TWI373133B - Display apparatus,production method thereof and a transistor - Google Patents

Display apparatus,production method thereof and a transistor

Info

Publication number
TWI373133B
TWI373133B TW096146104A TW96146104A TWI373133B TW I373133 B TWI373133 B TW I373133B TW 096146104 A TW096146104 A TW 096146104A TW 96146104 A TW96146104 A TW 96146104A TW I373133 B TWI373133 B TW I373133B
Authority
TW
Taiwan
Prior art keywords
transistor
production method
display apparatus
display
production
Prior art date
Application number
TW096146104A
Other languages
English (en)
Chinese (zh)
Other versions
TW200847421A (en
Inventor
Masafumi Sano
Kenji Takahashi
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of TW200847421A publication Critical patent/TW200847421A/zh
Application granted granted Critical
Publication of TWI373133B publication Critical patent/TWI373133B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H10D30/6756—Amorphous oxide semiconductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/451—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by the compositions or shapes of the interlayer dielectrics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Shift Register Type Memory (AREA)
TW096146104A 2006-12-05 2007-12-04 Display apparatus,production method thereof and a transistor TWI373133B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006328307A JP5105842B2 (ja) 2006-12-05 2006-12-05 酸化物半導体を用いた表示装置及びその製造方法

Publications (2)

Publication Number Publication Date
TW200847421A TW200847421A (en) 2008-12-01
TWI373133B true TWI373133B (en) 2012-09-21

Family

ID=39110785

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096146104A TWI373133B (en) 2006-12-05 2007-12-04 Display apparatus,production method thereof and a transistor

Country Status (7)

Country Link
US (2) US8164256B2 (https=)
EP (2) EP3249694B1 (https=)
JP (1) JP5105842B2 (https=)
KR (1) KR101126129B1 (https=)
CN (1) CN101548383B (https=)
TW (1) TWI373133B (https=)
WO (1) WO2008069286A2 (https=)

