TWI427450B - Temperature control device - Google Patents

Description

Temperature control device

The present invention relates to a temperature control device for controlling a temperature of a controlled object to a desired temperature by circulating a fluid to a temperature regulating portion disposed beside the controlled object.

Figure 12 shows such a temperature control device. The flow system in the storage tank 100 is sucked by the pump 102 and discharged to the heating unit 104. The heating unit 104 has a heater that can heat the fluid output to the temperature adjustment unit 106. The fluid passing through the temperature adjustment unit 106 is output to the cooling unit 108. The fluid output to the storage tank 100 can be cooled by the cooling portion 108. The temperature adjustment unit 106 is configured to support the controlled object, and controls the temperature of the controlled object supported by the temperature adjustment unit 106 by adjusting the temperature of the fluid supplied to the temperature adjustment unit 106. Here, when the temperature of the controlled object is to be increased, the fluid is not cooled in the cooling portion 108, and the fluid is heated in the heating portion 104. On the other hand, when the temperature of the controlled object is to be lowered, the fluid is cooled in the cooling portion 108, and the fluid is not heated in the heating portion 104. Thereby, the temperature of the controlled object can be controlled at a desired temperature.

In addition to the one shown in FIG. 12, the temperature control device of the past is also described in Patent Document 1 which will be described later.

Patent Document 1: JP-A-2000-89832

However, the temperature of the controlled object is changed by the above temperature control device The desired temperature takes a long time. In other words, in order to cool the temperature of the controlled object, it is necessary to stop the heating of the heating unit 104 and start the cooling of the cooling unit 108. However, even after the heating unit 104 stops heating, it is temporarily left because of the residual heat. The high temperature fluid flows out of the heating portion 104. Moreover, even if the cooling portion 108 starts to cool, it takes time for the fluid to actually be cooled, and it takes a longer time for the temperature of the fluid in the storage tank 100 to drop. Therefore, the temperature of the temperature control portion 106 cannot be quickly changed, so that the temperature of the controlled object cannot be changed rapidly.

The present invention has been made to solve the above problems, and an object thereof is to provide a temperature control device that circulates a fluid to a temperature adjustment portion disposed beside a controlled object to control a temperature of the controlled object at a desired temperature. The temperature of the controlled object can quickly reach the desired temperature.

The means for solving the above problems and the effects thereof will be described below.

The means 1 is that the temperature control means controls the temperature of the controlled object to a desired temperature by circulating the fluid to the temperature regulating portion disposed beside the controlled object, and is characterized by comprising: a heating pipe; Heating and circulating the fluid to the temperature regulating portion; cooling a conduit that cools the fluid and circulates it to the temperature regulating portion; a bypass tube that prevents the fluid from passing through the heating conduit and the cooling The pipeline is circulated to the temperature adjustment unit, and the adjustment device adjusts a flow ratio of the fluid that is output to the temperature adjustment unit through the junction of the heating conduit, the cooling conduit, and the bypass conduit. The adjusting device is disposed at the heating pipe, the cooling pipe, the downstream of the bypass pipe, and the upstream of the merging portion.

In the above-described means 1, the temperature of the fluid output to the temperature regulating portion can be adjusted by adjusting the flow ratio of the fluid that is output to the temperature regulating portion through the heating pipe, the cooling pipe, and the bypass pipe. Change quickly. Especially because of the flow The ratio is adjusted at the heating line, the cooling line, the downstream of the bypass pipe, and the upstream of the merging portion, and the distance between the adjustment position of the flow ratio and the temperature adjustment portion can be shortened as much as possible. The temperature of the fluid output to the temperature adjustment portion can be changed more rapidly. Therefore, when the temperature of the controlled object is controlled to a desired temperature, the temperature of the controlled object can be quickly reached to the desired temperature.

Further, it is preferable to make the flow path area of the merging portion as small as possible so that the flow velocity of the fluid flowing through the heating pipe, the cooling pipe, and the bypass pipe is as low as possible. Here, the flow velocity of the fluid is the velocity at which the fluid travels in the flow direction.

Furthermore, the adjusting device adjusts the flow ratio of the output to the temperature regulating portion through the heating pipe, the cooling pipe, and the bypass pipe, respectively.

The means 2 is that the temperature control means controls the temperature of the controlled object to a desired temperature by circulating the fluid to the temperature regulating portion disposed beside the controlled object, and is characterized by comprising: a heating pipe; Heating and circulating the fluid to the temperature regulating portion; cooling a conduit that cools the fluid and circulates it to the temperature regulating portion; a bypass tube that prevents the fluid from passing through the heating conduit and the cooling The pipeline is circulated to the temperature regulating portion; and an adjusting device that adjusts a flow path area of the heating pipe, the cooling pipe, and the downstream side of the bypass pipe, respectively.

In the above-described means 2, by adjusting the flow path area on the downstream side of the heating pipe, the cooling pipe, and the bypass pipe, the heating pipe, the cooling pipe, and the bypass pipe can be adjusted and output to the temperature control unit. The flow ratio. Therefore, the temperature of the fluid output to the temperature adjustment portion can be quickly changed. Therefore, when the temperature of the controlled object is controlled to a desired temperature, the temperature of the controlled object can be quickly reached to the desired temperature.

Means 3 is that the bypass pipe is between the heating pipe and the cooling pipe Share.

In the above-described means 3, in the case where the fluid is output from the heating pipe and the bypass pipe to the temperature regulating portion, and the fluid is output from the cooling pipe and the bypass pipe to the temperature regulating portion, the same bypass pipe can be used. . Therefore, the configuration of the temperature control device can be simplified as compared with the case where an individual bypass pipe must be used.

In the means 4, on the upstream side of the heating pipe and the cooling pipe, an outflow pipe is provided which causes the adjusting device to bypass the fluid to flow out.

When the fluid is not output from the heating pipe or the cooling pipe to the temperature regulating portion, a temperature gradient is generated between the downstream side of the regulating device and the above-mentioned prohibited pipe. Therefore, after the prohibition is released, the temperature of the fluid flowing out to the temperature regulating portion is affected by the temperature gradient, and the time required for the temperature of the temperature regulating portion to reach the desired temperature may be elongated. In this regard, in the above-described means 4, by providing the outflow line, the temperature gradient on the upstream side of the outflow line can be appropriately controlled, and the temperature of the temperature adjustment part can be quickly reached to the desired temperature.

Further, in the means 4, a heating side temperature detecting means may be disposed on the upstream side of the adjusting means to detect the temperature of the heating line, and a cooling side temperature detecting means may be disposed on the upstream side of the adjusting line from the cooling line to Detect its temperature. In this case, by providing the outflow line, it is possible to appropriately suppress the influence of the temperature gradient caused by the flow of the fluid from the heating pipe or the cooling pipe to the temperature regulating portion.

The means 5 further includes a pump that sucks the fluid on the downstream side of the temperature regulating portion and outputs it to the heating pipe, the cooling pipe, and the bypass pipe.

In the above means 5, the pump can be used to circulate the fluid. In particular, the pump is disposed in the heating pipe, the cooling pipe, and the bypass as compared with the downstream side of the heating pipe, the cooling pipe, and the bypass pipe and on the upstream side of the temperature regulating portion. On the upstream side of the tube, the flow path of the fluid between the adjusting device and the temperature regulating portion can be shortened. Therefore, the fluid output from the regulating device can be quickly reached to the temperature regulating portion, and the temperature of the temperature regulating portion can be more quickly reached to the desired temperature.

