TWI391350B - 適用於研磨有機聚合物系眼科基材之漿料組成物及方法，以及眼科鏡片 - Google Patents
適用於研磨有機聚合物系眼科基材之漿料組成物及方法，以及眼科鏡片 Download PDFInfo
- Publication number
- TWI391350B TWI391350B TW095112122A TW95112122A TWI391350B TW I391350 B TWI391350 B TW I391350B TW 095112122 A TW095112122 A TW 095112122A TW 95112122 A TW95112122 A TW 95112122A TW I391350 B TWI391350 B TW I391350B
- Authority
- TW
- Taiwan
- Prior art keywords
- pyrrolidone
- slurry composition
- organic polymer
- weight
- polymer based
- Prior art date
Links
- 239000002002 slurry Substances 0.000 title claims abstract description 106
- 239000000758 substrate Substances 0.000 title claims abstract description 70
- 239000000203 mixture Substances 0.000 title claims abstract description 61
- 229920000620 organic polymer Polymers 0.000 title claims abstract description 48
- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000000227 grinding Methods 0.000 title claims description 30
- 238000005498 polishing Methods 0.000 claims abstract description 30
- 239000002245 particle Substances 0.000 claims abstract description 29
- -1 pyrrolidone compound Chemical class 0.000 claims abstract description 25
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 17
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000006185 dispersion Substances 0.000 claims abstract description 4
- 229920000036 polyvinylpyrrolidone Polymers 0.000 claims description 24
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 claims description 24
- 239000001267 polyvinylpyrrolidone Substances 0.000 claims description 19
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 6
- 229920001577 copolymer Polymers 0.000 claims description 5
- 239000008367 deionised water Substances 0.000 claims description 5
- 229910021641 deionized water Inorganic materials 0.000 claims description 5
- 239000002518 antifoaming agent Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- JBKVHLHDHHXQEQ-UHFFFAOYSA-N epsilon-caprolactam Chemical compound O=C1CCCCCN1 JBKVHLHDHHXQEQ-UHFFFAOYSA-N 0.000 claims description 4
- ZFPGARUNNKGOBB-UHFFFAOYSA-N 1-Ethyl-2-pyrrolidinone Chemical compound CCN1CCCC1=O ZFPGARUNNKGOBB-UHFFFAOYSA-N 0.000 claims description 3
- BNXZHVUCNYMNOS-UHFFFAOYSA-N 1-butylpyrrolidin-2-one Chemical compound CCCCN1CCCC1=O BNXZHVUCNYMNOS-UHFFFAOYSA-N 0.000 claims description 3
- NJPQAIBZIHNJDO-UHFFFAOYSA-N 1-dodecylpyrrolidin-2-one Chemical compound CCCCCCCCCCCCN1CCCC1=O NJPQAIBZIHNJDO-UHFFFAOYSA-N 0.000 claims description 3
- WRNAVSFPKQSYQC-UHFFFAOYSA-N 1-hexadecylpyrrolidin-2-one Chemical compound CCCCCCCCCCCCCCCCN1CCCC1=O WRNAVSFPKQSYQC-UHFFFAOYSA-N 0.000 claims description 3
- BAWUFGWWCWMUNU-UHFFFAOYSA-N 1-hexylpyrrolidin-2-one Chemical compound CCCCCCN1CCCC1=O BAWUFGWWCWMUNU-UHFFFAOYSA-N 0.000 claims description 3
- WPPOGHDFAVQKLN-UHFFFAOYSA-N N-Octyl-2-pyrrolidone Chemical compound CCCCCCCCN1CCCC1=O WPPOGHDFAVQKLN-UHFFFAOYSA-N 0.000 claims description 3
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims description 3
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims description 3
- PZYDAVFRVJXFHS-UHFFFAOYSA-N n-cyclohexyl-2-pyrrolidone Chemical compound O=C1CCCN1C1CCCCC1 PZYDAVFRVJXFHS-UHFFFAOYSA-N 0.000 claims description 3
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 claims description 3
- 229920002554 vinyl polymer Polymers 0.000 claims description 3
- WOQLPPITHNQPLR-UHFFFAOYSA-N 1-sulfanylpyrrolidin-2-one Chemical compound SN1CCCC1=O WOQLPPITHNQPLR-UHFFFAOYSA-N 0.000 claims description 2
- 239000000375 suspending agent Substances 0.000 claims description 2
