TW200842539A - Temperature control device - Google Patents

Abstract

A temperature control device controls the temperature of a controlled object by circulating a fluid in a temperature adjustment unit 11 arranged near the controlled object. The temperature control device comprises a heating pathway 40 that heats and circulates the fluid in the temperature adjustment unit 11; a cooling pathway 20 that cools and circulates the fluid in the temperature adjustment unit 11; a bypass pathway 30 that does not pass the fluid through the heating pathway 40 and cooling pathway 20, but circulates the fluid in the temperature adjustment unit 11; and several adjustment means 44, 24 and 34 for adjusting a flow ratio of the fluid supplied from the heating pathway 40, cooling pathway 20, and bypass pathway 30 to the temperature adjustment unit 11 via a confluence unit 12 that combines these flows; the adjustment means44, 24 and 34 are provided on a downstream side of each of the heating pathway 40, the cooling pathway 20, and the bypass pathway 30 and on the upstream side of the confluence unit 12.

Description

200842539 IX. OBJECTS OF THE INVENTION: The present invention relates to a temperature control device for controlling a temperature of a controlled object by circulating a fluid to a temperature regulating portion disposed beside the controlled object. Desire temperature. [Prior Art] r Fig. 12 shows such a temperature control device. The flow system in the storage tank 100 is sucked by the pump 102 and discharged to the heating unit i 〇4. The heating unit 1 〇4 has heating to heat the fluid output to the temperature regulating unit 1 〇 6 . The fluid passing through the temperature control unit 1 〇 6 is output to the cooling unit 108. The fluid output to the storage tank 100 can be cooled by the cooling unit 1〇8. The temperature adjustment unit 1〇6 is configured to support the controlled object, and controls the temperature of the controlled object supported by the temperature adjustment unit 106 by adjusting the temperature of the fluid supplied to the temperature adjustment unit 1〇6. Here, when the temperature of the controlled object is to be raised, the fluid is not cooled at the cooling portion 1〇8, and the fluid is heated at the heating port 104. On the other hand, when the temperature I of the controlled object is to be lowered, the fluid is cooled in the cooling portion 108, and the & body is not heated in the heating portion 104. By this, it is possible to control the temperature of the controlled object at a desired temperature. In addition to the one shown in Fig. 12, the temperature control device of the past is also described in Patent Document 1 which will be described later. Patent Document 1: JP-A-2000-89832, SUMMARY OF THE INVENTION The temperature of a controlled object is changed to 2238 to 9939-PF by the above-described /m degree control device; the desired temperature of Ahddub 5 200842539 takes a long time. . In other words, in order to cool the temperature of the controlled object, it is necessary to stop the heating of the heating unit 104 and start the cooling of the cooling unit 10, but even after the heating unit 1Q4 stops heating, it is temporarily caused by the residual heat. There is still a high temperature fluid flowing from the heating section 1 [outflow. Moreover, even if the cooling portion 1G8 starts to cool, it takes time for the fluid to actually be cooled, and it takes a longer time for the temperature of the fluid in the storage tank 100 to drop. Therefore, the temperature of the temperature adjustment portion (10) cannot be quickly changed, so that the temperature of the controlled object cannot be changed rapidly. The invention provides a temperature control device for circulating a fluid to a temperature regulating portion disposed beside a controlled object to control the temperature of the controlled object at a desired temperature by circulating a fluid. The temperature of the controlled object can quickly reach the desired temperature. The following is a means for solving the above problems, and the effects thereof. The hand & 1 is a /JBL degree control device' by controlling the temperature of the controlled object to a desired degree by circulating the fluid to the temperature regulating portion disposed beside the controlled object, characterized by including: a heating pipe Causing and circulating the fluid to the tempering section; a cooling line that cools the fluid and circulates it to the j-week/dish' bypass f, which prevents the fluid from passing through the heating tube The road and the cooling pipe are circulated to the temperature regulating portion; and the adjusting device adjusts the flow through the junction of the two ', ,, Lülu 豸 cold section, and the bypass pipe, and outputs to the switch The flow ratio of the fluid in the warm section. The adjusting device is disposed at the twisting pipe, the cooling pipe, the downstream of the bypass pipe, and the upstream of the joining portion. In the above-mentioned hand killing 1 Aj ^ A ', by adjusting the flow ratio of the fluid output to the temperature regulating portion through the heating pipe, the cooling road, and the bypassing officer, the output can be output to the The temperature of the fluid changes rapidly. In particular, since the flow 2238-9394-PF/Ahddub Γ 200842539 is adjusted in the heating pipe, the cooling pipe, the downstream of the bypass pipe, and the upstream of the merging portion, it is possible to make The adjustment position of the flow ratio and the distance of the λ are shortened, so that the temperature of the fluid output to the temperature adjustment portion can be changed more rapidly. Therefore, when the temperature of the controlled object is controlled to the desired temperature, the temperature of the controlled object can be quickly reached to the desired temperature. Further, in the plate, the flow path area of the merging portion is preferably small so that the flow rate of the fluid flowing through the heating circuit, the cooling pipe, and the bypass pipe is as low as possible. Here, the flow velocity of the fluid is the velocity at which the fluid travels in the flow direction. Furthermore, the adjusting device adjusts a flow ratio that is output to the temperature regulating portion through the heating pipe, the cooling pipe, and the bypass pipe, respectively. The means 2 is that the temperature control means controls the temperature of the controlled object to a desired temperature by circulating the fluid to the temperature regulating portion disposed beside the controlled object, and is characterized by comprising: a heating pipe; Heating the body and passing it to the temperature regulating portion; cooling a pipe that cools the fluid and circulates it to the temperature regulating portion; a bypass pipe that prevents the fluid from passing through the heating pipe and The cooling circuit is circulated to the temperature regulating portion, and the adjusting device adjusts the flow path area of the heating pipe, the cooling pipe, and the downstream side of the bypass pipe, respectively. In the above-mentioned means 2, by adjusting the flow path areas on the downstream side of the heating pipe, the cooling pipe, and the side of the square, the temperature can be adjusted to be output to the temperature regulation through the heating pipe, the cold section, and the bypass pipe. The flow ratio of the department. Therefore, the temperature of the fluid output to the temperature regulating portion can be rapidly changed. Therefore, when the temperature of the controlled object is controlled to a desired temperature, the temperature of the controlled object can be quickly reached to the desired temperature. The means 3 is that the bypass pipe is 2238-9394-PF between the heating pipe and the cooling pipe; Ahddub 7 200842539 is shared. In the above means 3, in the case where the fluid is output from the heating pipe and the bypass pipe to the temperature regulating portion, and the fluid is output from the cooling pipe and the bypass pipe to the temperature regulating portion, the same bypass can be used. tube. Therefore, the configuration of the temperature control device can be simplified as compared with the case where a separate bypass officer must be used. The means 4 is such that, on the upstream side of the heating pipe and the cooling pipe, an outflow pipe is provided which causes the adjusting device to bypass and the fluid to flow out. When the fluid is not output from the heating pipe or the cooling pipe to the temperature regulating portion, a temperature gradient is generated between the downstream side of the adjusting device and the above-mentioned prohibited pipe. Therefore, after the prohibition is released, the temperature of the fluid flowing out to the temperature regulating portion is affected by the temperature gradient, and the time required for the temperature of the temperature regulating portion to reach the desired temperature may be elongated. In this regard, in the above-described means 4, by providing the discharge line ', the temperature gradient on the upstream side of the outflow line can be appropriately controlled, and the temperature of the temperature adjustment unit can be quickly reached to the desired temperature. Furthermore, in the means 4, the heating side temperature detecting means may be disposed on the upstream side of the heating device to detect the temperature thereof, and the cooling side temperature detecting means is provided on the upstream side of the adjusting line To detect its temperature. In this case, by providing the outflow line, it is possible to appropriately suppress the influence of the temperature gradient caused by the flow of the fluid from the heating pipe or the cooling pipe to the temperature regulating portion. The means 5 further includes a pump that sucks the fluid on the downstream side of the temperature regulating portion and outputs it to the heating pipe, the cooling pipe, and the bypass pipe. In the above means 5, the pump can be used to circulate the fluid. In particular, compared to the downstream side of the heating pipe, the cooling pipe, and the bypass pipe, and on the upstream side of the temperature control section, by placing the pump in the heating pipe, the cooling pipe, and the bypass 8 2238 -9394~PF; Ahddub 200842539 • The upstream side of the official' can shorten the flow path of the fluid between the adjustment device and the temperature control unit. Therefore, the fluid output from the regulating device can be quickly reached to the temperature regulating portion, and the temperature of the temperature regulating portion can be made to reach the desired temperature more quickly. The means 6 is provided with a storage device for storing the fluid on the heating pipe, the cooling pipe, the upstream side of the bypass pipe and the downstream side of the temperature regulating portion, the storage device having the temperature of absorbing the fluid The function of producing volume changes. In the case where the volume of the fluid changes with temperature, the volume of the fluid changes due to the temperature change of the fluid, and the fluid may be hindered. This point 'in means 6' is because the storage device has a function of absorbing the volume change of the fluid due to temperature, and the circulation of the fluid can be maintained even in the case where the volume of the fluid changes. Further, the storage device is disposed on the heating pipe, the cooling pipe, the upstream side of the bypass pipe, the downstream side of the temperature control portion, and the upstream side of the temperature control portion. The heating pipe, the cooling pipe, the upstream side of the (four) pipe, and the upstream side of the temperature regulating portion can shorten the flow path of the fluid between the adjusting device and the temperature regulating portion. The hand is also 7 and further includes a faceting device that operates the adjusting device to control the temperature of the fluid adjacent to the temperature regulating portion to a target value. In the above means 7, by setting the operating means, the temperature of the temperature regulating portion can be adjusted to a desired temperature. In the means 8, the operating means returns the detected value obtained by the output temperature detecting means for detecting the temperature of the fluid adjacent to the temperature regulating portion to the target value. In the above means 8, since the feedback control is executed, the detected value can be accurately reached to the target value. 