The means 6 is provided with a storage device for storing the fluid on the heating pipe, the cooling pipe, the upstream side of the bypass pipe and the downstream side of the temperature regulating portion, the storage device having the temperature of absorbing the fluid The function of producing volume changes.

In the case where the volume of the fluid changes with temperature, the volume of the fluid changes due to the temperature change of the fluid, and the fluid may be hindered. In this regard, in the means 6, since the storage means has a function of absorbing the volume change of the fluid due to the temperature, the circulation of the fluid can be maintained even in the case where the volume of the fluid changes. Further, the storage device is disposed on the heating pipe, the cooling pipe, the upstream side of the bypass pipe, the downstream side of the temperature control portion, and the upstream side of the temperature control portion. The heating duct, the cooling duct, the upstream side of the bypass duct, and the upstream side of the temperature regulating portion can shorten a flow path of the fluid between the adjusting device and the temperature regulating portion.

The means 7 further includes an operating device that operates the adjusting device to control the temperature of the fluid adjacent to the temperature regulating portion to a target value.

In the above means 7, by providing an operating device, the temperature of the temperature control unit can be adjusted to a desired temperature.

In the means 8, the operating means controls the detection value obtained by the output temperature detecting means for detecting the temperature of the fluid adjacent to the temperature regulating portion to the target value.

In the above means 8, since the feedback control is executed, the detected value can be accurately reached to the target value.

In the means 9, the adjusting device is a device for respectively adjusting the heating pipe, the cooling pipe, and the flow path area on the downstream side of the bypass pipe; the operating device includes a switching device which will be based on the detected value and The amount of difference in the target value is converted into an operation amount of the individual flow path area of the heating pipe, the cooling pipe, and the bypass pipe.

In the above-described means 9, by providing the conversion means, since the difference between the detected value and the target value is quantified into a single amount, the flow of the above three pipes can be adjusted (operated) according to the quantified amount. Road area.

Furthermore, it is preferable that the conversion device changes the flow path area of the cooling pipe and the bypass pipe with respect to the change of the difference when the detected value is larger than the target value, and the detected value is smaller than the target value. Next, the flow path area of the heating pipe and the bypass pipe is changed with respect to the change of the difference.

In the means 10, the operating device operates the adjusting device to control the detection value of the bypass temperature detecting device that detects the temperature of the bypass pipe in a specific period after the target value is changed, without using the feedback control, and in an open loop control The temperature of the fluid next to the temperature control unit.

When the target value is changed, in order to quickly reach the target value by the feedback control, it is required to increase the gain value of the control. Further, when the gain value of the control is increased, the amount of fluctuation in which the detected value fluctuates above and below the target value also increases. As described above, in the feedback control, the relationship between the improvement of the reactivity and the suppression of the fluctuation amount is mutually exchanged. In this case, in the means 10, the open loop control is used without the feedback control in the specific period after the target value change. Therefore, even if the feedback control is set to suppress the fluctuation amount of the detected value from moving up and down the target value, the target value can be increased. Reactivity when changing.

In the means 11, the adjusting device adjusts the heating pipe separately, a cooling pipe, a flow passage area on a downstream side of the bypass pipe; the operating device, when the target value is changed, if the temperature of the fluid in the bypass pipe is higher than the target value, operating the a flow path area of the bypass pipe and the cooling pipe, whereby the open circuit controls the temperature of the temperature regulating portion to a target value, and when the temperature of the fluid in the bypass pipe is lower than the target value, operating the The flow path area of the bypass pipe and the heating pipe, whereby the open circuit controls the temperature of the temperature control unit to a target value.

In the above-described means 11, the heating path is also used, and when the temperature of the fluid in the bypass pipe is higher than the target value, the flow path area of the bypass pipe and the cooling pipe can be operated. Reduce energy consumption. Furthermore, when the temperature of the fluid in the bypass pipe is lower than the target value, the flow path area of the bypass pipe and the heating pipe can be reduced as compared with the case where the cooling pipe is also used. Consumption.

The means 12 further includes a transition time target value setting means for causing the target value to vary more greatly than the required change when the request for the temperature of the temperature adjustment unit is changed.

In order to bring the temperature of the temperature adjustment unit to the target value after the target value is changed, it is necessary to change the temperature of the temperature adjustment unit by the temperature-regulated fluid, and therefore, a reaction delay occurs when the temperature is changed toward the target value. Further, in order to change the temperature of the controlled object, after the temperature of the temperature adjustment unit is changed, energy exchange must be performed between the controlled object and the temperature control unit, so that the reaction delay of the temperature change of the controlled object is more remarkable. Here, in the above-mentioned means 12, when the actual request is changed, the temperature of the temperature control unit or the controlled object can be quickly reached to the required temperature by making the target value change more greatly than the required change. .

The means 13 further includes an open loop control cooperation support device that requests a plural of at least one of a gain value of the open loop control, a duration of the open loop control, and a target value of the open loop control. Any of the options, and the temperature control is performed corresponding to the selected value.

In open loop control, the gain or duration, and the optimal setting of the target value vary with the object being controlled. Therefore, in the temperature control device, these parameters are fixed from the beginning, so that the controlled object cannot perform optimal open loop control. In this regard, in the means 13, by providing the cooperation supporting means, it is possible to reduce the labor of the user of the temperature control device when using the parameter in accordance with the controlled object.

In the means 14, the adjusting device is a device for respectively adjusting the heating pipe, the cooling pipe, and the flow passage area on the downstream side of the bypass pipe; the operating device has the temperature in the temperature regulating portion unchanged In the case of the state, the flow path area adjusted by the adjusting device to the heating pipe and the cooling pipe is prohibited to be zero.

In the case where fluid is prohibited from flowing from the heating pipe or the cooling pipe to the temperature regulating portion, a temperature gradient is generated between the downstream side of the regulating device and the above-mentioned prohibited pipe. Therefore, after the prohibition is released, the temperature of the fluid flowing out to the temperature regulating portion is affected by the temperature gradient, and the time required for the temperature of the temperature regulating portion to reach the desired temperature may be elongated. In this case, in the above-mentioned means 14, when the temperature of the temperature adjustment unit is in a constant state, the flow path area for adjusting the heating pipe and the cooling pipe by the adjusting device is prohibited from being 0, whereby It is possible to appropriately suppress the temperature gradient, and it is possible to make the temperature of the temperature control portion reach the desired temperature more quickly.

Furthermore, in the means 14, the heating side temperature detecting means may be provided on the upstream side of the adjusting means to detect the temperature of the heating line, and the cooling may be performed. The pipeline is provided on the upstream side of the regulating device, and a cooling side temperature detecting device is provided to detect the temperature thereof. In this case, by providing the outflow line, it is possible to appropriately suppress the influence of the temperature gradient caused by the flow of the fluid from the heating pipe or the cooling pipe to the temperature regulating portion.

[First embodiment]

Hereinafter, a first embodiment of the temperature control device of the present invention will be described with reference to the drawings.

Fig. 1 is a view showing the overall configuration of a temperature control device according to a first embodiment of the present invention.

The illustrated temperature control device is used in, for example, the field of biotechnology or the processing/manufacturing engineering, biological/chemical experiments, semiconductor manufacturing processes, or manufacturing processes of precision machines in the field of the chemical industry. The temperature control device has a temperature regulating plate 10. The temperature regulating plate 10, on which the controlled object is carried, is a plate-like element that can support the controlled object from vertically below, and exchanges thermal energy with the controlled object. In detail, a pipe (tempering portion 11) is provided inside the temperature regulating plate 10 for the non-compressible fluid that enters through the merging portion 12 (for liquid medium as a heat exchange medium (liquid temperature medium) Preferably, for flow, the temperature of the temperature regulating plate 10 is adjusted by the temperature of the fluid. Further, the controlled object is, for example, a chemical substance to be tested, a semiconductor wafer, a precision machine, or the like.

