CN101829924B - 具有两个腔室的直线驱动装置及其引导结构 - Google Patents

具有两个腔室的直线驱动装置及其引导结构 Download PDF

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Publication number
CN101829924B
CN101829924B CN2010101324476A CN201010132447A CN101829924B CN 101829924 B CN101829924 B CN 101829924B CN 2010101324476 A CN2010101324476 A CN 2010101324476A CN 201010132447 A CN201010132447 A CN 201010132447A CN 101829924 B CN101829924 B CN 101829924B
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China
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mentioned
chamber
auxiliary slider
guiding piece
drive apparatus
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CN2010101324476A
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Chinese (zh)
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CN101829924A (zh
Inventor
羽村雅之
蛯原建三
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Fanuc Corp
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Fanuc Corp
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  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
CN2010101324476A 2009-03-11 2010-03-10 具有两个腔室的直线驱动装置及其引导结构 Active CN101829924B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009058121A JP4612096B2 (ja) 2009-03-11 2009-03-11 ２つのチャンバーを備えた直線駆動装置とそのガイド構造
JP2009-058121 2009-03-11

Publications (2)

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CN101829924A CN101829924A (zh) 2010-09-15
CN101829924B true CN101829924B (zh) 2012-05-23

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CN2010101324476A Active CN101829924B (zh) 2009-03-11 2010-03-10 具有两个腔室的直线驱动装置及其引导结构

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JP (1) JP4612096B2 (ja)
KR (1) KR101017549B1 (ja)
CN (1) CN101829924B (ja)
TW (1) TWI433747B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105711089B (zh) * 2014-12-04 2018-10-02 三纬国际立体列印科技股份有限公司 导杆组件与立体打印装置
JP6246411B1 (ja) * 2017-07-21 2017-12-13 Dmg森精機株式会社 クーラント供給装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5998889A (en) * 1996-12-10 1999-12-07 Nikon Corporation Electro-magnetic motor cooling system
US6744155B1 (en) * 1998-03-13 2004-06-01 Siemens Aktiengesellschaft Momentum-decoupled direct drive
CN1719702A (zh) * 2004-07-06 2006-01-11 发那科株式会社 线性驱动设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4517482Y1 (ja) * 1969-01-09 1970-07-17
SE443605B (sv) * 1981-05-14 1986-03-03 Craelius Ab Anordning for matning av en bergborrmaskin
JPS63253856A (ja) * 1987-04-07 1988-10-20 Mitsuba Electric Mfg Co Ltd リニアスライダ装置
JPH06254715A (ja) * 1993-03-04 1994-09-13 Ryobi Ltd 往復運動工具の振動低減装置
JPH10252801A (ja) * 1997-01-07 1998-09-22 Showa:Kk ガススプリング
KR100554687B1 (ko) 2003-07-15 2006-02-24 사단법인 엔.씨 공작기계 연구조합 정밀이송을 위한 2축 제어방법
JP4072551B2 (ja) * 2005-11-09 2008-04-09 ファナック株式会社 加工装置
JP4899763B2 (ja) * 2006-09-29 2012-03-21 富士電機リテイルシステムズ株式会社 端末管理装置、プログラム、及び通信方法
JP4347396B2 (ja) * 2008-03-28 2009-10-21 ファナック株式会社 シャトルのガイドの位置を保持する機構を備えた加工装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5998889A (en) * 1996-12-10 1999-12-07 Nikon Corporation Electro-magnetic motor cooling system
US6744155B1 (en) * 1998-03-13 2004-06-01 Siemens Aktiengesellschaft Momentum-decoupled direct drive
CN1719702A (zh) * 2004-07-06 2006-01-11 发那科株式会社 线性驱动设备

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP昭63-253856A 1998.10.20

Also Published As

Publication number Publication date
JP2010207983A (ja) 2010-09-24
JP4612096B2 (ja) 2011-01-12
KR20100102558A (ko) 2010-09-24
CN101829924A (zh) 2010-09-15
TW201039972A (en) 2010-11-16
KR101017549B1 (ko) 2011-02-28
TWI433747B (zh) 2014-04-11

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