2238-9394-PF; Ahddub 9 200842539 * In the hand #又9', the lang device is to adjust the heating circuit, the cooling pipe, and the flow path area on the downstream side of the bypass pipe; The operating device includes a switching device that converts the individual flow path area operation amount of the heating pipe, the cooling pipe, and the bypass pipe according to the difference between the detected value and the target value. In the above-described means 9, by providing the conversion means, since the difference between the detected value and the target value is quantified into a single amount, the flow of the above three pipes can be adjusted (operated) according to the quantified amount. Road area. Furthermore, it is preferable that the conversion device changes the flow path area of the cooling pipe and the bypass pipe with respect to the change of the difference when the detected value is larger than the target value, and the detected value is smaller than the target value. Next, the flow path area of the heating pipe and the bypass pipe is changed with respect to the change of the difference. In the means 10, the operating device operates the adjusting device, and in the specific period after the change of the target value, the feedback control is not used, and the detection value of the bypass temperature detecting device for detecting the temperature of the bypass officer is controlled by an open loop. The temperature of the fluid next to the temperature control unit. When the target value is changed, in order to quickly reach the target value by the feedback control, it is required to increase the gain value of the control. Further, when the gain value of the control is increased, the amount of fluctuation in which the detected value fluctuates above and below the target value also increases. Thus, in the feedback control, there is a mutual exchange relationship between the improvement of the reactivity and the suppression of the variation. In this case, in the means 1〇, the open loop control is used without the feedback control in the specific period after the target value change. Therefore, even if the feedback control is set to suppress the fluctuation of the detected value from the target value, the target can be improved. Reactivity when the value changes. In the means 11, the adjusting device is a device for respectively adjusting the heating pipe, the 2238-9394-PF, the Ahddub 10 200842539 cooling pipe, and the flow path area of the downstream side of the bypass officer; When the target value is changed, when the temperature of the fluid in the bypass pipe is higher than the target value, the flow path area of the bypass pipe and the cooling pipe is operated, thereby controlling the temperature adjustment part of the open circuit control The temperature reaches a target value, and when the temperature of the fluid in the bypass pipe is lower than the target value, the flow path area of the bypass pipe and the heating pipe is operated, whereby the open circuit controls the temperature of the temperature regulating portion To the target value. In the above-described means 11, the heating path is also used, and when the temperature of the fluid in the bypass pipe is equal to the target value, the flow path area of the bypass pipe and the cooling pipe can be reduced. Energy consumption. Furthermore, compared with the cooling line, when the temperature of the fluid in the bypass pipe is lower than the target value, the flow path area of the bypass pipe and the heating pipe can be operated, thereby reducing energy consumption. . The means 12 further includes a transition time target value setting means for causing the target value to vary more greatly than the required change in the case where the request for the temperature of the temperature adjustment portion is changed. In order to bring the temperature of the temperature adjustment portion to the target value after the target value is changed, the temperature of the temperature adjustment portion must be changed by the temperature-adjusted fluid, and therefore, a reaction delay occurs when the temperature is changed toward the target value. Further, in order to change the temperature of the object to be controlled, after the temperature change of the temperature adjustment portion, energy exchange must be performed between the controlled object and the temperature control portion, so that the reaction delay of the temperature change of the controlled object becomes more conspicuous. Here, in the above-mentioned means 12, when the actual demand changes, 'by making the target value change more greatly than the required change, the temperature of the temperature control unit or the controlled object is quickly reached, and the required temperature is quickly reached. temperature. 11 2238-9394-PF; Ahddub 200842539 • 13 is a more open loop control coordination support device, which selects the gain value of the open loop control, the hold time of the open loop control, and the open loop control The plurality of & items t of the target value are set to be forbearing and the temperature control is performed corresponding to the selected value. In open-circuit control, the gain or duration, and the optimal setting of the target value vary with the controlled object. Therefore, in the temperature control device, these parameters are fixed from the beginning, so that the (four) object cannot perform the optimal open loop control. At this point, in the means 13, by providing the mating support means, it is possible to reduce the labor of the user of the temperature control means when using the parameters corresponding to the controlled object. In the means 14, the adjusting device is a device for adjusting the flow path area of the heating pipe, the cooling pipe, and the downstream side of the bypass pipe; the operation f is not in the temperature of the temperature regulating portion In the case of a variable state, the flow path area adjusted by the adjustment device to the heating pipe and the cooling pipe is prohibited to be 〇. In the case where the π stop body flows from the heating pipe or the cooling pipe to the temperature regulating portion, a temperature gradient occurs between the downstream side of the adjusting device and the above-mentioned prohibited pipe. Therefore, after the prohibition is released, the temperature of the fluid flowing out to the temperature regulating portion is affected by the temperature gradient, and the time required for the temperature of the temperature regulating portion to reach the desired temperature may be elongated. In this case, in the above-described means 14, when the brewing degree of the temperature regulating portion is in a constant state, the flow path area adjusted by the adjusting device to the heating pipe and the cooling pipe is prohibited, thereby The temperature gradient can be appropriately suppressed, and the temperature of the temperature adjustment portion can be made to reach a desired temperature more quickly. Furthermore, in the means 14, the heating side temperature detecting means may be provided on the upstream side of the heating device to detect the temperature thereof, in the cooling 2238-9394-PF; Ahddub 12 200842539 ^ On the upstream side of the adjusting device, a cooling side temperature detecting device is provided to detect the temperature thereof. In this case, by providing the outflow line, it is possible to appropriately suppress the detection device from being affected by the above temperature gradient because the flow of the fluid from the heating pipe or the cooling pipe to the temperature regulating portion is prohibited. [Embodiment] [First Embodiment] A third embodiment of a temperature control device according to the present invention will be described below with reference to the drawings. Fig. 1 is a view showing the overall configuration of a temperature control according to a first embodiment of the present invention. The illustrated temperature control device is used in, for example, the field of biotechnology or the processing/manufacturing engineering, biological/chemical experiments, semiconductor manufacturing processes, or manufacturing processes of precision machines in the field of the chemical industry. The temperature control device has a temperature regulating plate 10. The temperature regulating plate 10, on which the controlled object is carried, is a plate-like member that can support the controlled object from vertically below, and exchanges heat with the controlled object. In detail, a pipe (tempering portion u) is provided inside the temperature regulating plate 10 for the non-compressible fluid that enters through the merging portion 12 (for liquid medium as a heat exchange medium (liquid temperature medium) Preferably, for flow, the temperature of the temperature regulating plate 10 is adjusted by the temperature of the fluid. Further, the controlled object is, for example, a chemical substance to be tested, a semiconductor wafer, a precision machine, or the like. The fluid flowing in the temperature regulating plate 10 flows into the storage tank 16 through the outflow line 14. The storage tank 16 is filled with a liquid, but has a space in the upper portion thereof and injects a gas. Therefore, even if the volume of the fluid changes due to temperature changes, the change is absorbed by the gas as a compressive fluid. Therefore, it is possible to avoid 2238-9394-PF; Ahddub 13 200842539 - to avoid the obstruction of fluid flow due to fluid volume changes. The fluid in the storage tank 16 is sucked by the pump 18 and output to the branching portion 19. Here, the pump 18 may be constituted by a diaphragm pump, a vortex pump, a cascade pump, or the like. The branching portion 19 is connected to the cooling duct 20, the bypass pipe 30, and the twisting pipe 40. Port 2 The cooling line 2G cools the fluid flowing from the branching portion 19 and flows out to the merging portion 12. The cooling duct 2 is provided with a cooling portion 22 covering a part thereof. The cooling unit 22 cools the fluid flowing from the branching portion 19 . In detail, the cooling portion 22 is provided with a line for the flow of a fluid (water, oil, refrigerant) cooled to a specific temperature, by which the fluid in the cooling line 2 is cooled. The cooling duct 20 has a curved piping structure at the upstream end portion and the downstream side end portion of the cooling portion 22, thereby expanding the volume of the cooling duct 2〇 in the cooling portion 22. Further, without using the curved structure, for example, the flow path area may be enlarged only in the cooling portion 22, thereby increasing the volume in the cooling portion 22. Further, on the downstream side of the cooling pipe 20, a cooling valve 24 for continuously adjusting the flow path area in the cooling pipe 2'' is provided. Further, in the cooling pipe, the upstream portion of the valve 24 for the rim portion is provided with a temperature sensing H 26 for detecting the temperature of the fluid in the cooling pipe 2, and is provided at the lower cooling point 24τ. The cooling flow of the mass flow rate or the volume flow rate of the fluid in the cooling line 2G 〇" Further, the cooling line 20 is substantially fixed in the flow path area further downstream than the cooling portion 22. On the other hand, the bypass pipe 30 directly flows the fluid flowing from the branching portion 19 through the merging portion 12 to the temperature regulating portion η. On the downstream side of the bypass pipe (10), a bypass common valve 34 for continuously adjusting the flow passage area in the bypass pipe 30 is provided. Moreover, 2238-9394-PF; Ahddub 14 200842539 in the bypass pipe 30 in the side of the field? Item 0y) The side of the fluid temperature production, w " upstream, with the detection bypass 30, the temperature sensor 36, downstream of the side of the common valve 34 is provided with a detection bypass 3n To, 7^: touch the flow device 38. The side-by-side heating path 4' of the volume flow rate or the volume flow rate of the body is heated to the confluence portion 12 from the fluid flowing from the branching portion 19. The heating pipe 40 is provided with a heating portion 42 to cover the raw portion. The heating unit 42 heats the fluid flowing from the branching portion 19 . Detailed;