The fluid flowing in the temperature regulating plate 10 flows into the storage tank 16 through the outflow line 14. The storage tank 16 is filled with a liquid, but has a space in the upper portion thereof and injects a gas. Therefore, even if the volume of the fluid changes due to temperature changes, the change is absorbed by the gas as a compressive fluid. Therefore, it is possible to Avoid the obstruction of fluid flow due to fluid volume changes.

The fluid in the storage tank 16 is sucked by the pump 18 and output to the branching portion 19. Here, the pump 18 may be constituted by a diaphragm pump, a vortex pump, a cascade pump, or the like. The branching portion 19 is connected to the cooling duct 20, the bypass pipe 30, and the heating pipe 40.

The cooling duct 20 cools the fluid flowing in from the branching portion 19 and causes it to flow out to the merging portion 12. The cooling line 20 is provided with a cooling portion 22 covering a part thereof. The cooling unit 22 cools the fluid flowing from the branching portion 19 . In detail, the cooling portion 22 is provided with a conduit for cooling a fluid (water, oil, refrigerant) cooled to a specific temperature by which the fluid in the cooling conduit 20 is cooled. The cooling duct 20 has a curved piping structure between the upstream end portion and the downstream side end portion of the cooling portion 22, thereby expanding the volume in the cooling duct 20 in the cooling portion 22. Further, without using the curved structure, for example, the flow path area may be enlarged only in the cooling portion 22, thereby increasing the volume in the cooling portion 22.

Further, on the downstream side of the cooling duct 20, a cooling valve 24 for continuously adjusting the flow passage area in the cooling duct 20 is provided. Further, in the cooling pipe 20, upstream of the cooling valve 24, a cooling temperature sensor 26 for detecting the temperature of the fluid in the cooling pipe 20 is provided, and downstream of the cooling valve 24, a detecting cooling pipe is provided. A flow rate device 28 for cooling the mass flow or volume flow of the fluid in the road 20.

Further, in the cooling duct 20, the flow passage area is substantially fixed at a position further downstream than the cooling portion 22.

On the other hand, the bypass pipe 30 directly flows out of the fluid flowing from the branching portion 19 through the merging portion 12 to the temperature adjustment portion 11. On the downstream side of the bypass pipe 30, a bypass common valve 34 that continuously adjusts the flow passage area in the bypass pipe 30 is provided. and, In the bypass pipe 30, upstream of the side common valve 34, a side common temperature sensor 36 for detecting the temperature of the fluid in the bypass pipe 30 is provided, and downstream of the side common valve 34, a bypass pipe 30 is provided. A side-by-side flow meter 38 for mass flow or volumetric flow of the internal fluid.

The heating pipe 40 heats the fluid flowing in from the branching portion 19 and flows out to the merging portion 12. The heating pipe 40 is provided with a heating portion 42 covering a part thereof. The heating unit 42 heats the fluid flowing from the branching portion 19 . In detail, the heating portion 42 is provided with a conduit for flowing a fluid (water, oil, heat medium) heated to a specific temperature, by which the fluid in the heating conduit 40 is heated. The heating pipe 40 has a curved piping structure between the upstream end portion and the downstream side end portion of the heating portion 42, thereby expanding the volume in the heating pipe 40 in the heating portion 42. Further, the curved structure may not be used, and for example, the flow path area may be enlarged only in the heating portion 42.

Further, on the downstream side of the heating pipe 40, a heating valve 44 for continuously adjusting the flow path area in the heating pipe 40 is provided. Further, in the heating pipe 40, upstream of the heating valve 44, a heating temperature sensor 46 for detecting the temperature of the fluid in the heating pipe 40 is provided, and downstream of the heating valve 44, a detecting heating pipe is provided. A flow vessel 48 for heating the mass flow or volume flow of the fluid in the path 40.

Further, in the heating pipe 40, the flow path area is substantially fixed at a position further downstream than the heating portion 42.

The cooling line 20, the bypass pipe 30, and the heating pipe 40 are connected to the merging portion 12 at a position downstream thereof. Here, as compared with the flow path area of the cooling duct 20, the bypass pipe 30, and the heating pipe 40, the flow path area or the merging portion in the merging portion 12 is not enlarged as much as possible in a range where the fluid flow rate is not slowed down. 12 and temperature adjustment The flow path area between the sections 11 is preferred. In other words, the flow path area between the merging portion 12 or the merging portion 12 and the temperature regulating portion 11 is set so as to suppress the retention of the fluid due to the volume thereof, so as to flow out from the cooling valve 24 and the heating valve 44 as much as possible. The flow rate of the fluid does not decrease.

An output temperature sensor 51 for detecting the temperature of the fluid outputted from the temperature adjustment unit 11 is provided between the merging portion 12 and the temperature adjustment portion 11.

On the other hand, the control device 50 operates the cooling valve 24, the bypass valve 34, or the heating valve 44 in accordance with the required value of the temperature of the controlled object (required temperature Tr), thereby adjusting the temperature adjusting unit 11 The temperature of the fluid, and thereby indirectly controls the temperature of the controlled object on the temperature regulating plate 10. At this time, the control device 50 appropriately refers to the cooling temperature sensor 26, the bypass temperature sensor 36, the heating temperature sensor 46, the cooling flow rate 28, the bypass general flow device 38, and the heating flow rate 48. The detected value of etc.

Further, the control device 50 includes a drive unit for driving the cooling valve 24, the bypass valve 34, or the heating valve 44, and a calculation unit that calculates an operation signal output from the drive unit based on the detected values of the various detection devices. . The calculation unit may be constituted by a dedicated hardware device, and may also have a microcomputer. Furthermore, it is also possible to have a general-purpose personal computer and a program for making calculations.

According to the temperature control device described above, the temperature of the fluid in the temperature control unit 11 can be rapidly changed in accordance with the change in the required temperature Tr. That is, in the range where the temperature of the fluid in the cooling line 20 is lower than the required temperature Tr and the temperature of the fluid in the heating line 40 is higher than the required temperature Tr, regardless of the value of the required temperature Tr, it can be adjusted by The flow rate of the fluid flowing out of the cooling line 20, the bypass pipe 30, and the heating pipe 40 can rapidly change the temperature of the fluid in the temperature regulating portion 11. For the desired temperature.

Further, by providing the bypass pipe 30, the temperature control device can reduce the energy used to maintain the temperature in the temperature control unit 11 at a constant value. This is explained below.

For example, the fluid circulating in the temperature regulating portion 11 is water, the temperature in the cooling pipe 20 is 10 degrees Celsius, the temperature in the heating pipe 40 is 70 degrees Celsius, and the flow rate of the fluid flowing in the temperature regulating portion 11 is 20L. /Minute. Further, when the detected value Td of the output temperature sensor 51 is controlled to a steady state of 40 degrees Celsius, the temperature of the fluid flowing out of the temperature regulating portion 11 rises to 43 degrees Celsius. In this case, temperature control can be performed by causing the fluid of the cooling line 20 and the bypass pipe 30 to flow out to the temperature adjustment portion 11 and not using the fluid in the heating pipe 40. Explore the amount of energy consumed at this time.

When the flow rate of the fluid flowing out from the cooling pipe 20 to the temperature adjustment unit 11 is "Wa", the following formula is established.

