 0.000 description 13
239000003795 chemical substances by application Substances 0.000 description 13
229910052751 metal Inorganic materials 0.000 description 13
239000002184 metal Substances 0.000 description 13
229920001223 polyethylene glycol Polymers 0.000 description 13
125000003700 epoxy group Chemical group 0.000 description 12
239000003999 initiator Substances 0.000 description 12
229910052757 nitrogen Inorganic materials 0.000 description 12
239000004814 polyurethane Substances 0.000 description 12
229920002635 polyurethane Polymers 0.000 description 12
239000000126 substance Substances 0.000 description 12
PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 11
CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 11
239000002202 Polyethylene glycol Substances 0.000 description 11
OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 11
QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 11
125000004386 diacrylate group Chemical group 0.000 description 11
239000011521 glass Substances 0.000 description 11
125000002768 hydroxyalkyl group Chemical group 0.000 description 11
VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 11
239000011976 maleic acid Substances 0.000 description 11
125000004430 oxygen atom Chemical group O* 0.000 description 11
QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 11
239000011342 resin composition Substances 0.000 description 11
239000007787 solid Substances 0.000 description 11
DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 10
OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 10
239000007983 Tris buffer Substances 0.000 description 10
150000001252 acrylic acid derivatives Chemical class 0.000 description 10
125000003118 aryl group Chemical group 0.000 description 10
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 10
WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 10
150000001735 carboxylic acids Chemical class 0.000 description 10
JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 10
238000010438 heat treatment Methods 0.000 description 10
239000001301 oxygen Substances 0.000 description 10
229920000768 polyamine Polymers 0.000 description 10
229960004063 propylene glycol Drugs 0.000 description 10
229920002554 vinyl polymer Polymers 0.000 description 10
125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 9
XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 9
WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 9
OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 9
KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
238000006243 chemical reaction Methods 0.000 description 9
239000003086 colorant Substances 0.000 description 9
125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 9
125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 9
239000004973 liquid crystal related substance Substances 0.000 description 9
239000011159 matrix material Substances 0.000 description 9
WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 9
150000003254 radicals Chemical class 0.000 description 9
125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 9
JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 8
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 8
229920003171 Poly (ethylene oxide) Polymers 0.000 description 8
XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 8
125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 8
BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 8
239000003085 diluting agent Substances 0.000 description 8
JBKVHLHDHHXQEQ-UHFFFAOYSA-N epsilon-caprolactam Chemical compound O=C1CCCCCN1 JBKVHLHDHHXQEQ-UHFFFAOYSA-N 0.000 description 8
239000011888 foil Substances 0.000 description 8
LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 8
229920000570 polyether Polymers 0.000 description 8
239000002243 precursor Substances 0.000 description 8
235000013772 propylene glycol Nutrition 0.000 description 8
230000035945 sensitivity Effects 0.000 description 8
VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 7
GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 7
150000001732 carboxylic acid derivatives Chemical class 0.000 description 7
239000000460 chlorine Substances 0.000 description 7
238000011161 development Methods 0.000 description 7
235000011187 glycerol Nutrition 0.000 description 7
150000002576 ketones Chemical class 0.000 description 7
FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 7
239000005011 phenolic resin Substances 0.000 description 7
BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 7
239000001294 propane Substances 0.000 description 7
125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 7
YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 7
ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 6
239000005977 Ethylene Substances 0.000 description 6
QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 6
LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 6
239000004721 Polyphenylene oxide Substances 0.000 description 6
239000004793 Polystyrene Substances 0.000 description 6
JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 6
HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
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