The heating portion 42 is provided with a pipe for heating to a specific temperature (water, oil, heat medium k for use) by the fluid to heat the fluid in the heating pipe 4 。. The heating s road 4G is in the heating portion 42 The ±curvature & road structure ' between the side of the swim side and the end of the downstream side expands the volume in the heating duct 40 in the heating unit 42. Again, 'the f-curve structure is not used, but for example Further, the flow path area may be enlarged only in the heating unit. Further, a heating valve 44 for continuously adjusting the flow path area in the heating line 4A is provided on the downstream side of the heating main path 4〇. In the heating pipe 4, upstream of the heating crucible 44, a heating temperature sensor 46 for detecting the temperature of the fluid in the heating pipe 4 () is provided, and downstream of the heating valve 44, the detecting heating is provided. The flow rate of the fluid in the line 40 or the volume flow rate of the flow rate of the flow vessel 48. Further, the flow path area of the heating line 40 is substantially fixed downstream of the heating portion 42. 20. The bypass pipe 30 and the heating pipe 40 are connected to the confluence portion 12 at a downstream position thereof. Compared with the flow path area of the cooling line 20, the bypass pipe 30, and the heating pipe 40, the flow path area or the confluence portion 12 in the confluence portion 12 is not enlarged as much as possible in a range where the fluid flow rate is not slowed. And the temperature adjustment 2238-9394-PP; Ahddub 15 200842539 is better in the flow path area between the portions π, that is, the flow path area between the merging portion 12 or the merging portion 12 and the temperature regulating portion 11 is set to be able to suppress The flow rate of the body caused by the volume is not reduced as much as possible. The flow rate of the fluid flowing out from the cooling valve 24 and the heating valve 44 is not lowered as much as possible. The output temperature sensor 5 of the temperature of the fluid output from the temperature control unit 11 is on the other hand, the control device 50 operates the cooling valve 24, next to the required value of the temperature of the controlled object (required, 1 degree Tr). The valve closing % or the heating valve 44' is used to adjust the temperature of the fluid in the temperature adjusting portion u, and thereby indirectly also the temperature of the controlled object on the plate 1. The control device is not appropriately referred to at this time. Cooling temperature sensor 26, side common temperature sensor 36, heating temperature The detected value of the sensor 46, the cooling flow rate device 28, the bypass general flow rate device 38, the heating flow rate device 48, etc. Further, the control device 50 includes: a cooling valve %, a bypass valve 34, or heating The calculation unit for calculating the operation signal outputted by the drive unit is calculated by using the target 44 (four) moving portion and the detection value 4 of the above various detecting devices. The calculation portion may be constituted by a dedicated hardware device, and may also have a microcomputer. It is also possible to have a general-purpose personal computer and a program for calculating the same. According to the temperature control device described above, the temperature of the fluid in the temperature control unit 11 can be rapidly changed in accordance with the change in the required temperature Tr. In the cooling line 2, the body temperature is lower than the required temperature Tr, and the temperature of the fluid in the heating line 4 () is higher than the required temperature Tr, regardless of the required temperature & The flow rate of the fluid flowing out from the cooling line 2α, the bypass pipe 3 (), and the heating pipe 4〇 can rapidly change the temperature of the fluid in the temperature control unit u to 2238-9394-PF; Ahddub 16 200842539. Desire temperature . Further, by providing the bypass pipe 3〇, the temperature control device can reduce the energy used to maintain the temperature in the temperature control unit 11 at a constant value. This is explained below. For example, the fluid circulating in the temperature regulating portion 11 is water, the temperature in the cooling pipe 20 is 10 degrees Celsius, the temperature in the heating pipe 4 is 7 degrees Celsius, and the flow rate of the fluid flowing in the temperature regulating portion 11 It is 2〇L/min. Further, when the detected value Td of the output temperature sensor 51 is controlled to a steady state of 40 degrees Celsius, the temperature of the fluid flowing out of the temperature regulating portion 11 rises to 43 degrees Celsius. In this case, temperature control can be performed by causing the fluid of the cooling line 20 and the bypass pipe 30 to flow out to the temperature adjustment portion u and without using the fluid in the heating pipe 40. Exploring the amount of energy consumed at this time. When the flow rate of the fluid flowing out from the cooling pipe 20 to the temperature adjustment unit u is "骷", the following formula holds. 2〇(L/min)x40(°C) = l〇(°C)xWa+43(°C)x(20-Wa) From this, it can be seen that Wa and 1·8 L/min. Therefore, the energy consumption amount Qa consumed in the cooling unit 22 is as follows.