20 (L / min) × 40 (°C) = 10 (°C) × Wa + 43 (°C) × (20-Wa)

This shows that Wa ≒ 1.8 L / min.

Therefore, the energy consumption amount Qa consumed in the cooling unit 22 is as follows.

Qc=(43-10)×1.8×60 (seconds)÷(860: conversion factor)=4.1kW

On the other hand, when the configuration of the bypass pipe 30 is not provided, the energy consumption amount Qa of the cooling unit 22 and the energy consumption amount Qc of the heating unit 42 are as follows.

Qa=(43-10)×10(L/min)×60 (seconds)÷860≒23kW Qc=(70-43)×10(L/min)×60 (seconds)÷860≒19kW

Therefore, the energy consumption amount Q is "42 kW", which is about 10 times that of the case where the bypass pipe 30 is provided.

Next, the temperature control performed by the control device 50 of the embodiment is detailed. First 2 is a view showing a processing procedure of the feedback control in the processing executed by the control device 50. For example, the processing is repeatedly performed periodically by the control device 50.

In the series of processes, first, in step S10, it is determined whether or not the open loop control is performed. This processing is to determine whether or not the execution condition of the feedback control is established. The open loop control is performed under the conditions described later, and the feedback control is not executed at this time.

If the determination in step S10 is NO, the detected value Td of the output temperature sensor 51 is obtained in step S12. In the next step S14, the basic operation amount MB for feeding back the detected value Td to the target value Tt is calculated. Here, the target value Tt is a value determined according to the required temperature Tr, and is regarded as a required temperature Tr at the time of feedback control. The basic operation amount MB is an amount calculated based on the difference of the detected value Td with respect to the target value Tt. In detail, in the present embodiment, the basic operation amount MB is calculated based on the PID (proportional differential integral) of the difference Δ between the detected value Td and the target value Tt.

Then, in step S16, the basic operation amount MB is converted into the individual operation amounts (opening degrees Va, Vb, Vc) of the cooling valve 24, the bypass common valve 34, and the heating valve 44. Here, the relationship shown in Fig. 3 is used. Here, in the case where the basic operation amount MB is less than 0, the opening degree Va of the cooling valve 24 is significantly reduced in one direction as the basic operation amount MB is increased, and in the case where the basic operation amount MB is larger than 0, 0. In this case, the more the detected value Td is higher than the target value Tt, the flow rate of the cooling duct 20 is increased, and in the case where the detected value Td is lower than the target value Tt, the cooling duct 20 is not used. set up. Further, in the case where the basic operation amount MB is larger than 0, the opening degree Vb of the heating valve 44 is unidirectionally increased as the basic operation amount MB is increased, and when the basic operation amount MB is less than 0, 0. In this case, the more the detected value Td is lower than the target value Tt, the more The flow rate of the heating line 40 is increased, and in the case where the detected value Td is higher than the target value Tt, the heating line 40 is set without being used. Further, the opening degree of the bypass valve 34 is significantly reduced unidirectionally as the basic operation amount MB is further away from zero. Further, in Fig. 3, the setting of each opening degree is such that the total flow rate flowing out of the three pipes does not change with the value of the basic operation amount MB.

By setting this, the basic operation amount MB is calculated based on the calculation of the single PID of the difference Δ between the detected value Td and the target value Tt, and the three valves of the cooling valve 24, the bypass valve 34, and the heating valve 44 can be set. The amount of operation.

When the process of step S16 in the second drawing described above is completed, in step S18, three valves of the cooling valve 24, the bypass valve 34, and the heating valve 44 are operated. In addition, when it is judged as negative in step S10, or when the process of step S18 is completed, this series of processes is ended.

By using the feedback control as described above, the detected value Td can be precisely changed in accordance with the target value Tt. However, in order to increase the reactivity of the detected value Td with respect to the target value Tt by the feedback control, it is necessary to increase the gain value of the feedback control, but when the gain value becomes larger, the fluctuation amount of the detected value fluctuates above and below the target value. . As a result, in the feedback control, the relationship between the reactivity with respect to the change in the target value Tt and the amount of change in the detected value Td is increased. Therefore, in the case of reducing the amount of variation, the reactivity is sacrificed. In the fourth diagram, the detected value Td and the temperature of the controlled object are changed when the feedback control is used when the target value Tt changes.

As shown in the figure, a reaction delay is generated before the detected value Td reaches the target value Tt, and it takes a longer time before the temperature of the controlled object reaches the target value Tt. In this case, in order to change the temperature of the controlled object, it is necessary to adjust the temperature. The temperature change of the portion 11 changes the temperature of the temperature regulating plate 10 through the exchange of heat energy between the temperature regulating plate 10 and the temperature regulating portion 11, and the heat energy generated between the temperature regulating plate 10 and the controlled object is exchanged. Therefore, in order to reduce the amount of fluctuation of the detected value Td, the feedback control is set, and it is difficult to quickly reach the target value Tt by the feedback control by the temperature of the controlled object. In the present embodiment, in the case where the required temperature Tr transmitted from the outside changes, open loop control is used. Further, at this time, the change in the target value Tt is made larger than the change in the required temperature Tr.

Fig. 5 is a view showing the procedure of the setting process of the target value in the present embodiment. This processing is repeatedly performed by the control device 50, for example, periodically.

In this series of processes, first, in step S20, it is judged whether or not the deviation control execution flag is ON. The deviation control execution flag here is a flag for performing deviation control for causing the target value Tt to vary greatly. Moreover, when the deviation control execution flag is on, step S22 is performed. In step S22, it is determined whether or not the absolute value of the amount of change ΔTr of the required temperature Tr is equal to or greater than the critical value α. Here, the threshold value α is used to determine whether or not the temperature of the controlled object cannot be quickly brought to the required change by the feedback control as in the above-described second drawing. Further, when it is determined that the threshold value α is equal to or greater than the threshold value α, the deviation control execution flag is turned on in step S24, and the timing operation is started to time the deviation control time.

When the processing of the above step S24 is ended, or if the determination in step S20 is affirmative, in step S26, it is judged whether or not the amount of change ΔTr is greater than zero. This process is used to determine whether a request to increase the temperature is generated. Further, in a case where the amount of change ΔTr is greater than 0, step S28 is performed. In step S28, the target value Tt is set to subtract the value of the specific compensation value β from the temperature of the fluid in the heating line 40. Here, the closer the target value Tt is to the temperature in the heating pipe 40, then The temperature of the controlled object can be increased faster. However, in the case where the target value Tt is higher than the temperature in the heating pipe 40, the control cannot be performed. Moreover, the temperature within the heating line 40 can be varied by circulating the fluid in the heating line 40. Therefore, the target value Tt is set to the temperature in the heating line 40 minus the compensation value β.

On the other hand, if it is determined in step S26 that the amount of change ΔTr is lower than 0, the target value Tt is set to the temperature of the fluid in the cooling duct 20 plus a specific compensation value γ in step S30. Here, the setting of the compensation value γ has the same meaning as the setting of the above-described compensation value β.

The setting of the target value Tt in the processing of steps S28 and S30 is continued within the deviation continuing time Tbi (step S32). Then, after the deviation continuation time Tbi has elapsed, the target value Tt is made the required temperature Td in step S34. Then, the deviation control execution flag is turned off (Off) and the timing operation for counting the deviation control time is ended. Furthermore, when the process of step S34 is completed, or if the determination in steps S22 and S32 is negative, the series of processes is ended.