- WDQFELCEOPFLCZ-UHFFFAOYSA-N 1-(2-hydroxyethyl)pyrrolidin-2-one Chemical compound OCCN1CCCC1=O WDQFELCEOPFLCZ-UHFFFAOYSA-N 0.000 claims 2
- LNOKAIMHDJWRDG-UHFFFAOYSA-N 1-octadecylpyrrolidin-2-one Chemical compound CCCCCCCCCCCCCCCCCCN1CCCC1=O LNOKAIMHDJWRDG-UHFFFAOYSA-N 0.000 claims 2
- IHWDSEPNZDYMNF-UHFFFAOYSA-N 1H-indol-2-amine Chemical compound C1=CC=C2NC(N)=CC2=C1 IHWDSEPNZDYMNF-UHFFFAOYSA-N 0.000 claims 1
- 239000004698 Polyethylene Substances 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 229920000573 polyethylene Polymers 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 description 9
- 229920000515 polycarbonate Polymers 0.000 description 7
- 239000004417 polycarbonate Substances 0.000 description 7
- 238000003801 milling Methods 0.000 description 6
- 238000009472 formulation Methods 0.000 description 5
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 4
- 229920002635 polyurethane Polymers 0.000 description 4
- 239000004814 polyurethane Substances 0.000 description 4
- 230000004580 weight loss Effects 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 150000004040 pyrrolidinones Chemical class 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229920001169 thermoplastic Polymers 0.000 description 2
- 239000004416 thermosoftening plastic Substances 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 241001674044 Blattodea Species 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 229910021502 aluminium hydroxide Inorganic materials 0.000 description 1
- 229910001593 boehmite Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 150000002118 epoxides Chemical class 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 229920002100 high-refractive-index polymer Polymers 0.000 description 1
- 238000003837 high-temperature calcination Methods 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 230000003641 microbiacidal effect Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000006174 pH buffer Substances 0.000 description 1
- 229920002401 polyacrylamide Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000006254 rheological additive Substances 0.000 description 1
- 239000005336 safety glass Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Eyeglasses (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/102,555 US7294044B2 (en) | 2005-04-08 | 2005-04-08 | Slurry composition and method for polishing organic polymer-based ophthalmic substrates |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200642978A TW200642978A (en) | 2006-12-16 |
| TWI391350B true TWI391350B (zh) | 2013-04-01 |
Family
ID=37083726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095112122A TWI391350B (zh) | 2005-04-08 | 2006-04-06 | 適用於研磨有機聚合物系眼科基材之漿料組成物及方法，以及眼科鏡片 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7294044B2 (enExample) |
| EP (1) | EP1868769B1 (enExample) |
| JP (1) | JP5193852B2 (enExample) |
| CN (1) | CN101541910B (enExample) |
| AT (1) | ATE527328T1 (enExample) |
| TW (1) | TWI391350B (enExample) |
| WO (1) | WO2006110224A2 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7467988B2 (en) * | 2005-04-08 | 2008-12-23 | Ferro Corporation | Slurry composition and method for polishing organic polymer-based ophthalmic substrates |
| EP2237311A4 (en) * | 2008-02-01 | 2011-11-30 | Fujimi Inc | POLISHING COMPOSITION AND POLISHING METHOD THEREFOR |
| JP5539321B2 (ja) * | 2008-04-24 | 2014-07-02 | ピーピーティー リサーチ，インク． | 安定な水性スラリー懸濁物 |