Qc=(43-10)χ1·8x60 (seconds)+ (860: conversion coefficient)=4. lkW relative to this case, in the case where the configuration of the bypass pipe 3 is not provided, the energy consumption amount Qa of the cooling unit 22 The energy consumption amount qc of the heating unit 42 is as follows.

Qa=(43-10)xl〇(L/min)X60(seconds)+860 and 23kW Qc=(70-43)xl〇(L/min)χ60(seconds)+860 and 19kW Therefore, energy consumption Q The "42 kW" is about 10 times as large as the case where the bypass pipe 30 is provided. Following the detailed control of the implementation of the control device 5 温度 temperature control. 2238-9394-PF; Ahddub 17 842539 2 shows a return in the process performed by the control device 50. For example, the process is repeated by the control device 5 to periodically cycle the line processing program. Two == is it in step S1", and it is judged whether or not the J3 processing system is for judging the feedback control. The open loop control is to perform the feed control under the conditions described later.

In the case where the determination in step S1G is NO, the detected value Td of the temperature sensor 51 is outputted in the step. In the subsequent step su, the basic operation amount for controlling the detection value Td to the target value Tt is 2, and the value determined according to the required temperature η is determined by the feedback control as the required temperature Tr. The basic operation amount is the amount calculated based on the difference between the value T and the detected value. In the present embodiment, the basic operation amount mb is calculated based on the detected value T d and the PID (proportional differential integral) in which the difference Δ between the + + μ λ and the target value Tt is inserted.

Then, in step S16, the basic operation amount is converted into the operation amount of the cooling valve 24, the bypass valve 34, and the heating valve 44 (the opening degree is reduced).

Vc) ° The relationship shown in Figure 3 is used here. Here, in the case where the basic operation amount MB is less than 〇, the opening degree Va of the cooling valve 24 is significantly reduced in one direction as the basic operation amount MB is increased, and in the case where the basic operation amount Μβ is larger than 〇, Hey. In this case, the more the detected value Td is higher than the target value Tt, the flow rate of the cooling line 20 is increased 'and the cold portion 2 is not used when the detected value Td is lower than the target value Tt. And set it for it. Further, in the case where the basic operation amount Mb is larger than 〇, the opening degree Vb' of the heating valve 44 is unidirectionally increased as the basic operation 篁MB is increased, and when the basic operation amount 〇 is smaller than 〇, 0. In this case, the more the detected value Td is lower than the target value Tt, the 2238-9394-PF; the flow rate of the Ahddub 18 200842539 heating pipe 40 is increased, and in the case where the detected value Td is higher than the target value η, the heating is caused. The line 4 is set without being used. Further, the opening degree of the bypass common valve 34 is significantly reduced unidirectionally as the basic operation amount Μβ0 〇 is further. Further, the setting of each opening degree in 'Fig. 3' is such that the total flow rate flowing out of the three pipes does not change as the value of the basic operation amount e does not change. By setting this, the basic operation amount 算出 is calculated based on the difference of the single PID of the difference Δ between the detected value Td and the target value η, and the three valves of the cooling valve μ, the bypass valve 34, and the heating valve 44 can be set. The amount of operation. When the process of step S16 in the second drawing described above is completed, in step si8, three valves of the cooling valve 24, the bypass valve 34, and the heating valve 44 are operated. Furthermore, in the case where the determination in step S10 is negative, or in the case where the processing in step_ is completed, the series of processing is ended. By using the feedback control as described above, it is possible to accurately change the detected value μ with the target value Tt. However, in order to increase the reactivity of the detected value Td to the target value Tt by the feedback control, the gain value of the force σ large feedback control must be required, but when the gain value becomes larger, the detected value fluctuates above and below the target value. It also gets bigger. As a result, in the feedback control, the relationship between the reactivity with respect to the change of the target value Tt and the amount of fluctuation of the detected value Td is improved. Therefore, in the case of reducing the amount of variation, the reactivity is sacrificed. In Fig. 4, the detected value Td and the temperature of the controlled object are changed when the feedback control is used when the target value Tt changes. As shown in the figure, the reaction delay is generated before the detected value Td reaches the target value Tt, and it takes a longer time before the temperature of the controlled object reaches the target value Tti. In order to change the temperature of the controlled object, it is necessary to adjust the temperature of 2238-9394-PF; Ahddub 19 200842539 P 1 1 "JDL degree change" through the heat exchange between the temperature regulating plate 1 and the temperature control unit 1 The temperature of the temperature regulating plate 10 is changed, and the heat energy generated between the temperature regulating plate 10 and the controlled object is exchanged. Therefore, in order to reduce the amount of fluctuation of the detected value Td, the feedback control is set, and it is difficult to quickly reach the target value Tt by the feedback control by the temperature of the controlled object. In the present embodiment, in the case where the required temperature Tr transmitted from the outside changes, open loop control is used. Further, at this time, the change in the target value Tt is made larger than the change in the required temperature Tr.

Fig. 5 is a view showing the procedure of the setting process of the target value in the present embodiment. This processing is repeatedly performed by the control device 50, for example, periodically. In this series of processing, first, in step S2, it is judged whether or not the deviation control execution flag is ON (0n). The deviation control execution flag here is: a flag for performing a deviation control that causes the target value Tt to vary greatly. Further, in the case where the deviation control execution flag is on, step S22 is performed. In step S22, it is judged whether or not the absolute value of the change amount ΔΤγ of the required temperature ^ is equal to or greater than α. Here, the critical value α is used to determine whether it is as described above.

The case where the control towel cannot quickly bring the temperature of the controlled object to the required change by the feedback control. Further, in the case where it is judged that the threshold value is decreased, the deviation control execution flag is turned on in step S24, and the timing operation is started to time the deviation control time. When the processing of the gentleman pot, the tenth processing...朿 in the above step S24, or the determination in the step S20 is affirmative, in step S26, it is judged whether the change amount „ | 艾里里 δγγ is greater than 0. The processing is used for judging Whether or not the requirement is made to open the temperature on the well, and in the case where the amount of change ATr is greater than 〇, step Sm is performed. - Stop Ding ^ S28. In step S28, the target value is

Tt is not determined as: the value of the specific compensation value /5 is subtracted from the temperature of the body in the heating line 4, and * iodine 4U. Here, the target value Tt 趟 拼 4> is closer to the temperature in the heating pipe 40, then 2238-9394-PF; Ahddub 20 200842539 • The temperature of the controlled object can be increased faster. However, in the case where the target value Τΐ is higher than the temperature in the heating pipe 4G, the control cannot be performed. Moreover, the degree of / inside the heating line 4 can be made by circulating the fluid in the heating line 4 . Therefore, 'the target value Tt is set to the temperature in the heating line minus the compensation value; 5 〇 On the other hand, in the case where it is judged in step S26 that the amount of change ATr is lower than 〇, the target value Tt is set in step S30. A specific compensation value ^ is added to 1 degree of the fluid in the cooling line 2〇. Here, the setting of the compensation value ^ has the same meaning as the setting of the above-described compensation value /3. The setting of the target value Tt in the processing of steps S28 and S30 is continued within the deviation continuing time Tbi (step S32). Moreover, after the deviation continues