Fig. 6 is a view showing the processing procedure of the temperature control in the present embodiment. This processing is repeatedly performed periodically by the control device 50.

In the series of processes, first, in step S40, it is judged whether or not the open loop control flag of the flag indicating the execution of the open loop control is ON. And, if the open loop control flag is not on, step S42 is performed. In step S42, it is determined whether or not the absolute value of the amount of change ΔTt of the target value Tt is equal to or greater than the critical value ε. Further, when it is determined that the threshold value is ε or more, in step S44, the open loop control flag of the flag indicating that the open loop control is executed is turned on, and the timing operation is started to be open. Loop control timing.

When the processing of the above step S44 is ended, or if the determination in step S40 is affirmative, step S46 is performed. In step S46, it is determined whether or not the target value Tt is higher than the temperature Tb of the fluid in the bypass pipe 30 detected by the bypass common temperature sensor 36. This processing is for determining whether to use the bypass pipe 30 and the heating pipe 40 to perform open loop control, or to use the bypass pipe 30 and the cooling pipe 20 to perform open loop control.

Next, when it is judged that the target temperature Tt is higher than the temperature Tb of the fluid in the bypass pipe 30, step S48 is performed. In step S48, the open loop control is performed using the bypass pipe 30 and the heating pipe 40. That is, if the target temperature Tt is higher than the temperature Tb of the fluid in the bypass pipe 30, the use of the cooling pipe 20 is only a waste of energy, so the bypass pipe 30 and the heating pipe 40 are used to perform the open circuit control. Specifically, the temperature Tc of the heating temperature sensor 46 and the flow rate Fc of the heating flow rate 48, and the temperature Tb of the bypass common temperature sensor 36 and the flow rate Fb of the bypass common flow meter 38 are used to operate the heating. The valve 44 and the bypass valve 34 cause the temperature of the fluid output to the temperature adjustment portion 11 to be the target value Tt. In other words, the heating valve 44 and the bypass valve 34 are operated such that the following equation is established.

Tt × (Fc + Fb) = Tc × Fc + Tb × Fb

On the other hand, in step S46, when it is judged that the target temperature Tt is lower than the temperature Tb of the fluid in the bypass pipe 30, step S50 is performed. In step S50, the bypass circuit 30 and the cooling line 20 are used to perform open loop control. That is, if the target temperature Tt is lower than the temperature Tb of the fluid in the bypass pipe 30, the use of the heating pipe 40 is only a waste of energy, so the bypass pipe 30 and the cooling pipe 20 are used to perform the open circuit control. In detail, use the cooling temperature The temperature Ta of the sensor 26 and the flow rate Fa of the cooling flow rate 28, and the temperature Tb of the bypass common temperature sensor 36 and the flow rate Fb of the bypass common flow meter 38 to operate the cooling valve 24 and the bypass valve 34, The temperature of the fluid output to the temperature adjustment unit 11 is made the target value Tt. In other words, the cooling valve 24 and the bypass valve 34 are operated such that the following equation is established.

Tt × (Fa + Fb) = Ta × Fa + Tb × Fb

When the processes of steps S48 and S50 described above are completed, step S52 is performed. In step S52, it is judged whether or not a specific period Top has passed. Here, the specific period Top is used to determine the time during which the open loop control continues. In the present embodiment, in order to prevent the feedback control from being performed within the deviation continuation time Tbi in which the target value Tt and the required temperature Tr are different according to the processing shown in the fifth embodiment, the specific period Top is set to be more variable. Time Tbi is long. Further, when it is determined that the specific period Top has passed, in step S54, the open loop control flag is turned off, and the timing operation for timing the open loop control is ended.

In addition, when the process of step S54 is completed or the determination in steps S42 and S52 is negative, the series of processes is ended.

Fig. 7 shows the temperature control pattern in the case where the processes of Figs. 6 and 5 are used at the same time. As shown in the figure, the temperature of the controlled object can quickly reach the target value Tt as compared with the case shown in Fig. 4 described above.

According to the present embodiment described in detail above, the effects described later can be obtained.

(1) The temperature control device of the present embodiment has a heating pipe 40 that heats and circulates the fluid to the temperature adjustment portion 11 and a cooling pipe 20 that cools the fluid and circulates it to the temperature adjustment portion. Part 11; a bypass pipe 30 that circulates the fluid to the temperature regulating portion 11 without passing through the heating pipe 40 and the cooling pipe 20; The valve 44, the cooling valve 24, and the bypass common valve 34 are respectively adjusted to pass through the flow path area on the downstream side of the heating line 40, the cooling line 20, and the bypass pipe 30. Thereby, when the temperature of the controlled object is controlled to a desired temperature, the temperature of the controlled object can be quickly reached to the desired temperature.

(2) The heating pipe 40 and the cooling pipe 20 share the bypass pipe 30. Thereby, in the case where the fluid is output from the heating pipe 40 and the bypass pipe 30 to the temperature regulating portion 11, and the fluid is output from the cooling pipe 20 and the bypass pipe 30 to the temperature regulating portion 11, common use can be used. Bypass pipe 30. Therefore, the configuration of the temperature control device can be simplified as compared with the case where an individual bypass pipe must be used.

(3) The temperature control device of the present embodiment further includes a pump 18 that sucks the fluid of the temperature adjustment portion 11 and outputs it to the heating pipe 40, the cooling pipe 20, and the bypass pipe 30. . The pump 18 is disposed on the heating pipe 40, the cooling pipe 20, and the pumping pipe 18, on the downstream side of the heating pipe 40, the cooling pipe 20, and the bypass pipe 30, and on the upstream side of the temperature regulating portion 11. The upstream side of the pipe 30 can shorten the flow path of the fluid between the heating valve 44, the cooling valve 24, the bypass valve 34, and the temperature control unit 11. Therefore, the fluid output from the heating valve 44, the cooling valve 24, and the bypass valve 34 can be quickly reached to the temperature adjustment unit 11, and the temperature of the temperature adjustment unit 11 can be more quickly reached the desired temperature.

(4) In the temperature control device of the present embodiment, a storage for storing a fluid is provided on the heating pipe 40, the cooling pipe 20, the upstream side of the bypass pipe 30, and the downstream side of the temperature regulating portion 11. The groove 16 and the upper portion of the storage tank 16 are filled with gas. Thereby, it is possible to absorb the volume change of the fluid due to the temperature, and to appropriately maintain the circulation of the fluid regardless of the volume change of the fluid caused by the temperature.

(5) detecting the output temperature of the fluid adjacent to the temperature adjusting portion 11 The detected value Td obtained by the device 51 is subjected to feedback control of the target value Tt. Thereby, the detected value Td can be accurately reached to the target value Tt.

(6) In the above feedback control, the basic operation amount MB is converted into the individual flow path area operation amount of the heating pipe 40, the cooling pipe 20, and the bypass pipe 30 in accordance with the difference of the detected value Td with respect to the target value Tt ( Opening degrees Va, Vb, Vc). Thereby, the flow path area of the above three pipes can be operated (adjusted) in accordance with a single basic operation amount MB.

(7) The feedback control value of the bypass temperature detecting means 36 for detecting the temperature of the bypass pipe 30 is not used in the specific period after the change of the target value Tt, and the temperature of the fluid adjacent to the temperature regulating portion 11 is controlled by the open circuit. . Thereby, even if the feedback control is set to suppress the fluctuation amount in which the detected value Td fluctuates up and down the target value Tt, the reactivity at the time of the change of the target value Tt can be improved.