Families Citing this family (83)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2453481B1 (en) * 2004-11-10 2017-01-11 Canon Kabushiki Kaisha Field effect transistor with amorphous oxide
JP5213422B2 (ja) * 2007-12-04 2013-06-19 キヤノン株式会社 絶縁層を有する酸化物半導体素子およびそれを用いた表示装置
KR100963027B1 (ko) 2008-06-30 2010-06-10 삼성모바일디스플레이주식회사 박막 트랜지스터, 그의 제조 방법 및 박막 트랜지스터를구비하는 평판 표시 장치
KR100963026B1 (ko) 2008-06-30 2010-06-10 삼성모바일디스플레이주식회사 박막 트랜지스터, 그의 제조 방법 및 박막 트랜지스터를구비하는 평판 표시 장치
KR102026604B1 (ko) * 2008-07-10 2019-10-01 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 장치 및 전자 기기
US8129718B2 (en) 2008-08-28 2012-03-06 Canon Kabushiki Kaisha Amorphous oxide semiconductor and thin film transistor using the same
JP5627071B2 (ja) 2008-09-01 2014-11-19 株式会社半導体エネルギー研究所 半導体装置の作製方法
US9082857B2 (en) 2008-09-01 2015-07-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising an oxide semiconductor layer
WO2010029859A1 (en) 2008-09-12 2010-03-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP5616012B2 (ja) * 2008-10-24 2014-10-29 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP5491833B2 (ja) * 2008-12-05 2014-05-14 株式会社半導体エネルギー研究所 半導体装置
EP2515337B1 (en) 2008-12-24 2016-02-24 Semiconductor Energy Laboratory Co., Ltd. Driver circuit and semiconductor device
DE102009007947B4 (de) 2009-02-06 2014-08-14 Universität Stuttgart Verfahren zur Herstellung eines Aktiv-Matrix-OLED-Displays
US20100224880A1 (en) * 2009-03-05 2010-09-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR102068632B1 (ko) * 2009-03-12 2020-01-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치의 제작 방법
EP2449594B1 (en) * 2009-06-30 2019-08-21 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
KR101809759B1 (ko) * 2009-09-24 2018-01-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 소자 및 그 제조 방법
WO2011043163A1 (en) 2009-10-05 2011-04-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR101693816B1 (ko) 2009-10-09 2017-01-06 가부시키가이샤 한도오따이 에네루기 켄큐쇼 시프트 레지스터, 표시 장치, 및 그 구동 방법
WO2011043206A1 (en) 2009-10-09 2011-04-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
KR101988819B1 (ko) 2009-10-16 2019-06-12 가부시키가이샤 한도오따이 에네루기 켄큐쇼 액정 표시 장치 및 이를 구비한 전자 장치
WO2011048959A1 (en) * 2009-10-21 2011-04-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
MY164205A (en) * 2009-10-29 2017-11-30 Semiconductor Energy Lab Semiconductor device
KR20260036405A (ko) 2009-10-29 2026-03-16 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
WO2011052437A1 (en) * 2009-10-30 2011-05-05 Semiconductor Energy Laboratory Co., Ltd. Non-linear element, display device including non-linear element, and electronic device including display device
KR102142450B1 (ko) 2009-10-30 2020-08-10 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작방법
KR101645680B1 (ko) * 2009-11-06 2016-08-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR20230174763A (ko) * 2009-11-13 2023-12-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 이 표시 장치를 구비한 전자 기기
CN102668097B (zh) 2009-11-13 2015-08-12 株式会社半导体能源研究所 半导体器件及其制造方法
WO2011065209A1 (en) * 2009-11-27 2011-06-03 Semiconductor Energy Laboratory Co., Ltd. Non-linear element, display device including non-linear element, and electronic device including display device
KR102089200B1 (ko) 2009-11-28 2020-03-13 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제조 방법
CN102648525B (zh) * 2009-12-04 2016-05-04 株式会社半导体能源研究所 显示装置
CN102640272B (zh) * 2009-12-04 2015-05-20 株式会社半导体能源研究所 半导体装置及其制造方法
KR101840623B1 (ko) * 2009-12-04 2018-03-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 이를 포함하는 전자 기기
KR101763660B1 (ko) * 2009-12-18 2017-08-01 가부시키가이샤 한도오따이 에네루기 켄큐쇼 액정 표시 장치 및 그 구동 방법
KR102459005B1 (ko) * 2009-12-25 2022-10-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 메모리 장치, 반도체 장치, 및 전자 장치
KR102471810B1 (ko) * 2010-01-15 2022-11-29 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 이를 구동하는 방법
CN102725841B (zh) * 2010-01-15 2016-10-05 株式会社半导体能源研究所 半导体器件
KR101791279B1 (ko) * 2010-01-15 2017-10-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
US8617920B2 (en) * 2010-02-12 2013-12-31 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
TW201732525A (zh) * 2010-03-08 2017-09-16 半導體能源研究所股份有限公司 電子裝置及電子系統
KR101840797B1 (ko) * 2010-03-19 2018-03-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 메모리 장치
WO2011118509A1 (en) 2010-03-26 2011-09-29 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
WO2011118741A1 (en) 2010-03-26 2011-09-29 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
WO2011135988A1 (en) 2010-04-28 2011-11-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor display device and driving method the same
WO2011145484A1 (en) 2010-05-21 2011-11-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
WO2011145467A1 (en) 2010-05-21 2011-11-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2011249674A (ja) * 2010-05-28 2011-12-08 Fujifilm Corp 薄膜トランジスタおよびその製造方法
US8779478B2 (en) * 2010-06-01 2014-07-15 Sharp Kabushiki Kaisha Thin film transistor
US9473714B2 (en) * 2010-07-01 2016-10-18 Semiconductor Energy Laboratory Co., Ltd. Solid-state imaging device and semiconductor display device
KR102143469B1 (ko) * 2010-07-27 2020-08-11 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
KR20120020073A (ko) * 2010-08-27 2012-03-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치의 설계 방법
US8963147B2 (en) 2010-09-28 2015-02-24 Toppan Printing Co., Ltd. Thin film transistor, method of manufacturing the same, and image display device equipped with thin film transistor
JP5647860B2 (ja) * 2010-10-28 2015-01-07 富士フイルム株式会社 薄膜トランジスタおよびその製造方法
TWI593115B (zh) 2010-11-11 2017-07-21 半導體能源研究所股份有限公司 半導體裝置及其製造方法
JP6035007B2 (ja) * 2010-12-10 2016-11-30 富士通株式会社 Ｍｉｓ型の窒化物半導体ｈｅｍｔ及びその製造方法
KR101832361B1 (ko) * 2011-01-19 2018-04-16 삼성디스플레이 주식회사 박막 트랜지스터 표시판 및 그 제조 방법
KR101995682B1 (ko) 2011-03-18 2019-07-02 가부시키가이샤 한도오따이 에네루기 켄큐쇼 산화물 반도체막, 반도체 장치, 및 반도체 장치의 제작 방법
TWI545652B (zh) 2011-03-25 2016-08-11 半導體能源研究所股份有限公司 半導體裝置及其製造方法
US9012904B2 (en) 2011-03-25 2015-04-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US8956944B2 (en) 2011-03-25 2015-02-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US9219159B2 (en) * 2011-03-25 2015-12-22 Semiconductor Energy Laboratory Co., Ltd. Method for forming oxide semiconductor film and method for manufacturing semiconductor device
WO2012160963A1 (en) * 2011-05-20 2012-11-29 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
WO2013005380A1 (en) 2011-07-01 2013-01-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP5740270B2 (ja) * 2011-09-27 2015-06-24 株式会社東芝 薄膜トランジスタ、その製造方法、および表示装置
KR101912888B1 (ko) * 2011-10-07 2018-12-28 어플라이드 머티어리얼스, 인코포레이티드 아르곤 가스 희석으로 실리콘 함유 층을 증착하기 위한 방법들
KR102084274B1 (ko) 2011-12-15 2020-03-03 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
TWI584383B (zh) 2011-12-27 2017-05-21 半導體能源研究所股份有限公司 半導體裝置及其製造方法
JP5687638B2 (ja) * 2012-01-26 2015-03-18 株式会社東芝 表示装置の製造方法
TWI596778B (zh) * 2012-06-29 2017-08-21 半導體能源研究所股份有限公司 半導體裝置及半導體裝置的製造方法
US20140014948A1 (en) * 2012-07-12 2014-01-16 Semiconductor Energy Laboratory Co. Ltd. Semiconductor device
KR102022886B1 (ko) * 2012-12-28 2019-09-19 엘지디스플레이 주식회사 유기발광장치
US8981374B2 (en) 2013-01-30 2015-03-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP6475424B2 (ja) 2013-06-05 2019-02-27 株式会社半導体エネルギー研究所 半導体装置
JP2015036797A (ja) 2013-08-15 2015-02-23 ソニー株式会社 表示装置および電子機器
JP5770236B2 (ja) * 2013-09-18 2015-08-26 株式会社ジャパンディスプレイ 表示装置
KR102450562B1 (ko) 2014-03-13 2022-10-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 촬상 장치
KR102380829B1 (ko) 2014-04-23 2022-03-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 촬상 장치
JP6611521B2 (ja) * 2015-08-25 2019-11-27 三菱電機株式会社 薄膜トランジスタ及びアレイ基板
KR102617041B1 (ko) 2015-12-28 2023-12-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 장치, 텔레비전 시스템, 및 전자 기기
KR102624111B1 (ko) * 2016-01-13 2024-01-12 서울바이오시스 주식회사 자외선 발광소자
CN113948622B (zh) 2016-01-13 2024-11-29 首尔伟傲世有限公司 紫外线发光元件
JP6715312B2 (ja) * 2018-12-04 2020-07-01 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 表示装置

