TWI433747B - 具有二腔室之直線驅動裝置及其導引構造 - Google Patents

具有二腔室之直線驅動裝置及其導引構造 Download PDF

Info

Publication number
TWI433747B
TWI433747B TW99106743A TW99106743A TWI433747B TW I433747 B TWI433747 B TW I433747B TW 99106743 A TW99106743 A TW 99106743A TW 99106743 A TW99106743 A TW 99106743A TW I433747 B TWI433747 B TW I433747B
Authority
TW
Taiwan
Prior art keywords
chamber
slider
auxiliary slider
bearing
auxiliary
Prior art date
Application number
TW99106743A
Other languages
English (en)
Chinese (zh)
Other versions
TW201039972A (en
Inventor
Masayuki Hamura
Kenzo Ebihara
Original Assignee
Fanuc Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Ltd filed Critical Fanuc Ltd
Publication of TW201039972A publication Critical patent/TW201039972A/zh
Application granted granted Critical
Publication of TWI433747B publication Critical patent/TWI433747B/zh

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
TW99106743A 2009-03-11 2010-03-09 具有二腔室之直線驅動裝置及其導引構造 TWI433747B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009058121A JP4612096B2 (ja) 2009-03-11 2009-03-11 2つのチャンバーを備えた直線駆動装置とそのガイド構造

Publications (2)

Publication Number Publication Date
TW201039972A TW201039972A (en) 2010-11-16
TWI433747B true TWI433747B (zh) 2014-04-11

Family

ID=42714219

Family Applications (1)

Application Number Title Priority Date Filing Date
TW99106743A TWI433747B (zh) 2009-03-11 2010-03-09 具有二腔室之直線驅動裝置及其導引構造

Country Status (4)

Country Link
JP (1) JP4612096B2 (ja)
KR (1) KR101017549B1 (ja)
CN (1) CN101829924B (ja)
TW (1) TWI433747B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105711089A (zh) * 2014-12-04 2016-06-29 三纬国际立体列印科技股份有限公司 导杆组件与立体打印装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6246411B1 (ja) * 2017-07-21 2017-12-13 Dmg森精機株式会社 クーラント供給装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4517482Y1 (ja) * 1969-01-09 1970-07-17
SE443605B (sv) * 1981-05-14 1986-03-03 Craelius Ab Anordning for matning av en bergborrmaskin
JPS63253856A (ja) * 1987-04-07 1988-10-20 Mitsuba Electric Mfg Co Ltd リニアスライダ装置
JPH06254715A (ja) * 1993-03-04 1994-09-13 Ryobi Ltd 往復運動工具の振動低減装置
US5998889A (en) * 1996-12-10 1999-12-07 Nikon Corporation Electro-magnetic motor cooling system
JPH10252801A (ja) * 1997-01-07 1998-09-22 Showa:Kk ガススプリング
DE19810996A1 (de) * 1998-03-13 1999-09-16 Krauss Maffei Ag Impulsentkoppelter Direktantrieb
KR100554687B1 (ko) 2003-07-15 2006-02-24 사단법인 엔.씨 공작기계 연구조합 정밀이송을 위한 2축 제어방법
JP2006025476A (ja) * 2004-07-06 2006-01-26 Fanuc Ltd 直線駆動装置
JP4072551B2 (ja) * 2005-11-09 2008-04-09 ファナック株式会社 加工装置
JP4899763B2 (ja) * 2006-09-29 2012-03-21 富士電機リテイルシステムズ株式会社 端末管理装置、プログラム、及び通信方法
JP4347396B2 (ja) * 2008-03-28 2009-10-21 ファナック株式会社 シャトルのガイドの位置を保持する機構を備えた加工装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105711089A (zh) * 2014-12-04 2016-06-29 三纬国际立体列印科技股份有限公司 导杆组件与立体打印装置
US9849662B2 (en) 2014-12-04 2017-12-26 Xyzprinting, Inc. Lead screw guide assembly and three-dimensional printing apparatus

Also Published As

Publication number Publication date
TW201039972A (en) 2010-11-16
JP4612096B2 (ja) 2011-01-12
KR20100102558A (ko) 2010-09-24
KR101017549B1 (ko) 2011-02-28
JP2010207983A (ja) 2010-09-24
CN101829924B (zh) 2012-05-23
CN101829924A (zh) 2010-09-15

Similar Documents

Publication Publication Date Title
JP4586088B2 (ja) 往復直線駆動装置
JP4072551B2 (ja) 加工装置
JP4347396B2 (ja) シャトルのガイドの位置を保持する機構を備えた加工装置
KR101651340B1 (ko) 리니어 모터를 구비한 직선 구동 장치 및 공작 기계
Slocum et al. Linear motion carriage with aerostatic bearings preloaded by inclined iron core linear electric motor
JP4382133B2 (ja) シャトルを備えた加工機
TWI433747B (zh) 具有二腔室之直線驅動裝置及其導引構造
KR102313161B1 (ko) 유로 전환 밸브, 및 그 제조 방법
JP5783643B2 (ja) 放電加工装置
WO2017170939A1 (ja) 流路切替弁、及びその製造方法
JP5092206B2 (ja) リニアアクチュエータの位置決め制御方法及び装置
JP6514768B2 (ja) 製造作業機
JP4256247B2 (ja) カウンタバランス装置を有する機械構造体の送り機構
JP6492229B1 (ja) フィードバックばねを用いた気体圧サーボ弁
JP4522264B2 (ja) テーブル支持機構
Honarpardaz et al. Low Power Consuming Electromagnetic Actuators for Pulsed Pilot Stages
JP3103082U (ja) 平面研削機のテーブル送り装置
JPS6319723B2 (ja)
JPH05162040A (ja) 移動案内装置
JP2007333071A (ja) 流体制御装置
KR20110107543A (ko) 케이블을 클램프하거나 또는 중계하는 구조를 구비한 직선 구동 장치