(8) When the target value Tt changes, if the temperature of the fluid in the bypass pipe 30 is higher than the target value Tt, the flow path area of the bypass pipe 30 and the cooling pipe 20 is operated, Therefore, the open circuit controls the temperature of the temperature adjustment unit 11 to the target value Tt, and when the temperature of the fluid in the bypass pipe 30 is lower than the target value Tt, the bypass pipe 30 and the heating pipe 40 are operated. The flow path area, whereby the open circuit controls the temperature of the temperature adjustment unit 11 to a target value. Thereby, open loop control can be performed while reducing the amount of energy consumption as much as possible.

(9) When the request for the temperature of the temperature adjustment unit 11 is changed, the target value Tt is changed more largely than the required change. Thereby, the temperature of the temperature control unit 11 or the object to be controlled can be made to change toward the required temperature more quickly.

[Second embodiment]

The following is a description of the second embodiment, and the difference between the first embodiment and the first embodiment is The center explains this with reference to the drawings.

Fig. 8 is a view showing the overall configuration of a temperature control device according to this embodiment. As shown in the figure, in the present embodiment, the outflow line 60 is connected between the cooling temperature sensor 26 and the cooling valve 24 in the cooling line 20 so that the fluid in the cooling line 20 flows out to Flow out of line 14. Further, the outflow line 62 is connected between the heating temperature sensor 46 and the heating valve 44 in the heating line 40 so that the fluid in the heating line 40 flows out to the outflow line 14.

These outflow lines 60 and 62 are much smaller than the flow path areas of the cooling line 20 and the heating line 40. This is because the outflow lines 60 and 62 are caused to flow a small amount from the cooling line 20 or the heating line 40 to the outflow line 14 when the cooling valve 24 or the heating valve 44 is closed.

That is, when the flow of the fluid from the heating pipe 40 or the cooling pipe 20 to the temperature regulating portion 11 is prohibited, a temperature is generated between the downstream side of the heating valve 44 or the cooling valve 24 and the prohibited pipe. gradient. Therefore, after the prohibition is released, the temperature of the fluid flowing out to the temperature adjustment portion 11 is affected by the temperature gradient, and the time required for the temperature of the temperature adjustment portion 11 to reach the desired temperature may be elongated. Further, in this case, the temperature of the cooling temperature sensor 26 or the heating temperature sensor 46 is detected by the temperature gradient, and the temperature in the vicinity of the cooling portion 22 or the temperature in the vicinity of the heating portion 42 is detected. Therefore, it is possible to reduce the controllability of the open loop control when the target value Tt changes.

On the other hand, in the present embodiment, when the heating valve 44 or the cooling valve 24 is in the closed state by providing the outflow pipes 60 and 62, the outflow pipes 60 and 62 can be appropriately suppressed. The temperature gradient on the upstream side, and the temperature of the temperature regulating portion can reach the desired temperature more quickly.

According to the embodiment described above, in addition to the first real thing described above In addition to the effects of the above (1) to (9), the following effects can be obtained.

(10) The upstream side of the heating valve 44 in the heating temperature sensor 46 and the upstream side of the cooling valve 24 in the cooling line 20 are provided with the outflow lines 60 and 62. Thereby, the temperature control when the target value Tt is changed can be performed more appropriately.

[Third embodiment]

Hereinafter, the third embodiment will be described with reference to the differences between the first embodiment and the first embodiment.

Fig. 9 is a view showing the relationship between the basic operation amount MB of the present embodiment, the opening degrees Va, Vb, and Vc of the cooling valve 24, the bypass valve 34, and the heating valve 44. As shown in the figure, in the present embodiment, the opening degree Va of the cooling valve 24 and the opening degree Vb of the heating valve 44 are set to be not in the fully closed state. That is, in the case where the basic operation amount MB is less than 0, the opening degree Va of the cooling valve 24 is significantly reduced in one direction as the basic operation amount MB is increased, and in the case where the basic operation amount MB is larger than 0, Minimum opening (>0). Further, in the case where the basic operation amount MB is larger than 0, the opening degree Vb of the heating valve 44 is unidirectionally increased as the basic operation amount MB is increased, and when the basic operation amount MB is less than 0, Minimum opening (>0).

Therefore, when the temperature control of the temperature adjustment unit 11 is stabilized by the flow of the fluid mainly flowing through the bypass pipe 30, the cooling valve 24 or the heating valve can be suppressed. The temperature gradient on the upstream side of 44.

According to the present embodiment described above, in addition to the effects (1) to (9) of the first embodiment described above, the following effects can be obtained.

(11) The opening degree Va of the cooling valve 24 and the opening degree Vb of the heating valve 44 are set to be not in the fully closed state. Thereby, the temperature gradient on the upstream side of the cooling valve 24 or the heating valve 44 can be suppressed, and the temperature adjustment unit 11 can be caused. The temperature reaches the desired temperature faster.

[Fourth embodiment]

Hereinafter, the fourth embodiment will be described with reference to the differences between the first embodiment and the first embodiment.

In the first embodiment described above, when the target value Tt changes, the temperature in the vicinity of the temperature adjustment unit 11 is controlled by the open circuit, so that the temperature of the controlled object reaches the desired temperature more quickly. The gain value of the open loop control, the deviation continuation time Tbi, and the optimum value of the specific period Top for continuing the open loop control may vary depending on the temperature regulating plate 10 or the controlled object. On the other hand, when the user changes the controlled object, it is very laborious to manually change these parameters. Therefore, in the present embodiment, the control device 50 is further provided with a cooperation supporting device. Fig. 10 is a view showing the procedure of the cooperation support processing of this embodiment. This processing is repeatedly performed periodically by the control device 50.

In the series of processes, first, in step S70, it is determined whether or not the mode (test mode) in which the open loop control is performed is performed. Here, for example, the presence or absence of the test mode may be determined by the control device 50 having a function for allowing the user to instruct the test mode. Further, when it is determined that the test mode is present, in step S72, the option of the deviation continuing time Tbi is displayed in a display manner that the user can visually confirm. Here, the option of the deviation continuation time Tbi is set such that a range of appropriate values for the controlled object preset in the temperature control device can be obtained.

In step S74, it is determined whether or not the deviation continuing time Tbi is input. This processing is one of the options for determining whether the user selects the deviation continuation time Tbi. And, in the case where it is judged that the user has selected a specific option (step S74: YES), in step S76, the selected option is used to start temperature control. Then, when the temperature control ends, in step S78, the user is asked whether or not to determine the deviation continuation time Tbi in a display manner that the user can visually confirm. When the user inputs an instruction that is not determined (step S80: NO), the processing of steps S72 to S78 described above is re-executed.

On the other hand, when the user inputs an instruction to use any one of the previously selected options as the final deviation continuation time Tbi (step S80: YES), in step S82, the deviation continuation time Tbi is memorized. Furthermore, when the process of step S82 ends, or if the determination in step S70 is negative, the series of processes is ended.

According to the present embodiment described above, in addition to the effects (1) to (9) of the first embodiment described above, the following effects can be obtained.

(12) An open loop control cooperation support device is provided which urges the user to select any one of the plural options of the deviation continuing time Tbi, and performs temperature control corresponding to the selected value. Thereby, it is possible to reduce the labor of the user of the temperature control device when the open circuit control is matched with the corresponding open circuit control.

[Other implementations]

Furthermore, each of the above embodiments may be implemented as described below.

. According to the fourth embodiment described above, the second and third embodiments may be changed from the point of change of the first embodiment.

