TWI438438B - 具有高頻內插器之測試系統 - Google Patents
具有高頻內插器之測試系統 Download PDFInfo
- Publication number
- TWI438438B TWI438438B TW098105383A TW98105383A TWI438438B TW I438438 B TWI438438 B TW I438438B TW 098105383 A TW098105383 A TW 098105383A TW 98105383 A TW98105383 A TW 98105383A TW I438438 B TWI438438 B TW I438438B
- Authority
- TW
- Taiwan
- Prior art keywords
- conductive
- interposer
- outer casing
- contact
- contacts
- Prior art date
Links
- 238000012360 testing method Methods 0.000 title claims description 43
- 239000012212 insulator Substances 0.000 claims description 45
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000012546 transfer Methods 0.000 claims description 2
- 238000007747 plating Methods 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 210000001787 dendrite Anatomy 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000000994 depressogenic effect Effects 0.000 description 2
- 239000013536 elastomeric material Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000004512 die casting Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06772—High frequency probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
- G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R24/00—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure
- H01R24/38—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Details Of Connecting Devices For Male And Female Coupling (AREA)
- Connector Housings Or Holding Contact Members (AREA)
- Coupling Device And Connection With Printed Circuit (AREA)
- Combinations Of Printed Boards (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/070,864 US7816932B2 (en) | 2008-02-21 | 2008-02-21 | Test system with high frequency interposer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200937017A TW200937017A (en) | 2009-09-01 |
| TWI438438B true TWI438438B (zh) | 2014-05-21 |
Family
ID=40801937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098105383A TWI438438B (zh) | 2008-02-21 | 2009-02-20 | 具有高頻內插器之測試系統 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7816932B2 (enExample) |
| JP (2) | JP2011514519A (enExample) |
| KR (1) | KR101547890B1 (enExample) |
| CN (1) | CN102027380B (enExample) |
| DE (1) | DE112009000415B4 (enExample) |
| TW (1) | TWI438438B (enExample) |
| WO (1) | WO2009105222A2 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7977583B2 (en) * | 2007-12-13 | 2011-07-12 | Teradyne, Inc. | Shielded cable interface module and method of fabrication |
| CN102540004A (zh) * | 2010-12-08 | 2012-07-04 | 鸿富锦精密工业(深圳)有限公司 | 测试装置 |
| CH705740B1 (de) | 2011-11-14 | 2015-08-14 | Huber+Suhner Ag | Kabelinterface für Koaxialkabel. |
| CN102809696B (zh) * | 2012-08-17 | 2015-04-15 | 福建南平南孚电池有限公司 | 金属夹具、具有该金属夹具的设备及其使用方法 |
| US9435855B2 (en) * | 2013-11-19 | 2016-09-06 | Teradyne, Inc. | Interconnect for transmitting signals between a device and a tester |
| US9899757B2 (en) * | 2015-09-03 | 2018-02-20 | Apple Inc. | Surface connector with silicone spring member |
| US9876307B2 (en) * | 2015-09-03 | 2018-01-23 | Apple Inc. | Surface connector with silicone spring member |
| US20190045632A1 (en) * | 2018-08-01 | 2019-02-07 | Intel Corporation | Connector, board assembly, computing system, and methods thereof |
| WO2021261285A1 (ja) * | 2020-06-22 | 2021-12-30 | 株式会社ヨコオ | 検査装置 |
| US11394154B1 (en) | 2022-03-09 | 2022-07-19 | Jeffrey G. Buchoff | Pliant electrical interface connector and its associated method of manufacture |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5367084U (enExample) * | 1976-11-09 | 1978-06-06 | ||
| US4451107A (en) | 1982-08-23 | 1984-05-29 | Amp Incorporated | High speed modular connector for printed circuit boards |
| US4837507A (en) | 1984-06-08 | 1989-06-06 | American Telephone And Telegraph Company At&T Technologies, Inc. | High frequency in-circuit test fixture |
| US4881905A (en) | 1986-05-23 | 1989-11-21 | Amp Incorporated | High density controlled impedance connector |
| US5178549A (en) * | 1991-06-27 | 1993-01-12 | Cray Research, Inc. | Shielded connector block |
| US5302923A (en) * | 1992-07-16 | 1994-04-12 | Hewlett-Packard Company | Interconnection plate having high frequency transmission line through paths |