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3179287B2 (ja) 1993-12-28 2001-06-25 出光興産株式会社 導電性透明基材およびその製造方法
JPH09114398A (ja) 1995-10-24 1997-05-02 Idemitsu Kosan Co Ltd 有機ｅｌディスプレイ
JP4170454B2 (ja) 1998-07-24 2008-10-22 Ｈｏｙａ株式会社 透明導電性酸化物薄膜を有する物品及びその製造方法
US6559594B2 (en) * 2000-02-03 2003-05-06 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device
JP4089858B2 (ja) 2000-09-01 2008-05-28 国立大学法人東北大学 半導体デバイス
TWI247182B (en) * 2000-09-29 2006-01-11 Toshiba Corp Flat panel display device and method for manufacturing the same
CN100380673C (zh) * 2001-11-09 2008-04-09 株式会社半导体能源研究所 发光设备及其制造方法
US7042024B2 (en) * 2001-11-09 2006-05-09 Semiconductor Energy Laboratory Co., Ltd. Light emitting apparatus and method for manufacturing the same
CN1499643A (zh) * 2002-11-11 2004-05-26 友达光电股份有限公司 主动式有机发光显示器及其制造方法
US7381579B2 (en) * 2004-02-26 2008-06-03 Samsung Sdi Co., Ltd. Donor sheet, method of manufacturing the same, method of manufacturing TFT using the donor sheet, and method of manufacturing flat panel display device using the donor sheet
US7125758B2 (en) 2004-04-20 2006-10-24 Applied Materials, Inc. Controlling the properties and uniformity of a silicon nitride film by controlling the film forming precursors
JP4488184B2 (ja) 2004-04-21 2010-06-23 出光興産株式会社 酸化インジウム−酸化亜鉛−酸化マグネシウム系スパッタリングターゲット及び透明導電膜
CA2585063C (en) 2004-11-10 2013-01-15 Canon Kabushiki Kaisha Light-emitting device
JP5126729B2 (ja) 2004-11-10 2013-01-23 キヤノン株式会社 画像表示装置
US7791072B2 (en) 2004-11-10 2010-09-07 Canon Kabushiki Kaisha Display
KR100700643B1 (ko) * 2004-11-29 2007-03-27 삼성에스디아이 주식회사 보조 전극 라인을 구비하는 유기전계발광소자 및 그의제조 방법
JP4984416B2 (ja) 2005-03-31 2012-07-25 凸版印刷株式会社 薄膜トランジスタの製造方法
JP4873528B2 (ja) * 2005-09-02 2012-02-08 財団法人高知県産業振興センター 薄膜トランジスタの製造方法
JP4732080B2 (ja) * 2005-09-06 2011-07-27 キヤノン株式会社 発光素子
EP3614442A3 (en) 2005-09-29 2020-03-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having oxide semiconductor layer and manufactoring method thereof
JP5015471B2 (ja) * 2006-02-15 2012-08-29 財団法人高知県産業振興センター 薄膜トランジスタ及びその製法
JP5328083B2 (ja) * 2006-08-01 2013-10-30 キヤノン株式会社 酸化物のエッチング方法
JP4785721B2 (ja) * 2006-12-05 2011-10-05 キヤノン株式会社 エッチング方法、パターン形成方法、薄膜トランジスタの製造方法及びエッチング液
KR100787464B1 (ko) * 2007-01-08 2007-12-26 삼성에스디아이 주식회사 박막 트랜지스터, 및 그 제조방법
JP4934599B2 (ja) 2007-01-29 2012-05-16 キヤノン株式会社 アクティブマトリクス表示装置

