TWI427450B - Temperature control device - Google Patents

Temperature control device Download PDF

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Publication number
TWI427450B
TWI427450B TW097112159A TW97112159A TWI427450B TW I427450 B TWI427450 B TW I427450B TW 097112159 A TW097112159 A TW 097112159A TW 97112159 A TW97112159 A TW 97112159A TW I427450 B TWI427450 B TW I427450B
Authority
TW
Taiwan
Prior art keywords
temperature
pipe
fluid
heating
cooling
Prior art date
Application number
TW097112159A
Other languages
English (en)
Chinese (zh)
Other versions
TW200842539A (en
Inventor
Nagaseki Kazuya
Kobayashi Yoshiyuki
Koichi Murakami
Nonaka Ryo
sudoh Yoshihisa
Itafuji Hiroshi
Kokubo Norio
Original Assignee
Tokyo Electron Ltd
Ckd Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Ckd Corp filed Critical Tokyo Electron Ltd
Publication of TW200842539A publication Critical patent/TW200842539A/zh
Application granted granted Critical
Publication of TWI427450B publication Critical patent/TWI427450B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/01—Control of temperature without auxiliary power
    • G05D23/02—Control of temperature without auxiliary power with sensing element expanding and contracting in response to changes of temperature
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Temperature (AREA)
TW097112159A 2007-04-27 2008-04-03 Temperature control device TWI427450B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007118071A JP4978928B2 (ja) 2007-04-27 2007-04-27 温度制御装置

Publications (2)

Publication Number Publication Date
TW200842539A TW200842539A (en) 2008-11-01
TWI427450B true TWI427450B (zh) 2014-02-21

Family

ID=40054326

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097112159A TWI427450B (zh) 2007-04-27 2008-04-03 Temperature control device

Country Status (5)

Country Link
US (1) US20080314564A1 (ja)
JP (1) JP4978928B2 (ja)
KR (1) KR101327114B1 (ja)
CN (1) CN101295186B (ja)
TW (1) TWI427450B (ja)

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* Cited by examiner, † Cited by third party
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JP5172615B2 (ja) * 2008-11-12 2013-03-27 Ｃｋｄ株式会社 温度制御装置
US9109843B1 (en) * 2009-06-29 2015-08-18 Paragon Space Development Corporation Radiator systems
US8714079B2 (en) * 2009-08-18 2014-05-06 Rohde Brothers, Inc. Energy-efficient apparatus for making cheese
JP5519992B2 (ja) * 2009-10-14 2014-06-11 東京エレクトロン株式会社 基板載置台の温度制御システム及びその温度制御方法
US8612063B2 (en) * 2011-05-02 2013-12-17 Honeywell International, Inc. Temperature control setpoint offset for ram air minimization
KR20130031945A (ko) * 2011-09-22 2013-04-01 삼성전자주식회사 로딩용 척의 온도 제어 설비 및 온도 제어 방법
US10274270B2 (en) * 2011-10-27 2019-04-30 Applied Materials, Inc. Dual zone common catch heat exchanger/chiller
JP5912439B2 (ja) * 2011-11-15 2016-04-27 東京エレクトロン株式会社 温度制御システム、半導体製造装置及び温度制御方法
US10553463B2 (en) 2011-11-15 2020-02-04 Tokyo Electron Limited Temperature control system, semiconductor manufacturing device, and temperature control method
JP5951384B2 (ja) * 2012-07-20 2016-07-13 東京エレクトロン株式会社 温度制御システムへの温調流体供給方法及び記憶媒体
US9366157B2 (en) 2013-08-08 2016-06-14 General Electric Company Lube oil supply system and method of regulating lube oil temperature
KR102264655B1 (ko) 2014-10-14 2021-06-15 삼성디스플레이 주식회사 표시 장치
JP6361074B2 (ja) * 2015-05-13 2018-07-25 三菱重工サーマルシステムズ株式会社 台数制御装置、エネルギー供給システム、台数制御方法及びプログラム
JP6570390B2 (ja) * 2015-09-24 2019-09-04 東京エレクトロン株式会社 温度調整装置及び基板処理装置
JP6639193B2 (ja) * 2015-11-06 2020-02-05 伸和コントロールズ株式会社 温度制御装置
JP6684025B2 (ja) * 2016-07-14 2020-04-22 株式会社日立ハイテク 自動分析装置
CN106123636A (zh) * 2016-08-05 2016-11-16 江苏新美星包装机械股份有限公司 一种无菌水调温装置
CN106814769B (zh) * 2017-03-27 2018-08-10 成都深冷科技有限公司 一种高低温循环控制系统及高低温快速控制方法
US11164759B2 (en) 2018-05-10 2021-11-02 Micron Technology, Inc. Tools and systems for processing one or more semiconductor devices, and related methods
JP7042158B2 (ja) * 2018-05-23 2022-03-25 東京エレクトロン株式会社 検査装置及び温度制御方法
KR102613215B1 (ko) * 2018-12-27 2023-12-14 신와 콘트롤즈 가부시키가이샤 밸브 유닛 및 온도 제어 장치
JP7203600B2 (ja) * 2018-12-27 2023-01-13 株式会社Kelk 温度制御装置
CN113196199B (zh) 2019-01-10 2023-09-22 株式会社Kelk 温度控制系统以及温度控制方法
JP2021009590A (ja) * 2019-07-02 2021-01-28 株式会社Kelk 温度制御システム及び温度制御方法
CN113156806B (zh) * 2021-03-18 2024-03-22 广州埃克森生物科技有限公司 一种基于pid算法的温度控制方法、装置、设备及介质
CN114200977A (zh) * 2021-11-05 2022-03-18 广州国显科技有限公司 应用于显示面板的温度控制系统及温度控制方法
CN114442693B (zh) * 2021-12-31 2023-04-07 北京京仪自动化装备技术股份有限公司 耦合温控系统及方法
CN114442696B (zh) * 2022-01-24 2023-05-05 成都市绿色快线环保科技有限公司 一种温度控制系统及方法

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US20080223555A1 (en) * 2007-03-16 2008-09-18 Centipede Systems, Inc. Method and apparatus for controlling temperature

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JP3298024B2 (ja) * 1993-01-05 2002-07-02 株式会社日立製作所 プロセス制御方法およびプロセス制御装置
AU1527095A (en) * 1994-01-11 1995-08-01 Abbott Laboratories Apparatus and method for thermal cycling nucleic acid assays
JP3010443B2 (ja) * 1998-01-27 2000-02-21 株式会社小松製作所 温度制御装置および温度制御方法
US20030037919A1 (en) * 2001-08-17 2003-02-27 Takashi Okada Connected chilling-heating system
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Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
US20080223555A1 (en) * 2007-03-16 2008-09-18 Centipede Systems, Inc. Method and apparatus for controlling temperature

Also Published As

Publication number Publication date
KR20080096426A (ko) 2008-10-30
KR101327114B1 (ko) 2013-11-07
CN101295186A (zh) 2008-10-29
TW200842539A (en) 2008-11-01
US20080314564A1 (en) 2008-12-25
CN101295186B (zh) 2013-08-28
JP2008276439A (ja) 2008-11-13
JP4978928B2 (ja) 2012-07-18

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