| US20100330884A1 (en) * | 2009-06-29 | 2010-12-30 | Ferro Corporation | Diatomaceous Earth-Containing Slurry Composition And Method For Polishing Organic Polymer-Based Ophthalmic Substrates Using The Same |
| US8449636B2 (en) * | 2010-08-09 | 2013-05-28 | Ferro Corporation | Easy rinsing polishing composition for polymer-based surfaces |
| KR20140062425A (ko) | 2011-03-03 | 2014-05-23 | 위시스 테크놀로지 파운데이션, 인크. | 금속 산화물 및 금속 칼코게나이드 및 혼합 금속 산화물 및 칼코게나이드의 열역학적 용액 |
| US8821215B2 (en) * | 2012-09-07 | 2014-09-02 | Cabot Microelectronics Corporation | Polypyrrolidone polishing composition and method |
| US9633831B2 (en) | 2013-08-26 | 2017-04-25 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing composition for polishing a sapphire surface and methods of using same |
| JP6654696B2 (ja) * | 2015-07-10 | 2020-02-26 | フエロ コーポレーション | 有機ポリマー系眼用基材を研磨するためのスラリー組成物及び方法、並びに眼用レンズ |
| KR102463863B1 (ko) * | 2015-07-20 | 2022-11-04 | 삼성전자주식회사 | 연마용 조성물 및 이를 이용한 반도체 장치의 제조 방법 |
| JP6758984B2 (ja) * | 2016-07-29 | 2020-09-23 | キヤノン株式会社 | インクジェット記録装置及びクリーニング方法 |
| SG11201900141UA (en) | 2016-08-26 | 2019-03-28 | Ferro Corp | Slurry composition and method of selective silica polishing |
| US10037889B1 (en) | 2017-03-29 | 2018-07-31 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Cationic particle containing slurries and methods of using them for CMP of spin-on carbon films |
| CN107299385A (zh) * | 2017-05-18 | 2017-10-27 | 当涂县宏宇金属炉料有限责任公司 | 一种改善不锈钢表面特性的电化学处理方法 |
| CN109015204B (zh) * | 2018-08-29 | 2020-11-27 | 包头市利晨科技有限公司 | 一种适用于cr39树脂镜片的抛光方法 |
| WO2020122191A1 (ja) * | 2018-12-14 | 2020-06-18 | 株式会社フジミインコーポレーテッド | 研磨用組成物及び合成樹脂研磨方法 |
| CN113755842B (zh) * | 2021-10-18 | 2024-04-02 | 德米特（苏州）电子环保材料有限公司 | 一种金属抛光液及其制备方法和应用 |
| JP2024060831A (ja) | 2022-10-20 | 2024-05-07 | 山口精研工業株式会社 | プラスチックレンズ用研磨剤組成物 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6818031B2 (en) * | 2001-04-27 | 2004-11-16 | Kao Corporation | Polishing composition |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4127697A (en) * | 1975-05-19 | 1978-11-28 | American Optical Corporation | Abrasion-resistant lenses and process of making |
| US4135792A (en) * | 1976-02-20 | 1979-01-23 | American Optical Corporation | All plastic spectacles |
| US4108827A (en) * | 1976-12-13 | 1978-08-22 | American Optical Corporation | Colorless allyl diglycol carbonate |
| JPS5489389A (en) * | 1977-12-27 | 1979-07-16 | Fujimi Kenmazai Kougiyou Kk | Composition for polishing of moldings in synthetic resin |
| FR2414071A1 (fr) * | 1978-01-05 | 1979-08-03 | Essilor Int | Materiau de polissage, notamment pour lentille ophtalmique en matiere organique |
| US4443588A (en) * | 1981-02-19 | 1984-04-17 | Toray Industries, Inc. | Highly refractive urethane polymers for use in optical lenses and lenses prepared therefrom |
| US4376751A (en) * | 1981-05-29 | 1983-03-15 | The United States Of America As Represented By The Department Of Energy | Production of super-smooth articles |
| US4859719A (en) * | 1983-09-08 | 1989-08-22 | Minnesota Mining And Manufacturing Company | Polymer blends with high water absorption |
| JPS61182763A (ja) * | 1985-02-06 | 1986-08-15 | Sanyo Chem Ind Ltd | 研磨加工液 |
| JPS6243482A (ja) * | 1985-08-21 | 1987-02-25 | Sanyo Chem Ind Ltd | 研磨加工液 |
| FR2604443A1 (fr) * | 1986-09-26 | 1988-04-01 | Rhone Poulenc Chimie | Composition de polissage a base de cerium destinee au polissage des verres organiques |
| JPH0818241B2 (ja) * | 1987-03-19 | 1996-02-28 | キヤノン株式会社 | 研磨工具の製造方法 |
| JPH0899268A (ja) * | 1994-10-03 | 1996-04-16 | Olympus Optical Co Ltd | 研磨用工具とその製造方法 |