After Tbl, in step S34, the target value Tt is set to the required temperature Td. Then, the deviation control execution flag is turned off (〇 ff) and the timing operation for counting the deviation control time is ended. Furthermore, when the processing of step S34 is ended, or if the determination in steps S22 A S32 is negative, the series of processing ends. Fig. 6 is a view showing the processing procedure of the temperature control in the present embodiment. This processing is repeatedly performed periodically by the control device 50. In the series of processes, first in step S4, it is judged whether the open loop control flag of the flag indicating the execution of the open loop control is ON (and), and in the case where the open loop control flag is not turned on. Go to step S42. In step S42, it is judged whether or not the absolute value of the change amount of the target value ^ is at the critical value £m, and if it is determined to be equal to or greater than the critical value, in step S44, the flag indicating that the open loop control is executed is made. The open loop control flag is on and the timing action is started to time the open 2238-9394-PF; Ahddub 21 200842539 loop control. When the above-mentioned step S44 is in the middle, the mouth, or the step S40 is judged to be 疋%, the process proceeds to step S46. In the step, it is judged whether the target value Tt is high or not: the fluid in the bypass pipe 3〇 detected by the temperature sensor 36 is used to determine the use of the bypass pipe 3G and the heating pipe 40. Open loop control is performed, or the bypass circuit 30 and the cooling line 20 are used to perform open loop control. Then, in a case where it is judged that the target temperature Tt is higher than the temperature Tbm of the fluid in the bypass pipe 3, step S48 is performed. In step (4), the bypass tube 3 is used and the heating path 40 is used to perform open loop control. That is, if the target temperature gate is at the temperature Tb of the fluid in the square port f 30, the use of the cooling pipe is only a waste of energy. Therefore, the bypass pipe 3G and the heating pipe 4G are used to perform the open circuit control. In detail, the temperature Tc of the heating temperature sensor 46 and the flow rate Fc of the heating machine 48, and the temperature Tb of the side common temperature sensor 36 and the flow rate Fb of the bypass general flow meter 38 are used to operate the heating. The valve 44 and the bypass valve 34 are used to make the temperature of the fluid output to the temperature adjustment portion n a target value.

Tt. In other words, the heating valve 44 and the bypass valve 34 are operated so that the following formula is established.

Ttx (Fc + Fb) = TcxFc + TbxFb On the other hand, in step S46, when it is judged that the target temperature Tt is lower than the temperature Tb of the fluid in the bypass pipe 30, step S50 is performed. In step S50, the open loop control is performed using the bypass pipe 3〇 and the cooling pipe 2〇. That is, if the target temperature Tt is lower than the temperature Tb of the fluid in the bypass pipe 30, the use of the heating pipe 40 is only a waste of energy, so the bypass pipe 3 and the cooling pipe 20 are used to perform the open circuit control. In detail, the cooling temperature 2238-9394-PF is used; Ahdub 22 200842539 The temperature Ta of the sensor 26 and the flow rate Fa of the cooling flow meter 28, and the temperature Tb of the side common temperature sensor 36 and the bypass general flow meter The flow rate Fb is set to operate the cooling (four) 24 and the bypass (four) 34' such that the temperature of the fluid that is rotated out to the temperature regulating portion ii is the target value Tt. In other words, the cold portion (four) 24 & side common valve 34 is operated so that the following formula holds.