| US5427535A (en) | 1993-09-24 | 1995-06-27 | Aries Electronics, Inc. | Resilient electrically conductive terminal assemblies |
| JP2792494B2 (ja) * | 1996-01-17 | 1998-09-03 | 日本電気株式会社 | 集積回路の実装構造 |
| JPH11248748A (ja) * | 1998-03-05 | 1999-09-17 | Advantest Corp | プローブカード |
| US6264476B1 (en) | 1999-12-09 | 2001-07-24 | High Connection Density, Inc. | Wire segment based interposer for high frequency electrical connection |
| US6352436B1 (en) | 2000-06-29 | 2002-03-05 | Teradyne, Inc. | Self retained pressure connection |
| US6344684B1 (en) | 2000-07-06 | 2002-02-05 | Advanced Micro Devices, Inc. | Multi-layered pin grid array interposer apparatus and method for testing semiconductor devices having a non-pin grid array footprint |
| US6544072B2 (en) | 2001-06-12 | 2003-04-08 | Berg Technologies | Electrical connector with metallized polymeric housing |
| JP3742324B2 (ja) * | 2001-10-17 | 2006-02-01 | アンリツ株式会社 | 電極プローバー |
| US6686732B2 (en) | 2001-12-20 | 2004-02-03 | Teradyne, Inc. | Low-cost tester interface module |
| EP1482313B1 (en) | 2002-02-07 | 2007-11-21 | Yokowo Co., Ltd | Capacity load type probe, and test jig using the same |
| DE60310739T2 (de) * | 2002-08-27 | 2007-10-11 | Jsr Corp. | Anisotrope leitfähige folie und impedanzmesssonde |
| US6784679B2 (en) | 2002-09-30 | 2004-08-31 | Teradyne, Inc. | Differential coaxial contact array for high-density, high-speed signals |
| JP2004138405A (ja) * | 2002-10-15 | 2004-05-13 | Renesas Technology Corp | 半導体装置測定用プローブ |
| JP2004139801A (ja) * | 2002-10-16 | 2004-05-13 | Japan Electronic Materials Corp | 接続介在体 |
| JP4242199B2 (ja) * | 2003-04-25 | 2009-03-18 | 株式会社ヨコオ | Icソケット |
| JP2004325306A (ja) | 2003-04-25 | 2004-11-18 | Yokowo Co Ltd | 検査用同軸プローブおよびそれを用いた検査ユニット |
| CN1265685C (zh) * | 2003-05-27 | 2006-07-19 | 建汉科技股份有限公司 | 具信号撷取垫的高频电路板及其测量工具 |
| JP4689196B2 (ja) | 2003-11-05 | 2011-05-25 | 日本発條株式会社 | 導電性接触子ホルダ、導電性接触子ユニット |
| JP2005149854A (ja) * | 2003-11-13 | 2005-06-09 | Nec Electronics Corp | プローブ及びicソケット並びに半導体回路 |
| EP1768214B1 (en) * | 2004-07-15 | 2012-03-14 | JSR Corporation | Inspection equipment for circuit device with anisotropic conductive connector |
| JP4405358B2 (ja) | 2004-09-30 | 2010-01-27 | 株式会社ヨコオ | 検査ユニット |
| JP4535828B2 (ja) | 2004-09-30 | 2010-09-01 | 株式会社ヨコオ | 検査ユニットの製法 |
| US7180321B2 (en) | 2004-10-01 | 2007-02-20 | Teradyne, Inc. | Tester interface module |
| US7046027B2 (en) | 2004-10-15 | 2006-05-16 | Teradyne, Inc. | Interface apparatus for semiconductor device tester |
| JP2006194620A (ja) * | 2005-01-11 | 2006-07-27 | Tokyo Electron Ltd | プローブカード及び検査用接触構造体 |
| US7279911B2 (en) * | 2005-05-03 | 2007-10-09 | Sv Probe Pte Ltd. | Probe card assembly with dielectric structure |
| JP2007178165A (ja) * | 2005-12-27 | 2007-07-12 | Yokowo Co Ltd | 検査ユニット |
| US7372286B2 (en) * | 2006-01-03 | 2008-05-13 | Chipmos Technologies (Bermuda) Ltd. | Modular probe card |
| JP2007311092A (ja) * | 2006-05-17 | 2007-11-29 | Yazaki Corp | 印刷配線板組立体及び該印刷配線板組立体の製造方法 |
| JP5008005B2 (ja) * | 2006-07-10 | 2012-08-22 | 東京エレクトロン株式会社 | プローブカード |
| JP5024861B2 (ja) * | 2006-08-01 | 2012-09-12 | 日本電子材料株式会社 | プローブカード |
-
2008
- 2008-02-21 US US12/070,864 patent/US7816932B2/en active Active
-
2009
- 2009-02-19 DE DE112009000415.6T patent/DE112009000415B4/de active Active
- 2009-02-19 CN CN200980105453.8A patent/CN102027380B/zh active Active
- 2009-02-19 JP JP2010547635A patent/JP2011514519A/ja active Pending
- 2009-02-19 KR KR1020107019361A patent/KR101547890B1/ko active Active
- 2009-02-19 WO PCT/US2009/001045 patent/WO2009105222A2/en not_active Ceased
- 2009-02-20 TW TW098105383A patent/TWI438438B/zh active
-
2015
- 2015-12-02 JP JP2015235356A patent/JP2016053588A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE112009000415B4 (de) | 2024-07-11 |
| US20090212802A1 (en) | 2009-08-27 |
| JP2016053588A (ja) | 2016-04-14 |
| WO2009105222A3 (en) | 2009-12-17 |
| US7816932B2 (en) | 2010-10-19 |
| WO2009105222A2 (en) | 2009-08-27 |
| TW200937017A (en) | 2009-09-01 |
| CN102027380B (zh) | 2014-03-12 |
| JP2011514519A (ja) | 2011-05-06 |
| KR20100122086A (ko) | 2010-11-19 |
| CN102027380A (zh) | 2011-04-20 |
| KR101547890B1 (ko) | 2015-08-27 |
| DE112009000415T5 (de) | 2011-01-13 |
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