. In the fourth embodiment described above, the fitting parameter at the time of performing the cooperation support of the open loop control is not limited to the deviation continuing time Tbi. For example, the duration of the open loop control (specific period Top) may be used as a matching parameter. Further, for example, the setting of the target value (compensation value β, γ) in the deviation control shown in the fifth drawing may be used as the matching parameter. Furthermore, a plurality of the above parameters may be used as the matching parameters.

. In the fourth embodiment described above, the user is required to select an appropriate fitting parameter corresponding to the controlled object, but the method of cooperation is not limited thereto. For example, when the initial values are arbitrarily set for each of the parameters of the deviation continuing time Tbi, the specific period Top, the compensation values β, and γ to perform temperature control, the temperature of the controlled object (or the temperature of the temperature regulating plate 10) is monitored. When the delay time to reach the target value is not within the allowable range, the process of changing at least one of the above parameters may be automatically performed. Thereby, since the open loop control can be automatically matched so that the delay time to reach the target value is within the allowable range, the labor of the user can be further reduced.

. The method of converting the basic operation amount MB into the individual operation amounts of the cooling valve 24, the bypass valve 34, and the heating valve 44 is not limited to those shown in FIGS. 3 and 9. In the third and ninth diagrams, the temperature difference Δ between the target value Tt and the detected value Td is changed, and the operation amounts of either the cooling valve 24, the bypass valve 34, and the heating valve 44 are changed. However, it is not limited to this, for example, changing all the operations. Further, in the third and ninth diagrams, the individual operation amounts of the cooling valve 24, the bypass valve 34, and the heating valve 44 are coefficients of zero or one time difference of the temperature difference Δ, but this is not limit.

. In the third embodiment, the cooling valve 24, the bypass valve 34, and the heating valve 44 are not fully closed regardless of the basic operation amount MB, but are not limited thereto. When the basic operation amount MB is close to 0, the cooling valve 24 and the heating valve 44 may not be fully closed. That is, since it is considered that the detected value Td is the target value Tt and the detected value Td is fixed before the required temperature Tr changes, it is only necessary to prepare for the change of the target value Tt in this case, only in the case When the basic operation amount MB is close to 0, the cooling valve 24 and the heating valve 44 may not be fully closed. Again, at this time, at When the basic operation amount MB is less than 0, the amount of change in the operation amount of the cooling valve 24 is made larger than the amount of change in the operation amount of the heating valve 44, and in the case where the basic operation amount MB is larger than 0, the heating is used. The amount of change in the amount of operation of the valve 44 is smaller than the amount of change in the amount of operation of the cooling valve 24.

. The outflow lines 60, 62 are not limited to those exemplified in the second embodiment (Fig. 8). For example, as shown in FIG. 11, the outflow line 60 that connects the upstream side and the downstream side of the cooling valve 24 in the cooling line 20 may be connected to the cooling valve 24, and may be connected by bypassing the heating valve 44. The outflow line 62 on the upstream side and the downstream side of the heating valve 44 in the heating line 40 is heated. Further, it is preferable that the outflow lines 60 and 62 are provided on the downstream side of the cooling temperature sensor 26 or the heating temperature sensor 46.

. In each of the above embodiments, the specific period Top and the deviation continuing time Tbi in which the open loop control continues are set, but the present invention is not limited thereto, and may be identical.

. Feedback control is not limited to PID control. For example, PI control or I control is also possible. Here, for example, in the configuration in which the open loop control is executed when the target value is changed, for example, in the configuration in which the target value is changed, the purpose of the feedback control is to accurately match the detected value Td with the target value Tt at normal time, or to minimize it. The change in the detected value Td. Therefore, as in the integral control, it is particularly suitable for controlling the detected value Td to the target value Tt in accordance with the cumulative value indicating the difference between the detected value Td and the target value Tt.

. The open loop control is not limited to those exemplified in the above embodiment. For example, when the temperature of the fluid in the bypass pipe 30 is higher than the target value Tt, the setting of the opening degree of the cooling valve 24 and the bypass valve 34 refers to the ratio of the opening degree as shown in the above-mentioned FIG. And for this reason, the temperature of the fluid in the bypass pipe 30 When the degree is lower than the target value Tt, the setting of the opening degree of the heating valve 44 and the bypass valve 34 may be referred to the ratio of the opening degree as shown in the above-mentioned third drawing. Here, corresponding to the temperature of the fluid in the pipeline used, open loop control can be performed by calculating which of the opening ratios of the two valves can reach the target value Tt. In particular, with this method, the use of a flow meter can be avoided. Since the flow meter is immersed in the fluid, it is difficult to maintain its reliability in the temperature range between the temperature of the fluid in the heating line 40 and the temperature of the fluid in the cooling line 20, so that the flow meter is not used. Simple open loop control is preferred. Further, when the opening ratio shown in FIG. 3 is not used, for example, when the temperature of the fluid in the bypass pipe 30 is higher than the target value Tt, the opening degrees of the cooling valve 24 and the bypass valve 34 are set. The ratio of the difference between the target value Tt and the difference between the target value Tt and the temperature of the fluid in the heating line 40 corresponding to the fluid in the cooling line 20 is preferred. Similarly, when the temperature of the fluid in the bypass pipe 30 is lower than the target value Tt, the opening degree of the heating valve 44 and the bypass common valve 34 is set to correspond to the temperature of the fluid in the bypass pipe 30 for the target. The difference between the values Tt and the ratio of the target value Tt to the difference in temperature of the fluid in the heating line 40 is preferred.

. It is not limited to the execution of the feedback control, and only the open loop control shown in steps S48 and S50 of Fig. 6 may be performed. Further, regardless of whether or not the target value is changed, the basic operation amount MB determined by the open loop control shown in steps S48 and S50 of FIG. 6 is corrected by the feedback control, and the final basic operation amount MB is also calculated. can. Furthermore, conversely, only feedback control may be performed regardless of whether the target value changes. Even in this case, when the required temperature Tr is changed, the above-described deviation control which makes the change of the target value Tt larger than the change of the required temperature Tr is effective. That is, in the feedback control, the reaction delay is reduced. The fluctuation of the detection value Td with respect to the target value Tt is mutually exchanged. However, by performing the deviation control, the reaction delay can be reduced by the gain value of the feedback control, so that the variation can be reduced while reducing the reaction delay. .

. The feedback control is not limited to being performed by converting the required amount of the feedback control (the basic operation amount MB) into the individual operation amounts of the cooling valve 24, the bypass valve 34, and the heating valve 44, for example, according to the target value Tt and The difference between the detected values Td and the individual operation amounts of the cooling valve 24, the bypass valve 34, and the heating valve 44 may be set. However, even in this case, when the target value Tt is higher than the detected value Td, only the operation amount of the bypass valve 34 and the cooling valve 24 is changed, and when the target value Tt is lower than the detected value Td. In the case of the change, the operation amount of the bypass valve 34 and the heating valve 44 is preferably changed.

. The storage device having a function of absorbing a volume change due to the temperature of the fluid is not limited to the configuration in which the storage tank 16 is filled with a fluid and has a space filled with the gas, as exemplified in the above embodiments. For example, the storage tank 16 is configured to be filled with fluid without gaps, and the volume of the storage tank 16 may vary depending on the pressure applied to the inner wall of the storage tank 16 by the fluid.