Ttx (Fa + Fb) = TaxFa + TbxFb When the processing of the above steps S48 and S50 is completed, a step chat is performed. In step S52, it is judged whether or not a specific period τ 〇 ρ has elapsed. Here, the specific period Top is used to determine the time during which the open loop control continues. In the present embodiment, the specific period TqP is set to be less biased in order to make the deviation control time different from the target temperature φ and the required temperature Tr according to the processing shown in FIG. 5 described above. In the case where it is judged that the specific period τ 〇 ρ has been passed, in the step Na, the open circuit (four) is flagged as __), and the timing operation for timing the open loop control is ended. In addition, when the process of step S54 is completed, or the determination in steps S42 and S52 is negative, the process of "continuing the series of processes is completed." Fig. 7 shows the temperature in the case where the processes of Figs. 6 and 5 are simultaneously used. As shown in the figure, the temperature of the controlled object can reach the target value h quickly compared to the case shown in Fig. 4. By the present embodiment described above, the latter can be obtained. The temperature control device of the state has a heating pipe that heats and circulates the body to the temperature regulating portion 11; the cooling pipe 2, which circulates the flow to the temperature regulating portion 11; Tube 3〇, which makes the fluid not The heating line 4 and the cooling line 2〇 are circulated to the temperature regulating unit ιι; the heating is used for 2238-9394-PF; the Ahddub 23 200842539 (5) 44, the cooling off 24, and the bypass 34 are respectively adjusted to pass through the heating. The flow path area on the downstream side of the line 40, the cooling line 2〇, and the downstream side of the bypass line 3〇, whereby the controlled object can be controlled when the temperature of the controlled object is controlled to a desired temperature The temperature quickly reaches the desired temperature. (2) The heating line 4〇 and the cooling line 2 () share the bypass tube. Thereby, when the fluid is output from the heating line 40 and the bypass line 3〇 to the temperature regulating unit u In the case where the fluid is supplied from the cooling line 2Q and the bypassing f 3 () to the temperature regulating unit ,, a common bypass pipe 30 can be used. Therefore, it is necessary to use an individual bypass. In the case of the tube, the configuration of the temperature control device can be simplified. (3) The temperature control device of the present embodiment further includes a pump 18 that sucks the fluid of the temperature adjustment portion 11 and outputs it to the heating pipe. Pipe 2〇, and the bypass pipe 3G. Compared with the heating pipe 40, the cooling pipe 20, and the side The downstream side of the pipe 3G and the upstream side of the temperature adjustment unit n are placed on the upstream side of the heating pipe 40, the cooling pipe 2G, and the bypass f 3q, whereby the heating valve 44 and the cooling can be shortened. „24. The flow path of the fluid between the bypass (four)% and the temperature regulation unit n^. Therefore, the fluid output from the heating use 44, the cold portion valve 24, and the bypass valve 34 can be quickly reached to the temperature adjustment unit 11 Moreover, the temperature of the temperature adjustment unit 11 can be more quickly reached the desired temperature. (4) In the temperature control device of the present embodiment, in the heating line 4, the: conduit 20, the bypass tube 3Q A storage tank 16 for storing a fluid is disposed on the upstream side and the temperature regulating portion_downstream side, and the upper portion of the storage tank 16 is filled with gas. Thereby, it is possible to absorb the volume change of the fluid due to the temperature, and the fluid dragon product changes regardless of the temperature, and (4) the circulation of the appropriate body. (#) The output temperature detected by the temperature of the fluid adjacent to the temperature adjustment unit n is detected 2238-9394-PF; Ahdub 24 200842539 The detection value Td obtained by the 51 is feedback control of the target value Tt. Thereby, the detected value Td can be accurately reached to the target value Tt. (6) In the above feedback control, the basic operation amount MB is converted into the heating pipe 4〇, cooling according to the difference of the detection value Td with respect to the target value; the channel area of the individual channel 2〇 and the bypass officer 30 Operation amount (opening degree ν &, vb, Vc). Thereby, the flow path area of the above-mentioned "pipes" can be operated (adjusted) in accordance with a single basic operation amount Μβ. (7) The feedback control is not used in the specific period after the target value Tt is changed, and the temperature of the fluid adjacent to the temperature adjustment unit u is controlled by the open circuit according to the detection value of the bypass temperature detecting device % detecting the temperature of the bypass pipe 30. . Thereby, even if the feedback control is set to suppress the detection value 1 (the fluctuation 1 in the target value Ttji), the reactivity at the time when the target value Tt changes can be improved. (8) When the target value Tt changes, the bypass is performed. When the temperature of the fluid in the tube 3 is higher than the target value Tt, the flow path area of the bypass pipe 3〇 and the cooling pipe 20 is operated, whereby the open circuit controls the temperature of the temperature control unit to The target value Tt, when the temperature of the fluid in the bypass pipe 30 is lower than the target value, the flow path area of the bypass pipe 30 and the heating pipe 4〇 is operated, thereby controlling the temperature adjustment by the open circuit The temperature of the portion η is set to the target value. Thereby, the open loop control can be performed while reducing the amount of energy consumption. (9) When the request for the temperature of the temperature adjustment unit 11 is changed, the target value is set Π The temperature change portion 11 or the temperature of the controlled object can be more quickly changed toward the required temperature. [Second embodiment] The second embodiment is described below. The difference between it and the implementation form is 2238-9394-PF /Ahddub 25 200842539 The center is described with reference to the drawings. Fig. 8 shows the overall configuration of the temperature control device according to the present embodiment. As shown, in the present embodiment, the outflow line 60 is connected to the cooling line. 20 is interposed between the cooling weft temperature sensor 26 and the cooling valve 24 so that the fluid in the cooling official passage 20 flows out to the outflow line 14. In addition, the outflow line 62 is connected to the heating line 4 The heating temperature sensor 46 and the heating valve 44 are arranged such that the fluid in the heating line 4〇 flows out to the outflow line 14. These outflow lines 60 and 62 are both smaller than the cooling line 20 and the heating line. The flow path area of 40 is much smaller because the outflow lines 60 and 62 are closed when the cooling valve 24 or the heating valve 44 is closed, so that a small amount of fluid flows from the cooling line 20 or the heating line 40 to the outflow tube. In the case where the fluid is turbulent from the heating pipe 40 or the cooling pipe 2 to the temperature regulating portion 11, the downstream side of the heating valve 44 or the cooling valve 24 and the above-mentioned prohibited pipe There is a temperature gradient between the roads. Therefore, after the prohibition is lifted, the flow is out to the tone. The temperature of the fluid of the portion 11 is affected by the temperature gradient, and may cause the time required for the temperature of the temperature regulating portion 11 to reach the desired temperature to be elongated. Further, in this case, the temperature sensor 26 for cooling or heating The temperature of the temperature sensor 46 is detected to be deviated from the temperature in the vicinity of the cooling portion 22 or the temperature in the vicinity of the heating portion 42 due to the influence of the temperature gradient. Therefore, it is possible to control the open loop control when the target value Tt is changed. On the other hand, in the present embodiment, by providing the outflow lines 6A and 62, when the heating valve 44 or the cooling valve 24 is in the closed state, it is possible to flow out of the lines 60 and 62. The temperature gradient on the upstream side is appropriately suppressed, and the temperature of the temperature control portion can be quickly reached to the desired temperature. According to the present embodiment described above, in addition to the effects (1) to (8) of the first every 2238-9394-PF; Ahddub 26 200842539, the following (additional heat temperature) can be obtained. The upstream side of the heating chamber 44 in the sensor 46 and the cooling bucket μ L 冷却 in the cooling duct 20 can thereby more appropriately perform (four) [third embodiment] temperature control at the time of cardiac change. For the third embodiment, the center of the state is described with reference to the drawings. Zuowuwei Γ Figure 9 shows the basic operation amount grasping and cooling valve 24, the bypass valve 34, and the heating valve of the present embodiment. In the present embodiment, the opening degree 冷却 of the cooling chamber 24 and the opening degree Vb of the twisting valve 44 are set to be not fully closed at ordinary times. In the case where the operation cost is less than 0, the cooling (4) (four) degree % is significantly reduced in one direction as the MB in the soil (4) increases, and the minimum opening degree is (10) in the case where the basic operation amount is greater than 〇. Further, the opening degree Vb of the heating valve 44 is, in the case where the basic operation amount MB is larger than 〇, With the increase of the basic operation amount MB, the unidirectionally significant increase is performed, and the minimum opening degree (>〇) is obtained when the basic operation amount rib is smaller than the squat. Thus, the flow line 6 of the above-mentioned Fig. 8 is not provided. And 62, when the temperature control of the temperature stabilization unit u is mainly caused by the flow of the fluid from the bypass pipe 30, the temperature gradient on the upstream side of the cooling valve 24 or the heating shutoff 44 can be suppressed. In addition to the effects (1) to (8) of the above-described first embodiment, the following effects can be obtained. (11) The opening degree Va of the cooling valve 24 and the opening degree vb of the heating valve 44 are set. In order to prevent the temperature of the cooling unit u 2238-9394-PF and the Ahddub 27 200842539 from being faster, the temperature gradient of the upstream side of the cooling valve 44 or the heating valve 44 can be suppressed. [Fourth Embodiment] The following describes the fourth embodiment, and the description will be made with reference to the differences between the fourth embodiment and the first embodiment. In the first embodiment described above, the target is When the value Tt changes, the temperature adjustment unit 11 is attached by the open circuit. The temperature of the controlled object reaches the desired temperature more quickly. The gain value of the open loop control, the deviation duration Tbi, and the optimum value of the specific period τ 〇 ρ of the open loop control can be The temperature adjustment plate varies depending on the object to be controlled. On the other hand, when the user changes the controlled object, it is laborious to manually change these parameters. Therefore, in the present embodiment, the control device 5 Fig. 10 shows a program for the cooperation support processing of the present embodiment. This processing is repeatedly executed periodically by the control device 50. In the series of processing, first in step S7. Determine whether it is the mode (test mode) in which the open loop control is performed. Here, the presence or absence of the test mode may be determined, for example, by the control device 50 having a function for allowing the user to instruct the test mode. Further, when it is determined that the test mode is selected, the option of the deviation relay time Tbi is displayed in «S72 + in a display manner that the user can visually confirm. Here, the option of the deviation continuation time 系 is set to 侍 to the range of appropriate values for the controlled object preset in the temperature control device. ... In step S74, it is judged whether or not the deviation continuing time 输入 is input. This processing is one of the options for determining whether or not the user selects the deviation continuation time Tbi. And 'in the case where it is judged that the user has selected a specific option (step S74: YES)' In step S76, the selected option is used to start temperature control. 