Also Published As

Publication number Publication date
EP2084746B1 (en) 2017-06-07
EP3249694A1 (en) 2017-11-29
CN101548383A (zh) 2009-09-30
US8541944B2 (en) 2013-09-24
JP5105842B2 (ja) 2012-12-26
EP3249694B1 (en) 2020-02-26
KR20090095612A (ko) 2009-09-09
CN101548383B (zh) 2011-04-13
US20120168749A1 (en) 2012-07-05
US20100045179A1 (en) 2010-02-25
KR101126129B1 (ko) 2012-03-29
US8164256B2 (en) 2012-04-24
WO2008069286A2 (en) 2008-06-12
WO2008069286A3 (en) 2008-08-07
TW200847421A (en) 2008-12-01
JP2008141119A (ja) 2008-06-19
EP2084746A2 (en) 2009-08-05

Similar Documents

Publication Publication Date Title
TWI373133B (en) Display apparatus,production method thereof and a transistor
SG118411A1 (en) Display device and method for production thereof
GB2442259B (en) Display apparatus and method
GB0706318D0 (en) Display apparatus and method for operating a display apparatus
EP2023185A4 (en) PROCESS FOR THE PRODUCTION OF DISPLAY SCREEN, DISPLAY TOUCH MAKER AND DISPLAY TOUCH
EP2011069A4 (en) METHOD AND APPARATUS FOR SELECTING ADVERTISEMENTS
IS8918A (is) Method and apparatus for anhuydrous ammonia production
ZA201003528B (en) Data process device and data process method
AU2007319943A1 (en) Wellbore method and apparatus for completion, production and injection
EP1929097A4 (en) COMPLETION, PRODUCTION AND INJECTION DEVICE AND METHOD
ZA200810045B (en) A method and means for varying the content of a display
EP2064536A4 (en) DETECTION APPARATUS AND METHOD FOR A PRODUCTION CHAIN
PL2139670T3 (pl) Sposób oraz urządzenie do wytwarzania profilu z tworzywa sztucznego
EP1996299A4 (en) METHOD AND APPARATUS FOR PROJECTING AN OBJECT
EP2072070A4 (en) SUBSTRATE AND PROCESS FOR PRODUCTION THEREOF
TWI368990B (en) Display apparatus and method for making the same
PL2149247T3 (pl) Urządzenie, program komputerowy i sposób zapewnienia widgetów włącznie z reklamami powiązanych widgetów
EP1923418A4 (en) STAR POLYMER AND PROCESS FOR PRODUCTION THEREOF
GB2437304B (en) Apparatus and method for a hydrocarbon production facility
EP2201527A4 (en) METHOD AND DEVICE FOR CREATING A MOSAIC
EP2058290A4 (en) PROCESS FOR PRODUCTION OF PROPYLENE AND APPARATUS FOR PRODUCTION OF PROPYLENE
GB0610606D0 (en) Process and apparatus
ZA200810659B (en) A carried nano-catalyst and method for production thereof
TWI341481B (en) Apparatus, method, and system for representing a multimedia display
EP2271738A4 (en) MICROBIOLOGICAL PRODUCTION METHOD AND EQUIPMENT FOR USE