| US5989301A (en) * | 1998-02-18 | 1999-11-23 | Saint-Gobain Industrial Ceramics, Inc. | Optical polishing formulation |
| JP2000256654A (ja) * | 1999-03-04 | 2000-09-19 | Hitachi Chem Co Ltd | Ｃｍｐ研磨剤及び基板の研磨方法 |
| EP1205965B1 (en) * | 1999-06-18 | 2006-11-15 | Hitachi Chemical Company, Ltd. | Use of cmp abrasive |
| US6786945B2 (en) * | 2001-02-20 | 2004-09-07 | Hitachi Chemical Co., Ltd. | Polishing compound and method for polishing substrate |
| JP2002305198A (ja) * | 2001-04-06 | 2002-10-18 | Toshiba Corp | 電子デバイスの製造方法 |
| US6638326B2 (en) * | 2001-09-25 | 2003-10-28 | Ekc Technology, Inc. | Compositions for chemical mechanical planarization of tantalum and tantalum nitride |
| WO2003036705A1 (en) * | 2001-10-26 | 2003-05-01 | Asahi Glass Company, Limited | Polishing compound, method for production thereof and polishing method |
| US6821897B2 (en) * | 2001-12-05 | 2004-11-23 | Cabot Microelectronics Corporation | Method for copper CMP using polymeric complexing agents |
| JP4387708B2 (ja) * | 2002-07-04 | 2009-12-24 | Ｈｏｙａ株式会社 | プラスチック製眼鏡レンズの研磨方法および製造方法 |
| TWI256971B (en) * | 2002-08-09 | 2006-06-21 | Hitachi Chemical Co Ltd | CMP abrasive and method for polishing substrate |
| US7300601B2 (en) * | 2002-12-10 | 2007-11-27 | Advanced Technology Materials, Inc. | Passivative chemical mechanical polishing composition for copper film planarization |
| US6916742B2 (en) * | 2003-02-27 | 2005-07-12 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Modular barrier removal polishing slurry |
| JP2004311967A (ja) * | 2003-03-27 | 2004-11-04 | Nippon Shokubai Co Ltd | Ｃｍｐ研磨剤用ポリマー及び組成物 |
| US6802878B1 (en) * | 2003-04-17 | 2004-10-12 | 3M Innovative Properties Company | Abrasive particles, abrasive articles, and methods of making and using the same |
| JP2004331852A (ja) * | 2003-05-09 | 2004-11-25 | Tama Kagaku Kogyo Kk | 分散安定性に優れた研磨剤スラリー及び基板の製造方法 |
| JP4138610B2 (ja) * | 2003-08-29 | 2008-08-27 | 有限会社コスモテック | 研磨治具用曲率設定装置および研磨治具曲率設定方法 |
| US7344988B2 (en) * | 2003-10-27 | 2008-03-18 | Dupont Air Products Nanomaterials Llc | Alumina abrasive for chemical mechanical polishing |
| US20060216935A1 (en) * | 2005-03-28 | 2006-09-28 | Ferro Corporation | Composition for oxide CMP in CMOS device fabrication |
-
2005
- 2005-04-08 US US11/102,555 patent/US7294044B2/en not_active Expired - Lifetime
-
2006
- 2006-02-22 CN CN2006800109633A patent/CN101541910B/zh not_active Expired - Fee Related
- 2006-02-22 JP JP2008505303A patent/JP5193852B2/ja not_active Expired - Fee Related
- 2006-02-22 AT AT06735812T patent/ATE527328T1/de not_active IP Right Cessation
- 2006-02-22 WO PCT/US2006/006306 patent/WO2006110224A2/en not_active Ceased
- 2006-02-22 EP EP06735812A patent/EP1868769B1/en not_active Expired - Lifetime
- 2006-04-06 TW TW095112122A patent/TWI391350B/zh not_active IP Right Cessation
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6818031B2 (en) * | 2001-04-27 | 2004-11-16 | Kao Corporation | Polishing composition |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2006110224A2 (en) | 2006-10-19 |
| US20060228999A1 (en) | 2006-10-12 |
| EP1868769A2 (en) | 2007-12-26 |
| JP5193852B2 (ja) | 2013-05-08 |
| JP2008537704A (ja) | 2008-09-25 |
| CN101541910A (zh) | 2009-09-23 |
| TW200642978A (en) | 2006-12-16 |
| WO2006110224A3 (en) | 2009-04-16 |
| US7294044B2 (en) | 2007-11-13 |
| ATE527328T1 (de) | 2011-10-15 |
| EP1868769B1 (en) | 2011-10-05 |
| EP1868769A4 (en) | 2010-03-10 |
| CN101541910B (zh) | 2012-09-05 |
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