2238-9394-PF; Ahddub 28 200842539. Then, when the temperature control ends, in step S78, the user is asked to visually confirm the display mode to ask the user whether to decide the deviation continuation time ^ and, if the user inputs In the case of the determined command (step·•No), the processing of steps S72 to S78 described above is re-executed. On the other hand, when the user inputs an instruction to use either of the previously selected options as the final deviation continuation time Tbi (step s8: YES), in step S82, the deviation continuation time ΤΜ is memorized. Furthermore, when the processing of step S82 ends, or if the determination in step S7 is negative, the series of processing ends. According to the present embodiment described above, in addition to the effects (1) to (9) of the above-described third embodiment, the following effects can be obtained. (12) An open loop control cooperation support device is provided which urges the user to select any one of the plural options of the deviation continuing time Tbi, and performs temperature control corresponding to the selected value. Thereby, it is possible to reduce the labor of the user of the temperature control device when the open circuit control is matched with the corresponding open circuit control. [Other Embodiments] Further, the above embodiments may be implemented as described below. According to the fourth embodiment described above, the second and third embodiments may be changed from the point of change of the i-th embodiment. < • In the fourth embodiment described above, the matching parameter at the time of performing the cooperation support of the open loop control is not limited to the deviation continuation time, for example, the duration of the open loop control (specific period τ 〇 ρ As a matching parameter, I also. Further, for example, the setting of the target value (compensation value /3, r) in the deviation control shown in Fig. 5 may be used as the matching parameter. Furthermore, a plurality of the above parameters may be used as the matching parameters. 29 2238-9394-PF; Ahddub 200842539 • In the fourth embodiment described above, the user is required to select an appropriate matching parameter corresponding to the controlled object, but the method of cooperation is not limited thereto. For example, when the respective values of the deviation duration Tbi, the specific period τ〇ρ, the compensation values A, and τ t are arbitrarily set to (4) values for temperature control, the temperature of the controlled object (or the temperature of the temperature regulating plate 1〇) is monitored. When the delay time to reach the protection value of 1 mesh is not within the allowable range _, the process of changing the above parameter ^ at least one may be automatically performed. Thereby, since the open loop control can be automatically matched so that the delay time to reach the target value is allowed (4), the user's labor can be further reduced. The method of converting the basic operation amount MB into the operation amount of the cooling valve 24, the bypass common 阙3 center, and the heating valve 44 is not limited to those of the third and ninth embodiments. In the third and ninth diagrams, the operation amount of any one of the cooling valve 24, the bypass valve 34, and the heating valve 44 is changed for the target value and the temperature difference Δ_ with the detected value. However, it is not limited to this, for example, changing all the operations. Further, in the third and ninth diagrams, the respective operation amounts of the cooling chamber, the bypass switch 34, and the heating valve are the temperature difference Δ, or the coefficient of one or one time, but it is not This is limited. In the third embodiment, the cooling unit 24, the bypass unit 34, and the heating valve 44 may not be fully closed regardless of the basic operation amount MB, but it is not limited thereto. It is also possible to prohibit the cooling valve 24 and the heating valve 44 from being fully closed only when the basic operation amount is close to 〇. That is, since it is considered that the detected value Td is a target value before the required temperature ΊΥ change, the measured value Td is fixed, and therefore, only the change of the target value η should be prepared in this case. When the basic operation amount MB is close to the 〇, the cooling valve 24 and the heating valve 44 are prohibited from being fully closed. Furthermore, at this time, ^ 2238-9394-PF/Ahddub 30 200842539 The basic operation amount MB is lower than that in the case of 〇, and the operation amount of the passage portion 24 of the passage portion is larger than the operation of the heating valve 44 When the amount of change operation MB is larger than 〇, the change 1 in the operation amount of the basic (3) amp & human heat valve 44 is smaller than the amount of change in the operation amount of the cooling valve 24. ^ The outflow line 6 〇, 6 2 is not limited to the flute ο. It is not limited to the second embodiment (Fig. 8). For example, as shown in Fig. U, the flow out & 60' of the upstream side and the downstream side of the cooling valves 24 to 4 in the cooling line 20 is connected to the bypass portion 24, and the bypass Heating „44 to connect the upstream and downstream outflow lines 62 of the railing valve 44 in the heating line (9). Further, the outflow lines 60 and 62' are provided in the cooling temperature sensor 26 or Preferably, the downstream side of the heating temperature sensor 46 is provided. In each of the above embodiments, the specific period Top and the deviation continuing time Tbi in which the open loop control continues are set, but not limited thereto, which is not limited thereto. The feedback control is not limited to the PID control. For example, the ρι control or the 丨 control may be used. Here, for example, as in the above-described respective embodiments, in the configuration in which the open loop control is performed when the target value is changed, the feedback control is performed. The purpose is to make the detected value Td exactly coincide with the target value Tt at normal time, or to minimize the variation of the detected value Td. Therefore, as in the integral control, it is particularly suitable for the difference between the detected value Td and the target value Tt. Cumulative value, and The detection value Td is fed back to the target value Tt. • The open loop control is not limited to those exemplified in the above embodiment. For example, when the temperature of the fluid in the bypass pipe 30 is higher than the target value Tt, the cooling valve The setting of the opening degree of the 24 and the bypass valve 34 is also referred to as the ratio of the opening degree as shown in the above third drawing, and the temperature of the fluid in the bypass pipe 30 is 2238-9394-PF; Ahddub 31 200842539 When the degree _ is lower than the target value Tt, the setting of the opening degree of the heating valve 44 and the bypass common valve 34 may be referred to the ratio of the opening degree as shown in the above-mentioned third figure. Corresponding to the temperature of the fluid in the pipeline used, it is possible to perform the open loop control by calculating which opening ratio the two valves of the reservoir can reach the target value Tt, and in this way, it can be avoided The flow meter is used. Since the flow meter is immersed in the fluid, it is difficult to maintain its reliability in the temperature range between the temperature of the fluid in the heating line 4〇 and the temperature of the fluid in the cooling line 20 for a long time. Simple open loop control without flow meter Further, the opening ratio shown in FIG. 3 is not used. For example, when the temperature of the fluid in the bypass & 30 is higher than the target value Τΐ, the cooling valve 24 and the bypass valve 34 are used. The opening degree is set to correspond to a ratio of the difference between the target t value Tt of the fluid in the cooling line 2〇 and the difference between the target value Tt and the temperature of the fluid in the heating line 4〇. Similarly, the bypass is performed. When the temperature of the fluid in the tube 3 is lower than the target value Tt, the opening degree of the heating valve 44 and the bypass valve 34 is set to correspond to the difference between the temperature of the fluid in the bypass pipe 30 and the target value η. And the ratio of the target value Tt to the difference in temperature of the fluid in the heating line 40 is preferred. • It is not limited to the execution of the feedback control, and only the open loop control shown in steps S48 and S50 of Fig. 6 may be performed. Further, regardless of whether or not the target value has changed, the basic operation amount MB' determined by the open loop control shown in step S48AS5 of Fig. 6 is used to feedback the control, and the final basic operation amount MB may be calculated. Furthermore, conversely, only feedback control may be performed regardless of whether the target value changes. Even in this case, when the temperature change is required, the variation of the target value Tt is made more significant than the change of the required temperature Tr. That is, in the return shot, the reaction delay is reduced by 2238-9394-PF; Ahddub 32 200842539 and the decrease detection value Td are exchanged with each other for the target value Tt, but the feedback control is performed by feedback control. The gain value can reduce the reaction delay, so that the above variation can be reduced and the reaction delay can be reduced. The feedback control is not limited to being performed by converting the required amount of the feedback control (MB in the basic operation) into the insertion amount of the cooling valve 24, the bypass valve 34, and the heating valve 44, for example, according to the target value. Τΐ and the detected value T (i difference), the cooling valve 24, the bypass valve 34, and the heating valve 44 may be individually operated. However, even in this case, when the target value Τΐ is higher than In the case of the detected value Td, only the operation amount of the bypass valve 34 and the cooling valve 24 is changed, and when the target value Τΐ is lower than the detected value Td, only the bypass valve 34 and the heating valve 44 are used. The amount of operation is preferably a change target. • The storage device having a function of absorbing a volume change due to the temperature of the fluid is not limited to, as exemplified in the above embodiments, the storage tank 16 is not filled with fluid, but has The configuration of the space in which the gas is filled, for example, the storage tank 16 is filled with the fluid without gaps, and the volume of the storage tank 16 may vary depending on the pressure applied to the inner wall of the storage tank 6 by the fluid. • Above In the embodiment, the adjusting device for adjusting the flow ratio of the fluid flowing from the cooling line 20, the bypass pipe 3, and the heating pipe 40 to the temperature regulating plate 10 is a cooling valve 24, a bypass valve 34, and heating. The valve 44 is used, but it is not positive. For example, each of the plurality of pipes is provided, and a valve for respectively performing the two actions of the switch is provided, and the number of times the fluid is output to the temperature regulating plate is an operation amount. Further, a plurality of branch lines are prepared, and it is also possible to operate whether or not the two lines are connected to the downstream side of any one of the cooling unit 22, the heating unit 42, and the pump 18. Further, the cooling line 20 , Bypass pipe 30 and heating pipe 2238-9394-PF; Ahddub 33 200842539, once a knife, and a separate pump, by adjusting the output capacity of the flow ratio can be adjusted separately. The temperature regulating plate 10 is not limited to a thin rectangular parallelepiped plate-like element, and may be, for example, a thin cylindrical plate-shaped element. In short, the temperature regulating portion is provided in a plate-like element that can support the controlled object from vertically below. Yes, for example, the direct and controlled objects The temperature can be controlled by the side contact. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the overall configuration of a temperature control device according to a third embodiment of the present invention. Fig. 2 is a view showing the processing procedure of the feedback control of the same embodiment. Fig. 3 is a schematic view showing a method of setting the operation amount of the cooling valve, the bypass common valve, and the heating valve of the same embodiment. Fig. 4 shows the temperature control by the feedback control only in the same embodiment. The time chart of the temperature change of the controlled object in the case. Fig. 5 is a flow chart showing the procedure for setting the target value of the same embodiment. Fig. 6 is a flow chart showing the processing procedure of the open loop control of the same embodiment. Fig. 7 is a time chart showing the temperature change of the controlled object in the case where the open loop control is used at the same time. Fig. 8 is a view showing the overall configuration of a temperature control device according to a second embodiment of the present invention. Fig. 9 is a view showing a method of setting the operation amount of the cooling valve, the bypass common valve, the addition of 2238-9394-PF, the Ahddub 34 200842539, and the heat valve of the third embodiment. Fig. 10 is a flow chart showing the procedure of the open loop control cooperation support processing of the fourth embodiment. Fig. 11 is a view showing the overall configuration of a temperature control device according to a modification of the second embodiment of the present invention. Fig. 12 is a view showing the configuration of a conventional temperature control device.