. In the above embodiment, the adjusting device for adjusting the flow ratio of the fluid flowing from the cooling line 20, the bypass pipe 30, and the heating pipe 40 to the temperature regulating plate 10 is a cooling valve 24, a bypass valve 34, and The valve 44 for heating is not limited thereto. For example, each of the plurality of pipes is provided, and a valve for performing two operations of the switches is provided, and the number of pipes for outputting the fluid to the temperature regulating plate 10 may be an operation amount. Further, a plurality of branch lines are prepared, and whether or not these respective lines are connected to the downstream side of any of the cooling unit 22, the heating unit 42, and the pump 18 may be operated. Furthermore, the cooling line 20, the bypass pipe 30 and the heating pipe 40 separately set individual pumps, and the flow ratio can be adjusted by controlling the output capability thereof separately.

. Further, the temperature regulating plate 10 is not limited to a thin rectangular parallelepiped plate-like element, and may be, for example, a thin cylindrical plate-shaped element. In short, the temperature adjustment unit 11 may be provided so as to be able to support the inside of the plate-shaped element to be controlled from the vertical direction. For example, the temperature may be directly controlled in contact with the plurality of side surfaces of the object to be controlled.

10‧‧‧tempering plate

11‧‧‧Temperature Department

12‧‧ ‧ Confluence Department

14‧‧‧Outflow line

16‧‧‧ storage tank

18‧‧‧ pump

19‧‧ ‧ Division

20‧‧‧Cooling line

22‧‧‧Department of Cooling

24‧‧‧Cooling valve

26‧‧‧Stage temperature sensor for cooling

28‧‧‧Flower for cooling

30‧‧‧bypass

34‧‧‧Side general purpose valve

36‧‧‧side universal temperature sensor

38‧‧‧side universal flowmeter

40‧‧‧heating line

42‧‧‧ heating department

44‧‧‧heating valve

46‧‧‧heating temperature sensor

48‧‧‧heating flow meter

50‧‧‧Control device

51‧‧‧Output temperature sensor

60‧‧‧Outflow line

62‧‧‧Outflow line

Fig. 1 is a view showing the overall configuration of a temperature control device according to a first embodiment of the present invention.

Fig. 2 is a flow chart showing the processing procedure of the feedback control of the same embodiment.

Fig. 3 is a view showing a method of setting the operation amount of the cooling valve, the bypass common valve, and the heating valve of the embodiment.

Fig. 4 is a timing chart showing the temperature change of the controlled object in the case where the temperature control is performed only by the feedback control in the embodiment.

Fig. 5 is a flow chart showing the procedure of the setting process of the target value of the embodiment.

Figure 6 is a flow chart showing the processing procedure of the open loop control of the same embodiment.

Fig. 7 is a time chart showing the temperature change of the controlled object in the case where the open loop control is used at the same time.

Fig. 8 is a view showing the overall configuration of a temperature control device according to a second embodiment of the present invention.

Figure 9 is a view showing a cooling valve, a side-by-side valve, and a third embodiment. Schematic diagram of the method of setting the amount of operation of the heat valve.

Fig. 10 is a flow chart showing the procedure of the open loop control cooperation support processing of the fourth embodiment.

Fig. 11 is a view showing the overall configuration of a temperature control device according to a modification of the second embodiment of the present invention.

Fig. 12 is a view showing the configuration of a conventional temperature control device.

10‧‧‧tempering plate

11‧‧‧Temperature Department

12‧‧ ‧ Confluence Department

14‧‧‧Outflow line

16‧‧‧ storage tank

18‧‧‧ pump

19‧‧ ‧ Division

20‧‧‧Cooling line

22‧‧‧Department of Cooling

24‧‧‧Cooling valve

26‧‧‧Stage temperature sensor for cooling

28‧‧‧Flower for cooling

30‧‧‧bypass

34‧‧‧Side general purpose valve

36‧‧‧side universal temperature sensor

38‧‧‧side universal flowmeter

40‧‧‧heating line

42‧‧‧ heating department

44‧‧‧heating valve

46‧‧‧heating temperature sensor

48‧‧‧heating flow meter

50‧‧‧Control device

51‧‧‧Output temperature sensor

Claims (11)

A temperature control device for controlling a temperature of a controlled object to a desired temperature by circulating a fluid to a temperature regulating portion disposed beside the controlled object, characterized by comprising: a heating pipe that fluidizes the fluid Heating and circulating to the tempering portion; cooling a conduit that cools the fluid and circulates it to the tempering portion; a bypass tube that prevents the fluid from passing through the heating conduit and the cooling conduit And circulating to the temperature adjustment unit; the adjusting device adjusts a flow ratio of the fluid output to the temperature regulating portion through the junction of the heating pipe, the cooling pipe, and the bypass pipe; and the operating device Actuating the adjusting device to control the temperature of the fluid adjacent to the temperature regulating portion to a target value; the adjusting device is for respectively adjusting the heating circuit, the cooling pipe, and the flow path on the downstream side of the bypass pipe An area device disposed at the heating pipe, the cooling pipe, the downstream of the bypass pipe, and the upstream of the merging portion; the operating device, when the temperature of the temperature regulating portion is in a constant state Under, it is forbidden by the adjustment device Heating line and the cooling line adjustment ilk passage area 0. The temperature control device of claim 1, wherein the bypass pipe is shared between the heating pipe and the cooling pipe. The temperature control device according to claim 1, wherein an upstream flow side of the heating pipe and the cooling pipe is provided with an outflow pipe that bypasses the regulating device to cause the fluid to flow out. The temperature control device according to claim 1, further comprising a pump that sucks the fluid on the downstream side of the temperature regulating portion and outputs the same to the heating pipe, the cooling pipe, and the side Through the pipe. The temperature control device according to claim 1, wherein a storage device for storing the fluid is disposed on the heating pipe, the cooling pipe, the upstream side of the bypass pipe, and the downstream side of the temperature regulating portion. The storage device has a function of absorbing a volume change of the fluid due to temperature. The temperature control device according to claim 1, wherein the operation device performs feedback control on the target value by the detection value obtained by the output temperature detecting device that detects the temperature of the fluid adjacent to the temperature adjustment portion. The temperature control device according to claim 6, wherein the adjusting device is a device for separately adjusting a flow path area of the heating pipe, the cooling pipe, and a downstream side of the bypass pipe; the operating device includes And a conversion device that converts the amount of the difference between the detected value and the target value into an operation amount of the heating channel, the cooling pipe, and the individual flow path area of the bypass pipe. The temperature control device according to claim 6 or 7, wherein the operating device operates the adjusting device, and the feedback control is not used according to the detection of the temperature of the bypass pipe during a specific period after the target value is changed. The temperature of the fluid adjacent to the temperature control unit is controlled by an open circuit through the detected value of the temperature detecting device. The temperature control device according to claim 8, wherein the adjusting device is a device for separately adjusting a flow path area of the heating pipe, the cooling pipe, and a downstream side of the bypass pipe; The operating device, when the target value is changed, operating a flow path area of the bypass pipe and the cooling pipe when the temperature of the fluid in the bypass pipe is higher than the target value, thereby opening the circuit Controlling the temperature of the temperature regulating portion to a target value, and operating a flow channel area of the bypass pipe and the heating pipe when the temperature of the fluid in the bypass pipe is lower than the target value, thereby opening the circuit The temperature of the temperature control unit is controlled to a target value. The temperature control device according to claim 1, further comprising a transition time target value setting device, wherein the target value is changed more than the requirement in the case where the request for the temperature of the temperature adjustment portion is changed The amplitude changes. The temperature control device of claim 8, further comprising an open loop control cooperation support device that requires selection of a gain value for the open loop control, a duration of the open loop control, and the open loop control Any one of a plurality of options of at least one of the setting of the target value, and the temperature control is performed corresponding to the selected value.