[Main component symbol description] 10~ thermostat plate; 12~ confluence section; 16~ storage tank; 19~ branching section; 22~ cooling section; 26~ cooling temperature sensor; 30~ bypass pipe; 36~ Side common temperature sensor; 4 0~ heating line; 44~ heating valve; 48~ heating flow meter; 51~ output temperature sensor; 6 2~ outflow line. 11~temperature control section; 14~outflow pipeline; 18~pump; 20~cooling pipeline; 24~cooling valve; 28~cooling flowmeter; 34~side general valve; 38~side universal flowmeter; ~ heating section; 46~ heating temperature sensor; 50~ control device; 60~ outflow line; 2238-9394-PF; Ahddub 35

Claims (1)

200842539 X. Patent application scope: i. A temperature control device for controlling the temperature of the controlled object at a desired temperature by circulating a fluid to a warming portion disposed on the controlled object, characterized by including : a force ..., & the path, which heats the fluid and circulates it to the tempering section; and the & road, which cools the fluid and circulates it to the tempering section, bypassing i, Discharging the fluid to the temperature regulating portion without passing through the heating pipe and the cooling pipe; and adjusting the passage through the heating pipe, the cooling pipe, and the confluence of the side pipe And a flow ratio of the fluid outputted to the temperature regulating portion; the wetting device is disposed at the heating pipe, the cooling pipe, the downstream of the bypass pipe, and the upstream of the merging portion. 2. A temperature control device for controlling a temperature of a controlled object to a desired temperature by circulating a fluid to a temperature regulating portion disposed beside the controlled object, characterized in that: the heating pipe includes Heating the fluid and circulating it to the temperature regulating portion; however, cooling the fluid and circulating it to the temperature regulating portion; a bypass pipe that prevents the fluid from passing through the heating pipe and the The cooling pipe is circulated to the temperature regulating portion; and the wilting device adjusts the flow path area of the heating pipe, the cooling pipe, and the downstream side of the bypass officer, respectively. 3. The temperature control device of claim 2 or 2, wherein the bypass pipe is shared between the heating pipe and the cooling pipe. 36 2238-9394-PF; Ahddub 200842539. The temperature control device according to any one of claims 3 to 3, wherein an outflow pipe is provided on the heating pipe and the upstream side of the cooling pipe The road 'passes the adjustment device to cause the fluid to flow out. The temperature control device according to any one of the preceding claims, further comprising a pump that sucks a fluid on a downstream side of the temperature control portion and outputs the same to the heating pipe The cooling line and the bypass pipe. The temperature control device according to any one of claims 1 to 5, wherein the heating pipe, the cooling pipe, the upstream side of the bypass pipe, and the downstream side of the temperature regulating portion are disposed There is a storage device for storing the fluid, the storage device having a function of absorbing a volume change of the fluid due to temperature. 7. If you apply for a patent range! The temperature control device of any of the above-mentioned items, further comprising an operating device that operates the adjusting device to control the temperature of the fluid adjacent to the temperature regulating portion to a target value. 8. The temperature control device according to claim 7, wherein the operation device performs feedback control on the target value by the detected value obtained by the output temperature detecting means for detecting the temperature of the fluid adjacent to the temperature regulating portion. 9. The temperature control device according to claim 8, wherein the adjusting device is a device for dividing the heating circuit, the cooling (four), and the flow path area on the downstream side of the bypass pipe; The operating device includes a Korean trailer & ', and converts the amount according to the difference between the detected value and the light value into the camping camp, the road, the cold camp road, and the individual of the bypass pipe The flow area area operation amount. 10. If the operating device operates the temperature control device described in item 8 or in the specific range of the target value 37 2238-9394-PF; Ahddub 200842539 'does not use the above feedback Control, and according to the detection value of the bypass temperature detecting device for detecting the temperature of the bypass pipe, the temperature of the fluid adjacent to the temperature regulating portion is controlled by an open circuit. 11. The temperature control device according to claim 1Q, wherein the adjustment device is a device for separately adjusting a flow path area of the heating pipe, the cooling pipe, and a downstream side of the bypass pipe; When the target value is changed, when the temperature of the fluid in the bypass pipe is higher than the target value, 'operating the bypass pipe and the flow path area of the cooling pipe', the open circuit controls the The temperature of the temperature regulating portion reaches a target value, and when the temperature of the fluid in the bypass pipe is lower than the target value, the flow path area of the bypass pipe and the heating pipe is operated, thereby controlling the adjustment by the open circuit The temperature of the warmth reaches the target value. 12. The temperature control device of any one of clauses 7 to 5, further comprising a transition time target value comparison device, wherein the condition of the temperature of the temperature adjustment portion is changed, The target value changes more dramatically than the required change. The temperature control device according to any one of claims 10 to 12, further comprising an open loop control cooperation support device, which requires selection of a gain value for the open loop control, and a duration of the open loop control Any one of a plurality of options of at least one of a time and a target value at the time of the open loop control, and the temperature control is performed corresponding to the selected value. 14. The temperature control device according to any one of claims 7 to 13, wherein the adjusting device is configured to separately adjust the heating circuit 'the cooling official road, the flow path on the downstream side of the bypass pipe The device of the area; the operating device, in the case where the temperature of the temperature regulating portion is in a constant state, 2238-9394-PF; Ahddub 38 200842539, the flow regulating the heating pipe and the cooling pipe by the adjusting device is prohibited The area of Zun Road is 〇. 2238-9394-PF; Ahddub 39